CN1715971A - Light wave guide device,light source device and light information processor - Google Patents
Light wave guide device,light source device and light information processor Download PDFInfo
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- CN1715971A CN1715971A CN 200510078396 CN200510078396A CN1715971A CN 1715971 A CN1715971 A CN 1715971A CN 200510078396 CN200510078396 CN 200510078396 CN 200510078396 A CN200510078396 A CN 200510078396A CN 1715971 A CN1715971 A CN 1715971A
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Abstract
To provide an optical waveguide device which is small in light loss , can be made small in size and low in cost, is small in the polarization dependency of transmittance and reflectance by a filter, and multiplexes or demultiplexes a plurality of light beams having different wavelength by segmenting the wavelength of transmitted light and the wavelength of reflected light in a narrower range, and to provide a light source device suitable as a point light source device for a compact display or the like and an optical information processing device which use the optical waveguide device. An optical waveguide layer 2 composed of an assembly of a clad 3 having the shape of a pentagon ABCDE where a side DE and a side BA cross at an acute angle of 45 degrees, and cores 4 to 6 is formed in the optical waveguide device. The core 4 is linearly provided from the side AB to a side CD nearly perpendicularly to the side AB, and the cores 5 and 6 are linearly provided from the side DE to a crossing part 7 or 9 crossing with the core 4 nearly perpendicularly to the side DE. Wavelength selecting filters 8 and 10 are provided at the crossing parts so as to part the core 4. In multiplexing the light, light is made incident from light incident or emitting end faces 11 to 13, and multiplexed light is taken out from a light emitting or incident end face 14.
Description
Technical field
The present invention relates to the different multi-beam of wavelength is closed the optical waveguide device of ripple or partial wave, and the light supply apparatus and the optical information processing device that have used it, be fit to as the spotlight source device of miniscope etc. etc.
Background technology
In recent years, electronic equipment, particularly portable electric appts etc. are requiring miniaturization, lightness and multifunction.In this trend, on portable electric appts, also to begin image data processing, how to realize easily showing that the function of precise image has become the problem of research with seeing.
For example, show disclosed retinal display in the flat 11-505627 communique etc. the spy,, show area occupied so can reduce picture because allow image imaging on the retina of user's eyes, as allowing miniaturization and high precision show two upright display device, carried the very big expectation of people.In miniscopes such as this retinal display, equipment miniaturization, lightweight based on the formation coloured image of light supply apparatus have been become one of research topic from now on.
In the past, but energy is as the spotlight source device of the light source of the display equipment of full color demonstration, for example such shown in the three No. 298324 communique of Jap.P., light from each light-emitting component of light emitting diode (LED) etc., emission R (red), G (green) and B (indigo plant) three primary colours light, use mirror or lens light gathering to go up on one point, and as light source.
But the method for use mirror or lens needs the device of relative each light-emitting component configuration accurately, fixed mirror and lens, and it is many that installing component quantity becomes, and therefore has the problem that the light supply apparatus change is big, change is heavy, cost uprises.In addition, on it is made, for precision is installed each parts well, need calibration procedure consuming time, throughput rate reduces, and is not suitable for a large amount of productions, the problem that also exists cost to uprise from this aspect.
On the other hand, for example, in patent documentation 1 described later, proposed to use optical waveguide and wavelength to select light filter the different a plurality of light of wavelength to be closed the photosynthetic channel-splitting filter that involves of ripple or partial wave.
Figure 12 is the photosynthetic planimetric map of representing as existing example in patent documentation 1 that involves channel-splitting filter.In this device, be provided with light waveguide-layer 110, be provided with in its both sides and be used for and the outside interface (Port one ト) 101～103 that carries out the incident outgoing of light in the central authorities of silicon substrate 100.Interface 101～103 is made of optical fiber, by concavo-convex chimeric location and be adhesively fixed in the groove that is formed on the silicon substrate 100.
Light waveguide-layer 110 is provided with the leaded light heart yearn 111～113 that light respectively is connected in interface 101～103.Heart yearn 111 and heart yearn 113 are configured at the central part of light waveguide-layer 110 that roughly linearity is opposed, are provided with dielectric multi-layer optical thin film light filter 114 in order to block both.Heart yearn 112 is arranged in a crossed manner with heart yearn 113, so that the light that is reflected to 114 incidents of dielectric multi-layer optical thin film light filter by heart yearn 112 advances to heart yearn 113.
Under the situation that device shown in Figure 12 is used as optical multiplexer, use has the device of following optical characteristics: the incident light 121 and 122 that will close ripple respectively from interface 101 and interface 102 incidents, as dielectric multi-layer optical thin film light filter 114, allow the light of wavelength of incident light 121 pass through, and allow the light reflection of wavelength of incident light 122.Like this, the incident light 121 that comes to heart yearn 111 incidents propagation from interface 101 passes dielectric multi-layer optical thin film light filter 114 and incides heart yearn 113.Propagate next incident light 122 by 114 reflections of dielectric multi-layer optical thin film light filter and incide heart yearn 112, change direction and incide heart yearn 113 by interface 102.Consequently, incident light 121 and 122 all is directed to heart yearn 113, is that heart yearn 113 is closed ripple in propagating, and is penetrated from interface 103.
If replace the interface 101 and 102 and light source such as LED is set of device as shown in figure 12, then can be by the waveguide heart yearn simple and precision make the photosynthetic ripple of each light source outgoing well, so and because do not need alignment light to close ripple with short light path, the energy low cost is made the spotlight source device of small integrated.
Japanese documentation 1: the spy opens flat 11-295540 communique (second page, Fig. 3).
But, in the device shown in Figure 12, because only the light incident outgoing end face of heart yearn 111～113 is arranged on the opposed both sides of light waveguide-layer 110, so in heart yearn 111～113, necessarily contain curved portion.Under this situation, just produced the relation of following antinomy: if for the light supply apparatus of making compact light waveguide-layer 110 miniaturizations, the then inevitable big part of curvature that on heart yearn 111～113, contains, the light loss that is caused by light leak becomes big, otherwise, if allow the curvature of heart yearn 111～113 diminish in order to suppress light loss, then light waveguide-layer 110 will maximize.
As its countermeasure, can consider:, the structure that curved portion also can be closed ripple or partial wave is not set on heart yearn even then can form if not on the opposed both sides of light waveguide-layer but mutually perpendicular both sides are provided with light-incident end.
Figure 13 is as comparative example of the present invention, such optical waveguide device and used the planimetric map of the light supply apparatus of this optical waveguide device.
In this optical waveguide device 130, on substrates such as for example silicon, be formed with the light waveguide-layer 132 that the combination by covering 133 and heart yearn 134～136 constitutes.Covering 133 has the shape of rectangle ABCD, and heart yearn 134 is approximately perpendicular to limit AB, is set to linearity from limit AB to limit CD, and heart yearn 135 and 136 is approximately perpendicular to limit DA, is set to linearity from limit DA to the cross part with heart yearn 134.At cross part, disjunction heart yearn 134 is provided with light filter 137 and 138. Light filter 137 and 138 is made of for example dielectric multi-layer optical thin film, is the light of the wavelength coverage of only reflection regulation, and the dichroic filter that allows the light of other wavelength pass through.Regulate light filter 137 and 138 angles respectively, so that advanced to heart yearn 134 by the light of light filter 137 and 138 reflections from heart yearn 135 and 136 incidents with respect to heart yearn 134.
Have again, in the optical waveguide device 130 and embodiments of the present invention described later match, represented the example that heart yearn 134～136 is made of 3 heart yearn portions respectively, but the heart yearn number that constitutes heart yearn 134～136 both can be one also many.
In light supply apparatus 140, relative with each light-incident end of the heart yearn 134,135 of optical waveguide device 130 and 136, red light light-emitting component 21, green light light-emitting component 22 and blue light light-emitting component 23 are set respectively.And 137 uses allow red light pass through and the light filter of reflects green as light filter, and light filter 138 uses and allows red light and green light pass through and the light filter of reflect blue light.
The action of light supply apparatus 140 is as follows.From the light of red light light-emitting component 21, green light light- emitting component 22 and 23 outgoing of blue light light-emitting component, respectively from being input to heart yearn 134～136 with their opposed light-incident ends.Also advance at heart yearn 134 inward-bound light outgoing end faces 139 by light filter 137 from the red light that heart yearn 134 is propagated by light filter 138.The green light of propagating at heart yearn 135 is reflected by light filter 137, advances to heart yearn 134 from heart yearn 135 conversion way forwards, by light filter 138, advances at heart yearn 134 inward-bound light outgoing end faces 139.Blue light from heart yearn 136 is propagated is reflected by light filter 138,, advances from heart yearn 134 inward-bound light outgoing end faces 139 to heart yearn 134 conversion way forwards from heart yearn 136.Like this, red light, green light and blue light are directed to the heart yearn 134 between light filter 138 and the light exit side face 139, are closed ripple among advancing in this zone, close the glistening light of waves from 139 outgoing of light exit side face.
Like this, if on the mutually perpendicular both sides of light waveguide-layer, light-incident end is set, curved portion is not set on heart yearn can closes wave structure yet even then can form.In addition, Figure 14 is the planimetric map of a part of the manufacturing process of explanation optical waveguide device 130, optical waveguide device 130 has rectangular shape, as shown in figure 14, can not cut out a plurality of optical waveguide devices 130 from the silicon wafer 150 that forms light waveguide-layer lavishly by overall cutting, see it also is suitable from this point.
But in optical waveguide device 130, changing from the angle of heart yearn 135 and 136 during to light filter incident, by the reflection transformation direction is 90 degree, becomes 45 degree to the incident angle of light filter.Do not limit in the light of polarization at the such polarization of LED, wanting in narrow wavelength coverage, to allow the transmittance of a wavelength, and under the situation of the light of other wavelength reflection, if make incident light incide light filter with the such big angle of 45 degree, then the polarization interdependence of the reflectivity of light filter and transmission coefficient becomes big, it is big that loss becomes, and this is well-known.
Summary of the invention
The present invention develops in view of this situation, its purpose is, a kind of optical waveguide device is provided, can reduce light loss, realize miniaturization and cost degradation, and the polarization interdependence of the transmission coefficient of light filter and reflectivity is little, divide the light wavelength of transmission and the light wavelength of reflection in narrower range; The present invention also provides a kind of use light supply apparatus and optical information processing device above-mentioned optical waveguide device, that be suitable for the spotlight source device etc. as miniscope etc.
Promptly, the present invention relates to a kind of optical waveguide device, its first heart yearn and engaged by covering with second heart yearn that this first heart yearn intersects, cross part at these heart yearns is provided with the wavelength of above-mentioned first heart yearn disjunction selection light filter, the a plurality of light different wavelength close ripple or partial wave, it is characterized in that, the one side that comprises the described covering of the light incident of described first heart yearn or outgoing end face relatively, the described first heart yearn approximate vertical is extended, and contains the light outgoing or the incident end face of described first heart yearn on the opposed edge of the described covering relative with described one side;
The another side that contains the described covering of the light incident of described second heart yearn or outgoing end face be configured in the acutangulate direction in described one side on, described second heart yearn and described another side generally perpendicularly extend to described cross part.
In addition, the present invention relates to a kind of light supply apparatus, it is at the described one side and the described another side of described optical waveguide device, at least with the opposed light source that disposes respectively of the described light-incident end of described first heart yearn and described second heart yearn, closed ripple from described light source to the light of described incident end face incident, penetrated from described light exit side face at described first heart yearn that is arranged at described opposed edge;
In addition, relate to first optical information processing device, described one side and described another side at described optical waveguide device, at least the described light exit side with described first heart yearn and described second heart yearn disposes light receiving element respectively in the face of putting, after being closed ripple from the light of the described incident end face incident of described first heart yearn that is arranged at described opposed edge, receive by described light receiving element;
In addition, relate to second optical information processing device, it comprises: described optical waveguide device, at least the light to the described light-incident end incoming signal light of described first heart yearn and described second heart yearn is gone into injection device in the described one side of this optical waveguide device and described another side, receives from the optical pickup apparatus that closes the glistening light of waves of the described light exit side face outgoing of described first heart yearn that is arranged at described opposed edge.
According to optical waveguide device of the present invention, first heart yearn and engaged by covering with second heart yearn that this first heart yearn intersects, cross part at these heart yearns is provided with the wavelength of above-mentioned first heart yearn disjunction selection light filter, the one side that comprises the described covering of the light incident of described first heart yearn or outgoing end face relatively, the described first heart yearn approximate vertical is extended, the another side that comprises the described covering of the light incident of described second heart yearn or outgoing end face is configured to towards acutangulating with described one side, described second heart yearn and described another side generally perpendicularly extend to described cross part, so, at described first heart yearn and described second heart yearn, if there is not curved portion, then both intersect with the obtuse angle, angle variation when light changes forward march between described first heart yearn and described second heart yearn equals described acute angle, and the incident angle of being selected the light filter reflex time by described wavelength is less than 45 degree.Therefore, compare to the situation of light filter incident with 45 degree incident angles like that with above-mentioned comparative example, can reduce the polarization interdependence of the reflectivity and the transmission coefficient of light filter, for the not limited light of this polarization of LED, can be less will in narrow wavelength coverage, allowing the loss of the light that produces under the situation of light reflection of transmittance, other wavelength of a wavelength be suppressed to, can in small wavelength scope more, divide the light wavelength that sees through and the light wavelength of reflection.And, in described optical waveguide device, different with conventional example, because need on described first heart yearn and described second heart yearn, curved portion be set, realize that miniaturization becomes possibility so need not follow the increase of light loss, in addition, compare with the method for using mirror and lens, throughput rate improves, can realize miniaturization, lightweight and cost degradation.
In addition, according to light supply apparatus of the present invention, described one side and described another side at described optical waveguide device, at least with the opposed light source that disposes respectively of the described light-incident end of described first heart yearn and described second heart yearn, in addition, according to first optical information processing device of the present invention, described one side and described another side at described optical waveguide device, at least the described light exit side with described first heart yearn and described second heart yearn disposes light receiving element respectively in the face of putting, after being closed ripple from the light of the described light-incident end incident of described first heart yearn that is arranged at described opposed edge, receive by described light receiving element, and in addition, according to second optical information processing device of the present invention, it comprises: described optical waveguide device, at least the light to the described light-incident end incoming signal light of described first heart yearn and described second heart yearn is gone into injection device in the described one side of this optical waveguide device and described another side, reception is from the optical pickup apparatus that closes the glistening light of waves of the described light exit side face outgoing of described first heart yearn that is arranged at described opposed edge, therefore, can provide light supply apparatus and the optical information processing device that to give full play to the above-mentioned excellent effect that described optical waveguide device has.
Description of drawings
Fig. 1 (a) and (b) are based on the planimetric map of the optical waveguide device of embodiments of the present invention 1;
Fig. 2 is based on the planimetric map of the light supply apparatus of embodiments of the present invention 1;
Fig. 3 is based on the sectional view of the light supply apparatus of embodiments of the present invention 1;
Fig. 4 (a) and (b) are explanation planimetric maps based on the part of the manufacturing process of the optical waveguide device of embodiments of the present invention 1;
Fig. 5 is based on the planimetric map of the light supply apparatus of embodiments of the present invention 2;
Fig. 6 is based on the planimetric map of the light supply apparatus of embodiments of the present invention 2;
Fig. 7 is based on the sectional view of the light supply apparatus of embodiments of the present invention 2;
Fig. 8 is based on the planimetric map of the optical waveguide device of embodiments of the present invention 3;
Fig. 9 is based on the planimetric map of the optical waveguide device of embodiments of the present invention 4;
Figure 10 (a) and (b) are based on the planimetric map of the light supply apparatus of embodiments of the present invention 4;
Figure 11 is the planimetric map of explanation based on the part of the manufacturing process of the optical waveguide device of embodiments of the present invention 4;
Figure 12 is the planimetric map that is illustrated in the structure of the photosynthetic wave separater device that is shown as conventional example in the patent documentation 1;
Figure 13 is the planimetric map of the optical waveguide device of comparative example;
Figure 14 is the planimetric map of a part of manufacturing process of the optical waveguide device of explanation comparative example.
Symbol description
The substrate of 1 silicon etc.
2 light waveguide-layers
3 coverings
4a～4c, 5a～5c, 6a～6c heart yearn
7,9 cross parts
8,10 light filters
11～13 smooth incidents or outgoing end face
14 smooth outgoing or incident end faces
Light outgoing or incident end face that 15～17 45 degree tilt
18,19 optical waveguide devices
20 light supply apparatuses
The red light light-emitting component of 21a～21c end face light emitting-type
The green light light-emitting component of 22a～22c end face light emitting-type
The blue light light-emitting component of 23a～23c end face light emitting-type
24 light-emitting zones
25 terminal electrodes
28 optical waveguide devices
30 light supply apparatuses
The red light light-emitting component of 31a～31c surface-emitting type
The green light light-emitting component of 32a～32c surface-emitting type
The blue light light-emitting component of 33a～33c surface-emitting type
40 optical information processing devices
41a～41c red light light receiving element
42a～42c green light light receiving element
43a～43c blue light light receiving element
50 optical waveguide devices
54a～54c, 55a～55c, 56a～56c heart yearn
57,58 cross parts
61～63 smooth incidents or outgoing end face
70 head wearing type displays
71 emergent lights
73 scanning boards (scanned image plane)
The lens of 74 projection opticss system
75 user's eyeballs
76 retinas
90 silicon wafers
91～99 scribe lines
100 silicon substrates
101～103 interfaces
110 light waveguide-layers
111～113 heart yearns
114 dielectric multi-layer optical thin film light filters
121,122 incident lights
123 emergent lights
130 optical waveguide devices
132 light waveguide-layers
133 coverings
134～136 heart yearns
137,138 light filters
139 light exit side faces
140 light supply apparatuses
151,152 scribe lines
Embodiment
In the optical waveguide device of the present invention, described covering has the polygonal shape that is made of 4 limits at least, as first limit on described one side with as almost parallel ground, the 3rd limit configuration of described opposed edge, generally perpendicularly dispose second limit with described first limit and described the 3rd limit, be configured to towards acutangulating as described other the 4th limits on one side with described first limit, to the rough linearity setting in described the 3rd limit, described second heart yearn preferably is set to roughly linearity from described the 4th limit to described cross part to described first heart yearn from described first limit.
It is desirable to: propagate first incident light of coming via described first heart yearn from the light-incident end that is set at described first limit, seeing through described wavelength selects light filter to advance forward, on the other hand, propagate second incident light of coming from the light-incident end that is set at described the 4th limit via described second heart yearn, select light filter to reflect by described wavelength to described first heart yearn, described first incident light and described second incident light are closed ripple at described first heart yearn, penetrate from the light exit side face of described first heart yearn that is set at described the 3rd limit; Perhaps, propagating the incident light partial wave that comes from the light-incident end of described first heart yearn that is set at described the 3rd limit via described first heart yearn is: select light filter to see through and the light that penetrates from the light exit side face of described first heart yearn that is set at described first limit and select the light filter reflection and the light that penetrates from the light exit side face of described second heart yearn that is set at described the 4th limit by described wavelength from described wavelength.
At this moment, it is desirable to, described first heart yearn by a plurality of described wavelength of configuration before and after mutually select light filter in a plurality of positions by disjunction, from described a plurality of by the position of disjunction to described the 4th limit, abreast, be approximately perpendicular to described the and be provided with quadrilateral and described at least second heart yearn and the 3rd heart yearn that described first heart yearn intersects, also via described the 3rd heart yearn light is closed ripple or partial wave at least.
In addition, it is desirable to, select the position of light filter described second heart yearn to be set from the described wavelength of described first heart yearn of disjunction to described the 4th limit, this second heart yearn of disjunction is provided with second wavelength and selects light filter, from the disjunction of described second heart yearn to described first limit, parallel with described first heart yearn and be approximately perpendicular to described first limit quad that intersects with described second heart yearn is set, at least also light is closed ripple or partial wave via described quad.
In addition, described first heart yearn, described second heart yearn, described the 3rd heart yearn and described quad preferably are made of a plurality of heart yearn portion respectively.If a plurality of heart yearn portion is set, then make the corresponding radio frequency channel of each heart yearn portion, its advantage is to constitute multi-channel light supply apparatus and signal conditioning package.
In addition, described polygon is the pentagon with the 5th limit of intersecting with described first limit and described the 4th limit, preferably the vertical halving line with described second limit is an axis of symmetry, and described first limit and described the 3rd limit and described the 4th limit and described the 5th limit are configured in the position of symmetry.And, it is desirable to, described the 3rd limit and described the 4th limit angulation be 135 the degree, described the 4th limit and described the 5th limit angulation be 90 the degree.
In addition, each heart yearn end face that is provided with on preferably described at least first limit and described the 4th limit is formed on the reflection end face of inclination, and is inner or outside to each heart yearn photoconduction via these reflection end faces.
In addition, it is desirable to, described first limit, described second limit, described the 3rd limit, described the 4th limit and described the 5th limit form by the common clad material that cuts off described each heart yearn and be provided with these each heart yearn.
In addition, in light supply apparatus of the present invention, preferably use light emitting diode or laser diode as described light source.
In addition, as described light source, preferably use the light source of emission blue light, green each and red light.By the photosynthetic ripple of these light-emitting component emissions, can show polychrome or full-colour image.In addition, can make a plurality of described light-emitting component of lift-launch so that independently luminous intensity is luminous by supplying with driving power to each described light-emitting component.For example by the luminous intensity of independent control red light light-emitting component, green light light-emitting component and blue light light-emitting component, the panchromatic glistening light of waves that closes that can obtain that colour mixture by primaries forms.
Second optical information processing device of the present invention is preferably as constituting by the described display that closes the glistening light of waves and projection of scanister scanning.
Below, describe preferred forms of the present invention in detail with reference to diagram, yet the present invention is not subjected to any qualification of following embodiment.
Fig. 1 (a) is based on the planimetric map of the optical waveguide device 18 of embodiment 1.In this optical waveguide device 18, being formed with the light waveguide-layer of being made up of the conjugant of covering 3 and heart yearn 4～6 2 on substrates 1 (not shown) such as for example silicon, is heart yearn having imbedded the leaded light path between wrap and the upper clad layer down.
Light waveguide-layer 2 is that organic solvent is made with propylene for example, and the refractive index of covering 3 is 1.505, and the refractive index difference Δ n of heart yearn 4～6 and covering 3 is 0.8%, and the cross section of heart yearn 4～6 is squares of 10 μ m * 10 μ m.As the resin that optical waveguide material uses organic material to be, can simplify the optical waveguide production process.For example, when using UV (ultraviolet ray) constrictive type organic material, can carry out based on the film forming of spin coating etc. and the heart yearn processing undertaken by photoetching etc., can be enough cheap manufacturing equipment and low manufacturing cost are made a plurality of optical waveguide devices on silicon wafer etc.
Covering 3 has the shape of pentagon ABCDE, the vertical halving line of BC is that axis of symmetry is symmetrically formed up and down while being with described second, described one side or described first while being AB and described opposed edge or the described the 3rd while being CD, and described another side or the described the 4th while being DE and the described the 5th while being EA, respectively with equal lengths be disposed at the symmetry the position.In addition, angle ABC, angle BCD and angle DEA are 90 degree, and angle CDE and angle EAB are 135 degree, described another side be limit DE on extended line and described another side to be limit AB intersect with the acute angles of 45 degree.
And, described the 3rd heart yearn be heart yearn 6 and limit DE generally perpendicularly, be parallel to heart yearn 5 and linearity setting to cross part 9 with heart yearn 4 from limit DE.Same at cross part 9 and cross part 7, it is light filter 10 that disjunction heart yearn 4 is provided with described wavelength selection light filter, and light filter 10 is the dichroic filters that for example are made of dielectric multi-layer optical thin film.In addition, the angle that light filter 10 is regulated relative heart yearn 4 and heart yearn 6 is so that advance in heart yearn 4 from the light of heart yearn 6 incidents by light filter 10 reflections.
Represented the example that heart yearn 4～6 is made of 3 heart yearn portions respectively among Fig. 1, but be not limited to this that number that constitutes the heart yearn of heart yearn 4～6 can be one or more.When many heart yearn portions were set, its advantage was to make corresponding 1 radio frequency channel of each heart yearn portion, can constitute multi-channel light supply apparatus and heart yearn treating apparatus.This is suitable during head wearing type display described later etc. in being applied to embodiment 4.
Limit AB is provided with the light incident or the outgoing end face 11 of heart yearn 4, and limit CD is provided with the light outgoing or the incident end face 14 of heart yearn 4.In addition, limit DE is provided with the light incident or the outgoing end face 12 of heart yearn 5, and the light incident of heart yearn 6 or outgoing end face 13.These light incident outgoing end faces, as under the situation of photosynthetic wave apparatus, light incident or outgoing end face 11～13 are used as light-incident end at optical waveguide device 18, and light outgoing or incident end face 14 are used as the light exit side face.In addition, be used as at optical waveguide device 18 under the situation of light wave splitter device, light outgoing or incident end face 14 are as light-incident end, and light incident or outgoing end face 11～13 are used respectively as the light exit side face.
Optical waveguide device 19 shown in Fig. 1 (b) when limit GH is coincided with the limit BC of optical waveguide device 18, is to have optical waveguide device about this symmetrical relation in limit with optical waveguide device 18.Very clear, optical waveguide device 19 has the function same with optical waveguide device 18.
Fig. 2 has been to use the planimetric map of the light supply apparatus 20 of optical waveguide device 18, and Fig. 3 is the sectional view of light supply apparatus 20 of the 2A-2A position of Fig. 2.
In this light supply apparatus 20, for the light-incident end 11 of heart yearn 4, the light-incident end 12 of heart yearn 5 and the light-incident end 13 of heart yearn 6, the LED that is respectively arranged with the end face light emitting-type is red light light-emitting component 21, green light light-emitting component 22 and blue light light-emitting component 23.And, as light filter 8 red light is seen through and the light filter of reflects green, as light filter 10 red light and green light are seen through and the light filter of reflect blue light.
The action of light supply apparatus 20 is as follows.
Red light light-emitting component 21, green light light-emitting component 22 and blue light light-emitting component 23 when supplying with driving power by terminal electrode 25, are launched R (red), G (green) and B (indigo plant) primaries respectively.From the light of each light-emitting component outgoing, respectively from being input to heart yearn 4～6 with their opposed light-incident ends 11～13 (, not shown among Fig. 2) with reference to Fig. 1.
Described first incident light of propagating via heart yearn 4 is a red light, sees through light filter 8, and then also sees through from light filter 10, advances through heart yearn 4 inward-bound light outgoing end faces 14.The green light of described second incident light of propagating via heart yearn 5 is reflected by light filter 8, advances to heart yearn 4 conversion forward marches from heart yearn 5, sees through from light filter 10, advances via heart yearn 4 inward-bound light outgoing end faces 14.Described the 3rd incident light of propagating via heart yearn 6 is a blue light, is reflected by light filter 10, advances to heart yearn 4 conversion forward marches from heart yearn 6, advances via heart yearn 4 inward-bound light outgoing end faces 14.
Like this, red light, green light and blue light are directed into the heart yearn 4 between light filter 10 and the light exit side face 14, so, in process is advanced in this zone by being closed ripple, close the glistening light of waves from light exit side face 14 by outgoing.
In the present embodiment, as mentioned above owing on both sides light waveguide-layer, that intersect mutually, light-incident end 11～13 is set with described acute angle, so even can form curved portion is not set on heart yearn 4～6 also can be with the photosynthetic wave structure of incident.Different with conventional example, because on heart yearn 4～6, do not need to be provided with curve part, so can under the situation of the increase of not following light loss, make optical waveguide device 18 and light supply apparatus 20 miniaturizations.
And, because light is changed to described acute angle, equals 45 degree in this embodiment, so light is 22.5 degree by the incident angle of light filter 8 or light filter 10 reflex times from heart yearn 5 or heart yearn 6 angle when the heart yearn 4 conversion forward marches.This is half of incident angle 45 degree under the situation of comparative example, so compare with comparative example, can reduce the polarization interdependence of the reflectivity and the transmission coefficient of light filter, the light that does not limit for the sort of polarization of LED, accomplish to allow the transmittance of a wavelength in narrow wavelength coverage, and allow under the situation of light reflection of another wavelength, can be suppressed to the loss of the light that causes very for a short time, can divide the light wavelength of the light wavelength of transmission and reflection with narrower wavelength coverage.
The light supply apparatus 20 of present embodiment works as following spot light device: this spot light device can be closing ripple from R (red), the G (green) of red light light-emitting component 21, green light light-emitting component 22 and 23 outgoing of blue light light-emitting component and B (indigo plant) primaries and from the outgoing of heart yearn end face.
In addition, light supply apparatus 20 is supplied with the driving power of each light-emitting component by independent control, the luminous intensity of red light light-emitting component 21, green light light-emitting component 22 and blue light light-emitting component 23 can be independently controlled, the panchromatic glistening light of waves that closes that produces by the colour mixture of primaries can be obtained.This outgoing beam can be as pointolite described later in embodiment 4, miniscope device that can panchromatic demonstration.
Fig. 4 is the planimetric map of the part of explanation optical waveguide device 18 and 19 manufacturing process.When on silicon wafer 90 grades, forming optical waveguide device 18, when in order to make optical waveguide device as much as possible by a wafer 90, shown in Fig. 4 (a), be optical waveguide device 19 combinations of left-right symmetric relation with optical waveguide device 18 with it, when barbed portion being set on both being triangle KFA and triangle LDI, integral body forms rhombus KJLE.And shown in Fig. 4 (b), light waveguide-layer is carried out composition in the mode of seamlessly laying this rhombus from the teeth outwards, and afterwards, cut along line 91～95, cut out optical waveguide device 18 and optical waveguide device 19 as independent small pieces.
Like this, pentagonal optical waveguide device, a plurality of light wave device chips 18 and 19 seldom can be made in high productivity ground by overall cutting in the zone of the wafer of waste.In addition, when cutting, though produce distortion sometimes in the bight, in the present embodiment owing to be that part on the limit that is difficult to deform is provided with light incident outgoing end face, so form the structure of the influence that is not subject to cut apart the distortion that causes.
Have again, in the present embodiment, limit BA becomes miter angle with limit DE, angle DEA is 90 degree, so quadrilateral KJLE is a square, but is the optical waveguide device of general pentagon type, with the optical waveguide device of pentagon type that has left-right symmetric relation with it simultaneously by totally cutting out in batch, quadrilateral KJLE so long as rhombus just can.But, A, F, I, D must be respectively the mid points of limit EK, limit KJ, limit JL, limit LE.
Do like this, have the light receiving element that the light-emitting component that can use surface-emitting type and face receive the light type.For example, the LED of surface-emitting type, easy to manufacture, cheap, commercially available kind is also abundant, good on high frequency characteristics, easy modulation, install also easy.In addition, light receiving elements such as phototransistor also receive the element of light type based on face, and it is also easy to install.
Fig. 5 is based on the planimetric map of the light supply apparatus 30 of embodiment 2, and Fig. 6 is the sectional view of light supply apparatus 30 of the 5A-5A line position of Fig. 5.In light supply apparatus 30, the light-incident end 17 of the light-incident end 15 of the heart yearn 4 that forms with 45 degree that tilt, the light-incident end 16 of heart yearn 5 and heart yearn 6 is opposed, and the LED that is respectively arranged with surface-emitting type is red light-emitting component 31, green luminousing element 32 and blue light emitting device 33.And, identical with embodiment 1, use as light filter 8 to allow red light transmission and the light filter of reflects green, as light filter 10, use to allow red light and green light transmission and the light filter of reflect blue light.
The action of light supply apparatus 20 is as follows.
Red light light-emitting component 31, green light light-emitting component 32 and blue light light-emitting component 33 are then launched the primaries of R (red), G (green) and B (indigo plant) respectively when being supplied to driving power by terminal electrode 34.From the light of each light-emitting component outgoing to the vertical direction outgoing, respectively by with their opposed 45 degree oblique light incident end faces 14～16 to horizontal direction conversion light path, be directed in the heart yearn 4～6.
Identical with embodiment 1 afterwards, the red light of being propagated by heart yearn 4 sees through from light filter 8, and then also sees through from light filter 10, advances by heart yearn 4 inward-bound light outgoing end faces 14.The green light of being propagated by heart yearn 5 is reflected by light filter 8, advances to heart yearn 4 from heart yearn 5 conversion forward marches, sees through light filter 10 and advances by heart yearn 4 inward-bound light outgoing end faces 14.The blue light of being propagated by heart yearn 6 is reflected by light filter 10,, advances by heart yearn 4 inward-bound light outgoing end faces 14 to heart yearn 4 conversion forward marches from heart yearn 6.
Like this, red light, green light and blue light are directed into the heart yearn 4 between light filter 10 and the light exit side face 14, so, in the process of advancing in this zone by being closed ripple, close the glistening light of waves from this outgoing end face 14 by outgoing.
In the light supply apparatus 30 of present embodiment, identical with embodiment 1, because the light-incident end 15～17 of heart yearn 4～6 is set on both sides light waveguide-layer, that intersect with described acute angle mutually, even curved portion is not set on heart yearn 4～6 can makes the photosynthetic wave structure of incident yet so can form, can under the situation of the increase of not following light loss, realize the miniaturization of optical waveguide device 28 and light supply apparatus 30.And, light is 22.5 degree by the incident angle of light filter 8 or light filter 10 reflex times, be half of the situation of comparative example, so compare with comparative example, can reduce the polarization interdependence of the reflectivity and the transmission coefficient of light filter, for the sort of light that does not limit polarization of LED, accomplish to allow the transmittance of a wavelength in narrow wavelength coverage, and allow under the situation of light reflection of another wavelength, can be suppressed to the loss of the light that causes very for a short time, can divide the light wavelength of transmission and the light wavelength of reflection with narrower wavelength coverage.
The light supply apparatus 30 of present embodiment works as following spot light device: this spot light device can be closing ripple from R (red), the G (green) of red light light-emitting component 31, green light light-emitting component 32 and 33 outgoing of blue light light-emitting component and B (indigo plant) primaries and from the outgoing of heart yearn end face.In addition, the driving power that light supply apparatus 30 is supplied with to each light-emitting component by independent control, the luminous intensity of red light light-emitting component 31, green light light-emitting component 32 and blue light light-emitting component 33 can be independently controlled, the panchromatic glistening light of waves that closes that produces by trichromatic colour mixture can be obtained.
Optical waveguide device 28 and roughly the same with the manufacturing process and the embodiment 1 of its symmetrical optical waveguide device 29, and in order to form 45 degree inclined end faces on the Waveguide end face of limit AB and limit DE, cutting needs change.That is, in the present embodiment, in Fig. 4, though rule 91 and 92, identical with embodiment 1, cut off with common blade, while forming 45 degree inclined end faces, the blade of 93, the 94 and 95 usefulness V-shapes of ruling cuts off.Like this, the wafer area of waste is also very little, can make a plurality of optical waveguide device chips 28 and 29 by totally cutting high efficiency ground in batches.
Fig. 7 is based on the planimetric map of the signal conditioning package 40 of embodiment 2.Signal conditioning package 40 is used to make the incident light partial wave that for example is made of red light, green light and blue light, thereby detects purposes such as intensity separately.In signal conditioning package 40, incident light is from being set at light-incident end 14 incidents of the heart yearn 4 on the CD of limit, by the red light behind the partial wave, green light and blue light respectively from being arranged at light exit side face 15～17 outgoing of heart yearn 4～6.
Light exit side face 15～17, as mentioned above, be formed on the reflection end face that 45 degree tilt, mutually opposed with each light exit side face 15～17, be respectively arranged with red light receiving element 41, green light receiving element 42 and blue light receiving element 43 that face receives the phototransistor of light type.And, identical with embodiment 1, use as light filter 8 to allow red light transmission and the light filter of reflects green, use as light filter 10 to allow red light and green light transmission and the light filter of reflect blue light.
The action of signal conditioning package 40 is as follows.
By incident light light-incident end 14 incidents, that constitute by red light, green light and blue light, propagate via heart yearn 4, and to light filter 10 incidents.At this, the blue light that is included in the incident light is reflected by light filter 10,, advances by heart yearn 6 inward-bound light outgoing end faces 17 to heart yearn 6 conversion forward marches from heart yearn 4.On the other hand, red light and green light see through from light filter 10, advance in heart yearn 4.Then, propagate the red light of coming and green light to light filter 8 incidents from heart yearn 4, here green light is reflected by light filter 8, from heart yearn 4 to heart yearn 5 conversion forward marches, advance by heart yearn 5 inward-bound light outgoing end faces 16, red light is advanced from heart yearn 4 inward-bound light outgoing end faces 15 from light filter 8 transmissions.And, arrived red light, green light and the blue light of each light exit side face 15～17, respectively by to the vertical lower reflection, detect intensity by light receiving element 41～43.
The signal conditioning package 40 of present embodiment, because the light exit side face 15～17 of heart yearn 4～6 is set on both sides light waveguide-layer, that intersect with described acute angle mutually, even the structure that curved portion also can make the outgoing of incident light partial wave is not set on heart yearn 4～6, under the situation of the increase of not following light loss, can allow signal conditioning package 40 miniaturizations so can form.And, light is 22.5 degree by the incident angle of light filter 8 or light filter 10 reflex times, be half of the situation of comparative example, so compare with comparative example, can reduce the polarization interdependence of the reflectivity and the transmission coefficient of light filter, the light that does not limit for the sort of polarization of LED, accomplish to allow the transmittance of a wavelength in narrow wavelength coverage, and allow under the situation of light reflection of other wavelength, can be suppressed to the loss of the light that causes very for a short time, can divide the light wavelength of the light wavelength of transmission and reflection in narrower wavelength coverage.
Fig. 8 is based on the planimetric map of the optical waveguide device 50 of embodiment 3.In this optical waveguide device 50, on substrates 1 (not shown) such as for example silicon, be formed with the light waveguide-layer 52 that the conjugant by covering 53 and heart yearn 54～56 constitutes, burying the waveguide heart yearn between wrap and the upper clad layer down.
Light waveguide-layer 2, identical with embodiment 1, be that organic solvent is made for example with propylene, the refractive index of covering 53 is 1.505, and the refractive index difference Δ n of heart yearn 54～56 and covering 53 is 0.8%, and the cross section of heart yearn 54～56 is squares of 10 μ m * 10 μ m.
Covering 53 has the shape of tetragonal ABCD, by described one side or described first while being AB, described second while being BC, described opposed edge or the described the 3rd while being CD and described another side or the described the 4th DA constitutes while being.In addition, angle ABC and angle BCD are 90 degree, and angle CDA is 135 degree, one side described another side is limit DA and described to be limit BA intersect with the acute angles of 45 degree.
Described first heart yearn is a heart yearn 54, and the limit AB that makes peace greatly from limit AB to limit CD vertically is set to linearity, described second heart yearn be heart yearn 55 and limit DA generally perpendicularly, be set to linearity to cross part 57 with heart yearn 54 from limit DA.At cross part 57, it is light filter 8 that disjunction heart yearn 54 is provided with described wavelength selection light filter.Light filter 8 as described in the enforcement mode 1, be for example constitute by dielectric multi-layer optical thin film, only reflect the light of presetted wavelength scope and allow the light transmissive dichroic filter of other wavelength.Regulate the angle of light filter 8 relative heart yearns 54 and 55, so that enter in the heart yearn 54 from heart yearn 55 incidents, the light that reflects by light filter 8.
And described quad is that heart yearn 56 is set to linearity, it with limit AB generally perpendicularly, from limit AB to parallel with heart yearn 54 with the cross part 58 of heart yearn 55.At cross part 58, identical with cross part 67, disjunction heart yearn 55, being provided with described wavelength, to select light filter be light filter 10, and light filter 10 for example is the dichroic filter that is made of dielectric multi-layer optical thin film.In addition, regulate the angle of light filter 10 relative heart yearns 55 and heart yearn 56, so that from heart yearn 56 incidents and the light that is reflected by light filter 10 advances in heart yearn 55.
In Fig. 8, represented the example that heart yearn 54～56 is made of 3 heart yearn portions respectively, but be not limited thereto that the heart yearn number that constitutes heart yearn 54～56 can be single or multiple.When being provided with a plurality of heart yearn portion, then allow each heart yearn portion and 1 radio frequency channel correspondence, its advantage is to constitute multi-channel light supply apparatus and signal conditioning package.
Limit AB is provided with the light incident of heart yearn 54 or the light incident or the outgoing end face 63 of outgoing end face 61 and heart yearn 56, and limit CD is provided with the light outgoing or the incident end face 64 of heart yearn 54.In addition, limit DA is provided with the light incident or the outgoing end face 62 of heart yearn 55.These light incident outgoing end faces, under the situation that optical waveguide device 50 is used as photosynthetic wave apparatus, light incident or outgoing end face 61～63 are used as light-incident end, and light outgoing or incident end face 64 are used as the light exit side face.And under the situation that optical waveguide device 50 is used as the light wave splitter device, light outgoing or incident end face 64 are used as light-incident end, and light incident or outgoing end face 61～63 are used as the light exit side face.
Fig. 9 has been to use the planimetric map of the light supply apparatus 60 of optical waveguide device 50.In this light supply apparatus 60 and the light-incident end 61 of heart yearn 54, the light-incident end 62 of heart yearn 55 and the light-incident end 63 of heart yearn 56 (61～63 with reference to Fig. 8; Not shown in Fig. 9) mutually opposed, the LED that is respectively arranged with the end face light emitting-type is red light light-emitting component 21, green light light-emitting component 22 and blue light light-emitting component 23.And, use as light filter 8 to allow red light transmission and the light filter of reflects green, use as light filter 10 to allow red light and green light transmission and the light filter of reflect blue light.
The action of light supply apparatus 60 is as follows.
Red light light-emitting component 21, green light light-emitting component 22 and blue light are luminous 23, when by the terminal feeding driving power, launch the primaries of R (red), G (green) and B (indigo plant) respectively.The light of each light-emitting component emission is respectively from importing heart yearns 54～56 with their opposed light-incident ends 61～63.
Described first incident light of propagating via heart yearn 54 is a red light, from light filter 8 transmissions, and then from light filter 10 transmissions, advances via heart yearn 54 inward-bound light outgoing end faces 64.Described second incident light of propagating via heart yearn 55 is a green light, advances from light filter 10 transmissions, is reflected by light filter 8,, advances by heart yearn 54 inward-bound light outgoing end faces 64 to heart yearn 54 conversion forward marches from heart yearn 55.Described the 3rd incident light of propagating via heart yearn 56 is a blue light, reflected by light filter 10, to heart yearn 55 conversion forward marches, reflected by light filter 8 once more from heart yearn 56,, advance to heart yearn 54 conversion forward marches from heart yearn 55 by heart yearn 54 inward-bound light outgoing end faces 64.
Like this, red light, green light and blue light are directed into the heart yearn 4 between light filter 8 and the light exit side face 64, so closed ripple in the process of advancing in this zone, close the glistening light of waves from 64 outgoing of light exit side face.
In embodiment, as mentioned above, owing on both sides light waveguide-layer, that intersect mutually, light-incident end is set, so curved portion is not set on heart yearn 54～56 also can makes the photosynthetic wave structure of incident even can constitute with described acute angle.Different with conventional example, because need on heart yearn 54～56, curve part be set, realize the miniaturization of optical waveguide device 50 and light supply apparatus 60 so can not follow the increase of light loss.
And light is changed to described acute angle, equals 45 degree in this embodiment, so light is 22.5 degree by the incident angle of light filter 8 or light filter 10 reflex times from heart yearn 55 or heart yearn 56 angle when the heart yearn 54 conversion forward marches.Half of incident angle 45 degree when this becomes comparative example, so compare with comparative example, can reduce the polarization interdependence of the reflectivity and the transmission coefficient of light filter, for the not limited light of this polarization of LED, can to allow in narrow wavelength coverage a wavelength transmittance and to allow the loss of the light that the light reflex time of another wavelength causes be suppressed to very little, can divide the light wavelength of transmission and the light wavelength of reflection with narrower wavelength coverage.
The light supply apparatus 60 of present embodiment works as the spot light device, and it can be from R (red), the G (green) of red light light-emitting component 21, green light light-emitting component 22 and 23 outgoing of blue light light-emitting component and the photosynthetic ripple of these three primary colors of B (indigo plant) and from the outgoing of heart yearn end face.
In addition, light supply apparatus 60 is supplied with the driving power of each light-emitting component by independent control, the luminous intensity of red light light-emitting component 21, green light light-emitting component 22 and blue light light-emitting component 23 can be independently controlled, the panchromatic glistening light of waves that closes can be obtained based on the colour mixture of primaries.This outgoing beam can be as the pointolite of miniscope that can panchromatic demonstration described later in embodiment 4.
Figure 10 is the planimetric map of a part of the manufacturing process of explanation optical waveguide device 50.On silicon wafer 90 grades, form optical waveguide device 50 the time, in order to make optical waveguide device as much as possible by a wafer 90, shown in Figure 10 (a), with another glistening light of waves waveguide assembly 50 combinations, if AB=2CD, so that both add when barbed portion is triangle AD ' C ' and triangle CA ' D the whole rectangle ABA ' B ' that forms.And, seamlessly to lay this rectangular mode composition light waveguide-layer from the teeth outwards,, cut off along scribe line 96～99 by cutting, cut out optical waveguide device 50 as independent small pieces.
In the present embodiment because angle ABC and angle BCD are made as 90 degree, so quadrilateral ABA ' B ' becomes rectangle.Even angle ABC and angle BCD are the angles beyond the right angle, do not change as the function of optical waveguide device, so usually as long as quadrilateral ABA ' B ' is a parallelogram yet.In this case, in order totally to cut out in batch, also must be AB=2CD.The optical waveguide device of this quadrilateral type, the zone of the wafer of waste is very little, can make a plurality of optical waveguide device chips 50 by overall cutting high productivity ground.
Have, identical with embodiment 2, when wanting that incident end face 61～63 made inclined end face, as long as the common blade of scribe line 96 and 97 usefulness cuts off, the blade cut-out of scribe line 98 and 99 usefulness V-shapes gets final product again.
From the glistening light of waves that closes of the light supply apparatus outgoing of above-mentioned embodiment 1～3 is to can be used as the light that pointolite uses.Present embodiment is the example that this light supply apparatus is applied to miniscopes such as retinal display.
Figure 11 is the key diagram of expression based on the structure of the head wearing type display (HMD) of embodiments of the present invention 4.In this head wearing type display 70, from emergent light 71 formation unit picture element on retina 75 of 30 outgoing of the light supply apparatus shown in Fig. 5.At this moment, supply with the driving power of each light-emitting component by control corresponding to picture signal, regulate the luminous intensity of red light light-emitting component 21, green light light-emitting component 22 and blue light light-emitting component 23, can form the unit picture element that can carry out panchromatic demonstration by trichromatic colour mixture.
And, emergent light 71 from light supply apparatus 30, scioptics 72 etc., imaging on scanning board (the scanned image plane) 73 of scanister, behind scanning board 73, utilize the lens 74 of projection optics system etc., be formed into picture point (luminous point) having on user's the retina 76 of eyeball 75 of optical conjugate relation with this scanning board 73.The action of the scanning board 73 that this imaging point utilization and picture signal are synchronous, two-dimensional scan on retina 76 forms raster image on retina.This raster image of user's perception can personal feeling be full of the image that is rich in telepresenc.
Have, this head wearing type display 70 by be contained in projector or PDA (portable information apparatus), camera, computing machine, game machine etc. with the state group of installing as sunglasses, can provide small-sized image device again.
Abovely the present invention has been described, but the present invention is not subjected to any restriction of these examples according to embodiment, in the scope of the purport that does not break away from invention, certainly suitably change.
For example, only shown here and used the example of the heart yearn on the straight line, but be not limited thereto, also curve part can be set on heart yearn suitably as required.In addition,, represented to form the method for each small pieces by overall cutting as ducting layer formation method, thereby but also can carry out composition with optics processing and form each small pieces, perhaps make each small pieces with the impact briquetting method.
Light supply apparatus of the present invention and display device can be applied to, provide small-sized, light weight, cheaply, expect as the display device of portable electric appts, retina display device etc. can the colored display device that shows.
Claims (18)
1, a kind of optical waveguide device, its first heart yearn and be engaged in covering with second heart yearn that this first heart yearn intersects, cross part at these heart yearns is provided with the wavelength of above-mentioned first heart yearn disjunction selection light filter, the different multi-beam of wavelength is closed ripple or partial wave, it is characterized in that, one side with respect to the described covering of light incident that comprises described first heart yearn or outgoing end face, the described first heart yearn approximate vertical is extended, on the opposed edge of the described covering relative, contain the light outgoing or the incident end face of described first heart yearn with described one side; Contain the another side of the described covering of the light incident of described second heart yearn or outgoing end face, one side be configured to towards acutangulating with described, described second heart yearn and described another side generally perpendicularly extend to described cross part.
2, optical waveguide device according to claim 1, wherein, described covering has the polygonal shape that is made of 4 limits at least, disposed by almost parallel ground as first limit on described one side with as the 3rd limit of described opposed edge, generally perpendicularly dispose second limit with described first limit and described the 3rd limit, be configured to towards acutangulating with described first limit as the 4th limit of described another side; Described first heart yearn roughly is set to linearity from described first limit to described the 3rd limit; Described second heart yearn roughly is set to linearity from described the 4th limit to described cross part.
3, optical waveguide device according to claim 2, its following formation: from being set at the light-incident end on described first limit, propagate first incident light of coming via described first heart yearn, select light filter to see through from described wavelength, forwards advance, on the other hand, from being set at the light-incident end on described the 4th limit, propagate second incident light of coming via described second heart yearn, select light filter to reflect by described wavelength to described first heart yearn, described first incident light and described second incident light are closed ripple at described first heart yearn, from the light exit side face outgoing of described first heart yearn that is set at described the 3rd limit; Perhaps, constitute: from the light-incident end of described first heart yearn that is set at described the 3rd limit, propagate the incident light of coming via described first heart yearn, seen through from the light of the light exit side face outgoing of described first heart yearn that is set at described first limit for select light filter from described wavelength by partial wave, with select the light filter reflection by described wavelength, from the light of the light exit side face outgoing of described second heart yearn that is set at described the 4th limit.
4, optical waveguide device according to claim 2, wherein, described first heart yearn by a plurality of described wavelength of configuration before and after mutually select light filter in a plurality of positions by disjunction, from described a plurality of disjunctions position to described the 4th limit, at least abreast and be approximately perpendicular to described the and be provided with quadrilateral and described second heart yearn and the 3rd heart yearn that described first heart yearn intersects, at least also light is closed ripple or partial wave by described the 3rd heart yearn.
5, optical waveguide device according to claim 2, wherein, select the position of light filter described second heart yearn to be set from the described wavelength of described first heart yearn of disjunction to described the 4th limit, this second heart yearn of disjunction is provided with second wavelength and selects light filter, from the disjunction of described second heart yearn to described first limit, parallel with described first heart yearn and be approximately perpendicular to described first limit quad that intersects with described second heart yearn is set, at least also light is closed ripple or partial wave by described quad.
6, optical waveguide device according to claim 4, wherein, described first heart yearn, described second heart yearn, described the 3rd heart yearn and described quad are made of a plurality of heart yearn portion respectively.
7, optical waveguide device according to claim 5, wherein, described first heart yearn, described second heart yearn, described the 3rd heart yearn and described quad are made of a plurality of heart yearn portion respectively.
8, optical waveguide device according to claim 2, wherein, described polygon is the pentagon with the 5th limit of intersecting with described first limit and described the 4th limit, vertical halving line with described second limit is an axis of symmetry, and described first limit and described the 3rd limit and described the 4th limit and described the 5th limit are configured in the position of symmetry.
9, optical waveguide device according to claim 8, wherein, described the 3rd limit and described the 4th limit angulation are 135 degree, described the 4th limit and described the 5th limit angulation are 90 degree.
10, optical waveguide device according to claim 2, its following formation, at least each heart yearn end face that is provided with on described first limit and described the 4th limit forms on the reflection end face of inclination, and is inner or outside to each heart yearn photoconduction by these reflection end faces.
11, optical waveguide device according to claim 2, wherein, described first limit, described second limit, described the 3rd limit, described the 4th limit and described the 5th limit form by the common clad material that cuts off described each heart yearn and this each heart yearn is set.
12, optical waveguide device according to claim 7, wherein, described first limit, described second limit, described the 3rd limit, described the 4th limit and described the 5th limit form by the common clad material that cuts off described each heart yearn and this each heart yearn is set.
13, a kind of light supply apparatus, it has optical waveguide device, this optical waveguide device closes ripple or partial wave to the different a plurality of light of wavelength, its first heart yearn and be engaged in covering with second heart yearn that this first heart yearn intersects, be provided with the wavelength selection light filter of described first heart yearn of disjunction at the cross part of these heart yearns
In the described optical waveguide device, one side with respect to the described covering of light incident that contains described first heart yearn or outgoing end face, the described first heart yearn approximate vertical is extended, and comprises the light outgoing or the incident end face of described first heart yearn at the opposed edge with the opposed described covering in described one side; Contain the another side of the described covering of the light incident of described second heart yearn or outgoing end face, one side be configured to towards acutangulating with described, described second heart yearn and described another side generally perpendicularly extend to described cross part; And, on described one side and described another side of described optical waveguide device, at least with the opposed light source that disposes respectively of the described light-incident end of described first heart yearn and described second heart yearn, closed ripple from described light source to the light of described incident end face incident, and from the described light exit side face outgoing of described first heart yearn that is arranged at described opposed edge.
14, light supply apparatus according to claim 13, wherein, described light source uses light emitting diode or laser diode.
15, light supply apparatus according to claim 13, wherein, described light source uses the light source of emission blue light, green light and red light.
16, a kind of optical information processing device, it has optical waveguide device, this optical waveguide device closes ripple or partial wave to the different a plurality of light of wavelength, its first heart yearn and be engaged in covering with second heart yearn that this first heart yearn intersects, be provided with the wavelength selection light filter of described first heart yearn of disjunction at the cross part of these heart yearns
In the described optical waveguide device, one side with respect to the described covering of light incident that contains described first heart yearn or outgoing end face, the described first heart yearn approximate vertical is extended, and comprises the light outgoing or the incident end face of described first heart yearn at the opposed edge with the opposed described covering in described one side; Contain the another side of the described covering of the light incident of described second heart yearn or outgoing end face, one side be configured to towards acutangulating with described, described second heart yearn and described another side generally perpendicularly extend to described cross part;
On described one side and described another side of described optical waveguide device, at least the described light exit side with described first heart yearn and described second heart yearn disposes light receiving element respectively in the face of putting, from the light of the described light-incident end incident of described first heart yearn that is arranged at described opposed edge by partial wave after, receive by described light receiving element.
17, a kind of optical information processing device, it has optical waveguide device, this optical waveguide device closes ripple or partial wave to the different a plurality of light of wavelength, its first heart yearn and be engaged in covering with second heart yearn that this first heart yearn intersects, be provided with the wavelength selection light filter of described first heart yearn of disjunction at the cross part of these heart yearns
In the described optical waveguide device, one side with respect to the described covering of light incident that contains described first heart yearn or outgoing end face, the described first heart yearn approximate vertical is extended, and comprises the light outgoing or the incident end face of described first heart yearn at the opposed edge with the opposed described covering in described one side; The another side that contains the described covering of the light incident of described second heart yearn or outgoing end face, be configured to towards acutangulating with described one side, described second heart yearn and described another side generally perpendicularly extend to described cross part, on described one side and described another side of described optical waveguide device, at least have to the light of the described light exit side face incoming signal light of described first heart yearn and described second heart yearn to go into injection device and receive from the optical pickup apparatus that closes the glistening light of waves of the described light exit side face outgoing of described first heart yearn that is arranged at described opposed edge.
18, optical information processing device according to claim 17, it is as constituting by scanister scanning and the described display that closes the glistening light of waves of projection.
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| JP2004180500A JP2006003673A (en) | 2004-06-18 | 2004-06-18 | Optical waveguide device, light source device and optical information processing device |
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| CN1715971A true CN1715971A (en) | 2006-01-04 |
| CN1330987C CN1330987C (en) | 2007-08-08 |
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| CN102854580A (en) * | 2011-07-28 | 2013-01-02 | 索尔思光电（成都）有限公司 | Apparatuses for reducing the sensitivity of an optical signal to polarization and methods of making and using the same |
| CN106990541A (en) * | 2016-01-20 | 2017-07-28 | 光研公司 | Optical multiplexer |
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| JP5798096B2 (en) * | 2012-08-14 | 2015-10-21 | 日本電信電話株式会社 | Arrayed waveguide grating router |
| JP6697423B2 (en) * | 2017-08-17 | 2020-05-20 | 日本電信電話株式会社 | Optical integrated circuit |
| JP7187148B2 (en) * | 2017-12-13 | 2022-12-12 | 日東電工株式会社 | optical waveguide |
| JP2021140005A (en) * | 2020-03-04 | 2021-09-16 | セーレンＫｓｔ株式会社 | Optical multiplexing device |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3298324B2 (en) * | 1994-09-06 | 2002-07-02 | ソニー株式会社 | Image display device |
| EP0754310A1 (en) * | 1995-02-07 | 1997-01-22 | LDT GmbH & Co. Laser-Display-Technologie KG | Combination splitting device composed of strip waveguides and uses thereof |
| JPH11295540A (en) * | 1998-04-07 | 1999-10-29 | Japan Aviation Electronics Ind Ltd | 2-wavelength optical multiplexer-demultiplexer |
-
2004
- 2004-06-18 JP JP2004180500A patent/JP2006003673A/en active Pending
-
2005
- 2005-06-09 TW TW94119084A patent/TWI282451B/en not_active IP Right Cessation
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102854580A (en) * | 2011-07-28 | 2013-01-02 | 索尔思光电（成都）有限公司 | Apparatuses for reducing the sensitivity of an optical signal to polarization and methods of making and using the same |
| CN106990541A (en) * | 2016-01-20 | 2017-07-28 | 光研公司 | Optical multiplexer |
Also Published As
| Publication number | Publication date |
|---|---|
| TW200610990A (en) | 2006-04-01 |
| TWI282451B (en) | 2007-06-11 |
| CN1330987C (en) | 2007-08-08 |
| JP2006003673A (en) | 2006-01-05 |
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