CN1698098A - Production method for magnetic recording medium and production device therefor - Google Patents
Production method for magnetic recording medium and production device therefor Download PDFInfo
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- CN1698098A CN1698098A CN 200480000193 CN200480000193A CN1698098A CN 1698098 A CN1698098 A CN 1698098A CN 200480000193 CN200480000193 CN 200480000193 CN 200480000193 A CN200480000193 A CN 200480000193A CN 1698098 A CN1698098 A CN 1698098A
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Abstract
A method of producing a magnetic recording medium and a production device therefore capable of producing a discrete type magnetic recording medium efficiently with the deterioration or the like of divided recording elements being prevented positively. The production device (40) for a magnetic recording medium comprises a recording layer processing means (42) for dividing a continuous recording layer into many divided recording elements by forming at plane-direction fine intervals many grooves in the intermediate element (10) of a magnetic recording medium formed with the continuous recording layer, a non-magnetic element filling means (48) for filling a non-magnetic element into grooves between divided recording elements, a flattening means (50) for flattening the surfaces of divided recording elements and a non-magnetic element, a protection layer forming means (52) for forming protection layers on divided recording elements and a non-magnetic element, and a vacuum retaining means (56) for housing the recording layer processing means (42), the non-magnetic element filling means (48), the flattening means (50) and the protection layer forming means (52) to retain the surrounding of the intermediate element (10) in a vacuum condition.
Description
Technical field
The present invention relates to the manufacture method and the manufacturing equipment of magnetic recording media.
Background technology
In recent years, improvement result as the microminiaturization of the development of the microminiaturization that comprises the magnetic particle that constitutes recording layer, new material and magnetic head treatment technology, magnetic recording media for example hard disk etc. increases significantly on recording density, and estimates will further improve aspect recording density in the future.
Yet, by routine improve technology for example the microminiaturization of magnetic particle improve recording density and reached its limit now, the discrete type magnetic recording media that wherein continuous recording layer is divided into the recording element of a plurality of separations, uses nonmagnetic body to fill groove between the recording element of these separations has then proposed (for example, to open publication number referring to the Jap.P. spy: flat 9-97419) as the example that can further improve the magnetic recording media of recording density.
Dry etching technology for example reactive ion etching is can be used for setting up the example of treatment technology of small partitioned portion (partitions) (for example, referring to the TOHKEMY publication number: flat 12-322710) in continuous recording layer.
In addition, the embedded technology of using wet processed for example those technology that are used for field of semiconductor manufacture (for example, open publication number: flat 13-323381) can be used for realizing above-mentioned non magnetic filling referring to the Jap.P. spy.
If it is poor level (level) to occur between the surface of recording element of separating and nonmagnetic body, can occurs for example instability of magnetic head floats and the problem that impurity gathers so, so preferably make the recording element of separation and the flattening surface of nonmagnetic body.Also can utilize the treatment technology that is used for field of semiconductor manufacture for example to carry out above-mentioned planarization operation based on CMP (cmp) technology of wet processed.
In addition, can use the wet-cleaned technology that is used for semiconductor and makes (for example, referring to the TOHKEMY publication number: flat 12-091290) remove impurity from the recording element surface of separating.
Yet, if being used for the dry ecthing type of technology of semiconductor fabrication process, former state handles continuous recording layer, the part of the recording element of Fen Geing is easy to occur degenerating for example problem such as oxidation and corrosion so.Through follow-up manufacturing after a while, the also degeneration of the recording element that can occur separating.In addition, during for example cleaning waited other wet processed, the effect of solvent etc. also can cause the problem of for example oxidation and corrosion in the some parts of the recording element of separating.Another problem that occurs is, uses wet process to increase the possibility that the recording element surface of separating is subjected to contaminating impurity.These of the recording element of separating are degenerated and pollution problems can cause information record and the loss of significance of reading.
In addition, other problem can occur in conjunction with dry process and wet process, promptly workpiece carries (intermediate of magnetic recording media (intermediate)) to become more difficult, and makes efficiency degradation.
In other words, because magnetic recording media has unique problem, comprise that magnetic material is tending towards being easy to the fact of oxidation, therefore for example using in other field in the semiconductor manufacturing effectively in production process of magnetic recording media, treatment technology can produce variety of issue, for example the problem of oxidation of magnetic material proves in view of the above and make very difficulty of discrete type magnetic recording media efficiently when the recording element that prevents to separate is degenerated.
Summary of the invention
The present invention considers the problems referred to above, its objective is manufacture method and manufacturing equipment that a kind of magnetic recording media is provided, can make the discrete type magnetic recording media effectively, prevents simultaneously any degeneration of the recording element separated reliably.
The present invention can solve top problem by working environment being maintained vacuum state and using dry process to carry out the processing of continuous recording layer.Aspect any degeneration of the recording element that prevents from reliably to separate; it is very effective that the recording element of separating is isolated fully with atmosphere, therefore preferably under working environment maintains the situation of vacuum state, carry out from the formation that is formed into protective seam of the recording element separated in steps.
In this manual, it is 0[Pa that term " vacuum " is not limited to air pressure] state, but be defined as pressure wherein from about 0[Pa] to 100[Pa] extremely hypobaric state in the scope.In addition, term " magnetic recording media " is not limited to only to use the magnetic force record and reads hard disk, floppy disk (registered trademark) and the tape etc. of information, but also comprise in conjunction with the Magnetooptic recording medium of magnetic and optical characteristics for example MO (magneto-optic) coil.
Therefore, as described belowly provide various one exemplary embodiment of the present invention.
(1) manufacture method of magnetic recording media comprises: the recording layer treatment step, its by in intermediate from the manufacturing process of magnetic recording media (this magnetic recording media by top on form continuous recording layer make) at substrate surface, form a plurality of grooves at in-plane with therebetween fine pitch, this continuous recording layer is divided into the recording element of a plurality of separations; The nonmagnetic body filling step is used to utilize nonmagnetic body to fill groove between the recording element of separating; Form step with protective seam, be used to form protective seam, recording element and nonmagnetic body that this protective seam protection is separated wherein carry out this recording layer treatment step under the situation that will maintain vacuum state around the environment of intermediate.
(2) manufacture method of the magnetic recording media of basis (1), wherein
Under the situation that will maintain vacuum state, carry out described recording layer treatment step, described nonmagnetic body filling step and described protective seam successively and form step around the environment of described intermediate.
(3) manufacture method of the magnetic recording media of basis (1) or (2), wherein
Between described recording layer treatment step and described nonmagnetic body filling step the dry process cleaning step is set, one of this dry process cleaning step using gases and plasma are used for removing impurity from the environment around the recording element of described separation.
(4) manufacture method of any one magnetic recording media of basis (1) to (3), wherein
Between described nonmagnetic body filling step and described protective seam formation step, planarisation step is set, is used to make the recording element of described separation and the flattening surface of described nonmagnetic body.
(5) manufacture method of the magnetic recording media of basis (4), wherein
Described planarisation step is dry plasma (dry plasma) step, the surface that this dry plasma step makes ion clash into the recording element and the described nonmagnetic body of described separation with the incident angle that is limited to the value in-10 ° to 15 ° scope and any one scope from 60 ° to 90 ° scope.
(6) manufacture method of the magnetic recording media of basis (5), wherein said dry plasma step is used ion beam milling.
(7) manufacture method of any one magnetic recording media of basis (1) to (6), wherein
In described recording layer treatment step, the CO gas of nitrilo compound that comprises interpolation by use is separated described continuous recording layer as the reactive ion etching of reacting gas.
(8) manufacture method of any one magnetic recording media of basis (1) to (7), wherein
In described nonmagnetic body filling step, by using described intermediate is applied the plasma CVD of bias power and any one method in the bias sputtering, utilize described nonmagnetic body to fill described groove between the recording element of described separation.
(9) manufacture method of the magnetic recording media of basis (8), wherein
Described nonmagnetic body filling step uses and comprise that the material of any one material of selecting is as described nonmagnetic body from the group that is made of oxide material, nitride material and non-magnetic non-crystalline material.
(10) manufacture method of the magnetic recording media of basis (9), wherein
Described nonmagnetic body filling step uses silicon dioxide as described nonmagnetic body.
(11) manufacture method of any one magnetic recording media of basis (8) to (10), wherein
Barrier film is set between described recording layer treatment step and described nonmagnetic body filling step forms step, this barrier film forms any one method in step use plasma CVD (chemical vapour deposition) method and the sputtering method, is used for forming barrier film on the recording element of described separation.
(12) manufacture method of the magnetic recording media of basis (11), wherein
Described barrier film forms the barrier film that step forms diamond-like-carbon (diamond-like carbon).
(13) a kind of manufacturing equipment of magnetic recording media comprises:
The recording layer treating apparatus, its by in intermediate from magnetic recording media manufacturing process (this magnetic recording media is made by form continuous recording layer on the top of substrate surface), form a plurality of grooves at in-plane with therebetween fine pitch, thereby this continuous recording layer is divided into the recording element of a plurality of separations; With
Vaccum retaining device, it holds described recording layer treating apparatus and will maintain vacuum state around the environment of described intermediate.
(14) manufacturing equipment of the magnetic recording media of basis (13), wherein
Nonmagnetic body filling device and protective seam are set in the inside of described vaccum retaining device form device; described nonmagnetic body filling device is used to utilize nonmagnetic body to fill described groove between the recording element of described separation, and described protective seam forms device and is used to form the recording element of the described separation of protection and the protective seam of described nonmagnetic body.
(15) manufacturing equipment of the magnetic recording media of basis (13) or (14), wherein
In described vaccum retaining device inside the dry process cleaning device is set, any one that is used for utilizing gas and plasma is from removing impurity around the environment of the recording element of described separation.
(16) manufacturing equipment of any one magnetic recording media of basis (13) to (15), wherein
Stop membrane formation device in the setting of the inside of described vaccum retaining device, this stops that membrane formation device is used for utilizing any one method of plasma CVD method and sputtering method to form barrier film on the recording element of described separation.
(17) manufacturing equipment of any one magnetic recording media of basis (13) to (16), wherein
In described vaccum retaining device inside planarizer is set, this planarizer is used to make the recording element of described separation and the flattening surface of described nonmagnetic body.
In this manual, use term " barrier film " to describe the recording element of the described separation of separation and the film of nonmagnetic body.
In addition, use term " diamond-like-carbon " (hereinafter being abbreviated as DLC) describe a kind of have comprise as the non crystalline structure of the carbon of major component and Vickers hardness at 200-8000kgf/mm
2Material in the scope.
Description of drawings
Fig. 1 is the block scheme that schematically shows according to the structure of the magnetic recording media manufacturing equipment of the embodiment of the invention.
Fig. 2 is illustrated in the side cross-sectional views of utilizing identical manufacturing equipment to handle the structure of magnetic recording media intermediate before;
Fig. 3 schematically shows the side cross-sectional views of utilizing identical manufacturing equipment to handle magnetic recording media structure afterwards;
Fig. 4 is that expression utilizes identical manufacturing equipment to make the process flow diagram of the step of magnetic recording media;
Fig. 5 is shown schematically in the side cross-sectional views of separated graphics being transferred to the 3rd mask layer above-mentioned intermediate shape afterwards;
Fig. 6 be shown schematically in removed the 3rd mask layer after those parts of recessed portion bottom surface, the side cross-sectional views of above-mentioned intermediate shape;
Fig. 7 be shown schematically in removed second mask layer after those parts of recessed portion bottom surface, the side cross-sectional views of above-mentioned intermediate shape;
Fig. 8 be shown schematically in removed first mask layer after those parts of recessed portion bottom surface, the side cross-sectional views of above-mentioned intermediate shape;
Fig. 9 is the side cross-sectional views that schematically shows the above-mentioned intermediate shape of the recording element that is formed with separation;
Figure 10 be shown schematically in after those parts of having removed first mask layer on the recording element upper surface of staying separation, the side cross-sectional views of above-mentioned intermediate shape;
Figure 11 is after the space that is shown schematically between the recording element of fill separating with nonmagnetic body, the side cross-sectional views of above-mentioned intermediate shape;
Figure 12 be shown schematically in after the flattening surface of the recording element that makes separation and nonmagnetic body, the side cross-sectional views of above-mentioned intermediate shape;
Figure 13 is the photo from atomic force microscope, shows the enlarged photograph from the surface of the recording element of the separation of the magnetic recording disk of an example of the present invention and nonmagnetic body;
Figure 14 is the photo from optical microscope, shows the enlarged photograph from the magnetic recording disk surface of identical instances;
Figure 15 is the photo from optical microscope, shows the enlarged photograph from the magnetic recording disk surface of comparative example.
Embodiment
Describe embodiments of the invention in detail below with reference to accompanying drawing.
Fig. 1 schematically shows the block scheme of structure that is used for the manufacturing equipment of magnetic recording media according to the embodiment of the invention.
At first, for the ease of understanding the structure of the manufacturing equipment that is used for magnetic recording media better, provide the description of the structure of magnetic recording media intermediate and magnetic recording media self simply.
As shown in Figure 2, magnetic recording media intermediate 10 comprises glass substrate 12, and this glass substrate 12 has lining 14, soft magnetosphere 16, oriented layer 18, continuous recording layer 20, first mask layer 22, second mask layer 24 and the 3rd mask layer 26 that forms successively thereon.
The material of lining 14 is Cr (chromium) or Cr alloy, and the material of soft magnetosphere 16 is Fe (iron) alloy or Co (cobalt) alloy, and the material of oriented layer 18 is CoO, MgO or NiO etc., and the material of continuous recording layer 20 is Co (cobalt) alloys.In addition, the material of each mask layer is the TiN (titanium nitride) that is used for first mask layer 22, the Ni (nickel) that is used for second mask layer 24 and the negative resist that is used for the 3rd mask layer 26 (by Sumitomo Chemical Co, the NEB22A that Ltd. makes).
As shown in Figure 3; magnetic recording media 30 is perpendicular recording, discrete type indicator; wherein the fine pitch that forms by the radial direction along track is divided into continuous recording layer 20 recording element 31 of a plurality of separations; nonmagnetic body 32 is filled the groove 33 between the recording element of separating 31, and protective seam 34 and lubricating layer 36 are formed on the top of the recording element 31 of separation and nonmagnetic body 32 successively.Barrier film 38 is formed between the recording element 31 and nonmagnetic body 32 of separation.
The material of nonmagnetic body 32 is SiO
2(silicon dioxide), the material of protective seam 34 and barrier film 38 all are the hard carbon filmss (hard carbon film) that is known as DLC as mentioned above, and the material of lubricating layer 36 is PFPE (PFPE).
With reference to figure 1, magnetic recording media manufacturing equipment 40 comprises again: recording layer treating apparatus 42 is used for forming the recording element of separating 31 by forming groove 33 at intermediate 10; Dry process cleaning device 44 is used for from removing the impurity cleaning device around the environment of the recording element of separating 31; What be used for forming barrier film 38 on the recording element of separating 31 stops membrane formation device 46; Be used for nonmagnetic body 32 and fill the nonmagnetic body filling device 48 of the groove 33 between the recording element of separating 31; Be used to make the planarizer 50 of the flattening surface of the recording element 31 of separation and nonmagnetic body 32; Be used on recording element of separating 31 and nonmagnetic body 32, forming the protective seam formation device 52 of protective seam 34; With hold recording layer treating apparatus 42, dry process cleaning device 44, stop membrane formation device 46, nonmagnetic body filling device 48, planarizer 50 and protective seam form device 52 and keep environment around the intermediate 10 to be in the vaccum retaining device 56 of vacuum state.
In addition, manufacturing equipment 40 comprises that also the lubricating layer that is used for that separated graphics transferred to the transfer device 58 on the 3rd mask layer 26 of magnetic recording media intermediate 10 and is used for forming lubricating layer 36 on the top of protective seam 34 forms device 54.Transfer device 58 and lubricating layer form the outside that device 54 is positioned at vacuum retaining device 56.
Recording layer treating apparatus 42 comprises: plasma processing apparatus 60 is used for handling the 3rd mask layer 26 by the plasma that utilizes oxygen, ozone or its mixed gas; Ion beam etching apparatus 62 is used for handling second mask layer 24 by the ion beam milling that utilizes Ar (argon) gas; The first reactive ion etching device 64 is used for by utilizing CF
4(fluomethane) gas or SF
6The reactive ion etching of (sulfur hexafluoride) gas is handled first mask layer 22; The second reactive ion etching device 66 is used for being added with NH by utilization
3The reactive ion etching of CO (carbon monoxide) gas of (ammonia) gas is handled continuous recording layer 20; With the 3rd reactive ion etching device 67, be used for by utilizing CF
4Gas or SF
6The reactive ion etching that gas carries out is removed recording element 31 lip-deep those parts that first mask layer 22 is stayed separation.
Dry process cleaning device 44 is the dry process cleaning devices that utilize plasma.
Stop that membrane formation device 46 is to be used to use CVD (chemical vapour deposition) to form the CVD device of DLC barrier film 38.
Nonmagnetic body filling device 48 is to be used to use bias sputtering to form SiO on the top of the recording element of separating 31
2The bias sputtering device of nonmagnetic body 32.
Planarizer 50 be used for by the ion beam milling that utilizes Ar gas make the dielectric surface planarization ion beam etching apparatus.
It is to be used to use CVD to form the CVD device of DLC protective seam 34 that protective seam forms device 52.
It is the applying devices that are used for by dip coating PFPE lubricating layer 36 that lubricating layer forms device 54.
Vaccum retaining device 56 comprises vacuum chamber 68 and the vacuum pump 70 that interconnects with vacuum chamber 68.
Transfer device 58 is that the compacting (press) that utilizes nano impression method (nano-imprint method) will utilize the figure (not shown) of lithography preparation to suppress and transfer on the 3rd mask layer 26 is installed.
The action of magnetic recording media manufacturing equipment 40 is described below.
Fig. 4 is the process flow diagram of the treatment scheme of expression magnetic recording media manufacturing equipment 40.
At first, preparation magnetic recording media intermediate 10.By use sputter form at the top of glass substrate 12 successively thickness as the lining 14 of 300-2000 , thickness as the soft magnetosphere 16 of 500-3000 , thickness as the oriented layer 18 of 30-300 , thickness as the continuous recording layer 20 of 100-300 , thickness as first mask layer 22 of 100-500 and thickness as second mask layer 24 of 100-300 , use spin coating or dipping to form thickness then to form this intermediate 10 as the 3rd mask layer 26 of 300-3000 .
Transfer device 58 uses the nano impression methods will transfer to the 3rd mask layer 26 of intermediate 10 with the pattern (type) of the separated graphics of the recording element 31 that is used for separating recessed portion corresponding, shown in Figure 5 then.
So far, intermediate 10 is transported in the vacuum chamber 68, and uses plasma processing apparatus 60 to handle the 3rd mask layer 26, removed the 3rd mask layer 26 those parts up to, as shown in Figure 6 in the recessed portion bottom surface.Also part has been removed the 3rd mask layer 26 those zones in the recessed portion outside, but has kept the level error between the basal surface of these other zones and recessed portion.
Then, use ion beam etching apparatus 62 to remove second mask layer 24 those parts, as shown in Figure 7 in the bottom surface of recessed portion.In this processing procedure, also removed a spot of first mask layer 22.In addition, although in those zones of recessed portion outside, still kept a small amount of the 3rd mask layer 26, but removed the 3rd mask layer 26 of significant proportion in these zones.
Then, use the first reactive ion etching device 64 to remove first mask layer 22 those parts, as shown in Figure 8 in the bottom surface of recessed portion.At this moment, removed the surplus of the 3rd mask layer 26 in those zones of recessed portion outside fully.In addition, although still kept a small amount of second mask layer 24 in those zones of recessed portion outside, but removed second mask layer 24 of significant proportion in these districts.
Then, use the second reactive ion etching device 66 to remove continuous recording layer 20 those parts in the bottom surface of recessed portion, utilize the groove 33 that between the recording element of separating 31, forms that continuous recording layer 20 is divided into the recording element 31 of a plurality of separations, (S1) as shown in Figure 9 thus.
In this processing procedure, also removed a spot of oriented layer 18.In addition, removed the surplus of second mask layer 24 in those zones of recessed portion outside fully, and removed first mask layer 22 in those zones significant proportion, that be arranged in the recessed portion outside, although still stay on a small quantity on the upper surface of recording element 31 of separation.
Utilize the 3rd reactive ion etching device 67 to remove this remaining first mask layer 22 fully, as shown in figure 10.
So far, use dry process cleaning device 44 to remove impurity (S2) from the surface of the recording element 31 of separation.
Then, as shown in figure 11, use the CVD device on the top of the recording element of separating 31, to form the DLC barrier film 38 of thickness, utilized the bias sputtering method then, use in the groove 33 of nonmagnetic body pad device 48 between the recording element of separating 31 and fill nonmagnetic body 32 (S4) as 10-200 .Form this nonmagnetic body 32, make it cover barrier film 38 fully.Because the recording element of separating 31 is blocked film 38 and covers and protection, so they can not degenerated in the bias sputtering process of nonmagnetic body 32.
Then, a part of using planarizer 50 to remove nonmagnetic body 32 by ion beam milling up to the upper surface of the recording element 31 that exposes separation, as shown in figure 12, makes the recording element 31 of separation and the flattening surface (S5) of nonmagnetic body 32 thus.In this processing procedure,, preferably the incident angle of Ar ion is set in respect to this surface in-10 to 15 ° the scope in order to ensure the high precision planarization.If yet in the nonmagnetic body filling step, having made the separation record element 31 with high-level flatness and the surface of nonmagnetic body 32, the incident angle of Ar ion can be set in so in 60-90 ° the scope.The pattern of the incident angle of this increase has increased processing speed, and can boost productivity.Although removed the nonmagnetic body 32 of recording element 31 tops of separating fully, the barrier film 38 on the upper surface of the recording element of separating 31 can be removed fully, and perhaps part can be kept perfectly.
Protective seam formation device 52 uses the CVD method to form the DLC protective seam 34 (S6) of thickness as 10-50 on the upper surface of recording element of separating 31 and nonmagnetic body 32 then, then this structure is transferred out vacuum chamber 68.
Then, using lubricating layer to form device 54 is that the PFPE lubricating layer 36 of 10 to 20 is coated on the top of protective seam 34 by infusion process with thickness.Finished the formation of magnetic recording media shown in Figure 3 30 like this.
Because in the formation and the processing that are in the recording element of separating under the state of vacuum 31 around the environment of intermediate 10, can prevent that therefore the recording element of separating in the processing procedure 31 from degenerating by oxidation or corrosion.
In addition; under the situation that continuous recording layer 20 is covered by each mask layer, intermediate 10 is transported in the vacuum chamber 68; and in case form the recording element of separating 31 in the inside of vacuum chamber 68; just carry out the filling of nonmagnetic body 32; and before being transferred out vacuum chamber 68, magnetic recording media 30 on the top of recording element of separating 31 and nonmagnetic body 32, forms protective seam 34; therefore the recording element of separating 31 (with continuous recording layer 20) always with atmosphere in isolation such as oxygen, this means even can prevent more reliably the degeneration of the recording element 31 separated.
In addition, because each step is all utilized dry process, therefore the problem that occurs in the time of can avoiding using wet process, for example surface contamination of the recording element 31 of the degeneration of the recording element 31 of the separation that causes by treating fluid or the separation that causes by the impurity in treating fluid or the cleaning fluid.
In other words, magnetic recording media manufacturing equipment 40 shows excellent reliability, and can prevent the degeneration in the forming process of the recording element of separating 31 reliably.
In addition, because each step is all utilized dry process, so the delivery ratio of workpiece is easier in conjunction with the technology of dry type and wet process in the process, this means that magnetic recording media manufacturing equipment 40 demonstrates high-caliber production efficiency.
In the present embodiment; all carry out from the step of the formation that etches into protective seam 34 of the 3rd mask layer 26 in vacuum chamber 68 inside; but the present invention is not limited to such setting; and as long as recording element of separating 31 and continuous recording layer 20 are degenerated with the recording element 31 that prevents to separate with isolated from atmosphere; before handling continuous recording layer 20, the step that is used to handle each mask also can be carried out in the outside of vacuum chamber 68.Yet, in the processing procedure of first mask layer 22, exposed the continuous recording layer 20 (referring to Fig. 9) of part, therefore preferably carry out the processing of first mask layer 22 in the inside of vacuum chamber 68.
In addition, in the present embodiment, three mask layers of different materials are formed on the continuous recording layer 20, the dry etch process of using four-stage (four-stage) then is to form groove 33 and to separate this continuous recording layer 20 in intermediate 10, but the quantity of employed dry ecthing pattern, the material that is used for mask layer, mask layer or the thickness of mask layer are had no particular limits, as long as continuous recording layer 20 can be separated accurately.
In addition, in the present embodiment, use utilizes the dry process cleaning operation of plasma to remove impurity from the surface of the recording element 31 of separation, but the present invention is not limited to this method, also can remove the recording element 31 lip-deep impurity of separation by the dry process cleaning operation that utilizes gas.
In addition, in the present embodiment, nonmagnetic body filling device 48 uses the bias sputtering method, but the present invention is not limited to this method, also can use the plasma CVD method that applies biasing to carry out the filling of this nonmagnetic body.
In addition, in the present embodiment, magnetic recording media 30 is perpendicular recordings, the discrete type disk, the recording element 31 of separation wherein is set with the fine pitch on the therebetween orbit radius direction, but the present invention is not limited to this situation, can certainly be applied to the manufacturing of following disk: the disk that the recording element of separation is set with the fine pitch on the therebetween track circumference direction (sector directions), the disk of recording element of separation and the recording element of separation are set with therebetween orbit radius direction and the fine pitch on the track circumference direction form spiral disk.In addition, the present invention can also be applied to for example for example manufacturing of tape etc. of discrete type magnetic recording media of MO dish and other nonmagnetic disk type of magneto-optic disk.
In addition, in the present embodiment, magnetic recording media manufacturing equipment 40 disposes the treating apparatus of the separation that is used for each step, but the present invention is not limited to this structure, also can utilize single assembly to carry out a plurality of steps.For example, can use the step of utilizing CF4 or SF6 to be used to handle the step of first mask layer 22 and to be used for removing residue first mask layer 22 from recording layer 31 surfaces of separating as the identical reactive ion etching device of reacting gas.In addition, can use identical Ar gaseous ion beam etching device to handle the step of second mask layer 24 and be used to make the recording element 31 of separation and the step of nonmagnetic body 32 planarizations.These rational Design on Plane can reduce the size and the cost of manufacturing equipment.
(example)
Utilize the foregoing description, use the treating apparatus in the internal vacuum chamber setting to prepare magnetic recording disk, this magnetic recording disk has and the continuous recording layer of isolated from atmosphere and the recording element of separation.Figure 13 is the photo from atomic force microscope, shown by ion beam milling make after the recording element of separation and the non-magnetosphere flattening surface should the surface enlarged drawing.Measurement to the surfaceness of the recording element separated and non-magnetosphere reflects that the maximum horizontal difference is 2.88nm, and center line average roughness Ra is 0.723nm.These results prove, in this example, do not use for example CMP of wet process, have made the recording element of separation and having had an even surface of non-magnetosphere satisfactorily.In addition, when using surface defect inspection apparatus to check the impurity of dielectric surface, identify the impurity of two 0.3 μ m to 0.5 μ m.Do not find the impurity of size, do not find any impurity of size yet at 0.5 μ m to 1.0 μ m greater than 1.0 μ m.In addition, by the surface of observation by light microscope magnetic recording disk, the two is all just after making, and then in high temperature, high humidity environment (temperature: 80 ℃, humidity: after placing about 48 hours 80%), all do not observe the corrosion of the recording element of separation in both cases.Figure 14 is the photo from optical microscope, demonstrates and place the about 48 hours enlarged drawings on the magnetic recording disk surface of this example afterwards in high temperature, high humidity environment.
(comparative example)
Prepare magnetic recording disk in the mode identical,, thereby allow the recording element of continuous recording layer and separation to contact atmosphere except treating apparatus is not contained in internal vacuum chamber with above-mentioned example.When the impurity on recording element that uses the inspection of surface imperfection checkout facility to separate and nonmagnetic body surface, recognize 193 impurity altogether, comprise 28 sizes 0.3 to 0.5 μ m, 38 sizes 0.5 to 1.0 μ m's and 127 impurity greater than 1.0 μ m.In addition, when by observation by light microscope magnetic recording disk surperficial, the two is all just after making, and then in high temperature, high humidity environment, placed about 48 hours, although the initial recording element of separating does not have obvious corrosion, but place 48 hours after making after, observe a plurality of stains, corrosion has appearred in this recording element that shows separation.Figure 15 is the photo from optical microscope, shown in high temperature, high humidity environment placed about 48 hours after, the enlarged photograph on the magnetic recording disk surface of comparative example.
In other words, when comparing, prevented the corrosion of the recording element of separation in the present example, and significantly reduced the introducing of impurity with comparative example.
Industrial applicibility
As mentioned above, the present invention can make the discrete type magnetic recording media effectively, and this magnetic recording media has prevented any degeneration of the recording element of separation reliably.
Claims (26)
1. the manufacture method of a magnetic recording media comprises:
The recording layer treatment step, it is by in the intermediate from magnetic recording media manufacturing process, form a plurality of grooves at in-plane with therebetween fine pitch, wherein this magnetic recording media is made by form continuous recording layer on the top of substrate surface, described continuous recording layer is divided into the recording element of a plurality of separations;
The nonmagnetic body filling step is used to utilize nonmagnetic body to fill described groove between the recording element of described separation; With
Protective seam forms step, is used to form protective seam, and this protective seam is protected the recording element and the described nonmagnetic body of described separation, wherein:
Under the situation that maintains vacuum state around the environment of described intermediate, carry out described recording layer treatment step.
The manufacture method of 2 magnetic recording medias according to claim 1, wherein:
Form step environment around described intermediate being maintained carry out described recording layer treatment step, described nonmagnetic body filling step and described protective seam successively under the situation of vacuum state.
3. the manufacture method of magnetic recording media according to claim 1, wherein:
Between described recording layer treatment step and described nonmagnetic body filling step the dry process cleaning step is set, one of this dry process cleaning step using gases and plasma are used for removing impurity from the environment around the recording element of described separation.
4. the manufacture method of magnetic recording media according to claim 2, wherein:
Between described recording layer treatment step and described nonmagnetic body filling step the dry process cleaning step is set, one of this dry process cleaning step using gases and plasma are used for removing impurity from the environment around the recording element of described separation.
5. according to the manufacture method of any described magnetic recording media of claim 1 to 4, wherein:
Between described nonmagnetic body filling step and described protective seam formation step, planarisation step is set, is used to make the recording element of described separation and the flattening surface of described nonmagnetic body.
6. the manufacture method of magnetic recording media according to claim 5, wherein:
Described planarisation step is the dry plasma step, the surface that this dry plasma step makes ion clash into the recording element and the described nonmagnetic body of described separation with the incident angle that is limited to the value in-10 ° to 15 ° scope and any one scope from 60 ° to 90 ° scope.
7. the manufacture method of magnetic recording media according to claim 6, wherein said dry plasma step is used ion beam milling.
8. according to the manufacture method of any described magnetic recording media of claim 1 to 4, wherein:
In described recording layer treatment step, the CO gas of nitrilo compound that comprises interpolation by use is separated described continuous recording layer as the reactive ion etching of reacting gas.
9. the manufacture method of magnetic recording media according to claim 5, wherein:
In described recording layer treatment step, the CO gas of nitrilo compound that comprises interpolation by use is separated described continuous recording layer as the reactive ion etching of reacting gas.
10. the manufacture method of magnetic recording media according to claim 6, wherein:
In described recording layer treatment step, the CO gas of nitrilo compound that comprises interpolation by use is separated described continuous recording layer as the reactive ion etching of reacting gas.
11. the manufacture method of magnetic recording media according to claim 7, wherein:
In described recording layer treatment step, the CO gas of nitrilo compound that comprises interpolation by use is separated described continuous recording layer as the reactive ion etching of reacting gas.
12. according to the manufacture method of any described magnetic recording media of claim 1 to 4, wherein:
In described nonmagnetic body filling step, by utilizing described intermediate is applied the plasma CVD of bias power and any one method in the bias sputtering, use described nonmagnetic body to fill described groove between the recording element of described separation.
13. the manufacture method of magnetic recording media according to claim 5, wherein:
In described nonmagnetic body filling step, by utilizing described intermediate is applied the plasma CVD of bias power and any one method in the bias sputtering, use described nonmagnetic body to fill described groove between the recording element of described separation.
14. the manufacture method of magnetic recording media according to claim 12, wherein:
Described nonmagnetic body filling step uses and comprise that the material of any one material of selecting is as described nonmagnetic body from the group that is made of oxide material, nitride material and non-magnetic non-crystalline material.
15. the manufacture method of magnetic recording media according to claim 14, wherein:
Described nonmagnetic body filling step uses silicon dioxide as described nonmagnetic body.
16. the manufacture method of magnetic recording media according to claim 12, wherein:
Barrier film is set between described recording layer treatment step and described nonmagnetic body filling step forms step, this barrier film forms any one method in step use plasma CVD method and the sputtering method, is used for forming barrier film on the recording element of described separation.
17. the manufacture method of magnetic recording media according to claim 14, wherein:
Barrier film is set between described recording layer treatment step and described nonmagnetic body filling step forms step, this barrier film forms any one method in step use plasma CVD method and the sputtering method, is used for forming barrier film on the recording element of described separation.
18. the manufacture method of magnetic recording media according to claim 15, wherein:
Barrier film is set between described recording layer treatment step and described nonmagnetic body filling step forms step, this barrier film forms any one method in step use plasma CVD method and the sputtering method, is used for forming barrier film on the recording element of described separation.
19. the manufacture method of magnetic recording media according to claim 16, wherein:
Described barrier film forms the barrier film that step forms diamond-like-carbon.
20. the manufacturing equipment of a magnetic recording media comprises:
The recording layer treating apparatus, it is by in the intermediate from magnetic recording media manufacturing process, form a plurality of grooves at in-plane with therebetween fine pitch, this magnetic recording media is made by form continuous recording layer on the top of substrate surface, this continuous recording layer is divided into the recording element of a plurality of separations; With
Vaccum retaining device, it holds described recording layer treating apparatus and will maintain vacuum state around the environment of described intermediate.
21. the manufacturing equipment of magnetic recording media according to claim 20, wherein:
Nonmagnetic body filling device and protective seam are set in the inside of described vaccum retaining device form device; described nonmagnetic body filling device is used to utilize nonmagnetic body to fill described groove between the recording element of described separation, and described protective seam forms device and is used to form the recording element of the described separation of protection and the protective seam of described nonmagnetic body.
22. the manufacturing equipment of magnetic recording media according to claim 20, wherein:
In described vaccum retaining device inside the dry process cleaning device is set, any one that is used for utilizing gas and plasma is from removing impurity around the environment of the recording element of described separation.
23. the manufacturing equipment of magnetic recording media according to claim 21, wherein:
In described vaccum retaining device inside the dry process cleaning device is set, any one that is used for utilizing gas and plasma is from removing impurity around the environment of the recording element of described separation.
24. the manufacturing equipment of magnetic recording media according to claim 22, wherein:
In described vaccum retaining device inside the dry process cleaning device is set, any one that is used for utilizing gas and plasma is from removing impurity around the environment of the recording element of described separation.
25. the manufacturing equipment of magnetic recording media according to claim 20, wherein:
Stop membrane formation device in the setting of the inside of described vaccum retaining device, this stops that membrane formation device is used for utilizing any one method of plasma CVD method and sputtering method to form barrier film on the recording element of described separation.
26. the manufacturing equipment of magnetic recording media according to claim 20, wherein:
In described vaccum retaining device inside planarizer is set, this planarizer is used to make the recording element of described separation and the flattening surface of described nonmagnetic body.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP058381/2003 | 2003-03-05 | ||
| JP2003058381 | 2003-03-05 | ||
| JP101570/2003 | 2003-04-04 |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB2007101065624A Division CN100568350C (en) | 2003-03-05 | 2004-03-02 | Magnetic recording media |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1698098A true CN1698098A (en) | 2005-11-16 |
| CN1328712C CN1328712C (en) | 2007-07-25 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB2007101065624A Expired - Fee Related CN100568350C (en) | 2003-03-05 | 2004-03-02 | Magnetic recording media |
| CNB2004800001935A Expired - Fee Related CN1328712C (en) | 2003-03-05 | 2004-03-02 | Production method for magnetic recording medium and production device therefor |
Family Applications Before (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB2007101065624A Expired - Fee Related CN100568350C (en) | 2003-03-05 | 2004-03-02 | Magnetic recording media |
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| Country | Link |
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| CN (2) | CN100568350C (en) |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0997419A (en) * | 1995-07-24 | 1997-04-08 | Toshiba Corp | Magnetic disk, production of magnetic disk and magnetic recorder |
| JP4257808B2 (en) * | 1999-05-11 | 2009-04-22 | 独立行政法人科学技術振興機構 | Magnetic material etching method and plasma etching apparatus |
-
2004
- 2004-03-02 CN CNB2007101065624A patent/CN100568350C/en not_active Expired - Fee Related
- 2004-03-02 CN CNB2004800001935A patent/CN1328712C/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| CN1328712C (en) | 2007-07-25 |
| CN101067937A (en) | 2007-11-07 |
| CN100568350C (en) | 2009-12-09 |
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