CN1770003A - Light source apparatus and fabrication method thereof - Google Patents
Light source apparatus and fabrication method thereof Download PDFInfo
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- CN1770003A CN1770003A CN200510118625.9A CN200510118625A CN1770003A CN 1770003 A CN1770003 A CN 1770003A CN 200510118625 A CN200510118625 A CN 200510118625A CN 1770003 A CN1770003 A CN 1770003A
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Abstract
The invention provides a light source device provided with a concave reflecting mirror which uses a metallic reflecting mirror in order to satisfy two conditions such that strength for preventing damage of the reflecting mirror itself is secured at lamp damage due to pressure when lighting a discharge lamp and heat of the reflecting mirror and the lamp is efficiently radiated to the outside of a projector casing, has a glass layer having excellent infrared absorption performance and is tightly fitted to a metal base body attached thereto. This light source device comprises a high-pressure discharge lamp and the concave reflecting mirror surrounding the high-pressure discharge lamp. In the light source device, the concave reflecting mirror comprises: the metal base body formed of aluminum, an alloy containing aluminum as a main constituent or stainless steel; the glass layer formed on the inside surface of the metal base body and containing an oxide of at least one metal of nickel, cobalt, vanadium, copper, zirconium, calcium, manganese and molybdenum; and a dielectric multilayer film layer formed on the glass layer.
Description
Technical field
The present invention relates to the light supply apparatus that constitutes by high-pressure discharge lamp and concave mirror thereof.Be particularly related to the DLPTM projection arrangements such as (Digital Light Processors) that uses liquid crystal indicator or DMDTM (Digital Micromirror Device), these devices have used with at luminotron inner sealing 0.25mg/mm
3Above mercury and when lighting mercury vapour reach the extra-high-pressure mercury vapour lamp of UHV (ultra-high voltage) as light source.
Background technology
For rectangular screen, require the porjection type projector to have even and sufficient colour rendering and can illuminate image.Therefore, as light source, can use the metal halide lamp of enclosing mercury or metal halide.At this metalloid halide lamp, recently, research and develop further miniaturization, pointoliteization, and, realized the minimization of interelectrode distance.
Under this background, recently, replace metal halide lamp, proposed to have the lamp that high mercury vapour is pressed (for example 150 atmospheric pressure) at present.It is pressed by further improving mercury vapour, can suppress and dwindle the expansion of electric arc, the output that can further improve light simultaneously.
For example open flat 2-148561 communique the spy, the spy opens in the flat 6-52830 communique and discloses this ultra-high pressure discharge lamp.
On the other hand, the light supply apparatus that uses in projection arrangement needs and can reflect the radiating light that is sent by illuminator along optical axis direction is efficient, and makes it be radiated at illuminated zones such as display panels.Light supply apparatus adopts short arc discharge lamp usually and will be converted to the concave mirror of directional light from the light of this discharge lamp radiation.
In the last few years, the DLP device of strong request liquid crystal projection apparatus or use DMD can be realized miniaturization, and was corresponding therewith, also required light supply apparatus to realize miniaturization.In addition, realize that as the display panels of shone thing itself miniaturization also becomes a reason of requirement light supply apparatus miniaturization.
Being used to of using in the projection source that this projector is used etc. assembled the material of reflection of light mirror of lamp owing at high temperature can therefore, should be adopted the glass or the pottery of exotic material by bleaching (さ ら The).But to compare thermal conductivity bad with metal for glass or pottery, when realizing the catoptron miniaturization, must initiatively cooling air be imported in the catoptron so that lamp and catoptron cool off.In addition, because the internal pressure of discharge lamp when lighting can reach UHV (ultra-high voltage) (for example, 150 more than the atmospheric pressure), therefore, just in case the discharge lamp breakage, then can worry that catoptron is also damaged.
On the other hand, remedy the shortcoming of ceramic machinery intensity and have stable on heating metallic catoptron and be unsuitable for the projection source that projector is used etc.If metallic mirror utilizes reflecting surface to catoptron the place ahead radiation heat ray (infrared ray), then can cause deteriorations such as liquid-crystal apparatus.Yet, recently, open the technology of 2004-170877 communique disclosing as the spy, that is, as the metallic catoptron, with aluminium (Al) as reflecting body substrate 1, the surface is provided with the ceramic coat 3 of Pyrex within it, and adding the ferronickel spinel in this ceramic coat 3 is black pigment.Its
Embodiment as shown in Figure 3.
Though this disclosed technology has disclosed the possibility of use metallic catoptrons such as projector, but, contain glassy layer on the matrix of aluminium, containing the ferronickel spinel at this glassy layer is black pigment, and these black pigments can be decayed from the infrared ray of discharge lamp radiation.
Its principle is that infrared ray can be decayed when running into granules of pigments in rapid succession.When making the infrared ray decay using pigment, stroke distances is necessary, and the thickness of ceramic coat 3 also is necessary.If ceramic coat 3 has certain thickness, then can worry peeling off with causing by thermal expansion difference at the interface of metallic matrix.Perhaps, there is following situation, that is, attaches multiple inteferometer coating 4 on the surface of described ceramic coat 3, before attaching multiple inteferometer coating 4, want milled ceramic coating 3.Therefore, worry that when grinding, the particle of pigment can be exposed to the surface and become coarse with the surface that causes ceramic coat 3.
Patent documentation 1: the spy opens flat 2-148561 communique
Patent documentation 2: the spy opens flat 6-52830 communique
Patent documentation 3: the spy opens the 2004-170877 communique
Summary of the invention
Therefore, problem solved by the invention is: because the pressure during discharge tube lighting can reach UHV (ultra-high voltage), therefore, in order to satisfy following condition: the catoptron itself of guaranteeing to coat lamp when lamp is damaged can damaged intensity; Heat discharge with catoptron and lamp goes out outside the framework of projector effectively, and provide a kind of light supply apparatus that is provided with the metallic concave mirror, described metallic concave mirror has used metallic mirror, and have unexistent in the past good infrared ray absorbing performance, and have the glassy layer that is close on the metallic matrix.
To achieve these goals, the invention of technical scheme 1 record provides a kind of light supply apparatus, it is made of high-pressure discharge lamp and the concave mirror that surrounds this high-pressure discharge lamp, it is characterized in that, described concave mirror is by metallic matrix, glassy layer and the dielectric multilayer rete that is arranged on this glassy layer constitute, wherein, described metallic matrix is the alloy of principal ingredient by aluminium or with aluminium, perhaps any one material in the stainless steel constitutes, and described glassy layer is formed on this metallic matrix inside surface and contains nickel, cobalt, vanadium, copper, zirconium, calcium, manganese, the oxide of the metal more than at least a kind in the molybdenum.
For the light supply apparatus that technical scheme 1 is put down in writing, the invention of technical scheme 2 records is characterised in that the total amount of the described metal oxide that contains in the described glassy layer is 1～30 weight % with respect to base glass material.
For any light supply apparatus of being put down in writing in technical scheme 1 or 2, the invention of technical scheme 3 records is characterised in that described glassy layer is provided with described glassy layer material on the inside surface of concave shape metallic matrix, form by hot pressing afterwards.
For any light supply apparatus of being put down in writing in technical scheme 1 or 2, the invention of technical scheme 4 records is characterised in that, described glassy layer, the winding-up (Block ロ one ィ Application グ) of glass material by winding-up (blow I and pay the け Ru) fusion on the inside surface of concave shape metallic matrix forms.
For any light supply apparatus of being put down in writing in the technical scheme 1～4, the invention of technical scheme 5 record is characterised in that, described dielectric multilayer film is by zirconia and magnesium fluoride is alternately laminated forms.
The invention of technical scheme 6 record is a kind of by high-pressure discharge lamp and the manufacture method of surrounding the light supply apparatus that the concave mirror of this high-pressure discharge lamp constitutes, it is characterized in that, described concave mirror comprises metallic matrix, described metallic matrix is the alloy of principal ingredient by aluminium or with aluminium, perhaps any one material in the stainless steel constitutes, described concave mirror is made by following operation: the operation of coated glass on the inside surface of the concave shape of described metallic matrix, wherein, described glass contains nickel, cobalt, vanadium, copper, zirconium, calcium, manganese, the oxide of the metal more than at least a kind in the molybdenum; Under the state that the inside surface of the concave shape that makes described metallic matrix makes progress, this metallic matrix is heated to the operation more than the softening point of described glass; On the inside surface of the concave shape of described metallic matrix, insert heating insertion mould (arrow type) and to the operation of softening glass pressurization; Under the state of the inside surface of the concave shape of described insertion mould being inserted described metallic matrix, place operation until the temperature of the softening point that is lower than glass; With the operation that described insertion mould is taken out from the inside surface of the concave shape of described metallic matrix.
The invention of technical scheme 7 record is a kind of by high-pressure discharge lamp and the manufacture method of surrounding the light supply apparatus that the concave mirror of this high-pressure discharge lamp constitutes, it is characterized in that, described concave mirror comprises metallic matrix, described metallic matrix is that the alloy of principal ingredient or any one material in the stainless steel constitute by aluminium or with aluminium, and described concave mirror is made by following operation: make the inside surface of the concave shape of described metallic matrix become the upwards operation of state; The glass melting piece that will contain the oxide of the metal more than at least a kind in nickel, cobalt, vanadium, copper, zirconium, calcium, manganese, the molybdenum inserts the operation of inboard of inside surface of the concave shape of described metallic matrix; By winding-up described glass melting piece is expanded, make glass be close to operation on the inside surface of concave shape of described metallic matrix; With the operation of the glass on the inside surface of the concave shape that is close to described metallic matrix being placed until the temperature of the fusing point that is lower than glass.
According to the present invention, even the lamp breakage, basal body of reflector can be not damaged yet, and the glass that constitutes lamp can not left out by mistake yet.
Owing to the heat of lamp is dispersed effectively, therefore, be need not initiatively to be blown into cooling air and come lamp is cooled off.
The glassy layer that contains the oxide of the metal more than at least a kind in nickel, cobalt, vanadium, copper, zirconium, calcium, manganese, the molybdenum can absorb the light of unnecessary region of ultra-red, thereby can not emit to catoptron the place ahead.
Particularly, if the total amount of the oxide of contained metal is 1～30 weight % with respect to base glass material in the glassy layer, then glassy layer can realize absorbing the effect of the light of unnecessary region of ultra-red well.But,, then can not fully realize absorbing the light of unnecessary region of ultra-red as if less than 1 weight %, the function of emitting not to catoptron the place ahead, if surpass 30 weight %, then the difference with the coefficient of thermal expansion of the metallic matrix of basic unit becomes obviously, peels off from metallic matrix thereby glassy layer can take place.
In addition, because the catoptron that forms glassy layer by hot pressing has higher smoothness, and the dielectric multilayer rete that is formed on the glassy layer also has the higher smoothness of glassy layer, therefore, and can be by the design load of catoptron to the place ahead of catoptron sky light.
In addition, for the catoptron that forms glassy layer by winding-up (blow I and pay け), just can finish the formation of glassy layer by once jetting, therefore, make very easy.And basal body of reflector becomes metal die, need not the metal die expense and just can make.
The dielectric multilayer rete by zirconia and the stacked situation about making of magnesium fluoride under, formed magnesium fluoride (MgF as low-index material
2) with as the zirconia (ZrO of high-index material
2) the alternately laminated dielectric multilayer rete that forms, stacked integral thickness is 1～3 μ m, thereby has through wavelength greater than the light of 830nm and be shorter than the light of 380nm and the function of reflect visible light.Though heat resisting temperature is about 300 ℃, is lower than by SiO
2And TiO
2500 ℃ of the heat resisting temperatures of the stack membrane that constitutes still, are 300 ℃ of the working temperature less thaies of the catoptron of matrix with the metal, so enough durable.The differential expansion of metallic matrix and stacked film can cause film to peel off or crack.Differential expansion is big more, and these phenomenons are just obvious more.Hope forms film on metallic matrix stacked film has the expansivity close with metallic matrix, but by ZrO
2And MgF
2Stacked stacked film is difficult to generation and peels off or crackle.For manufacture view, because by ZrO
2And MgF
2The stacked film that forms is to make easily, also is desirable therefore.
Description of drawings
Fig. 1 uses sectional view for explanation, and it has shown the summary of structure of an embodiment of light supply apparatus of the present invention.
Fig. 2 has shown the section of the concave mirror of light supply apparatus shown in Figure 1.
Fig. 3 is a sectional view, and it has shown the summary of structure of an example of light supply apparatus of prior art.
Fig. 4 has shown the formation order of the glassy layer on the concave mirror that is formed at light supply apparatus of the present invention.
Fig. 5 has shown another formation order of the glassy layer on the concave mirror that is formed at light supply apparatus of the present invention.
Embodiment
Below, embodiments of the invention are elaborated.
Fig. 1 is the explanation sectional view of an example of demonstration light supply apparatus structure of the present invention.
Described light supply apparatus 10 is provided with high-voltage mercury discharging lamp 40 as light source, hold radiating light that described high-voltage mercury discharging lamp 40 and reflection send from described high-voltage mercury discharging lamp 40 front glass with light transmission 19 to throw this catoptrical concave mirror 20 by peristome and to be provided with in the mode of the peristome that stops up described concave mirror 20, receive high-voltage mercury discharging lamp 40 in the space content that forms by concave mirror 20 and front glass mirror 19, just have so-called closed structure.
As shown in Figure 1, under the horizontal state of the tubular axis of high-voltage mercury discharging lamp 40, use described light supply apparatus 10.
Specifically, light supply apparatus 10 has concave mirror 20, this concave mirror 20, by being concavity and forming the light collecting portion 201 in light harvesting space and link to each other with the rear end (right-hand member of Fig. 1) of described light collecting portion 201 and on the inside surface of the metallic matrix 21 that the tubular neck 25 that extend at the optical axis direction rear constitutes, form dielectric multilayer rete 23 via glassy layer 22, at the peristome of described concave mirror 20, the front glass 19 that is fixed on the outer edge, the place ahead 24 of metallic matrix 21 and is made of the tabular pyroceram with light transmission by cementing agent 137 grades is set.
The rear end of described high-voltage mercury discharging lamp 40 (right-hand member of Fig. 1) is fixed with the tubular neck 25 that passes metallic matrix 21 and by fixing states such as cementing agents 37.In addition, omitted power supply distribution to high-voltage mercury discharging lamp.
High-voltage mercury discharging lamp 40 links to each other by the substantially elliptical discharge vessel 42 that forms emitting space, with its two ends and to tube axial direction foreign side, promptly the bar-shaped sealed tube 43A of portion, the 43B to optical axis direction the place ahead and rear extension constitutes.For example, described discharge vessel 42 is made by quartz glass, is provided with negative electrode 44 respect to one another and anode 45 in emitting space inside.
And, in discharge vessel 42, be packaged with as the inert gas of lighting starting gas, be used to suppress described discharge vessel 42 inwalls melanism halogen and as the mercury of luminescent substance.
In high-voltage mercury discharging lamp 40, the mercury enclosed volume in the discharge vessel 42 is preferably 0.25mg/mm
3More than.
Owing to reach 0.25mg/mm by the enclosed volume that makes mercury
3More than, can in high-pressure mercury-vapor lamp 40, obtain high brightness, therefore, can in light supply apparatus 10, obtain higher light emission performance.
In above-mentioned light supply apparatus 10, the metal as constituting the metallic matrix 21 in the concave mirror 20 preferably adopts temperature conductivity (300 ℃) to be the aluminium of 233W/km, or is the alloy of principal ingredient with aluminium.In addition,, consider that stainless steel is also for being applicable to material of the present invention from ease of processing though temperature conductivity (300 ℃) is about 19W/km.
Fig. 2 has shown the section of the concave mirror of light supply apparatus shown in Figure 1.Be formed at the glassy layer 22 on the light collecting portion 201 of metallic matrix 21, be the supporting course that forms dielectric multilayer rete 23 in its surface, and can obtain the integraty of metallic matrix 21 and dielectric multilayer rete 23.In addition, in the present invention, though when forming glassy layer 22 by hot pressing or winding-up, obtain easily to be suitable for to form the surface smoothing on the surface of dielectric multilayer rete 23, but, further requiring can further to improve surface smoothing by abrading glass layer 22 under the situation of very high collection efficiency, in this way, can obtain higher collection efficiency.Because the glassy layer 22 in the light supply apparatus of the present invention does not contain pigment, therefore,, still can obtain good even surface even grind.
The thickness of glassy layer 22 is preferably 100～1000 μ m.Its reason is, if less than 100 μ m, then is difficult to obtain uniform thickness, if surpass 1000 μ m, the material that then constitutes glassy layer 22 causes producing the crack on described glassy layer 22 with the coefficient of thermal expansion missionary society of the metal that constitutes metallic matrix 21.In addition, if consider the heat conduction of glass, then the thickness of glassy layer is that 100～500nm is even more ideal.
Be formed at glassy layer 22 lip-deep dielectric multilayer retes 23 for example by zirconia (ZrO
2) layer and magnesium fluoride (MgF
2) the alternately laminated thickness of layer is that the multilayer film of 0.5～10 μ m constitutes, and have the light transmission that mainly makes infrared spectral range and ultraviolet range and the function of reflect visible light.In addition, replace zirconia (ZrO
2) layer and magnesium fluoride (MgF
2) layer, also can adopt silicon dioxide (SiO
2) and titania (TiO
2).
Formation method to glassy layer describes.At first, when forming, shown in Fig. 4 (a)～(d), form glassy layer by hot pressing.
(1) coated glass 22A on the inside surface of the metallic matrix 21 of the concave shape of aluminum or aluminum alloy, glass 22A contain the oxide of the metal more than at least a kind in nickel that total amount is the trickle pulverizing of 1～30 weight %, cobalt, vanadium, copper, zirconium, calcium, manganese, the molybdenum with respect to base glass material.Enumerate an object lesson, it contains nickel oxide (NiO) and the cobalt oxide (CoO) of 10 weight % respectively, amounts to 20 weight %.
The inside surface of wishing metallic matrix 21 is blank state or the surface for becoming coarse by sandblast etc. with active mode.In order to be easy to the coating of glass, in glass, add organic solvents such as butyl acetate, utilize dipping or be injected on metallic matrix 21 inside surfaces of concave surface to be coated with to form the state of Fig. 4 (a).The thickness of coating for example is 400 μ m.In addition, as an example of glass composition, for example, can be at SiO
2H
3BO
3NHCO
3The middle KNO that adds
3, LiCO
3, BaCO
3Etc. micro constitutent.Organic solvent for example, can also use stearic acid except butyl acetate.
(2) shown in Fig. 4 (b), in by the hot press that inserts mould (arrow type), ring mould (リ Application グ type) and matrix maintaining body formation, the inside surface that is mounted to the concave shape of the metallic matrix 21 that makes the catoptron that has been coated with glass becomes state upwards.The device of ring mould 31 for being used to prevent that glass from overflowing.To each metallic matrix 21 heating glass 22A, and reach the softening point of glass.If the softening point of glass 22A is 450 ℃, then heating-up temperature is 500 ℃, and the retention time is 5 seconds.The insertion mould 30 that is used for the transfer printing reflector shape and glass is close to also heats in addition to reach the temperature identical with the metallic matrix 21 of catoptron, to make when reaching thermal equilibrium and inserts mould and descend and glass 22A is pressurizeed.At this moment, organic solvents such as butyl acetate disperse, and glass 22A is softening.
(3) shown in Fig. 4 (c), place until the shape that drops to glass 22A reach stable be lower than glass softening point temperature, for example 440 ℃.
(4) shown in Fig. 4 (d), take out from the inside surface of the concave shape of metallic matrix 21 and to insert mould 30, fulfil assignment.
The glassy layer that is formed on the concave mirror of light supply apparatus of the present invention has the ultrared function of absorption, infers that its mechanism is as follows
Fuse in Pyrex under the situation of nickel oxide (NiO), cobalt oxide (CoO), manganese oxide (MnO) etc., these metal oxides form bertholide, thereby constitute a kind of semiconductor.Bertholide is meant, its state for example is equal to that the ratio of nickel (Ni) and oxygen (O) is not 1: 1, but is slightly less than the combinations of states of O with Ni, and forms the state in hole (hole).Become the state that electronics can utilize described hole to move.Under as the situation on the metal of conductor, because the polarization of free electron in the metal, light can't be injected in the metal, but is reflected in rayed.Its reason is that though there is the intrinsic color of metal, it depends on metal polarization speed separately, i.e. frequency (light wavelength).Very slow in insulator, then very fast in metal.For semiconductor (being equivalent to the bertholide in this instructions), infer that it shows insulator and metal movement between the two.
In the absorption characteristic of glass, the above light of 2700nm can see through hardly, but is absorbed by glass.Among the present invention, under the situation of NiO, CoO, MnO etc. being fused in the Pyrex, these metal oxides have the characteristic identical with the semiconductor that contains bertholide, it can absorb visible light and near infrared ray, and (400～2700nm), the above light of 2700nm is absorbed by Pyrex itself.Promptly, when attaching the molten glass that bertholides such as NiO, CoO in the glass, MnO are arranged on the metal, can occur as semi-conductive hole (hole), thereby free electron is supplied to conductor, Fermi level raises, and forms degeneracy semiconductor, therefore, supposition can cause rapid absorption when wavelength increases.Absorbed light flows to metal side as heat, and emits by metallic matrix.
Below, the another kind formation method of glassy layer is described.It forms by winding-up, shown in Fig. 5 (a)～(d), forms glassy layer.
(1) shown in Fig. 5 (a), forms the metallic matrix 21 of catoptron by aluminium oxide die casting etc.
(2) shown in Fig. 5 (b), fusing contains the glass of the oxide of the metal more than at least a kind in nickel, cobalt, vanadium, copper, zirconium, calcium, manganese, the molybdenum, for example, 1200 ℃ glass melting piece 22B is installed on the not shown blowing device, and making it be in the front end that attached in the described blowing device is blown into pipe 50, the inside surface that inserts concave shape is in the upwards inboard of the metallic matrix 21 of state.
(3) then, shown in Fig. 5 (c), air (air) waited to be blown into manage in 50, the glass melting piece is expanded because of winding-up, glass 22 is close on the inside surface of concave shape of metallic matrix 21.31 is ring mould, and glass 22 can not blowed to outside the metallic matrix 21., glass 22 be cooled to the temperature that be lower than glass fusing point, for example place until 440 ℃ thereafter.
(4) afterwards, shown in Fig. 5 (d), take out metallic matrix, remove unnecessary glass from blowing device.
In above light supply apparatus 10, because concave mirror 20 has the metallic matrix 21 that is made of metal, therefore, this concave mirror 20 can obtain good exothermicity, for example, need not cooling air to be flow through by air vent etc., thereby can suppress overheated as the concave mirror 20 of described light supply apparatus 10 inscapes and high-voltage mercury discharging lamp 40 etc., so, evils such as devitrification phenomenon or 40 breakages of generation high-voltage mercury discharging lamp own take place in the discharge vessel 31 that can not produce high-voltage mercury discharging lamp 40, can be 0.25mg/mm with the enclosed volume of mercury
3More than, and the high-voltage mercury discharging lamp 40 with high brightness is compatibly as light source.
In addition, because inside surface at concave mirror 20, the dielectric multilayer rete is supported by glassy layer, therefore, the dielectric multilayer rete can obtain high permanance, simultaneously, because described dielectric multilayer rete is formed on the surface that becomes level and smooth because of glassy layer, therefore, described dielectric multilayer rete can obtain good reflecting properties, and the radiating light that can efficiently be sent by high-voltage mercury discharging lamp 40 from the peristome projection of concave mirror 20.
So, according to light supply apparatus 10, device integral body can realize miniaturization, high-voltage mercury discharging lamp 40 is contained in the space of the air-tight state that is formed by concave mirror 20 and front glass 19, can in high-voltage mercury discharging lamp 40, not produce evils such as gonorrhoea, melanism yet, and can radiate and have good colour rendering and high-intensity light, therefore, can obtain stable high light radiological performance.
Above light supply apparatus 10 is suitable for as the lighting source that illuminates the liquid crystal panel in the liquid crystal projection apparatus.
In addition, in light supply apparatus 10, according to its purposes, high-voltage mercury discharging lamp 40 can be any one in once-through type, the AC type.
In addition, light supply apparatus 10 should not be limited to so that the corresponding to mode of optical axis of its tubular axis and concave mirror 20 is installed the collocation method of high-voltage mercury discharging lamp 40, can adopt suitable design.
In addition, be under the alloy situation of principal ingredient at employing aluminium or with aluminium, also can be at the integrally formed heat radiator of metallic matrix outside surface side of concave surface.
The superiors of concave mirror inside surface are made of reflect visible light and ultraviolet ray, the permeable dielectric multilayer rete of infrared ray.For example, by zirconia (ZrO
2) layer and magnesium fluoride (MgF
2) the alternately laminated integral thickness of layer be that the dielectric multilayer rete of 0.5～2 μ m constitutes, and have the light transmission that mainly makes infrared spectral range and ultraviolet range, and the function of reflect visible light.The thickness of each layer for example is 100～200nm, and for example forms 30 layers.
From the smoothness on the surface of measuring the described the superiors, arithmetic average roughness (Ra) is below 200nm.Wherein, have described higher smoothness as the glassy layer of the basic unit that forms by hot pressing or winding-up, the light that can make lamp by the design load of catoptron to the place ahead of catoptron reflection.
Claims (7)
1. light supply apparatus is made of high-pressure discharge lamp and the concave mirror that surrounds this high-pressure discharge lamp, it is characterized in that,
Described concave mirror is made of metallic matrix, glassy layer and the dielectric multilayer rete that is arranged on this glassy layer, wherein, described metallic matrix is that the alloy of principal ingredient or any one material in the stainless steel constitute by aluminium or with aluminium, and described glassy layer is formed on this metallic matrix inside surface and contains the oxide of the metal more than at least a kind in nickel, cobalt, vanadium, copper, zirconium, calcium, manganese, the molybdenum.
2. light supply apparatus according to claim 1 is characterized in that, the total amount of the described metal oxide that contains in the described glassy layer is 1～30 weight % with respect to base glass material.
3. according to any described light supply apparatus in claim 1 or 2, it is characterized in that described glassy layer is provided with described glassy layer material on the inside surface of concave shape metallic matrix, form by hot pressing afterwards.
4. according to any described light supply apparatus in claim 1 or 2, it is characterized in that, described glassy layer, the winding-up of glass material by winding-up fusion on the inside surface of concave shape metallic matrix forms.
5. according to any described light supply apparatus in the claim 1～4, it is characterized in that described dielectric multilayer film is by zirconia and magnesium fluoride is alternately laminated forms.
6. the manufacture method of a light supply apparatus, it is by high-pressure discharge lamp and the manufacture method of surrounding the light supply apparatus that the concave mirror of this high-pressure discharge lamp constitutes, it is characterized in that, described concave mirror comprises metallic matrix, described metallic matrix is that the alloy of principal ingredient or any one material in the stainless steel constitute by aluminium or with aluminium, and described concave mirror is made by following operation:
The operation of coated glass on the inside surface of the concave shape of described metallic matrix, wherein, described glass contains the oxide of the metal more than at least a kind in nickel, cobalt, vanadium, copper, zirconium, calcium, manganese, the molybdenum;
Under the state that the inside surface of the concave shape that makes described metallic matrix makes progress, this metallic matrix is heated to the operation more than the softening point of described glass;
On the inside surface of the concave shape of described metallic matrix, insert heating the insertion mould and to the operation of softening glass pressurization;
Under the state of the inside surface of the concave shape of described insertion mould being inserted described metallic matrix, place operation until the temperature of the softening point that is lower than glass; With
With the operation of described insertion mould from the inside surface taking-up of the concave shape of described metallic matrix.
7. the manufacture method of a light supply apparatus, it is by high-pressure discharge lamp and the manufacture method of surrounding the light supply apparatus that the concave mirror of this high-pressure discharge lamp constitutes, it is characterized in that, described concave mirror comprises metallic matrix, described metallic matrix is that the alloy of principal ingredient or any one material in the stainless steel constitute by aluminium or with aluminium, and described concave mirror is made by following operation:
Make the inside surface of the concave shape of described metallic matrix become the upwards operation of state;
The glass melting piece that will contain the oxide of the metal more than at least a kind in nickel, cobalt, vanadium, copper, zirconium, calcium, manganese, the molybdenum inserts the operation of inboard of inside surface of the concave shape of described metallic matrix;
By winding-up described glass melting piece is expanded, make glass be close to operation on the inside surface of concave shape of described metallic matrix; With
Glass on the inside surface of the concave shape that is close to described metallic matrix is placed operation until the temperature of the fusing point that is lower than glass.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004318079 | 2004-11-01 | ||
| JP2004318079 | 2004-11-01 | ||
| JP2005256186 | 2005-09-05 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1770003A true CN1770003A (en) | 2006-05-10 |
| CN100589027C CN100589027C (en) | 2010-02-10 |
Family
ID=36751372
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN200510118625A Expired - Fee Related CN100589027C (en) | 2004-11-01 | 2005-11-01 | Light source apparatus and fabrication method thereof |
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| Country | Link |
|---|---|
| CN (1) | CN100589027C (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102236116A (en) * | 2011-07-06 | 2011-11-09 | 刘海鹰 | Novel spherical mirror |
-
2005
- 2005-11-01 CN CN200510118625A patent/CN100589027C/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102236116A (en) * | 2011-07-06 | 2011-11-09 | 刘海鹰 | Novel spherical mirror |
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| Publication number | Publication date |
|---|---|
| CN100589027C (en) | 2010-02-10 |
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