CN1696236A - Slurry for cmp and method of polishing substrate using same - Google Patents
Slurry for cmp and method of polishing substrate using same Download PDFInfo
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- CN1696236A CN1696236A CNA2005100699873A CN200510069987A CN1696236A CN 1696236 A CN1696236 A CN 1696236A CN A2005100699873 A CNA2005100699873 A CN A2005100699873A CN 200510069987 A CN200510069987 A CN 200510069987A CN 1696236 A CN1696236 A CN 1696236A
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- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09G—POLISHING COMPOSITIONS; SKI WAXES
- C09G1/00—Polishing compositions
- C09G1/02—Polishing compositions containing abrasives or grinding agents
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3105—After-treatment
- H01L21/31051—Planarisation of the insulating layers
Abstract
Disclosed herein is a polishing slurry and a method of producing the same. The polishing slurry has high selectivity in terms of a polishing speed of an oxide layer to that of a nitride layer used in CMP of an STI process which is essential to produce ultra highly integrated semiconductors having a design rule of 256 mega D-RAM or more, for example, a design rule of 0.13 mum or less. A method and a device for pre-treating polishing particles, a dispersing device and a method of operating the dispersing device, a method of adding a chemical additive and an amount added, and a device for transferring samples are properly employed to produce a high performance nano ceria slurry essential to CMP for a process of producing ultra highly integrated semiconductors of 0.13 mum or less, particularly, the STI process.
Description
Technical field
The present invention relates to a kind of polishing, slurry of particularly chemically machinery polished (hereinafter to be referred as ' CMP ') of being used for.More particularly, the invention relates to a kind of preparation method of high-performance polishing slurries and the method for polishing substrate.In the manufacture craft of 256 megabyte or higher D-RAM superelevation integrated semiconductor silicon chip (standard≤0.13 μ m), carry out chemically machinery polished with slurry of the present invention, polishing speed to zone of oxidation and nitride layer has high selectivity, and has reduced cut.
Background technology
CMP is a kind of semiconductor processing technology, promptly imports polishing slurries being held between wafer and the polishing pad, also carries out mechanical polishing when its chemical corrosion is polished finished surface.This method is succeeded in developing so far by American I BM company from the eighties of last century the eighties, has become the fundamental method of worldwide production submicron order semi-conductor chip.
This paper will describe CMP technology and relevant polishing slurries thereof, referring to Fig. 1 a-1c.CMP technology is to make the rough surface of semi-conductor become smooth in semiconductor fabrication processes, promptly adopt acidity or alkaline solution that semiconductor surface is carried out chemical treatment, make it to produce and the faint film that is connected of surface to be machined in moment, subsequently, the polishing particle in the polishing slurries can be removed this film.That is, after the clamping semiconductor wafer is sent forth polishing slurries, produce chemical reaction, the new particulate of generation is removed polished particle with the method for machinery.
When carrying out the CMP operation, fixing wafer 1 on the grinding head 3, its turning direction is identical with the turning direction of polishing pad 4, and between them is polishing slurries 2.Wafer 1 is fixed on the holding piece 7 above the grinding head 3 by surface tension or vacuum.In the CMP process, polishing pad 4 has carried out polishing action with 2 pairs of wafers of polishing slurries 1.Grinding head 3 with can only rotate, the worktable 5 that links to each other with polishing pad 4 rotates simultaneously, and can regulate the off-centre of worktable 5 when worktable 5 departs from center of rotation.Wafer 1 is fixed on the worktable 5 by predetermined pressure.Its surface contacts with polishing pad 4 closely because of the effect of the weight of grinding head 3 and other applied pressure, and therefore polishing slurries flows in the interior pit of both contact surfaces, promptly in the pore shown in the figure 8.Mechanical polishing is to be finished jointly by polishing particle in the polishing slurries and polishing pad 4 lip-deep protuberances 9, and chemical rightenning is to be finished by the chemical ingredients in the polishing slurries.In addition, the top of the protuberance on wafer 4 surfaces at first contacts with the protuberance of polishing particle or another contact surface, and pressure concentrates on the rat of wafer 4.Therefore, these rats are removed under high speed, thereby reach the purpose that makes wafer surface more smooth.
Polishing slurries wants the kind of treat surface to be broadly divided into three kinds of oxide cmp slurry, medal polish slurry and multi-silicon wafer polishing slurries etc. by it.The oxide cmp slurry is applicable to the surface of insulating film in the polishing STI technology and the surface of silicon oxide, and it is roughly become to be grouped into by polishing particle, deionized water, pH stablizer and tensio-active agent etc.Polishing particle role in polishing wherein is exactly to adopt the method for machinery that polished finish is carried out on the machined object surface by the pressure that polishing machine produces.The composition of polishing particle can be silicon oxide (SiO
2), cerium dioxide (CeO
2) or aluminium sesquioxide (Al
2O
3).What deserves to be mentioned is that the cerium dioxide polishing slurries is used for the silicon dioxide meter mirror polish in the STI technology of being everlasting, at this moment, adopt silicon nitride usually as polishing retardance face.
Usually in ceria sizing agent, add the elimination speed that additive reduces nitride layer, improve the selectivity of zone of oxidation the nitride layer polishing speed.Shortcoming is to use additive not only to reduce the elimination speed of nitride layer, and has reduced the elimination speed of zone of oxidation.Therefore the particle diameter of polishing particle can scratch the surface of wafer greater than silica slurry in the ceria sizing agent.
If polishing slurries is lower to the polishing speed selectivity that zone of oxidation and nitride layer are had, generally, can be removed because of the excessive oxidation layer, contiguous nitride layer is destroyed and form dish-shaped pit at surface to be machined.Like this, just can not reach the purpose of polishing.
Therefore, employed polishing slurries will possess highly selective, high polishing speed, high degree of dispersion, microcosmic cut distribution highly uniformly and high concentration and uniform particle size distribution range in the CMP of STI process.In addition, the quantity of the particle of granularity 〉=1 μ m must be controlled in the limited scope.The U.S. Patent number of HIT is 6,221,118 and 6,343, two patented technologies of 976 provide the routine techniques that is adopted among the STI CMP, promptly prepare the method for cerium dioxide, adopt cerium dioxide to be the preparation method that the polishing particles period of the day from 11 p.m. to 1 a.m has the polishing slurries of highly selective.These two patents have described the prerequisite characteristic of polishing slurries in the STI CMP technology, contain the type of additive polymer and in various Special Circumstances with use their method generally speaking.Especially what deserves to be mentioned is, also proposed the scope of polishing particle, elementary polishing particle and secondary particle granularity average in these two patents.Another routine techniques, U.S. Patent number are 6,420,269 to belong to the technology of Hitachi, Ltd, for we provide the method for preparing multiple ceria particles and have adopted cerium dioxide to be the preparation method that the polishing particles period of the day from 11 p.m. to 1 a.m has the polishing slurries of highly selective.In addition, the U.S. Patent number that belongs to Japanese Showa Denko company limited earlier period is 6,436,835,6,299,659,6,478,836,6,410,444 and 6,387, in 139 the technology that patent provided, also pointed out to prepare the method for cerium dioxide and adopted cerium dioxide to be the preparation method that the polishing particles period of the day from 11 p.m. to 1 a.m has the polishing slurries of highly selective for us.Be additive, its influence and coupling additive of describing polishing slurries mostly in these patents to polishing effect.
Yet above technology has only proposed the median size and the scope of polishing particle in the slurry, the macroparticle that causes the microcosmic cut in the actual production is not controlled, so can not suppressed the generation of the microcosmic cut that caused by macroparticle.
In addition, prior art is not analyzed the macroparticle number in the slurry of different solid contents (promptly polishing the concentration of particle).Therefore can not suppress the generation of microcosmic cut.
Summary of the invention
The present invention is based on and solves that existing problem proposes in the previous technology.One of purpose of the present invention provides a kind of method of production high-performance cerium dioxide nano level polishing slurries, comprises the method for method and apparatus, dispersing apparatus and working method thereof, chemical additive using method and consumption, transfer sample device and the polishing substrate of pre-treatment polishing particle.Special feature of the present invention is the elimination speed and the cut quantity of regulating CMP by the solid content of control polishing slurries, and therefore slurry provided by the present invention can reduce the generation of trickle cut when standard is stricter.
Another object of the present invention is by the analysis and characterization to polishing particle and polishing slurries, factors such as the dispersion stabilization of slurry, viscosity under the quantity of macroparticle (the macroparticle quantity in the unit volume in certain particle size range), granularity, primary particle particle diameter, secondary particle particle diameter, size distribution, pH value and the variation of conductivity, different degree of aging and the additive in the slurry of the different solid contents of effective control, thus a kind of polishing slurries that preferably is used for CMP and preparation method thereof is provided.
The solid content that the production of slurry and storage request are suitable, another object of the present invention provides a kind of slurry, the best solid content of slurry is by the dispersion stabilization of slurry and the decision of macroparticle number, by the macroparticle number with the variation and the cohesion of solid content, the dispersive situation is determined best solid content again.Make slurry reach maximum dispersion stabilization by kind, consumption and the aged degree that changes dispersion agent.
To achieve the above object, the invention provides a kind of polishing slurries, wherein be dispersed with the polishing particle, polish the number of particle greatly and control by slurry solid content and polishing particle diameter.In the slurry of the present invention, the number of macroparticle reduces with the reduction of solid content, and the changing down of macroparticle number is relevant with solid content of slurry, and increases with the increase of particle diameter in the slurry.Big polishing particles subnumber purpose changing down increases sharply with the minimizing of solid content.That is to say that when solid content reduces a half, the ratio that big polishing particles subnumber purpose reduces is 1/2 or bigger.In addition, when the particle diameter of macroparticle increased, this trend was more obvious; When particle diameter hour, the variation of macroparticle number is less relatively.
In the slurry of the present invention, accumulation number≤1 * 10 of the macroparticle of particle diameter 〉=1 μ m
10/ ml, accumulation number≤1 * 10 of the macroparticle of particle diameter 〉=2 μ m
9/ ml, accumulation number≤1 * 10 of the macroparticle of particle diameter 〉=3 μ m
7/ ml.
The size distribution and the solid content of polishing particle are irrelevant, have isolating large and small particle peak.
In addition, among the present invention, when solid content of slurry is 8～12wt%, accumulation number≤1 * 10 of the particle of particle diameter 〉=0.99 μ m
10/ ml, accumulation number≤1 * 10 of the macroparticle of particle diameter 1.99 〉=μ m
9/ ml, accumulation number≤1 * 10 of the macroparticle of particle diameter 2.99 〉=μ m
7/ ml.When solid content of slurry is 6～8wt%, accumulation number≤1 * 10 of the particle of particle diameter 〉=0.99 μ m
10/ ml, accumulation number≤5 * 10 of the macroparticle of particle diameter 1.99 〉=μ m
8/ ml, accumulation number≤1 * 10 of the macroparticle of particle diameter 2.99 〉=μ m
6/ ml.When solid content of slurry is 4～6wt%, accumulation number≤1 * 10 of the particle of particle diameter 〉=0.99 μ m
10/ ml, accumulation number≤1 * 10 of the macroparticle of particle diameter 1.99 〉=μ m
8/ ml, accumulation number≤1 * 10 of the macroparticle of particle diameter 2.99 〉=μ m
5/ ml.When solid content of slurry is 2～4wt%, accumulation number≤5 * 10 of the particle of particle diameter 〉=0.99 μ m
9/ ml, accumulation number≤5 * 10 of the macroparticle of particle diameter 1.99 〉=μ m
7/ ml, accumulation number≤1 * 10 of the macroparticle of particle diameter 2.99 〉=μ m
4/ ml.When solid content of slurry is 0.5～2wt%, accumulation number≤5 * 10 of the particle of particle diameter 〉=0.99 μ m
9/ ml, accumulation number≤1 * 10 of the macroparticle of particle diameter 1.99 〉=μ m
7/ ml, accumulation number≤5 * 10 of the macroparticle of particle diameter 2.99 〉=μ m
3/ ml.
More preferably scope is as follows for the macroparticle number of slurry among the present invention.When solid content of slurry is 8～12wt%, accumulation number≤5 * 10 of the particle of particle diameter 〉=0.99 μ m
9/ ml, accumulation number≤5 * 10 of the macroparticle of particle diameter 1.99 〉=μ m
8/ ml, accumulation number≤5 * 10 of the macroparticle of particle diameter 2.99 〉=μ m
6/ ml.When solid content of slurry is 6～8wt%, accumulation number≤5 * 10 of the particle of particle diameter 〉=0.99 μ m
9/ ml, accumulation number≤1 * 10 of the macroparticle of particle diameter 1.99 〉=μ m
8/ ml, accumulation number≤5 * 10 of the macroparticle of particle diameter 2.99 〉=μ m
5/ ml.When solid content of slurry is 4～6wt%, accumulation number≤5 * 10 of the particle of particle diameter 〉=0.99 μ m
9/ ml, accumulation number≤5 * 10 of the macroparticle of particle diameter 1.99 〉=μ m
7/ ml, accumulation number≤5 * 10 of the macroparticle of particle diameter 2.99 〉=μ m
4/ ml.When solid content of slurry is 2～4wt%, accumulation number≤1 * 10 of the particle of particle diameter 〉=0.99 μ m
9/ ml, accumulation number≤1 * 10 of the macroparticle of particle diameter 1.99 〉=μ m
7/ ml, accumulation number≤5 * 10 of the macroparticle of particle diameter 2.99 〉=μ m
3/ ml.When solid content of slurry is 0.5～2wt%, accumulation number≤1 * 10 of the particle of particle diameter 〉=0.99 μ m
9/ ml, accumulation number≤5 * 10 of the macroparticle of particle diameter 1.99 〉=μ m
6/ ml, accumulation number≤1 * 10 of the macroparticle of particle diameter 2.99 〉=μ m
3/ ml.
Among the present invention, the scope that slurry macroparticle number is more optimized is as follows.When solid content of slurry is 8～12wt%, accumulation number≤1 * 10 of the particle of particle diameter 〉=0.99 μ m
9/ ml, accumulation number≤1 * 10 of the macroparticle of particle diameter 1.99 〉=μ m
8/ ml, accumulation number≤1 * 10 of the macroparticle of particle diameter 2.99 〉=μ m
6/ ml.When solid content of slurry is 6～8wt%, accumulation number≤1 * 10 of the particle of particle diameter 〉=0.99 μ m
9/ ml, accumulation number≤5 * 10 of the macroparticle of particle diameter 1.99 〉=μ m
7/ ml, accumulation number≤1 * 10 of the macroparticle of particle diameter 2.99 〉=μ m
5/ ml.When solid content of slurry is 4～6wt%, accumulation number≤1 * 10 of the particle of particle diameter 〉=0.99 μ m
9/ ml, accumulation number≤1 * 10 of the macroparticle of particle diameter 1.99 〉=μ m
7/ ml, accumulation number≤1 * 10 of the macroparticle of particle diameter 2.99 〉=μ m
4/ ml.When solid content of slurry is 2～4wt%, accumulation number≤5 * 10 of the particle of particle diameter 〉=0.99 μ m
8/ ml, accumulation number≤5 * 10 of the macroparticle of particle diameter 1.99 〉=μ m
6/ ml, accumulation number≤1 * 10 of the macroparticle of particle diameter 2.99 〉=μ m
3/ ml.When solid content of slurry is 0.5～2wt%, accumulation number≤5 * 10 of the particle of particle diameter 〉=0.99 μ m
8/ ml, accumulation number≤1 * 10 of the macroparticle of particle diameter 1.99 〉=μ m
6/ ml, accumulation number≤5 * 10 of the macroparticle of particle diameter 2.99 〉=μ m
2/ ml.
In addition, the polishing particle of slurry of the present invention consists of cerium dioxide, by process for solid phase synthesis production.Slurry comprises deionized water and anionic polymer.Anionic polymer is selected from by poly-methyl-prop diluted acid, poly-methyl-prop diluted acid ammonium, polycarboxylate, sodium laurylsulfonate, alkylbenzene sulfonate, sulfonated, single alkyl phosphonic acid or the sodium salt of lipid acid, the group that carboxylic acid-acrylate copolymer is formed.The present invention provides a kind of method of using this slurry polishing predetermined substrate simultaneously, and forms silicon oxide film on the substrate.
Description of drawings
The detailed clearer understanding of explanation feature of the present invention, advantage and above-mentioned and other purpose below can reaching by accompanying drawing:
Fig. 1 a and 1b are respectively the skeleton view and the sectional views of CMP device.
Fig. 1 c is the sectional view of CMP.
Fig. 2 is a polishing slurries production scheme of the present invention.
Fig. 3 is the relation curve between polishing slurries pH value and the grinding number of times.
Fig. 4 is the number of the big polishing particle of polishing slurries and the relation curve of solid content.
Shown in Figure 5 is transmission electron microscope (TEM) image of 750 ℃ of incinerating cerium oxide powder.
Embodiment
Hereinafter the preparation method of polishing slurries among the present invention and the analysis that the performance of this polishing slurries is carried out will be elaborated respectively.In addition, the present invention also will set forth the method that the employing cerium dioxide is made the preparation method of the polishing slurries of polishing particle, made dispersion agent with deionized water and anionic polymer.At last, this paper also will provide the experimental result of CMP process, and promptly how oxide film polishing speed and selectivity rely on processing condition and obtain.The present invention may also need further improvement from now on, the scope that its scope of application also not only is confined to this paper to be discussed.
[preparation method of cerium dioxide polishing slurries]
Cerium dioxide polishing slurries of the present invention comprises cerium oxide powder, deionized water, anionic polymeric dispersing agent and a kind of additive, as weak acid or weak base.The preparation method of polishing slurries may further comprise the steps (see figure 1).To precursor, carry out pre-treatment as cerous carbonate, with solid-state generation cerium oxide powder (S1).Cerium oxide powder is mixed (S2) in container with deionized water, the mixture that obtains is in grinding machine for grinding, so that reduce particle diameter and meet the requirements of size distribution (S3).In the slurry that aforesaid method obtains, add anionic polymeric dispersing agent and increase dispersion stabilizer (S4).In high-speed mixer, add additive, as weak acid, weak base, with control pH value, again by grinding stable dispersion (S5).Determine solid weight percent (wt%) in the slurry, i.e. solid content (S6).Remove by filter macroparticle to stop the generation (S7) of precipitation and polishing process cut.By aging stable slurry (S8).The preparation method of cerium dioxide polishing slurries among the present invention is described in detail in detail below.
1. the preparation of cerium oxide powder
Preparation cerium dioxide polishing slurries, the first step: adopt solid generation method to prepare cerium oxide powder by precursor.Precursor such as cerous carbonate produce cerium oxide powder by calcining, but before calcining, should adopt at first separately drying process remove wherein moisture so that its thermal conduction and manufacturability be guaranteed.
The performance of cerium oxide powder depends on the calcining effect of cerous carbonate and the performance of calciner.Cerous carbonate has water-absorbent, and is crystallizable with water, and the valency of its crystal water can be 4,5 or 6.Therefore the calcining effect of cerous carbonate is relevant with its water regain with the valency of the crystal water in its crystal.During calcining, the moisture in the cerous carbonate is removed.But along with the rising of temperature and gathering of heat, the decarbonate reaction takes place, and carbonate has become carbonic acid gas.Cerium oxide powder also begins to generate.In addition, unnecessary heat has caused the recrystallization of cerium dioxide, though at its powder with after the particle of some amount combines.The temperature that each reaction takes place: dehydration: room temperature to 250 ℃; Decarbonate reaction: 230 ℃ or higher; The cerium dioxide crystallization generates temperature: 330 ℃ or higher.Therefore, calcination temperature range should be 400-1, and 300 ℃, but optimum temperature range is 700～900 ℃.
The size of the interparticle force of cohesion of calcining back cerium oxide powder depends on water and crystal water what it absorbs, and when absorbing water and crystal water is more and calcining is insufficient in process furnace, its force of cohesion will increase.
Granularity and degree of crystallinity depend on Tc, and the size of granularity and crystallite increases with the increase of calcining temperature.Equally, the size distribution of the cerium dioxide that obtains depends on calcining temperature, thereby might control size and size distribution as temperature by the control calcination condition.That is to say that the size distribution of the cerium oxide powder that obtains depends on calcining and grinding condition, is bimodal distribution, has a granule subarea and a macroparticle district.Size distribution depends on the Korean Patent that the visible the applicant of calcining temperature is applied for, application number 10-2004-0016943, and wherein with the increase of calcining temperature, bimodal becoming sharply, the macroparticle peak increases with respect to the small-particle peak.Be the slurry that separates bimodal distribution for particle diameter, can produce a kind of polishing slurries that not only can reduce the microcosmic cut but also have good polishing velocity by the ratio of controlling two peaks.The ratio at small-particle peak and macroparticle peak can be 5～25, and more preferably scope is 10～20, most preferred scope 12～18.
As mentioned above, can regulate particle diameter and size distribution by the control calcination condition.Particle diameter and size distribution are very big to result's influence of CMP, therefore in order to accelerate polishing speed, reduce the generation of microcosmic cut simultaneously, are necessary to control the particle diameter of the cerium dioxide in the slurry, regulate the generation of macroparticle, the ratio of sized particles in the optimal control slurry.
2. mix and grinding
The cerium oxide powder that calcination process generates above adopting in the mixing tank of high speed rotating with deionized water mixings humidification after the mixture of gained be admitted to the superpower grinding machine for grinding to reduce its particle size and to make the particle good dispersion, so that generate nano level cerium dioxide polishing slurries.Because this polishing slurries has porousness, mixing process need continue 10 minutes or the longer time so that it has enough water content.Preferably carried out one hour before this or pre-mixing for more time.In addition, the stir shaft of mixing tank and inwall are used the tetrafluoroethylene making coatings or lining is not subjected to metallic corrosion to protect them.
Slurry is mixed with deionized water or pure water, make the concentration of polishing particle (cerium dioxide), promptly solid content is 5～40wt%, and preferred situation is 10～30wt%.Solid content of slurry is high more, and yield is high more, but too high as solid content, can make the viscosity of slurry very big, and the phenomenon of cohesion often takes place, and significantly reduces the efficient of follow-up grinding, even grinding can't be carried out.
After water mixes, adopt the particle of high-efficient grinding machine control polishing particle size and dispersion adhesion wherein.Shredder adopts wet type, dry type all can.But because of there being the metallics corrosive possibility that is produced by itself wearing and tearing back in the dry grinding machine process of lapping, pottery system wet grinding machine is adopted in suggestion.But the wet grinding machine settling that particle coacervation forms may occur in process of lapping, thereby generates large-scale macrobead particle, and the phenomenon that mill efficiency descends finally takes place.Therefore, be necessary concentration, pH value and the conductivity of polishing particle are controlled, adopt dispersion agent that particle is disperseed.
In the wet grinding process of using cerium dioxide, the polishing particles granularity is 0.05～1.0mm, and the fill volume ratio is 20～80%, and the rotating speed of high-efficient grinding machine is controlled at 500～2,500rpm can make the polishing slurries particle reach needed granularity and dispersity requirement like this.
3. dispersion stabilization and additive
Need in the polishing slurries to add a kind of anionic dispersing agents and other additive,, thereby play control polishing slurries pH value, the effect of stablizing polishing slurries as weak acid or weak base.
As shown in Figure 3, when repeating to grind, the pH value of polishing slurries has reached isopotential point, and its moving electroacoustic wave amplitude is 0.In such cases, polish interparticle repulsive force and reduce, this is just meaning, and the agglutinating possibility has increased between them.In other words, electrokinetic potential (zeta potential) value is 0 will cause polishing the bonding between the particle.Especially solids loading be 20% or higher situation under, the pH value reaches isopotential point (IEP), particle bonding speed is can specific inventory more rapid after a little while.Therefore, be not taking place of the phenomenon that heavily bonds after polishing particle dispersive stability and the grinding before the assurance grinding, grinding technics must be controlled at away from isopotential point (IEP) in the pH of polishing slurries value, slightly be acid or add polymeric dispersant and carry out later on, only in this way, the dispersion stabilization of polishing particle just can be improved.
About anionic polymeric dispersing agent, can select any or wherein any several mixture in the following listed material: sodium salt, the carboxylic acid-acrylate copolymer of polymerization methacrylic acid, ammonium polymethacrylate, polycarboxylate, sodium laurylsulfonate, alkylbenzene sulfonate, sulfonated single alkyl phosphonic acid or lipid acid.
The dispersion stabilization of the polishing slurries behind the adding dispersion agent can improve.Increase because of the rising of moving the electroacoustic wave absolute value of amplitude causes polishing interparticle repulsive force, interparticle bonding has caused the sedimentary phenomenon of polishing slurries no longer to take place, and everything all will make the dispersion stabilization of polishing particle be improved.This mixing and dispersion process need continue 10 minutes-24 hours.Suggestion determines that according to the fluctuation of polishing slurries pH value and to the absorbing state of polymeric dispersant the time that this process continues is 30 minutes or longer, determines that according to polishing slurries aging stability situation the time that this process continues is 2 hours or longer.
Because of this novel polishing slurry possesses water-solublely, the solubleness under the room temperature of its polymeric dispersant in water ought to be as its one necessary fundamental characteristics.Consider from polishing slurries particle weight aspect, the solubleness of anionic polymeric dispersing agent in water is required be: 0.0001～10.0wt%, preferred range is 0.001～3.0wt%, optimum range is 0.02～2.0wt%.
But, if contain cationic substance in the dispersion agent of polishing slurries or in additive, have positively charged ion or other similar material, positively charged ion wherein will combine with negatively charged ion, thereby reduces the bonding once more of the absolute value and the polishing particle of moving electroacoustic wave amplitude.Electric density depends on molecular wt, therefore is necessary to select to have the dispersion agent of high charge density and suitable molecule weight so that can not cause the bonding again of polishing particle.It is the anionic dispersing agents of 3,500～15,000 (g/mol) that molecular wt is selected in suggestion.The molecular wt of anionic dispersing agents 〉=50,000 if (g/mol), bonding again will take place because of the bridge phenomenon in the polishing slurries particle, thereby produce the volume particle size particle.Therefore, suggestion selection molecular wt is the anionic dispersing agents of 2,000～50,000 (g/mol).
In addition, pH value control agent can be selected any material of weak base base or weak acid base or any several mixture in them of comprising in following a group: ammonium hydroxide, Tetramethylammonium hydroxide, ethamine, three hydramine, M-nitro benzoic acid, lactic acid, acetic acid, prussic acid or phosphoric acid, organic acid is as polymethyl acrylic acid, polyacrylic acid.
The viscosity of the polishing slurries of stabilized processing is Newtonian behavior.Before stabilization treatment, the viscosity of polishing slurries is determined by shearing rate.But after stabilization treatment, the viscosity of polishing slurries presents Newtonian behavior, and is irrelevant with shearing rate.
4. the removal of the control of solid content and macroparticle
As mentioned above, after the stably dispersing process, solid content of slurry is controlled in certain scope, adopts to remove by filter to cause precipitation and the macroparticle that condenses and can cause cut in CMP.When the particle of large volume existed, gravity was greater than by the caused dispersion force of repulsive interaction between particle, and the surf zone of macroparticle is less than the surf zone of small-particle, so the dispersibility of macroparticle is less than the dispersiveness of small-particle.When the macroparticle number of unit volume increases with the increase of solid content, can cause the situation aggravation that precipitates and condense.Two above-mentioned reasons make precipitation and cohesion be easy to take place, and therefore the slurry instability is necessary to remove macroparticle, and the degree that macroparticle is removed increases with filtering number of times.When solid content increased, interparticle cohesion increased, and small-particle is condensed into macroparticle, and was difficult to filter, even small-particle is also filtered out.When storing slurry,, therefore be necessary before storage, disperse, filter slurry so that reach suitable solid content because cohesion makes the slurry of high solids content disperse again than low-solid content slurry is more difficult with higher solid content.
5. polishing slurries is aging
In container, can further increase stability of slurry by 24 hours stirrings are aging.The polishing slurries that obtains both can wear out, and also can omit this step when needed.
[influence of slurry solid content]
The influence of the solid content of slurry of above-mentioned explained hereafter to slurry character hereinafter will be described.
If reduce the standard of semiconductor element, thus reduce the number and the size of cut, be necessary to reduce the number of the macroparticle in the unit volume.Solid content (being slurry concentration) obviously influences the number of the macroparticle of unit volume.When the solid content in the polishing slurries was low, number of particles reduced in the unit volume, thereby had reduced the number of macroparticle in the unit volume.Yet even if diluted slurry reduces the number that solid content reduces macroparticle, the ratio that the macroparticle number reduces still depends on size of particles.That is to say (see Fig. 4, Fig. 4 is the number of the big polishing particle of different solid content polishing slurries and the relation curve of particle diameter) when the particle diameter of macroparticle 〉=0.79 μ m, even if solid content is reduced to 1wt% from 10wt%, the number of macroparticle falls hardly.When the particle diameter of macroparticle 〉=1 μ m, the number of macroparticle has to a certain degree or little decline with the reduction of solid content.When the particle diameter of macroparticle 〉=1.99 μ m, the number of macroparticle descends with the reduction of solid content.When the particle diameter of macroparticle 〉=2.97 μ m, the number of macroparticle descends rapidly with the reduction of solid content.When the particle diameter of macroparticle 〉=3.97 μ m, the number of macroparticle sharply descends with the reduction of solid content.
Produce above-mentioned trend former because: so-called macroparticle may be one, the aggregate of two or more relative small-particles, and the volume of the macroparticle that becomes of a plurality of particle accumulation is bigger.In fact (see figure 4), the easier dispersion of a plurality of aggregation of particles bodies under the diluted situation of slurry, can broken be called original small-particle.Therefore when slurry was diluted, the speed that the number of macroparticle reduces was faster than the speed of expection.
The macroparticle that causes the microcosmic cut is generally single or two particles compositions, rather than is made up of a plurality of less relatively particles.If excessively remove a plurality of macroparticles of relatively forming than small-particle, though can reduce cut, but can reduce solid content and polishing velocity greatly, when therefore using the slurry of different solid contents, preferably make unit volume contain the macroparticle of certain number, so that when keeping higher polishing velocity, reduce the microcosmic cut.
The cohesion degree of the concentration decision slurry that slurry stores.When slurry dense, cohesion and precipitation often take place in the macroparticle number of unit volume high a lot of (see figure 4)s during than low-solid content, cause cut during polishing easily.When same dispersion stored, with respect to the low-solid content slurry, the macroparticle that is formed by cohesion and precipitation in the high solids content slurry is more difficult to be disperseed again, thus want the number of better controlled solid content of slurry and macroparticle, so that storage and transportation slurry.In addition, under the different diluting conditions, the changing down of macroparticle number and cut produce all relevantly with particle diameter in the slurry, thereby are necessary to control respectively particle diameter 〉=1 μ m, 〉=2 μ m and 〉=number of particles of 3 μ m, particle diameter is big more, control should be strict more.
Among the present invention, can reduce the microcosmic cut, keep the polishing slurries of higher polishing speed, need the macroparticle number in the unit volume under different solid contents of control and the particle size range in order to prepare.That is to say that the scope of slurry solid content is respectively 8～12wt%, 6～8wt%, 4～6wt%, 2～4wt% and 0.5～2wt%; Control particle diameter 〉=0.79 μ m, 〉=0.99 μ m, 〉=1.99 μ m, 〉=the macroparticle number of 2.99 μ m.Table 1 is the interior macroparticle number of unit volume under different solid contents and the particle size range.
Table 1
| ??≥0.79μm | ??≥0.99μm | ??≥1.99μm | ??≥2.99μm | |
| ??8～12wt％ | ??5×10 8～5×10 10 | ??1×10 8～1×10 10 | ??1×10 7～1×10 9 | ??1×10 5～1×10 7 |
| ??6～8wt％ | ??5×10 8～5×10 10 | ??1×10 8～1×10 10 | ??5×10 6～5×10 8 | ??1×10 4～1×10 6 |
| ??4～6wt％ | ??5×10 8～5×10 10 | ??1×10 8～1×10 10 | ??1×10 6～1×10 8 | ??1×10 3～1×10 5 |
| ??2～4wt％ | ??5×10 8～5×10 10 | ??5×10 7～5×10 9 | ??5×10 5～5×10 7 | ??1×10 2～1×10 4 |
| ??0.5～2wt％ | ??5×10 8～5×10 10 | ??5×10 7～5×10 9 | ??1×10 5～1×10 7 | ??5×10 1～5×10 3 |
Table 2 is when different solid contents and particle diameter, preferred macroparticle number range (No./ml) in the unit volume.
Table 2
| ??≥0.79μm | ??≥0.99μm | ??≥1.99μm | ??≥2.99μm | |
| ??8～12wt％ | ??1×10 9～1×10 10 | ??5×10 8～5×10 9 | ??5×10 7～5×10 8 | ??5×10 5～5×10 6 |
| ??6～8wt％ | ??1×10 9～1×10 10 | ??5×10 8～5×10 9 | ??1×10 7～1×10 8 | ??5×10 4～5×10 5 |
| ??4～6wt％ | ??1×10 9～1×10 10 | ??5×10 8～5×10 9 | ??5×10 6～5×10 7 | ??5×10 3～5×10 4 |
| ??2～4wt％ | ??1×10 9～1×10 10 | ??1×10 8～1×10 9 | ??1×10 6～1×10 7 | ??5×10 2～5×10 3 |
| ??0.5～2wt％ | ??1×10 9～1×10 10 | ??1×10 8～1×10 9 | ??5×10 5～5×10 6 | ??1×10 2～1×10 3 |
Table 3 is when different solid contents and particle diameter, the preferred macroparticle number range (No./ml) in the unit volume.
Table 3
| ??≥0.79μm | ??≥0.99μm | ??≥1.99μm | ??≥2.99μm | |
| ??8～12wt％ | ??2×10 9～5×10 9 | ??7×10 8～1×10 9 | ??7×10 7～1×10 8 | ??7×10 5～1×10 6 |
| ??6～8wt％ | ??2×10 9～5×10 9 | ??7×10 8～1×10 9 | ??2×10 7～5×10 7 | ??7×10 4～1×10 5 |
| ??4～6wt％ | ??2×10 9～5×10 9 | ??7×10 8～1×10 9 | ??7×10 6～1×10 7 | ??7×10 3～1×10 4 |
| ??2～4wt％ | ??2×10 9～5×10 9 | ??2×10 8～5×10 8 | ??2×10 6～5×10 6 | ??7×10 2～1×10 3 |
| ??0.5～2wt％ | ??2×10 9～5×10 9 | ??2×10 8～5×10 8 | ??7×10 5～1×10 6 | ??2×10 2～5×10 2 |
[the macroparticle numbers of different solid contents]
Below by aforesaid method, (solid content difference) prepared ceria powder and slurry under predetermined condition.To the character of polishing powder and slurry, as the macroparticle number of different-grain diameter in the slurry, to analyze, Analytical equipment is as follows.
1) to the measurement of particle size distribution situation: the APS that U.S. Matec Applied Science Fiction Co. makes;
2) to moving the measurement of electroacoustic wave amplitude (dispersion stabilization): the ESA 9800 that U.S. Matec Applied Science Fiction Co. makes;
3) viscosity measurement: Brookfield viscometer, DVII+;
4) measurement of pH value: the pH value survey meter that U.S. Orion company makes;
1. the preparation of cerium oxide powder
The high-purity cerous carbonate of 75kg is packed into and is weighed in the container of 800g, calcined 4 hours down at 750 ℃, and cooling naturally under the air-flow, airflow rate is 20m
3/ hr is so that effectively remove byproduct CO
2Ceria powder after the calcining carries out the X-diffraction analysis, guarantees to generate highly purified cerium oxide.Use the tem analysis cerium oxide powder, particle diameter is approximately the 40nm (see figure 5).
2. the preparation of ceria sizing agent 1～3
The preparation of ceria sizing agent 1, in high-speed mixer, with 10kg with the high-purity ceria powder of aforesaid method synthetic and 90kg deionized water mix guarantee more than 1 hour fully wetting, with mixture, be that solid content is the slurry of 10wt%, grinding and making the median size of secondary particle is 200nm.Make particle diameter be controlled at the scope of requirement by grinding, and the particle that condenses in the slurry obtain disperseing.Add the anionic polymeric dispersing agent that weight is cerium dioxide 1wt% afterwards, mix and guarantee sufficient absorption, dispersion more than 2 hours.The solid content 10wt% that keeps filters and obtains corresponding ceria sizing agent.Ceria sizing agent 2 with 3 with identical prepared, just the solid content after dispersion is respectively 5wt% and 2.5wt%.
In the ceria sizing agent 1～3, by control grinding, dispersion, when filtering process makes different solid content the number of macroparticle in above-mentioned scope.
3. the contrast of ceria sizing agent 1～3
Measure viscosity and electronic sound amplitude to estimate dispersion stabilization, the result shows that ceria sizing agent 1～3 shows the Newtonian fuid behavior, has enough repulsive forces between particle.Thereby the polymeric dispersant of 1wt% dispersed paste fully.In the ceria sizing agent 1～3 to different solid contents, the macroparticle number (No./ml) of unit volume is measured, and the results are shown in Table 4.
Table 4
| Solid content | ??≥0.79μm | ??≥0.99μm | ??≥1.99μm | ?≥2.99μm | ?≥3.97 | |
| Slurry | ||||||
| 1 | ??10wt％ | ??1,651,667,302 | ??698,422,082 | ??15,114,325 | ?2,085,587 | ?544,858 |
| | ??5wt％ | ??1,819,672,612 | ??649,084,250 | ??1,304,698 | ?8,650 | ?3,802 |
| | ??2.5wt％ | ??1,330,223,565 | ??271,543,773 | ??142,401 | ?2,408 | ?25 |
[CMP test result]
Carried out the polishing test with the ceria sizing agent that obtains, offseted removal rates and surface scratch quantity and polishing selectivity and estimate.Carry out the test of CMP polishing performance with the above ceria sizing agent that obtains 1～3, before test, solid content has been controlled at 1wt%.Equipment is the made 6EC of U.S. Strasbaugh company; One is utilized PE-TEOS (plasma strengthen handled TEOS oxide gas settling) is 8 at the diameter that whole surface generates oxide film " circular wafer, other one is employing Si
3N
4The diameter that generates nitrided film on whole surface is 8 " circular wafer.Testing circumstance condition and running stores are as follows:
1) polishing pad: IC1000/SUBAIV (buying) by U.S. Rodel company;
2) instrument of measurement viscous layer thickness: Nano-Spec 180 (buying) by U.S. Nano-metrics company;
3) rotating speed of table: 70rpm;
4) spindle rotating speed: 70rpm;
5) downward pressure: 4psi;
6) back pressure: 0psi;
7) polishing slurries consumption: 100ml/min;
8) measurement of residual polishing particle and cut is adopted: the Surfscan SP1 that U.S. KLA-Tencor makes.
Oxide film (PE-TEOS) and nitrided film (Si are arranged
3N
4) wafer surface adopt the made polishing slurries of above-mentioned example 1-11 polishing 1 minute.Polish removal rate is measured by the variation of wafer surface adhesive film thickness, and polishing causes cut to measure with Surfscan SP1.A primary wafer polishing can be adopted later aforesaid method to carry out polishing performance and detect more than three times or three times.The mean value of test result sees Table 5.
Table 5
| Solid content of slurry (wt%) | The elimination speed of oxide film (/min) | The elimination speed of nitride film (/min) | Oxide compound is eliminated speed/nitride and is eliminated speed (selection rate) | ??WIWNU ??(％) | The residual particles of oxide film (No.) | Cut (No.) | |
| | ??10 | ??2520 | ??48 | ??52.5 | ??1.0 | ??382 | ??2 |
| | ??5 | ??2617 | ??49 | ??53.4 | ??1.1 | ??317 | ??0 |
| | ??2.5 | ??2620 | ??47 | ??55.7 | ??1.1 | ??259 | ??0 |
| Simultaneous test (conventional art) | ??5 | ??2404 | ??46 | ??52.3 | ??1.2 | ??430 | ??3 |
As mentioned above, the slurry 1～3 with different solid contents filters the number (seeing Table 4) of the macroparticle of control different-grain diameter.The number of macroparticle is controlled under the identical condition, carries out the CMP test-results and see Table 5.Slurry 1～3 all has goodish elimination speed, eliminates selectivity (oxide film is to the elimination speed ratio of nitrided film) and good silicon chip surface material removal heterogeneity (WIWNU).For slurry 1, owing to filter under higher solid content, small-particle also is filtered, and the removal speed of oxide film has slight reducing.The number of macroparticle all is controlled in the scope of allowing in the slurry 1～3, has only considerably less cut.When slurry than produce under the low-solid content, disperse, during transportation, slurry is easier to disperse again, and the residual particles number of oxide film and cut reduce.Therefore, the present invention has prepared a kind of high performance polishing slurries by the macroparticle number under control slurry solid content and the certain particle diameter.
As mentioned above, the present invention has prepared a kind of polishing slurries with good physical, and this is extremely important for the employed rumbling compound of CMP in the semiconductor fabrication process.Particularly can reduce major defect and the residual particles of element behind CMP.
Furthermore, the present invention has developed and a kind ofly can reduce the element defective, can keep the polishing slurries of higher removal speed again by the control solid content.
The present invention has prepared a kind of high-performance slurry of the CMP of being used for rumbling compound.When being used for the CMP rumbling compound, slurry can be used under the desired various different modes of superelevation integrated semiconductor production process, and has good removal speed, removal selectivity, silicon chip surface material removal heterogeneity (WIWNU) and minimum microcosmic cut.
Claims (16)
1. polishing slurries: comprising:
Be dispersed in the polishing particle in this polishing slurries,
Wherein under different solid contents and particle diameter, the number of the macroparticle in the particle is polished in control.
2. polishing slurries according to claim 1, the number of wherein big polishing particle reduces with the reduction of solid content.
3. polishing slurries according to claim 2, wherein when solid content reduces, polishing the speed that number of particles reduces greatly increases with particle diameter.
4. polishing slurries according to claim 1, wherein 〉=1 accumulation number≤1 * 10 of the polishing particle of μ m
10/ ml.
5. polishing slurries according to claim 2, wherein 〉=2 accumulation number≤1 * 10 of the polishing particle of μ m
9/ ml, accumulation number≤1 * 10 of the polishing particle of 〉=3 μ m
7/ ml.
6. according to the described polishing slurries of claim 1～5, the size distribution of wherein polishing particle has isolating sized particles peak.
7. according to the described polishing slurries of arbitrary claim in the claim 1～5, wherein when solid content is 8～12wt%, accumulation number≤1 * 10 of the polishing particle of 〉=0.99 μ m
10/ ml, accumulation number≤1 * 10 of the polishing particle of 〉=1.99 μ m
9/ ml, accumulation number≤1 * 10 of the polishing particle of 〉=2.99 μ m
7/ ml.
8. according to the described polishing slurries of arbitrary claim in the claim 1～5, wherein when solid content is 6～8wt%, accumulation number≤1 * 10 of the polishing particle of 〉=0.99 μ m
10/ ml, accumulation number≤5 * 10 of the polishing particle of 〉=1.99 μ m
8/ ml, accumulation number≤1 * 10 of the polishing particle of 〉=2.99 μ m
6/ ml.
9. according to the described polishing slurries of arbitrary claim in the claim 1～5, wherein when solid content is 4～6wt%, accumulation number≤1 * 10 of the polishing particle of 〉=0.99 μ m
10/ ml, accumulation number≤1 * 10 of the polishing particle of 〉=1.99 μ m
8/ ml, accumulation number≤1 * 10 of the polishing particle of 〉=2.99 μ m
5/ ml.
10. according to the described polishing slurries of arbitrary claim in the claim 1～5, wherein when solid content is 2～4wt%, accumulation number≤5 * 10 of the polishing particle of 〉=0.99 μ m
9/ ml, accumulation number≤5 * 10 of the polishing particle of 〉=1.99 μ m
7/ ml, accumulation number≤1 * 10 of the polishing particle of 〉=2.99 μ m
4/ ml.
11. according to the described polishing slurries of arbitrary claim in the claim 1～5, wherein when solid content is 0.5～2wt%, accumulation number≤5 * 10 of the polishing particle of 〉=0.99 μ m
9/ ml, accumulation number≤1 * 10 of the polishing particle of 〉=1.99 μ m
7/ ml, accumulation number≤5 * 10 of the polishing particle of 〉=2.99 μ m
3/ ml.
12. according to the described polishing slurries of arbitrary claim in the claim 1～5, wherein polishing particle is cerium dioxide, produces with process for solid phase synthesis.
13. according to the described polishing slurries of arbitrary claim in the claim 1～5, wherein slurry comprises deionized water and anionic polymer.
14. polishing slurries according to claim 13, wherein anionic compound is selected from by poly-methyl-prop diluted acid, poly-methyl-prop diluted acid ammonium, polycarboxylate, sodium laurylsulfonate, alkylbenzene sulfonate, sulfonated, single alkyl phosphonic acid or the sodium salt of lipid acid, the group that carboxylic acid-acrylate copolymer is formed.
15. a method of polishing predetermined substrate is used the described polishing slurries of arbitrary claim in the claim 1～5.
16. the method for polishing predetermined substrate according to claim 15 wherein forms silicon oxide film on the predetermined substrate.
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| CN102337086A (en) * | 2011-08-10 | 2012-02-01 | 上海华明高纳稀土新材料有限公司 | Lanthana cerium oxyfluoride rare earth polishing liquid and preparation method thereof |
| CN112930377A (en) * | 2018-11-16 | 2021-06-08 | 凯斯科技股份有限公司 | Polishing slurry composition and method for preparing the same |
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| KR100336598B1 (en) * | 1996-02-07 | 2002-05-16 | 이사오 우치가사키 | A Cerium Oxide Particle for the Preparation of a Cerium Oxide Abrasive |
| CN1245471C (en) * | 1996-09-30 | 2006-03-15 | 日立化成工业株式会社 | Cerium oxide abrasive and method of polishing substrates |
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| CN102337086A (en) * | 2011-08-10 | 2012-02-01 | 上海华明高纳稀土新材料有限公司 | Lanthana cerium oxyfluoride rare earth polishing liquid and preparation method thereof |
| CN112930377A (en) * | 2018-11-16 | 2021-06-08 | 凯斯科技股份有限公司 | Polishing slurry composition and method for preparing the same |
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