CN1685151A

CN1685151A - Liquid pump

Info

Publication number: CN1685151A
Application number: CNA038158035A
Authority: CN
Inventors: 舛重荣治; 名知毅
Original assignee: Nabtesco Corp
Current assignee: Nabtesco Corp
Priority date: 2002-07-04
Filing date: 2003-07-04
Publication date: 2005-10-19
Also published as: KR20050043886A; WO2004005711A1; TW200407505A; JPWO2004005711A1; AU2003246275A1; EP1553292A4; EP1553292A1

Abstract

The invention is directed to provide a liquid pump (lubricant circulation or lubricant supply pump) that is capable of lubricating a machine or apparatus even in a case that a passage supplying a liquid (lubricant) is in a vacuum condition. To solve the above, the invention is characterized in a liquid pump (lubricant circulation or lubricant supply pump) for delivering a liquid (lubricant) from a liquid storing portion (lubricant storing portion) to a predetermined position of at least one location, wherein at least one cylinder chamber is formed inside of the pump, a piston is arranged to reciprocate by a driving means in the cylinder chamber, the cylinder chamber is communicated with a liquid (lubricant) delivery port, so that the liquid (lubricant) discharged into a fluid passage communicating with the predetermined position of at least one location, the driving means is provided with a solenoid including an axial portion all of which or at least a part of which is made of a ferromagnetic substance and a solenoid coil that are relatively movable to each other, the axial portion all of which or at least a part of which is made of the ferromagnetic substance and the cylinder chamber are fixed by a predetermined means.

Description

Liquid pump

Technical field

The present invention relates to the liquid pump of the lubrication channel that a kind of outside that can form by using solenoid with lubrication channel isolates fully, and relate to have a plurality of can be along the piston of axis relative movement and the liquid pump of cylinder inner chamber, and device with described liquid pump.

Background technique

At present existing multiple pump is used for liquid is transported to another part from a part.Said pump need not leaked when liquid is operated.And, also need liquid to be transported to another part from a part with constant flow rate.

For example, there is a kind of pump to adopt rotary pump mechanism to come supply fluid as lubricating fitting.Rotary pump is a pump of carrying liquid by blade, and it is similar to fan or is furnished with the function of the propeller of motor.Herein, " blade " forms the fin with angle, and it fits closely in the pump.By blade is rotated in liquid with constant direction, produce the flow of liquid of constant direction, make liquid in pipeline, flow with constant direction.

Also has a kind of rotary-type pump of axle that adopts screw blade.And, also having a kind of liquid pump, it adopts the spiral screw feeder blade of the length of using in boring, to replace relatively little blade.According to spiral axle rotary pump, its screw rod is with high speed rotating.According to the method that realizes above-mentioned rotary pump, liquid pump 3 is installed in the outside of liquid storage case 1 by shaft seal 2, as shown in figure 12.Figure 12 illustrates the leaf type liquid pump, and by running shaft 5 rotations of motor 6 drive vane 4 liquid is carried from delivery port 7.

And, according to rotary vacuum pump, the Lubricants of bearing or gear is loaded in the space that gear is set, and (for example by the device that is provided for Lubricants is directed to gear or bearing, spatter the liquid plate), or a gear part is immersed in the Lubricants, utilize the gear rotation that Lubricants is offered bearing or gear.

But, when use has the liquid pump of said structure, there is following problems, that is, because shaft seal 2 slides in rotatablely moving, liquid pollutes from leaking between running shaft and the shaft seal.And when the wearing and tearing of Sealing aggravated, leakage rate also increased, and the motor that constitutes electrically driven (operated) pump drive portion can be damaged.

And, be used to make the Lubricants circulation time of rotary vacuum pump with following structure when liquid pump with above-mentioned rotary part, described structure promptly, need lubricated bearing or gear to install in a vacuum, although not only will prevent to be placed in the bearing of internal vacuum chamber or gear leaks into vacuum pump with Lubricants outside, and to prevent that outside air from entering in the pump, but still the situation that seal shaft weares and teares owing to rotary driving may occur, air enters vacuum chamber or Lubricants leaks into outside possibility increase.For example, when vacuum pump was used in the semiconductor-fabricating device, clean room might be by oil pollution and the production in heavy damage semiconductor workshop.And, when a large amount of Lubricantss leak, can not supply with enough Lubricantss, might damage parts such as bearing, gear.

Also have other problem, when the pressure of bearing portion owing to carrying a large amount of Lubricantss to increase, Lubricants or oil molecule might leak and enter the discharge opeing chamber, and enter and forbid by in the vacuum chamber of oil pollution.And, when oil circulation time in a vacuum, there is such problem, that is, not only outside air enters lubrication channel inside, the vacuuming operation of vacuum pump is played negative effect, and owing to can not carry Lubricants with air mixing.In addition, when increasing the amount of the Lubricants of carrying, might locate to form resistance at bearing portion or gear etc., thereby increase the energy consumption of pump, the heat that bearing portion produces also increases, and bearing can be damaged.And when the amount of Lubricants very hour, can not realize sufficient lubrication again.

And, rotary pump in the background technique needs high speed rotating so that liquid is transported to another part from a part, therefore can not the controlling and driving rotary pump to realize following purpose: delivery of small amounts of liquids, accurately control quantity delivered, end rotary pump to end flow of liquid, for conveying liquid increases revolution fast, or intermittent delivery liquid; In addition, accurately to control flow velocity also be difficult in order to address the above problem.

When liquid is supplied to a plurality of part, still there is a problem, that is,,, can not reliably supply to various piece so liquid flows to the part that flows to easily owing to only shunt liquid supply passage a part.Therefore, although it is contemplated that increase feed fluid is shunted device to a plurality of liquid supply units, this will make mechanism become complicated more, costliness, but also need the mounting point.In addition,, also there is such problem, that is, when lubrication channel is introduced in the vacuum, is difficult to shunt according to a kind of general above-mentioned part flow arrangement.

And according to the bearing of lubricated vacuum pump or the device of gear in the prior art, there is such problem in it, that is, running shaft or gear are immersed in the oil, therefore, produce resistance in rotation, have increased energy consumption.

Summary of the invention

The invention provides a kind of liquid pump, it is used for liquid is stored the pre-position that portion is transported at least one position from liquid, wherein, being formed with at least one is used for storing the cylinder inner chamber that portion introduces liquid from liquid, settling piston in the described cylinder inner chamber, described cylinder inner chamber is formed with the liquid delivery port, and described piston comprises the drive unit that is used for driving vertically at described cylinder inner chamber cylinder body.The piston of described cylinder inner chamber can vertically be settled, also can horizontal setting.In addition, described piston and cylinder inner chamber can be arranged in the inside that liquid stores portion.

The invention is characterized in that described piston inserts from an end of described cylinder inner chamber, the other end of described cylinder inner chamber is provided with described liquid delivery port.Although delivery port can be set at end, but, by opening delivery port near the vicinity, end of cylinder inner chamber slightly in cylinder inner chamber side, after utilizing piston to close the delivery port of cylinder inner chamber, store the effect of playing mat at the liquid of cylinder inner chamber end, can prevent that the end of piston and cylinder inner chamber from contacting with each other and destroyed or generation dust.

The invention is characterized in that the two ends of described piston are provided with a pair of cylinder inner chamber, described piston inserts from an end of each cylinder inner chamber, and the other end of each described cylinder inner chamber has the liquid delivery port.Although when cylinder inner chamber horizontal arrangement, gravity is difficult to jet power is exerted an influence, if necessary, this can change several angle to the cylinder inner chamber.

The invention is characterized in that in described piston and described cylinder inner chamber, the sectional shape of described piston and described cylinder inner chamber and/or length are optimized according to the amount of feed fluid.In addition, by vertically the cylinder inner chamber being separated into a plurality of chambeies, and the jetburner in piston and each chamber is set, can controls the amount of feed fluid more accurately according to the shape of the cylinder inner chamber that is arranged to a plurality of chambeies.

The invention is characterized in that described piston is inserted in the described cylinder inner chamber, and described cylinder inner chamber is formed with single or multiple liquid delivery ports.Can also be vertically the part that a plurality of cross-section areas strengthen be set and realizes said structure with fixed intervals.

The invention is characterized in, the cylinder inner chamber forms the structure of single hop or multistage stepped part, the shape of the shape of described piston and described cylinder inner chamber is basic identical, and described liquid delivery port is positioned on the single hop or multistage that is formed at each stepped part on the described cylinder inner chamber.

The invention is characterized in, the single hop of described cylinder inner chamber or multistage stepped part form vertically symmetry substantially, the shape of the shape of described piston and the stepped part of described basic symmetry is basic identical, and, be formed on the single hop of each stepped part on the described cylinder inner chamber or the multistage and be formed with the liquid delivery port.

The invention is characterized in that described cylinder inner chamber is provided with the single hop that is used to form described basic symmetry or the parts of multistage stepped part.

The invention is characterized in, liquid storage space between described cylinder inner chamber and the piston is constructed its shape in the following manner, the axial relative length of promptly described cylinder inner chamber and piston and/or be optimized according to the amount of liquid of being supplied with the cross-section area of axis normal.In addition, by vertically the cylinder inner chamber being separated into a plurality of chambeies, and the jetburner in piston and each chamber is set, can controls the amount of feed fluid more accurately according to the shape of the cylinder inner chamber that is arranged to a plurality of chambeies.

The invention is characterized in that described cylinder inner chamber has the Liquid extracting hole.Although described Liquid extracting hole is connected to the liquid Storing case, described Liquid extracting hole can constitute liquid supplying port.

The invention is characterized in that a plurality of this structure that the cylinder inner chamber is formed with single hop or multistage stepped part is connected in series.

The invention is characterized in that described a plurality of pistons and cylinder inner chamber are equipped with single drive unit.

The invention is characterized in, described drive unit is made of solenoid, solenoid comprises axial region and the electromagnetic coil that has ferromagnetic substance in whole or in part, described axial region and electromagnetic coil can move mutually, the described axial region of being kept apart by the partition between described axial region and the electromagnetic coil does not contact each other with electromagnetic coil, and described axial region and piston are by predetermined connection set concerted action.

The invention is characterized in that described partition is formed by the partition that comprises non-magnetic part, the material that forms partition can be copper, aluminium, stainless steel, pottery and plastic resin etc.

The invention is characterized in a kind of vacuum pump, it uses solenoid as drive unit, use described liquid pump as Lubricants circulation or Lubricants supply pump, and, need lubricated part sealed with the lubrication channel of the necessary part that is used to Lubricants circulation or Lubricants supply pump conveying Lubricants.

The invention is characterized in a kind of device with rotary part, it need lubricate described rotary part with Lubricants, form one be used to store Lubricants, be communicated with so that Lubricants flows to the Lubricants Storing case at this place with described device with rotary part, and, Lubricants circulation or Lubricants supply pump and the supply passage that is used for from the Lubricants Storing case oil being supplied to the lubricated predetermined part of needs are set.As the device with rotary part, it has rotary-type vacuum pump, reducing gear etc.

The invention is characterized in, be used to Lubricants circulation or Lubricants supply pump to carry the necessary part of Lubricants to be integrally formed in the inside that described Lubricants stores portion.

The invention is characterized in that described Lubricants Storing case is arranged in such position, in this position, described Lubricants with device of rotary part utilizes gravity flow.

The invention is characterized in that described liquid pump is as lubricated or Lubricants supply pump.

Description of drawings

Fig. 1 is that the liquid pump of first embodiment of the invention is supplied the long splice composition of the pump of Lubricants as the Lubricants that is used for the circulating vacuum pump or to it.

Fig. 2 is another embodiment of first embodiment's piston portion.

Fig. 3 is that the liquid pump of second embodiment of the invention is supplied the long splice composition of the pump of Lubricants as the Lubricants that is used for the circulating vacuum pump or to it.

Fig. 4 be along with the sectional view of the substantially horizontal of the liquid pump parallel axes of third embodiment of the invention.

Fig. 5 be along with the sectional view of the vertical direction of the liquid pump parallel axes of third embodiment of the invention.

Fig. 6 is the piston of fourth embodiment of the invention liquid pump and the sectional view of cylinder inner chamber.

Fig. 7 is the piston of fifth embodiment of the invention liquid pump and the sectional view of cylinder inner chamber.

Fig. 8 is the piston of sixth embodiment of the invention liquid pump and the sectional view of cylinder inner chamber.

Fig. 9 illustrates the pump that is used for circulating lubrication liquid or first embodiment's Lubricants is supplied to the oil lubrication circulatory system of screw type vacuum pump.

Figure 10 illustrates the example of Lubricants recycle pump of the prior art.

Embodiment

Below in conjunction with description of drawings according to various liquid pumps of the present invention as Lubricants circulation or Lubricants supply pump.

Fig. 1 is the structural drawing that Lubricants circulation of the present invention or Lubricants supply pump are connected to vacuum pump.In Fig. 1, first embodiment of reference character 100 expressions Lubricants circulation of the present invention or Lubricants supply pump.

Reference character 101 expression housings, wherein full of liquid 103.Reference character 102 expressions comprise the plunger of magnetic part, and the base portion 104 that comprises magnetic part is arranged on the bottom of plunger 102.Reference character 105 expression electromagnetic coils.The plunger 102 and the gap between the electromagnetic coil 105 that comprise magnetic part are separated by housing 101 and non magnetic cylinder body (partition) 109.

In addition, the space that is used to deposit Lubricants is by the sealing of the O type ring on housing 101, non magnetic cylinder body 109 and the base portion 104, thereby isolates fully with space outerpace, to prevent that Lubricants from flowing to outside and outside atmosphere enters.Between plunger 102 and base portion 104, spring 106 is set, and when magnetic force was not applied on plunger 102 and the base portion 104, plunger 102 and base portion 104 were separated from each other.When making electric current flow to electromagnetic coil 105, comprise between the plunger 102 of the magnetic part that is magnetized and the base portion 104 and be applied in suction, plunger 102 can move downward.Therefore, by making the electric current On/Off that flows through electromagnetic coil, plunger can be along upper and lower to by Continuous Drive.The joining portion of plunger 102 lower ends and base portion upper end constitutes taper so that realize not relying on the big suction of plunger 102 positions.In addition, when plunger 102 and base portion 104 began to contact with each other, suction disappeared, and therefore, for avoiding contact, between plunger 102 and base portion 104 anti-contact structures is set, thereby produces little gap reliably between them.In this embodiment, stepped part 108 is set, is used for before plunger 102 and base portion 104 contact with each other, making plunger 102 stop motions in plunger upper part.Be fixed with a plurality of pistons 110 on the plate 122 of plunger 102 one.

Piston 110 is designed to be inserted into respectively in a plurality of cylinder inner chambers 112.And cylinder inner chamber 112 is placed in the liquid.Cylinder inner chamber 112 links to each other with the pipeline 114,115 of carrying liquid.Pipeline 114,115 is connected to vacuum pump 130 Lubricants is transported to vacuum pump 130.Lubricants is fallen the lubricated sap cavity 150 (liquid storage portion) from vacuum pump 130.Therefore, because the motion of plunger 102 and piston 110 one, thus the electric power starting by making electromagnetic coil/close, piston 110 to-and-fro motion in cylinder inner chamber 112, thus the liquid in the cylinder inner chamber 112 is discharged from pipeline 114,115 continuously.Prevent that by detecting valve 116,117 liquid of carrying from turning back in the cylinder inner chamber.Therefore, can supply with the Lubricants of established amount reliably.

In addition, as shown in Figure 2, when on the part of piston 110 spring 118 being set, plunger 102 is extrusion piston 110 only, and piston returns by spring 118, there is no need piston 110 is fixedly attached on the plunger 102.

Pipeline 114,115 is connected with Lubricants delivery port 111.

The invention is characterized in that the axial region that has ferromagnetic substance in whole or in part is separated, between the separate part of axial region, form spring 106 or similar elastic device.Utilize this structure, the electric power starting by making electromagnetic coil/close, the cylinder inner chamber can move.Iron, cobalt, nickel etc. can be used for ferromagnetic component.In addition, can use rubber etc. to replace spring as elastic device.In addition, copper, aluminium, stainless steel, pottery and plastic resin etc. can be used as non-magnetic part.

Although explained the situation of a plurality of pistons according to this example, the present invention can only have a piston fully.And, supply with axial length that the amount of the required Lubricants of each several part can be by changing piston and cylinder inner chamber and/or axial cross section and amass and control.In this case, when the quantity that axially goes up component parts more for a long time, size error or alignment error axially can increase, therefore, by making piston stroke long as much as possible, make axial alignment error be difficult to be affected, the variation of Lubricants quantity delivered can be restricted to needed amount more accurately and be used for a plurality of pistons.Although in this example, between housing and the non magnetic cylinder body 109 and between non magnetic cylinder body 109 and the base portion 104 with the sealing of O shape ring, be appreciated that can adopt can seal clearance joint method seal for example welding, bonding etc.In addition, also there is such situation, when plunger and when housing section that plunger begins to contact comprises magnetic part, plunger and housing section are owing to magnetic force forms permanent magnet, thereby be difficult to be separated from each other, therefore, preferably between contact component, put at least 0.2 millimeter or bigger magnetic part.

Second embodiment of Lubricants circulation of the present invention or Lubricants supply pump is described below with reference to Fig. 3.

Fig. 3 is the another kind of long splice composition on vacuum pump of Lubricants circulation of the present invention or Lubricants supply pump.

The Lubricants circulation or the Lubricants supply pump of reference character 300 expression second embodiment of the invention.

Second embodiment's Lubricants circulation or Lubricants supply pump are that with the different of first embodiment a plurality of pistons 310 face toward the sides of vacuum pump 320, and other structure is identical with first embodiment.In addition, with first embodiment and second embodiment's combination, can obtain such structure, that is, the cylinder inner chamber can be placed in the two ends of piston, and when plunger moved on either direction, Lubricants can be carried equably.In this case, such structure can also be arranged, that is, cylinder inner chamber and the vertical motion of piston relative gravity, in this case, gravity can be exempted the influence of the carrying capacity of each cylinder inner chamber.

Below in conjunction with the attached Figure 4 and 5 explanation third embodiment of the present invention.

Fig. 4 be along with the sectional view of the substantially horizontal of the parallel axes of the liquid pump of third embodiment of the invention (Lubricants circulation or Lubricants supply pump).Fig. 4 illustrates electric current and is transmitted to electromagnetic coil 405, and plunger 402 and the piston 410 that is fixed to the upper arrive the most close base portion one side by magnetic force.Fig. 5 be along with the sectional view of the vertical direction of the solenoidal parallel axes of circulation of the Lubricants of third embodiment of the invention or Lubricants supply pump (liquid pump).Fig. 5 illustrates electric current and does not flow to electromagnetic coil 405, and plunger 402 and the piston that is fixed to the upper 410 are away from the state of base portion.

Reference character 402 expressions are included in the plunger with magnetic part of housing 401 inside, have the base portion 404 that comprises magnetic part in an end of plunger 402.Reference character 405 expression electromagnetic coils.Plunger 402 and the gap that comprises between the electromagnetic coil 405 of magnetic part are separated by non magnetic cylinder body (partition) 419 and base portion 404.Gap between non magnetic cylinder body 419 and the base portion 404 is separated fully by O shape ring 403, and non magnetic cylinder body 419 and the gap that is fixed between the parts 409 on the housing 401 are separated fully by O shape ring 418.In addition, the Lubricants that is stored in the gap between plunger 402 and the base portion 404 turns back to the pipeline (not shown) from exhaust port 407, so Lubricants does not constitute the resistance of plunger 402 swings.Detect valve and oily intake by being provided with, the Lubricants of being discharged by exhaust port 407 can also supply to the part that needs Lubricants.

End in plunger 402 opposite sides has disc protuberance 413.

Have spring 406 between protuberance 413 and parts 409, when plunger 402 and base portion 404 were not applied in magnetive attraction, plunger 402 and base portion 404 were separated from each other.In addition, when magnetic part is used for protuberance 413, also there is such situation, that is, when when housing section that plunger 402 begins to contact is made of magnetic part, protuberance 413 forms permanent magnets, and owing to magnetic force is difficult to separately, therefore, preferably, protuberance 413 is made of one 0.2 millimeter or bigger non-magnetic part at least.When electric current flow to electromagnetic coil 405, the plunger 402 and the base portion 404 that comprise magnetic part were magnetized, and are applied in suction between them, and plunger 402 can be towards base portion 404 motions.Therefore, by making the electric current On/Off that flows through electromagnetic coil 405, can Continuous Drive plunger 402.The joining portion of plunger 402 ends and base portion 404 ends forms taper, so that realize not relying on the big suction of plunger 402 positions.And when plunger 42 and base portion 404 began to contact with each other, suction disappeared, and therefore, for avoiding contact, between plunger 402 and base portion 404 anti-contact structures is set, thereby produces little gap reliably between them.In this embodiment, contact with parts 409 by discoidal protuberance 413, at plunger 402 with before base portion 404 contacts, plunger 402 stop motions.

Piston 410 forms as one with plunger 402.Piston has part 426 (thick portion) in the centre, have part 427 in the end, and wherein, the cross-section area perpendicular to axis of part 426 strengthens, and the cross-section area perpendicular to axis of part 427 reduces.Piston 410 is inserted in the cylinder inner cavity 424 that is formed on the cylinder inner chamber parts 423.Cylinder inner cavity 424 is made of part 428 (narrow portion), part 429 and part 431, wherein, the cross-section area of part 428 equals to be positioned at the cross-section area of part 427 (thin portion) end, that reduce perpendicular to the cross-section area of axis substantially, the cross-section area of part 429 (wide portion) equals the cross-section area perpendicular to the part 426 of the cross-section area increasing of axis substantially, is inserted into one in the part 431 and supplies with Lubricants storage space component parts (feed fluid storage space component parts) 430.In addition, wide 429 axial length designs longlyer than thick portion 426 axial lengths, and the Lubricants that stores in the space 434 and 440 between piston 410 and wide 429 is carried from Lubricants supplying mouth 432 and 433.Reference character 441 expression is used to prevent the detection valve that the Lubricants supplied with flows backwards.Utilize this structure, can supply with Lubricants to axial either direction motion by making piston.And the width of the axial space of size by changing space 434 or/and cylinder inner cavity 424 and piston 410 can be controlled the amount of supplying with Lubricants.

In addition, the end of cylinder inner cavity 424 is opened towards pipeline by Lubricants drawing hole 435, thereby, make that the Lubricants that stores in narrow 428 does not constitute resistance when piston 410 moves on the direction away from base portion 404 by making piston 410 move to a side of base portion 404.In addition, the Lubricants from pipeline is supplied to liquid pump from supplying mouth 436.

According to the liquid pump of present embodiment, the each several part that is full of Lubricants is isolated with ambient atmosphere fully by sealings such as O shape rings 403,418,437 and 438, can prevent that Lubricants from polluting the outside.In addition, the swing part of plunger 402, piston 410 etc. is full of Lubricants fully, therefore, can prevent the pollution owing to the metallic dust that wearing and tearing produced that causes of friction, the inefficacy that reduce because metallic dust etc. caused.Therefore, must use axial seal, can reduce the inefficacy that the axial seal wearing and tearing cause at swing part.For example, when liquid pump during as the Lubricants circulation of the bearing of vacuum pump or gear part or Lubricants supply pump, exist the Lubricants circulation portions in the vacuum that comprises the pump drive portion of leaking problems such as Lubricants to be passed through sealing sealing fully in the prior art, therefore, the leakage of Lubricants or the atmosphere phenomenon that enters vacuum can be avoided.

In addition, by with serial connection or parallel mode a plurality of cylinder inner cavity and piston being arranged on the single solenoid, Lubricants can supply to more parts.

Simply introduce the fourth embodiment of the present invention below with reference to accompanying drawing 6.Be different from Fig. 6 that cylinder inner chamber and piston have two sections as the bottom among the 3rd embodiment,, but have three sections wide portions promptly perpendicular to the cross section wide portions of axis.In addition, the Lubricants drawing hole that is used for the Lubricants pipeline also can be provided with the Lubricants supplying mouth.Reference character 601 expression cylinder inner cavity, reference character 602 expression pistons, Lubricants storage space component parts are supplied with in reference character 603 expressions, and reference character 604 expressions are used to prevent the detection valve that the Lubricants supplied with flows backwards.By this structure, can Lubricants supplying mouth 605 be set six positions.

By the further quantity that increases section, by single solenoid, Lubricants can supply to more part.In addition, by parallel mode a plurality of cylinder inner cavity and piston are arranged on the single solenoid, Lubricants can supply to more parts.

Fig. 7 illustrates the fifth embodiment of the present invention.Fig. 7 illustrates one type that has arranged a plurality of the 3rd example structure, and wherein, cylinder inner chamber and piston have two sections such parts among the 3rd embodiment, promptly perpendicular to the cross section wide portions of axis.Reference character 701 expression cylinder inner cavity, reference character 702 expression pistons, Lubricants storage space component parts are supplied with in reference character 703 expressions, and reference character 704 expressions are used to prevent the detection valve that the Lubricants supplied with flows backwards.By this structure, can Lubricants supplying mouth 705 be set six positions.

Fig. 8 illustrates the sixth embodiment of the present invention.Fig. 7 illustrates the thinner type of a kind of intermediate portion, and it is opposite with the 4th embodiment.Reference character 801 expression cylinder inner cavity, reference character 802 expression pistons, reference character 804 expressions are used to prevent the detection valve that the Lubricants supplied with flows backwards.By this structure, can Lubricants supplying mouth 805 be set six positions.In addition, by forming this structure, piston can be placed on the cylinder inner chamber easily, and is installed on the plunger easily, and hermetic terminal can form simple structure by flange 803 covering ends.

The liquid pump that Fig. 9 illustrates first embodiment of the invention is used for the example of the Lubricants circulatory system of vacuum pump.

Reference character 200 expression screw type vacuum pumps, reference character 250 expressions Lubricants circulation of the present invention or Lubricants supply pump.Screw type vacuum pump 200 has a pair of screw rotor 201 and 202.

Screw rotor

201 and 202 is positioned in the discharge side rotor accommodating chamber of housing 203 inside.Particularly, by housing 203 rotatably supports, screw rotor 202 passes through

bearing

205 and 207 by housing 203 rotatably supports to screw rotor 201 by bearing 204 and 206.In addition, Sealing 208,209,210 and 211 is with bearing 204,205,206 and 207 and discharge chamber 210e and isolate, the Lubricants that prevents bearing 204,205,206 and 207 bleeds in the housing 203, and prevents that external substance from entering bearing 204,205,206 and 207 from the discharge chamber 210e of housing 203.

In addition, the end of

screw rotor

201 and 202 1 sides and

timing gear

212 and 213 are fixed together, to rotate another rotation according to one of them rotation of

screw rotor

201 and 202, so that

timing gear

212 and 213 are meshing with each other.In addition, an end of screw rotor 202 and motor 214 link together integratedly.

Lubricants 217 stores the bottom of the Lubricants Storing case 216 in Lubricants circulation or Lubricants supply pump 218, near holding the gear-box 215 of timing gear 212 and 213.Lubricants Storing case 216 is placed in Lubricants of the present invention circulation or the Lubricants supply pump 218, and by Lubricants being transported to Lubricants supply passage 221,222,223 and 224 and Lubricants is supplied to four locational bearings 204,205,206 and 207.In addition, according to having structure is the vacuum pump that gear-box and bearing portion all are in vacuum state, by using such Lubricants supply system, promptly, it can form the Lubricants circulation canal of pump portion complete sealed space, that comprise the present invention, can prevent Lubricants from Lubricants recycle pump drive portion to external leaks, and prevent that atmosphere from entering vacuum pump.In addition, the application of the invention Lubricants recycle pump, the amount of feed fluid can easily be carried out trace control.In addition, by being configured to following structure, promptly, Lubricants Storing case 216 is placed in the bottom of gear-box 215 along gravitational direction, the Lubricants of gear-box 215 is because gravity flows to Lubricants Storing case 216 naturally, therefore running shaft and gear are positioned to and are not immersed in the Lubricants,, eliminate the resistance that Lubricants produces, reduced energy consumption.

In addition, although provided an example of screw type vacuum pump according to this example, the present invention can be used for any vacuum pump that needs lubricating bearings, gear etc. obviously, and irrelevant with vacuum mechanism.

Industrial applicibility

As mentioned above, liquid pump of the present invention is to be used for liquid is stored the pre-position that portion is transported at least one position from liquid, and be configured to following structure, being formed with at least one is used for storing the cylinder inner chamber that portion introduces liquid from liquid, settling piston in the described cylinder inner chamber, described cylinder inner chamber is formed with the liquid delivery port, and is provided with the drive unit that is used for driving vertically by piston at described cylinder inner chamber cylinder body.Therefore, for example, required fixed amount or a spot of Lubricantss such as bearing, gear can be supplied reliably.Supply with the heating value at the position of Lubricants and restrained, the energy consumption of device can limit lowlyer.

Liquid pump of the present invention is inserted by the end of described piston from described cylinder inner chamber, and the other end of described cylinder inner chamber is provided with described liquid delivery port.By this structure, possible delivery of small amounts of liquids is accurately controlled the amount of liquid of being carried, and the instantaneous liquid pump that stops is with the interruption flow of liquid, and controlling and driving is intermittently to carry liquid.

Liquid pump of the present invention is provided with a pair of cylinder inner chamber at the two ends of described piston, described piston inserts from an end of each cylinder inner chamber, and the other end of each described cylinder inner chamber has the liquid delivery port.

By this structure, utilize a piston liquid can be supplied to two positions.

According to liquid pump of the present invention, in described piston and described cylinder inner chamber, the sectional shape of described piston and described cylinder inner chamber and/or length are optimized according to the amount of feed fluid.By this structure, even the frequency of operated piston is identical, the amount of supplying with oil also can be controlled.In addition, even a plurality of cylinder inner chamber and piston are operated with same frequency, the amount of supplying with the oil of each cylinder inner chamber also can change.

The described piston of liquid pump of the present invention is inserted in the described cylinder inner chamber, and described cylinder inner chamber is formed with single or multiple liquid delivery ports.By this structure, utilize a piston liquid can be supplied to a plurality of parts place of two or more parts.

Liquid pump of the present invention is configured to following structure, promptly, the cylinder inner chamber forms the structure of single hop or multistage stepped part, and the shape of the shape of described piston and described cylinder inner chamber is basic identical, and described liquid delivery port is set on the single hop or multistage stepped part that is formed on the described cylinder inner chamber.By this structure, utilize simple structure just can liquid be supplied to a plurality of parts place of two or more parts by a piston.

According to liquid pump of the present invention, the single hop of described cylinder inner chamber or multistage stepped part form vertically symmetry substantially, the shape of the shape of described piston and the stepped part of described basic symmetry is basic identical, and described liquid delivery port is set on the single hop or multistage stepped part that is formed on the described cylinder inner chamber.By this structure, utilize simple structure just can liquid be supplied to a plurality of parts place of two or more parts by a piston.

According to liquid pump of the present invention, described cylinder inner chamber is provided with the single hop that is used to form described basic symmetry or the parts of multistage stepped part.By this structure, after the piston with symmetrical stepped part inserted cylinder body, by described parts are set, liquid pump is the stepped part of integrally formed basic symmetry easily.

According to liquid pump of the present invention, liquid storage space between described cylinder inner chamber and the piston is constructed its shape in the following manner, the axial relative length of promptly described cylinder inner chamber and piston and/or be optimized according to the amount of liquid of being supplied with the cross-section area of axis normal.By this structure, even the frequency of operated piston is identical, the amount of supplying with oil also can be controlled.In addition, even a plurality of cylinder inner chamber and piston are operated with same frequency, the amount of supplying with the oil of each cylinder inner chamber also can change.

Liquid pump of the present invention has the Liquid extracting hole on described cylinder inner chamber.By this structure, when the liquid that stores by piston actuated between pistons end and cylinder inner chamber, liquid can be discharged from so that piston can not be prevented from motion.

Liquid pump of the present invention has the series connection structure that a plurality of hollow portions at the cylinder inner chamber are formed with single hop or multistage stepped part, increases gradually along the cross-section area that is axially perpendicular to stepped part.By this structure, utilize simple structure just can liquid be supplied to a plurality of parts place of two or more parts by a piston.

According to liquid pump of the present invention, described a plurality of pistons and cylinder inner chamber are equipped with single drive unit.By this structure, there is no need to be provided with a plurality of drive units and drive a plurality of pistons and cylinder inner chamber, can reduce a lot of parts.

According to liquid pump of the present invention, described drive unit is made of solenoid, solenoid comprises axial region and the electromagnetic coil that has ferromagnetic substance in whole or in part, described axial region and electromagnetic coil can move mutually, the described axial region of being kept apart by the partition between described axial region and the electromagnetic coil does not contact each other with electromagnetic coil, and described axial region and piston are by predetermined connection set concerted action.By this structure, be immersed in the liquid in the complete sealed space even constitute the piston of liquid pump drive portion and axial region, axial region and piston can be operated non-contactly by electromagnetic coil, therefore, can prevent that liquid from leaking from liquid piston pump.That is to say, by the present invention, in rotary pump, can not need running shaft, there is no need to make running shaft rotation or slip on being used for liquid and extraneous O type ring that separates or shaft sealing, therefore not having liquid leaks from axial region, or when lubrication channel is vacuum, does not have atmosphere and enter lubrication channel.

According to liquid pump of the present invention, described partition is formed by the partition that comprises non-magnetic part.By this structure, the plunger that is formed by magnetic part can be only passed in the magnetic field that electromagnetic coil produces, and the suction between plunger and base portion can increase.

According to vacuum pump of the present invention, solenoid is used as drive unit.In addition, above-mentioned liquid pump is used as Lubricants circulation or Lubricants supply pump, and, need lubricated part sealed with the lubrication channel of the necessary part that is used to Lubricants circulation or Lubricants supply pump conveying Lubricants.By this structure, the part that lubricated liquid is lubricated and constitute the piston of swing part of Lubricants recycle pump and the part of driven plunger sealed, there is no need to seal swing part or/and rotary part, the possibility that Lubricants leaks reduces.Especially, when the Lubricants circulation portions is in vacuum, can reduce outside air destroys level of vacuum or/and the sealed department of rotary part enters from swing part possibility as far as possible.

According to Lubricants circulation of the present invention or Lubricants supply pump, in need device with rotary part with parts such as Lubricants lubricating bearings, form one be used to store Lubricants, be communicated with so that Lubricants flows to the Lubricants Storing case at this place with described device with rotary part, and, Lubricants circulation or Lubricants supply pump and the supply passage that is used for from the Lubricants Storing case oil being supplied to predetermined part such as bearing, gear are set.By this structure, running shaft, gear etc. is not immersed in the Lubricants, can reduce to drive resistance, can energy efficient.Device with said structure has rotary-type vacuum pump, reducing gear etc.

According to the device with rotary part of the present invention, wherein, be used to Lubricants circulation or Lubricants supply pump to carry the necessary part of Lubricants to be integrally formed in the inside of described Lubricants Storing case.By this structure, there is no need the device that oil is supplied to Lubricants circulation or Lubricants supply pump is set, and can reduce to arrange the space of Lubricants circulation or Lubricants supply pump.

According to the device with rotary part of the present invention, described Lubricants Storing case is arranged in such position, and in this position, described Lubricants with device of rotary part utilizes gravity flow.By this structure, there is no need to be provided with complicated apparatus and make Lubricants turn back to the Lubricants Storing case.

Device with rotary part according to the present invention utilizes among the claim 1-15 arbitrary described liquid pump as Lubricants circulation or Lubricants supply pump.By this structure, can simply constructed structure.

Claims

1. liquid pump, described liquid pump is used for liquid is stored the pre-position that portion is transported at least one position from liquid, wherein, being formed with at least one is used for storing the cylinder inner chamber that portion introduces liquid from liquid, settling piston in the described cylinder inner chamber, described cylinder inner chamber is formed with the liquid delivery port, and described piston comprises the drive unit that is used for driving vertically at described cylinder inner chamber cylinder body.

2. liquid pump as claimed in claim 1 is characterized in that, described piston inserts from an end of described cylinder inner chamber, and the other end of described cylinder inner chamber is provided with described liquid delivery port.

3. liquid pump as claimed in claim 1 or 2 is characterized in that, the two ends of described piston are provided with a pair of cylinder inner chamber, and described piston inserts from an end of each cylinder inner chamber, and the other end of each described cylinder inner chamber has the liquid delivery port.

4. as claim 2 or 3 described liquid pumps, it is characterized in that in described piston and described cylinder inner chamber, the sectional shape of described piston and described cylinder inner chamber and/or length are optimized according to the amount of feed fluid.

5. liquid pump as claimed in claim 1 is characterized in that, described piston is inserted in the described cylinder inner chamber, and described cylinder inner chamber is formed with single or multiple liquid delivery ports.

6. liquid pump as claimed in claim 5, it is characterized in that, the cylinder inner chamber forms the structure of single hop or multistage stepped part, and the shape of the shape of described piston and described cylinder inner chamber is basic identical, and described liquid delivery port is set on the single hop or multistage stepped part that is formed on the described cylinder inner chamber.

7. liquid pump as claimed in claim 6, it is characterized in that, the single hop of described cylinder inner chamber or multistage stepped part form vertically symmetry substantially, the shape of the shape of described piston and the stepped part of described basic symmetry is basic identical, and described liquid delivery port is set on the single hop or multistage stepped part that is formed on the described cylinder inner chamber.

8. liquid pump as claimed in claim 7 is characterized in that, described cylinder inner chamber is provided with the single hop that is used to form described basic symmetry or the parts of multistage stepped part.

9. as arbitrary described liquid pump among the claim 5-8, it is characterized in that, liquid storage space between described cylinder inner chamber and the piston is constructed its shape in the following manner, the axial relative length of promptly described cylinder inner chamber and piston and/or be optimized according to the amount of liquid of being supplied with the cross-section area of axis normal.

10. as arbitrary described liquid pump among the claim 5-9, it is characterized in that described cylinder inner chamber has the Liquid extracting hole.

11., it is characterized in that a plurality of structures that are formed with single hop or multistage stepped part at the cylinder inner chamber are connected in series each other as arbitrary described liquid pump among the claim 5-10.

12., it is characterized in that described a plurality of pistons and cylinder inner chamber are equipped with single drive unit as arbitrary described liquid pump among the claim 1-11.

13. as arbitrary described liquid pump among the claim 1-12, it is characterized in that, described drive unit is made of solenoid, solenoid comprises axial region and the electromagnetic coil that has ferromagnetic substance in whole or in part, described axial region and electromagnetic coil can move mutually, the described axial region of being kept apart by the partition between described axial region and the electromagnetic coil does not contact each other with electromagnetic coil, and described axial region and piston are by predetermined connection set concerted action.

14. liquid pump as claimed in claim 13 is characterized in that, described partition is formed by the partition that comprises non-magnetic part.

15. vacuum pump, it is characterized in that, be used as Lubricants circulation or Lubricants supply pump as claim 13 or 14 described liquid pumps, and, need lubricated part sealed with the lubrication channel of the necessary part that is used to Lubricants circulation or Lubricants supply pump conveying Lubricants.

16. device with rotary part, described device with rotary part need lubricate described rotary part with Lubricants, wherein, be formed be used to store Lubricants, be communicated with so that Lubricants flows to the Lubricants Storing case at this place with described device with rotary part, and, be provided with Lubricants circulation or Lubricants supply pump and the supply passage that is used for oil being supplied to the lubricated predetermined part of needs from the Lubricants Storing case.

17. the device with rotary part as claimed in claim 16 is characterized in that, is used to Lubricants circulation or Lubricants supply pump to carry the necessary part of Lubricants to be integrally formed in the inside of described Lubricants Storing case.

18. as claim 16 or 17 described devices with rotary part, it is characterized in that described Lubricants Storing case is arranged in following position, in this position, described Lubricants with device of rotary part utilizes gravity flow.

19., it is characterized in that arbitrary described liquid pump is used as the pump of described device among the claim 1-14 as arbitrary described device among the claim 16-18 with rotary part.