CN1758054A

CN1758054A - Camera method of mounting substrate, detection method and device and wire

Info

Publication number: CN1758054A
Application number: CN 200510096785
Authority: CN
Inventors: 村松啓且; 岡嵜真一; 井爪洋平
Original assignee: i Pulse Co Ltd
Current assignee: i Pulse Co Ltd
Priority date: 2004-09-03
Filing date: 2005-09-02
Publication date: 2006-04-12
Also published as: JP2006073841A

Abstract

The invention provides to a mounted substrate inspection method for inspecting the mounted substrate provided with electronic components, comprising: a picturing step of dividing the mounting substrate into a plurality of picturing regions for picturing so as to obtain a plurality of divided image data; a compositing step of compositing a plurality of divided image data so as to obtain large-scale image data; a step of partly taking out inspection component data from the large-scale image data and comparing the inspection componentsdata and standard component data which is prepared preliminarily so as to judge whether the electronic components corresponding to the inspection components are good or not. Inspection efficiency can be improved via making use of the structure and adopting the inspection method of the invention.

Description

The image capture method of installation base plate, inspection method and testing fixture and hookup wire

Technical field

The installation base plate image capture method, inspection method and the testing fixture that use when the present invention relates to that the installation base plate that for example utilizes fitting machine that electronic component is installed checked the installment state of its electronic component also have hookup wire.

Background technology

When utilizing Flame Image Process to check to the installation base plate that electronic component is installed, patent documentation 1～3 as described below is described, known have the inspection object portion of pair installation base plate to cut apart its shooting, with the image joint of this shooting, makes the method for composograph.

Always, in such installation base plate inspection method, adopt the mode that each electronic component of installing on the substrate is made a video recording usually.For example, electronic component that object is checked in the conduct of installing on the substrate than the little situation of the image pickup scope (camera coverage) of camera head under, being to make a video recording this camera data is handled the data that obtain checking the object electronic component in the center as the electronic component of checking object.Again, under the situation bigger than image pickup scope, utilize camera head will comprise the Region Segmentation shooting of whole electronic component, these a plurality of camera datas of cutting apart are synthesized the data that obtain checking the object electronic product as the electronic component of checking object.

Patent documentation 1 ... Japanese kokai publication hei 3-240372 number (1 page)

Patent documentation 2 ... Japanese kokai publication hei 5-1878826 number (2 pages, Fig. 6,8)

Patent documentation 3 ... Japanese kokai publication hei 9-35047 number (2 pages, Fig. 4,8)

But, in above-mentioned existing inspection method, to a plurality of electronic components on the substrate one by one parts photograph, therefore must carry out the shooting of the number of times of excessive zero part count and handle, be necessary all to carry out each time Flame Image Process.Therefore under the many situations of electronic component number, number of times of imaging increases, and the supervision time is elongated, the problem that exists checking efficiency to reduce.Particularly installation base plate develops to densification in recent years, and hundreds of above electronic components are installed on the substrate usually, wishes to improve checking efficiency strongly.

And in above-mentioned existing inspection method, precision ground in high position is bonded with each other the image of taking and has any problem, and for example also exists in the low problem of positional precision that interconnects part on the time series.

Again, in the existing testing fixture, on inspection box, open and close lid is set freely, under this lid closing state, start device usually.Therefore the action in the device can not utilize visual means to confirm when device starts.

The 1st purpose of the present invention is that the inspection method and the testing fixture of the installation base plate that can improve checking efficiency is provided.

The 2nd purpose of the present invention be, provide can with cut apart shooting image high position precision the image capture method, the inspection method and the testing fixture of installation base plate of the installation base plate that is bonded with each other.

The 3rd purpose of the present invention is to provide and seek to reduce cost, and can be in operation with the installation base plate testing fixture of visual confirmation device inside.

Summary of the invention

The present invention provides following means (1)～(7) in order to realize above-mentioned the 1st purpose.

(1) a kind of installation base plate inspection method that the installation base plate that electronic component is installed is checked is characterized in that, comprises

Installation base plate is divided into a plurality of camera watch regions makes a video recording, obtain a plurality of shooting steps of cutting apart camera data,

Described a plurality of camera datas of cutting apart are synthesized, obtain camera data on a large scale synthesis step and

Part take out to be checked the component number certificate from described camera data on a large scale, checks the component number certificate according to this, judge with the inspection component number according to the whether good step of corresponding electronic component.

(2) installation base plate inspection method according to claim 1 is characterized in that, in described shooting step, the camera watch region that comprises the position reference mark of giving substrate is made a video recording.

(3) installation base plate inspection method according to claim 1 is characterized in that,

In described shooting step, earlier the camera watch region that comprises the position reference mark of giving substrate is made a video recording,

From described camera data on a large scale, partly take out a plurality of inspection component number certificates in regular turn at described determining step.

(4) installation base plate inspection method according to claim 1 is characterized in that,

In described shooting step, described a plurality of camera watch region is split into clathrate, on the X-direction and Y direction on alignment arrangements, to being arranged in after delegation's camera watch region on the X-direction makes a video recording in regular turn along X-direction, the next line camera watch region that is arranged on the X-direction is made a video recording in regular turn along X-direction.

(5) installation base plate inspection method according to claim 1 is characterized in that, in described shooting step the Zone Full of installation base plate is made a video recording.

(6) installation base plate inspection method according to claim 1 is characterized in that, in described shooting step, to all making a video recording except the zone that electronic component is not installed in the installation base plate.

(7) a kind of installation base plate testing fixture that the installation base plate that electronic component is installed is checked is characterized in that,

Possess

To installation base plate each camera watch region make a video recording usefulness camera head,

Make described camera head with respect to installation base plate the mobile means that relatively moves on the directions X parallel and on the Y direction with shooting face and

Control the control device of the driving of described camera head and described mobile means,

Described control device is carried out following step, promptly

The present invention provides following means (8)～(15) in order to realize above-mentioned the 2nd purpose.

(8) a kind of installation base plate image capture method that utilizes the shooting means that the installation base plate that electronic component is installed is made a video recording is characterized in that, comprises

Installation base plate is divided into a plurality of camera watch regions, described shooting means is moved to make a video recording to each camera watch region in regular turn, obtain a plurality of shooting steps of cutting apart camera data,

Described a plurality of camera datas of cutting apart are interconnected, obtain synthetic camera data synthesis step and

According to the position offset of each camera watch region in the described synthetic camera data, revise the step of described shooting means with respect to the camera position of camera watch region.

(9) installation base plate image capture method according to claim 8 is characterized in that, in described synthesis step, a plurality ofly is bonded with each other described with cutting apart the camera data zero lap.

(10) installation base plate image capture method according to claim 8 is characterized in that,

In described shooting step, the camera watch region that comprises the position reference mark of giving described installation base plate is made a video recording,

In described correction step, with described position reference mark is benchmark, ask the position data of a plurality of electronic components in the described synthetic camera data, the position data of this position data and pre-prepd reference electronic parts is compared, calculate the position offset of each electronic component, each camera watch region is calculated the total value of the position offset of each electronic component, calculate the position offset of each described camera watch region.

(11) installation base plate image capture method according to claim 8 is characterized in that,

In described correction step, calculate according to the position offset in each camera watch region in the described synthetic camera data and to revise the modified value that position that fitting machine installs is used.

(12) a kind of installation base plate inspection method that the installation base plate that electronic component is installed is checked is characterized in that, comprises

Described a plurality of camera datas of cutting apart are connected, obtain synthetic camera data synthesis step,

According to the position offset of each camera watch region in the described synthetic camera data, revise described shooting means with respect to the correction step of the camera position of camera watch region and

Part take out to be checked the component number certificate from described synthetic camera data, checks the component number certificate according to this, judge with the inspection component number according to the whether good step of corresponding electronic component.

(13) a kind of installation base plate testing fixture that the installation base plate that electronic component is installed is checked is characterized in that,

Possess

Make described shooting means with respect to installation base plate the mobile means that relatively moves on the directions X parallel and on the Y direction with shooting face and

Control the control device of the driving of described shooting means and described mobile means,

Described control device is carried out following step, promptly

(14) a kind of hookup wire possesses the testing fixture that electronic component is installed on the fitting machine on the substrate and the substrate that utilizes this fitting machine that electronic component has been installed is checked, it is characterized in that,

Described testing fixture is made of the described installation base plate testing fixture of claim 13.

(15) hookup wire according to claim 14 is characterized in that, in described correction step, and the position of installing according to the position offset correction fitting machine in each camera watch region in the described synthetic camera data.

The present invention provides following means (16)～(22) in order to realize above-mentioned the 3rd purpose.

(16) a kind of installation base plate testing fixture has inspection box (housing), checks the installation base plate of sending in this inspection box, it is characterized in that,

On the opening that is provided with on the described inspection box, open and close lid be set freely,

Described covering through hole is set, simultaneously described through hole is formed as the viewport from the inner usefulness of described inspection box visual observation under the lid closing state.

(17) installation base plate testing fixture according to claim 16 is characterized in that, described viewport disperses to form a plurality of.

(18) installation base plate testing fixture according to claim 16 is characterized in that,

Described lid along the upper wall portions configuration of described inspection box, has the rake that tilts in off position simultaneously below this closed condition inferoanterior side direction,

Described viewport is arranged at described rake.

(19) installation base plate testing fixture according to claim 16 is characterized in that,

The camera head that electronic component on the installation base plate is made a video recording is set in described inspection box,

The zone in addition, position that is provided with at the described described camera head that covers is provided with described viewport.

(20) installation base plate testing fixture according to claim 16 is characterized in that,

Setting is sent installation base plate into described inspection box inside along the substrate conveyer line of regulation, and it can be taken out of the substrate transmission means of described inspection box outside,

Described viewport forms the slotted hole that carries out the direction extension of installation base plate transmission along described substrate transmission means.

(21) installation base plate testing fixture according to claim 16 is characterized in that,

Described viewport disperses to form a plurality of,

The viewport that is positioned at pars intermedia in a plurality of viewports is done greatly than the viewport that is positioned at both sides.

(22) installation base plate testing fixture according to claim 16 is characterized in that,

In described inspection box, be arranged on and cover the lighting device that to light under the closing state.

Inspection method according to the installation base plate of foregoing invention (1), the camera data of cutting apart that to cut apart the shooting acquisition is synthesized, generate camera data on a large scale, take out the inspection component number according to checking the camera data on a large scale from this, even therefore the electronic component quantity of installing increases, also number of times of imaging can be suppressed to shorten the supervision time significantly, improve checking efficiency in less number of times.

According to the inspection method of the installation base plate of foregoing invention (2), the position that can correctly grasp installation base plate, can take out check component number according to the time utilize the position reference mark, therefore can check accurately.

According to the inspection method of the installation base plate of foregoing invention (3), therefore the position that can grasp installation base plate earlier can calculate the position of checking parts earlier.So when generating on a large scale camera data, can take out from camera data on a large scale and check that component number check according to handling as a setting, thereby can further improve checking efficiency.And can take out to check component number according to the time utilize the position reference mark, therefore can check accurately.

According to the inspection method of the installation base plate of foregoing invention (4), dollying device expeditiously, thus can further improve checking efficiency.

According to the inspection method of the installation base plate of foregoing invention (5), fixing number of times of imaging is no matter how much quantity of the electronic component that is mounted has.

According to the inspection method of the installation base plate of foregoing invention (6), number of times of imaging is reduced.

According to foregoing invention (7), can obtain having the testing fixture of the installation base plate of effect same with foregoing invention (1).

According to the image capture method of the installation base plate of foregoing invention (8), according to the position offset of each camera watch region in the synthetic camera data, revise camera position, therefore can positional precision will cut apart shooting well and interconnect.

Image capture method according to the installation base plate of foregoing invention (9) can improve shooting efficient, need not simultaneously the data of overlapping portion are handled, thereby can further improve shooting efficient.

Image capture method according to the installation base plate of foregoing invention (10), with the position reference mark is benchmark, ask the position data of each electronic component, therefore can precision ask position data well, improve the positional precision that interconnects part of split image further.

According to the image capture method of the installation base plate of foregoing invention (11), can correctly revise the installation site that fitting machine is installed.

According to foregoing invention (12), can provide the inspection method that the installation base plate of same effect is arranged with foregoing invention (8).

According to foregoing invention (13), can provide the testing fixture that the installation base plate of same effect is arranged with foregoing invention (8).

According to foregoing invention (14), (15), can provide the hookup wire that same effect is arranged with foregoing invention (8).

According to the testing fixture of the installation base plate of foregoing invention (16),, also can confirm installing inside with visual by the viewport that covers even device moves.And, owing to utilize through hole to constitute viewport, therefore can not increase the parts number of packages, seek to reduce cost.

According to the testing fixture of the installation base plate of foregoing invention (17), can be in internal observing device inside on a large scale.

According to the testing fixture of the installation base plate of foregoing invention (18), can be more convenient for carrying out visual confirmation.

According to the testing fixture of the installation base plate of foregoing invention (19), the dust that can prevent to invade from viewport is attached on the camera head.

According to the testing fixture of the installation base plate of foregoing invention (20), can be more convenient for carrying out visual confirmation.

According to the testing fixture of the installation base plate of foregoing invention (21), both can guarantee the intensity covered, be convenient to carry out visual confirmation again.

According to the testing fixture of the installation base plate of foregoing invention (22), can be more convenient for carrying out visual confirmation.

Description of drawings

Fig. 1 is the block scheme of the hookup wire of expression the present invention one example.

Fig. 2 is the front elevation of the testing fixture that uses in the expression the invention process form.

Fig. 3 is the side cut away view of the testing fixture of expression example.

Fig. 4 is the planimetric map of the inner structure of the summary testing fixture of representing example.

Fig. 5 is the front elevation of the inner structure of the summary testing fixture of representing example.

Fig. 6 is the outboard profile of the inner structure of the summary testing fixture of representing example.

Fig. 7 is the block scheme of master control system of the testing fixture of expression example.

Fig. 8 is the shooting/synthetic process flow diagram of handling in the testing fixture of expression example.

Fig. 9 is divided into installation base plate the planimetric map that camera watch region is represented in example.

Figure 10 is the planimetric map of camera watch region in advance that is illustrated in installation base plate in the example.

Figure 11 is the planimetric map of the shooting order of installation base plate in the expression example.

Figure 12 is the process flow diagram of inspection judgment processing in the testing fixture of expression example.

Figure 13 is the planimetric map of the electronic component center of installation base plate in the expression example.

Figure 14 is the planimetric map in the inspection parts zone of installation base plate in the expression example.

Figure 15 is the planimetric map of the image on a large scale in the making of installation base plate in the expression example.

Figure 16 is the process flow diagram of correcting process of the installation base plate of expression example.

Figure 17 is a planimetric map of representing composograph desirable in the example.

Figure 18 is the planimetric map that is contained in the composograph of the 1st classification in the expression example.

Figure 19 is the curve map of the relation between parts position offset and the ideal distance in the composograph of expression the 1st classification.

Figure 20 is the planimetric map that is contained in the synthetic state before of image of the 2nd classification in the expression example.

Figure 21 is the planimetric map that is contained in the synthetic state afterwards of image of the 2nd classification in the expression example.

Figure 22 is the curve map of the relation between parts position offset and the ideal distance in the composograph of expression the 2nd classification.

Figure 23 is the planimetric map that is contained in the composograph of the 3rd classification in the expression example.

Figure 24 is the curve map of the relation between parts position offset and the ideal distance in the composograph of expression the 3rd classification.

Figure 25 is the stereographic map of lid periphery in the testing fixture of expression example.

Figure 26 is the stereographic map of lid periphery of the testing fixture of expression the present invention the 1st variation.

Figure 27 is the stereographic map of lid periphery of the testing fixture of expression the present invention the 2nd variation.

Figure 28 is the sectional view of viewport periphery of the testing fixture of expression the present invention the 3rd variation.

Figure 29 is the planimetric map of camera watch region in advance of installation base plate in other variation of expression the present invention.

Figure 30 is the planimetric map of the camera watch region of installation base plate in the another variation of expression the present invention.

Concrete example

Fig. 1 is the general planimetric map of the hookup wire (installation system) of expression the present invention one example.As shown in the drawing, on this hookup wire, have along the fitting machine 6 and the testing fixture 10 of the pipeline XL alignment arrangements of tellite P.

The pipeline XL configuration of fitting machine 6 on the base station 61, the mounting head unit (head) 9 of the parts supply unit 8 of the side (front side) in the both sides that possess the travelling belt 7 of carrying tellite P, are disposed at this travelling belt 7 and the installation usefulness that above base station 61, is provided with.

Parts supply unit 8 forms the banded feed appliance of multiple row (tape feeder) 81 with the supply that is suitable for smaller chip element ... structure.

At each banded feed appliance 81 ... on, the spool that keeps, accommodates the belt of electronic component E such as IC, transistor, capacitor on the interval that is wound on each regulation releasably is installed, belt is emitted to the front end one side intermittence of banded feed appliance 81 from this spool, and the chip element of accommodating on tape can be picked up by mounting head unit 9.

Mounting head unit 9 can make the zone that comprises the installation site on parts supply unit 8 and the tellite P move, and is installed on the tellite P so that can pick up parts from parts supply unit 8.Specifically, mounting head unit 9 is utilized mobile means, and formation can be on (direction parallel with pipeline XL), Y direction on the directions X (in surface level direction) vertical with directions X moves structure freely.

On mounting head unit 9, carry attract electrons parts E in arrangement on the directions X and be installed on a plurality of installation head 91 of using on the substrate P again ...Each installation head 91 ... can utilize Z axle driving means (diagram is omitted) to go up and drive, utilize rotary drive mechanism upward to drive simultaneously in sense of rotation (R direction of principal axis) as R axle driving means at above-below direction (Z-direction).

Fig. 2 is the front elevation of testing fixture 10.Fig. 3 is the side cut away view of this testing fixture 10.Fig. 4～Fig. 6 is the block scheme of the inner structure of this testing fixture 10 of expression.Shown in above-mentioned each figure, this testing fixture 10 can be checked the installment state of utilizing fitting machine 6 that the electronic component E among the installation base plate P of electronic component E is installed.

This testing fixture 10 possesses 3 pin members on contact floor and the not shown framework as base station of supporting the pin member, forms inspection box 1 by the multi-disc panel that can install respectively with screw rod on framework with loading and unloading.In this inspection box 1, inner travelling belt 2 is set on framework along substrate pipeline XL.Shown in Fig. 4～6, inner travelling belt 2 form utilize the y-axis shift section of starting 20 in surface level along the mobile structure freely of the Y direction vertical (fore-and-aft direction) with pipeline XL.That is to say that inner travelling belt 2 is installed to such an extent that can slide freely at the length direction along guide rail on the pair of guide rails 22 of Y direction configuration.And form inner travelling belt 2 and fixed along the spherical screw 23 of Y direction configuration, utilize the driving of motor 24 that spherical screw 23 is rotatablely moved, to form the structure that inner travelling belt 2 moves on Y direction.So inner travelling belt 2 forms the structure that can utilize the y-axis shift section of starting 20 to move on pipeline XL and between the rear portion in the inspection box 1 (depth portion) along Y direction.

On the pipeline XL of the both sides of inner travelling belt 2, be provided with respectively again with transmit with

cover

11,12 cover moving into travelling belt 11a and taking out of travelling belt 12a.Inspection box 1 is provided with and moves into travelling belt, takes out of the not shown opening that travelling belt connected respectively.And be formed under the state of the inner travelling belt 2 of the last configuration of pipeline XL, can utilize and move into travelling belt 11a and installation base plate P is transferred on the inner travelling belt 2, simultaneously the inner travelling belt 2 of the substrate P utilization on the inner travelling belt 2 and take out of the structure that travelling belt 12a takes out of inspection box 1 outside from the outside of inspection box 1.

The rear of the inside travelling belt 2 in inspection box 1 (depth portion) is provided as the video camera 3 of camera head.This video camera 3 is formed on the structure that moves on the X-direction that is parallel to conveyer line X1 freely.That is to say, support the support member 31 of video camera 3 to be installed as and to slide freely at length direction on the pair of guide rails 32 of directions X configuration along guide rail.And on the support member 31 of video camera, use along the spherical screw 33 of X-direction configuration and fix, utilize the driving of motor 34 to make spherical screw 33 rotations, form the structure that video camera 3 can be moved with this on X-direction.

On video camera support member 31, be provided with again illuminating lighting device 35 is carried out in the zone of video camera 3 shootings.

As shown in Figure 1, 2, at the open upward opening 115 of the upper wall portions setting of inspection box 1.The axle rotation is being supported freely and is being covered 105 rear end on the rear end of the opening 115 of inspection box 1.And form such structure, just shown in the imaginary line of Fig. 3, by being that fulcrum makes and covers 105 and rotate upward with the rearward end, open the opening 115 of inspection box 1 with this, to install by opening 115 and inner open, simultaneously shown in the dotted line of this figure, by being that fulcrum makes and covers 105 rotations downwards with the rearward end to the outside, with the opening 115 of this shut down inspection case 1, will install inner airtight.Much less, in device (inspecting substrate work carry out in) in service, the lid 5 of inspection box 1 is being closed.

The main region of this lid 105 except its rear portion forms rake 150.This rake 150 is configured to the place ahead one side direction and has a down dip under the closed condition of lid.

And shown in Fig. 1,2,25, on the rake 150 of lid 105, (Y direction) and horizontal (X-direction) disposes a plurality of viewports 106 with the spacing parallel arranging of stipulating along the longitudinal in its first half zone.This viewport 106 is to constitute by getting through the through hole that covers 105 regulation zone, is laterally (X-direction) long long hole shape.And the viewport 106 that is disposed at the two ends on the X-direction in a plurality of viewports 106 is littler than viewport 106 length dimensions in the middle of being disposed at.As shown in Figure 3, on the top of the rake 150 of lid 105 rear side lighting device 107 is set, the operator who detection is set whether has operator M to exist on the inspection box anterior locations at the front surface of inspection box 1 detects the sensor 171 of usefulness simultaneously.Control according to the driving of the output signal illumination apparatus 107 of sensor 171 then.In a single day also just form and detect the position of operator M near inspection box 1 front, lighting device 107 is just lighted, in case while operator M is away from the front face side of inspection box 1, the structure that lighting device 107 just extinguishes.

In the testing fixture 10 of this example, utilize and to move into travelling belt 11a and inner travelling belt 2 and move into installation base plate P in the device such as following be described in detail and after checking, utilize inner travelling belt 2 and take out of travelling belt 12a and take out of.

And, in this testing fixture 10, when device (inspection carry out in) in service operator M confirmed installing inner action, operator M stood in the front of testing fixture, with visual type the inside of installing was confirmed by building 105 viewports 106 that are provided with from this.Like this, even just being in operation, device also can confirm installing inner action by visual type.

And in this example, form such structure, promptly sensor 171 is set in the front of device, in the operator M structure that the lighting device 107 in the inspection box 1 is lighted when the testing fixture, because lighting device 107 is lighted, device inside can access adequate illumination when therefore operator M confirmed by 106 pairs of testing fixture inside of viewport.Thereby, can be by the working condition of visual reliable grasp device inside.

Also have, in the present invention, the control of illumination apparatus 107 needn't necessarily be carried out according to aforesaid sensor 171, also can for example in the testing fixture front light switch be set, and lights or close lighting device 107 by the manual operation of operator M.Can also be provided with and detect sensor cover 5 switching it is controlled,, under the state of opening, it be extinguished according to lighting device 107 being lighted covering under 105 closing state from the signal of this sensor.

Again, in this example, viewport 106 forms the long hole shape that the direction of transfer (X-direction) along substrate P extends, and therefore the motion of easy visual tracking substrate P can be confirmed its action more reliably.

Therefore and the viewport 106 of both sides is done for a short time in a plurality of viewports 106, and covering the aperture area that 105 hole 106 forms can reduce, and can fully guarantee to cover 105 intensity.Also because the viewport 106 of centre in a plurality of viewports 106 is done greatly, therefore the major part in the middle of the visual confirmation device reliably of the viewport 106 by this centre can be kept good observability (easy observation).

And in this example, owing to be to utilize through hole to form viewport 106, different with the situation of utilizing window materials such as acrylic panel, do not increase component number, can seek to reduce cost.

Also have, in this example, owing to being disperses to form a plurality of little viewports 106 on lid 105, therefore can be interior to carrying out visual confirmation in the testing fixture on a large scale, the affirmation that can more correctly move, but also can prevent to cover the decline of 5 intensity more reliably.

Again, in this example, owing to form viewport 106 at the first half of lid 105, do not dispose viewport 106 above being disposed at the video camera 3 that covers 105 rears, the top tegmentum 105 of video camera 3 covers reliably.Even therefore dust such as rubbish, dust are invaded in the testing fixture by viewport 106, this dust can not drop on the video camera 3 yet.Thereby just can keep the high precision of checking as the video camera 3 of the critical piece of testing fixture non-cohesive dust.

Also have, in this example, zone, front side at lid 105 is provided with the rake 150 that turns forward, on this rake 150, form viewport 106, therefore operator M stand under the state of testing fixture front when viewport 106 is observed, the sight line Li of operator M can pass through viewport 106 in the clear smoothly, thereby further improves the observability of device inside.。

Figure 26 is the stereographic map of lid periphery of the testing fixture 10 of expression the present invention the 1st variation.As shown in the drawing, in this testing fixture, in preceding half zone of the rake 150 of the lid 105 of inspection box 1, in length and breadth and row arrangement form the viewport 106a of rectangle (square).And each viewport 106a forms the little shape of size of past more both sides.Other structures are identical with above-mentioned example.

Even in this testing fixture 10, also can access and top described identical effect.

Figure 27 is the stereographic map of lid periphery of the testing fixture 10 of expression the present invention the 2nd variation.As shown in the drawing, in this testing fixture, in preceding half zone of the rake 150 of the lid 105 of inspection box 1, in length and breadth and row arrangement form circular viewport 106b.And each viewport 106b forms the big shape of size of past more top (rear).Other structures are identical with above-mentioned example.

In this testing fixture 10, can access and top described identical effect, and, can confirm the situation in the deep (back quadrate part) in the device more reliably by this bigger viewport 106b, thereby further improve observability because the viewport 106b of rear (top) side does greatly.

Much less, in the present invention, the position of the shape of viewport 6 and size, the number that forms and formation all is not limited to above-mentioned example and above-mentioned variation is described.

For example make under the same situation with size, can form the hole expeditiously, therefore can reduce cost in the shape of a plurality of viewports.

Again, in above-mentioned example, adopt the part of the regulation cut out lid to form the method for viewport, but the invention is not restricted to this, in the present invention, also can be for example shown in Figure 28, the part of the regulation of lid 105 is curved folding form viewport 106.In such structure, the lower edge of the viewport 106 on the rear side of lid 105 forms the bent sheet 160 of extending towards the device inner horizontal.These bent sheet 160 horizontal arrangement are in viewport 106 downsides of correspondence, and therefore the dust of invading from viewport 106 is stopped by bent sheet 160, can reliably prevent its intrusion device inside with this.

When forming bent sheet 160, also can prevent on the degree that dust is invaded that the front end with bent sheet 160 cuts off.That is to say, also can be as shown in figure 28, bent sheet 160 excisions are than the part of the vertical line L z of the last ora terminalis that passes through corresponding viewport 106 more forward distolateral (side in device).In this case, can effectively prevent entering of dust, and can guarantee good observability.

On the other hand, Fig. 7 is the block scheme of the master control system of expression testing fixture 10.As shown in the drawing, in this device, utilize CPU5 to control the driving of each drive division etc., the action of hereinafter describing in detail can be automatically performed.In the figure, input medias such as keyboard 41 are to be used for to testing fixture 10 input and the device of checking relevant various information etc., and display device such as CRT monitor 42 are devices of various information of demonstration etc.And the device of the various data that memory storage 43 needs when to be storages check etc.

Again, the camera data on a large scale (image on a large scale) of the synthetic camera data (composograph) of conduct of cutting apart camera data (split image), its processing being obtained that obtains by image input port 52 with frame memory 51 storage of image and the view data such as electronic component data (check component number according to) of checking object.Storer 53 is the temporary transient various memory of data that need when checking of storing.And lighting controller 54 is controllers that usefulness is controlled in the driving of illumination apparatus 35 when utilizing video camera 3 to make a video recording, motor controller 55 and motor amplifier 56 are drivings of control X-axis mobile means 30 and the y-axis shift section of starting 20, the parts that video camera 3 is relatively moved on the XY direction of principal axis with respect to installation base plate P.And CPU5 forms and can carry out the structure that data are given and accepted by peripherals such as various I/O ports 57 and fitting machines 6.

And as the CPU5 of control device response is moved by the action sign on that input media 41 obtains, the described action in back is carried out in the driving of each drive division of control testing fixture 10.

In the hookup wire of this example, utilize fitting machine 6 that electronic component E is installed on substrate P as mentioned above, this installation base plate P moves into travelling belt 11a by what travelling belt 7 was sent to testing fixture 10 1 sides.

On the other hand, testing fixture 10 at first as shown in Figure 8, according to size, the camera coverage (image pickup scope) of the checked hereafter installation base plate P of pre-prepd data, (step S11) such as the number of times of imaging that computed segmentation when shooting needs, camera positions.For example shown in Figure 9, have at camera coverage 3A under the situation of size of Lx * Ly, is that benchmark is in length and breadth (XY direction of principal axis) clathrate and is divided into a plurality of camera watch region Pg with the inspection subject area of installation base plate P with camera coverage 3A ..., calculate number of times of imaging (cutting apart number), the video camera 3 when each camera watch region Pg is made a video recording with respect to the camera position of substrate, shooting order as described below.At this moment, with minimum number of times of imaging, and, make the complete inspection subject area can both photograph to checking that subject area cut apart, calculate at this moment each camera position as best camera position.

Also have, in this example, among Fig. 9 with about be X-direction (line direction), above-below direction is as Y direction (column direction), in the example of this figure, the inspection subject area of installation base plate P is split into the 5 row (row of y1～y5) * 6 (the camera watch region Pg of x1～x6).After number of times of imaging etc. is calculated, utilize and move into travelling belt 11a and inner travelling belt 2, installation base plate P be positioned (step S12) the assigned position of installation base plate P conveyance to inner travelling belt 2.

Then, as shown in figure 10, video camera 3 is relatively moved with respect to installation base plate P, in advance to the camera watch region Pg that comprises position reference mark (fiducial mark) Ps of installation base plate P make a video recording (step S13).For example, video camera is moved to and for example corresponding camera position of camera watch region Pg of the 1st row 1 row (x1, y1), made a video recording in this zone, equally, camera watch region Pg, the camera watch region Pg of the 5th row 1 row (x1, y5), the camera watch region Pg of the 5th row 6 row (x6, y5) to the 1st row 6 row (x6, y1) makes a video recording in regular turn, and the camera watch region Pg that comprises position reference mark Ps in four corners of substrate is made a video recording.The camera data that obtains like this is attached on the assigned position storer.

Then, video camera 3 moves to next camera watch region Pg and makes a video recording (step S14,15), this is cut apart camera data be attached to (step S16) on the assigned position storer.And carry out these (step S14, S15, S16) repeatedly and handle (being NO among the step S17), all cut apart the camera data ground that is not overlapping and fit in regular turn, obtain comprising the camera data on a large scale (image on a large scale) of Zone Full of the inspection subject area of substrate P.In case finished the shooting (being YES among the step S17) of all images zone Pg like this, just finished shooting/synthetic processing.Also have, in this example, carry out inspection simultaneously, handle and to narrate in the back for this inspection to parts with shooting/synthetic processing.

Here, shooting is described in proper order.In this example, shown in the arrow 3L of Figure 11, the camera watch region Pg in four corners of making a video recording, after the camera watch region Pg to the 1st row begins to make a video recording in regular turn from prostatitis (left side), the 2nd camera watch region Pg that goes is begun to make a video recording in regular turn from rank rear (right side) except going ahead of the rest.Below equally the following every row of camera watch region of the 3rd row is made a video recording in regular turn.Video camera 3 is being wriggled with respect to substrate P mainly move, can reduce moving of Y direction, just can reduce moving of substrate P one side (travelling belt 2 one sides), video camera 3 one sides are preferentially moved in X-direction.Thereby can accelerate translational speed, can improve checking efficiency, can reduce simultaneously the vibration when mobile, also can improve the inspection precision.

In this example, when each the 1st camera watch region Pg that goes is made a video recording,, video camera 3 begins the 1st camera watch region Pg made a video recording from being moved in X-direction again.For example at the 1st row, under the camera watch region Pg situation of making a video recording of the 2nd row (x2, y1), in advance video camera 3 is disposed at from the camera watch region Pg (direction move in backward shift) of the 1st row the 2nd row (x2, y1) and moves the position of a camera watch region, just be listed as the corresponding position of camera watch region Pg of (x1, y1) with the 1st row the 1st.Then, make video camera 3 move 1 camera watch region, it is disposed at the shooting field Pg of the 1st row the 2nd row (x2, y1), the camera watch region Pg of this position (x2, y1) is made a video recording in X-direction from this state.Equally, when the camera watch region Pg to the 2nd row the 1st (x6, y2) makes a video recording, in advance video camera 3 is disposed to the position T2 that moves a camera watch region than the camera watch region Pg of the 2nd last row of row (x6, y2) more laterally, promptly begins to photograph from this camera watch region Pg that moves to the 2nd last row of row (x6, y2).Equally, when the 1st later camera watch region Pg of the 3rd row photographed, it is pre-configured in the position T3, the T4 that move a camera watch region relative to the 1st camera watch region Pg laterally, after X-direction moved video camera 3, the 1st the camera watch region Pg that moves to each row promptly began shooting from this state.

Like this 1st camera watch region Pg of each row when making a video recording, moved on X-direction by making it in advance, can be adjusted into the photography beginning condition of the 1st camera watch region with the 2nd photography that camera watch region is later and begin condition the same terms.Make a video recording even therefore move under the state that video camera 3 vibrates in addition when just having stopped, also can making a video recording to whole camera watch region Pg, obtain the high precision of checking with same condition.And because the beginning condition of will making a video recording is adjusted into identical condition, the thread pitch aspect of the spherical screw 33 that produces when therefore utilizing spherical screw 33 to make video camera 3 move firm the end also is favourable.

Also have, it is moved on X-direction, and when each the 1st camera watch region Pg that goes was made a video recording, its amount of movement also can be littler than a camera watch region, if on X-direction, after a small amount of the moving the 1st camera watch region made a video recording, can access identical effect.

Again, in this example, also the shooting that video camera 3 can be carried out, just can preferentially be made a video recording as long as video camera 3 arrives the camera position of regulation as Interrupt Process.

On the other hand, in this testing fixture 10, after position datum mark Ps made a video recording, carry out inspection simultaneously to electronic component E with above-mentioned shooting/synthetic processing.

Promptly, as shown in figure 13, in case discerned position reference mark Ps (being Yes among the step S21), just can correctly determine substrate position according to position reference mark Ps.In case substrate position is determined, according to pre-prepd reference electronic component number as shown in figure 14 according to (benchmark component number according to), can calculate the desirable center Eo of each the electronic component E on the substrate, and, can calculate inspection parts zone (the cutting out the zone) Ea (step S22) of each the electronic component E that has each electronic component E according to desirable installation site and the angle of this center Eo and each electronic component E.And, check parts area E a at this, include surplus (margin) (tolerance and alignment error).Again, adjacent inspection parts area E a also can be overlapped.

Check parts area E a in case calculate, in above-mentioned shooting/synthetic processing, with regard to standby in the image of taking (image on a large scale in the generative process), including a certain inspection parts area E a (being No among the step S23).Then, in case comprise a certain inspection parts area E a (being Yes among the step S23) in the image of Pai Sheing as shown in figure 15, just will check that from the image of this shooting parts area E a cuts out as the electronic component data of checking object (checking the component number certificate).

Also have, in this example, the order that cuts out of inspection parts area E a is obtained in proper order according to shooting, therefore classifies to checking parts area E a according to the morning and evening that cuts out order in advance, begins to judge in regular turn from the inspection parts area E a that cuts out morning at step S23.

Then, the inspection component number that cuts out is compared according to (benchmark component number certificate) according to the reference electronic component number with preparation, for with check that component number is according to corresponding electronic component, carry out installment state inspections (step S24) such as short supply inspection, the inspection of mistake parts, position deviation inspection, welded condition inspection, its check result is output to display device 42 etc., is stored in memory storage 43 simultaneously.

Like this, take out in regular turn from image (camera data on a large scale) on a large scale and to check the component number certificate, check (being No among the step S25) in regular turn,, just finish inspection (being Yes among the step S25) installation base plate in case finish the inspection of complete inspection component number certificate.

Cut out from image on a large scale check component number according to the time, the data that this quilt cuts out stay not to be eliminated.Check that just the component number certificate is not that what is called is cliped and pasted (cut and paste), but paste (copyand paste) input as copy.

In case complete inspection finishes, inner travelling belt 2 just moves forward along Y direction, is configured on the position corresponding with pipeline XL.Utilize inner travelling belt 2 and take out of travelling belt 12a substrate P taken out of inspection box 1 outside thereafter.

After handling like this, the substrate P of utilizing fitting machine 6 that electronic component E has been installed is sent to testing fixture 10 in regular turn, in regular turn it is checked.

On the other hand, in the testing fixture 10 of this example, as described below, the position data of store electrons parts E, the installation site that the camera position of the video camera 3 of testing fixture 10 being made a video recording according to this position data and the installation head 91 of fitting machine 6 are installed is revised.

Here, the main cause of the electronic component E occurrence positions of image skew on a large scale is classified as three kinds.The 1st classification is the situation that deviation takes place in the installation site that causes of the mobile deviation of axle of the installation head 91 of fitting machine 6, the 2nd classification is the situation that the mobile deviation of axle of the video camera 3 of testing fixture 10 causes camera position generation deviation, and the 3rd classification is the situation of installation site and camera position both occurrence positions deviation.

In this example, whether the judgement that whether is contained in the 1st classification is changed to benchmark with certain gradient with the parts position offset in each the camera watch region Pg in the composograph with respect to the distance from the reference position is carried out.Just the axle in installation head 91 move to exist under the situation of skew, the position offset δ 1 of each the electronic component E increase and decrease that is directly proportional with the desirable distance of leaving position reference mark Ps.Specifically, as shown in figure 17, desirable distance (mm) from position reference mark Ps to each electronic component E1～E8 is designated as " 1.000 " " 2.000 " ... when " 8.000 ", the installation position is equipped with skew, camera position does not have under the situation of skew, for example as shown in figure 18, the position offset δ 1 that is configured to No. 1 electronic component E1 is " 0.003 " (=practical measurement distance " 1.003 " ideal distance " 1.000 "), the position offset δ 1 of No. 2 electronic component E2 is " 0.006 ", No. 3 is " 0.009 " ..., No. 8 is " 0.024 ".When this position offset δ 1 used curve representation with the relation of ideal distance, as shown in figure 19, the position offset δ 1 of each parts was directly proportional with the ideal distance of distance and position datum mark Ps, is to change with certain gradient (expansion and contraction) as can be known.Therefore in this example, as described below, judge according to the gradient of the position offset δ 1 in each camera watch region Pg whether the installation site has skew, having under the situation of skew, modified value can be fed back to fitting machine 6.Also have, Figure 19 is the curve map that the measured value when fixing a number the purpose substrate P according to check gauge makes, and the line segment 1a of this curve map represents the least square straight line (also identical among following Figure 22,24) by each point.

In Figure 18 and Figure 19, express the situation that camera position does not have skew again,, but it is as described below, even camera position has under the situation of skew, in case the installation position is equipped with skew, the position offset δ 1 of each parts also changes with certain gradient in each camera watch region.

Whether the judgement that whether is contained in the 2nd classification is not all benchmark for each camera watch region Pg with position offset δ 1 is carried out.Just the axle of the video camera 3 of testing fixture 10 moves under the situation that has skew, and the end limit (contact edge) of adjacent camera watch region Pg is mutually internally inconsistent, as shown in figure 20, forms a certain amount of gap, split image under this state between each camera watch region Pg.If it is the image of taking is synthetic at this state, then as shown in figure 21, the position offset δ 1 of electronic component E1, E2 in the 1st (left end) camera watch region Pg is " 0 ", the position offset δ 1 of electronic component E3～E5 in the 2nd (centre) camera watch region Pg is " 0.008 ", and the position offset δ 1 of the electronic component E6～E8 in the 3rd (right-hand member) camera watch region Pg is " 0.016 ".When this position offset δ 1 used curve representation with the relation of the ideal distance of distance and position datum mark Ps, as shown in figure 22, the position offset δ 1 of each camera watch region Pg had a certain amount of differential (offset) as can be known.Thereby, as described below in this example, judge according to each the position offset δ 1 in each camera watch region Pg whether camera position has skew, having under the situation of skew, it is own modified value can be fed back to testing fixture 10.

Also have, in Figure 20～Figure 22, express the situation that the installation site does not have skew, but as described below, even the installation position is equipped with under the situation of skew, in case camera position has skew, the position offset δ 1 of each camera watch region Pg also progressively changes with certain amount.

The 3rd classification is to comprise the 1st classification and the 2nd both situations of classification, parts position offset δ 1 according to whether in each camera watch region Pg changes with certain gradient, and has differential (offset) of ormal weight to judge among the parts position offset δ 1 of each camera watch region Pg.That is to say, under the situation that is contained in the 3rd classification, as shown in figure 23, the position offset δ 1 of electronic component E1, E2 in the 1st (left end) camera watch region Pg is " 0.003 " " 0.006 ", the position offset δ 1 of electronic component E3～E5 in the 2nd (centre) camera watch region Pg is " 0.001 " " 0.004 " " 0.007 ", and the position offset δ 1 of the electronic component E6～E8 in the 3rd (right-hand member) camera watch region Pg is " 0.002 " " 0.005 " " 0.008 ".When this position offset δ 1 uses curve representation with the relation of the ideal distance of putting datum mark Ps of offing normal, as shown in figure 24, the position offset δ 1 of each camera watch region Pg changes with certain gradient as can be known, and for each camera watch region Pg, position offset progressively changes with ormal weight.Thereby, in this example, under the situation that is being contained in the 3rd classification, modified value can be fed back to fitting machine 6 and testing fixture 10 both.

Action describes to the correcting process in the testing fixture 10 of this example below.Also have, in the following description, describe with the example that is modified to of X-direction, but in this example, also the same correction the on Y direction with X-direction.

At first as shown in figure 16, this testing fixture 10 is checked the position of each the electronic component E on the substrate P in the image (composograph) on a large scale, is stored (step S31) as position data.

Then, in case stored the position data (being YES among the step S32) of the substrate of regulation number (for example 6), just calculate the distance of each electronic component E and position reference mark Ps according to the position data of storage, its measured distance is compared with the ideal distance of programming in advance, calculated the position offset δ 1 (step S33) of each electronic component E.

Then, minimum at position offset δ 1, under the situation that absolute fix and camera position do not need to revise, finish correcting process (being NO among the step S34).

Under the situation of needs correction (being YES among the step S34), calculating is in the summation of each camera watch region Pg parts position offset δ 1, as Figure 19, Figure 22, shown in Figure 24, with position offset δ 1 is the longitudinal axis, is that transverse axis is made curve map (graph) with the ideal distance from position reference mark Ps to parts.And each camera watch region Pg is made least square straight line 1a by each point according to this curve map, obtain the slope (gradient) (step S35) of this line segment 1a respectively.

Then, judge whether position offset δ 1 is changing with certain gradient in each camera watch region Pg, judge just whether the line segment 1a in each camera watch region Pg has inclination (step S36).Figure 19 and shown in Figure 24 for example, line segment 1a in each camera watch region Pg has under the situation of inclination, be judged as and be contained in the 1st classification, gradient calcuating correction value according to position offset δ 1, this modified value is fed back to fitting machine 6, and the amount of movement (installation site) of installation head 41 is revised (step S37).Also have, the gradient of the position offset δ 1 of each camera watch region Pg (slope of the line segment 1a of each camera watch region Pg) equates respectively.

Then after modified value feeds back to fitting machine 6, or under the situation that not have to change of the position offset δ 1 in each camera watch region Pg (being No among the step S36), obtain the level residual quantity (offset amount) (step S38) of the position offset δ 1 on the boundary portion of adjacent camera watch region Pg respectively.

Then, judge whether the position offset of each camera watch region Pg has the variation of differential property, just judged whether a grade residual quantity (step S39).For example Figure 22 and shown in Figure 24 judges to being contained in the 2nd classification in the situation that grade residual quantity is arranged.Then according to this grade residual quantity calcuating correction value, this modified value is fed back to testing fixture 10 itself, revise the amount of movement (camera position) (step S40) of video camera 3.Also have, the inspection amount of each camera watch region Pg equates respectively.

Then, after the feedback of correction finishes, or (be NO among the step S39) under the situation that does not have differential (offset), the correcting process of this testing fixture finishes.

As mentioned above, in this example, the position offset of obtaining X-axis and Y direction respectively carries out the correction of both direction.

As mentioned above, in this example, according to cutting apart the position offset δ 1 that the synthetic composograph that obtains of camera data calculates each electronic component, each camera watch region Pg is asked the summation of their position offset δ 1, camera position according to 1 pair of video camera 3 of position offset δ of each camera watch region Pg is revised, therefore even do not make and cut apart camera data and overlap and can positional precision connect well yet, obtain high-precision image on a large scale.Thereby, can check according to this high-precision high precision of image on a large scale.And, can simply and correctly dwindle the parts examination scope according to this high-precision image on a large scale, can shorten the supervision time, improve checking efficiency.

Again, because be the equipment of revising according to the position that 1 pair of fitting machine 6 of the position offset δ in each camera watch region Pg is installed, so can high precision keep the positional precision of fitting machine 3.

Again, in this example, can obtain the data (position data) of revising usefulness by the installation base plate P from checking, camera position and installation site are revised, therefore the data of the effective correction usefulness of energy before enough a moments are carried out correct correction.For example, conditions such as indoor temperature, humidity at every moment, changing at day and night, because of the condition difference, modified value also changes, in this example, revise according to the data that obtained before a moment,, also can corresponding each condition carry out correct correction even therefore condition changes in time.

Particularly in this example, for as the temperature variation of the spherical screw of the mobile means of video camera 3 and installation head 91 cause flexiblely also can successfully manage.Just, in order to tackle expanding with heat and contract with cold of spherical screw, have in each working time and measure for example expansion and contraction of screw in advance, according to the method for revising amount of movement working time, with the temperature of measuring spherical screw portion, ask method that the expansion and contraction of spherical screw revises etc. according to this temperature variation.But in these methods, accuracy is not enough, can not revise especially accurately under the different situation of condition.To this, in this example,, therefore also can successfully manage expanding with heat and contract with cold of spherical screw owing to adopt the measured data before a moment to obtain modified value.

Also have, the modification method of this example also can also be used with the top described method of asking the expansion and contraction of spherical screw to revise according to temperature variation.In this case, under the consistent situation of the modified value that derives from two kinds of modification methods, can obtain the very high modified value of reliability, therefore also can adopt the method for utilizing the high modified value of this reliability to revise.

Again, in this example, each time the substrate P of regulation number is handled, camera position and installation site are revised, therefore can revise the deviation of camera position and the deviation of installation site one by one in margin tolerance, the stack that can prevent small deviation causes the generation of harmful deviation.

Again, in the testing fixture 10 of this example, from cutting out the inspection component number according to checking the camera data on a large scale, therefore with the irrespectively definite number of times of imaging of the number of the electronic component E that installs to substrate.Therefore,, also number of times of imaging can be suppressed subthreshold, can shorten the supervision time significantly, improve checking efficiency even the number of electronic component E increases.

Particularly in this example, under the situation of the many electronic component E of high-density installation, can check on the substrate P with higher efficient.For example, as existing inspection method, each electronic component cut apart and make a video recording, cutting apart camera data from it is taken under the inspection parts data conditions, cut apart and comprise the outer according to this unwanted data of a lot of inspection component numbers in the camera data, therefore be necessary to delete a large amount of unwanted data.And, in the inspection method in the past, under the regional overlapped situation of the adjacent inspection parts on the substrate, this overlapped part is repeated shooting, the inefficiency of therefore making a video recording.

In contrast, in this example, under the situation of high-density installation electronic component E, owing to seamlessly there is electronic component E in the camera data on a large scale, almost all on a large scale camera data can both obtain utilizing and not waste, unwanted data seldom can high-level efficiency be checked.And this example engages the taking-up of the camera data on a large scale detection parts zone that obtains from cutting apart camera data, as long as therefore the lap in adjacent inspection parts zone duplicates use with the camera data of this part, shooting needn't be repeated, shooting efficient can be further improved.

Again, in this example, the split image that to cut apart shooting is on one side fitted, cutting out the inspection component number certificate that can cut out from this image on a large scale that is making on one side checks, therefore the processing of can making a video recording/synthesize is carried out together, handle as a setting and carry out the parts inspection, can further improve checking efficiency.Again, take out from image on a large scale check component number according to the time, utilize position reference mark Ps to position, therefore can improve and cut out precision, the result can improve the inspection precision of installment state.

Again, in this example, adjacent camera watch region Pg is not made a video recording with being overlapping, intermeshing ground does not make camera data on a large scale with the adjacent camera data joint of cutting apart, therefore can further improve shooting efficient, simultaneously do not need the part that is overlapping is carried out data processing yet, therefore can further improve checking efficiency.

Also have, in this example, when position datum mark Ps is made a video recording in advance, only the camera watch region that comprises position reference mark Ps is made a video recording, but the invention is not restricted to this, in the present invention, as shown in figure 29, also can whole camera watch region Pg of each row of comprising position reference mark Ps (among Figure 29 the 1st row and the 5th capable) be made a video recording in advance.In this case, can make video camera 3 on Y direction, move (utilizing moving of travelling belt 2), the processing of can making a video recording more expeditiously during shooting less.

Again, the border in that position datum mark Ps is positioned at two shooting Pg is under the situation of the position of crossing over two camera watch region Pg, as long as these two camera watch region Pg and camera watch region Pg of each row that comprises this zone are made a video recording in advance.

Also have, when position datum mark Ps is made a video recording, earlier the more than one optional position datum mark Ps among a plurality of position reference mark Ps is made a video recording in advance, remaining position reference mark Ps makes a video recording afterwards and gets final product.

But, in the present invention, needn't be necessarily make a video recording to the position datum mark earlier, and the present invention also can be suitable for for the substrate of not giving position datum mark such as datum mark.

Again, in above-mentioned example, be illustrated, but be not limited to this, in the present invention, also can not made a video recording in the zone of not checking, and the shooting of jumping gets final product for the situation that the Zone Full of installation base plate P is made a video recording.For example shown in Figure 30, also can only cut apart shooting to the regional Pg that comprises electronic component E and position reference mark Ps on the installation base plate P, do not make a video recording in all the other zones.At this moment, camera position, number of times of imaging, shooting are calculated in proper order, make to comprise electronic component as much as possible in each camera watch region, can handle with minimum number of times of imaging.

Again, in above-mentioned example, when cutting apart shooting, adjacent camera watch region is not made a video recording with being overlapping, but the invention is not restricted to this, in the present invention, adjacent camera watch region Pg intermeshing is made a video recording.

Again, in above-mentioned example, formation is only moved video camera on X-direction structure, but the invention is not restricted to this, in the present invention, also can form the structure that video camera can both be moved in X-direction and Y direction, when shooting is handled, substrate is fixed in advance, video camera is moved on the XY direction of principal axis, can form the structure that substrate one side is moved again on X-axis and Y direction, also can when shooting is handled, video camera be fixed in advance, substrate one side is moved on the XY direction of principal axis.

Claims

1. the installation base plate inspection method that the installation base plate that electronic component is installed is checked is characterized in that, comprises

2. installation base plate inspection method according to claim 1 is characterized in that, in described shooting step, the camera watch region that comprises the position reference mark of giving substrate is made a video recording.

3. installation base plate inspection method according to claim 1 is characterized in that,

4. installation base plate inspection method according to claim 1 is characterized in that,

5. installation base plate inspection method according to claim 1 is characterized in that, in described shooting step the Zone Full of installation base plate is made a video recording.

6. installation base plate inspection method according to claim 1 is characterized in that, in described shooting step, to all making a video recording except the zone that electronic component is not installed in the installation base plate.

7. the installation base plate testing fixture that the installation base plate that electronic component is installed is checked is characterized in that,

Possess

To each camera watch region in a plurality of camera watch regions of installation base plate make a video recording usefulness camera head,

Described control device is carried out following step, promptly

8. an installation base plate image capture method that utilizes the shooting means that the installation base plate that electronic component is installed is made a video recording is characterized in that, comprises

Installation base plate is divided into a plurality of camera watch regions, described camera head is moved to make a video recording to each camera watch region in regular turn, obtain a plurality of shooting steps of cutting apart camera data,

According to the position offset of each camera watch region in the described synthetic camera data, revise the step of described camera head with respect to the camera position of camera watch region.

9. installation base plate image capture method according to claim 8 is characterized in that, in described synthesis step, a plurality ofly is bonded with each other described with cutting apart the camera data zero lap.

10. installation base plate image capture method according to claim 8 is characterized in that,

11. installation base plate image capture method according to claim 8 is characterized in that,

12. the installation base plate inspection method that the installation base plate that electronic component is installed is checked is characterized in that, comprises

According to the position offset of each camera watch region in the described synthetic camera data, revise described camera head with respect to the correction step of the camera position of camera watch region and

13. the installation base plate testing fixture that the installation base plate that electronic component is installed is checked is characterized in that,

Possess

Make described camera head with respect to installation base plate the mobile device that relatively moves on the directions X parallel and on the Y direction with shooting face and

Control the control device of the driving of described camera head and described mobile device,

Described control device is carried out following step, promptly

14. a hookup wire possesses the testing fixture that electronic component is installed on the fitting machine on the substrate and the substrate that utilizes this fitting machine that electronic component has been installed is checked, it is characterized in that,

15. hookup wire according to claim 14 is characterized in that, in described correction step, according to the position offset in each camera watch region in the described synthetic camera data, revises the installation site that fitting machine is installed.

16. an installation base plate testing fixture has inspection box (housing), checks the installation base plate of sending in this inspection box, it is characterized in that,

17. installation base plate testing fixture according to claim 16 is characterized in that, described viewport disperses to form a plurality of.

18. installation base plate testing fixture according to claim 16 is characterized in that,

Described viewport is arranged at described rake.

19. installation base plate testing fixture according to claim 16 is characterized in that,

In the described zone that the position is set of avoiding described camera head that covers described viewport is set.

20. installation base plate testing fixture according to claim 16 is characterized in that,

Be provided with along the substrate conveyer line of regulation installation base plate sent into described inspection box inside, and it can be taken out of the base plate transfer device of described inspection box outside,

Described viewport forms the slotted hole that carries out the direction extension of installation base plate transmission along described base plate transfer device.

21. installation base plate testing fixture according to claim 16 is characterized in that,

Described viewport disperses to form a plurality of,

22. installation base plate testing fixture according to claim 16 is characterized in that,