CN1734229A - Microsize admeasuring apparatus - Google Patents
Microsize admeasuring apparatus Download PDFInfo
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- CN1734229A CN1734229A CNA2005100527650A CN200510052765A CN1734229A CN 1734229 A CN1734229 A CN 1734229A CN A2005100527650 A CNA2005100527650 A CN A2005100527650A CN 200510052765 A CN200510052765 A CN 200510052765A CN 1734229 A CN1734229 A CN 1734229A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/956—Inspecting patterns on the surface of objects
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- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
- G06T7/00—Image analysis
- G06T7/0002—Inspection of images, e.g. flaw detection
- G06T7/0004—Industrial image inspection
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- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
- G06T7/00—Image analysis
- G06T7/80—Analysis of captured images to determine intrinsic or extrinsic camera parameters, i.e. camera calibration
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- Life Sciences & Earth Sciences (AREA)
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- General Health & Medical Sciences (AREA)
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- Quality & Reliability (AREA)
- Length Measuring Devices By Optical Means (AREA)
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Abstract
To accurately and simultaneously measure a plurality of patterns even when an object to be measured is arranged at an angle or patterns on the object to be measured is very slightly displaced from a specified position. A plurality of detecting parts 26 and 28 are arranged in such a way as to asynchronously move along an X-axis frame 18. The detecting parts 26 and 28 as a whole are arranged in such a way as to move along a Y-axis frame 20. Each of the detecting parts 26 and 28 is arranged in such a way as to asynchronously move along a Y-axis direction within a prescribed range. When a flat panel 46 is arranged in such a way as not to be in parallel with X-Y coordinate axes and arranged at an angle to the Y-axis or when patterns of a liquid crystal monitor 48 are displaced from registered patterns, the detecting parts 26 and 28 are independently moved along the Y-axis direction to correct positional displacements according to the inclination and pattern displacements of the flat panel 46 to accurately and simultaneously measure a plurality of patterns on the liquid crystal monitor 48 and shorten tact time.
Description
Technical field
The present invention relates to a kind of microsize admeasuring apparatus, it is that measured object is made a video recording as subject, the resulting image of being made a video recording by this is handled, and measured the microsize of measured object.
Background technology
As measuring the minute sized machine of measured object, have on the flat board that for example LCD monitor is formed in the face of the space of each LCD monitor as mobile space, make detecting device move at three-dimensional, by the machine of the live width of formed figure on each LCD monitor of detectors measure etc.This microsize admeasuring apparatus is installed video camera etc. on detecting device, with video camera each LCD monitor is made a video recording, and by the image that is obtained by this shooting is handled, can measure the live width of the figure that forms on each LCD monitor etc.
But in the structure of a plurality of LCD monitor being measured with 1 detecting device, detecting device is moved to the position of each LCD monitor needs the time, can not shorten the Measuring Time to flat board.In order to shorten the plane-table operation time (Measuring Time) that a plurality of LCD monitor form, can adopt and prepare many detecting devices, make each detecting device move to the structure of each LCD monitor simultaneously.
For example, with X-Y coordinate (mechanical coordinate) configured in parallel of flat board facing to measuring instrument, a plurality of detecting devices that configuration can be free to slide on the X-axis framework that constitutes X-axis, by the Y-axis drive division X-axis framework that has disposed a plurality of detecting devices is moved along Y direction, can make each detecting device move to the position of each LCD monitor.
But, a plurality of detecting devices that configuration can be free to slide on the X-axis framework, make in the structure that the X-axis framework that disposed a plurality of detecting devices moves along Y direction,, on Y direction, but can not singlely move though each detecting device is moved along X-direction is single.Therefore, when flat board is not configured in parallel to the X-Y coordinate of measuring instrument, when for example the Y-axis heeling condition disposes relatively, after each detecting device is moved along Y direction simultaneously, even each detecting device moves along X-direction is single, a detecting device is positioned on the measuring position of appointment, but but other detecting devices can not be positioned at the specified measurement position, can not measure a plurality of figures simultaneously with each detecting device.
In addition, even flat board has been carried out configured in parallel to the X-Y coordinate, and the figure on certain measuring point is during to registration figure minor shifts, even each detecting device moves to the measuring point and measures, and accurate size that can not measurement pattern.That is,,, then can not accurately measure a plurality of figures if the position of each detecting device is not revised according to skew when figure during to registration figure minor shifts.
Summary of the invention
The present invention proposes in view of above-mentioned existing problem, its purpose is, a kind of microsize admeasuring apparatus is provided, even measured object is to the not parallel configuration of mechanical coordinate of measuring instrument, the measured object tilted configuration, perhaps the figure on the measured object is from the appointed positions minor shifts, also can be to a plurality of figures accurately and measure simultaneously.
In order to achieve the above object, the microsize admeasuring apparatus that technical scheme 1 is related has: a plurality of test sections that a plurality of figures on the measured object are made a video recording respectively; Image processing part is handled the image of above-mentioned a plurality of test section shootings, and calculates the microsize of relevant above-mentioned a plurality of figures; And drive division, face the quilt of above-mentioned measured object to the major general and measure the space in zone as mobile space, above-mentioned a plurality of test section is moved along three-dimensional in above-mentioned mobile space, and the structure of above-mentioned drive division comprises: the main drive division that above-mentioned a plurality of test section integral body is moved along the one dimension direction in the above-mentioned three-dimensional; And make above-mentioned a plurality of test section distinguish asynchronous mobile process auxiliary drive portion along the two-dimensional directional at least in the above-mentioned three-dimensional.
(effect) makes a video recording to a plurality of figures on the measured object by each test section, and the image of this shooting handled, when measuring the microsize relevant with each figure, owing to make a plurality of test section integral body along the one dimension direction, for example move along Y direction, and make a plurality of detecting elements at least respectively along two-dimensional directional, for example along X-direction, the same moved further of Y direction, so even measured object is to the mechanical coordinate of measuring instrument, the for example not parallel configuration of X-Y coordinate relatively, but measured object is to the Y-axis tilted configuration, perhaps the graph position on the measured object also can move along two-dimensional directional is asynchronous respectively at least by making each test section, and each test section is finely tuned from the appointed positions minor shifts, can be accurately and measure a plurality of figures simultaneously, Measuring Time is shortened.In addition, can measure a plurality of measurement points simultaneously, Measuring Time is shortened.
In technical scheme 2, as technical scheme 1 described microsize admeasuring apparatus, above-mentioned process auxiliary drive portion has: with X, Y, Z direction is three-dimensional, makes above-mentioned a plurality of test section respectively along the asynchronous mobile a plurality of directions Xs process auxiliary drive portion of directions X; Make above-mentioned a plurality of test section respectively along the asynchronous mobile a plurality of Y direction of Y direction process auxiliary drive portion; And make above-mentioned a plurality of test section respectively along the asynchronous mobile a plurality of Z direction of Z direction process auxiliary drive portion.
(effect) carries out asynchronous moving by making each test section along directions X, Y direction or Z direction after making a plurality of test section integral body move near each figure, can finely tune the position of each test section individually.
In technical scheme 3, as technical scheme 2 described microsize admeasuring apparatus, above-mentioned a plurality of directions X with process auxiliary drive portion, above-mentioned a plurality of Y directions with process auxiliary drive portion or above-mentioned a plurality of Z direction with at least one is made of linear motor in the auxiliary actuator, this linear motor has: the magnet of the direction of appointment configuration in X, Y or the Z direction, and the coil that disposes on each test section.
(effect) even dispose a plurality of test sections on same axle, also can make each test section asynchronous mobile by constituting process auxiliary drive portion with the linear motor with magnet and coil, can oversimplify by implementation structure.
The present invention has following effect.
As described above as can be known, the microsize admeasuring apparatus related according to technical scheme 1 can shorten Measuring Time.
According to technical scheme 2, can carry out inching individually to the position of each test section.
According to technical scheme 3, can realize the simplification that constitutes.
Description of drawings
Fig. 1 is the stereographic map of the microsize admeasuring apparatus of expression one embodiment of the invention.
Fig. 2 is the stereographic map of the microsize admeasuring apparatus of expression one embodiment of the invention, the stereographic map of the state when being expression omission test section,
Fig. 3 is dull and stereotyped planimetric map.
Fig. 4 is the amplification view of measurement pattern.
Fig. 5 is the structural drawing of closed-loop control system.
The planimetric map of the state when Fig. 6 is the inclination of expression flat board.
Embodiment
Below embodiments of the invention are described.Fig. 1 is the stereographic map of the microsize admeasuring apparatus of expression one embodiment of the invention, and Fig. 2 is the stereographic map of the microsize admeasuring apparatus of expression one embodiment of the invention, the stereographic map of the state when being expression omission test section.Fig. 3 is dull and stereotyped planimetric map, and Fig. 4 is the amplification view of measurement pattern, and Fig. 5 is the structural drawing of closed-loop control system, the planimetric map of the state when Fig. 6 is the inclination of expression flat board.
In these figure, microsize admeasuring apparatus 16, as 3 D measuring instrument, its structure comprises: the X-axis framework 18 that constitutes the X-axis of X-Y coordinate (mechanical coordinate); Constitute a pair of Y-axis framework 20 of Y-axis; Base station 22; Be fixed on the test desk 24 on the base station 22; A plurality of test sections 26,28 that can asynchronously be configured movably on framework 18 in X-axis; Be the X-axis drive division 30 that each test section 26,28 can be moved along X-direction; Be the X-axis drive division 32 that each test section 26,28 can be moved along Y direction; But be the Z axle drive division 34 that each test section 26,28 is moved along Z-direction; Carry out the personal computer (to call PC in the following text) 36 of computing for the driving of controlling each drive division; The display device 38 of demonstration PC36 result etc.; PC36 is imported the keyboard 40 of various information; And the control box 42 of the driving direction etc. of each drive division of expression etc.
Direction of principal axis both ends at X-axis framework 18 form the sliding part (not shown), and each sliding part can slide along Y-axis framework 20.X-axis can move along Y direction by the driving of Y-axis drive division 32 with framework 18, and Y-axis drive division 32 is to constitute with the linear motor of linear motor with coil 32b with magnet 32a and Y-axis by having a plurality of Y-axis linear motors.When the coil 32b of linear motor energising, by PC36 control during to the energising amount of coil 32b and energising direction, X-axis framework 18 moves along Y direction (Y-axis with framework 20).That is, by the driving of Y-axis drive division 32, test section 26,28 integral body can be along with the moving of X-axis framework 18, and move along Y direction.At this moment, Y-axis drive division 32 constitutes the main drive division that test section 26,28 is moved along Y direction.
In addition, with on the framework 18, dispose promising each test section 26,28 that makes in X-axis along the asynchronous mobile X-axis drive division 30 of X-direction (X-axis framework 18).The structure of X-axis drive division 30 comprises: use framework 18 and a plurality of X-axis linear motors magnet 30a of configuration along X-axis; And the X-axis linear motor coil 30b of lift-launch on each test section 26,28.By energising amount and the energising direction of PC36 control, each test section 26,28 is moved along X-direction asynchronous (independence) to each coil 30b.At this moment, by the X-axis drive division 30 that linear motor constitutes, formation makes each test section 26,28 along the asynchronous mobile directions X of X-direction process auxiliary drive portion.
Fixedly X-axis uses framework 18 and Y-axis with the base station 22 of framework 20, is supported by a plurality of frameworks 44 that are fixed on the pedestal, on base station 22, disposes the test desk 24 of the mechanical block target X-Y coordinate that constitutes microsize admeasuring apparatus 16.Test desk 24 both end sides are supported by platform frame 24a, on test desk 24, as shown in Figure 3, carry the flat board 46 as measured object.Be roughly in formation on the flat board 46 of rectangular shape, form a plurality of LCD monitor 48 as measuring object.In the upper and lower of dull and stereotyped 46 left end side, form location (ア ラ イ メ Application ト) mark M1, M2.Setting measurement point (management point) P1～P4 on each LCD monitor 48, and as shown in Figure 4, figure PT1, the PT2 of formation formation driving circuit etc. ...
To the major general in the face of the space of the LCD monitor 48 that is configured in dull and stereotyped 46 measured zone as moving area, along the removable configuration detection of three- dimensional portion 26,28, each test section 26,28 has test section main body 50 in this moving area.In the lens barrel 52 of each test section main body 50, the LCD monitor 48 on the flat board 46 as subject, as the camera head that the figure on the LCD monitor 48 is made a video recording, is equipped with object lens 54, ccd video camera 56.Object lens 54, ccd video camera 56 have the function of electron microscope, and the figure on the LCD monitor 48 is carried out amplifying camera, and the signal of relevant image of shooting is transferred to PC36 by cable (not drawing among the figure).In addition, each lens barrel 52 for camera head focuses on, is connected to as on the Z axle servomotor 58 of Z direction with process auxiliary drive portion, so that camera head can be moved along Z-direction according to the control signal of PC36 output.At this moment, the function of 58 Z1 axles of Z axle servomotor servomotor, the function of 58 Z2 axles of another Z axle servomotor servomotor, lens barrel 52 interior object lens 54 and ccd video cameras 56 can move back and forth along the Z1 axle, and object lens 54 and ccd video cameras 56 in another lens barrel 52 can move back and forth along the Z2 axle.
On each test section main body 50, also be provided with as the Y-axis servomotor 60 of Y direction with process auxiliary drive portion, so that the control signal of PC36 output is replied, and each test section 26,28 is moved along Y direction is asynchronous.A Y-axis servomotor 60 is as Y1 S servomotor, can make a test section 26 along moving back and forth with Y-axis (Y1S axle) with parallel auxiliary of framework 20 with Y-axis.Another Y-axis servomotor 60 is as the Y2S servomotor, can make another test section 28 along moving back and forth with Y-axis (Y2S axle) with parallel auxiliary of framework 20 with Y-axis.
At this,, on X-axis drive division 30, as shown in Figure 5, constitute full cut-off ring (Full Closed Loop) control system in order to carry out hi-Fix in the X-direction of each test section 26,28.
Specifically, with a plurality of magnet 30a of X-axis (X-axis framework 18) configured in parallel, and, be useful on the line slideway 62 and the glass disk scale (グ ラ ス ス ケ one Le) 64 that move that guides each test section main body 50 with the X-axis configured in parallel.And, loading position sensor (rectilinear transducer) 66 on each test section main body 50, each position transducer 66 detects the scale of glass disk scale 64, and detection signal is exported to proportional counter (ス ケ one Le カ ウ Application ) 68.Proportional counter 68 is replied the detection signal of position transducer 66, the number of division on the glass disk scale (linear graduation dish) 64 is counted, and count value is exported to monitor driver 70.70 pairs of linear motors of monitor driver and PC36 export the positional information of each test section main body 50, PC36 can be according to positional information, control is to the energising amount of the coil 36b on each test section main body 50 and energising direction, and the location on can the X-direction of each test section main body 50 of High Accuracy Control.
In addition, the same with X-axis drive division 30 in Y-axis drive division 32, constitute closed-loop control system by adopting position transducer 66a etc., can carry out hi-Fix in the Y direction of each test section 26,28.
Employing is according to the microsize admeasuring apparatus 16 of said structure, during the figure of the LCD monitor 48 that measurement forms on dull and stereotyped 46, as shown in Figure 3, for the telltale mark M1 that detects the flat board 46 of configuration on test desk 24, the position of M2, for example test section 26 is configured in position corresponding to telltale mark M1, M2, X-axis framework 18 is moved along Y direction, successively telltale mark M1, M2 are made a video recording by test section 26, handle the image of this shooting by PC36, whether judge dull and stereotyped 46 to X-Y coordinate configured in parallel.When being judged as 46 pairs of X-Y coordinate configured in parallel of flat board, make test section 26,28 be configured in the state of the assigned address of X-axis framework 18 respectively, X-axis framework 18 is moved along Y direction, at first be positioned on dull and stereotyped 46 the LCD monitor that left upper portion disposed 48. Test section 26,28 is moved, the position that each test section 26,28 is positioned at corresponding to measurement point P1, P2 respectively along X-axis framework 18.By the driving of Z axle servomotor 58, each test section 26,28 is moved respectively in Z-direction again, focus on.When carrying out this focusing, 56 couples of each measurement point P1, P2 make a video recording with ccd video camera, are handled the image of this shooting by PC36.At this moment whether, the registration figure of the figure that measures and registered in advance is carried out figure coupling (パ one Application マ Star チ Application グ), judging has skew between the two.When not being offset between the two,, as shown in Figure 4, the figure PT1 on measurement point P1, P2, the live width of PT2 etc. are measured handling by the image of each test section 26,28 shooting.At this moment, PC36 handles the image of ccd video camera 56 shootings as image processing part, calculates the microsize of relevant a plurality of figures.PC36 carries out these processing to measurement point P1, P2 on each LCD monitor 48, P3, P4, when measuring each measurement point P1～P4, measure the figure PT1 on measurement point P1, P2 and measurement point P3, P4, the microsize of PT2 simultaneously with test section 26,28 respectively, can shorten Measuring Time.
When in the figure coupling, minor shifts being arranged between the two, can make the detecting device 24 or 26 that in test section 26,28, detects skew move small scope and revise skew by the driving of Y-axis servomotor in Y-axis (auxiliary Y-axis) direction.
On the other hand, as shown in Figure 6, by the telltale mark M1 on the flat board 46, the measurement of M2, the X-Y coordinate that is judged as dull and stereotyped 46 pairs of microsize admeasuring apparatus 16 is not a configured in parallel, but during to the configuration of Y-axis (Y-axis with framework 20) heeling condition, for the inclination of revisal, according to the inclination of dull and stereotyped 46 pairs of Y directions to Y-axis, drive Y-axis servomotor 60, revise each test section 26,28 side-play amount in Y direction.At this moment, since test section 28 than test section 26 from the farther position of X-Y origin of coordinate, so be positioned at than test section 26 in Y direction on a little position of moving.For convenience, the initial point of X-Y coordinate is arranged on the lower-left side of Fig. 1, but also can be the Mobility Center of XY.
After the offset correction to each test section 26,28, each test section 26,28 driving by linear motor is moved along Y direction with X-axis framework 18, is positioned at the measurement point P1 of LCD monitor 48, the top of P2.At this moment the driving by Z axle servomotor 58, test section 28 move forward into line focusing in Z-direction.Make check point 26,28 parallel when mobile along X-axis respectively, test section 26,28 initial points in Y direction are centers that test section moves forward and backward.If test section 26,28 is parallel on X-axis, then any position of Yi Donging can be as initial point.Then, when the CCD56 by test section 26,28 to each measurement point P1, when P2 makes a video recording, the image of this shooting is handled by PC36, and figure and the registration figure that detects carried out the figure coupling.When by this figure coupling, be judged as when minor shifts being arranged between the two, to test section 26 or the test section 28 that detects skew, carry out the processing of revising skew.That is,, drive Y-axis servomotor 60, test section 26 or test section 28 are moved to Y-axis (auxiliary Y-axis) direction, revise skew according to the control signal of revising skew.At this moment be benchmark with telltale mark M1, M2, carry out coordinate conversion from mechanical coordinate system.
Then, make a video recording by each test section 26,28 couples of measurement point P1, P2 once more, handle this resulting image of making a video recording, carry out the small live width (CD) of figure PT1, PT2 on relevant measurement point P1, the P2 and the measurement of coincidence (0L) by PC36.Promptly carry out with micron order (ミ Network ロ Application オ one ダ) and measure the width as minute sized figure, the processing of size.
Measure after the end, carry out to turn back to the processing of original value by the offset correction that the figure coupling is calculated, transfer to measuring the processing of next measurement point P3, P4.On next measurement point P3, P4, also be inclination according to dull and stereotyped 46, revise each test section 26,28 processing in the Y direction correction, repeat same processing.
Like this, according to present embodiment, even dull and stereotyped 46 pairs of Y-axis tilt, perhaps the figure of LCD monitor 48 has minor shifts to the registration figure, also can be by the driving of each servomotor 60, make that test section 26,28 is asynchronous to be moved along Y-axis (the auxiliary Y-axis of using) direction,, can shorten Measuring Time so can accurately measure a plurality of figures simultaneously.
In the present embodiment, move owing to can make each test section 26,28 make asynchronous (independence) by the driving of Z axle servomotor along the Z axle, so, can accurately focus on, can measure a plurality of figures more accurately, can shorten Measuring Time.
In addition, because X-axis drive division 30 adopted linear motor, thus test section 26,28 is moved on a large scale along X-direction is asynchronous, and simplification that can implementation structure.
Claims (3)
1, a kind of microsize admeasuring apparatus is characterized in that, has:
A plurality of test sections that a plurality of figures on the measured object are made a video recording respectively;
Image processing part is handled the image of above-mentioned a plurality of test section shootings, and calculates the microsize of relevant above-mentioned a plurality of figures; And
Drive division, to the major general in the face of the space in the measured zone of above-mentioned measured object as mobile space, above-mentioned a plurality of test section is moved along three-dimensional in above-mentioned mobile space,
The structure of above-mentioned drive division comprises: the main drive division that above-mentioned a plurality of test section integral body is moved along the one dimension direction in the above-mentioned three-dimensional; And make above-mentioned a plurality of test section distinguish asynchronous mobile process auxiliary drive portion along the two-dimensional directional at least in the above-mentioned three-dimensional.
2, microsize admeasuring apparatus as claimed in claim 1 is characterized in that,
Above-mentioned process auxiliary drive portion has: with X, Y, Z direction is three-dimensional, makes above-mentioned a plurality of test section respectively along the asynchronous mobile a plurality of directions Xs process auxiliary drive portion of directions X; Make above-mentioned a plurality of test section respectively along the asynchronous mobile a plurality of Y direction of Y direction process auxiliary drive portion; And make above-mentioned a plurality of test section respectively along the asynchronous mobile a plurality of Z direction of Z direction process auxiliary drive portion.
3, microsize admeasuring apparatus as claimed in claim 2 is characterized in that,
Above-mentioned a plurality of directions X with process auxiliary drive portion, above-mentioned a plurality of Y directions with process auxiliary drive portion or above-mentioned a plurality of Z direction with any is made of linear motor at least in the process auxiliary drive portion, this linear motor has: the magnet of the direction configuration of appointment in X, Y or the Z direction; And the coil that on above-mentioned each test section, disposes.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004233284A JP4478530B2 (en) | 2004-08-10 | 2004-08-10 | Micro dimension measuring machine |
| JP233284/2004 | 2004-08-10 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1734229A true CN1734229A (en) | 2006-02-15 |
| CN100455988C CN100455988C (en) | 2009-01-28 |
Family
ID=36030557
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB2005100527650A Expired - Fee Related CN100455988C (en) | 2004-08-10 | 2005-03-14 | Microsize admeasuring apparatus |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP4478530B2 (en) |
| KR (1) | KR101119873B1 (en) |
| CN (1) | CN100455988C (en) |
| TW (1) | TW200606390A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101788270A (en) * | 2010-02-10 | 2010-07-28 | 中国科学院自动化研究所 | Ranging technology-based system for on-line measurement of luggage sizes and method thereof |
| CN104076826A (en) * | 2013-03-28 | 2014-10-01 | 日本株式会社日立高新技术科学 | Actuator Position Calculation Device and Actuator Position Calculation Method |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5393864B1 (en) * | 2012-10-24 | 2014-01-22 | 株式会社牧野フライス製作所 | Work shape measuring method and work shape measuring apparatus |
| CN104359399B (en) * | 2014-10-28 | 2017-10-27 | 米亚精密金属科技（东莞）有限公司 | One kind drop glue key measuring machine |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4866629A (en) * | 1987-11-13 | 1989-09-12 | Industrial Technology Research Institute | Machine vision process and apparatus for reading a plurality of separated figures |
| DE3806686A1 (en) * | 1988-03-02 | 1989-09-14 | Wegu Messtechnik | MULTICOORDINATE MEASURING AND TESTING DEVICE |
| JPH0421806A (en) * | 1990-05-17 | 1992-01-24 | Seiko Iconics Kk | Reflection type image forming optical system |
| JPH09101115A (en) * | 1995-10-04 | 1997-04-15 | Nikon Corp | Image measuring device |
| DE19615246A1 (en) * | 1996-04-18 | 1997-10-23 | Krupp Foerdertechnik Gmbh | Photogrammetry method for three-dimensional tracking of moving objects |
| CN2306483Y (en) * | 1997-08-23 | 1999-02-03 | 李德功 | Mini-measurer for vertical and horizontal sections of single interface light |
| JP2000259829A (en) | 1999-03-04 | 2000-09-22 | Sokkia Co Ltd | Image recognition method |
-
2004
- 2004-08-10 JP JP2004233284A patent/JP4478530B2/en active Active
- 2004-11-18 KR KR1020040094530A patent/KR101119873B1/en active IP Right Grant
-
2005
- 2005-01-10 TW TW094100609A patent/TW200606390A/en unknown
- 2005-03-14 CN CNB2005100527650A patent/CN100455988C/en not_active Expired - Fee Related
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101788270A (en) * | 2010-02-10 | 2010-07-28 | 中国科学院自动化研究所 | Ranging technology-based system for on-line measurement of luggage sizes and method thereof |
| CN101788270B (en) * | 2010-02-10 | 2011-11-09 | 中国科学院自动化研究所 | Ranging technology-based system for on-line measurement of luggage sizes and method thereof |
| CN104076826A (en) * | 2013-03-28 | 2014-10-01 | 日本株式会社日立高新技术科学 | Actuator Position Calculation Device and Actuator Position Calculation Method |
| US9766267B2 (en) | 2013-03-28 | 2017-09-19 | Hitachi High-Tech Science Corporation | Actuator position calculation device, actuator position calculation method, and actuator position calculation program |
| CN104076826B (en) * | 2013-03-28 | 2018-01-19 | 日本株式会社日立高新技术科学 | The position calculating apparatus and position calculating method of actuator |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2006052971A (en) | 2006-02-23 |
| TW200606390A (en) | 2006-02-16 |
| JP4478530B2 (en) | 2010-06-09 |
| TWI335415B (en) | 2011-01-01 |
| KR20060014346A (en) | 2006-02-15 |
| KR101119873B1 (en) | 2012-02-22 |
| CN100455988C (en) | 2009-01-28 |
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