CN1752795A - Two dimensional piezoelectric optical scanner - Google Patents
Two dimensional piezoelectric optical scanner Download PDFInfo
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- CN1752795A CN1752795A CN 200510082957 CN200510082957A CN1752795A CN 1752795 A CN1752795 A CN 1752795A CN 200510082957 CN200510082957 CN 200510082957 CN 200510082957 A CN200510082957 A CN 200510082957A CN 1752795 A CN1752795 A CN 1752795A
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- sheet metal
- catoptron
- optical scanner
- driving member
- piezoelectric ceramics
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Abstract
The present invention discloses a two-dimensional piezoelectric optical scanner. It is composed of drive component, reflector and four piezoelectric ceramics. The described drive component is formed from upper metal plate, lower metal plate, left metal plate and right metal plate. Said invention also provides the connection mode of the above-mentioned all the components and the working principle of said scanner.
Description
Technical field
The present invention relates to a kind of two dimensional piezoelectric optical scanner, belong to the image collecting device in optical instrument or the exact instrument.
Background technology
Optical scanning system mainly partly is made up of mechanical scanning unit, optical imagery unit, Photoelectric Signal Processing and control module and computing machine etc.Wherein the scanner in the optical imagery unit is a very important part of image acquisition.The piezoelectric scanner that adopts in the existing optical imagery unit generally is merely able to realize the one dimension beam flying, when carrying out two-dimentional light beam scanning, needs to adopt a plurality of piezoelectric scanners to make up and could realize.Because optical instrument is relatively more accurate, will increase the complicacy of scanning system like this, strengthened the difficulty and the loss that has increased light intensity of optical scanning system light path tracking, cost is risen to some extent.
Piezoelectric scanner is in accurate location, light path control, and there is comparatively application prospects field such as micrometric displacement control and aspects such as optical instrument and precision optical machinery processing.Improvement to its structure helps improving the precision of image acquisition and the reduction of scanning device cost.
Summary of the invention
The purpose of this invention is to provide a kind of two dimensional piezoelectric optical scanner, it only drives catoptron with two bimorphs and realizes two dimensional image scanning, and its device fabrication is simple, and reasonable in design is applicable to field of drivers simultaneously, realizes that two dimension drives.
A kind of two dimensional piezoelectric optical scanner of the present invention, it is made of driving member, catoptron and four piezoelectric ceramics, described driving member is made up of last sheet metal, following sheet metal, left sheet metal and right sheet metal, last sheet metal is parallel with following sheet metal, left side sheet metal is parallel with right sheet metal, the two ends of last sheet metal are connected with the end of left sheet metal and right sheet metal respectively, the other end of left side sheet metal and right sheet metal is connected with the two ends of following sheet metal respectively, forms the quadrilateral structure that there is a cavity centre; First piezoelectric ceramics and second piezoelectric ceramics symmetry are fixed on the sheet metal, constitute bimorph structure; The 3rd piezoelectric ceramics and the 4th piezoelectric ceramics symmetry are fixed on down on the sheet metal, constitute bimorph structure; Catoptron is fixed on the right sheet metal, and the center line of catoptron overlaps with lumen centerline.
Described two dimensional piezoelectric optical scanner, its driving member and catoptron are integral member, and driving member adopts the moulding of line patterning method time processing, and cut outstanding sheet metal as catoptron in the centre position of right sheet metal symmetry.
Described two dimensional piezoelectric optical scanner is gone up sheet metal and can be realized in the same way with following sheet metal or bending on the inverse direction when it loads different voltage.
The advantage of two dimensional piezoelectric optical scanner of the present invention: (1) catoptron can be realized around two axially-movables; (2) only drive with two bimorphs; (3) simple in structure; (4) be convenient to control.
Description of drawings
Fig. 1 is a structural representation of the present invention.
Fig. 2 is the deformation state location diagram of catoptron under the reverse voltage condition.
The deformation state location diagram that Fig. 3 is a catoptron under voltage conditions in the same way.
The deformation state synoptic diagram that Fig. 4 is a two dimensional piezoelectric optical scanner under voltage conditions in the same way.
Fig. 5 is the deformation state synoptic diagram of two dimensional piezoelectric optical scanner under the reverse voltage condition.
Fig. 6 is a pyramidal structure synoptic diagram of the present invention.
Fig. 7 is a staircase structure synoptic diagram of the present invention.
Among the figure: 1. the 3rd piezoelectric ceramics of 2. second piezoelectric ceramics 3. of first piezoelectric ceramics
4. 6. times sheet metals of sheet metal, 7. left sheet metals on the 4th piezoelectric ceramics 5.
8. right sheet metal 9. catoptrons 10. driving members 11. cavitys
Embodiment
The present invention is described in further detail below in conjunction with accompanying drawing.
See also shown in Figure 1, the present invention is a kind of two dimensional piezoelectric optical scanner, it is made of driving member 10, catoptron 9 and four piezoelectric ceramics, described driving member 10 is made up of last sheet metal 5, following sheet metal 6, left sheet metal 7 and right sheet metal 8, last sheet metal 5 is parallel with following sheet metal 6, left side sheet metal 7 is parallel with right sheet metal 8, the two ends of last sheet metal 5 are connected with the end of left sheet metal 7 and right sheet metal 8 respectively, the other end of left side sheet metal 7 and right sheet metal 8 is connected with the two ends of following sheet metal 6 respectively, forms the quadrilateral structure that there is a cavity 11 centre; First piezoelectric ceramics 1 and second piezoelectric ceramics 2 symmetry are fixed on the sheet metal 5, constitute bimorph structure; The 3rd piezoelectric ceramics 3 and the 4th piezoelectric ceramics 4 symmetries are fixed on down on the sheet metal 6, constitute bimorph structure; Catoptron 9 is fixed on the right sheet metal 8, and the center line of catoptron 9 and cavity 11 central lines.
In the present invention, driving member 10 adopts the machine-shaping of metal aluminium flake, and its thickness is determined according to piezoelectric ceramics size (four), each several part material parameter and user's designing requirement.Driving member 10 can be processed into integral member, adopts the moulding of line patterning method time processing, and promptly the heartcut at the metal aluminium flake goes out a cavity 11.The last sheet metal 5 of described driving member 10 and the structure of following sheet metal 6 also can be taper or staircase structure (seeing also Fig. 6, shown in Figure 7).Driving member 10 also can be by other job operation processing, as long as its structure is met the demands.
When the driving member 10 of two dimensional piezoelectric optical scanner of the present invention is integral member, when adopting the line patterning method to cut right sheet metal 8 structures,, make outstanding metal aluminium flake as catoptron 9 usefulness at the outstanding metal aluminium flake of the centre position of right sheet metal 8 symmetry cutting.
In the present invention, the thickness of first piezoelectric ceramics 1, second piezoelectric ceramics 2, the 3rd piezoelectric ceramics 3 and the 4th piezoelectric ceramics 4 can be determined according to user's needs.
In the present invention, catoptron 9 is a metal aluminium flake, can be the sheet metal that is welded on the right sheet metal 8, also can be an outstanding small pieces sheet metal excision forming when the right sheet metal 8 of cutting, and outstanding sheet metal is catoptron 9.Its size can be determined according to piezoelectric ceramics size, material and user's needs.
Two dimensional piezoelectric optical scanner of the present invention, when loading in the same way alternating voltage, first piezoelectric ceramics 1 shrinks, then second piezoelectric ceramics 2 elongation, thereby make sheet metal 5 generation flexural deformations.The 3rd piezoelectric ceramics 3 shrinks, then the 4th piezoelectric ceramics 4 elongations, thereby make down sheet metal 6 produce flexural deformation.Sheet metal 5 is that direction is consistent with the flexural deformation of following sheet metal 6 on like this when loading in the same way alternating voltage, its on-load voltage and last sheet metal 5 and following sheet metal 6 be deformed into direct ratio.At this moment, catoptron 9 is around Y-axis anglec of rotation β, the deformation state position relation of catoptron 9 under voltage conditions in the same way as shown in Figure 3, among the figure, dotted line is represented catoptron 9 not loading the location status of electric current in the same way, and when loading current, catoptron 9 side-to-side movements are to the location status that powers up back mirror 92, catoptron 9 forms an angle with powering up back mirror 92 like this, and promptly angle is with identical around Y-axis anglec of rotation β angular dimension.In working order down, the deformation state of two dimensional piezoelectric optical scanner of the present invention under voltage conditions in the same way as shown in Figure 4.
Two dimensional piezoelectric optical scanner of the present invention, when loading Opposed crossing voltage, first piezoelectric ceramics 1 shrinks, then second piezoelectric ceramics 2 elongation, thereby make sheet metal 5 produce flexural deformation.The 3rd piezoelectric ceramics 3 elongations, then the 4th piezoelectric ceramics 4 shrinks, thereby makes down sheet metal 6 produce flexural deformation.Sheet metal 5 is that direction is opposite with the flexural deformation of following sheet metal 6 on like this when loading Opposed crossing voltage, its on-load voltage and last sheet metal 5 and following sheet metal 6 be deformed into direct ratio.At this moment, catoptron 9 is around X-axis anglec of rotation α, the deformation state position relation of catoptron 9 under the reverse voltage condition as shown in Figure 2, among the figure, dotted line is represented catoptron 9 not loading the location status of electric current in the same way, and when loading current, catoptron 9 moves up and down to the location status that powers up back mirror 91, catoptron 9 forms an angle with powering up back mirror 92 like this, and promptly angle is with identical around X-axis anglec of rotation α angular dimension.Down, the deformation state of two dimensional piezoelectric optical scanner of the present invention under the reverse voltage condition as shown in Figure 5 in working order.
Like this when bimorph, when loading different voltage, the 3rd piezoelectric ceramics 3, the 4th piezoelectric ceramics 4 and the bimorph that following sheet metal 6 constitutes to realize that sheet metal 5 and following sheet metal 6 two parts are in the same way or bending on the inverse direction to constituting by first piezoelectric ceramics 1, second piezoelectric ceramics 2 and last sheet metal 5.Because two of the catoptron 9 that is connected of above-mentioned two bimorph symmetries is brought in common driving catoptron 9, make during bending catoptron 9 rotate in the same way when last sheet metal 5 and following sheet metal 6 like this around Y-axis, and when last sheet metal 5 and following sheet metal 6 back-flexings, make catoptron 9 rotate, thereby realize two-dimensional scan around X-axis.Catoptron 9 yaw displacement can be by institute's on-load voltage decision, so its easy control.
The voltage that loads is determined according to piezoelectric ceramics size, material and user's needs.Anglec of rotation α and β are by piezoelectric ceramics size, sheet metal size, on-load voltage and the decision of each several part material.
Because two dimensional piezoelectric optical scanner of the present invention is applicable to undersized exact instrument, the whole dimension of example one is 74mm * 45mm * 0.6mm, wherein monolithic piezoelectric ceramic is of a size of 25mm * 15mm * 0.2mm, driving member 10 adopts the aluminium flake of 74mm * 45mm * 0.2mm, processes with the line patterning method.The size that this example is given does not limit protection content of the present invention only as an example, can adjust change according to the actual conditions of concrete application.
In addition, the structure of two dimensional piezoelectric optical scanner of the present invention also is applicable to microsize, and available micromachined technology is come processing metal sheet and piezoelectric ceramics.Its concrete processing technology is those skilled in the art's existing knowledge and skills.
Claims (8)
1, a kind of two dimensional piezoelectric optical scanner, it is characterized in that: by driving member (10), catoptron (9) and four piezoelectric ceramics constitute, described driving member (10) is by last sheet metal (5), following sheet metal (6), left side sheet metal (7) and right sheet metal (8) are formed, last sheet metal (5) is parallel with following sheet metal (6), left side sheet metal (7) is parallel with right sheet metal (8), the two ends of last sheet metal (5) are connected with the end of left sheet metal (7) with right sheet metal (8) respectively, the other end of left side sheet metal (7) and right sheet metal (8) is connected with the two ends of following sheet metal (6) respectively, forms the quadrilateral structure that there are a cavity (11) centre; First piezoelectric ceramics (1) is fixed on the sheet metal (5) with second piezoelectric ceramics (2) symmetry, constitutes bimorph structure; The 3rd piezoelectric ceramics (3) is fixed on down on the sheet metal (6) with the 4th piezoelectric ceramics (4) symmetry, constitutes bimorph structure; Catoptron (9) is fixed on the right sheet metal (8), and the center line of catoptron (9) and cavity (11) central lines.
2, two dimensional piezoelectric optical scanner according to claim 1, it is characterized in that: driving member (10) and catoptron (9) are integral member, driving member (10) adopts the moulding of line patterning method time processing, and cuts outstanding sheet metal as catoptron (9) in the centre position of right sheet metal (8) symmetry.
3, two dimensional piezoelectric optical scanner according to claim 1 is characterized in that: driving member (10) adopts the moulding of micromechanics time processing.
4, two dimensional piezoelectric optical scanner according to claim 1 and 2 is characterized in that: driving member (10), catoptron (9) are the metal aluminium flake.
5, two dimensional piezoelectric optical scanner according to claim 1 and 2 is characterized in that: the last sheet metal (5) of driving member (10) and the structure of following sheet metal (6) are rectangle or taper or staircase structure.
6, two dimensional piezoelectric optical scanner according to claim 1 and 2 is characterized in that: when loading in the same way alternating voltage, catoptron (9) is around Y-axis anglec of rotation β; When loading Opposed crossing voltage, catoptron (9) is around X-axis anglec of rotation α.
7, two dimensional piezoelectric optical scanner according to claim 1 and 2 is characterized in that: when loading in the same way alternating voltage, catoptron (9) is around X-axis anglec of rotation α; When loading Opposed crossing voltage, catoptron (9) is around Y-axis anglec of rotation β.
8, two dimensional piezoelectric optical scanner according to claim 1 and 2 is characterized in that: go up sheet metal (5) when loading different voltage and can realize in the same way with following sheet metal (6) or bending on the inverse direction.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2005100829576A CN100354687C (en) | 2005-07-08 | 2005-07-08 | Two dimensional piezoelectric optical scanner |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2005100829576A CN100354687C (en) | 2005-07-08 | 2005-07-08 | Two dimensional piezoelectric optical scanner |
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| Publication Number | Publication Date |
|---|---|
| CN1752795A true CN1752795A (en) | 2006-03-29 |
| CN100354687C CN100354687C (en) | 2007-12-12 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB2005100829576A Expired - Fee Related CN100354687C (en) | 2005-07-08 | 2005-07-08 | Two dimensional piezoelectric optical scanner |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103324208A (en) * | 2013-06-20 | 2013-09-25 | 山东理工大学 | Novel method and device for double-axis laser scanning |
| CN105717639A (en) * | 2016-04-29 | 2016-06-29 | 中国科学院苏州生物医学工程技术研究所 | Miniature two-dimensional scanning mirror |
| CN108535860A (en) * | 2018-05-23 | 2018-09-14 | 宁波大学 | A kind of novel double piezoelectric deforming mirrors |
| CN108614353A (en) * | 2018-05-10 | 2018-10-02 | 西安交通大学 | Two-dimensional deflection decoupling mechanism and its deflection method based on ion-exchange polymer metal material |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4385373A (en) * | 1980-11-10 | 1983-05-24 | Eastman Kodak Company | Device for focus and alignment control in optical recording and/or playback apparatus |
| US5295014A (en) * | 1992-11-12 | 1994-03-15 | The Whitaker Corporation | Two-dimensional laser beam scanner using PVDF bimorph |
| GB2316762A (en) * | 1996-08-24 | 1998-03-04 | Marconi Gec Ltd | Oscillating the mirror of a scanner using piezoelectric elements |
| JP4461654B2 (en) * | 2001-08-20 | 2010-05-12 | ブラザー工業株式会社 | Optical scanning device, vibrator used in optical scanning device, and image forming apparatus including optical scanning device |
| KR20060035747A (en) * | 2003-07-14 | 2006-04-26 | 코닌클리케 필립스 일렉트로닉스 엔.브이. | Laser beam scanner |
| CN2639915Y (en) * | 2003-09-12 | 2004-09-08 | 清华大学 | MEMS scanning microlens |
| JP4023442B2 (en) * | 2003-12-17 | 2007-12-19 | ブラザー工業株式会社 | Optical scanner and image forming apparatus having the same |
-
2005
- 2005-07-08 CN CNB2005100829576A patent/CN100354687C/en not_active Expired - Fee Related
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103324208A (en) * | 2013-06-20 | 2013-09-25 | 山东理工大学 | Novel method and device for double-axis laser scanning |
| CN103324208B (en) * | 2013-06-20 | 2016-02-03 | 山东理工大学 | A kind of two axle Laser Scanning and devices |
| CN105717639A (en) * | 2016-04-29 | 2016-06-29 | 中国科学院苏州生物医学工程技术研究所 | Miniature two-dimensional scanning mirror |
| CN108614353A (en) * | 2018-05-10 | 2018-10-02 | 西安交通大学 | Two-dimensional deflection decoupling mechanism and its deflection method based on ion-exchange polymer metal material |
| CN108535860A (en) * | 2018-05-23 | 2018-09-14 | 宁波大学 | A kind of novel double piezoelectric deforming mirrors |
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| Publication number | Publication date |
|---|---|
| CN100354687C (en) | 2007-12-12 |
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