CN1788366A - Piezoelectric composites and methods for manufacturing same - Google Patents
Piezoelectric composites and methods for manufacturing same Download PDFInfo
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- CN1788366A CN1788366A CN 200480013162 CN200480013162A CN1788366A CN 1788366 A CN1788366 A CN 1788366A CN 200480013162 CN200480013162 CN 200480013162 CN 200480013162 A CN200480013162 A CN 200480013162A CN 1788366 A CN1788366 A CN 1788366A
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Abstract
A method is described for making a composite, such as a piezoelectric composite, having a predetermined volume ratio. Initially, a pair of base slabs are diced to form slot having uniform pitch spacing such that a material portion of one diced base slab may be received within the slots of another diced base slab. The diced base slabs are interdigitated and joined to form a first piezoelectric composite that can subsequently be diced to form slots having a uniform pitch spacing that are spaced from the first slots. Two diced first piezoelectric composites are interdigitated and joined to form a second piezoelectric composite of reduced volume ratio and finer pitch.
Description
The application requires U.S. Provisional Application the 60/470th submission on May 14th, 2003, that be entitled as " method and this composite material that manufacturing is used for the piezo-electricity composite material of ultrasonic applications ", No. 235 priority and interests, this application mode is by reference all included in the presents.
Background of invention
Invention field
The present invention relates to piezo-electricity composite material, more specifically, relate to piezo-electricity composite material that is used for high-frequency ultrasound applications and the method for making this composite material.
Background technology
Usually, the high-quality medical imaging uses ultrasonic transducer or the transducer array with excellent sensitivity and wide frequency band performance.Adopt monolithic piezoelectric material, lead zirconate titanate (" PZT ") for example, conventional transducer between the tested media of transducer and for example water, tissue and analog, show bigger acoustic impedance mismatch usually.In order to overcome this problem, advised using by for example as the polymer substrate of epoxy resin around and the piezo-electricity composite material made of the single little piezoelectric unit of isolating.These little piezoelectric units of advising are in the important effect of the development play more and more of the ultrasonic transducer that is used for medical imaging.The most frequently used structures of piezoelectric composite is made of little tape of PZT in the host matrix that is embedded in polymeric material (host matrix) or post.The height of tape or post is generally the only about half of of wavelength under the operating frequency.
Be used to make the conventional method of piezo-electricity composite material, " cutting and filling " method originates in the entire plate of piezoelectric.Use cast-cutting saw with in groove or the cut channel incision plate.For example using then, the material of main part of epoxy resin is full of groove.By making the two-dimensional piezoelectric composite material of forming by post and host matrix at two orthogonal direction cutting piezoelectric boards.
Volume ratio influences the characteristic of piezo-electricity composite material, for example coupling coefficient, speed, acoustic impedance and similar characteristics, described volume ratio is a ceramic volumetric and the ratio of integral composite, and under the situation of the 1-3 of routine and 2-2 composite material, it is generally equal to the ratio of ceramic width and pitch size.Therefore, change volume ratio and make the customizable piezo-electricity composite material that is used for desired transducer application/design.Unfortunately, in " cutting and filling " method of routine, the size of groove/cut channel is by the thickness decision of saw blade.When pitch size fixedly the time, be difficult to make the composite material of designated volume ratio.Usually, change volume ratio by the saw blade that uses different-thickness, but volume ratio still is subjected to the restriction of alternative saw blade thickness, especially when groove/cut channel to be cut is fine size.
Summary of the invention
On the one hand, the invention provides a kind of practicable method that is used to make the composite material/array of arbitrary volume ratio, particularly make the practicable method of the uniform fine size composite material/array of frequency applications.
According to an aspect of the present invention, form the piezoelectric composite/array of any arbitrary volume ratio by the displacement cutting process.First and second piezoelectric substrate are provided.Originally, cut the upper surface of each piezoelectric substrate to form the parallel convex tendon array of opening by the array spacings of parallel slot.The width of each groove and the degree of depth are predetermined.Subsequently first and second substrates are intersected (interdigitated) and link together.Because the width of each muscle is less than the width of each groove, so when substrate intersects, form first slit that the usable polymers material is full of.The not cutting tip of removing a substrate is to form first interdigitated piezoelectric composite slab.
Subsequently, in displacement cutting step, same pitch and groove size cut each first interdigitated piezoelectric composite slab when using with cutting on former piezoelectric substrate.Cutting position in this displacement cutting step is shifted one section distance that equals a muscle width part on Width.Remaining second muscle will be made up of with a certain ratio piezoelectric and polymer packing material, and this ratio is determined by the translocation distance of cutting operation.Form two described first interdigitated piezoelectric composite slab, then by in second groove of they being placed Face to face and second muscle of one first interdigitated piezoelectric composite slab is inserted another first interdigitated piezoelectric composite slab they being intersected.Because the width of each second muscle is less than the width of each second groove, so when first interdigitated piezoelectric composite slab is intersected, form second slit that the usable polymers material is full of.Can remove not cutting tip on the one or both sides of cross board by polishing or correct grinding.Can produce the even composite material/array of arbitrary volume ratio by said method.
Disclosed the present invention proposes a kind of feasible and simple way is used for the arbitrary volume ratio of low frequency and frequency applications with production piezoelectric composite/array here.
The accompanying drawing summary
These and other characteristics of the preferred embodiment of the invention below will become more apparent in the accompanying drawing embodiment as a reference:
Figure 1A is the vertical cross-section according to a base pressure electroplax of embodiment cutting of the present invention.
Figure 1B is a vertical cross-section of a pair of base pressure electroplax placed in the mode of stacked aligning.
Fig. 1 C is a vertical cross-section of a pair of base pressure electroplax of Figure 1B of being intersected of an embodiment according to the present invention.
Fig. 1 D is a vertical cross-section of removed first interdigitated piezoelectric composite slab of the part of piezoelectric substrate.
Fig. 2 A is a vertical cross-section of one first interdigitated piezoelectric composite slab of Fig. 1 D, has shown the part to be removed of plate, waits to remove part according to one section preset distance of embodiment displacement of the present invention.
Fig. 2 B is a vertical cross-section of one first interdigitated piezoelectric composite slab of Fig. 2 A of being cut of an embodiment according to the present invention.
Fig. 2 C is a vertical cross-section of a pair of first interdigitated piezoelectric composite slab of having cut that is placed with stacked intersection alignment so.
Fig. 2 D is a vertical cross-section of a pair of first interdigitated piezoelectric composite slab of having cut of Fig. 2 C of being intersected of an embodiment according to the present invention.
Fig. 2 E is a vertical cross-section of second interdigitated piezoelectric composite slab after the end face of second interdigitated piezoelectric composite slab and bottom surface have implemented to polish processing.
Fig. 3 A is a vertical cross-section of one first interdigitated piezoelectric composite slab of Fig. 1 D, has shown the part to be removed of plate, waits to remove part according to one section preset distance of embodiment displacement of the present invention.
Fig. 3 B is a vertical cross-section of one first interdigitated piezoelectric composite slab of Fig. 3 A of being cut of an embodiment according to the present invention.
Fig. 3 C is a vertical cross-section of a pair of first interdigitated piezoelectric composite slab of having cut of placing in the mode of stacked aligning.
Fig. 3 D is a vertical cross-section of a pair of first interdigitated piezoelectric composite slab of having cut of Fig. 3 C of being intersected of an embodiment according to the present invention.
Fig. 3 E is a vertical cross-section of the intermediate interdigitated composite slab behind the end face of polishing intermediate interdigitated composite slab.
Fig. 3 F is a vertical cross-section of the intermediate interdigitated compound piezoelectric sheet of Fig. 3 E, has shown the part to be removed of plate, waits to remove part according to one section preset distance of embodiment displacement of the present invention.
Fig. 3 G is a vertical cross-section of the intermediate interdigitated compound piezoelectric sheet of Fig. 3 F of being cut of an embodiment according to the present invention.
Fig. 3 H is a vertical cross-section of a pair of intermediate interdigitated compound piezoelectric sheet that has cut placed in the mode of stacked aligning.
Fig. 3 I is a vertical cross-section of a pair of intermediate interdigitated compound piezoelectric sheet that has cut of Fig. 3 H of being intersected of an embodiment according to the present invention.
Fig. 3 J is at the end face of polishing the 3rd interdigitated composite slab and a vertical cross-section of the 3rd interdigitated piezoelectric composite slab behind the bottom surface.
Fig. 4 A is the vertical cross-section of one first interdigitated piezoelectric composite slab of Fig. 1 D, has shown the part to be removed of plate, waits to remove part according to one section preset distance of embodiment displacement of the present invention.
Fig. 4 B is a vertical cross-section of one first interdigitated piezoelectric composite slab among Fig. 4 A of being cut of an embodiment according to the present invention.
Fig. 4 C is a vertical cross-section of a pair of first interdigitated piezoelectric composite slab of having cut of placing in the mode of stacked aligning.
Fig. 4 D is a vertical cross-section of a pair of first interdigitated piezoelectric composite slab of having cut of Fig. 4 C of being intersected of an embodiment according to the present invention.
Fig. 4 E is a vertical cross-section of the intermediate interdigitated composite slab behind the end face of the composite plate of polishing intermediate interdigitated.
Fig. 4 F is a vertical cross-section of the intermediate interdigitated composite slab of Fig. 4 E, has shown the part to be removed of plate, waits to remove part according to one section preset distance of embodiment displacement of the present invention.
Fig. 4 G is a vertical cross-section of an intermediate interdigitated composite slab among Fig. 4 F of being cut of an embodiment according to the present invention.
Fig. 4 H is a vertical cross-section of a pair of intermediate interdigitated composite slab of having cut that is placed of the mode with stacked aligning.
Fig. 4 I is a vertical cross-section of a pair of intermediate interdigitated compound piezoelectric sheet that has cut of Fig. 4 H of being intersected of an embodiment according to the present invention.
Fig. 4 J is at the end face of polishing the 3rd interdigitated piezoelectric composite slab and a vertical cross-section of the 3rd interdigitated piezoelectric composite slab after the bottom surface.
Embodiment
The present invention will obtain more detailed description in following exemplary embodiment, these exemplary embodiment only work done in the manner of a certain author are illustrative, because many adjustment wherein and change will be obvious to one skilled in the art.Here employed " a ", " an " or " the " can refer to one or more, decide according to its residing context.Describe preferred embodiment referring now to accompanying drawing, wherein same reference numeral is represented the same section among a few width of cloth figure.
It is the volume of the piezoelectric in the piezo-electricity composite material and the ratio of composite material overall volume that this method that is used to make piezo-electricity composite material can make operating personnel be easy to select and make the piezo-electricity composite material with predetermined intended volume ratio, described volume ratio.The present invention uses the displacement cutting of the conventional cutting element with preset width.
In one aspect of the invention, displacement cutting and repeatedly cross method the practical and simple method of production piezo-electricity composite material and relevant acoustic apparatus is provided, it is several microns thin cut channels and the pitch size below 30 microns that described piezo-electricity composite material has width with relevant acoustic apparatus.This method also can make people's service-strong, hard and thicker cutting element make the pitch of very fine.For example, use the otch of 80 μ m and the composite material that 1/4 shift interdigitation can produce 20 μ m pitches.The present invention can produce arbitrarily and the predetermined when two-dimentional composite material, composite material transducer, transducer array or the like of finer pitch.
With reference to figure 1A-1D, shown the method for making first interdigitated piezoelectric composite slab 20.In one embodiment, manufacture method is by piezoelectric substrate 10 beginnings of a pair of routine.According to desired application, made substrate can be made by any desired material with suitable electricity and acoustical behavior.For example, substrate can be made by piezoelectric, electrostriction material and similar material.Each substrate all with the another one complementation, and as shown, it is cut or cuts to form width is that the K and the degree of depth are first cut channel or first groove of D.Each substrate 10 all has the upper surface 11 of substantially flat, and has longitudinal axis.As shown, implementing cutting operation for the first time on the upper surface of each substrate 10, is that D and width are first groove 12 of a plurality of longitudinal extensions of K with limited depth on the substrate flat upper surfaces.In addition, first groove 12 of a plurality of first grooves in the upper surface of each substrate limits first muscle 14 of a plurality of longitudinal extensions with width W between the two.Each muscle 14 separates with the adjacent muscle width K with first groove.In the present embodiment, the width W of each first muscle 14 less than 14 in adjacent first muscle apart from K.The pitch P of each substrate is that the width of each first muscle 14 adds the width K between adjacent first muscle.
Figure 1B and 1C show the intersection of a pair of conventional substrate 10 that has cut.The upper surface 11 of each substrate that has cut 10 is placed in the modes that stacked intersection is aimed at mutually, make the substrate 10 of winning ' a plurality of first muscle 14 place second substrate 10 " a plurality of first grooves 12 within.Because the width W of each first muscle 14 is less than the width K of 14 in adjacent first muscle, so be understandable that to have width K
1First slit 16 between each first muscle of correspondence of engaged first and second substrates, form.Therefore, in the present embodiment, first muscle of each first muscle of first substrate and the second adjacent substrate is with the width K in first slit
1Separate.
The available packing material in first slit 16 (with other slits referred in this) is filled.As customary operation in the manufacturing of composite material transducer and standard practices, packing material can comprise for example polymeric material of epoxy resin, polymer microballoon, brilliant key and analog, and perhaps they also can be to the small part underfill.In one embodiment, the plate that has cut can be dry assembling, can introduce gap filling material then.In another embodiment, at least one septum can prewet, and/or their groove is full of with described gap filling material.Here, when two septum combine and the muscle of the muscle of first plate and second plate intersects, the excess quantity of gap filling material can be forced to displacement.In yet another embodiment, at least one septum of prewetting, and the capillary force that causes of the controlled discharge by superfluous gap filling material and/or atmospheric pressure septum intersect and move to together.Be understandable that, when using conventional method that some or all gap filling materials are removed, this slit may not be full of fully or they only be temporarily to be full of.
Subsequently, the part of the substrate 10 that imaginary line is extended more than 17 polishing, correct grinding fall or otherwise remove to form first interdigitated piezoelectric composite slab 20.The part of both first muscle 14 of first and second substrates 10 and first slit 16 between them have been exposed like this.After removing the piezoelectric of imaginary line more than 17, if expectation can realize the removal of gap filling material the easiest and easily.As will be appreciated, first interdigitated piezoelectric composite slab 20 has the little pitch P of pitch P than first and second substrates of correspondence
1In the present embodiment, pitch P
1It is width W
1(being the width W of first muscle 14 here) adds the width K in first slit 16
1Therefore, the volume ratio of first interdigitated piezoelectric composite slab 20 is less than the volume ratio of uncut piezoelectric substrate.
The present invention repeatedly intersects the piezo-electricity composite material that has meticulous kerf size to provide.Referring now to Fig. 2 A and 2B, provide a pair of first interdigitated piezoelectric composite slab 20.Each first interdigitated piezoelectric composite slab 20 has the upper surface 21 and the longitudinal axis of substantially flat.Each first interdigitated composite slab all with another complementation, and as shown, being cut or cutting to form width in displacement cutting step is that the K and the degree of depth are second cut channel or second groove of D.In this respect, implement cutting operation for the second time at the upper surface of each first interdigitated piezoelectric composite slab 20.Cutting operation and cutting spacing distance S for the second time for the first time
1, this is apart from S
1Being the mark of pitch P, is 1/4 pitch P in the present embodiment.Cutting position in this displacement cutting step is shifted one section distance that equals the part of the first muscle width at lateral dimension.Be understandable that other marks of pitch P also can be considered as the translocation distance S of cutting for the second time
1
After the cutting, limited depth is that D, width are second groove 22 of a plurality of longitudinal extensions of K on the upper surface 21 of first interdigitated piezoelectric composite slab 20 for the second time.In addition, limit second muscle 24 of a plurality of longitudinal extensions at the upper surface of each first interdigitated piezoelectric composite slab 20, its width is W and separates with corresponding second groove 22 of a plurality of second grooves 22.Here, cutting for the second time from cutting displacement for the first time apart from S
1Width less than second muscle.Therefore, be understandable that at least one of second muscle 24 of a plurality of longitudinal extensions comprises first slit 16 that available packing material is full of.
Because cutting element has constant width, thus each second muscle 24 all with adjacent second muscle width K of second groove 22 at interval.In the present embodiment, the width W of each second muscle 24 is less than the width K of 24 in the second adjacent muscle.The pitch P of first interdigitated piezoelectric composite slab that each has cut is that the width of each second muscle 24 adds the width K between adjacent second muscle.
Fig. 2 C and 2D have shown the intersection of a pair of first interdigitated piezoelectric composite slab of having cut.As mentioned above, the upper surface 21 of first interdigitated piezoelectric composite slab that each has cut is placed with stacked intersection alignment so each other, makes a plurality of second grooves of a plurality of second muscle 24 and another first interdigitated piezoelectric composite slab of having cut of first interdigitated piezoelectric composite slab of having cut intersect.Form that to have width be K between by second muscle of each correspondence of first interdigitated piezoelectric composite slab of having cut of being intersected
2Second slit 26.The width of each second muscle is less than the width K between two second adjacent muscle.In one embodiment, the width K in second slit
2Substantially equal the width K in first slit
1Be understandable that second slit can be full of with above-mentioned polymeric material.
With reference to Fig. 2 E, the polishing of the part of first interdigitated piezoelectric composite slab of having cut that imaginary line is extended more than 27, correct grinding fall or otherwise remove to form second interdigitated piezoelectric composite slab 30.In further processing, the part of first interdigitated piezoelectric composite slab of having cut that imaginary line is extended 29 below is polished, is finish grinded or otherwise removes to form the another embodiment of second interdigitated piezoelectric composite slab 30.Be understandable that second interdigitated piezoelectric composite slab 30 has the pitch P than first interdigitated piezoelectric composite slab 20
1Little pitch P
2Therefore, even use identical cutting element in cutting operation, the volume ratio of second interdigitated piezoelectric composite slab 30 is also less than the volume ratio of first interdigitated piezoelectric composite slab 20.At this, pitch P
2Width W greater than second muscle
2, the width W of second muscle
2Greater than gap width K
2
As implied above, the cutting energy that is shifted repeatedly of composite plate is produced the piezo-electricity composite material of variable predetermined volume ratio.Be understandable that the cutting operation on each composite plate of having cut can be shifted according to hope and have the interdigitated composite slab of desired volume ratio with production.In one embodiment, and as Fig. 3 A to shown in the 4J, but the repetitive cycling displacement cutting step and the compound piezoelectric sheet of step that intersect with the production finer pitch.
With reference to figure 3A and 3B, provide a pair of first interdigitated piezoelectric composite slab 20.Each first interdigitated piezoelectric composite slab all with another complementation, and as shown in the figure, cutting or cutting are that the K and the degree of depth are second cut channel or the groove of D to form width in displacement cutting step.Each first interdigitated piezoelectric composite slab 20 all has the upper surface 21 of substantially flat.In this respect, cutting operation is implemented at the upper surface of each first interdigitated piezoelectric composite slab 20 for the second time, for the second time cutting operation and first cutting spacing distance S
1, this is apart from S
1It is the mark of pitch P.In the present embodiment, cutting operation is shifted 1/8 of pitch P for the second time.In this displacement cutting step, cutting position is in one section distance that equals first a muscle width part of lateral dimension displacement.
After second time cutting operation, limited depth is that D, width are second groove 22 of a plurality of longitudinal extensions of K on the upper surface 21 of first interdigitated piezoelectric composite slab 20 of having cut.In addition, limit second muscle 24 of a plurality of longitudinal extensions on the upper surface of each first interdigitated piezoelectric composite slab 20 of having cut, its width is W and separates with corresponding second groove 22 of a plurality of second grooves 22.For the second time cutting operation from the cutting operation displacement first time apart from S
1Width less than second muscle.Therefore, be understandable that, and shown in Fig. 3 B, at least one in second muscle 24 comprises first slit 16 that this slit 16 can be full of with gap filling material.
Because cutting element has constant width, thus each second muscle 24 all with adjacent second muscle width K of second groove 22 at interval.In the present embodiment, the width W of each second muscle 24 is all less than the width K of 24 in adjacent second muscle.The pitch P of first interdigitated piezoelectric composite slab 20 that each has cut is that the width of each second muscle 24 adds the width K between adjacent second muscle.
Fig. 3 C and 3D have shown the intersection of a pair of first interdigitated piezoelectric composite slab of having cut.As mentioned above, the mode that the upper surface 21 of first interdigitated piezoelectric composite slab that each has cut is aimed at mutual stacked intersection is placed, and makes a plurality of second grooves of a plurality of second muscle 24 and another first interdigitated piezoelectric composite slab of having cut of first interdigitated piezoelectric composite slab of having cut intersect.Because the width of each second muscle is less than the width K between adjacent second muscle, to have width be K so form between each corresponding second muscle of first interdigitated piezoelectric composite slab of having cut of being intersected
2Second slit 26.In one embodiment, the width K in second slit
2Substantially equal the width K in first slit
1Be understandable that second slit can be full of with above-mentioned polymeric material.
With reference to Fig. 3 E, the polishing of the part of first interdigitated piezoelectric composite slab of having cut that imaginary line is extended more than 27, correct grinding fall or otherwise remove to form intermediate interdigitated composite slab 30.In next step,, provide a pair of intermediate interdigitated composite slab 30 referring now to Fig. 3 F and 3G.The composite plate of each intermediate interdigitated all with another complementation, and have the upper surface 31 of substantially flat, cutting or to cut this upper surface 31 be that the K and the degree of depth are the 3rd cut channel or the three-flute of D to form width in displacement cutting step.In this respect, implement with distance S at the upper surface of each intermediate interdigitated composite slab 30
2With the isolated cutting operation for the third time of the cutting operation second time, this is apart from S
2It is the mark of pitch P.In this embodiment, this for the third time cutting operation by from 1/8 of the second operation displacement pitch P.Cutting position in this displacement cutting step is shifted one section distance that equals second a muscle width part at lateral dimension.
After cutting operation for the third time, limited depth is that D and width are the three-flute 32 of a plurality of longitudinal extensions of K on the upper surface 31 of the intermediate interdigitated composite slab 30 of having cut.In addition, limit the 3rd muscle 34 of a plurality of longitudinal extensions on the upper surface of each intermediate interdigitated composite slab of having cut 30, its width is W and separates with a plurality of three-flute 32 corresponding three-flutes 32.Cut for the third time from cutting displacement for the second time apart from S
2Width less than the 3rd muscle.Therefore, be understandable that at least one in the 3rd muscle 34 of a plurality of longitudinal extensions comprises that first slit 16 and 26, the first slits 16, second slit and second slit 26 can be full of with gap filling material.
Because cutting element has constant width, thus each the 3rd muscle 34 all with adjacent the 3rd muscle width K of three-flute 32 at interval.In the present embodiment, the width W of each the 3rd muscle 34 is less than the width K between two the 3rd adjacent muscle 34.The pitch P of the intermediate interdigitated composite slab that each has cut is that the width of each the 3rd muscle 34 adds the width K between adjacent the 3rd muscle.
Fig. 3 H and 3I have shown the intersection of a pair of intermediate interdigitated composite slab of having cut 30.As mentioned above, the mode that the upper surface 31 of the intermediate interdigitated composite slab that each has cut is aimed at mutual stacked intersection is placed, make an intermediate interdigitated composite slab of having cut 30 ' a plurality of the 3rd muscle 34 and another intermediate interdigitated composite slab of having cut 30 " a plurality of three-flutes intersect.Because the width of each the 3rd muscle is less than the width K between adjacent the 3rd muscle, thus intersect cut in the middle of form that to have width be K between the 3rd muscle of each correspondence of composite plate 30
3The 3rd slit 36.In one embodiment, the width K in the 3rd slit
3Width K with second slit
2Substantially equal the width K in first slit
1Be understandable that the 3rd slit can be full of with above-mentioned polymeric material.
With reference to Fig. 3 J, the polishing of the part of the intermediate interdigitated composite slab of having cut that imaginary line is extended more than 37, correct grinding fall or otherwise remove to form the 3rd interdigitated piezoelectric composite slab 40.In further processing, the part of the intermediate interdigitated composite slab of having cut that imaginary line is extended 39 below is polished, is finish grinded or otherwise removes to form the another embodiment of the 3rd interdigitated piezoelectric composite slab 40.Be understandable that the pitch P that the 3rd interdigitated piezoelectric composite slab 40 has
3Pitch P less than second interdigitated piezoelectric composite slab
2Therefore, the volume ratio of the 3rd interdigitated piezoelectric composite slab 40 is less than the volume ratio of second or first interdigitated piezoelectric composite slab.
Fig. 4 A shows the embodiment that another circulation repeatedly intersects to 4J.Here, for the second time cutting operation be shifted about 1/6 pitch P apart from S
1, intermediate interdigitated composite slab forms by mode as mentioned above.Upper surface in intermediate interdigitated composite slab 30 carries out cutting operation for the third time.The about 1/6 pitch P's of cutting displacement apart from S for the third time
2The intermediate interdigitated composite slab that to cut is then intersected, and unhewn piezoelectric is partly removed to form the 3rd interdigitated piezoelectric composite slab 40.
Be understandable that, can implement to be shifted cutting and the continuous circulation that intersects so that the interdigitated piezoelectric composite slab of continuous meticulousr kerf size to be provided.Therefore, the invention provides a kind of method that is used to produce compound piezoelectric sheet with desired volume ratio.So what can approve is that the method for making the piezo-electricity composite material with very fine pitch that is used for frequency applications is provided.This method is used the displacement cutting and is repeatedly intersected.
To the one of ordinary skilled in the art clearly, under the prerequisite that does not break away from the scope of the invention or purport, can carry out multiple adjustment or change to the present invention.By to the description of specification disclosed herein and the practice of invention, concerning the one of ordinary skilled in the art, other embodiments of the present invention will become obvious.It is intended to specification and embodiment only are considered as exemplary, and true scope of the present invention and purport are pointed out by following claim.
Claims (36)
1. method of making piezo-electricity composite material comprises:
A pair of substrate is provided, and each substrate has the upper surface of substantially flat;
Upper surface by cutting each substrate forms a pair of substrate that has cut with first groove that limits a plurality of longitudinal extensions thereon and first muscle of a plurality of longitudinal extensions, wherein each first groove has depth D and width K, wherein each first muscle has width W, wherein the width W of first muscle is less than the width K of first groove, and wherein first groove of each adjacency and the pitch P that first muscle has width W of equaling and width K;
Place this substrate in the mode that mutual stacked intersection is aimed at, make a plurality of first muscle of a substrate that has cut place in a plurality of first grooves of another substrate that has cut having cut;
Engage this to the substrate that cut limiting a plurality of first slits, each first slit-shaped be formed in engaged should first muscle to each correspondence of the substrate that cut between;
A part of removing a substrate that has cut is to form first interdigitated piezoelectric composite slab, this first interdigitated piezoelectric composite slab has the upper surface of substantially flat, and this upper surface is made up of the part of first muscle of substrate and the part in a plurality of first slits this that has engaged;
A pair of first interdigitated piezoelectric composite slab is provided;
Upper surface by cutting each first interdigitated piezoelectric composite slab is to limit second groove of a plurality of longitudinal extensions and second muscle of a plurality of longitudinal extensions on the upper surface of first interdigitated piezoelectric composite slab, form a pair of first interdigitated piezoelectric composite slab of having cut, wherein each second groove has depth D and width K, wherein each second muscle has width W, wherein the width W of second muscle is less than the width K of second groove, and the marginating compartment translocation distance S of second groove and first muscle wherein
1, this translocation distance S
1It is the mark of pitch P;
Place this first interdigitated piezoelectric composite slab in the mode that mutual stacked intersection is aimed at, make a plurality of second muscle of first interdigitated piezoelectric composite slab of having cut place in a plurality of second grooves of another first interdigitated piezoelectric composite slab of having cut having cut;
Engage this to first interdigitated piezoelectric composite slab of having cut limiting a plurality of second slits, each second slit-shaped be formed in engaged should second muscle to each correspondence of first interdigitated piezoelectric composite slab of having cut between; And
A part of removing first interdigitated piezoelectric composite slab of having cut is to form second interdigitated piezoelectric composite slab, and the volume ratio that this second interdigitated piezoelectric composite slab has is less than the volume ratio of first interdigitated piezoelectric composite slab.
2. the method for claim 1 is characterized in that, first slit and second gap size are roughly the same.
3. the method for claim 1 is characterized in that, combination in any uses mechanical emery wheel sawing, laser cutting, ultrasonic cut, edm, wet etching and dry ecthing to finish cutting step.
4. the method for claim 1 also is included in the step of before intersecting at least one substrate that has cut being prewetted with curable (settable) polymeric material, and this polymeric material is the bonding substrate that is somebody's turn to do having cut in intersection subsequently.
5. the method for claim 4 is characterized in that, polymeric material is full of first slit substantially.
6. the method for claim 4, also be included in the step of before intersecting at least one first interdigitated piezoelectric composite slab of having cut being prewetted with curable polymeric material, this polymeric material is bonding first interdigitated piezoelectric composite slab of being somebody's turn to do having cut in intersection subsequently.
7. the method for claim 6 is characterized in that, polymeric material is full of second slit substantially.
8. the method for claim 1 is characterized in that, each substrate that has cut and each first interdigitated piezoelectric composite slab of having cut are cut by P＞K＞W.
9. the method for claim 8 is characterized in that translocation distance S
1Substantially equal 1/4P.
10. method of making piezo-electricity composite material comprises:
A pair of substrate is provided, and each substrate has the upper surface of substantially flat;
Upper surface by cutting each substrate forms a pair of substrate that has cut with first groove that limits a plurality of longitudinal extensions thereon and first muscle of a plurality of longitudinal extensions, wherein each first groove has depth D and width K, wherein each first muscle has width W, wherein the width W of first muscle is less than the width K of first groove, and wherein first groove of each adjacency and the pitch P that first muscle has width W of equaling and width K;
Place this substrate in the mode that mutual stacked intersection is aimed at, make a plurality of first muscle of a substrate that has cut place in a plurality of first grooves of another substrate that has cut having cut;
Engage this to the substrate that cut limiting a plurality of first slits, each first slit-shaped be formed in engaged should first muscle to each correspondence of the substrate that cut between;
A part of removing a substrate that has cut is to form first interdigitated piezoelectric composite slab, this first interdigitated piezoelectric composite slab has the upper surface of substantially flat, and this upper surface is somebody's turn to do the part of first muscle of cutting substrate and the part in a plurality of first slits form by engaged;
A pair of first interdigitated piezoelectric composite slab is provided;
Limit second groove of a plurality of longitudinal extensions and second muscle of a plurality of longitudinal extensions by the upper surface that cuts each first interdigitated piezoelectric composite slab with the upper surface on first interdigitated piezoelectric composite slab, form a pair of first interdigitated piezoelectric composite slab of having cut, wherein each second groove has depth D and width K, wherein each second muscle has width W, wherein the width W of second muscle is less than the width K of second groove, and the marginating compartment translocation distance S of second groove and first muscle wherein
1, this translocation distance S
1It is the mark of pitch P;
Place this first interdigitated piezoelectric composite slab in the mode that mutual stacked intersection is aimed at, make a plurality of second muscle of first interdigitated piezoelectric composite slab of having cut place in a plurality of second grooves of another first interdigitated piezoelectric composite slab of having cut having cut;
Engage this to first interdigitated piezoelectric composite slab of having cut limiting a plurality of second slits, each second slit-shaped be formed in engaged should second muscle to each correspondence of first interdigitated piezoelectric composite slab of having cut between; And
A part of removing first interdigitated piezoelectric composite slab of having cut has the intermediate interdigitated compound piezoelectric sheet of upper surface with formation.
11. the method for claim 10 also comprises:
A pair of intermediate interdigitated composite slab is provided;
Upper surface by cutting each intermediate interdigitated compound piezoelectric sheet is to limit the three-flute of a plurality of longitudinal extensions and the 3rd muscle of a plurality of longitudinal extensions on the upper surface of intermediate interdigitated compound piezoelectric sheet, form a pair of intermediate interdigitated compound piezoelectric sheet that has cut, wherein each three-flute has depth D and width K, wherein each the 3rd muscle has width W, wherein the width W of the 3rd muscle is less than the width K of three-flute, and a part one section translocation distance S at interval of three-flute and second muscle wherein
2So that the three-flute and second groove separate this translocation distance S
2It is the mark of pitch P;
Place this intermediate interdigitated compound piezoelectric sheet in the mode that mutual stacked intersection is aimed at, make a plurality of the 3rd muscle of an intermediate interdigitated compound piezoelectric sheet that has cut place in a plurality of three-flutes of another intermediate interdigitated compound piezoelectric sheet that has cut having cut;
Engage this to the intermediate interdigitated compound piezoelectric sheet that cut limiting a plurality of the 3rd slits, each the 3rd slit-shaped be formed in engaged should second muscle to each correspondence of first interdigitated piezoelectric composite slab of having cut between; And
A part of removing an intermediate interdigitated compound piezoelectric sheet that has cut is to form the 3rd interdigitated piezoelectric composite slab, and the volume ratio that the 3rd interdigitated piezoelectric composite slab has is less than the volume ratio of first and second interdigitated piezoelectric composite slab.
12. the method for claim 11 is characterized in that, first slit, second slit and the 3rd gap size are roughly the same.
13. the method for claim 11 is characterized in that, combination in any uses mechanical emery wheel sawing, laser cutting, ultrasonic cut, edm, wet etching and dry ecthing to finish cutting step.
14. the method for claim 10 also is included in the step of before intersecting at least one substrate that has cut being prewetted with curable polymeric material, this polymeric material is the bonding substrate that is somebody's turn to do having cut in intersection subsequently.
15. the method for claim 14 is characterized in that polymeric material is full of first slit substantially.
16. the method for claim 14, also be included in the step of before intersecting at least one first interdigitated piezoelectric composite slab of having cut being prewetted with curable polymeric material, this polymeric material is bonding first interdigitated piezoelectric composite slab of being somebody's turn to do having cut in intersection subsequently.
17. the method for claim 16 is characterized in that polymeric material is full of second slit substantially.
18. the method for claim 11, also be included in the step of before intersecting at least one intermediate interdigitated compound piezoelectric sheet that has cut being prewetted with curable polymeric material, this polymeric material is the bonding intermediate interdigitated compound piezoelectric sheet that is somebody's turn to do having cut in intersection subsequently.
19. the method for claim 18 is characterized in that polymeric material is full of the 3rd slit substantially.
20. the method for claim 11 is characterized in that each substrate that has cut, first interdigitated piezoelectric composite slab that each has cut and the intermediate interdigitated compound piezoelectric sheet that each has cut are cut by P＞K＞W.
21. the method for claim 11 is characterized in that this translocation distance S
1Substantially equal 1/8P.
22. the method for claim 21 is characterized in that this translocation distance S
2Substantially equal 1/8P.
23. the method for claim 11 is characterized in that this translocation distance S
1Substantially equal 1/6P.
24. the method for claim 23 is characterized in that this translocation distance S
2Substantially equal 1/6P.
25. a method of making composite material comprises:
A pair of substrate is provided, and each substrate has the upper surface of substantially flat;
Upper surface by cutting each substrate forms a pair of substrate that has cut with first groove that limits a plurality of longitudinal extensions thereon and first muscle of a plurality of longitudinal extensions, wherein each first groove has depth D and width K, wherein each first muscle has width W, wherein the width W of first muscle is less than the width K of first groove, and wherein first groove of each adjacency and the pitch P that first muscle has width W of equaling and width K;
Place this substrate in the mode that mutual stacked intersection is aimed at, make a plurality of first muscle of a substrate that has cut place in a plurality of first grooves of another substrate that has cut having cut;
Engage this to the substrate that cut limiting a plurality of first slits, each first slit-shaped be formed in engaged should first muscle to each correspondence of the substrate that cut between;
A part of removing a substrate that has cut is to form first interdigitated composite slab, and this first interdigitated composite slab has the upper surface of substantially flat, and this upper surface is made up of the part of first muscle of substrate and the part in a plurality of first slits engaged this;
A pair of first interdigitated composite slab is provided;
Upper surface by cutting each first interdigitated composite slab is to limit second groove of a plurality of longitudinal extensions and second muscle of a plurality of longitudinal extensions on the upper surface of first interdigitated composite slab, form a pair of first interdigitated composite slab of having cut, wherein each second groove has depth D and width K, wherein each second muscle has width W, wherein the width W of second muscle is less than the width K of second groove, and one section translocation distance S of marginating compartment of second groove and first muscle wherein
1, this translocation distance S
1It is the mark of pitch P;
Place this first interdigitated composite slab in the mode that mutual stacked intersection is aimed at, make a plurality of second muscle of first interdigitated composite slab of having cut place in a plurality of second grooves of another first interdigitated composite slab of having cut having cut;
Engage this to first interdigitated composite slab of having cut limiting a plurality of second slits, each second slit-shaped be formed in engaged should second muscle to each correspondence of first interdigitated composite slab of having cut between; And
A part of removing first interdigitated composite slab of having cut is to form second interdigitated composite slab, and the volume ratio that this second interdigitated composite slab has is less than the volume ratio of first interdigitated composite slab.
26. the method for claim 25 is characterized in that first slit and second gap size are roughly the same.
27. the method for claim 25 is characterized in that combination in any uses mechanical emery wheel sawing, laser cutting, ultrasonic cut, edm, wet etching and dry ecthing to finish cutting step.
28. the method for claim 25 also is included in the step of before intersecting at least one substrate that has cut being prewetted with curable polymeric material, this polymeric material is the bonding substrate that is somebody's turn to do having cut in intersection subsequently.
29. the method for claim 28 is characterized in that polymeric material is full of first slit substantially.
30. the method for claim 28, also be included in the step of before intersecting at least one first interdigitated composite slab of having cut being prewetted with curable polymeric material, this polymeric material is bonding first interdigitated composite slab of being somebody's turn to do having cut in intersection subsequently.
31. the method for claim 30 is characterized in that polymeric material is full of second slit substantially.
32. the method for claim 25 is characterized in that each substrate that has cut and each first interdigitated composite slab of having cut are cut by P＞K＞W.
33. the method for claim 32 is characterized in that this translocation distance S
1Substantially equal 1/4P.
34. piezo-electricity composite material of producing according to the method for claim 25.
35. transducer of producing according to the method for claim 1.
36. transducer of producing according to the method for claim 10.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US47023503P | 2003-05-14 | 2003-05-14 | |
| US60/470,235 | 2003-05-14 | ||
| US10/726,805 | 2003-12-03 |
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| Publication Number | Publication Date |
|---|---|
| CN1788366A true CN1788366A (en) | 2006-06-14 |
| CN100573949C CN100573949C (en) | 2009-12-23 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN 200480013162 Expired - Lifetime CN100573949C (en) | 2003-05-14 | 2004-05-14 | Piezo-electricity composite material and manufacture method thereof |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103430341A (en) * | 2010-10-13 | 2013-12-04 | H.C.材料公司 | High frequency piezoelectric crystal composites, devices, and method for manufacturing the same |
| CN105633273A (en) * | 2014-10-29 | 2016-06-01 | 中国科学院深圳先进技术研究院 | Piezoelectric/monocrystalline ferroelectric composite material preparation tool and method |
| CN111246354A (en) * | 2018-11-29 | 2020-06-05 | 乐金显示有限公司 | Vibration generating device and electronic apparatus including the same |
-
2004
- 2004-05-14 CN CN 200480013162 patent/CN100573949C/en not_active Expired - Lifetime
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103430341A (en) * | 2010-10-13 | 2013-12-04 | H.C.材料公司 | High frequency piezoelectric crystal composites, devices, and method for manufacturing the same |
| CN103430341B (en) * | 2010-10-13 | 2016-04-06 | H.C.材料公司 | High frequency piezo crystal composite material, for the manufacture of its apparatus and method |
| CN105633273A (en) * | 2014-10-29 | 2016-06-01 | 中国科学院深圳先进技术研究院 | Piezoelectric/monocrystalline ferroelectric composite material preparation tool and method |
| CN105633273B (en) * | 2014-10-29 | 2018-02-23 | 中国科学院深圳先进技术研究院 | Piezoelectricity/monocrystalline Ferroelectric Composites prepare tool and preparation method |
| CN111246354A (en) * | 2018-11-29 | 2020-06-05 | 乐金显示有限公司 | Vibration generating device and electronic apparatus including the same |
| CN111246354B (en) * | 2018-11-29 | 2021-11-30 | 乐金显示有限公司 | Vibration generating device and electronic apparatus including the same |
| US11596980B2 (en) | 2018-11-29 | 2023-03-07 | LG Display Co,. Ltd. | Vibration generating device and electronic apparatus including the same |
Also Published As
| Publication number | Publication date |
|---|---|
| CN100573949C (en) | 2009-12-23 |
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