CN1780073A - Preionizing device for impusle gas laser - Google Patents
Preionizing device for impusle gas laser Download PDFInfo
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- CN1780073A CN1780073A CNA2004100098114A CN200410009811A CN1780073A CN 1780073 A CN1780073 A CN 1780073A CN A2004100098114 A CNA2004100098114 A CN A2004100098114A CN 200410009811 A CN200410009811 A CN 200410009811A CN 1780073 A CN1780073 A CN 1780073A
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Abstract
A preionizing device of pulse gas laser features that its surficial preionizing array is positioned at one or both sides of cathodes used also as a common electrode in electrode pairs of preionizing array, and the another electrode in electrode pair is composed of multiple narrow metallic pieces arranged uniformly on an insulating medium plate connected to cathode. When high-voltage pulses are applied to said electrode pair, flash discharge takes place to generate efficient ultraviolet light and provide a lot of initial electrons in discharge space.
Description
Technical field
The present invention is relevant with gas laser, particularly the sliding preionization device that dodges of a kind of surperficial multichannel of high repetitive frequency pulsed gas laser.
Technical background
The performance of pulsed gas laser (comprising maximum energy density, the laser beam quality etc. of injecting), particularly TEACO
2Laser, excimer laser, pulse HF/DF chemical laser, mainly depend on the preionization degree of gas medium, promptly depend on the distribution situation of discharge space in the electron concentration of the initial period of discharge development, modal two kinds of preionization schemes are free spark preionization and corona preionization, for the hyperbar pulsed gas laser, free spark preionization is more effective than corona preionization.The process that free spark preionization takes place is as follows: storage capacitor is charged to certain high pressure by resistance by high voltage source, after the high-voltage switch gear closure, because the distance between preionization spark pin is more much smaller than the distance between main discharge electrode, therefore discharges earlier.The ultraviolet light that produces can make the gas in the discharge space produce initial preionization.
When free spark preionization, the spark stylus that produces preionized discharge is ablated easily, if it is particularly serious that some spark pin is ablated, to cause the asynchronous of preionized discharge between the spark pin, this will directly cause the inhomogeneous of main discharge, influence the laser output performance repeatability of (comprising pulsed laser energy, time and spatial distribution).Behind multiple discharge, also be easy to generate pollutant, reduce the useful life of gas, and the spark stylus is easily ablated often replacing.Because free spark has very big barrier effect at wind speed, this structure also is unfavorable for the running of laser repetition rate.
Adopt gliding spark discharge to provide preionization, can provide, can also avoid the shortcoming of free spark preionization simultaneously than free spark preionization preionization more efficiently for laser.Gliding spark discharge is when high-voltage pulse is added between two electrodes, a kind of discharge type that forms along the dielectric surface.The plasma temperature of discharge generation is up to 6 * 10
4K often is used to produce strong ultraviolet and extreme ultraviolet light source in recent years, can be used as the preionization source of pulsed gas laser.Gliding spark discharge is a kind of TEACO that more is applicable to
2The preionization mode of laser, excimer laser and pulse HF/DF chemical laser.The Tatsuo of Japan etc. are (referring to " A volumetric phto-preionization in aco
2-laser gas mixture by VUV radiation " Jpn.J.Appl.Phys 19pp1189-1190,1980) compared the spark of free spark and the formation of surperficial gliding spark discharge at CO
2Produce the situation of electronics in the laser gas mixture.Experimental result shows, seems more effective at surface gliding spark discharge aspect the electronics output capacity, and the electronics output capacity is 3 times of free spark.Richardson etc. are (referring to " Large aperture CO
2Laser discharges " IEEE J.Quantum.ElectronQE-8 pp934-939; 1973) adopt two dimensional surface multichannel gliding spark discharge to provide preionization for discharge space; and the sliding surface of dodging is positioned at below the mesh electrode; and ultraviolet light sees through mesh and comes the interior gas molecule of ionization main discharge space; by a public capacitance control energy that preionization consumed, cause the inhomogeneous of preionization easily.
Summary of the invention
The objective of the invention is to provides a kind of device of preionization efficiently for pulsed gas laser, make that lasing efficient is higher, further improve useful life of preionization device itself and laser gas, also help to improve the repetition rate and the average output power of laser.
Technical solution of the present invention is:
A kind of preionization device of pulsed gas laser dodges the preionization device for surperficial multichannel is sliding, and wherein, a) in the pulsed gas discharge laser, main discharge electrode is made up of a pair of uniform field solid electrode; B) initiating electron of the discharge space of main discharge electrode formation is provided by surperficial multichannel gliding spark discharge, a public electrode is the main discharge electrode negative electrode in the electrode pair of generation preionized discharge, another relative electrode is a plurality of equally distributed narrow sheet metals, both are connected by insulation medium board, and this dielectric-slab provides creepage passage for gliding spark discharge; C) all with separately coupling capacitance independent, identical size is directly continuous for the narrow sheet metal in each gliding spark discharge passage.
Described preionization device, its mixed laser gas is filled in the laser cavity, discharge cell wherein comprises solid uniform field main discharge anode and negative electrode, the space that electrode pair surrounds relatively is a main discharge space, anode links to each other with the laser cavity metal shell, ground connection then, negative electrode is supported by nylon rod, links to each other with high-voltage pulsed source by lead-in wire then; Respectively there is an insulation medium board close-connected with it the negative electrode both sides, every insulation medium board is evenly distributed with the narrow sheet metal of a row away from negative electrode one side lower surface, narrow sheet metal links to each other with separately preionization coupling capacitance, and coupling capacitance is by laser cavity metal shell ground connection; It is right that narrow sheet metal and negative electrode form a plurality of pre-ionization electrodes in parallel; One side insulation medium board links to each other with a crosswind guidance tape.
Described preionization device, its described insulation medium board is identical rectangular planes thin plate with cathode length, its long axis direction is vertical with the main discharge direction.
Described preionization device, its described insulation medium board is pottery or epoxy insulating board, is anti-ablation and the stable long-life insulating material making of chemical characteristic.
Described preionization device, its described insulation medium board, the angle of this board plane and cathode surface is less than 30 degree.
Described preionization device, its described equally distributed narrow sheet metal, the spacing of adjacent narrow sheet metal is 1-4 centimetre.
Described preionization device, its described narrow sheet metal, because it is lower to form the required voltage of gliding spark discharge, the spacing of narrow sheet metal and main discharge electrode cathode side is 1-3 centimetre.
Described preionization device, its described narrow sheet metal is the nickel sheet.
Described preionization device, its described coupling capacitance is higfh-tension ceramics electric capacity.
The present invention adopts surface sliding sudden strain of a muscle multichannel to discharge and produces ultraviolet light, has prolonged the useful life of preionization device greatly.Produce the required voltage of surperficial gliding spark discharge far below producing the required puncture voltage of free spark, therefore the sliding length of dodging passage in surface can be very long.This discharge is very little to the infringement of preionization device, even ablate when serious at the preionization sheet metal, still can not influence the synchronism of preionized discharge.Because the impurity that each surperficial gliding spark discharge produces seldom, can improve the repetition rate of laser when repetition is turned round, thereby help the raising of laser average output power, surface multichannel gliding spark discharge also helps to improve the stability of output of laser and repeated, the useful life of improving laser gas.
The present invention provides a kind of novel multi-channel surface gliding spark discharge structure, by produce surperficial multichannel gliding spark discharge in the solid electrode both sides, can guarantee to produce enough initiating electron concentration, improve the injection energy of laser, can prolong the useful life of laser gas and spark pin simultaneously.The pulsed gas laser that is particularly useful for the high repetition frequency running.
Description of drawings
Fig. 1 is a pulsed gas laser preionization apparatus structure schematic diagram of the present invention;
Embodiment
A kind of preionization device of pulsed gas laser dodges the preionization device for surperficial multichannel is sliding, it is characterized in that this device is positioned at main discharge negative electrode one or both sides and places.This device is made of side by side many groups pre-ionization electrode, wherein the main discharge negative electrode is a public electrode of pre-ionization electrode group, and another electrode of pre-ionization electrode group is identical narrow sheet metal, and this sheet metal should have very strong anti-ablative, and be easy to processing, as the nickel sheet.For guaranteeing the spatially uniform of preionization, the spacing of adjacent narrow sheet metal equates that be generally 1-4 centimetre, the concrete number of sheet metal is decided according to the size of laser.The electrode pair that produces preionization is by an anti-ablation, insulating material (Al that chemical characteristic is stable
2O
3, BaTiO
3, SrTiO
3Deng) the media plate connection, in order to guarantee good thermal conductivity, dielectric-slab should not be too thick.Narrow sheet metal is fixed on lower surface one side of dielectric-slab equably, the upper surface opposite side of dielectric-slab should closely contact with cathode side, for guaranteeing that laser can be in repetition rate pattern high-efficient operation, the dielectric-slab surface is unsuitable excessive with the angle of anode surface, should be not more than 30 degree.Owing to produce the required voltage of surperficial gliding spark discharge far below producing the required puncture voltage of free spark, therefore the spacing of sheet metal and main discharge electrode negative electrode can be very big, the benefit of doing like this is to avoid main discharge to pass through the creepage phenomenon that the metal arrow gauge forms, and has improved the utilance that sliding sudden strain of a muscle preionization produces ultraviolet light greatly.Before main discharge takes place, this dielectric-slab provides passage for the multichannel gliding spark discharge, each narrow sheet metal and common cathode form electrode pair, when high-voltage pulse is added in this electrode pair, form surperficial multichannel gliding spark discharge by insulation medium board, produce ultraviolet light efficiently, for main discharge space provides abundant initiating electron.And when adopting free spark preionization scheme, for avoiding above creepage phenomenon, the metal arrow gauge should be than the low 3-5 millimeter of cathode surface, and this can cause the decline of main discharge space to the ultraviolet light utilance.
All with separately ceramic condenser independent, identical size is directly continuous for metal arrow gauge in each gliding spark discharge passage, has guaranteed preionization high efficiency and uniformity, and the acquisition for good beam quality simultaneously provides good basis.Can control the energy that gliding spark discharge consumes by the ceramic condenser of changing different sizes, preionization is optimized.Insulation medium board in the multichannel gliding spark discharge of surface also plays the effect in auxiliary air channel simultaneously.When repetition rate turns round, can reduce the loss of air-flow, improve the wind speed of region of discharge, make the wind speed of region of discharge more even.
The structural representation of pulsed gas laser preionization device of the present invention, as shown in Figure 1.Mixed laser gas is filled in the laser cavity 1, and discharge cell wherein comprises solid uniform field main discharge anode 2 and negative electrode 3, and this electrode pair has been stipulated main discharge space 4, and anode 2 links to each other with laser cavity metal shell 5, then ground connection.Negative electrode 3 is supported by the nylon rod 6 of certain altitude, links to each other with high-voltage pulsed source by lead-in wire 7 then.Respectively there is an insulation medium board 8 close-connected with it negative electrode 3 both sides, and insulation medium board 8 surfaces are spent less than 15 with the angle on negative electrode 3 surfaces.Every insulation medium board 8 is evenly distributed with the narrow sheet metal 9 of a row away from negative electrode 3 one sides, and the spacing of adjacent narrow sheet metal 9 is 2-4 centimetre.Narrow sheet metal 9 links to each other with separately preionization coupling capacitance 10, and coupling capacitance 10 is by laser cavity metal shell 5 ground connection.It is right that narrow sheet metal 9 and negative electrode 3 forms a plurality of pre-ionization electrodes in parallel, and when extraneous high-voltage pulse is added in the process of negative electrode 3, coupling capacitance 10 begins charging, and narrow sheet metal 9 forms gliding spark discharges 11 with negative electrode 3 by insulation medium board 8 surfaces.Gas molecule in the main discharge space 4 is ionized, and when the voltage of negative electrode 3 reached certain particular value, anode 2 and negative electrode 3 formed uniform glow discharge at main discharge space 4.When the laser repetition rate turned round, insulation medium board 8 can be regarded the continuity of air channel plate 12 as, can reduce the loss of air-flow, improved the wind speed of region of discharge, made the wind speed of region of discharge more even.
Be a specific embodiment below:
One is full of air pressure is 90kpa, mixing ratio CO
2: N
2: He=1: in the laser of 1: 4 gas, the discharge volume of a pair of solid uniform field main electrode regulation is 40mm * 50mm * 800mm, and cathode material is the A3 steel, and anode material is a duralumin.A thick 2mm of being is respectively placed in the negative electrode both sides, the epoxy insulating board identical with cathode length, and epoxy insulating board one side closely contacts with cathode side, and its upper surface is than the low 1mm of cathode surface.Epoxy insulating board surface becomes 15 to spend angles with cathode surface, epoxy insulating board opposite side surface is evenly distributed with 48 narrow nickel sheets, and the distance of nickel sheet and cathode side is 10mm, each narrow nickel sheet ground connection then that links to each other with 350pF higfh-tension ceramics electric capacity respectively.When high-voltage pulse when negative electrode forms, nickel sheet and negative electrode form uniform multichannel gliding spark discharge by epoxy insulating board surface, and the gas molecule in the main discharge space is carried out fully effectively ionization, make the injection energy density of laser improve greatly.Experimental result shows that the discharge of laser still shows as uniform glow discharge when the energy of 250J injects.Further optimize the preionization structure, the injection energy of laser still has the potentiality of raising.
In sum, the present invention is that the plane multichannel gliding spark discharge by the main discharge electrode side provides preionization efficiently for main discharge space, improves the injection energy and the laser output energy of laser.That this device has is simple in structure, debug conveniently, long advantage of life-span.Be fit to be used as TEACO
2The preionization device of laser, excimer laser and pulse HF/DF chemical laser is particularly useful for the high repetition frequency device.
Claims (9)
1. the preionization device of a pulsed gas laser dodges the preionization device for surperficial multichannel is sliding, it is characterized in that a) in the pulsed gas discharge laser, main discharge electrode is made up of a pair of uniform field solid electrode; B) initiating electron of the discharge space of main discharge electrode formation is provided by surperficial multichannel gliding spark discharge, a public electrode is the main discharge electrode negative electrode in the electrode pair of generation preionized discharge, another relative electrode is a plurality of equally distributed narrow sheet metals, both are connected by insulation medium board, and this dielectric-slab provides creepage passage for gliding spark discharge; C) all with separately coupling capacitance independent, identical size is directly continuous for the narrow sheet metal in each gliding spark discharge passage.
2. preionization device as claimed in claim 1, it is characterized in that, mixed laser gas is filled in the laser cavity, discharge cell wherein comprises solid uniform field main discharge anode and negative electrode, the space that electrode pair surrounds relatively is a main discharge space, and anode links to each other with the laser cavity metal shell, then ground connection, negative electrode is supported by nylon rod, links to each other with high-voltage pulsed source by lead-in wire then; Respectively there is an insulation medium board close-connected with it the negative electrode both sides, every insulation medium board is evenly distributed with the narrow sheet metal of a row away from negative electrode one side lower surface, narrow sheet metal links to each other with separately preionization coupling capacitance, and coupling capacitance is by laser cavity metal shell ground connection; It is right that narrow sheet metal and negative electrode form a plurality of pre-ionization electrodes in parallel; One side insulation medium board links to each other with a crosswind guidance tape.
3. preionization device as claimed in claim 1 or 2 is characterized in that, described insulation medium board is identical rectangular planes thin plate with cathode length, and its long axis direction is vertical with the main discharge direction.
4. preionization device as claimed in claim 1 or 2 is characterized in that, described insulation medium board is pottery or epoxy insulating board, is anti-ablation and the stable long-life insulating material making of chemical characteristic.
5. preionization device as claimed in claim 1 or 2 is characterized in that, described insulation medium board, and the angle of this board plane and cathode surface is less than 30 degree.
6. preionization device as claimed in claim 1 or 2 is characterized in that, described equally distributed narrow sheet metal, and the spacing of adjacent narrow sheet metal is 1-4 centimetre.
7. preionization device as claimed in claim 1 or 2 is characterized in that, described narrow sheet metal, because it is lower to form the required voltage of gliding spark discharge, the spacing of narrow sheet metal and main discharge electrode cathode side is 1-3 centimetre.
8. preionization device as claimed in claim 1 or 2 is characterized in that, described narrow sheet metal is the nickel sheet.
9. preionization device as claimed in claim 1 or 2 is characterized in that, described coupling capacitance is higfh-tension ceramics electric capacity.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2004100098114A CN100399650C (en) | 2004-11-18 | 2004-11-18 | Preionizing device for impusle gas laser |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2004100098114A CN100399650C (en) | 2004-11-18 | 2004-11-18 | Preionizing device for impusle gas laser |
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| CN1780073A true CN1780073A (en) | 2006-05-31 |
| CN100399650C CN100399650C (en) | 2008-07-02 |
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|---|---|---|---|
| CNB2004100098114A Expired - Fee Related CN100399650C (en) | 2004-11-18 | 2004-11-18 | Preionizing device for impusle gas laser |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101847819B (en) * | 2009-03-25 | 2011-12-21 | 中国科学院电子学研究所 | Method for reducing initial peak of output laser pulse of transversely excited carbon dioxide laser |
| CN102025094B (en) * | 2009-09-23 | 2012-06-06 | 中国科学院电子学研究所 | Transverse discharge device for pulsed gas laser |
| CN102768926A (en) * | 2011-10-20 | 2012-11-07 | 中国科学院光电研究院 | Gas discharge electrode structure |
| CN105098580A (en) * | 2015-09-01 | 2015-11-25 | 西北核技术研究所 | Gas discharge preionization apparatus |
| CN110800174A (en) * | 2017-08-07 | 2020-02-14 | 极光先进雷射株式会社 | Cooling structure of capacitor and laser device |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH11168253A (en) * | 1997-12-04 | 1999-06-22 | Toshiba Corp | Laser oscillator |
| US6650679B1 (en) * | 1999-02-10 | 2003-11-18 | Lambda Physik Ag | Preionization arrangement for gas laser |
| JP2001177168A (en) * | 1999-12-20 | 2001-06-29 | Meidensha Corp | Discharge tube device |
| CN1122342C (en) * | 2000-06-13 | 2003-09-24 | 中国科学院电子学研究所 | Pulse gas laser |
-
2004
- 2004-11-18 CN CNB2004100098114A patent/CN100399650C/en not_active Expired - Fee Related
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101847819B (en) * | 2009-03-25 | 2011-12-21 | 中国科学院电子学研究所 | Method for reducing initial peak of output laser pulse of transversely excited carbon dioxide laser |
| CN102025094B (en) * | 2009-09-23 | 2012-06-06 | 中国科学院电子学研究所 | Transverse discharge device for pulsed gas laser |
| CN102768926A (en) * | 2011-10-20 | 2012-11-07 | 中国科学院光电研究院 | Gas discharge electrode structure |
| CN102768926B (en) * | 2011-10-20 | 2015-07-22 | 中国科学院光电研究院 | Gas discharge electrode structure |
| CN105098580A (en) * | 2015-09-01 | 2015-11-25 | 西北核技术研究所 | Gas discharge preionization apparatus |
| CN110800174A (en) * | 2017-08-07 | 2020-02-14 | 极光先进雷射株式会社 | Cooling structure of capacitor and laser device |
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| Publication number | Publication date |
|---|---|
| CN100399650C (en) | 2008-07-02 |
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Granted publication date: 20080702 Termination date: 20101118 |