CN1686944A - Method for preparing high heatconducting aluminium nitride ceramic base sheets through powder metallurgical technique - Google Patents
Method for preparing high heatconducting aluminium nitride ceramic base sheets through powder metallurgical technique Download PDFInfo
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- CN1686944A CN1686944A CNA2005100730503A CN200510073050A CN1686944A CN 1686944 A CN1686944 A CN 1686944A CN A2005100730503 A CNA2005100730503 A CN A2005100730503A CN 200510073050 A CN200510073050 A CN 200510073050A CN 1686944 A CN1686944 A CN 1686944A
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- powder
- aluminium nitride
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- sintering
- high heat
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Abstract
Description
Sequence number | ????1 | ????2 | ????3 | ||
The embodiment of the invention | Material composition (wt%) | ???AlN+3%Y 2O 3 | ????AlN+1.5%Y 2O 3+2.5% ????Dy 2O 3 | ????AlN+2.0%Y 2O 3+1.5% ????CaO+1.0%CaF 2+0.5% ????SrO | |
Powder mean particle sizes | ???0.5μm | ????3μm | ????6μm | ||
The binding agent kind | The gasoline solution of 4.5wt% buna | The spirituous solution of 3.5wt% ethyl cellulose | The spirituous solution of 7.5wt% polyvinyl alcohol | ||
The binding agent add-on | ???450ml/kg | ????520ml/kg | ????550ml/kg | ||
Join powder | Wet-mixed | 10 hours | 7 hours | 13 hours | |
Add the glue granulation | Mix the glue time | 1.0 hour | 0.5 hour | 1.5 hour | |
Bake out temperature | ???75℃ | ????50℃ | ????60℃ | ||
Drying time | ???40min | ????30min | ????15min | ||
Cold isostatic compaction | Moulding process | ???215MPa*10min | ????200MPa*15min | ????180MPa*30min | |
Sintering | Binder removal technology | ???10 -1* was 770 ℃ in Pa*3 hour | ????10 -2* was 680 ℃ in Pa*2 hour | ????10 -3* was 550 ℃ in Pa*4 hour | |
Soaking time | 2 hours | 1.5 hour | 1 hour | ||
Heat-up time | 5 hours | 7 hours | 9 hours | ||
Sintering process | 2000 ℃ of * 3 hours | 1850 ℃ of * 6 hours | 2150 ℃ of * 1.5 hours | ||
The sintering briquette size | ???Φ41*80mm | ????52*52*65mm | ????152*27*20mm | ||
Sizes of substrate | ???Φ40*1.5mm | ????50.8*50.8*1.0mm | ????150*25*1.5mm |
Sequence number | Sintering briquette density | Thermal conductivity | |
The embodiment of the invention | ????1 | ????3.39g/cm 3 | ????220W/mK |
????2 | ????3.36g/cm 3 | ????198W/mK | |
????3 | ????3.38g/cm 3 | ????210W/mK | |
Comparative Examples CN1087010C | ????4 | ????3.35g/cm 3 | ????165W/mK |
????5 | ????3.33g/cm 3 | ????190W/mK | |
????6 | ????3.34g/cm 3 | ????110W/mK | |
Comparative Examples CN1557776A | ????7 | ????--- | ????138W/mK |
Claims (3)
Priority Applications (1)
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CNB2005100730503A CN1332910C (en) | 2005-05-31 | 2005-05-31 | Method for preparing high heatconducting aluminium nitride ceramic base sheets through powder metallurgical technique |
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CNB2005100730503A CN1332910C (en) | 2005-05-31 | 2005-05-31 | Method for preparing high heatconducting aluminium nitride ceramic base sheets through powder metallurgical technique |
Publications (2)
Publication Number | Publication Date |
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CN1686944A true CN1686944A (en) | 2005-10-26 |
CN1332910C CN1332910C (en) | 2007-08-22 |
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CNB2005100730503A Expired - Fee Related CN1332910C (en) | 2005-05-31 | 2005-05-31 | Method for preparing high heatconducting aluminium nitride ceramic base sheets through powder metallurgical technique |
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Cited By (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101985396A (en) * | 2010-11-03 | 2011-03-16 | 刘述江 | Method for preparing aluminum nitride ceramic substrate by clinker slicing |
CN102581271A (en) * | 2012-03-30 | 2012-07-18 | 吉林大学 | Powder metallurgy material mixing method |
CN103121848A (en) * | 2013-02-25 | 2013-05-29 | 潮州三环(集团)股份有限公司 | Aluminum nitride ceramic substrate sintering technology |
CN103539457A (en) * | 2013-09-29 | 2014-01-29 | 合肥工业大学 | Preparation method of AlN ceramic base plate for microelectronic packaging |
CN106830945A (en) * | 2016-11-30 | 2017-06-13 | 莱鼎电子材料科技有限公司 | It is a kind of to add the method that composite sintering agent prepares high heat conduction aluminium nitride ceramic substrate |
CN108147821A (en) * | 2017-12-21 | 2018-06-12 | 北京华进创威电子有限公司 | A kind of high-purity nitride porous aluminium crystallite material source preparation method |
CN109400175A (en) * | 2018-11-15 | 2019-03-01 | 中国科学院上海硅酸盐研究所 | A kind of preparation method of high thermal conductivity silicon nitride ceramics substrate material |
CN109809833A (en) * | 2019-04-01 | 2019-05-28 | 河北工业大学 | A kind of high thermal conductivity porous material and preparation method thereof |
CN110628223A (en) * | 2019-11-01 | 2019-12-31 | 银川艾森达新材料发展有限公司 | Heat-conducting filler |
CN115261747A (en) * | 2021-04-29 | 2022-11-01 | 苏州铜宝锐新材料有限公司 | Powder metallurgy composite functional material, and manufacturing method and application thereof |
US20230069395A1 (en) * | 2021-08-30 | 2023-03-02 | Applied Materials, Inc. | Stress treatments for cover wafers |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58162675A (en) * | 1982-03-23 | 1983-09-27 | Ricoh Co Ltd | Ink medium |
CN1130607A (en) * | 1995-11-17 | 1996-09-11 | 清华大学 | Method for manufacturing high-heat conductivity aluminium nitride ceramics |
JP2004192872A (en) * | 2002-12-09 | 2004-07-08 | Toshiba Ceramics Co Ltd | Aluminum nitride heater |
-
2005
- 2005-05-31 CN CNB2005100730503A patent/CN1332910C/en not_active Expired - Fee Related
Cited By (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101985396A (en) * | 2010-11-03 | 2011-03-16 | 刘述江 | Method for preparing aluminum nitride ceramic substrate by clinker slicing |
CN101985396B (en) * | 2010-11-03 | 2013-03-20 | 刘述江 | Method for preparing aluminum nitride ceramic substrate by clinker slicing |
CN102581271A (en) * | 2012-03-30 | 2012-07-18 | 吉林大学 | Powder metallurgy material mixing method |
CN103121848A (en) * | 2013-02-25 | 2013-05-29 | 潮州三环(集团)股份有限公司 | Aluminum nitride ceramic substrate sintering technology |
CN103121848B (en) * | 2013-02-25 | 2015-08-19 | 潮州三环(集团)股份有限公司 | A kind of aluminum nitride ceramic substrate sintering process |
CN103539457A (en) * | 2013-09-29 | 2014-01-29 | 合肥工业大学 | Preparation method of AlN ceramic base plate for microelectronic packaging |
CN106830945A (en) * | 2016-11-30 | 2017-06-13 | 莱鼎电子材料科技有限公司 | It is a kind of to add the method that composite sintering agent prepares high heat conduction aluminium nitride ceramic substrate |
CN108147821B (en) * | 2017-12-21 | 2021-04-27 | 北京华进创威电子有限公司 | Preparation method of high-purity porous aluminum nitride crystal material source |
CN108147821A (en) * | 2017-12-21 | 2018-06-12 | 北京华进创威电子有限公司 | A kind of high-purity nitride porous aluminium crystallite material source preparation method |
CN109400175A (en) * | 2018-11-15 | 2019-03-01 | 中国科学院上海硅酸盐研究所 | A kind of preparation method of high thermal conductivity silicon nitride ceramics substrate material |
CN109400175B (en) * | 2018-11-15 | 2020-07-31 | 中国科学院上海硅酸盐研究所 | Preparation method of high-thermal-conductivity silicon nitride ceramic substrate material |
CN109809833A (en) * | 2019-04-01 | 2019-05-28 | 河北工业大学 | A kind of high thermal conductivity porous material and preparation method thereof |
CN109809833B (en) * | 2019-04-01 | 2021-09-28 | 河北工业大学 | Composite phase-change material and preparation method thereof |
CN110628223A (en) * | 2019-11-01 | 2019-12-31 | 银川艾森达新材料发展有限公司 | Heat-conducting filler |
CN115261747A (en) * | 2021-04-29 | 2022-11-01 | 苏州铜宝锐新材料有限公司 | Powder metallurgy composite functional material, and manufacturing method and application thereof |
CN115261747B (en) * | 2021-04-29 | 2023-08-22 | 苏州铜宝锐新材料有限公司 | Powder metallurgy composite functional material, manufacturing method and application thereof |
US20230069395A1 (en) * | 2021-08-30 | 2023-03-02 | Applied Materials, Inc. | Stress treatments for cover wafers |
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Publication number | Publication date |
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CN1332910C (en) | 2007-08-22 |
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Owner name: ANTAI SCIENCE AND TECHNOLOGY CO., LTD. Free format text: FORMER OWNER: ANTAI SCIENCE AND TECHNOLOGY CO., LTD.; IRON AND STEEL RESEARCH GEUERAL INST. Effective date: 20070914 |
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Effective date of registration: 20070914 Address after: 100081 No. 76 South College Road, Beijing, Haidian District Patentee after: ADVANCED TECHNOLOGY & MATERIALS Co.,Ltd. Address before: 100081 No. 76 South College Road, Beijing, Haidian District Co-patentee before: CENTRAL IRON AND STEEL Research Institute Patentee before: ADVANCED TECHNOLOGY & MATERIALS Co.,Ltd. |
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Granted publication date: 20070822 |