CN1794027A - Manufacturing method of optical fiber connector - Google Patents
Manufacturing method of optical fiber connector Download PDFInfo
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- CN1794027A CN1794027A CN 200510112240 CN200510112240A CN1794027A CN 1794027 A CN1794027 A CN 1794027A CN 200510112240 CN200510112240 CN 200510112240 CN 200510112240 A CN200510112240 A CN 200510112240A CN 1794027 A CN1794027 A CN 1794027A
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- joints
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- optical fibre
- femtosecond laser
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Abstract
A method for preparing optical fiber connector includes applying process of femtosecond laser shining and chemical processing to treat base plate surface of quarts glass, borate glass and micro crystal glass to work out V form micro channel or U form micro channel, then placing optical fiber in micro channel and using adhesive to fix a press - plate cover over on base plate.
Description
Technical field
The present invention relates to optical-fibre communications, is a kind of manufacture method of the joints of optical fibre of using in conjunction with the optical communication of femtosecond pulse irradiation and chemical treatment method.
Background technology
Up to now, the connector and the optical fiber array connector that be used for fixing optical fiber, connect between optical fiber and optical communication parts and optical fiber generally are machined into V-shaped groove on surfaces such as devitrified glass, silicon substrate, quartz glasss, or adopt ZrO
2Pottery is produced blank by using metal die, sintering then, and last machining forms aperture.The machining accuracy of V-shaped groove is ± 5 μ m, need carry out shape corrections through the cutting polishing for the precision that guarantees V-shaped groove, and operation is loaded down with trivial details, and production efficiency is low.In addition, use ZrO
2Pottery, the precision of distance is ± 2 μ m between the hole, owing to add the stress in man-hour, crystal structure changes to monoclinic system from tetragonal system in the sintering process, makes connector produce and expands, and influences dimensional accuracy.The joints of optical fibre and the optical-fiber array connector of these method preparations, though available bonding agent is reinforced behind the insertion optical fiber, operate fairly simple one side, but the precision of distance between borehole that the through hole in two above holes is arranged is shaped, the influence of all factors of sintering, process, and it is very difficult precision being controlled at below the 1 μ m.
Summary of the invention
The object of the invention is to overcome above-mentioned the deficiencies in the prior art, has proposed a kind of manufacture method of optical fiber array connector, and this method should have the characteristics that precision height, manufacturing process are simple and production cost is low of fiber array spacing.
This method does not need machining operations such as cutting polishing in manufacture process, precision is controlled by three-dimensional mobile platform, is easy to just the precision of pitch of holes to be controlled at below the 1 μ m.
Technical solution of the present invention is as follows:
By focusing on substrate surfaces such as irradiation scanning glass or pottery with femtosecond laser, and, form V word or U font groove through follow-up chemical corrosion.Optical fiber is put into microflute, adopt bonding agent that one pressing plate is covered and is fixed on the described substrate then, form the joints of optical fibre or optical fiber array connector, in the irradiation process of femtosecond laser, we have used high accuracy three-dimensional mobile platform (precision is 100nm), thereby can realize the size of groove and the precision of inter-alveolar distance are controlled in the 1 μ m.
The specific practice of the inventive method:
A kind of manufacture method of the joints of optical fibre is characterized in that comprising the following steps:
The substrate that 1. will be used to prepare the joints of optical fibre places a high accuracy three-dimensional mobile platform;
2. be radiated on the substrate of the described joints of optical fibre that are positioned at the focal plane after a femtosecond laser beam being focused on, drive three-dimensional mobile platform and described substrate is scanned, scan the lines that certain intervals is arranged by femtosecond laser beam;
3. femtosecond laser is scanned substrate immersion corrodes in hydrofluorite, forms V-arrangement microflute or U-shaped microflute;
4. in each the bar V-shaped groove of substrate or U-lag, place an optical fiber, adopt bonding agent that one pressing plate is covered and is fixed on the described substrate then, form the joints of optical fibre or optical fiber and be listed as old connector.
The mobile accuracy of described three-dimensional mobile platform is less than 1 μ m.
Described substrate is a devitrified glass, quartz glass, silicon or ZrO
2Stupalith is made the flat board of surface through polishing.
The average power of described femtosecond laser light beam is 5mW～400mW, and pulsed frequency is 10Hz～200KHz, and wavelength is 750nm～850nm.
The light spot focus of described femtosecond laser beam and the distance of upper surface of base plate are-10 μ m～10 μ m, and sweep velocity is 5 μ m/s～5mm/s.
Technique effect of the present invention:
The present invention is in conjunction with femtosecond laser irradiation and chemical treatment, can high precision puts into the V-type or the U type microflute of optical fiber at quartz glass, borosilicate, devitrified glass and transparent ceramic material surface formation energy.
This method does not need machining operations such as cutting polishing in manufacture process, precision is controlled by three-dimensional mobile platform, is easy to just the precision of pitch of holes to be controlled at below the 1 μ m.
The inventive method has the characteristics that precision height, manufacturing process are simple and production cost is low of fiber array spacing.
Description of drawings
The array line that Fig. 1 forms for femtosecond laser scanning back
The V-type microflute that Fig. 2 forms for hydrofluorite corrosion back
The synoptic diagram of Fig. 3 in the V-type microflute, putting into optical fiber and fixing with pressing plate
Among the figure: 1-substrate, 2-V type microflute, 3-optical fiber, 4-sweep trace, 5-pressing plate
Embodiment
The invention will be further described below in conjunction with drawings and Examples, but should not limit protection scope of the present invention with this.
See also Fig. 1 and Fig. 2 earlier, the manufacture method of the joints of optical fibre of the present invention comprises the following steps:
The substrate 1 that 1. will be used to prepare the joints of optical fibre places a high accuracy three-dimensional mobile platform;
2. be radiated on the substrate of the described joints of optical fibre that are positioned at the focal plane after a femtosecond laser beam being focused on, drive three-dimensional mobile platform and described substrate is scanned, scan the lines that certain intervals is arranged, as shown in Figure 1 by femtosecond laser beam;
3. femtosecond laser is scanned substrate immersion corrodes in hydrofluorite, forms V-arrangement microflute or U-shaped microflute, as shown in Figure 2;
4. in each the bar V-shaped groove of substrate or U-lag, place an optical fiber, adopt bonding agent that one pressing plate is covered and is fixed on the described substrate then, form the joints of optical fibre or optical fiber and be listed as old connector, as shown in Figure 3.
This method obtains the microflute of difformity and size by the parameters (average power, pulsed frequency, wavelength etc.) of control femtosecond laser, the position (distance that refers to focus point and quartz glass surface) of femtosecond laser focus point, the sweep velocity (translational speed that refers to three-dimensional platform) of laser and the amasthenic lens that uses different multiplying.Specific requirement is as follows:
The average power of femtosecond laser is: 5mW～400Mw, pulsed frequency is: 10Hz～200KHz, wavelength: 750nm～850nm.
The position of femtosecond laser focus point: the distance of focus point and substrate surface is-10 μ m (surface is following)～10 μ m (more than the surface).
Sweep velocity: 5 μ m/s～5000 μ m/s.
Amasthenic lens: 2 *～100 *.
Be embodiment below:
Embodiment 1:
With 5mW, pulsed frequency be 10Hz, wavelength be the femtosecond laser of 800nm through 100 * lens focus to 10 μ m places are on polishing substrate the surface more than, scan 10 lines that are spaced apart 200 μ m of formation with 5 μ m/s.Be immersed in then in the hydrofluoric acid solution of 4wt%, and apply ultrasound wave and take out after 1 hour and examine under a microscope, show to have formed V font groove, and the dimensional accuracy between groove is 200 ± 0.4 μ m.Put into optical fiber in groove, pressing plate and the bonding agent of using identical material with substrate to do are fixed optical fiber, pressing plate and substrate, form the connector that optical communication is used.
Embodiment 2:
With 200mW, pulsed frequency be 1kHz, wavelength be the femtosecond laser of 750nm through 50 * lens focus to the polishing substrate surface, form 10 lines that are spaced apart 200 μ m with 100 μ m/s scanning.Be immersed in then in the hydrofluoric acid solution of 4wt%, and apply ultrasound wave and take out after 1 hour and examine under a microscope, show to have formed V font groove, and the dimensional accuracy between groove is 200 ± 0.4 μ m.Put into optical fiber in groove, pressing plate and the adhesive securement of using identical material with substrate to do form the connector that optical communication is used.
Embodiment 3:
With 400mW, pulsed frequency be 200kHz, wavelength be the femtosecond laser of 850nm through 5 * lens focus to the 10 μ m places polishing substrate surface below, scan 10 lines that are spaced apart 200 μ m of formation with 5000 μ m/s.Be immersed in then in the hydrofluoric acid solution of 4wt%, and apply ultrasound wave and take out after 1 hour and examine under a microscope, show to have formed U font groove, and the dimensional accuracy between groove is 200 ± 0.4 μ m.Put into optical fiber in groove, pressing plate and the adhesive securement of using identical material with substrate to do form the connector that optical communication is used.
Embodiment 4:
With 100mW, pulsed frequency be 100Hz, wavelength be the femtosecond laser of 775nm through 5 * lens focus to 10 μ m below the polishing substrate surface, form 50 lines that are spaced apart 500 μ m with 500 μ m/s scanning, be immersed in the hydrofluoric acid solution of 4wt% then and apply ultrasound wave and examine under a microscope after 10 minutes and formed U font groove, and the dimensional accuracy between groove is 500 ± 1 μ m.Put into optical fiber in groove, pressing plate and the adhesive securement of using identical material with substrate to do form the connector that optical communication is used.
Claims (5)
1. the manufacture method of joints of optical fibre is characterized in that comprising the following steps:
The substrate (1) that 1. will be used to prepare the joints of optical fibre places a high accuracy three-dimensional mobile platform;
2. be radiated on the substrate (1) of the described joints of optical fibre that are positioned at the focal plane after a femtosecond laser beam being focused on, drive three-dimensional mobile platform and described substrate is scanned, scan the lines (4) that certain intervals is arranged by femtosecond laser beam;
3. femtosecond laser is scanned substrate immersion corrodes in hydrofluorite, forms V-arrangement microflute (2) or U-shaped microflute;
4. in each the bar V-shaped groove of substrate or U-lag (2), place an optical fiber (3), adopt bonding agent that one pressing plate (5) is covered and is fixed on the described substrate (1) then, form the joints of optical fibre or optical fiber and be listed as old connector.
2, the manufacture method of the joints of optical fibre according to claim 1, the mobile accuracy that it is characterized in that described three-dimensional mobile platform is less than 1 μ m.
3, the manufacture method of the joints of optical fibre according to claim 1 is characterized in that described substrate is a devitrified glass, quartz glass, silicon or ZrO
2Stupalith is made the flat board of surface through polishing.
4, the manufacture method of the joints of optical fibre according to claim 1, its feature is 5mW～400mW in the average power of described femtosecond laser light beam, and pulsed frequency is 10Hz～200KHz, and wavelength is 750nm～850nm.
5, the manufacture method of the joints of optical fibre according to claim 4, the light spot focus of described femtosecond laser beam and the distance of upper surface of base plate are-10 μ m～10 μ m, and sweep velocity is 5 μ m/s～5mm/s.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2005101122401A CN100354670C (en) | 2005-12-29 | 2005-12-29 | Manufacturing method of optical fiber connector |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2005101122401A CN100354670C (en) | 2005-12-29 | 2005-12-29 | Manufacturing method of optical fiber connector |
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| Publication Number | Publication Date |
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| CN1794027A true CN1794027A (en) | 2006-06-28 |
| CN100354670C CN100354670C (en) | 2007-12-12 |
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Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102491649A (en) * | 2011-11-16 | 2012-06-13 | 中国科学院上海光学精密机械研究所 | Preparation method for anti-reflective glass |
| CN102513700A (en) * | 2011-11-03 | 2012-06-27 | 西安交通大学 | Method for forming three-dimensional micro spiral channel inside quartz glass by using femto-second laser |
| CN103424816A (en) * | 2013-08-12 | 2013-12-04 | 天津中讯光普科技有限公司 | Butt tooling and butt method for PDF (praseodymium-doped fiber) and ordinary optical fiber |
| CN104215270A (en) * | 2013-05-31 | 2014-12-17 | 中自高科（苏州）光电有限公司 | All-fiber sensor machined by femtosecond laser pulse sequence and production method of all-fiber sensor |
| WO2016065964A1 (en) * | 2014-10-31 | 2016-05-06 | 江苏亨通光网科技有限公司 | Planar waveguide c-shaped groove substrate |
| CN109696728A (en) * | 2017-10-20 | 2019-04-30 | 凌国基 | Optical fiber connector and its collecting structure |
| CN113097857A (en) * | 2021-03-31 | 2021-07-09 | 三序光学科技(苏州)有限公司 | Multi-wavelength composite wave light source device and manufacturing method thereof |
| CN113097856A (en) * | 2021-03-31 | 2021-07-09 | 三序光学科技(苏州)有限公司 | Multi-wavelength point light source device and manufacturing method thereof |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5656186A (en) * | 1994-04-08 | 1997-08-12 | The Regents Of The University Of Michigan | Method for controlling configuration of laser induced breakdown and ablation |
| CN1061144C (en) * | 1998-02-24 | 2001-01-24 | 华中理工大学 | Optical-fiber bundle array device and its making technique |
| SE513575C2 (en) * | 1999-02-19 | 2000-10-02 | Ericsson Telefon Ab L M | Method and apparatus for passively aligning at least one optical fiber to at least one optical device |
| JP2005257719A (en) * | 2004-03-09 | 2005-09-22 | Nippon Telegr & Teleph Corp <Ntt> | Waveguide manufacturing method |
-
2005
- 2005-12-29 CN CNB2005101122401A patent/CN100354670C/en active Active
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102513700A (en) * | 2011-11-03 | 2012-06-27 | 西安交通大学 | Method for forming three-dimensional micro spiral channel inside quartz glass by using femto-second laser |
| CN102513700B (en) * | 2011-11-03 | 2015-04-15 | 西安交通大学 | Method for forming three-dimensional micro spiral channel inside quartz glass by using femto-second laser |
| CN102491649A (en) * | 2011-11-16 | 2012-06-13 | 中国科学院上海光学精密机械研究所 | Preparation method for anti-reflective glass |
| CN104215270A (en) * | 2013-05-31 | 2014-12-17 | 中自高科（苏州）光电有限公司 | All-fiber sensor machined by femtosecond laser pulse sequence and production method of all-fiber sensor |
| CN103424816A (en) * | 2013-08-12 | 2013-12-04 | 天津中讯光普科技有限公司 | Butt tooling and butt method for PDF (praseodymium-doped fiber) and ordinary optical fiber |
| WO2016065964A1 (en) * | 2014-10-31 | 2016-05-06 | 江苏亨通光网科技有限公司 | Planar waveguide c-shaped groove substrate |
| CN109696728A (en) * | 2017-10-20 | 2019-04-30 | 凌国基 | Optical fiber connector and its collecting structure |
| CN113097857A (en) * | 2021-03-31 | 2021-07-09 | 三序光学科技(苏州)有限公司 | Multi-wavelength composite wave light source device and manufacturing method thereof |
| CN113097856A (en) * | 2021-03-31 | 2021-07-09 | 三序光学科技(苏州)有限公司 | Multi-wavelength point light source device and manufacturing method thereof |
Also Published As
| Publication number | Publication date |
|---|---|
| CN100354670C (en) | 2007-12-12 |
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| C14 | Grant of patent or utility model | ||
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| EE01 | Entry into force of recordation of patent licensing contract |
Assignee: Middle an ancient unit of weight science and technology (Shenzhen) company limited Assignor: Shanghai Optical Precision Machinery Inst., Chinese Academy of Sciences Contract fulfillment period: 2008.2.15 to 2013.2.14 contract change Contract record no.: 2009440001448 Denomination of invention: Manufacturing method of optical fiber connector Granted publication date: 20071212 License type: Exclusive license Record date: 2009.9.11 |
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| LIC | Patent licence contract for exploitation submitted for record |
Free format text: EXCLUSIVE LICENSE; TIME LIMIT OF IMPLEMENTING CONTACT: 2008.2.15 TO 2013.2.14; CHANGE OF CONTRACT Name of requester: ZHONGYUN SCIENCE AND TECHNOLOGY( SHENZHEN ) CO., L Effective date: 20090911 |