CN1744286A - Semiconductor manufacturing method and its structure - Google Patents
Semiconductor manufacturing method and its structure Download PDFInfo
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- CN1744286A CN1744286A CN 200410074908 CN200410074908A CN1744286A CN 1744286 A CN1744286 A CN 1744286A CN 200410074908 CN200410074908 CN 200410074908 CN 200410074908 A CN200410074908 A CN 200410074908A CN 1744286 A CN1744286 A CN 1744286A
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Abstract
The structure is as following: a substrate, a dielectric layer formed on the substrate, a hydrophilic material layer formed on the dielectric layer, and a hard mask layer formed on the hydrophilic material layer. After hydrophilic material layer is formed on dielectric layer and before hard mask layer is formed on hydrophilic material layer, grinding crystal edge is carried out for semiconductor structure.
Description
Technical field
The present invention relates to a kind of semiconductor structure and manufacture method, particularly relate to a kind of manufacture method that can be used for the dielectric material of low-k.
Background technology
In semiconductor making method, narrowed down to the stage of deep-sub-micrometer (deepsub-micron) along with size of component, in order to reduce the time delay (RC time delay) that metal connecting line transmits, (low dielectric constant, dielectric material low-k) have been inevitable trend than the low copper conductor of aluminium or low-k to adopt resistivity.Present existing advanced low-k materials has very multiple, if can be divided into rotary coating (spin on coating) method and chemical vapour deposition (CVD) (chemical vapordeposition according to depositional mode, CVD) method two big classes are if it is several then can be divided into inorganic (inorganic) dielectric material, organic (organic) dielectric material and inorganic and organic mixed dielectric material etc. from etched mode.
Below will illustrate dual damascene (dual damascene) structure of often using in having now at present.Fig. 1 illustrates the generalized section of existing dual-damascene structure.Please refer to Fig. 1, existing dual-damascene structure 100 comprises a substrate 102, one first dielectric layer 104 and is formed with a hole 106, one first hard mask layer (hardmask layer), 108,1 second dielectric layer 110 therein and is formed with a groove 112 therein and one second hard mask layer 114.Traditionally because the dielectric constant of organic dielectric materials generally the dielectric constant than Inorganic Dielectric Material is low, therefore at present materials that adopt organic dielectric materials as the dielectric layer of low-k more.For example, in Fig. 1, the dielectric layer at groove (trench) and hole (via) place all adopts organic dielectric layer of low-k, and as previously mentioned, the low dielectric constant of healing is just bigger to the effect that reduces the RC time delay.Use organic dielectric materials to come and the use Inorganic Dielectric Material, on manufacture method, have some great differences.For example, because its etching characteristic of organic dielectric materials of low-k is to similar to photoresist, just its etching selection rate (etch selectivity) is very poor, therefore, before painting photoresist, need deposition one deck hard mask layer (hardmask layer), for example metal level (metal layer) or metal interlevel compound layer (intermetal compound layer) mask earlier to use as subsequent etch.But because the difference of surface characteristic between organic dielectric materials and the hard mask layer is easy to produce defective (defect) when forming hard mask layer.
In addition; the formed dielectric layer of the organic dielectric materials of this kind low-k surface all has repellency (hydrophobic) usually; therefore this kind film is in the manufacture method of wet type (wet); be formed with washmarking (water mark) on the surface through regular meeting, therefore be not suitable in the manufacture method of wet type.
In addition, the formed dielectric layer of the organic dielectric materials of this kind low-k often produces polymer (polymer) in crystal edge easily after through the etching manufacture method residual, and this problem also needs to solve.
In sum, a kind of dielectric material that can be used for low-k can be avoided producing defective when forming hard mask layer, and can avoid the formation of washmarking and the semiconductor structure and the manufacture method thereof of removal crystal edge residue is as needs.
Summary of the invention
In sum, the invention provides a kind of dielectric material that can be used for low-k, can avoid when forming hard mask layer, producing defective, can avoid the formation of washmarking and the semiconductor making method of removing the crystal edge residue.
In addition, the invention provides a kind of dielectric material that can be used for low-k, can avoid when forming hard mask layer, producing defective, can avoid the formation of washmarking and the semiconductor structure of removing the crystal edge residue.
The invention provides a kind of semiconductor making method, may further comprise the steps.At first, provide a substrate, then, in this substrate, form a dielectric layer, on this dielectric layer, form a hydrophilic material layer, and on this hydrophilic material layer, form a hard mask layer.
In addition, the invention provides a kind of semiconductor structure, comprise a substrate, be disposed at this suprabasil dielectric layer, be disposed at the hydrophilic material layer on this dielectric layer, and be disposed at the hard mask layer on this hydrophilic material layer.
In one embodiment of this invention, on this dielectric layer, form after this hydrophilic material layer, and before forming this hard mask layer on this hydrophilic material layer, comprise that also one of them carries out crystal edge grinding at least to this substrate, this dielectric layer or this hydrophilic material layer.
In one embodiment of this invention, this crystal edge grinds and comprises that the top hypotenuse grinds, the below beveled edge is ground or side grinds at least one of them.
In one embodiment of this invention, forming this dielectric layer has the method for a low-k between 1 and 4 and comprises rotary coating (spin on coating) method or chemical vapour deposition (CVD) (chemical vapordeposition, CVD) method.
In one embodiment of this invention, a material of this dielectric layer comprises organic dielectric materials, carbon containing dielectric material or carbon oxide material.
In one embodiment of this invention, this dielectric layer is by tetramethyl-ring siloxanes (tetramethyl-cyclotetra-siloxane, TMCTS), trimethyl silane (trimethyl-silane, 3MS), tetramethylsilane (tetramethyl-silane, 4MS), dimethyldimethoxysil,ne (dimethyl-dimethoxy-silane, DMDMOS), prestox cyclosiloxane (octamethyl-cyclotetra-siloxane, OMCTS), diethoxymethyl silane (diethoxy-methyl-silane, DEMS), or tetramethyl disiloxane (tetramethyl-disiloxane, TMDSO) or TMTMCTS one of them is that a predecessor (precursor) preparation gets at least.
In one embodiment of this invention, a material of this hydrophilic material layer comprises and contains silicomethane (silane, SiH
4) material, contain the silicic acid tetra-ethyl ester (tetraethyl-ortho-silicate, TEOS) material of oxide (oxide) or silicon nitride (silicon nitride, SiN).
In one embodiment of this invention, one material of this hard mask layer comprises aluminium (aluminum, Al), titanium nitride (titanium nitride, TiN), tantalum nitride (tantalum nitride, TaN), titanium silicon nitride (titanium silicon nitride, TiSiN), tungsten nitride (tungsten nitride, WN), tungsten nitride silicon (tungsten silicon nitride, WsiNWSiN) or refractory nitride (refractory nitride).
In addition, the present invention also provides a kind of semiconductor structure, comprise a substrate, be disposed at this suprabasil one first dielectric layer, be disposed at one first hydrophilic material layer on this first dielectric layer, be disposed at one first hard mask layer on this first hydrophilic material layer, be disposed at one second dielectric layer on this first hydrophilic material layer, first hard mask layer, be disposed at one second hydrophilic material layer on this second dielectric layer, and be disposed at one second hard mask layer on this second hydrophilic material layer.
In one embodiment of this invention, in this first dielectric layer, this first hydrophilic material layer and this first hard mask layer, has a hole.In addition, having a groove in this second dielectric layer, this second hydrophilic material layer and this second hard mask layer links to each other with this hole.
In one embodiment of this invention, in this hole and this groove, also dispose a metal material.
In one embodiment of this invention, after this first hydrophilic material layer is disposed on this first dielectric layer, and before this first hard mask layer is disposed on this first hydrophilic material layer, comprise that also this semiconductor structure is carried out a crystal edge to be ground.
In one embodiment of this invention, after this second hydrophilic material layer is disposed on this second dielectric layer, and before this second hard mask layer is disposed on this second hydrophilic material layer, comprise that also this semiconductor structure is carried out a crystal edge to be ground.
In one embodiment of this invention, one of them has the method for a low-k between 1 and 4 and comprises rotary coating (spin on coating) method or chemical vapour deposition (CVD) (chemical vapor deposition, CVD) method at least to form this first dielectric layer or this second dielectric layer.
In one embodiment of this invention, this first dielectric layer or this second dielectric layer at least one of them a material comprise organic dielectric materials, carbon containing dielectric material or carbon oxide material.
In one embodiment of this invention, this first dielectric layer or this second dielectric layer at least one of them by tetramethyl-ring siloxanes (tetramethyl-cyclotetra-siloxane, TMCTS), trimethyl silane (trimethyl-silane, 3MS), tetramethylsilane (tetramethyl-silane, 4MS), dimethyldimethoxysil,ne (dimethyl-dimethoxy-silane, DMDMOS), prestox cyclosiloxane (octamethyl-cyclotetra-siloxane, OMCTS), diethoxymethyl silane (diethoxy-methyl-silane, DEMS), or tetramethyl disiloxane (tetramethyl-disiloxane, TMDSO) or TMTMCTS one of them is that a predecessor (precursor) preparation gets at least.
In one embodiment of this invention, this first hydrophilic material layer or this second hydrophilic material layer at least the material of one of them comprise and contain silicomethane (silane, SiH
4) material, contain the silicic acid tetra-ethyl ester (tetraethyl-ortho-silicate, TEOS) material of oxide (oxide) or silicon nitride (siliconnitride, SiN).
In one embodiment of this invention, this first hard mask layer or this second hard mask layer one of them a material at least comprise aluminium (aluminum, Al), titanium nitride (titanium nitride, TiN), tantalum nitride (tantalum nitride, TaN), titanium silicon nitride (titanium silicon nitride, TiSiN), tungsten nitride (tungsten nitride, WN), tungsten nitride silicon (tungsten silicon nitride, WsSiN) or refractory nitride (refractory nitride).
In sum, in the present invention,, do not form so do not have washmarking (water mark) at the hydrophilic material laminar surface because on dielectric layer, form a hydrophilic material layer.Therefore the present invention goes in the manufacture method of wet type, for example can implement crystal edge grinding to dielectric layer or hydrophilic material layer.Can find, produce washmarking in the dielectric layer surface during the present invention can solve and have now, and the problem that produces residue in crystal edge.In addition, because the difference of surface characteristic is less between hydrophilic material layer of the present invention and the hard mask layer, so when forming hard mask layer, be difficult for producing defective (defect).In a word, the present invention can provide a kind of dielectric material that can be used for low-k, can avoid producing defective when forming hard mask layer, can avoid the formation of washmarking and semiconductor structure and the manufacture method thereof of removing the crystal edge residue.
For above and other objects of the present invention, feature and advantage can be become apparent, preferred embodiment cited below particularly, and conjunction with figs. elaborates.
Description of drawings
Fig. 1 illustrates the generalized section of existing dual-damascene structure.
Fig. 2 A is the profile according to the manufacturing process of the semiconductor structure that one embodiment of the invention illustrated to Fig. 2 C.
Fig. 3 is the crystal edge grinding manufacturing method therefor according to one embodiment of the invention illustrated.
Fig. 4 is the profile according to the single inlay structure that one embodiment of the invention illustrated.
Fig. 5 is the profile according to the dual-damascene structure that one embodiment of the invention illustrated.
The simple symbol explanation
100: dual-damascene structure
102: substrate
104,110: dielectric layer
106: hole
108,114: hard mask layer
112: groove
200,200a, 200b: semiconductor structure
202,202a, 402,502: substrate
204,204a, 404,504,510: dielectric layer
206,206a, 406,506,512: hydrophilic material layer
208,408,508,514: hard mask layer
302: rotating disk
304,306,308: grinding pad
310: nozzle
312: lapping liquid
A, B, C: the direction of motion
400: single inlay structure
410: hole or groove
500: dual-damascene structure
516: hole
518: groove
Embodiment
Fig. 2 A is the profile according to the manufacturing process of the semiconductor structure that one embodiment of the invention illustrated to Fig. 2 C.Please refer to Fig. 2 A, in the present invention, at first provide a substrate 202, this substrate can be the substrate that any manufacture method is suitable for.Then, in substrate 202, form a dielectric layer 204.In another embodiment of the present invention, the dielectric layer 204 that method goes for having any dielectric constant have a low-k (low dielectric constant, low-k), for example between 1 and 4.One material of dielectric layer 204 for example comprises organic dielectric materials, carbon containing (carbon containing) dielectric material or carbon oxide (carbon containing oxide) material.Or, in another embodiment of the present invention, dielectric layer is by tetramethyl-ring siloxanes (tetramethyl-cyclotetra-siloxane, TMCTS), trimethyl silane (trimethyl-silane, 3MS), tetramethylsilane (tetramethyl-silane, 4MS), dimethyldimethoxysil,ne (dimethyl-dimethoxy-silane, DMDMOS), prestox cyclosiloxane (octamethyl-cyclotetra-siloxane, OMCTS), diethoxymethyl silane (diethoxy-methyl-silane, DEMS), or tetramethyl disiloxane (tetramethyl-disiloxane, TMDSO) or TMTMCTS one of them is that a predecessor (precursor) preparation gets at least.In one embodiment of this invention, the method that forms dielectric layer 204 comprises, for example rotary coating (spin oncoating) method or chemical vapour deposition (CVD) (chemical vapor deposition, CVD) method.
Please refer to Fig. 2 A, then, on dielectric layer 204, form a hydrophily (hydrophilic) material layer 206.In one embodiment of this invention, the material of this hydrophilic material layer 206 comprises and contains silicomethane (silane, SiH
4) material, contain the silicic acid tetra-ethyl ester (tetraethyl-ortho-silicate, TEOS) material of oxide (oxide) or silicon nitride (silicon nitride, SiN).The method that forms hydrophilic material layer 206 comprises, for example rotary coating (spin on coating) method or chemical vapour deposition (CVD) (chemical vapordeposition, CVD) method.
In manufacture process, when forming dielectric layer 204 or hydrophilic material layer 206 through being everlasting, can shown in Fig. 2 A, produce residue at Waffer edge, when for example forming organic dielectric layer 204 by residue that organic polymer produced.At this moment, in the present invention, can wherein there be the part of residue to carry out crystal edge grinding in the edge to substrate 202, dielectric layer 204 or hydrophilic material layer 206.
Fig. 3 is the crystal edge grinding manufacturing method therefor according to one embodiment of the invention illustrated.Please refer to Fig. 3, at first formed semiconductor structure 200 among above-mentioned Fig. 2 A is adsorbed on the rotating disk 302, then use top hypotenuse grinding pad (upper bevel pad) 304, below beveled edge grinding pad (lower bevelpad) 306 or side grinding pad (top side portion pad) 308 crystal edge of one of them grinding semiconductor structure 200 at least, in process of lapping, nozzle (nozzle) 310 can provide lapping liquid (slurry) to the surface of semiconductor structure 200.In addition, top hypotenuse grinding pad 304, below beveled edge grinding pad 306 or side grinding pad 308 etc. also can along its relative arrow A, B, with the motion of the direction of C.Top hypotenuse grinding pad 304 is also rotatable with respect to semiconductor structure 200 with below beveled edge grinding pad 306.After crystal edge grinds, can obtain, the semiconductor structure 200a shown in Fig. 2 B is comprising substrate 202a, dielectric layer 204a and the hydrophilic material layer 206a after grinding.
Please refer to Fig. 2 C, then, form a hard mask layer 208 on the hydrophilic material layer 206a after crystal edge grinds.In one embodiment of this invention, one material of hard mask layer 208 comprises aluminium (aluminum, Al), titanium nitride (titanium nitride, TiN), tantalum nitride (tantalum nitride, TaN), titanium silicon nitride (titanium silicon nitride, TiSiN), tungsten nitride (tungsten nitride, WN), tungsten nitride silicon (tungsten silicon nitride, WsSiN) or refractory nitride (refractory nitride).
Please refer to Fig. 2 C, the invention provides semiconductor structure 200b, comprising substrate 202a, dielectric layer 204a, hydrophilic material layer 206a and hard mask layer 208.Wherein after the hydrophilic material layer forms, before hard mask layer forms, comprise that also one of them carries out crystal edge grinding at least to substrate, dielectric layer or hydrophilic material layer.
In sum, in the present invention,, do not form so do not have washmarking (water mark) at the hydrophilic material laminar surface because on dielectric layer, form a hydrophilic material layer.Therefore the present invention goes in the manufacture method of wet type, for example can implement crystal edge grinding to dielectric layer or hydrophilic material layer.Can find, produce washmarking in the dielectric layer surface during the present invention can solve and have now, and the problem that produces residue in crystal edge.In addition, because the difference of surface characteristic is less between hydrophilic material layer of the present invention and the hard mask layer, so when forming hard mask layer, be difficult for producing defective (defect).In a word, the present invention can provide a kind of dielectric material that can be used for low-k, can avoid producing defective when forming hard mask layer, can avoid the formation of washmarking and semiconductor structure and the manufacture method thereof of removing the crystal edge residue.
In addition, in the present invention, should be noted in the discussion above that the present invention goes in any semiconductor structure or manufacture method with dielectric layer, and not only be limited to above embodiment.For example, the present invention goes for existing (single damascene) structure or dual damascene (dual damascene) structure of singly inlaying, or be applicable to doing hole (via-first) manufacture method earlier, doing groove (trench-first) manufacture method earlier of dual-damascene structure, or aim at the manufacture method of (self-aligned) voluntarily.These embodiment that below will underdraw, yet, should be noted that the present invention goes in any semiconductor structure or manufacture method with dielectric layer, and be not subject in arbitrary embodiments of the invention.
Fig. 4 is the profile according to the single inlay structure that one embodiment of the invention illustrated.Please refer to Fig. 4, single inlay structure 400 of the present invention comprises that a substrate 402, a dielectric layer 404 are disposed in the substrate 402, a hydrophilic material layer 406 is disposed on the dielectric layer 404, and a hard mask layer 408 is disposed on the hydrophilic material layer 406.Wherein in dielectric layer 404, hydrophilic material layer 406 and hard mask layer 408, can have a hole 410 or a groove 410.In the present invention, after hydrophilic material layer 406 is disposed on the dielectric layer 404, and before hard mask layer 408 is disposed on the hydrophilic material layer 406, comprise that also one of them carries out crystal edge grinding at least with hydrophilic material layer 406 to substrate 402, dielectric layer 404.In the present embodiment, substrate 402, dielectric layer 404, hydrophilic material layer 406 is similar with material, formation method and character and the previous embodiment of hard mask layer 408, at this repeated description no longer.
Fig. 5 is the profile according to the dual-damascene structure that one embodiment of the invention illustrated.Please refer to Fig. 5, dual-damascene structure 500 of the present invention comprises that a substrate 502, one first dielectric layer 504 are disposed in the substrate 502, one first hydrophilic material layer 506 is disposed on first dielectric layer 504, one first hard mask layer 508 is disposed on the first hydrophilic material layer 506, one second dielectric layer 510 is disposed on first hard mask layer 508, one second hydrophilic material layer 512 is disposed on second dielectric layer 510, and one second hard mask layer 514 is disposed on the second hydrophilic material layer 512.Wherein in first dielectric layer 504, the first hydrophilic material layer 506 and first hard mask layer 508, can have a hole 516, in second dielectric layer 510, the second hydrophilic material layer 512 and second hard mask layer 514, can have a groove 518.In the present invention, after the first hydrophilic material layer 506 is disposed on first dielectric layer 504, and before first hard mask layer 508 is disposed on the first hydrophilic material layer 506, comprise that also dual-damascene structure 500 is carried out a crystal edge to be ground.In addition, after the second hydrophilic material layer 512 is disposed on second dielectric layer 510, and before second hard mask layer 514 is disposed on the second hydrophilic material layer 512, comprise that also dual-damascene structure 500 is carried out a crystal edge to be ground.In the present embodiment, the material of each layer, formation method and character and previous embodiment are similar, at this repeated description no longer.
In one embodiment of this invention, form the method for dual-damascene structure as shown in Figure 5, comprise hole (via-first) method of doing earlier, do groove (trench-first) method earlier, or aim at (self-aligned) method voluntarily.
In sum, in the present invention,, do not form so do not have washmarking (water mark) at the hydrophilic material laminar surface because on dielectric layer, form a hydrophilic material layer.Therefore the present invention goes in the manufacture method of wet type, for example can implement crystal edge grinding to dielectric layer or hydrophilic material layer.Can find, produce washmarking in the dielectric layer surface during the present invention can solve and have now, and the problem that produces residue in crystal edge.In addition, because the difference of surface characteristic is less between hydrophilic material layer of the present invention and the hard mask layer, so when forming hard mask layer, be difficult for producing defective (defect).In a word, the present invention can provide a kind of dielectric material that can be used for low-k, can avoid producing defective when forming hard mask layer, can avoid the formation of washmarking and semiconductor structure and the manufacture method thereof of removing the crystal edge residue.
Though the present invention discloses as above with preferred embodiment; yet it is not in order to limit the present invention; those skilled in the art can do a little change and retouching without departing from the spirit and scope of the present invention, thus protection scope of the present invention should with accompanying Claim the person of being defined be as the criterion.
Claims (26)
1. semiconductor making method comprises:
One substrate is provided;
In this substrate, form a dielectric layer;
On this dielectric layer, form a hydrophilic material layer; And
On this hydrophilic material layer, form a hard mask layer.
2. semiconductor making method as claimed in claim 1 wherein forms after this hydrophilic material layer on this dielectric layer, and before forming this hard mask layer on this hydrophilic material layer, also comprises:
At least one of them carries out crystal edge grinding to this substrate, this dielectric layer or this hydrophilic material layer.
3. semiconductor making method as claimed in claim 2, wherein this crystal edge grinds and comprises that the top hypotenuse grinds, the below beveled edge is ground or side grinds at least one of them.
4. semiconductor making method as claimed in claim 1, wherein forming this dielectric layer has the method for a low-k between 1 and 4 and comprises rotary coating (spin on coating) method or chemical vapour deposition (CVD) (chemical vapor deposition, CVD) method.
5. semiconductor making method as claimed in claim 1, wherein a material of this dielectric layer comprises organic dielectric materials, carbon containing dielectric material or carbon oxide material.
6. semiconductor making method as claimed in claim 1, wherein this dielectric layer is by tetramethyl-ring siloxanes (tetramethyl-cyclotetra-siloxane, TMCTS), trimethyl silane (trimethyl-silane, 3MS), tetramethylsilane (tetramethyl-silane, 4MS), dimethyldimethoxysil,ne (dimethyl-dimethoxy-silane, DMDMOS), prestox cyclosiloxane (octamethyl-cyclotetra-siloxane, OMCTS), diethoxymethyl silane (diethoxy-methyl-silane, DEMS), or tetramethyl disiloxane (tetramethyl-disiloxane, TMDSO) or TMTMCTS one of them is that a predecessor (precursor) preparation gets at least.
7. semiconductor making method as claimed in claim 1, wherein a material of this hydrophilic material layer comprises and contains silicomethane (silane, SiH
4) material, contain the silicic acid tetra-ethyl ester (tetraethyl-ortho-silicate, TEOS) material of oxide (oxide) or silicon nitride (silicon nitride, SiN).
8. semiconductor making method as claimed in claim 1, wherein a material of this hard mask layer comprises aluminium (aluminum, Al), titanium nitride (titanium nitride, TiN), tantalum nitride (tantalum nitride, TaN), titanium silicon nitride (titanium silicon nitride, TiSiN), tungsten nitride (tungsten nitride, WN), tungsten nitride silicon (tungsten silicon nitride, WsSiN) or refractory nitride (refractory nitride).
9. semiconductor structure comprises:
One substrate;
One dielectric layer is disposed in this substrate;
One hydrophilic material layer is disposed on this dielectric layer; And
One hard mask layer is disposed on this hydrophilic material layer.
10. semiconductor structure as claimed in claim 9 wherein after this hydrophilic material layer is disposed on this dielectric layer, and before this hard mask layer is disposed on this hydrophilic material layer, also comprises:
This semiconductor structure is carried out a crystal edge to be ground.
11. semiconductor structure as claimed in claim 9, wherein forming this dielectric layer has the method for a low-k between 1 and 4 and comprises rotary coating (spin on coating) method or chemical vapour deposition (CVD) (chemical vapor deposition, CVD) method.
12. semiconductor structure as claimed in claim 9, wherein a material of this dielectric layer comprises organic dielectric materials, carbon containing dielectric material or carbon oxide material.
13. semiconductor structure as claimed in claim 9, wherein this dielectric layer is by tetramethyl-ring siloxanes (tetramethyl-cyclotetra-siloxane, TMCTS), trimethyl silane (trimethyl-silane, 3MS), tetramethylsilane (tetramethyl-silane, 4MS), dimethyldimethoxysil,ne (dimethyl-dimethoxy-silane, DMDMOS), prestox cyclosiloxane (octamethyl-cyclotetra-siloxane, OMCTS), diethoxymethyl silane (diethoxy-methyl-silane, DEMS), or tetramethyl disiloxane (tetramethyl-disiloxane, TMDSO) or TMTMCTS one of them is that a predecessor (precursor) preparation gets at least.
14. semiconductor structure as claimed in claim 9, wherein a material of this hydrophilic material layer comprises and contains silicomethane (silane, SiH
4) material, contain the silicic acid tetra-ethyl ester (tetraethyl-ortho-silicate, TEOS) material of oxide (oxide) or silicon nitride (silicon nitride, SiN).
15. semiconductor structure as claimed in claim 9, wherein a material of this hard mask layer comprises aluminium (aluminum, Al), titanium nitride (titanium nitride, TiN), tantalum nitride (tantalum nitride, TaN), titanium silicon nitride (titanium silicon nitride, TiSiN), tungsten nitride (tungsten nitride, WN), tungsten nitride silicon (tungsten silicon nitride, WsSiN) or refractory nitride (refractory nitride).
16. a semiconductor structure comprises:
One substrate;
One first dielectric layer is disposed in this substrate;
One first hydrophilic material layer is disposed on this first dielectric layer;
One first hard mask layer is disposed on this first hydrophilic material layer;
One second dielectric layer is disposed on this first hydrophilic material layer, first hard mask layer;
One second hydrophilic material layer is disposed on this second dielectric layer; And
One second hard mask layer is disposed on this second hydrophilic material layer.
17. semiconductor structure as claimed in claim 16 wherein has a hole in this first dielectric layer, this first hydrophilic material layer and this first hard mask layer.
18. semiconductor structure as claimed in claim 17 wherein has a groove and links to each other with this hole in this second dielectric layer, this second hydrophilic material layer and this second hard mask layer.
19. semiconductor structure as claimed in claim 18 wherein also disposes a metal material in this hole and this groove.
20. semiconductor structure as claimed in claim 16 wherein after this first hydrophilic material layer is disposed on this first dielectric layer, and before this first hard mask layer is disposed on this first hydrophilic material layer, also comprises:
This semiconductor structure is carried out a crystal edge to be ground.
21. semiconductor structure as claimed in claim 16 wherein after this second hydrophilic material layer is disposed on this second dielectric layer, and before this second hard mask layer is disposed on this second hydrophilic material layer, also comprises:
This semiconductor structure is carried out a crystal edge to be ground.
22. semiconductor structure as claimed in claim 16, one of them has the method for a low-k between 1 and 4 and comprises rotary coating (spin on coating) method or chemical vapour deposition (CVD) (chemical vapor deposition, CVD) method at least wherein to form this first dielectric layer or this second dielectric layer.
23. semiconductor structure as claimed in claim 16, wherein this first dielectric layer or this second dielectric layer at least one of them a material comprise organic dielectric materials, carbon containing dielectric material or carbon oxide material.
24. semiconductor structure as claimed in claim 16, wherein this first dielectric layer or this second dielectric layer at least one of them by tetramethyl-ring siloxanes (tetramethyl-cyclotetra-siloxane, TMCTS), trimethyl silane (trimethyl-silane, 3MS), tetramethylsilane (tetramethyl-silane, 4MS), dimethyldimethoxysil,ne (dimethyl-dimethoxy-silane, DMDMOS), prestox cyclosiloxane (octamethyl-cyclotetra-siloxane, OMCTS), diethoxymethyl silane (diethoxy-methyl-silane, DEMS), or tetramethyl disiloxane (tetramethyl-disiloxane, TMDSO) or TMTMCTS one of them is that a predecessor (precursor) preparation gets at least.
25. semiconductor structure as claimed in claim 16, wherein this first hydrophilic material layer or this second hydrophilic material layer at least the material of one of them comprise and contain silicomethane (silane, SiH
4) material, contain the silicic acid tetra-ethyl ester (tetraethyl-ortho-silicate, TEOS) material of oxide (oxide) or silicon nitride (silicon nitride, SiN).
26. semiconductor structure as claimed in claim 16, wherein this first hard mask layer or this second hard mask layer at least one of them a material comprise aluminium (aluminum, Al), titanium nitride (titaniumnitride, TiN), tantalum nitride (tantalum nitride, TaN), titanium silicon nitride (titanium silicon nitride, TiSiN), tungsten nitride (tungsten nitride, WN), tungsten nitride silicon (tungsten silicon nitride, WsSiN) or refractory nitride (refractory nitride).
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| US6734096B2 (en) * | 2002-01-17 | 2004-05-11 | International Business Machines Corporation | Fine-pitch device lithography using a sacrificial hardmask |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108735712A (en) * | 2017-04-20 | 2018-11-02 | 台湾积体电路制造股份有限公司 | The forming method of ultralow dielectric metal intermetallic dielectric layer |
| CN108735712B (en) * | 2017-04-20 | 2021-07-27 | 台湾积体电路制造股份有限公司 | Method for forming ultra-low dielectric constant inter-metal dielectric layer |
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