CN1749806A - Total Internal Reflection-Refraction Laser Beam Converter - Google Patents
Total Internal Reflection-Refraction Laser Beam Converter Download PDFInfo
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Abstract
Description
技术领域technical field
本发明涉及一种对激光器出射的激光束进行某种整形、耦合的变换器，特别是对激光束直径进行扩大或者压缩使其得以更广泛的应用的所谓扩束器(或者缩束器)，属于激光光束的整形、耦合技术领域。The invention relates to a converter for shaping and coupling a laser beam emitted by a laser, especially a so-called beam expander (or beam reducer) that expands or compresses the diameter of the laser beam so that it can be used more widely. The invention belongs to the technical field of laser beam shaping and coupling.
背景技术Background technique
众所周知，从激光器出射的激光束往往是具有一定大小的发散角和口径，如果不对其采取某种整形、耦合措施很难满足当前的许多应用，而扩束器(或者缩束器)则通过对激光束直径进行扩大或者压缩使其得以更广泛的应用，所以此类变换器的设计和使用显得尤为重要。如在一些激光发射系统中，需要利用扩束器扩大激光束直径，从而压缩光束的发散角提高发射精度，如激光雷达探测，激光武器，环境检测等。在另外一些应用中相反地需要利用缩束器来压缩激光束的直径使其能够耦合进直径很小的光纤或者得到高能量强度的激光束，如光纤激光器，激光等离子激发，激光外科手术等。As we all know, the laser beam emitted from the laser often has a certain divergence angle and aperture. It is difficult to meet many current applications without some shaping and coupling measures, and the beam expander (or beam reducer) through the The diameter of the laser beam is expanded or compressed to make it more widely used, so the design and use of this type of converter is particularly important. For example, in some laser emission systems, it is necessary to use a beam expander to expand the diameter of the laser beam, thereby compressing the divergence angle of the beam to improve the emission accuracy, such as lidar detection, laser weapons, and environmental detection. In other applications, it is necessary to use a beam reducer to compress the diameter of the laser beam so that it can be coupled into a small-diameter fiber or obtain a high-energy laser beam, such as fiber lasers, laser plasma excitation, and laser surgery.
目前人们所使用的激光扩束器大致分为折射型和反射型两类。折射型的扩束器一般是由两个或两个以上的透镜组合而成，典型的折射型系统有伽利略型和开普勒型，折射型扩束器的优点是仪器的设计、加工和调节都比较简单，但是这类系统缺点是扩束倍率小、体积大，另外由于透镜入射表面的抗反射膜的瑕疵使得部分出射激光束再返回到激光器从而造成激光器的损坏，降低了激光器的使用寿命。反射型扩束器是由次镜和主镜两个反射镜组和而成，相比折射型而言反射型扩束器不仅具有较高的扩束倍率和大的出射孔径，而且体积小、重量轻。但是为了较好的校正球差、慧差和像散等像差使其得到更广泛的应用，此类扩束器一般都做成非球面的系统，如反射型非球面卡塞格林系统和格里高利系统。但是这类系统容易引起中心遮光，所以便出现了离轴卡塞格林系统和格里高利系统，离轴系统虽然使能量损失降到最低，却限制了扩束倍率和出射孔径，另外由于次镜的尺寸非常小所以加工起来相当困难，价格昂贵，所以此类扩束器并没有被广泛使用。At present, the laser beam expanders used by people are roughly divided into two types: refractive type and reflective type. Refractive beam expanders are generally composed of two or more lenses. Typical refractive systems include Galileo and Kepler types. The advantages of refractive beam expanders are the design, processing and adjustment of the instrument. They are relatively simple, but the disadvantages of this type of system are small beam expansion magnification and large volume. In addition, due to the flaws of the anti-reflection film on the incident surface of the lens, part of the outgoing laser beam returns to the laser, causing damage to the laser and reducing the service life of the laser. . The reflective beam expander is composed of two mirrors, the secondary mirror and the primary mirror. Compared with the refraction type, the reflective beam expander not only has a higher beam expansion ratio and a large exit aperture, but also has a small size and light weight. However, in order to better correct aberrations such as spherical aberration, coma, and astigmatism to make it more widely used, such beam expanders are generally made into aspheric systems, such as reflective aspheric Cassegrain systems and Gerry Highly profitable system. However, this kind of system is easy to cause central shading, so the off-axis Cassegrain system and Gregorian system appear. Although the off-axis system minimizes energy loss, it limits the beam expansion magnification and exit aperture. In addition, due to the secondary mirror The size of the beam expander is very small, so it is quite difficult to process and expensive, so this type of beam expander is not widely used.
发明内容Contents of the invention
本发明的目的是公开了一种新的全内反射-折射激光光束变换器，克服现有技术存在的扩束倍率低小、传输效率低，加工起来困难，价格昂贵…等缺陷。The purpose of the present invention is to disclose a new total internal reflection-refraction laser beam converter, which overcomes the defects of low beam expansion magnification, low transmission efficiency, difficult processing and high price in the prior art.
本发明的技术方案：Technical scheme of the present invention:
全内反射-折射激光光束变换器，它是一个对入射光透明的圆锥体，L为变换器的长度，圆锥体锥尖夹角为2α，2H为圆锥体圆平面的直径，中心旋转轴为x，其特点征在于：锥尖夹角2α的大小决定了其具体的作用，nε为变换器的折射率；它们之间的关系取决于下面的公式The total internal reflection-refraction laser beam converter is a cone transparent to the incident light, L is the length of the converter, the angle between the tip of the cone is 2α, 2H is the diameter of the circular plane of the cone, and the central rotation axis is x, its characteristic is that: the size of the cone tip angle 2α determines its specific function, n ε is the refractive index of the converter; the relationship between them depends on the following formula
这里n为传播光线和侧壁的交点次数，不同的交点次数倍率也不同，n越大倍率越高，相应的α越小；Here n is the number of intersections between the propagating light and the side wall, and the magnification of different intersection times is also different. The larger n is, the higher the magnification is, and the corresponding α is smaller;
调节α的大小和改变入射光的入射方向，是决定变换器具体起到何种作用的关键，当入射光从圆平面沿中心旋转轴入射从锥尖的侧面出射，且锥尖的夹角α满足上述公式则变换器对平行光起到的作用是缩束；当入射光从锥尖的侧面沿中心旋转轴入射从圆平面出射，且锥尖的夹角α同样满足上式，则变换器对平行光起到的作用是扩束；当入射光从圆平面沿中心旋转轴入射从锥尖的侧面出射，锥尖的夹角α不再满足上式时，则变换器起到的作用是汇聚平行光或使平行光转换成空心的激光束，激光束汇聚或发散的程度由α的大小决定；Adjusting the size of α and changing the incident direction of the incident light is the key to determine the specific role of the converter. When the incident light enters from the circular plane along the central rotation axis and exits from the side of the cone tip, and the angle α of the cone tip If the above formula is satisfied, the effect of the converter on parallel light is to reduce the beam; when the incident light enters from the side of the cone tip along the central rotation axis and exits from the circular plane, and the angle α of the cone tip also satisfies the above formula, the converter The role of parallel light is to expand the beam; when the incident light is incident from the circular plane along the central rotation axis and emerges from the side of the cone tip, and the angle α of the cone tip no longer satisfies the above formula, the role of the converter is Converge parallel light or convert parallel light into a hollow laser beam, the degree of laser beam convergence or divergence is determined by the size of α;
圆平面的大小由出射光束的直径或入射光束的直径决定，据此变换器的长度L才能确定。The size of the circular plane is determined by the diameter of the outgoing beam or the diameter of the incident beam, according to which the length L of the converter can be determined.
圆锥体圆平面的直径2H在满足公式tgα＝H/L，并大于入射光束的直径，变换器起到缩束作用；当2H在满足公式tgα＝H/L时，并大于入射光束的直径和扩束倍率的乘积，变换器起到扩束作用。The diameter 2H of the circular plane of the cone satisfies the formula tgα=H/L and is larger than the diameter of the incident beam, and the converter acts as a beam shrinker; when 2H satisfies the formula tgα=H/L, it is larger than the diameter of the incident beam and The product of beam expansion magnification, the converter plays the role of beam expansion.
变换器的长度L是在α和H确定之后再由公式tgα＝H/L求出L的大小，α确定后并变换器的折射率nε由所选用的材料决定，材料必须对入射光透明，即材料对入射光的吸收可忽略不计；对于同一入射光，不同的变换器材料则对应于不同的变换器尺寸，同样满足权利要求1中的公式；在满足权利要求1中的公式的前提下，折射率的大小对于入射光的：变换器是由对入射光透明的玻璃或塑料构成。The length L of the converter is determined by the formula tgα=H/L after α and H are determined. After α is determined, the refractive index n ε of the converter is determined by the selected material, and the material must be transparent to the incident light , that is, the absorption of incident light by the material is negligible; for the same incident light, different transducer materials correspond to different transducer sizes, which also satisfy the formula in
本发明的有益效果：Beneficial effects of the present invention:
1.由于该变换器是非成像光学元器件，所以对于沿x轴入射的平行光束而言不会引起光线的任何偏差。1. Since the converter is a non-imaging optical component, it will not cause any deviation of light for parallel light beams incident along the x-axis.
2.由于变换器的传输原理主要是全内反射，所以能量损失小，传输效率高。2. Since the transmission principle of the converter is mainly total internal reflection, the energy loss is small and the transmission efficiency is high.
3.α的大小决定了扩束倍率M的大小，所以可通过使变换器的α较小得到较高的扩束倍率M。3. The size of α determines the size of the beam expansion magnification M, so a higher beam expansion magnification M can be obtained by making the α of the converter smaller.
4.由于变换器仅由一个光学元器件构成，所以结构简单，价格便宜，可以被广泛采用。4. Since the converter consists of only one optical component, the structure is simple, the price is cheap, and it can be widely used.
5.变换器的关键是α的大小，所以可以适当调节α使其用于不同的用途，如图3-图6所示。5. The key to the converter is the size of α, so α can be properly adjusted to make it used for different purposes, as shown in Figure 3-6.
总之，全内反射-折射激光光束变换器是同类扩束器中性能较为完善的。In a word, the total internal reflection-refraction laser beam converter has relatively perfect performance among similar beam expanders.
附图说明Description of drawings
图1：变换器外形结构示意图；Figure 1: Schematic diagram of the shape and structure of the converter;
图2：变换器的参数及光线追迹示意图；Figure 2: Schematic diagram of converter parameters and ray tracing;
图3：入射的平行光束的缩束计算模拟图；Figure 3: Simulated diagram of reduced beam calculation for incident parallel beams;
图4：入射的平行光束的聚焦计算模拟图；Figure 4: Focus calculation simulation diagram of incident parallel beams;
图5：入射的平行光束转换成空心光束的计算模拟图；Figure 5: Calculation simulation diagram of converting the incident parallel beam into a hollow beam;
图6：入射的平行光束的扩束计算模拟图；Figure 6: The beam expansion calculation simulation diagram of the incident parallel beam;
图7：n和相对应的α和扩束倍率M关系图；Figure 7: The relationship between n and the corresponding α and beam expansion magnification M;
图8：入射的非平行光束的缩束计算模拟图Figure 8: Simulation diagram of beam reduction calculation for incident non-parallel beams
图9：入射的非平行光束的扩束计算模拟图Figure 9: Beam expansion calculation simulation diagram of incident non-parallel beam
图中：In the picture:
1.变换器 2.入射光 3.出射光 L.为变换器的长度 α.变换器的侧壁和中心轴之间的夹角 x.中心旋转轴 2H.圆锥体圆平面的直径 nε.变换器的折射率1. Converter 2.
具体实施方式Detailed ways
下面结合附图对本发明的具体实施方式做进一步说明：The specific embodiment of the present invention will be further described below in conjunction with accompanying drawing:
全内反射-折射激光光束变换器的加工比较简单，可以用熔拉法和倒模法两种，材料用对入射光透明的玻璃或塑料，我们选用的材料的折射率nε＝1.5。The processing of the total internal reflection-refraction laser beam converter is relatively simple, and two methods can be used: the melting method and the inversion method. The material is glass or plastic that is transparent to the incident light. The refractive index of the material we choose is n ε = 1.5.
变换器的外形结构示意图如图1所示，当尖端为入射端而圆面为出射端时它起到的是扩束作用，反之是缩束作用。无论是扩束还是缩束变换器依据的传播原理均是全内反射-折射原理。由于光线的可逆性，在此以变换器的对光束的压缩规律为例。假设有一束直径为2H1的平行激光束沿中心旋转轴方向入射到变换器的圆平面，先通过全内反射原理将入射光传输到变换器的尾部，每经过一次全反射传播光线和侧壁的夹角n就减小2α，当n小于临界角i＝arcsin(1/nε)时传播光线便从侧壁折射出来，通过选择合适的α大小可以使出射光仍平行于中心旋转轴，出射光束的直径为2H2，倍率M＝H1/H2。其中，α为变换器的侧壁和中心轴之间的夹角，nε为变换器的折射率。The schematic diagram of the shape and structure of the converter is shown in Figure 1. When the tip is the incident end and the circular surface is the exit end, it acts as a beam expander, otherwise it acts as a beam shrinker. Both the beam expander and the beam shrinker converter are based on the propagation principle of total internal reflection-refraction. Due to the reversibility of light, here we take the compression law of the converter for light beams as an example. Assuming that a parallel laser beam with a diameter of 2H 1 is incident on the circular plane of the converter along the direction of the central rotation axis, the incident light is first transmitted to the tail of the converter through the principle of total internal reflection, and the transmitted light and the side wall after each total reflection The included angle n is reduced by 2α. When n is smaller than the critical angle i = arcsin(1/n ε ), the propagating light will be refracted from the side wall. By choosing an appropriate α size, the outgoing light can still be parallel to the center The axis of rotation, the diameter of the outgoing beam is 2H 2 , and the magnification M=H 1 /H 2 . Among them, α is the angle between the side wall of the converter and the central axis, n ε is the refractive index of the converter.
利用光线追迹的方法先研究平行光通过变换器的传输规律。建立如图2所示的坐标系，圆平面的中心为坐标原点，L为变换器的长度，2H为圆平面的直径，H1和H2分别为入射光束和出射光束的半径，α为侧壁和x轴的夹角，(x0，y0)为入射光线的起始坐标，(xn，yn)(n＝1，2，3…)为传输光线和扩束器的交点坐标；n(n＝1，2，3…)为传输光线相对于侧壁的入射角，3′为3折射角；n(n＝1，2…)为传输光线与x轴之间的夹角，当光线对x轴沿逆时针方向旋转时取正，反之取负。Using the method of ray tracing to study the transmission law of parallel light through the converter. Establish a coordinate system as shown in Figure 2, the center of the circular plane is the coordinate origin, L is the length of the converter, 2H is the diameter of the circular plane, H1 and H2 are the radii of the incident beam and the outgoing beam respectively, and α is the side The angle between the wall and the x-axis, (x 0 , y 0 ) is the starting coordinate of the incident ray, (x n , y n ) (n=1, 2, 3…) is the intersection coordinate of the transmitted ray and the beam expander ; n (n=1, 2, 3…) is the incident angle of the transmitted light relative to the side wall, 3 ′ is the refraction angle of 3 ; n (n=1, 2…) is the distance between the transmitted light and the x-axis The angle between is positive when the light rotates counterclockwise with respect to the x-axis, and negative otherwise.
传输光线在变换器内部仅遵循两个传输规律：The transmitted light follows only two transmission rules inside the converter:
1.当y0＞0时有1. When y 0 >0, there is
2.y0＜0时有2. Yes when y 0 <0
其中tgα＝H/Lwhere tgα=H/L
由此可见，只要给定入射光线的起始坐标和变换器的尺寸，即可通过上述的传输规律递推出传输光线的传输情况。当传输光线相对于侧壁的入射角n小于临界角时传输光线便会从侧壁折射处来，此时传输光线和侧壁交点的坐标为(xn，yn)，如图2中的3，有It can be seen that as long as the initial coordinates of the incident light and the size of the transformer are given, the transmission of the transmitted light can be deduced through the above-mentioned transmission law. When the incident angle n of the transmitted ray relative to the side wall is less than the critical angle, the transmitted ray will come from the refraction point of the side wall. At this time, the coordinates of the intersection point of the transmitted ray and the side wall are (x n , y n ), as shown in Figure 2 3 , there is
nεsinn＝sinn′ (3)n ε sin n = sin n ′ (3)
注意：yn的正负由传播光线的交点次数决定，当n为奇数时yn＞0，反之yn＜0。Note: The positive or negative of y n is determined by the number of intersections of the propagating light. When n is an odd number, y n >0, otherwise, y n <0.
由图2可知：It can be seen from Figure 2 that:
n＝π/2-(2n-1)α (n＝1，2，3…) (4) n = π/2-(2n-1)α (n=1, 2, 3...) (4)
要使入射光线的偏差最小则必须使出射光线仍平行于x轴出射，有To minimize the deviation of the incident ray, the outgoing ray must still exit parallel to the x-axis.
n′+α＝π/2 (5) n ′+α=π/2 (5)
联立公式(3)(4)(5)得关系式：Simultaneous formulas (3) (4) (5) get the relationship:
可以得知公式(6)的解有无数组，α越小，n越大，只要变换器的侧壁和中轴的夹角α满足公式(6)，则该变换器就可以将沿中轴入射的平行仍以平行光传输出去，同时缩小了其光束直径，这里n为传播光线和侧壁的交点次数。可见出射光线的出射方向主要由变换器的tgα＝H/L参数决定，α确定后，可事先根据入射光束的直径确定变换器的入射面直径2H，则其长度L也可确定。It can be known that the solution of formula (6) has infinite arrays, the smaller α is, the larger n is, as long as the angle α between the side wall of the converter and the central axis satisfies the formula (6), then the converter can move along the central axis The incident parallel light is still transmitted out as parallel light, and the beam diameter is reduced at the same time, where n is the number of intersections between the propagating light and the side wall. It can be seen that the outgoing direction of the outgoing light is mainly determined by the parameter tgα=H/L of the converter. After α is determined, the incident surface diameter 2H of the converter can be determined in advance according to the diameter of the incident beam, and its length L can also be determined.
图3为当n＝4，2H1＝1mm时，计算机模拟变换器的对入射光束的压缩情况图。由图3可以看出：1.变换器不改变平行光束的强度分布；2.变换器可以将所有入射进来的平行光仍以平行光传播出去。此时变换器的入射面直径2H＝2mm，长度L＝8.22mm，折射率nε＝1.5。Fig. 3 is a diagram of the compression of the incident light beam by the computer simulation converter when n=4, 2H 1 =1mm. It can be seen from Fig. 3 that: 1. The converter does not change the intensity distribution of the parallel light beam; 2. The converter can transmit all incident parallel light as parallel light. At this time, the incident surface diameter of the converter is 2H=2mm, the length L=8.22mm, and the refractive index nε =1.5.
由公式(6)可见，当适当调节α的大小，可以使出射激光束汇聚到x轴某一点处得到高强度的光能量，或者得到空心的激光束，分别如图4和图5所示。It can be seen from formula (6) that when the size of α is properly adjusted, the outgoing laser beam can be converged to a certain point on the x-axis to obtain high-intensity light energy, or a hollow laser beam can be obtained, as shown in Figure 4 and Figure 5 respectively.
利用光线可逆的原理，当尖端为入射端而圆面为出射端时它起到的是扩束作用，如图6所示。Using the principle of light reversibility, when the tip is the incident end and the circular surface is the exit end, it acts as a beam expander, as shown in Figure 6.
图7是当n＝2，3…10时所对应的α大小和扩束倍率M(M＝H1/H2)的关系图，其中α的单位为弧度。由此可见随着n的递增，α减小变缓，而扩束倍数始却终成线性递增，当n＝9时，扩束倍率M已大于16，所以锥形扩束器的扩束倍率较高。Fig. 7 is a graph showing the relationship between the magnitude of α and the beam expansion ratio M (M=H 1 /H 2 ) corresponding to n=2, 3...10, where the unit of α is radian. It can be seen that as n increases, α decreases slowly, but the beam expansion factor increases linearly from beginning to end. When n=9, the beam expansion factor M is greater than 16, so the beam expansion rate of the conical beam expander higher.
以上研究的是平行光束通过变换器的传播情况。有一定发散角大小的激光束入射时，其传播特性同传统成像扩束器对光束的传输特性类似，即当光束的直径缩小时则其发散角增大，当入射光束的直径增大时则其发散角减小，分别如图8和图9所示，其中入射激光束的发散角为1°，直径为1mm。所不同的是拉格朗日不变量(即光束的直径和其发散角的乘积)不在是常量，当压缩光束的直径时拉格朗日不变量略有减小，n越大减小的幅度越大，当扩大光束的直径时拉格朗日不变量略有增大，n越大增大的幅度也越大，如表一所示，仅以n＝4，8为例。其中L0为入射光束的拉格朗日不变量，Ld为光束被压缩一定倍数后的拉格朗日不变量，Lm为光束被扩大一定倍数后的拉格朗日不变量。The above study is the propagation of parallel beams through the converter. When a laser beam with a certain divergence angle is incident, its propagation characteristics are similar to those of traditional imaging beam expanders, that is, when the diameter of the beam shrinks, the divergence angle increases, and when the diameter of the incident beam increases, the Its divergence angle is reduced, as shown in Figure 8 and Figure 9, respectively, where the divergence angle of the incident laser beam is 1° and the diameter is 1mm. The difference is that the Lagrangian invariant (that is, the product of the diameter of the beam and its divergence angle) is no longer a constant. When the diameter of the beam is compressed, the Lagrangian invariant decreases slightly, and the larger n is, the magnitude of the decrease The larger the value is, the Lagrangian invariant will slightly increase when the diameter of the beam is expanded, and the larger the n is, the greater the range of increase will be, as shown in Table 1, only n=4, 8 is taken as an example. Among them, L 0 is the Lagrangian invariant of the incident beam, L d is the Lagrangian invariant after the beam is compressed by a certain factor, and L m is the Lagrange invariant after the beam is expanded by a certain factor.
该变换器还可以替代多根光纤耦合激光二极管出射的激光束，并同时缩小了它们的光束直径，使之能够耦合进直径较小的光纤中。The converter can also replace the laser beams emitted by multiple fiber-coupled laser diodes, and at the same time reduce their beam diameters so that they can be coupled into optical fibers with smaller diameters.
表一：传输光束的拉格朗日不变量Table 1: Lagrangian invariants of transmitted beams
n L0 Ld Lm n L 0 L d L m
4 1mm×1°＝1 0.19555mm×4.676°＝0.91439 7.6354mm×0.14954°＝1.14184 1mm×1°＝1 0.19555mm×4.676°＝0.91439 7.6354mm×0.14954°＝1.1418
8 1mm×1°＝1 0.10786mm×6.60854°＝0.712797 20.336mm×0.063°＝1.281688 1mm×1°＝1 0.10786mm×6.60854°＝0.712797 20.336mm×0.063°＝1.28168
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