CN1738180A - Non-contact ultrasonic miniaturized motor of asymmetric drive electrode - Google Patents
Non-contact ultrasonic miniaturized motor of asymmetric drive electrode Download PDFInfo
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- CN1738180A CN1738180A CN 200510029306 CN200510029306A CN1738180A CN 1738180 A CN1738180 A CN 1738180A CN 200510029306 CN200510029306 CN 200510029306 CN 200510029306 A CN200510029306 A CN 200510029306A CN 1738180 A CN1738180 A CN 1738180A
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Abstract
Disclosed a non-contact ultrasonic micro-motor of asymmetric actuating electrode, belongs to the field of Micro Electro-Mechanical technology. The invention comprises: a base, a piezoelectric ceramic sheet, a metal elastic body, a micro-rotor, a axis, and four actuating electrodes. Wherein, the axis is mounted on the base; the piezoelectric ceramic sheet is adhered on the metal elastic body and has clearance fit with the axis; the micro-rotor is mounted on the axis; said four actuating electrodes are mounted on one side of piezoelectric ceramic sheet while the degree of their section are 36 degrees, 72 degrees, 108 degrees and 144 degrees. Said invention utilizes the a non-contact ultrasonic micro-motor based on asymmetric actuating electrode to break limitation that contact ultrasonic micro-motor has short service life and lower rotary speed. It improves the property of motor and enlarges the application of ultrasonic micro-motor, which is processed by the method of micro machining, so the invention can be produced in batch and minisize. The invention lays the foundation of actual application of ultrasonic micro-motor.
Description
Technical field
What the present invention relates to is a kind of device of field of micro electromechanical technology, specifically, is a kind of non-contact ultrasonic micro motor of asymmetric drive electrode.
Background technology
Develop a kind of novel driving mechanism---ultrasonic motor the eighties in 20th century.It is compared with traditional electromagnetic motor, has advantages such as simple in structure, structurally variable, no electromagnetic interference, noiselessness.Progressively be applied to the automatic focusing device of camera, automatically transport sector is medium.But, drive rotor rotation (or slip of slide block) by frictional force because conventional ultrasonic motor stator contacts with rotor (or slide block).Thereby the life-span of having reduced motor, limited the rotating speed of motor.In order to widen the range of application of ultrasonic motor, so the non-contact ultrasonic motor is suggested and studies.The energisation mode of ultrasonic motor is normally: at first piezoelectric ceramic is carried out unidirectional normal polarization, the vibration pitch diameter number by stator is divided into the sector that is four times in the pitch diameter number then, at last these sectors is connected the AC signal with phase difference successively.But, be difficult to the displacement that obtains to reach, so rotating speed is lower because electromechanical coupling factor that this energisation mode produced is lower usually.
Find through literature search prior art, the beginning of the nineties in last century, people such as Y.Yamayoshi was at " International Journal of Applied Electromagnetics in Marerials ", write articles on Vol.3 (1992) the pp179-182 page or leaf: " Ultrasonic motor not using mechanicalfriction force " (" without the power-actuated ultrasonic motor of mechanical friction " " the international material journal of applied electromagnetics "), this article has been introduced a kind of non-contact type ultrasonic micro motor, utilizes interdigital electrode to come polarized piezoelectric pottery and excitation stator to produce B
03The flexural vibrations of mode produce row wave sound field at the rotor gap location, drive rotor rotation thereby form acoustic radiation pressure, and utilize reflecting plate can improve rotor speed.Rotor is turn up 3000rpm under driving voltage 100Vp-p.But, be difficult in and require to use under the condition at a high speed this motor because the kind electrode complex structure bring difficulty to micro fabrication, and rotating speed is not high.And along with further the reducing of stator dimensions, for processing and make this symmetrical configuration, interdigital electrode that lines are intact is very difficult.
Summary of the invention
The objective of the invention is to overcome the deficiencies in the prior art, propose a kind of non-contact ultrasonic micro motor of asymmetric drive electrode, make it simple in structure, easily processing, high rotating speed.
The present invention is achieved by the following technical solutions, the present invention includes: substrate, piezoelectric ceramic piece, metallic elastic body, little rotor, rotating shaft and four drive electrodes, rotating shaft is fixed in the substrate, piezoelectric ceramic piece sticks on the metallic elastic body, piezoelectric ceramic piece and rotating shaft matched in clearance, little rotor is located in the rotating shaft, and a side of piezoelectric ceramic piece is provided with four drive electrodes, and the sector angular dimension of described four drive electrodes is followed successively by 36 °, 72 °, 108 ° and 144 °.
Described piezoelectric ceramic piece polarizes along thickness direction.
Described piezoelectric ceramic piece is circular.
Described metallic elastic body is circular.
Described little rotor, when driving voltage raise, its rotating speed is linear to be increased.
Described piezoelectric ceramic piece, metallic elastic body, rotating shaft and four drive electrodes constitute stator.
On the sector angular dimension is followed successively by 36 °, 72 °, 108 ° and 144 ° of asymmetric drive electrodes, apply successively sin ω t, cos ω t ,-sin ω t ,-cos ω t etc. during the amplitude alternating voltage, piezoelectric ceramic piece is subjected to electric field action to produce flexural deformation, drive the vibration of metallic elastic body, and the adjustment driving frequency makes stator produce B (2,1) rotation mode, wherein B (2,1) represents flexural vibration mode (2 is 2 nodel lines, and 1 is 1 pitch circle).Stator surface forms capable ripple, row wave sound field produces axially, radially with the power of circumferential three directions, axial power suspends little rotor, radial load makes little rotor keep balance, not eccentric, tangential force makes little rotor produce rotation, and it is consistent that the capable wavefront of the rotation direction of little rotor and stator formation advances direction, and the ultrasonic micro motor rotor rotation of contact direction and row phase of wave are anti-.
The present invention has adopted the noncontact type of drive based on the Asymmetric Electric electrode structure, has broken through the use that the life-span is short, rotating speed the is low restriction of the ultrasonic micro motor of contact; This motor can also drive rotor suspension and rotation by single-phase signal, has simplified driving power so greatly; And the method manufacturing and the realization of this motor employing microfabrication, be easy to advantages such as production lotization, microminiaturization, for the practical application of ultrasonic wave micro motor is laid a good foundation.
Description of drawings
Fig. 1 is a structural representation of the present invention.
Fig. 2 is a stator structure schematic diagram of the present invention.
Embodiment
As shown in Figure 1, 2, the present invention includes: substrate 1, piezoelectric ceramic piece 2, metallic elastic body 3, little rotor 4, rotating shaft 5 and drive electrode 6,7,8,9, rotating shaft 5 is fixed in the substrate 1, piezoelectric ceramic piece 2 sticks on the metallic elastic body 3, piezoelectric ceramic piece 2 and rotating shaft 5 matched in clearance, little rotor 4 is located in the rotating shaft 5, and a side of piezoelectric ceramic piece 2 is provided with drive electrode 6,7,8,9, and the sector angular dimension of described drive electrode 6,7,8,9 is followed successively by 36 °, 72 °, 108 ° and 144 °.
Described piezoelectric ceramic piece 2 polarizes along thickness direction.
Described piezoelectric ceramic piece 2 is circular.
Described metallic elastic body 3 is circular.
Described little rotor 4, its vane thickness, external diameter are identical with the size of rotating shaft diameter.
Described little rotor 4 is three blades or six blade constructions.
Described little rotor 4, under the 20V driving voltage, its three-vaned maximum (top) speed is 5100rpm.
Described little rotor 4, under the 20V driving voltage, its six-bladed maximum (top) speed is 3700rpm.
Described little rotor 4, when driving voltage raise, its rotating speed is linear to be increased.
Described piezoelectric ceramic piece 2, metallic elastic body 3, rotating shaft 5 and drive electrode 6,7,8,9 constitute stator.
Claims (5)
1. the non-contact ultrasonic micro motor of an asymmetric drive electrode, comprise: substrate (1), piezoelectric ceramic piece (2), metallic elastic body (3), little rotor (4), rotating shaft (5) and drive electrode (6,7,8,9), it is characterized in that, rotating shaft (5) is fixed in the substrate (1), piezoelectric ceramic piece (2) sticks on the metallic elastic body (3), piezoelectric ceramic piece (2) and rotating shaft (5) matched in clearance, little rotor (4) is located in the rotating shaft (5), one side of piezoelectric ceramic piece (2) is provided with drive electrode (6,7,8,9), described drive electrode (6,7,8,9) sector angular dimension is followed successively by 36 °, 72 °, 108 ° and 144 °.
2. the non-contact ultrasonic micro motor of asymmetric drive electrode according to claim 1 is characterized in that, described piezoelectric ceramic piece (2) polarizes along thickness direction.
3. the non-contact ultrasonic micro motor of asymmetric drive electrode according to claim 1 and 2 is characterized in that, described piezoelectric ceramic piece (2) is circular.
4. the non-contact ultrasonic micro motor of asymmetric drive electrode according to claim 1 is characterized in that, described metallic elastic body (3) is circular.
5. the non-contact ultrasonic micro motor of asymmetric drive electrode according to claim 1 is characterized in that, described little rotor (4), and when driving voltage raise, its rotating speed is linear to be increased.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200510029306 CN1738180A (en) | 2005-09-01 | 2005-09-01 | Non-contact ultrasonic miniaturized motor of asymmetric drive electrode |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200510029306 CN1738180A (en) | 2005-09-01 | 2005-09-01 | Non-contact ultrasonic miniaturized motor of asymmetric drive electrode |
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| CN1738180A true CN1738180A (en) | 2006-02-22 |
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| CN 200510029306 Pending CN1738180A (en) | 2005-09-01 | 2005-09-01 | Non-contact ultrasonic miniaturized motor of asymmetric drive electrode |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103701359A (en) * | 2013-12-09 | 2014-04-02 | 浙江大学 | Piezoelectric vibration impact rotary motor based on piezoelectric stack |
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2005
- 2005-09-01 CN CN 200510029306 patent/CN1738180A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103701359A (en) * | 2013-12-09 | 2014-04-02 | 浙江大学 | Piezoelectric vibration impact rotary motor based on piezoelectric stack |
| CN103701359B (en) * | 2013-12-09 | 2015-09-16 | 浙江大学 | The electric rotating machine that a kind of piezoelectric vibration based on piezoelectric pile is impacted |
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