CN1793815A - Abrasion monitoring system of conveying device and its method - Google Patents
Abrasion monitoring system of conveying device and its method Download PDFInfo
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- CN1793815A CN1793815A CN 200610051319 CN200610051319A CN1793815A CN 1793815 A CN1793815 A CN 1793815A CN 200610051319 CN200610051319 CN 200610051319 CN 200610051319 A CN200610051319 A CN 200610051319A CN 1793815 A CN1793815 A CN 1793815A
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Abstract
A method for monitoring abrasion of conveying device includes obtaining an abrasion critical value, utilizing a vibration transducer to measure a preset position when conveying device is on operation to obtain an operation measurement value, comparing obtained value to abrasion critical value for judging whether conveying device is required to be shutdown for inspection or not and shutting conveying device down for inspection if measured value is greater than abrasion critical value.
Description
Technical field
The invention relates to the monitoring system and the method thereof of the abrasion of a kind of conveyer, and particularly relevant for a kind of monitoring system and method thereof that is used for the conveyer abrasion that substrate transports.
Background technology
Plant equipment is to be formed by part miscellaneous institute structure dress, and part generally is divided into abrasivity part and permanance part.Part all has a fixing term of life, and the term of life of abrasivity part is generally speaking shorter, and the term of life of permanance part is longer.Certainly, part permanance part all do not need to change till can use plant equipment always and scraps.
If plant equipment constantly turns round, the speed of loss of nature might change, and quickens or eases up, and decides with operating conditions.Whether this will be changed to be installed in part on the plant equipment, can't directly judge in other words, have only and can judge just after part is pulled down whether this part has reached the wear intensity that must change not dismantling under the situation that whole board comprises enclosing cover.
In various high-tech manufacture crafts, for example the wafer of semiconductor fabrication process transmits or shows that the display panel substrate of liquid crystal manufacture craft transmits, all use conveyer, and the composition of conveyer inside is made of deft design and the close transmission component of interactive relationship normally.Therefore, requirement for the time point of the part exchanging on the transfer equipment is rigorous especially, because not only these substrates is very worthy, if just take place because of conveyer inner body excessive loss shuts down or undesired running in manufacture craft midway, the manufacture craft that it caused is stopped and more can be allowed the fabricator suffer very big loss.
Therefore need a kind of preventing in manufacture craft, excessively cause working as the solution of machine because of the part abrasion of conveyer.
Summary of the invention
Therefore one object of the present invention is to provide a kind of monitoring system and method thereof of conveyer abrasion, avoids taking place during manufacture craft the machine of working as suddenly that excessively causes because of wearing away.
Another object of the present invention is to provide a kind of monitoring system and method thereof of conveyer abrasion, in order to the health status of monitoring and grasp conveying machine part.
Another purpose of the present invention is to provide a kind of monitoring system and method thereof of conveyer abrasion, in order to the abrasion state of prediction conveyer inner body, with renewal part in advance, reaches manufacture craft operation the most smoothly.
According to above-mentioned purpose of the present invention, a kind of monitoring system and method thereof of conveyer abrasion proposed.The monitoring method of conveyer abrasion comprises that obtaining one wears away critical value; Utilize the vibration in vibration transducer point measurement one precalculated position when transmits, to obtain a running measured value; And relatively operate measured value and abrasion critical value, and whether must shutdown inspection with decision, wherein when this running measured value during more than or equal to the abrasion critical value, must the execution shutdown inspection.
According to one embodiment of the present invention, the abrasion critical value is defined by the following step.Activate conveyer, wherein the transmission part of conveyer is to use for the first time; Utilize the vibration in vibration transducer point measurement precalculated position when transmitting, obtaining a test period measured value, and record test period measured value; When conveyer decommissions because of abrasion, peaked 80% to define the abrasion critical value in a plurality of test period measured values.
The precalculated position is selected on the motor cabinet, and step relatively is to utilize a signal process device to carry out.One or its combination that the monitoring method of conveyer abrasion can also comprise the following steps: when operating measured value greater than the abrasion critical value, send alerting with signal process device, carry out the early warning action to activate the automatic early-warning device, will operate measured value and export display unit to, draw the time-sequence curve chart of running measured value or transmit and operate measured value, carry out remote monitoring to remote computer system.
The abrasion monitoring system of conveyer of the present invention comprises a vibration transducer, measure the vibration state of conveyer, corresponding output one vibration signal, with abrasion state, a signal process device of representing conveyer by vibration state, gather the vibration signal of a transmission time point, and handle the vibration signal and become a digital signal and a display unit, receive and demonstrate digital signal.
In a preferred embodiment, signal process device comprises an analog-digital converter, a processor and a storage element, analog-digital converter and vibration transducer electrically connect, receive and change the analog signal that vibration transducer produced and become a digital signal, processor receives digital signal and carries out signal and handle, the storage unit stores digital signal is with construction one monitor database.
Therefore; application the present invention will make to be needed to check that with the manpower frequent shutdown mode of conveying machine is improved traditionally; predict and assess the abrasion that transmit part by observing in the vibration values of a selected specific time point; have beyond thought especially effect for manufacture craft, greatly promote the smooth-going degree and the fiduciary level of manufacture craft running as semiconductor or display panel field.
Description of drawings
For above and other objects of the present invention, feature, advantage and embodiment can be become apparent, being described in detail as follows of accompanying drawing:
Fig. 1 is the process flow diagram according to a preferred embodiment of the monitoring method of conveyer abrasion of the present invention.
Fig. 2 A illustrates the application configuration figure according to a preferred embodiment of the abrasion monitoring system of conveyer of the present invention.
Fig. 2 B illustrates the system block diagrams according to a preferred embodiment of the abrasion monitoring system of conveyer of the present invention.
The primary clustering symbol description
102a～114: step
200: abrasion monitoring system 202: vibration transducer
204: signal process device 206: display unit
208: remote computer system 210: the drawing unit
212: network 214: the automatic early-warning device
220: conveyer 222: motor
224: shaft coupling 226: motor cabinet
228: gearing shaft 230: gear
232: substrate transmission shaft 242: analog-digital converter
244: processor 246: storage element
Embodiment
The present invention discloses a kind of monitoring system and method thereof of conveyer abrasion, utilize the vibration survey mode to assess and predict the abrasion situation of conveyer part, exempt complicated manpower and checked the necessity of board, thereby guarantee that manufacture craft operates in mode the most smoothly, can not meet with the unexpected machine of working as.
With reference to Fig. 1, it illustrates the process flow diagram according to a preferred embodiment of the monitoring method of conveyer abrasion of the present invention.The method of abrasion monitorings comprises: obtain an abrasion critical value, utilize the vibration in vibration transducer point measurement one precalculated position when transmits; to obtain a running measured value and relatively to operate measured value and abrasion critical value; whether must shutdown inspection with decision; wherein when operating measured value, must carry out shutdown inspection more than or equal to the abrasion critical value.
In a preferred embodiment, the monitoring method of conveyer abrasion may further comprise the steps.Among the step 102a, activate conveyer, wherein the part of conveyer is to use for the first time.At first at a conveyer each position part is changed for the first time and used, just brand-new part makes the state entry into service of conveyer with brand-new use.
Among the step 102b, use the vibration in a vibration transducer a certain precalculated position of point measurement when transmits.In general semiconductor or display panels manufacture craft, when utilizing conveyer to transport substrate, one completely transports action and may be distinguished into several step stage, and its step stage number of different manufacture craft is also variant.For example one is completely transported action and can comprise that substrate imports the stage into, transmits the decelerating phase, vibration is waved stage, middle stop phase and acceleration and spread out of the stage.Different transporting the stage, promptly to be convenient to same position and also can to produce different vibrational states, this is the event that has nothing in common with each other because of the severe degree of moving.
Therefore selected one specific stage was fixed the time point of monitoring as one, was called the transmission time point.In the process that robotization is transported, there is the cycle that is close in fixing in each transfer step stage, and just to transport action be through design and definition basically for each substrate complete.For example, a substrate opens moment beginning in the stage of importing into, with stage of importing into of next substrate open moment beginning all have one fixing after.In the case, the mode that a specific time point is chosen in utilization of the present invention detects vibrational state, to obtain same comparison basis.
Use vibration transducer in a selected time point and a selected position, measure the vibration values of conveyer, be called the test period measured value; And measured test period measured value noted.Measuring position selected for example be near the motor cabinet of motor, perhaps on transmission shaft, but be not limited to this two.Under the convenience of consideration sensor installing and the environment for use of safety, be vibration transducer to be installed in the present embodiment in motor cabinet.
The action that continues to carry out the conveyer running and measure is with a test period, all note at a plurality of measured values of same transmission time point.
Among the step 102c, above-mentioned steps lasts till that conveyer decommissions because of abrasion, finds out the maximum from a plurality of measured values that write down, and is multiplied by a safety coefficient to define the abrasion critical value.This safety coefficient is looked different manufacture craft demands and is determined.Generally speaking, if this coefficient is more little, with the time interval that makes device from entry into service to shutdown inspection short more, but also can guarantee the fiduciary level of device running.This safety coefficient for example be 70%, 80%, 90%, 95% or this scope in numerical value.
Above-mentionedly obtain wearing away in the step of critical value, can also another kind of mode determine the abrasion critical value.After obtaining a plurality of test period measured values, also comprise and draw overture line chart for the moment, promptly draw out whole test period, the distributions curve of test period measured value.In curve map, transverse axis is a moment axle, and the longitudinal axis is represented vibration values.
In an embodiment, in advance to the assembling new parts board carry out vibration survey, and the record measure for the first time vibration values, be called initial measurement.Through test repeatedly, measured initial measurement is 4 or 5, and the measured value that board is worked as machine because of abrasion is 20 or 21.Therefore 3～4 times empirical value can choosing initial measurement is as the abrasion critical value under the same system running.
In the step 104, after obtaining wearing away critical value, in the manufacture craft of general normal operation, utilize vibration transducer to measure the same selected transmission time point and the vibrational state of same select location, be called the running measured value.After this just continue to detect and the monitoring conveyer.
In the step 106, compare according to measured running measured value that obtains and abrasion critical value, judging whether must shutdown inspection.When detect more than or equal to abrasion critical value the running measured value time, just carry out the action of shutdown inspection.This step relatively can be utilized a signal process device to reach and save manpower and the effect of time.
When the step of above-mentioned comparison more can be included in the running measured value greater than the abrasion critical value, utilize signal process device to send an alerting, this alerting makes it carry out early warning action in order to trigger an automatic early-warning device that electrically connects with signal process device.The early warning action can design according to asking, and for example is to stop the running of conveyer or send caution sound or activation caution cresset.
One of can also comprise the following steps or its combination in the monitoring method of abrasion.Step 108 will operate measured value and export a display unit to, for inspecting reference.For example utilize signal process device that vibration information is shown in a cathode-ray tube display or liquid crystal panel displays.
Step 112, record running measured value, and draw the time-sequence curve chart that operates measured value.For example utilize signal process device to connect a drawing unit, draw timing curve at same transmission time point, wherein timing curve has shown conveyer in the running course, the trend of measured vibrational state, that is represent the abrasion trend of the transmission part of device inside.Just can judge the present health status of transmission part easily according to trend curve figure, sizable help be arranged for early diagnosis and prevention.
With reference to figure 2A and Fig. 2 B.Fig. 2 A illustrates the application configuration figure according to abrasion monitoring system one preferred embodiment of conveyer of the present invention, show the position distribution of abrasion monitoring system 200 among the figure, transmit part and comprise for example substrate transmission shaft 232, gear 230, gearing shaft 228, shaft coupling 224, motor 222 and motor cabinet 226 with respect to the conveyer 220 that comprises a plurality of transmission parts.Fig. 2 B illustrates the system block diagrams according to abrasion monitoring system one preferred embodiment of conveyer of the present invention.Abrasion monitoring system 200 involving vibrations sensors 202, signal process device 204 and the display unit 206 of conveyer of the present invention.
Vibration transducer 202 is in order to the vibration state of measurement conveyer 220, and corresponding output one vibration signal, to represent the abrasion state of conveyer 220 by vibration state.Signal process device 204 electrically connects with vibration transducer 202, transmits the vibration signal of time point in order to gather one, and handles the vibration signal and become a digital signal.Display unit 206 electrically connects with signal process device 204, in order to receive and to show digital signal from signal process device 204.
In a preferred embodiment, the abrasion monitoring system of conveyer of the present invention is applied to the conveyer of a display panel substrate.One vibration transducer 202 is installed on the motor cabinet 226 that coats shaft coupling 224.
At this, what must pay special attention to is, it can be an action that continues that vibration transducer 202 is carried out the behavior of measuring, and perhaps carries out the measurement of one-period property at specific time point, looks the user fully and must ask and determine.
When vibration transducer 202 operates in the mode of test constantly, can be by the measured value of signal process device 204 all time points of record, gather especially at the measured value of specific time point again simultaneously, and it is recorded in special separate portions, to draw time-sequence curve chart at a specific time point; Or only the measured value of all time points is all noted, as a historical record, be stored in database.
During practical operation, all being transmitted part exchanging earlier before abrasion monitoring system 200 runnings is the new product that uses for the first time, activate conveyer 220 again transporting substrate, and measure vibration values in conveyer 220 runnings to be installed in accelerometer on the motor cabinet 226.Wait for when abrasion that conveyer 220 transmits part because of inside shut down, select a specific transmission time point, all are come out at measured value data collections that this transmits time point, with of numerical value maximum wherein as a reference value.
Again this reference value is multiplied by a safety coefficient, the value of gained is promptly as the abrasion critical value.The decision system of safety coefficient is according to different demands, for example 60% to 95% number percent.Selected number percent is more little, and conveyer can be checked more in early days, renewal part, and device is comparatively reliable on using; But choose the cycle that high more number percent then can elongate inspection, renewal part, make manufacture craft because of checking and change and cause the number of times of operation interrupted less, and can make full use of the life-span of transmitting part.
In this example, vibration transducer uses the accelerometer of IMI SENSORS company, model 641B01; Analog-digital converter uses the digital-to-analogue conversion module of MITSUBISHI, model Q64A-D.Processor uses the product of MITSUBISHI, and model is Q25HCPU.Certainly, on the practice, can freely select suitable electronic installation for use, not as limit.
At first the conveyer 220 that is equipped with the transmission part that uses is for the first time measured an original state measured value, about 7 to 8.As ready goes to conveyer 220 when stopping, and the maximum about 14 to 15 in the numerical value of measuring.
After obtaining an abrasion critical value, the substrate that then just can carry out general manufacture craft operation transports action.Utilize accelerometer to continue to monitor the vibrational state of conveyer 220 simultaneously, observe the variation situation that is presented on the measurement numerical value on the display unit 206.When the numerical value of measuring in the device operation arrives the abrasion critical value, just carry out the action of shutdown inspection, even can be decided by renewal part this moment, guarantee follow-up safe handling.
By the invention described above preferred embodiment as can be known, use the present invention and have following advantage.Utilize the monitoring system and the method for conveyer abrasion of the present invention, avoided the potential problems that conveyer is shut down excessively suddenly because of the part abrasion between the manufacture craft on-stream period, also can fully grasp the situation that transmits the part abrasion.Therefore not only can keep a manufacture craft operation smoothly, more can make full use of the serviceable life of part, between the two, obtain flexible balance.
In addition, the present invention more helps to reduce the number of times of conveying machine maintenance overhaul, because the action of maintenance overhaul labor intensive not only, also and then reduce the productive rate of manufacture craft.Therefore the present invention has promoted the manufacture craft efficiency of operating really.The function that cooperates automatic early-warning or remote monitoring makes that also the allocative efficiency of human resources obtains lifting in the factory.
Though the present invention with preferred embodiment openly as above; right its is not in order to qualification the present invention, any insider, without departing from the spirit and scope of the present invention; when can being used for a variety of modifications and variations, so protection scope of the present invention is as the criterion when looking claims person of defining.
Claims (10)
1. the monitoring method of conveyer abrasion is applicable to a conveyer, comprises at least:
Obtain an abrasion critical value;
Utilize a vibration in vibration transducer point measurement one precalculated position when transmits, to obtain a running measured value; And
Relatively should running measured value and this abrasion critical value, whether must shutdown inspection with decision, wherein when this running measured value during more than or equal to this abrasion critical value, palpus execution shutdown inspection.
2. method according to claim 1 is characterized in that, this step that obtains an abrasion critical value comprises at least:
Activate this conveyer, wherein the transmission part of this conveyer is to use for the first time;
Utilize a vibration in this vibration transducer this precalculated position of point measurement when this transmission, obtaining a test period measured value, and write down this test period measured value; And
When this conveyer decommissions because of abrasion, peaked 80% to define this abrasion critical value in those test period measured values.
3. method according to claim 1 is characterized in that, this precalculated position is a motor cabinet or a transmission shaft.
4. method according to claim 1 is characterized in that, this transmission time point is that substrate imports the stage into, transmits the decelerating phase, vibration wave stage, middle stop phase and acceleration spread out of the stage one of them.
5. method according to claim 1 is characterized in that, the step of this comparison is to utilize a signal process device to carry out, and the step of this comparison also comprises:
When this running measured value wears away critical value greater than this, send an alerting with this signal process device, carry out early warning action to activate an automatic early-warning device.
6. method according to claim 1 is characterized in that, this step that obtains an abrasion critical value comprises at least:
Activate this conveyer, wherein the transmission part of this conveyer is to use for the first time;
Utilize this vibration transducer one vibration in this precalculated position to be measured for the first time, to obtain an initial measurement in this transmission time point; And
With three or four times of this initial measurement as this abrasion critical value.
7. the abrasion monitoring system of a conveyer is applicable to a conveyer, comprises at least:
One vibration transducer is measured a vibration state of this conveyer, and corresponding output one vibration signal is to represent an abrasion state of this conveyer by this vibration state;
One signal process device is gathered one and is transmitted this vibration signal of time point, and handles this vibration signal and become a digital signal; And
One display unit receives and demonstrates this digital signal.
8. abrasion monitoring system according to claim 7, it is characterized in that, this signal process device comprises an analog-digital converter, a processor and a storage element, this analog-digital converter and this vibration transducer electrically connect, receive and change the analog signal that this vibration transducer produces and become a digital signal, this processor receives this digital signal and carries out signal and handle, and this digital signal of this storage unit stores is with construction one monitor database.
9. abrasion monitoring system according to claim 7 is characterized in that, also comprises an automatic early-warning device, connects this signal process device, and when this signal process device sends an alerting, this automatic early-warning device receives this alerting and carries out early warning action.
10. abrasion monitoring system according to claim 7 is characterized in that, this vibration transducer is positioned at a motor cabinet or a transmission shaft.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200610051319 CN1793815A (en) | 2006-01-05 | 2006-01-05 | Abrasion monitoring system of conveying device and its method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200610051319 CN1793815A (en) | 2006-01-05 | 2006-01-05 | Abrasion monitoring system of conveying device and its method |
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| Publication Number | Publication Date |
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| CN1793815A true CN1793815A (en) | 2006-06-28 |
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| CN 200610051319 Pending CN1793815A (en) | 2006-01-05 | 2006-01-05 | Abrasion monitoring system of conveying device and its method |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103308305A (en) * | 2013-06-04 | 2013-09-18 | 中国航空动力机械研究所 | Gear fault diagnosis device and method |
| CN109725555A (en) * | 2017-10-30 | 2019-05-07 | 台湾积体电路制造股份有限公司 | Manufacture condition monitoring method, semi-conductor manufacturing system and its monitoring method of board |
-
2006
- 2006-01-05 CN CN 200610051319 patent/CN1793815A/en active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103308305A (en) * | 2013-06-04 | 2013-09-18 | 中国航空动力机械研究所 | Gear fault diagnosis device and method |
| CN103308305B (en) * | 2013-06-04 | 2016-08-10 | 中国航空动力机械研究所 | gear fault diagnosis device and method |
| CN109725555A (en) * | 2017-10-30 | 2019-05-07 | 台湾积体电路制造股份有限公司 | Manufacture condition monitoring method, semi-conductor manufacturing system and its monitoring method of board |
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