CN1787875A - Excimer gas molecular discharging lamp irradiation device and method for using the same - Google Patents
Excimer gas molecular discharging lamp irradiation device and method for using the same Download PDFInfo
- Publication number
- CN1787875A CN1787875A CNA2004800127242A CN200480012724A CN1787875A CN 1787875 A CN1787875 A CN 1787875A CN A2004800127242 A CNA2004800127242 A CN A2004800127242A CN 200480012724 A CN200480012724 A CN 200480012724A CN 1787875 A CN1787875 A CN 1787875A
- Authority
- CN
- China
- Prior art keywords
- gas molecular
- excimer gas
- discharging lamp
- lamp
- discharging
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000007599 discharging Methods 0.000 title claims description 122
- 238000000034 method Methods 0.000 title claims description 7
- 241001074085 Scophthalmus aquosus Species 0.000 claims description 20
- 229910052751 metal Inorganic materials 0.000 claims description 3
- 239000002184 metal Substances 0.000 claims description 3
- 230000035699 permeability Effects 0.000 claims description 3
- 239000004744 fabric Substances 0.000 claims description 2
- 239000003365 glass fiber Substances 0.000 claims description 2
- 239000011521 glass Substances 0.000 abstract description 2
- 239000007789 gas Substances 0.000 description 107
- 238000005065 mining Methods 0.000 description 15
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 9
- 230000015572 biosynthetic process Effects 0.000 description 8
- 239000000843 powder Substances 0.000 description 8
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 6
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 6
- 230000002159 abnormal effect Effects 0.000 description 6
- 238000012545 processing Methods 0.000 description 5
- 229910052759 nickel Inorganic materials 0.000 description 4
- 230000008859 change Effects 0.000 description 3
- 239000003814 drug Substances 0.000 description 3
- 229940079593 drug Drugs 0.000 description 3
- 229910052757 nitrogen Inorganic materials 0.000 description 3
- 230000003287 optical effect Effects 0.000 description 3
- 238000012360 testing method Methods 0.000 description 3
- 238000009825 accumulation Methods 0.000 description 2
- 239000002253 acid Substances 0.000 description 2
- 239000003513 alkali Substances 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 238000012423 maintenance Methods 0.000 description 2
- 239000003960 organic solvent Substances 0.000 description 2
- 230000005855 radiation Effects 0.000 description 2
- 238000007789 sealing Methods 0.000 description 2
- 229910052724 xenon Inorganic materials 0.000 description 2
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 description 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- RWSOTUBLDIXVET-UHFFFAOYSA-N Dihydrogen sulfide Chemical compound S RWSOTUBLDIXVET-UHFFFAOYSA-N 0.000 description 1
- QGZKDVFQNNGYKY-UHFFFAOYSA-O ammonium group Chemical group [NH4+] QGZKDVFQNNGYKY-UHFFFAOYSA-O 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 239000007795 chemical reaction product Substances 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000011651 chromium Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005108 dry cleaning Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000011888 foil Substances 0.000 description 1
- 238000002309 gasification Methods 0.000 description 1
- 229910000037 hydrogen sulfide Inorganic materials 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000004901 spalling Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 230000008719 thickening Effects 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J19/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
- B01J19/12—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electromagnetic waves
- B01J19/122—Incoherent waves
- B01J19/123—Ultraviolet light
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J19/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
- B01J19/12—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electromagnetic waves
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J65/00—Lamps without any electrode inside the vessel; Lamps with at least one main electrode outside the vessel
Landscapes
- Chemical & Material Sciences (AREA)
- Physics & Mathematics (AREA)
- Organic Chemistry (AREA)
- General Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Health & Medical Sciences (AREA)
- Electromagnetism (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
- Cleaning In General (AREA)
- Cleaning Or Drying Semiconductors (AREA)
Abstract
In an excimer lamp irradiation device, an excimer lamp is arranged in a lamp house. Excimer light irradiated from the excimer lamp irradiates an object to be irradiated without passing through a glass window. The surface temperature of the excimer lamp is 100 DEG C or higher.
Description
Technical field
The invention relates to the improvement of the Excimer gas molecular discharging lamp irradiation unit that uses radiation can be applied to photochemically reactive ultraviolet Excimer gas molecular discharging lamp.
Background technology
All the time, people have known the cleaning technology by the ultraviolet lamp that uses ultraviolet light source for a long time, and in fields such as liquid crystal and semiconductor, light is just cleaned and obtained use always.As such ultraviolet lamp, there is profile to be essentially columnar discharge lamp, be concealed in and be provided with in the lamp house Mining light window and that be full of nitrogen.For example, on No. 2854255 communique of patent of Japan's login, record the ultraviolet lamp that uses the dielectric interface discharge lamp.
Fig. 5 is the figure of the formation shown in No. 2854255 communique of this patent of expression, columnar dielectric interface discharge lamp 41a, and 41b and 41c are arranged in the lamp house 21.Be provided with the window 20 that Mining light is used on above-mentioned lamp house 21, above-mentioned dielectric interface discharge lamp 41a has been full of nitrogen in the space 26 between 41b and 41c and the Mining light window 20.Under such formation, from above-mentioned dielectric interface discharge lamp 41a, among the vacuum ultraviolet that 41b and 41c emit, the part Zai Touch of the dielectric interface discharge lamp that directive is adjacent is to light reflecting board 43, be reflected after 45, the direct of travel of light is converted into downward direction, emits from Mining light window 20.In this occasion, though from dielectric interface discharge lamp 41a, the vacuum ultraviolet that 41b and 41c emit is by being positioned at dielectric interface discharge lamp 41a, and the space 26 between 41b and 41c and the Mining light window 20 is not absorbed owing to be full of nitrogen in this space 26.Thereby, be that it is vacuum ultraviolet to the part of horizontal direction light reflecting board 43 and 45 and directly to the total of the part of irradiated body that 41b and 41c emit from dielectric interface discharge lamp 41a from what Mining light window 20 was emitted.Above-mentioned Mining light window 20 becomes a plane ultraviolet light source in fact.
The existing irradiation unit that has the Mining light window like this, because the reason of the surface temperature lower (70 ℃ of of of of of of about about) of windowpane, the flying that shone thing from irradiation produces, with paying in the above after windowpane contacts, the perhaps organic solvent that contains in the set atmosphere of this device, acid, various medicines such as alkali swim in aerial occasion after the gasification atomizing, after being subjected to the ultraviolet ray irradiation, generate reaction products such as Liu Suan , thereby occur in problems such as paying the adularescent powder on the windowpane.Like this, when flying or white powder are being paid on the Mining light window, owing to having encumbered seeing through of quasi-molecule light ultraviolet intensity is reduced, or the flying piled up takes place, white powder etc. peel off, and problems such as pollution shone thing.In order to solve such problem, 100 ℃ of of of of of of .Do like of the spy of Japan opens and discloses the surface temperature that makes the Mining optical window in flat 11-295500 number and remain on more than this, because flying or white powder etc. are as long as a close windowpane just is decomposed owing to radiant heat, 100 ℃ of of of of of of thereby can paying at Mining light window.In order to remain on more than, open flat 11-295500 number according to this spy, in the inboard of Mining optical window, 100 ℃ of of of of of of Mining has got and has made windowpane be heated to means more than.
Summary of the invention
But Mining gets such means for heating, because of being accompanied by the expensive of Excimer gas molecular discharging lamp irradiation unit, rather than very desirable.
And, Excimer gas molecular discharging lamp and windowpane are (in the present application, " Mining optical window " in the technical background project is referred to as " windowpane ") between, owing to be provided with device in order to heat, therefore from the part of the light of the Excimer gas molecular discharging lamp of Excimer gas molecular discharging lamp irradiation, interdicted by this heater, the quasi-molecule light that arrives shone thing is reduced.
Also have, in recent years, the length of the Excimer gas molecular discharging lamp that extends for the speed that improves conveyance or increase reason such as its quantity makes that bigger Excimer gas molecular discharging lamp irradiation unit necessitates.Also have, also because the maximization of shone thing makes that also bigger Excimer gas molecular discharging lamp irradiation unit necessitates.Like this, just must make big windowpane.But big windowpane has to increase its thickness in order to ensure its intensity, and the very high cost of cost.More have, gradually, produced the problem that big windowpane self also becomes more and more difficult of making.
The present application has been considered such problem and has been studied.
That is to say that the feature of the present application is, producing expensive reason, and its make self also become difficulty windowpane oneself removed from the Excimer gas molecular discharging lamp irradiation unit.By like this, just do not change into this necessity.Also have, make the difficulty of big windowpane, just it doesn't matter with the Excimer gas molecular discharging lamp irradiation unit.More have,, also have shone thing can obtain the more accurate effect of cleaning owing to the distance of dwindling between Excimer gas molecular discharging lamp and the shone thing.
But, owing to do not have windowpane on the Excimer gas molecular discharging lamp irradiation unit, flying or white powder will take place paying lip-deep problem at Excimer gas molecular discharging lamp self.Therefore, in the present application, be to be feature more than 100 ℃ with the surface temperature of Excimer gas molecular discharging lamp.
By like this, flying that comes from object being treated or above-mentioned white powder etc. just can not paid the surface at Excimer gas molecular discharging lamp.Thereby, can prevent uitraviolet intensity low of Excimer gas molecular discharging lamp.That is to say, can prevent the low of ultraviolet intensity that shone thing receives.Also have, Excimer gas molecular discharging lamp is lip-deep is paying peeling off of thing because do not have, so also there is not the pollution of object being treated.More have, because of necessity of device that heated glass window self is not set, so cost can be very not high yet.
The surface temperature of Excimer gas molecular discharging lamp is more satisfactory below 180 ℃.The luminous tube of Excimer gas molecular discharging lamp is generally made by transparency silica glass, because the ultraviolet ray transmissivity of transparency silica glass can take place lowly.
Also have, the surface temperature of Excimer gas molecular discharging lamp can be measured by thermocouple is set.Also have,, the occasion of noise takes place by thermocouple measurement the time, can be determined at the temperature after Excimer gas molecular discharging lamp has just been turned off the light by to Excimer gas molecular discharging lamp irradiation high frequency.Surface temperature even Excimer gas molecular discharging lamp disappears behind the lamp, if after Excimer gas molecular discharging lamp just turned off the light, the temperature of being measured at this moment is substantially equal to Excimer gas molecular discharging lamp temperature just in use.
Also have, the Excimer gas molecular discharging lamp irradiation unit of the present application is that the parts that can catch the generation thing that comes from shone thing are arranged is feature to possess in lamp house.
After remaining on more than 100 ℃ by the surface temperature that makes Excimer gas molecular discharging lamp, though the surface of Excimer gas molecular discharging lamp, can not pay flying, but can pay other place beyond the surface of Excimer gas molecular discharging lamp from object being treated.This so-called other place, more occasion is meant the inside of lamp house.The occasion of being polluted in the inside of lamp house can be changed bigger time thereafter when device is maintained.Therefore, by the parts that can catch flying are set in lamp house, just can maintain device as long as replace these parts.Therefore, the upkeep cost of cutting device significantly.
The simple declaration of drawing
The sectional drawing of the example of shown in Figure 1 the is Excimer gas molecular discharging lamp relevant with the present invention.
The sectional drawing of the 1st example of shown in Figure 2 the is Excimer gas molecular discharging lamp irradiation unit relevant with the present invention.
The sectional drawing of the 2nd example of shown in Figure 3 the is Excimer gas molecular discharging lamp irradiation unit relevant with the present invention.
The sectional drawing of the 3rd example of shown in Figure 4 the is Excimer gas molecular discharging lamp irradiation unit relevant with the present invention.
Shown in Figure 5 is the sectional drawing of existing Excimer gas molecular discharging lamp irradiation unit.
Shown in Figure 6 is the surface temperature of Excimer gas molecular discharging lamp and the graph of a relation of uitraviolet intensity.
Here, 1 expression be Excimer gas molecular discharging lamp, the 2nd, electrode, 2 ' is electrode, the 3rd, luminous tube, the 5th, lamp house, the 6th, flying is caught plate, the 7th, lamp holder.
The specific embodiment
Below, with regard to example of the present invention, be illustrated with reference to legend.
The sectional drawing of the example of shown in Figure 1 the is Excimer gas molecular discharging lamp relevant with the present invention.In Fig. 1,1 expression be Excimer gas molecular discharging lamp, luminous tube 3 is to be made by transparency silica glass, section configuration is a square shape, quartzy thickness is the cuboid that is essentially of 2mm.Then, clog and make it sealing at the two ends of long axis direction, 4 the insides generate the gas (for example xenon) of quasi-molecule with suitable pressure when being enclosed in Excimer gas molecular discharging lamp and lighting a lamp in container.
In the one side of luminous tube 3 is that the electrode made by the metallic film of nickel 2 forms by vacuum metallizing.Material as metallic film can also use chromium except that nickel.Also have on the face of the relative side of face of the electrode 2 that forms by metallic film with above-mentioned formation, be formed with the electrode 2 ' that the metallic film by nickel forms equally.Just, in order to take out ultraviolet ray, except that the end that is provided with spongy lead, all form mesh-shape by the film formed electrode 2 ' of metal foil.Between the electrode 2 and electrode 2 ' by the Excimer gas molecular discharging lamp that constitutes like this, when high voltage high-frequency in addition, enclose the gas that is in the container in 4 and encouraged, and generation quasi-molecule light.The quasi-molecule light that takes place radiates to the outside from the mesh of the mesh-shape electrode 2 ' of downside.
The sectional drawing of the 1st example of shown in Figure 2 the is Excimer gas molecular discharging lamp irradiation unit relevant with the present invention.In Fig. 2, Excimer gas molecular discharging lamp 1 is being fixed on the lamp house 5 by Jie of lamp holder 7.By the Excimer gas molecular discharging lamp irradiation unit of such formation is arranged, when carrying out the ultraviolet ray irradiation, it is the place of 2～3mm that object being treated is configured in the distance of leaving Excimer gas molecular discharging lamp 1 to handled thing (not diagram) .Flying can take place from above-mentioned object being treated in the ultraviolet ray of coming out from 1 radiation of above-mentioned Excimer gas molecular discharging lamp when the irradiation object being treated.The shone thing here is mainly by organic solvent, acid, or various medicines such as alkali are cleaned.For this reason, these various medicines can absorb quasi-molecule light and decompose, and produce flying.As an example, such as hydrogen sulfide three ammoniums or Liu Suan etc. are arranged.
The flying of these generations moves up, when the surface temperature of Excimer gas molecular discharging lamp 1 at this moment below 100 ℃ the time, above-mentioned flying can paid the surface at above-mentioned Excimer gas molecular discharging lamp 1.When having flying paying on the surface of Excimer gas molecular discharging lamp 1, because encumbered ultraviolet seeing through, so reduced ultraviolet intensity.Also have, when paying of flying on the Excimer gas molecular discharging lamp surface recurred, the accumulation horizon of flying thickening gradually on the Excimer gas molecular discharging lamp surface will be from the Excimer gas molecular discharging lamp surfacial spalling.After the accumulation horizon of flying peels off on the Excimer gas molecular discharging lamp surface, can drop on the object being treated and its surface is polluted.
Here, confirmed when with the ultraviolet ray of the wavelength of 172nm the processing time of dry-cleaning etc. of being used to by test in the occasion of shining object being treated, in the not influence basically in low 85% o'clock of this ultraviolet intensity, but prolong about 30% at 70% o'clock in the low processing time.Therefore, for the uitraviolet intensity that obtains the processing time not being exerted an influence basically, the low rate that has necessary maintenance uitraviolet intensity at least is more than percent 85.
Therefore, wait inventors of the present invention and to pay the result who makes on the surface of Excimer gas molecular discharging lamp after the low method that prevents of uitraviolet intensity has been carried out various researchs, the surface temperature of Excimer gas molecular discharging lamp is remained on more than 100 ℃ as long as be to the flying that takes place from object being treated.That is to say, when the surface temperature of Excimer gas molecular discharging lamp is set in more than 100 ℃, the low rate of uitraviolet intensity can be not lowly after lighting a lamp in about 3000 hours yet to below percent 85.Also have, the surface temperature of Excimer gas molecular discharging lamp can make it to change by the output of adjusting Excimer gas molecular discharging lamp.
By said method, the Excimer gas molecular discharging lamp irradiation unit of the present application does not only have necessity of windowpane, also has, and the device of windowpane heating usefulness also be there is no need.Therefore, can provide and do not need the Excimer gas molecular discharging lamp of what cost irradiation unit.
Also have, more than 100 ℃ the time, the reason that flying can not paid can be considered as follows in the surface temperature of Excimer gas molecular discharging lamp.More than 100 ℃ the time, flying can not paid the surface of Excimer gas molecular discharging lamp in the surface temperature of Excimer gas molecular discharging lamp, and move to as the inner surface of lamp house 5, than the lower place of lamp surface temperature.Therefore, because flying is not being paid surface at lamp, just can not make ultraviolet intensity lowly to below percent 85.
Also have, the transmitance of the quasi-molecule light on luminous tube 3 is relevant with temperature, and transmitance can suddenly swash when surpassing 180 ℃ lowly, if but below 180 ℃, just can prevent that transmitance is lowly to below percent 85.
The sectional drawing of the 2nd example of shown in Figure 3 the is Excimer gas molecular discharging lamp irradiation unit relevant with the present invention.In Fig. 3, the 1st, Excimer gas molecular discharging lamp, this Excimer gas molecular discharging lamp are that Jie by lamp holder 7 is being fixed on the lamp house 5.Then, between Excimer gas molecular discharging lamp 1 and lamp house 5, be provided with flying trap setting 6.Also have, flying trap setting 6 is as shown in Figure 3, and all shapes of inner face of being arranged to cover the top and side that comprises lamp house 5 constitute.
After forming such formation, the flying that takes place on the surface of object being treated is being paid at flying trap setting 6 and is being captured.Paying removing of flying on flying trap setting 6, can be flying trap setting 6 to be taken off from lamp house clean, and also can be new 6 one of the exchange of flying trap setting.Therefore, the maintenance of Excimer gas molecular discharging lamp irradiation unit just becomes easy.More have, when the surface temperature of lamp is set in more than 100 ℃, the low rate of uitraviolet intensity can be not lowly after lighting a lamp in about 3000 hours yet to the advantage below percent 85.
The sectional drawing of the 3rd example of shown in Figure 4 the is Excimer gas molecular discharging lamp irradiation unit relevant with the present invention.In Fig. 4, in lamp house 5, Excimer gas molecular discharging lamp 1 is that Jie by lamp holder is being fixed.Between above-mentioned Excimer gas molecular discharging lamp 1 and the above-mentioned lamp house 5, be provided with the flying trap setting 6 that has permeability for gas.Above-mentioned flying trap setting 6, such as, can be the same thing of heat-resisting fabric that antidetonation metal or glass fibre are made.Also have, above-mentioned flying trap setting 6 is different with the 2nd example, because have permeability for gas, so be to form the junction configuration that links to each other with the side of lamp house 5.Form such formation, can prevent the intrusion of flying above flying trap setting 6 fully.
Also have, lamp house 5 is provided with gas to inlet 9, makes flowing gas between Excimer gas molecular discharging lamp 1 and the lamp house 5.Make such structure, because the flying that takes place from object being treated is discharged to outside the lamp house along downward air-flow, can solve as above-mentioned, the deposit of flying peels off and pollutes the problem of object being treated.
＜embodiment 〉
Below, be illustrated about embodiment.
In Fig. 1,1 the expression be Excimer gas molecular discharging lamp, be to constitute by the luminous tube 3 that transparent quartz glass is made.The cross section of luminous tube 3 be shaped as rectangle, peripheral dimension is the long about 35mm in limit, the about 12mm of minor face, with the perpendicular direction long axis direction of paper on length and the thickness of quartz glass tube be respectively about 1350mm and about 2mm.The two ends on long axis direction of above-mentioned luminous tube 3 are plugged sealing, approximately with the pressure of 4 * 104Pa, are enclosed in the xenon that Excimer gas molecular discharging lamp generates quasi-molecule in lighting a lamp in container.
On the one side of above-mentioned luminous tube 3, be about electrode that the metallic film of the nickel of 0.25mm makes 2 by thickness and form by vacuum metallizing.Also have on the one side opposite with the above-mentioned face that is formed with the electrode of being made by metallic film 2, same formation by thickness is about the electrode 2 ' that the metallic film of the nickel of 0.25mm is made.Just, emitted in order to make ultraviolet ray by the electrode 2 ' that metallic film is made, remove outside the end of setting up spongy lead, form the about 0.5mm of live width, the size of mesh is about the mesh-shape structure of 2mm.
High frequency high voltage in addition between the electrode 2 of the Excimer gas molecular discharging lamp that constitutes like this and electrode 2 ' has been encouraged the xenons that are enclosed in the container 4, thus generation quasi-molecule light.The quasi-molecule light that takes place in said vesse 4, the mesh of the cancellous electrode 2 ' by the below emits to the outside.
Then, the Excimer gas molecular discharging lamp that such formation is arranged is arranged to as shown in Figure 2 Excimer gas molecular discharging lamp irradiation unit, the electric load that is added in luminous tube 3 is carried out various changes, carry out Processing Test for the TFT substrate, the result after about 3000 hours Processing Test is as shown in table 1.Also have, in table 1, the uitraviolet intensity of each lamp is, is that 100 o'clock percentage is recently represented with the uitraviolet intensity of the Excimer gas molecular discharging lamp of No. the 4th, the embodiment that shows maximum intensity in an embodiment.Also have, the surface temperature of lamp is that the hull-skin temperature of the central part basically below Excimer gas molecular discharging lamp is represented.
Fig. 6 is the curve map that is illustrated in the relation of the surface temperature of the Excimer gas molecular discharging lamp in the table 1 and uitraviolet intensity.Can know from table 1 and Fig. 6, after lighting a lamp in about 3000 hours, the surface temperature of Excimer gas molecular discharging lamp is in 100～180 ℃ scope the time, not Excimer gas molecular discharging lamp not unusual in appearance, and ultraviolet intensity also remains on more than percent 88.With respect to this, when the surface temperature of Excimer gas molecular discharging lamp was discontented with 100 ℃, flying etc. will paid in the surface of Excimer gas molecular discharging lamp, and when variable color was turned white, it is low that ultraviolet intensity also suddenly swashs.The low reason of uitraviolet intensity when the surface temperature temperature of Excimer gas molecular discharging lamp surpasses 180 ℃, can think to constitute the low reason of ultraviolet ray transmissivity of the quartz glass of luminous tube 3 because the surface temperature of Excimer gas molecular discharging lamp is too high.
Can know from above result, problem of the present invention, just in order to prevent the pollution of ultraviolet low and shone thing, the scope that the surface temperature of Excimer gas molecular discharging lamp is set in 100～180 ℃ is desirable especially.
Table 1
| The embodiment sequence number | The electric load of luminous tube (W) | Uitraviolet intensity (%) | The appearance of Excimer gas molecular discharging lamp | The surface temperature of Excimer gas molecular discharging lamp (℃) |
| 1 | 230 | 30 | White powder is being paid | 75 |
| 2 | 250 | 52 | White powder is being paid | 88 |
| 3 | 300 | 88 | No abnormal | 100 |
| 4 | 350 | 100 | No abnormal | 130 |
| 5 | 400 | 98 | No abnormal | 150 |
| 6 | 450 | 88 | No abnormal | 180 |
| 7 | 500 | 45 | No abnormal | 200 |
| 8 | 550 | 33 | No abnormal | 210 |
Also have, change the gas of enclosing in the Excimer gas molecular discharging lamp, or the size that changes Excimer gas molecular discharging lamp is also tested, no matter which kind of occasion is conclusion be, as long as the scope that the surface temperature of Excimer gas molecular discharging lamp is set in 100～180 ℃ is interior, just can prevent paying of flying.
Present patent application is to write according to the Japanese patent application (special requisition 2003-435750) of application on December 26th, 2003, and its content is enrolled as reference at this.
The possibility of industrial utilization
As mentioned above, in having for the lamp house to the peristome of object being treated irradiation quasi-molecule light, dispose the Excimer gas molecular discharging lamp irradiation unit of Excimer gas molecular discharging lamp, quasi-molecule light from the Excimer gas molecular discharging lamp irradiation, do not shine directly on the shone thing by windowpane, and, when remaining on more than 100 ℃ by the surface temperature that makes Excimer gas molecular discharging lamp, the flying that the shone thing from irradiation takes place just can not paid the surface at Excimer gas molecular discharging lamp. Also have, necessary windowpane has not had necessity yet on existing Excimer gas molecular discharging lamp. Excimer gas molecular discharging lamp irradiation unit about the present application is great in industrial value.
Claims (10)
1. Excimer gas molecular discharging lamp irradiation unit, in lamp house, dispose Excimer gas molecular discharging lamp, wherein, quasi-molecule light from above-mentioned Excimer gas molecular discharging lamp irradiation, be not radiated on the shone thing by windowpane, the surface temperature of above-mentioned Excimer gas molecular discharging lamp is more than 100 ℃.
2. according to the Excimer gas molecular discharging lamp irradiation unit of claim 1 record, the surface temperature of above-mentioned Excimer gas molecular discharging lamp is below 180 ℃.
3. according to the Excimer gas molecular discharging lamp irradiation unit of claim 1 record, in above-mentioned lamp house, possesses the device that the generation thing that seizure takes place from above-mentioned shone thing is arranged.
4. the using method of an Excimer gas molecular discharging lamp irradiation unit, this Excimer gas molecular discharging lamp irradiation unit disposes Excimer gas molecular discharging lamp in lamp house, wherein, quasi-molecule light from above-mentioned Excimer gas molecular discharging lamp irradiation, do not shine on the shone thing by windowpane, the surface temperature of above-mentioned Excimer gas molecular discharging lamp is more than 100 ℃.
5. according to the using method of the Excimer gas molecular discharging lamp irradiation unit of claim 4 record, the surface temperature of above-mentioned Excimer gas molecular discharging lamp is below 180 ℃.
6. according to the using method of the Excimer gas molecular discharging lamp irradiation unit of claim 4 record, in above-mentioned lamp house, possesses the device of the generation thing that seizure takes place from above-mentioned shone thing.
7. Excimer gas molecular discharging lamp irradiation unit, in lamp house, dispose Excimer gas molecular discharging lamp, wherein, quasi-molecule light from above-mentioned Excimer gas molecular discharging lamp irradiation, do not shine on the shone thing, in above-mentioned lamp house, possess the device of the generation thing that seizure takes place from above-mentioned shone thing by windowpane.
8. according to the Excimer gas molecular discharging lamp irradiation unit of claim 7 record, said apparatus has permeability for gas.
9. according to the Excimer gas molecular discharging lamp irradiation unit of claim 7 record, said apparatus is by the antidetonation metal, perhaps the heat-resisting fabric made of glass fibre.
According to Claim 8 the record the Excimer gas molecular discharging lamp irradiation unit, said apparatus links together with above-mentioned lamp house.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP435750/2003 | 2003-12-26 | ||
| JP2003435750A JP2005193088A (en) | 2003-12-26 | 2003-12-26 | Excimer lamp irradiation apparatus |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1787875A true CN1787875A (en) | 2006-06-14 |
| CN100420512C CN100420512C (en) | 2008-09-24 |
Family
ID=34746912
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB2004800127242A Active CN100420512C (en) | 2003-12-26 | 2004-12-24 | Excimer gas molecular discharging lamp irradiation device and method for using the same |
Country Status (5)
| Country | Link |
|---|---|
| JP (1) | JP2005193088A (en) |
| KR (1) | KR100641309B1 (en) |
| CN (1) | CN100420512C (en) |
| TW (1) | TWI259497B (en) |
| WO (1) | WO2005065817A1 (en) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4501830B2 (en) | 2005-09-28 | 2010-07-14 | ウシオ電機株式会社 | Excimer lamp and ultraviolet irradiation device |
| JP5146061B2 (en) * | 2008-04-10 | 2013-02-20 | ウシオ電機株式会社 | Excimer lamp and lamp unit equipped with the same |
| JP5195111B2 (en) * | 2008-07-17 | 2013-05-08 | ウシオ電機株式会社 | Excimer lamp device |
| KR102636974B1 (en) * | 2019-10-07 | 2024-02-15 | 우시오덴키 가부시키가이샤 | Ultraviolet ray radiation device |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3653980B2 (en) * | 1998-04-09 | 2005-06-02 | ウシオ電機株式会社 | UV irradiation equipment |
| JP4045682B2 (en) * | 1999-01-26 | 2008-02-13 | 株式会社日立ハイテクノロジーズ | Substrate processing equipment by UV irradiation |
| JP2001185089A (en) * | 1999-12-28 | 2001-07-06 | Quark Systems Co Ltd | Excimer irradiation device |
| CA2364613C (en) * | 1999-06-04 | 2005-03-22 | Henry Kozlowski | Apparatus for ultraviolet light treatment of fluids |
| JP2001217216A (en) * | 1999-11-25 | 2001-08-10 | Hoya Schott Kk | Method and device for ultraviolet-ray irradiation |
| JP2001319510A (en) * | 2000-05-11 | 2001-11-16 | Ushio Inc | Dielectric barrier discharge lamp device |
| US6559460B1 (en) * | 2000-10-31 | 2003-05-06 | Nordson Corporation | Ultraviolet lamp system and methods |
| JP3757790B2 (en) * | 2000-11-30 | 2006-03-22 | ウシオ電機株式会社 | Light source device using dielectric barrier discharge lamp |
| JP4126892B2 (en) * | 2001-09-14 | 2008-07-30 | ウシオ電機株式会社 | Light irradiation device |
-
2003
- 2003-12-26 JP JP2003435750A patent/JP2005193088A/en active Pending
-
2004
- 2004-12-21 TW TW093139767A patent/TWI259497B/en active
- 2004-12-24 KR KR1020057004537A patent/KR100641309B1/en active IP Right Grant
- 2004-12-24 CN CNB2004800127242A patent/CN100420512C/en active Active
- 2004-12-24 WO PCT/JP2004/019762 patent/WO2005065817A1/en active Application Filing
Also Published As
| Publication number | Publication date |
|---|---|
| JP2005193088A (en) | 2005-07-21 |
| KR20060038900A (en) | 2006-05-04 |
| TWI259497B (en) | 2006-08-01 |
| KR100641309B1 (en) | 2006-11-01 |
| WO2005065817A1 (en) | 2005-07-21 |
| CN100420512C (en) | 2008-09-24 |
| TW200522127A (en) | 2005-07-01 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN113758561A (en) | Spacecraft space ultraviolet induced pollution enhancement effect test device and method | |
| CN1582094A (en) | Figure-forming method and wire-layout figure forming method and photoelectronic device | |
| CN1787875A (en) | Excimer gas molecular discharging lamp irradiation device and method for using the same | |
| Pan et al. | Synergizing piezoelectric and plasmonic modulation of PVDF/MoS2 cavity/Au for enhanced photocatalysis | |
| KR20130121875A (en) | Process for producing metallic structures | |
| KR102659512B1 (en) | Methods for creating conductive structures | |
| CN101681802A (en) | Method and apparatus for reducing the effects of window clouding on a viewport window in a reactive environment | |
| Medvecká et al. | ZnO nanofibers prepared by plasma assisted calcination: Characterization and photocatalytic properties | |
| JP2001521980A (en) | Fluorescent material | |
| CN109690809A (en) | Cleaning masks device and cleaning masks method | |
| Matsui et al. | Optical properties of “black silicon” formed by catalytic etching of Au/Si (100) wafers | |
| Olopade et al. | Structural and optical characteristics of sol gel spin-coated nanocrystalline CdS thin film | |
| Matthews et al. | Organofunctional silane modification of aluminum-doped zinc oxide surfaces as a route to stabilization | |
| CN107450236A (en) | Polarized light illumination device and light orientation device | |
| CN113009598B (en) | Method for improving water/mechanical stability of opal photonic crystal film | |
| JP3653980B2 (en) | UV irradiation equipment | |
| CN110917746B (en) | Spraying waste gas coating cloud optical purification equipment | |
| Guesmi et al. | Study of defects in fused silica via a Franck-Condon analysis | |
| CN1891857A (en) | Carbonyl metal gas-phase deposition apparatus and method | |
| US6787787B1 (en) | Ultraviolet radiation producing apparatus | |
| CN211676718U (en) | Spraying waste gas coating cloud optical purification equipment | |
| Sosnin | Excimer lamps and based on them a new family of ultraviolet radiation sources | |
| KR101704963B1 (en) | Apparatus for intense pulsed light sintering | |
| KR100462750B1 (en) | Ultraviolet light irradiation apparatus | |
| CN214106287U (en) | Easily clear up light oxygen catalytic apparatus |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| ASS | Succession or assignment of patent right |
Owner name: GS YUASA CORPORATION Free format text: FORMER OWNER: YUASA BATTERY CO LTD Effective date: 20101112 |
|
| C41 | Transfer of patent application or patent right or utility model | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20101112 Address after: Kyoto Prefecture Patentee after: GS Yuasa International Corporation Address before: Kyoto Japan Patentee before: Yuasa Battery Co., Ltd. |