CN1673780A - Radiation sensitive composition for repairing a color filter defect and method of repairing a color filter defect - Google Patents
Radiation sensitive composition for repairing a color filter defect and method of repairing a color filter defect Download PDFInfo
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- CN1673780A CN1673780A CNA2005100046684A CN200510004668A CN1673780A CN 1673780 A CN1673780 A CN 1673780A CN A2005100046684 A CNA2005100046684 A CN A2005100046684A CN 200510004668 A CN200510004668 A CN 200510004668A CN 1673780 A CN1673780 A CN 1673780A
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
- G03F7/032—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with binders
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/20—Filters
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/0045—Photosensitive materials with organic non-macromolecular light-sensitive compounds not otherwise provided for, e.g. dissolution inhibitors
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- Spectroscopy & Molecular Physics (AREA)
- Optics & Photonics (AREA)
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Abstract
This invention provides a radiation-sensitive composition for color filter defect repair and a method for repairing a color filter defect that enable repair such that the composition is alternatively sufficiently wetted and spreads and the chromaticity difference between a repaired part and a normal part is small when a hole formed by removing the color filter defect part is filled. The radiation-sensitive resin composition for color filter defect repair contains (A) a pigment, (B) alkali soluble resin, (C) a multifunctional monomer, (D) a light radical generating agent, and (E) a solvent, and is characterized in that the composition contains a 350 to 1,000 wt. pts. multifunctional monomer for 100 wt. pts. alkali soluble resin and the (E) solvent has <3.0 mmHg mean vapor pressure at 20[deg.]C and 25 to 50 wt.% solid component density. The method for repairing the color filter defect includes the stages of: (1) charging the composition in the hole formed by removing the color filter defect part and then removing the solvent; (2) irradiating the charged part with radiation; and (3) heating the charged part after the irradiation.
Description
Technical field
The present invention relates to the radiation-sensitive resin composition that uses for the defective that produces in the colored filter that uses in the color liquid crystal display arrangement of repairing infiltration type or reflection-type, the colour pick-up tube element etc. and the restorative procedure of colored filter defective.
Background technology
At present, the formation method of the colored filter that uses in color liquid crystal display arrangement, the colour pick-up tube element etc. adopts lithography widely, promptly, use painted radiation-sensitive resin composition, through operations such as coating, radiation exposure, developments, on substrate, form the dyed layer of specific pattern shape.But, when carrying out above-mentioned processing, for example owing to apply that to adhere to the irradiation that foreign matter etc. produces on film and the substrate bad, cause producing in the dyed layer non-coloring or the low defective of colour saturation; Perhaps in coating during painted radiation-sensitive resin composition, the foreign matter that comes out from nozzle etc. is attached to the defective mode of dyed layer etc., and the result reduces product percent of pass.Above-mentioned defective mode takes to prevent measure in any case, in fact also can not get rid of fully, therefore, in order to improve product percent of pass, needs to repair the dyed layer that produces defective mode.
The method of repairing above-mentioned defective mode has proposed the whole bag of tricks according to its situation, representational method is that the spy opens the method described in the 2002-258025 communique, that is, utilize laser radiation to blow the dyed layer at the position that produces defective mode, in the hole that forms, fill reparation liquid and make it sclerosis.But, when being used in existing colored filter in this reparation liquid with painted radiation-sensitive resin composition, repair liquid in the also wetting expansion of hole periphery, can not in the hole, fill with limiting, and make the performance of reparation portion bad, at the hole of wetting expansion periphery new defective mode etc. appears perhaps.
Summary of the invention
The object of the present invention is to provide a kind of colored filter defect repair radiation-sensitive resin composition, and the restorative procedure of colored filter defective, wherein, can be when filling in the hole that forms to removing the colored filter defective part, composition limits ground abundant moistening expansion in the hole, makes defective part and the normal little reparation of portion's colour difference after the reparation.
The present inventor has carried out repeatedly research in depth to the foregoing problems in the colored filter defect repair, found that particularly, the alkali soluble resin composition and the ratio of polyfunctional monomer composition, the average vapour pressure of solvent and the performance after solid component concentration and reparation and the reparation that are used for the radiation resin combination of defect repair have confidential relation, until finishing the present invention.
First purpose of the present invention realizes by the following:
A kind of radiation-sensitive resin composition, said composition contain the combination, (D) Photoepolymerizationinitiater initiater of (A) pigment, (B) alkali soluble resin, (C) multi-functional monomer or itself and simple function monomer and (E) solvent; It is characterized in that, (C) multi-functional monomer or its content with the combination of simple function monomer relative (B) alkali soluble resin 100 weight portions are 350～1,000 weight portion, (E) solvent 20 ℃ average vapour pressure less than 3.0mmHg, solid component concentration is 25～50 weight %, and, be used for the colored filter defect repair.
Radioactive ray of the present invention are meant and comprise: the radioactive ray of luminous ray, ultraviolet ray, far ultraviolet, electronics line, X line etc.
Second purpose of the present invention realizes by the colored filter defect-restoration method therefor, it is characterized in that, comprises operation in the following sequence:
(1) removes the colored filter defective part, in the hole that forms, fill aforementioned colored filter defect repair radiation-sensitive resin composition, remove the operation of desolvating afterwards;
(2) make the operation of radiation exposure to filling part;
(3) operation of the postradiation filling part of heating.
Below the present invention is described in detail.
Colored filter defect repair radiation-sensitive resin composition
(A) pigment
At present, the colorant in the painted radiation-sensitive resin composition that uses in colored filter uses organic pigment, inorganic pigment, dyestuff, natural colouring matter etc. always.Wherein, consider that from viewpoints such as look characteristic and thermotolerances preferred pigments is especially preferably used organic pigment.The pigment of colored filter defect repair of the present invention in the radiation-sensitive resin composition, because for the part of having repaired defective (below be called " reparation portion "), require it to have identical look characteristic and thermotolerance, so preferred especially organic pigment with normal portion.
Aforementioned organic pigment for example has: at Color Index (C.I.; The distribution of The Society ofDyers and Colourists company) be categorized as the compound of pigment in, concrete example is if any the material that has following Color Index (C.I) numbering.C.I. pigment Yellow 12, C.I.C.I. pigment yellow 13, C.I. pigment Yellow 14, C.I. pigment yellow 17, C.I. pigment yellow 20, C.I. pigment yellow 24, C.I. pigment yellow 31, C.I. pigment yellow 55, C.I. pigment yellow 83, C.I. pigment yellow 93, C.I. pigment yellow 109, C.I. pigment yellow 110, C.I. pigment yellow 13 8, C.I. pigment yellow 13 9, C.I. pigment yellow 150, C.I. pigment yellow 153, C.I. pigment yellow 154, C.I. pigment yellow 155, C.I. pigment yellow 166, C.I. pigment yellow 168, C.I. pigment yellow 211;
C.I. orange 61, the C.I. pigment orange 71 of orange 51, the C.I. pigment of orange 43, the C.I. pigment of orange 36, the C.I. pigment of pigment;
C.I. Pigment Red 9, C.I. Pigment Red 97, C.I. pigment red 122, C.I. pigment red 123, C.I. pigment red 149, C.I. paratonere 168, C.I. paratonere 176, C.I. paratonere 177, C.I. paratonere 180, C.I. Pigment Red 207, C.I. paratonere 208, C.I. paratonere 209, C.I. pigment red 21 5, C.I. paratonere 224, C.I. paratonere 242, C.I. paratonere 254;
C.I. pigment violet 19, C.I. pigment Violet 23, C.I. pigment violet 29;
C.I. pigment blue 15, C.I. pigment blue 60, C.I. pigment blue 15: 3, C.I. pigment blue 15: 4, C.I. pigment blue 15: 6;
C.I. pigment Green 7, C.I. pigment green 36, C.I. naphthol green 136, C.I. naphthol green 210;
C.I. pigment brown 23, C.I. pigment brown 25.
These organic pigments can use or mix two or more use separately, according to circumstances also can use together with following inorganic pigment.
The organic pigment that uses among the present invention also can utilize crystallisation, reprecipitation method, solvent wash method, sublimed method, vaccum heating method again, and perhaps combinations thereof is made with extra care.
In addition, inorganic pigment for example has: titanium dioxide, barium sulphate, lime carbonate, the flowers of zinc, lead sulfate, yellow lead, zinc yellow, iron oxide red (red iron oxide (III)), cadmium red, ultramarine, cobalt ultramarine, chrome oxide green, cobalt green, umber, black, the synthetic iron oxide black of titanium, carbon black etc.
These inorganic pigments can use separately also can mix two or more use.
And the present invention according to circumstances also can be mixed together with aforementioned pigment and use in dyestuff or the natural colouring matter one or more.
Among the present invention, pigment can carry out its particle surface to use after the modification with polymkeric substance as required.The polymkeric substance of the improving particle surface of pigment is for example had: the spy opens the polymkeric substance described in the flat 8-259876 communique, polymkeric substance that perhaps commercially available various pigment dispersing are used or oligomer etc.
Among the present invention, preferred pigments make its with the defective part that is repaired in the pigment that uses have identical colourity, thermotolerance etc., preferably with same composition use with this defective part in the already used pigment pigment that waits mutually of the same race.
In addition, the pigment among the present invention can use with spreading agent as required together.
Aforementioned spreading agent for example has: surfactants such as kation system, negative ion system, nonionic system, both sexes, silicone-based, fluorine system.
Aforementioned surfactants for example has: remove polyoxyethylene alkyl ethers such as polyoxyethylene lauryl ether, polyoxyethylene octadecyl ether, polyoxyl 10 oleyl ether; Polyoxyethylene alkyl phenyl ethers such as polyoxyethylene n-octyl phenyl ether, polyoxyethylene n-nonyl phenyl ether; Polyethylene glycol di such as polyethylene glycol dilaurate, polyglycol distearate; Sorbitan fatty acid ester; Fatty acid modified polyester; The tertiary amine modified polyurethane; Beyond the polyethyleneimine: amine, following trade name: KP (SHIN-ETSU HANTOTAI's chemical industry (strain) system), Port リ Off ロ-(common prosperity society chemistry (strain) system), EFTOP (Tohkem Products (strain) system), メ ガ Off ア Star Network (big Japanese ink chemical industry (strain system)), Off ロ ラ one De (Sumitomo 3M (strain) system), ア サ ヒ ガ one De, サ one Off ロ Application (above, Asahi Glass (strain) system) Disperbyk (BYK Chemie Tapan (strain) system, ソ Le ス パ one ス (セ ネ カ (strain) system) etc. are arranged.
These surfactants can use separately also can mix two or more use.
Relative pigment 100 weight portions of the use amount of spreading agent are below preferred 50 weight portions, more preferably below 30 weight portions.
(B) alkali soluble resin
Alkali soluble resin among the present invention for example has: have carboxyl, phenol hydroxy kind acidic functionality, dissolve in the alkaline aqueous solution, preferred (A) pigment relatively has the resin of bonding agent effect.
Alkali soluble resin among the present invention preferably contains the resin of carboxyl, especially preferably has the multipolymer that the ethylene unsaturated monomer that the ethylene unsaturated monomer (below be called " unsaturated monomer that contains carboxyl ") of one or more carboxyls and other can copolymerization (below be called " copolymerization unsaturated monomer ") forms (below be called " multipolymer that contains carboxyl ").
The unsaturated monomer that contains carboxyl for example has: unsaturated monocarboxylics such as (methyl) acrylic acid, butenoic acid, α-Lv Daibingxisuan, cinnamic acid;
Unsaturated dicarboxylic or its acid anhydrides such as maleic acid, maleic anhydride, fumaric acid, itaconic acid, itaconic anhydride, citraconic acid, citraconic anhydride, mesaconic acid;
Unsaturated polybasic carboxylic acid or its acid anhydride that ternary is above;
List [(methyl) acryloyl group alkoxy] ester of mono succinate [2-(methyl) acryloyl group ethoxy], the phthalic acid list polybasic carboxylic acids more than 2 yuan such as [2-(methyl) acryloyl group ethoxys];
List (methyl) acrylate that has the polymkeric substance of carboxyl and hydroxyl on ω-two ends such as carboxyl polycaprolactone list (methyl) acrylate.
Contain in the unsaturated monomer of carboxyl at these, mono succinate [2-acryloyl group ethoxy] and phthalic acid list [2-acryloyl group ethoxy] have commercially available with trade name M-5300 and M-5400 (East Asia synthetic (strain) system) respectively.
The aforementioned unsaturated monomer that contains carboxyl can use separately also and can mix two or more use.
In addition, the copolymerization unsaturated monomer for example has:
Styrene, α-Jia Jibenyixi, neighbour-vinyltoluene ,-vinyltoluene, right-vinyltoluene, right-chlorostyrene, neighbour-methoxy styrene ,-methoxy styrene, p-methoxystyrene, neighbour-vinyl benzyl methyl ether ,-vinyl benzyl methyl ether, right-the vinyl benzyl methyl ether, neighbour-vinyl benzyl glycidyl ether ,-vinyl benzyl glycidyl ether, right-aromatic ethenyl compounds such as vinyl benzyl glycidyl ether;
Indenes such as indenes, 1-methyl indenes;
(methyl) methyl acrylate, (methyl) ethyl acrylate, (methyl) acrylic acid n-propyl, (methyl) isopropyl acrylate, (methyl) n-butyl acrylate, (methyl) isobutyl acrylate, (methyl) sec-butyl acrylate, (methyl) tert-butyl acrylate, (methyl) acrylic acid 2-hydroxy methacrylate, (methyl) acrylic acid 2-hydroxy propyl ester, (methyl) acrylic acid 3-hydroxy propyl ester, (methyl) acrylic acid 2-hydroxyl butyl ester, (methyl) acrylic acid 3-hydroxyl butyl ester, (methyl) acrylic acid 4-hydroxyl butyl ester, (methyl) allyl acrylate, (methyl) benzyl acrylate, (methyl) cyclohexyl acrylate, (methyl) phenyl acrylate, (methyl) acrylic acid 2-methoxyl ethyl ester, (methyl) acrylic acid 2-phenoxy ethyl, (methyl) acrylic acid methoxyl binaryglycol ester, (methyl) acrylic acid methoxyl triglycol ester, (methyl) acrylic acid MPEG ester, (methyl) acrylic acid methoxyl dipropylene glycol ester, (methyl) isobornyl acrylate, (methyl) acrylic acid three ring [5.2.1.0
2,6] esters of unsaturated carboxylic acids such as decane-8-base ester, (methyl) acrylic acid 2-hydroxyl-3-phenoxy group propyl ester, glycerine list (methyl) acrylate; Unsaturated carboxylic acid aminoalkyl esters such as (methyl) acrylic acid 2-amino ethyl ester, (methyl) acrylic acid 2-methylamino ethyl ester, the amino propyl ester of (methyl) acrylic acid 2-, (methyl) acrylic acid 2-dimethylamino propyl ester, the amino propyl ester of (methyl) acrylic acid 3-, (methyl) acrylic acid 3-dimethylamino propyl ester;
Unsaturated carboxylic acid ethylene oxidic esters such as (methyl) glycidyl acrylate; Vinyl carboxylates such as vinyl acetate, propionate, butyric acid vinyl acetate, benzoic acid vinyl acetate;
Unsaturated ethers such as methoxy ethylene, ethyl vinyl ether, allyl glycidyl ether;
Vinyl cyanide based compounds such as (methyl) vinyl cyanide, α-Lv Daibingxijing, vinyl cyanide fork;
Unsaturated amides such as (methyl) acrylamide, alpha-chloro acrylamide, N-2-hydroxyethyl (methyl) acrylamide;
Unsaturated acyl imines such as maleimide, N-phenylmaleimide, N-cyclohexyl maleimide;
Aliphatics conjugated diolefines such as 1,3-butadiene, isoprene, chlorbutadiene;
Polystyrene, poly-(methyl) methyl acrylate, poly-(methyl) n-butyl acrylate, polysiloxane etc. have the macromonomer of list (methyl) acryloyl group on the end of polymer molecular chain.
These copolymerization unsaturated monomers can use separately also can mix two or more use.
The multipolymer that contains carboxyl of the present invention, preferred (a) contain the unsaturated monomer composition of carboxyl and (b) are selected from the multipolymer of at least a formation in styrene, (methyl) methyl acrylate, (methyl) acrylic acid 2-hydroxy methacrylate, (methyl) allyl acrylate, (methyl) benzyl acrylate, glycerine list (methyl) acrylate, N-phenylmaleimide, polystyrene macromolecular monomer and the polymethylmethacrylate macromonomer (below be called the multipolymer (A1) that contains carboxyl).Wherein, (a) the unsaturated monomer composition that contains carboxyl is to be neccessary composition with (methyl) acrylic acid, under the different situations, also contain at least a compound that is selected from mono succinate [2-(methyl) acryloyl ethoxy] ester and ω-carboxyl polycaprolactone list (methyl) acrylate.
The concrete material of multipolymer (A1) that contains carboxyl for example has:
(methyl) acrylic acid/(methyl) methyl acrylate copolymer, (methyl) acrylic acid/(methyl) benzyl acrylate multipolymer, (methyl) acrylic acid/(methyl) acrylic acid 2-hydroxy methacrylate/(methyl) benzyl acrylate multipolymer, (methyl) acrylic acid/(methyl) methyl acrylate/polystyrene macromolecular monomer copolymer, (methyl) acrylic acid/(methyl) methyl acrylate/polymethylmethacrylate macromonomer multipolymer, (methyl) acrylic acid/(methyl) benzyl acrylate/polystyrene macromolecular monomer copolymer, (methyl) acrylic acid/(methyl) benzyl acrylate/polymethylmethacrylate macromonomer multipolymer, (methyl) acrylic acid/(methyl) acrylic acid 2-hydroxy methacrylate/(methyl) benzyl acrylate/polystyrene macromolecular monomer copolymer, (methyl) acrylic acid/(methyl) acrylic acid 2-hydroxy methacrylate/(methyl) benzyl acrylate/polymethylmethacrylate macromonomer multipolymer, (methyl) acrylic acid/styrene/(methyl) benzyl acrylate/N-phenylmaleimide multipolymer, (methyl) acrylic acid/mono succinate [2-(methyl) acryloyl ethoxy] ester/styrene/(methyl) benzyl acrylate/N-phenylmaleimide multipolymer, (methyl) acrylic acid/mono succinate [2-(methyl) acryloyl ethoxy] ester/styrene/(methyl) allyl acrylate/N-phenylmaleimide multipolymer, (methyl) acrylic acid/styrene/(methyl) benzyl acrylate/glycerine list (methyl) acrylate/N-phenylmaleimide multipolymer, (methyl) acrylic acid/ω-carboxyl polycaprolactone list (methyl) acrylate/styrene/(methyl) benzyl acrylate/glycerine list (methyl) acrylate/N-phenylmaleimide multipolymer.
Among the present invention, contain preferred 5～50 weight % of copolymerization ratio of the unsaturated monomer that contains carboxyl in the multipolymer of carboxyl, more preferably 10～40 weight %.Aforementioned copolymerization ratio is during less than 5 weight %, and the storage stability of the sense radioactivity resin combination that obtains tends to lowly, in addition on the one hand, when surpassing 50 weight %, can gelation during polymerization.
In the present invention, alkali soluble resin adopt gel permeation chromatography (GPC, eluting solvent: tetrahydrofuran) the polystyrene conversion weight-average molecular weight of Ce Dinging (below be called Mw) is preferred 3,000～300,000, more preferably 5,000～100,000.
In addition, alkali soluble resin adopt gel permeation chromatography (GPC, eluting solvent: tetrahydrofuran) the polystyrene conversion number-average molecular weight of Ce Dinging (below be called Mn) is preferred 3,000～60,000, more preferably 5,000～25,000.
In addition, the ratio (Mw/Mn) of the Mw of alkali soluble resin and Mn is preferred 1～5, and more preferably 1～4.
Among the present invention, have above-mentioned specific Mw and the alkali soluble resin of Mn, can obtain having the composition of the present invention of good storage stability because dispersing of pigments is good by use.
Among the present invention, alkali soluble resin can use separately also can mix two or more use.
The use amount of the alkali soluble resin among the present invention is preferred 10～1,000 weight portion of (A) pigment 100 weight portions, more preferably 20～500 weight portions relatively.In the use amount of alkali soluble resin during less than 10 weight portions, because dispersing of pigments instability, pigment possibility sedimentation in the preservation process, on the contrary, when surpassing 1, during 000 weight portion,, for example can make liquid be difficult to the needle point outflow of the utensil or the device of use from repair because the viscosity of composition is too high.
(C) multi-functional monomer
Multi-functional monomer among the present invention has two or more polymerism unsaturated links.
Multi-functional monomer so for example has: two (methyl) acrylate of aklylene glycols such as ethylene glycol, propylene glycol;
Polyglycol more than the diethylene glycol, two (methyl) acrylate of the poly alkylene glycol such as polypropylene glycol more than the dipropylene glycol;
Poly-(methyl) acrylate or its dicarboxylic acid modifier of the polyvalent alcohols more than 3 yuan such as glycerine, trimethylolpropane, pentaerythrite, dipentaerythritol;
Oligomeric (methyl) acrylate such as polyester, epoxy resin, urethane resin, alkyd resin, silicone resin, spirane resin;
Two terminal hydroxyls are poly--and two ends of polymer molecular chains such as 1,3-butadiene, two terminal hydroxyl polyisoprene, two terminal hydroxyl polycaprolactones have two (methyl) acrylate and three [2-(methyl) acryloyl group ethoxy] phosphate of the polymkeric substance of hydroxyl.
Among these functional monomers, poly-(methyl) acrylate and the dicarboxylic acid modifier thereof of the polyvalent alcohol that preferred ternary is above, concrete example is if any trimethylolpropane tris (methyl) acrylate, pentaerythrite three (methyl) acrylate, pentaerythrite four (methyl) acrylate, dipentaerythritol five (methyl) acrylate, dipentaerythritol six (methyl) acrylate; Consider to utilize radiation exposure to make its rapid polymerization sclerosis, make it form first valve state, preferred especially trimethylolpropane triacrylate, pentaerythritol triacrylate, and dipentaerythritol acrylate.
Aforementioned multi-functional monomer can use separately also can mix two or more use.
The use amount of multi-functional monomer of the present invention is (B) alkali soluble resin 100 weight portions relatively, are 350～1,000 weight portion, preferred 350～700 weight portions.In the use amount of multi-functional monomer during less than 350 weight portions, during radiation exposure sclerosis insufficient, the reparation portion after the sclerosis may flow.On the contrary, when surpassing 1,000 weight portion, the viscosity of composition is low excessively, and in the time of in being filled in the hole, for example liquid can be difficult on the needle point attached to utensil that uses in repairing or device.
In addition, among the present invention, also the part of multi-functional monomer can be replaced to the monomer of simple function group with 1 polymerism unsaturated link.
Aforementioned simple function monomer, for example remove to the aforementioned multipolymer that contains carboxyl list contain the carboxyl unsaturated monomer or and the same monomer of copolymerization unsaturation monomer, and outside N-(methyl) acryloyl morpholine, N-vinyl pyrrolidone, N-vinyl-epsilon-caprolactams, commercially available product has M-5300, M-5400, M-5600 (trade name, East Asia synthetic (strain) system) etc.
These simple function monomers can use separately also can mix two or more use.
The total amount of multi-functional relatively monomer of the usage rate of simple function monomer and simple function monomer is below the preferred 90 weight %, more preferably below the 50 weight %.When the usage rate of simple function monomer surpassed 90 weight %, the intensity of reparation portion or surface smoothing can be not enough.
In addition, multi-functional monomer of the present invention relative with the total amount of simple function monomer (B) alkali soluble resin 100 weight portions are 350～1,000 weight portion, preferred 350～700 weight portions.When aforementioned total use amount during less than 350 weight portions, the intensity of reparation portion or its surface smoothing sexual orientation are in lowly, and be opposite, when surpassing 1,000 weight portion, the viscosity of composition is low excessively, in the time of in being filled in the hole, for example liquid can be difficult on the needle point attached to utensil that uses in repairing or device.
(D) Photoepolymerizationinitiater initiater
Photoepolymerizationinitiater initiater of the present invention is a kind of irradiation (hereinafter referred to as exposure) that utilizes visible light, ultraviolet ray, far ultraviolet, electronics line, X line etc., and generation can cause aforementioned (C) multi-functional monomer and according to circumstances mix the compound of the free radical of the simple function monomer generation polymerization of using.
Such Photoepolymerizationinitiater initiater for example has: acetophenone based compound, bisglyoxaline based compound, triazine based compound, styrax based compound, benzophenone based compound, α-diketone based compound, multinuclear quinone based compound, xanthone based compound, diazonium based compound.
Among the present invention, Photoepolymerizationinitiater initiater can use separately also can mix two or more use.Photoepolymerizationinitiater initiater of the present invention preferably uses at least a in acetophenone based compound, bisglyoxaline based compound and the triazine based compound.
The general use amount of the Photoepolymerizationinitiater initiater of the present invention relatively summation of (C) multi-functional monomer or itself and simple function monomer is 100 weight portions, preferred 0.01～80 weight portion, more preferably 1～60 weight portion.When the use amount of optical free radical initiating agent during less than 0.01 weight portion, the sclerosis that utilizes exposure to carry out is not enough, and reparation portion may flow after sclerosis.On the contrary, when surpassing 80 weight portions, it is difficult to be dissolved in the composition, may influence the characteristic of reparation portion as colored filter.
Among the present invention in the preferred Photoepolymerizationinitiater initiater, the concrete material of acetophenone based compound for example has: 2-hydroxyl-2 methyl isophthalic acids-phenylacetone-1,2-methyl isophthalic acid-(4-methyl thio-phenyl)-2-morpholinyl acetone-1,2-benzyl-2-dimethylamino-1-(4-morpholinyl phenyl) butanone-1,1-hydroxyl cyclohexyl phenyl ketone, 2,2-dimethoxy-1,2-diphenyl-ethyl ketone (phenylethanone)-1.
Preferred especially 2-methyl isophthalic acid-(4-methyl thio-phenyl)-2-morpholinyl acetone-1,2-benzyl-2-dimethylamino-1-(4-morpholinyl phenyl) butanone-1 etc. in these acetophenone based compounds.
Aforementioned acetophenone based compound can use separately also can mix two or more use.
Among the present invention, when Photoepolymerizationinitiater initiater uses the acetophenone based compound, its use amount relatively total 100 weight portions of (C) multi-functional monomer or itself and simple function monomer is preferably 0.01～80 weight portion, more preferably 1～60 weight portion, further preferred 1～30 weight portion.When the use amount of acetophenone based compound during less than 0.01 weight portion, the sclerosis that exposure produces is not enough, and reparation portion can flow after sclerosis.On the contrary, when surpassing 80 weight portions, it is difficult to be dissolved in the composition, can influence the characteristic of reparation portion as colored filter.
In addition, the concrete material of bisglyoxaline based compound for example has: 2,2 '-two (2-chlorphenyl)-4,4 ', 5,5 '-four (4-ethoxy carbonyl phenyl)-1,2 '-bisglyoxaline; 2,2 '-two (2-bromophenyl)-4,4 ', 5,5 '-four (4-ethoxy carbonyl phenyl)-1,2 '-bisglyoxaline; 2,2 '-two (2-chlorphenyl)-4,4 ', 5,5 '-tetraphenyl-1,2 '-bisglyoxaline; 2,2 '-two (2, the 4-dichloro-benzenes)-4,4 ', 5,5 '-tetraphenyl-1,2 '-bisglyoxaline; 2,2 '-two (2,4, the 6-trichloro-benzenes)-4,4 ', 5,5 '-tetraphenyl-1,2 '-bisglyoxaline; 2,2 '-two (2-bromophenyl)-4,4 ', 5,5 '-tetraphenyl-1,2 '-bisglyoxaline; 2,2 '-two (2-bromophenyl)-4,4 ', 5,5 '-tetraphenyl-1,2 '-bisglyoxaline; 2,2 '-two (2,4,6-tribromo phenyl)-4,4 ', 5,5 '-tetraphenyl-1,2 '-bisglyoxaline.
In these bisglyoxaline based compounds, more preferably 2,2 '-two (2-chlorobenzene)-4,4 ', 5,5 '-tetraphenyl-1,2 '-bisglyoxaline; 2,2 '-two (2, the 4-dichloro-benzenes)-4,4 ', 5,5 '-tetraphenyl-1,2 '-bisglyoxaline; 2,2 '-two (2,4, the 6-trichloro-benzenes)-4,4 ', 5,5 '-tetraphenyl-1,2 '-bisglyoxaline, preferred especially 2,2 '-two (2, the 4-dichlorophenyl)-4,4 ', 5,5 '-tetraphenyl-1,2 '-bisglyoxaline.
Aforementioned bisglyoxaline based compound is good to the dissolubility of solvent, do not produce not impurity such as dissolved matter, precipitate, and, highly sensitive, utilize a spot of exposure to expose just can to make fully it that sclerous reaction takes place, the flowing of the back reparation portion that can prevent from effectively to harden.
Aforementioned bisglyoxaline based compound can use separately also can mix two or more use.
Among the present invention, when Photoepolymerizationinitiater initiater uses the bisglyoxaline based compound, its use amount relatively total amount 100 weight portions of (C) multi-functional monomer or itself and simple function monomer is 0.01～40 weight portion, more preferably 1～30 weight portion, further preferred 1～20 weight portion.When the use amount of bisglyoxaline based compound during less than 0.01 weight portion, the sclerosis that exposure produces is not enough, and reparation portion may flow after sclerosis.On the contrary, when surpassing 40 weight portions, it is difficult to be dissolved in the composition, can influence the characteristic of reparation portion as colored filter.
Hydrogen donor
Among the present invention, when Photoepolymerizationinitiater initiater uses the bisglyoxaline based compound, consider further to improve sensitivity, the preferred mixing used following hydrogen donor.Hydrogen donor described here is meant the free radical by exposing and being produced by the bisglyoxaline based compound relatively, can give the compound of hydrogen atom.
Mercaptan based compound, the amine compound of the preferred following definitions of hydrogen donor of the present invention.
Aforementioned mercaptan based compound is made of following compound, promptly, with phenyl ring or heterocycle is parent nucleus, contains more than one at molecule, preferred 1～3, more preferably 1～2 the compound that is bonded directly to the mercapto on this parent nucleus (below be called mercaptan be hydrogen donor).
In addition, aforementioned amine compound is made of following compound, that is, be parent nucleus with phenyl ring or heterocycle, contains more than one at molecule, preferred 1～3, more preferably the compound of 1～2 the amino that is bonded directly to this parent nucleus (below be called ammonia be hydrogen donor).
In addition, these hydrogen donors also can have sulfydryl and amino simultaneously.
Below, these hydrogen donors are carried out further specific description.
Mercaptan is that hydrogen donor can contain phenyl ring or the heterocycle more than 1 respectively in molecule, can contain two kinds of phenyl ring and heterocycles in addition.When containing ring such more than two, can form also and can not form condensed ring.
In addition, mercaptan be hydrogen donor when having the sulfydryl of two or more, as long as residual at least one free sulfydryl, remaining sulfydryl more than 1 or 1 also can use alkyl, aralkyl or aryl replacement.And as long as residual at least one free sulfydryl just can have following structural unit, that is, two sulphur atoms pass through the structural unit of two divalent organic group bondings such as alkylene; Perhaps two sulphur atoms are by the structural unit of the form bonding of disulfide.
And mercaptan is that hydrogen donor also can be in sulfydryl position in addition, and for example utilizing, carboxyl, alkoxy carbonyl, substituted alkoxy carbonyl, phenyloxycarbonyl, substituent phenoxy carbonyl, nitro replace.
These mercaptan are that the concrete material of hydrogen donor for example has: 2-mercaptobenzothiazole, 2-mercaptobenzoxazole, 2-mercaptobenzimidazole, 2,5-dimercapto-1,3,4-thiadiazoles, 2-sulfydryl-2,5-dimethyl aminopyridine.
These mercaptan are in the hydrogen donor, preferred 2-mercaptobenzothiazole, 2-mercaptobenzoxazole, excellent especially 2-mercaptobenzothiazole.
In addition, amine is that hydrogen donor can have one or more phenyl ring or heterocycle respectively in molecule, can have two kinds of phenyl ring and heterocycles in addition.Having two or more these whens ring, can form also and can not form condensed ring.
Amine is that hydrogen donor also can utilize alkyl or substituted alkyl to replace one or more amino.In addition, the position beyond amino also can utilize carboxyl, alkoxy carbonyl group, substituted alkoxycarbonyl, carbobenzoxy, substituted benzene oxygen carbonyl, nitro to replace.
These amine are that the concrete material of hydrogen donor for example has: 4,4 '-two (dimethylamino) benzophenone, 4,4 '-two (diethylamino) benzophenone, 4-diethyl amino benzoylformaldoxime, 4-dimethylamino propiophenone, ethyl-4-dimethylaminobenzoic acid ester, 4-dimethylamino benzoic acid, 4-dimethylaminophenyl cyanogen.
These amine are preferred 4,4 '-two (dimethylamino) benzophenone, 4,4 '-two (diethylamino) benzophenone in the hydrogen donor; Preferred especially 4,4 '-two (diethylamino) benzophenone.
During Photoepolymerizationinitiater initiater that amine is hydrogen donor beyond using bisglyoxaline system, also has the effect of sensitizer.
Hydrogen donor can use separately among the present invention, also can mix two or more use.Flow but produce when hardening when considering to prevent to expose, the mercaptan that preferably is used one or more is that hydrogen donor and more than one amine are hydrogen donor.
Mercaptan is that hydrogen donor and amine are that the concrete material that hydrogen donor makes up for example has: 2-mercaptobenzothiazole/4,4 '-two (dimethylamino) benzophenone; 2-mercaptobenzothiazole/4,4 '-two (diethylamino) benzophenone; 2-mercaptobenzoxazole/4,4 '-two (diethylamino) benzophenone; 2-mercaptobenzoxazole/4,4 '-two (diethylamino) benzophenone.Particularly preferred 2-mercaptobenzothiazole/4 that are combined as, 4 '-two (diethylamino) benzophenone; 2-mercaptobenzoxazole/4,4 '-two (diethylamino) benzophenone, particularly preferred 2-mercaptobenzothiazole/4 that are combined as, 4 '-two (diethylamino) benzophenone.
Mercaptan is that hydrogen donor and amine are in the combination of hydrogen donor, and mercaptan is that hydrogen donor and amine are preferred 1: 1～1: 4 of the weight ratio of hydrogen donor, more preferably 1: 1～1: 3.
Among the present invention, when hydrogen donor being mixed use with the bisglyoxaline based compound, its use amount is total amount 100 weight portions of (C) multi-functional monomer or itself and simple function monomer relatively, are preferably 0.01～40 weight portion, more preferably 1～30 weight portion, preferred especially 1～20 weight portion.When the use amount of hydrogen donor during less than 0.01 weight portion, the sensitivity improving effect is tended to lowly.On the contrary, when surpassing 40 weight portions, it is difficult to be dissolved in the composition, can influence the characteristic of reparation portion as colored filter.
In addition, the concrete material of aforementioned triazine based compound for example has: 2,4,6-three (trichloromethyl)-s-triazine, 2-methyl-4, two (the trichloromethyl)-s-triazine of 6-, 2-[2-(5-methylfuran-2-yl) vinyl]-4, two (the trichloromethyl)-s-triazine of 6-, 2-[2-(furans-2-yl) vinyl]-4, two (the trichloromethyl)-s-triazine of 6-, 2-[2-(4-diethylamino-2-aminomethyl phenyl) vinyl]-4, two (the trichloromethyl)-s-triazine of 6-, 2-[2-(3, the 4-Dimethoxyphenyl) vinyl]-4, two (the trichloromethyl)-s-triazine of 6-, 2-[4-methoxyphenyl-4, two (the trichloromethyl)-s-triazine of 6-, 2-[2-(4-ethoxybenzene vinyl)-4, two (the trichloromethyl)-s-triazine of 6-, 2-(4-n-butoxy phenyl)-4, two (the trichloromethyl)-s-triazine etc. of 6-have the compound of halogenated methyl.
In these triazine based compounds, preferred especially 2-[2-(3, the 4-Dimethoxyphenyl) vinyl]-4, two (the trichloromethyl)-s-triazine of 6-.
Aforementioned triazine based compound can use separately also can mix two or more use.
Among the present invention, when using the triazine based compound as Photoepolymerizationinitiater initiater, its use amount is total amount 100 weight portions of (C) multi-functional monomer or itself and simple function monomer relatively, are preferably 0.01～40 weight portion, more preferably 1～30 weight portion, preferred especially 1～20 weight portion.When the use amount of triazine based compound during less than 0.01 weight portion, the under-ageing that exposure causes, sclerosis back reparation portion may flow, and on the contrary, when surpassing 40 weight portions, it is difficult to be dissolved in the composition, may influence the characteristic of reparation portion as colored filter.
Adjuvant
With in the radiation-sensitive resin composition, also can cooperate various adjuvants in colored filter defect repair of the present invention as required.
Aforementioned additive for example has: spreading agent such as blue pigment derivant such as copper phthalocyanine derivative thing and yellow uitramarine derivant;
Filling agent such as glass, aluminium oxide;
Polyvinyl alcohol (PVA), polyalkylene glycol monoalkyl ethers, poly-macromolecular compounds such as (fluoroalkyl acrylate);
Surfactants such as nonionic system, kation system, negative ion system;
Vinyltrimethoxy silane, vinyltriethoxysilane, vinyl three (2-methoxy ethoxy) silane, N-(2-amino-ethyl)-3-aminopropyl methyl dimethoxysilane, N-(2-amino-ethyl)-3-TSL 8330, the 3-aminopropyltriethoxywerene werene, the 3-glycidoxy-propyltrimethoxy silane, 3-epoxypropoxy methyl dimethoxysilane, 2-(3,4-epoxy radicals cyclohexyl) ethyl trimethoxy silane, the 3-chloropropylmethyldimethoxysilane, the 3-r-chloropropyl trimethoxyl silane, 3-methacryl propoxyl group trimethoxy silane, adhesion promotors such as 3-sulfydryl propyl trimethoxy silicane;
2,2-thiobis (4-methyl-6-tert butyl phenol), 2, antioxidant such as 6-two-tert-butyl phenol;
Ultraviolet light absorbers such as 2-(the 3-tert-butyl group-5-methyl-2-hydroxy phenyl)-5-chlorobenzotriazole, alkoxy benzophenone;
Anti gelling agents such as sodium polyacrylate;
1,1 '-azo two (cyclohexane-1-nitrile), 2-phenylazos-4-methoxyl-2, hot radicals such as 4-methyl pentane nitrile produce agent.
(E) solvent
Solvent of the present invention preferably makes (A)～(D) composition or the additive component that constitute radiation-sensitive resin composition disperse or dissolve, and not with the material of these compositions reactions.
These solvents for example have: glycol monoethyl ether, ethylene glycol monoethyl ether, ethylene glycol propyl ether, ethylene glycol mono-n-butyl ether, diethylene glycol monomethyl ether, diethylene glycol monoethyl ether, diethylene glycol list positive propyl ether, the diethylene glycol mono-n-butyl ether, triethylene glycol monomethyl ether, Triethylene glycol ethyl ether, propylene glycol monomethyl ether, dihydroxypropane single-ether, propylene glycol list positive propyl ether, the propylene glycol mono-n-butyl ether, dipropylene glycol monomethyl ether, the single ether of dipropylene glycol, the single positive propyl ether of dipropylene glycol, the dipropylene glycol mono-n-butyl ether, the tripropylene glycol monomethyl ether, (many) alkane glycol monoalkyl ethers such as tripropylene glycol list ether;
Ethylene glycol monomethyl ether acetate, ethylene glycol monoethyl ether acetate, glycol monomethyl n-propyl ether acetic acid esters, glycol monomethyl n-butyl ether acetic acid esters, diethylene glycol monomethyl ether acetic acid esters, TC acetic acid esters, propylene glycol monomethyl ether, propylene glycol list ethylether acetate esters (many) alkane glycol monoalkyl ether acetic acid esters;
Other ethers such as diethylene glycol dimethyl ether, diethylene glycol MEE, diethylene glycol diethyl ether, tetrahydrofuran, benzyl ether, di-n-hexyl ether;
Ketones such as MEK, 2-heptanone, 3-heptanone, cyclohexanone;
Lactic acid alkyl ester such as methyl lactate, ethyl lactate;
2-hydroxy-2-methyl ethyl propionate, 3-methoxypropionic acid methyl esters, 3-methoxy propyl acetoacetic ester, 3-ethoxy-propionic acid methyl esters, the 3-ethoxyl ethyl propionate, the ethoxy ethyl acetate, hydroxyl ethyl acetate, 2-hydroxy-3-methyl methyl butyrate, 3-methoxyl butylacetic acid ester, 3-methyl-3-methoxyl butylacetic acid ester, 3-methyl-3-methoxyl butyl propionic ester, ethyl acetate, n-propyl acetate, isopropyl acetate, n-butyl acetate, isobutyl acetate, the formic acid n-pentyl ester, isoamyl acetate, n-butyl propionate, the butyric acid ethyl ester, the butyric acid n-propyl, the butyric acid isopropyl ester, the positive butyl ester of butyric acid, methyl pyruvate, ethyl pyruvate, the pyruvic acid n-propyl, methyl acetoacetate, ethyl acetoacetate, 2-ketobutyric acid ethyl ester, the acetate benzyl ester, ethyl benzoate, diethy-aceto oxalate, other ester class such as diethyl maleate;
Aromatic hydrocarbon such as toluene, dimethylbenzene;
N-Methyl pyrrolidone, N, amide-types such as dinethylformamide, N,N-dimethylacetamide, in addition,
Also have acetonyl acetone, isophorone, caproic acid, sad, 1-octanol, 1 nonyl alcohol, benzyl alcohol, diacetone alcohol, 3-methoxyl-3-methyl isophthalic acid-butanols, gamma-butyrolacton, ethylene carbonate, carbonic allyl ester, ethyleneglycol monophenylether acetic acid esters, 3-methoxyl-3-methyl isophthalic acid-butanols.
These solvents can use separately also can mix two or more use.
According to result of study of the present invention, as can be known when sense radioactivity resin combination is filled the too fast drying in back in the hole of removing defective part formation, before the utensil that uses in making for example reparation or the pin of device arrive filling position, composition bone dry solidifies, therefore, be not suitable in reparation, using.Therefore, being used for colored filter defect repair of the present invention uses the solvent of radiation-sensitive resin composition under 20 ℃, average vapour pressure (following is called " average vapour pressure ") is less than 3.0mmHg, the average preferred 0.1～3.0mmHg of vapour pressure, more preferably 1.0～3.0mmHg.
Among the present invention, for the average vapour pressure that makes solvent less than 3.0mmHg, solvent preferably use in ethylene glycol mono-n-butyl ether acetic acid esters, diethylene glycol methyl ethyl ether, 3-ethoxyl ethyl propionate, N-Methyl pyrrolidone, diacetone alcohol, 3-methoxyl-3-methyl isophthalic acid-butanols, the gamma-butyrolacton one or both or two or more, more preferably one or both in ethylene glycol mono-n-butyl ether acetic acid esters, diethylene glycol methyl ethyl ether and the 3-ethoxyl ethyl propionate or two or more.These solvents do not have bad influence to pigment-dispersing.In addition, among the present invention, according to circumstances also these solvents and aforesaid other solvent can be used.
Particularly consider, perhaps consider that from aspects such as the flowability of composition or stabilitys it is 25～50 weight % that solvent use amount of the present invention is used solid component concentration, more preferably 25～35 weight % from the colour difference aspect that dwindles reparation portion and normal portion.The concentration of the solid constituent of radiation-sensitive resin composition described here is meant (the composition weight beyond the solvent)/(whole composition weight) * 100 calculated value that obtains.
The colored filter defect-restoration method therefor
Colored filter is usually by being configured in being made of dyed layer red, that the pel array of green and blue three kinds of primary colors constitutes on the substrate.Therefore, " colored filter defective " described here is meant by the defective on red, green and the dyed layer that blue three primary colors pel array constitutes.
Colored filter defect-restoration method therefor of the present invention comprises the operation of the following stated order.
(1) remove the colored filter defective part, the aforementioned colored filter defect repair of filling radiation-sensitive resin composition in the hole that forms (below, be called " liquid resin composition "), remove the operation of desolvating afterwards;
(2) make the operation of radiation exposure filling part;
(3) operation of the postradiation filling part of heating.
Below the present invention will be described in more detail.
At first, in (1) operation, make the defective part of the dyed layer that the redness that is provided on the substrate, green and blue three primary colors pel array constitute shine for example laser beam, it is blown etc., remove.Thus, on the part of removing, form the hole that does not exist chromatograph, make it be in the state that the bottom substrate surface exposes.
Then, make the needle tip of liquid resin composition, be filled in the hole of formation attached to utensil that for example has fine needle or device.This padding also can carry out repeatedly filling necessary amounts in the hole.In addition, other method of Xiang Kongzhong filling liquid resin composition also can adopt the method for utilizing the mediation device to extrude, the method for utilizing the ink-jetting style dropping etc.
Afterwards, the liquid resin composition preliminary drying by filling makes solvent evaporation, forms the layer that not solvent-laden radiation-sensitive resin composition in the hole (below be also referred to as " resin combination ") constitutes.
The treatment conditions of preliminary drying are preferably being carried out about 1～5 minute under 70～110 ℃.
The thickness of the layer that is made of resin combination preferably makes the thickness of reparation portion and normally the thickness of the dyed layer of portion is identical or much at one, according to circumstances, also can carry out the processing of " filling → preliminary drying " repeatedly.
Use the substrate in the colored filter of colored filter defect-restoration method therefor of the present invention for example to have: the ring-opening polymerization polymer of glass, silicon, polycarbonate, polyester, aromatic polyamide, polyamidoimide, polyimide, polyethersulfone, cyclic olefin and hydrogenation thing thereof.
In addition, on these substrates, can carry out the suitable pre-treatment such as medicine processing, Cement Composite Treated by Plasma, ion plating, sputter, gas-phase reaction method, vacuum evaporation of silane coupling agent etc. for example as required in advance.
Then, in (2) operation,, make its polymerization sclerosis by the layer that the resin combination in the irradiation hole constitutes.
The radioactive ray that use during exposure for example can have: luminous ray, ultraviolet ray, far ultraviolet, electronics line, X line etc.The radioactive ray of optimal wavelength in the scope of 190～450nm.
The exposure of radioactive ray is preferred 10～10,000J/m
2About.
Then, in (3) operation, the filling part of heating exposure (below be called " back baking ") makes resin combination polymerization fully sclerosis, in addition, remaining (D) Photoepolymerizationinitiater initiater is fully decomposed, and forms the dyed layer that defect repair is crossed.
The treatment conditions of back baking are preferably being carried out about 20～60 minutes under 200～250 ℃.
Among the present invention,, when the colourity of reparation portion and normal portion there are differences,, two kinds of colour differences are eliminated as much as possible preferably by carrying out this circulation repeatedly at the circulation time that has carried out once aforementioned " (1) operation → (2) operation → (3) operation ".
In addition, in the present invention, when defective part during across the two or more different form and aspect of colored filter, usually, each form and aspect is removed defective part, according to aforementioned identical step, use with the liquid resin composition of the identical form and aspect of defective part of removing and repair successively.Defective part in certain form and aspect as long as the aspect of performance of colored filter does not have special problem, also can be repaired when repairing the different form and aspect of adjacency together very much hour.
According to the present invention, when repairing the colored filter defective, optionally abundant wetting expansion liquid composition in the hole of removing defective part formation, carry out the sclerosis of polymerization fully in addition, therefore, the colour difference of reparation portion and normal portion is not had or very little, new defective mode not occur, repair and become to make it to have and normal portion performance much at one at the defective part periphery.
Therefore, colored filter defect repair of the present invention can be applied to the reparation based on the various colored filters of the color liquid crystal display arrangement colored filter in the electronics industry with the restorative procedure of sense radioactivity resin combination and colored filter defective.
Embodiment
Below, further specifically describe embodiments of the present invention by embodiment.But, the invention is not restricted to following embodiment.In addition, " part " in the synthesis example is meant weight portion.
Synthesis example 1
In the flask that is provided with condenser pipe, stirrer, add 2,2 '-azo two (2, the 4-methyl pentane nitrile) 1 part and propylene glycol methyl ether acetate are 200 parts, then, add 2.5 parts of 15 parts of methacrylic acids, 15 parts of styrene, 30 parts of benzyl methacrylates, 20 parts of glycerine monomethacrylates, 20 parts of N-phenylmaleimides and chain-transferring agent α-Jia Jibenyixierjuwus, be replaced into after the nitrogen, stir lentamente, make the temperature of reaction solution rise to 80 ℃, keep this temperature, polyase 13 hour.Be warming up to 100 ℃ afterwards, add 0.5 part 2,2 '-azo two (2, the 4-methyl pentane nitrile), polymerization is 1 hour again, thus, obtains the solution (solid component concentration=33.2 weight %) of multipolymer.With this copolymer solution as copolymer solution (b1).The Mw=14 of the multipolymer that obtains, 000, Mn=6,800.
Synthesis example 2
In the flask that is provided with condenser pipe, stirrer, add 2,2 '-azo two (2, the 4-methyl pentane nitrile) 1 part and cyclohexanone are 200 parts, then, add 2.5 parts of 15 parts of methacrylic acids, 15 parts of esters of mono succinate (2-methacryl ethoxy), 20 parts of styrene, 25 parts of benzyl methacrylates, 25 parts of N-phenylmaleimides and chain-transferring agent α-Jia Jibenyixierjuwus, be replaced into after the nitrogen, stir lentamente, make the temperature of reaction solution rise to 80 ℃, keeping under the condition of this temperature polyase 13 hour.Afterwards, be warming up to 100 ℃, add 0.5 part 2,2 '-azo two (2, the 4-methyl pentane nitrile), polymerization is 1 hour again, thus, obtains the solution (solid component concentration=32.9 weight %) of multipolymer.With this copolymer solution as copolymer solution (b2).The Mw=15 of the multipolymer that obtains, 000, Mn=7,400.
Synthesis example 3
Be provided with condenser pipe, in the flask of stirrer, add 2,2 '-azo two (2, the 4-methyl pentane nitrile) 1 part and propylene glycol list first are coagulated 200 parts of ether acetic acid esters, then, add 15 parts of methacrylic acids, 10 parts of ω-carboxyl caprolactone monomethacrylates, 15 parts of styrene, 30 parts of benzyl methacrylates, 15 parts of glycerine monomethacrylates, 2.5 parts of 15 parts of N-phenylmaleimides and chain-transferring agent α-Jia Jibenyixierjuwus, be replaced into after the nitrogen, stir lentamente, make the temperature of reaction solution rise to 80 ℃, keeping under the condition of this temperature polyase 13 hour.Be warming up to 100 ℃ afterwards, add 0.5 part 2,2 '-azo two (2, the 4-methyl pentane nitrile), polymerization is 1 hour again, thus, obtains the solution (solid component concentration=33.0 weight %) of multipolymer.With this copolymer solution as copolymer solution (b3).The Mw=12 of the multipolymer that obtains, 000, Mn=5,700.
Embodiment 1
The formation in normal portion and hole
Will (A ') pigment: 82/18 (weight ratio) potpourri, 90 weight portions of C.I paratonere 254 and C.I. pigment yellow 13 9, spreading agent: Disperbyk-2000 (solid component concentration=40.0 weight %, solvent: 20 weight portions (solid constituent convert 8 weight portions) 1: 1 mixed solvent of the weight ratio of methoxy propyl alcohol acetic ester and butoxy ethanol), (B ') alkali soluble resin: copolymer solution (b1) (solid component concentration=33.2 weight %) 210.8 weight portions (solid constituent convert 70 weight portions), (C ') multi-functional monomer: dipentaerythritol acrylate 80 weight portions, (D ') Photoepolymerizationinitiater initiater: 2-benzyl-2-dimethylamino-1-(4-morpholinyl phenyl) butanone-130 weight portion, and (E ') solvent: (the mixed weight ratio=34.9/65.1) 859.2 weight portions mix 3-ethoxyl ethyl propionate/propylene glycol monomethyl ether mixed solvent, make liquid resin composition (CFR1).
Then, (on the surface of 150mm * 150mm), wherein, the soda-lime glass substrate is formed with the SiO that prevents the sodion wash-out from the teeth outwards to utilize the spin coated machine that liquid resin composition (CFR1) is coated on the soda-lime glass substrate
2Film.Afterwards, preliminary drying is 2 minutes on 80 ℃ electric hot plate, makes solvent evaporates, forms filming of thickness 2.0 μ m.Afterwards, this substrate is utilized 100MJ/cm
2The ultraviolet ray of exposure irradiation after, preliminary drying is 30 minutes in 220 ℃ cleaning baking oven, forms the normal red colored layer of thickness 1.6 μ m.
Then, utilize laser repair device (NTN (strain) system) irradiating laser light beam, blow red colored layer, thus, form the foursquare hole of 1 length of side, 90 μ m in portion of substrate center.
The evaluation of defective part reparation property
With (A) pigment: 82/18 (weight ratio) potpourri, 100 weight portions of C.I paratonere 254 and C.I. pigment yellow 13 9, spreading agent: Disperbyk-2000 25 weight portions (solid constituent convert 10 weight portions), (B) alkali soluble resin: copolymer solution (b1) (solid component concentration=33.2 weight %) 60.2 weight portions (solid constituent convert 20 weight portions), (C) multi-functional monomer: dipentaerythritol acrylate 130 weight portions, (D) Photoepolymerizationinitiater initiater: 2-benzyl-2-dimethylamino-1-(4-morpholinyl phenyl) butanone-120 weight portion, and (E) solvent: (weight ratio=59.0/9.4/31.6) 759.8 weight portions mix 3-ethoxyl ethyl propionate/propylene glycol methyl ether acetate/diethylene glycol mono-n-butyl ether acetic acid esters mixed solvent, make liquid resin composition (RR1).
In the liquid resin composition (RR1), (C) relative (B) composition 100 weight portions of the content of composition are 650 weight portions, and solid component concentration is 25.6 weight %, and average vapour pressure is 1.4mmHg.
Then, liquid resin composition (RR1) is coated on the needle point of aforementioned laser prosthetic device, makes needle point be filled into the central part in hole downwards, carry out this operation 4 times repeatedly.Then, at filling part 100MJ/cm
2The ultraviolet ray of exposure irradiation after, preliminary drying is 30 minutes in 220 ℃ cleaning baking oven, thus, forms in the hole and the red colored layer of the about 1.6 μ m of thickness of the identical form and aspect of normal portion, realizes reparation.
Then, utilize big tomb electronics system colour measurement device MCPD-2000 to measure the colourity of reparation portion and normal portion, the result is respectively (0.641,0.344,23.5) and (0.640,0.344,23.6), the colour difference of reparation portion and normal portion is very little, and the result shows that use is upward no problem.
Comparative example 1
The formation in normal portion and hole
Utilize the method identical, obtain having the substrate in normal red colored layer and hole with embodiment 1.
The defect repair evaluation
With (a) pigment: 82/18 (weight ratio) potpourri, 100 weight portions of C.I paratonere 254 and C.I. pigment yellow 13 9, spreading agent: Disperbyk-2000 is 25 weight portions (solid constituents convert 10 weight portions), (b) alkali soluble resin: copolymer solution (b1) (solid component concentration=33.2 weight %) 60.2 weight portions (solid constituent convert 20 weight portions), (c) multi-functional monomer: dipentaerythritol acrylate 130 weight portions, (d) Photoepolymerizationinitiater initiater: 2-benzyl-2-dimethylamino-1-(4-morpholinyl phenyl) butanone-120 weight portion, and (e) solvent: (weight ratio=57.8/11.2/31.0) 1259.8 weight portions mix 3-ethoxyl ethyl propionate/propylene glycol methyl ether acetate/diethylene glycol mono-n-butyl ether acetic acid esters mixed solvent, make liquid resin composition (rr1).
In the liquid resin composition (rr1), (c) relative (b) composition 100 weight portions of the content of composition are 650 weight portions, and solid component concentration is 17.6 weight %, and its average vapour pressure is 1.4mmHg.
Then, except that using liquid resin composition (rr1), other is identical with embodiment 1, repairs the hole, measure the colourity of the reparation portion and the normal portion of formation, the result is respectively (0.641,0.344,23.5) and (0.632,0.344,24.4), the colour difference of reparation portion and normal portion is bigger than embodiment 1, reparation property variation.
Comparative example 2
The formation in normal portion and hole
Utilize the method identical, obtain having the substrate in normal red colored layer and hole with embodiment 1.
The defect repair evaluation
Form in using embodiment 1 liquid resin composition (CFR1) that uses in the red colored layer, other is identical with embodiment 1, repairs the hole.
In the liquid resin composition (CFR1), relative alkali soluble resin 100 weight portions of the content of multi-functional monomer are about 114 weight portions, and solid component concentration is 21.6 weight portion %, and its average vapour pressure is 2.6mmHg.
The result is, because liquid resin composition (CFR1) drying property is strong, bone dry solidifies before pin arrives filling position, is not suitable for repairing.
Embodiment 2
The formation in normal portion and hole
Will (A ') pigment: 60/40 (weight ratio) potpourri, 90 weight portions of C.I pigment green 36 and C.I. pigment yellow 150, spreading agent: Disperbyk-2001 (solid component concentration=46.0 weight %, solvent: 25 weight portions (solid constituent convert 11.5 weight portions) 2: 2: 1 mixed solvent of the weight ratio of methoxy propyl alcohol acetic ester and butoxy ethanol and methoxypropanol), (B ') alkali soluble resin: copolymer solution (b1) (solid component concentration=33.2 weight %) 180.7 weight portions (solid constituent convert 60 weight portions), (C ') multi-functional monomer: dipentaerythritol acrylate 90 weight portions, (D ') Photoepolymerizationinitiater initiater: 2-benzyl-2-dimethylamino-1-(4-morpholinyl phenyl) butanone-135 weight portion, and (E ') solvent: (weight ratio=58.9/41.1) 679.3 weight portions mix 3-methoxyl butylacetic acid ester/propylene glycol methyl ether acetate mixed solvent, make liquid resin composition (CFG1).
Then, except that using liquid resin composition (CFG1), other is identical with embodiment 1, makes the normal green coloring layer of thickness 1.6 μ m and forms the foursquare hole of 1 length of side, 90 μ m in portion of substrate center.
The evaluation of defective part reparation property
With (A) pigment: 60/40 (weight ratio) potpourri, 90 weight portions of C.I pigment green 36 and C.I. pigment yellow 150, spreading agent: Disperbyk-2001 25 weight portions (solid constituent convert 11.5 weight portions), (B) alkali soluble resin: copolymer solution (b2) (solid component concentration=32.9 weight %) 76.0 weight portions (solid constituent convert 25 weight portions), (C) multi-functional monomer: dipentaerythritol acrylate 125 weight portions, (D) Photoepolymerizationinitiater initiater: 2-benzyl-2-methylamino-1-(4-morpholinyl phenyl) butanone-120 weight portion, and (E) solvent: (weight ratio=60.4/7.2/32.4) 649.0 weight portions mix 3-methoxyl butylacetic acid ester/cyclohexanone/diethylene glycol mono-n-butyl ether acetic acid esters mixed solvent, make liquid resin composition (RG1).
In the liquid resin composition (RG1), (C) relative (B) composition 100 weight portions of the content of composition are 500 weight portions, and solid component concentration is 27.6 weight %, and its average vapour pressure is 2.2mmHg.
Then, except that using liquid resin composition (RG1), other and embodiment 1 repair the hole equally, measure the colourity of reparation portion and normal portion, and the result is respectively (0.293,0.560,60.7) and (0.294,0.558,61.2), the colour difference of reparation portion and normal portion is very little, and the result shows that use is upward no problem.
Comparative example 3
The formation in normal portion and hole
Utilize the method identical, obtain having the substrate in normal green coloring layer and hole with embodiment 2.
The defect repair evaluation
With (a) pigment: 60/40 (weight ratio) potpourri, 90 weight portions of C.I pigment green 36 and C.I. pigment yellow 150, spreading agent: Disperbyk-2001 25 weight portions (solid constituent convert 11.5 weight portions), (b) alkali soluble resin: copolymer solution (b2) (solid component concentration=32.9 weight %) 76.0 weight portions (solid constituent convert 25 weight portions), (c) multi-functional monomer: dipentaerythritol acrylate 125 weight portions, (d) Photoepolymerizationinitiater initiater: 2-benzyl-2-dimethylamino-1-(4-morpholinyl phenyl) butanone-120 weight portion, and (e) solvent: (weight ratio=86.3/13.7) 649.0 weight portions mix 3-methoxyl butylacetic acid ester/cyclohexanone mixed solvent, make liquid resin composition (rg1).
In the liquid resin composition (rg1), (c) relative (b) composition 100 weight portions of the content of composition are 500 weight portions, and solid component concentration is 27.6 weight %, and its average vapour pressure is 3.1mmHg.
Then, except that using liquid resin composition (rg1), other is identical with embodiment 1, repairs the hole, still because liquid resin composition (rg1) drying property is strong, thus before pin arrival filling position dry solidification, be not suitable for reparation.
Embodiment 3
The formation in normal portion and hole
Will (A ') pigment: the C.I pigment blue 15: 6 and 95/5 (weight ratio) potpourri, 90 weight portions of C.I. pigment Violet 23, spreading agent: Disperbyk-2001 25 weight portions (solid constituent convert 11.5 weight portions), (B ') alkali soluble resin: copolymer solution (b1) (solid component concentration=33.2 weight %) 180.7 weight portions (solid constituent convert 60 weight portions), (C ') multi-functional monomer: dipentaerythritol acrylate 90 weight portions, (D ') the optical free radical initiating agent: 2-benzyl-2-dimethylamino-1-(4-morpholinyl phenyl) butanone-120 weight portion, and (E ') solvent: (weight ratio=68.2/31.8) 879.3 weight portions mix 3-ethoxyl ethyl propionate/propylene glycol methyl ether acetate/mixed solvent, make liquid resin composition (CFB1).
Then, except that using liquid resin composition (CFB1), other is identical with embodiment 1, makes normal blue-colored layer of thickness 1.6 μ m and forms the foursquare hole of 1 length of side, 90 μ m in portion of substrate center.
The evaluation of defective part reparation property
With (A) pigment: the C.I pigment blue 15: 6 and 95/5 (weight ratio) potpourri, 80 weight portions of C.I. pigment Violet 23, spreading agent: Disperbyk-2001 20 weight portions (solid constituent convert 9.2 weight portions), (B) alkali soluble resin: copolymer solution (b3) (solid component concentration=33.0 weight %) 90.9 weight portions (solid constituent convert 30 weight portions), (C) multi-functional monomer: dipentaerythritol acrylate 120 weight portions, (D) Photoepolymerizationinitiater initiater: 2-benzyl-2-dimethylamino-1-(4-morpholinyl phenyl) butanone-120 weight portion, and (E) solvent: 3-ethoxyl ethyl propionate/propylene glycol methyl ether acetate/diethylene glycol mono-n-butyl ether acetic acid esters mixed solvent (mixed weight than=21.9/45.2/32.9) 639.1 weight portions mix, and make liquid resin composition (RB1).
In the liquid resin composition (RB1), (C) relative (B) composition 100 weight portions of the content of composition are 400 weight portions, and solid component concentration is 26.7 weight %, and its average vapour pressure is 2.3mmHg.
Then, except that using liquid resin composition (RB1), other is identical with embodiment 1, repairs the hole, measure the colourity of reparation portion and normal portion, the result is respectively (0.136,0.107,12.4) and (0.136,0.108,12.6), the colour difference of reparation portion and normal portion is very little, and the result shows that use is upward no problem.
Comparative example 4
The formation in normal portion and hole
Utilize the method identical, obtain having the substrate in normal blue-colored layer and hole with embodiment 3.
The defect repair evaluation
With (a) pigment: the C.I pigment blue 15: 6 and 95/5 (weight ratio) potpourri, 80 weight portions of C.I. pigment Violet 23, spreading agent: Disperbyk-2001 20 weight portions (solid constituent convert 9.2 weight portions), (b) alkali soluble resin: copolymer solution (b3) (solid component concentration=33.0 weight %) 227.3 weight portions (solid constituent convert 75 weight portions), (c) multi-functional monomer: dipentaerythritol acrylate 75 weight portions, (d) Photoepolymerizationinitiater initiater: 2-benzyl-2-dimethylamino-1-(4-morpholinyl phenyl) butanone-120 weight portion, and (e) solvent: (weight ratio=25.6/36.1/38.3) 547.7 weight portions mix 3-ethoxyl ethyl propionate/propylene glycol methyl ether acetate/diethylene glycol mono-n-butyl ether acetic acid esters mixed solvent, make liquid resin composition (rb1).
In the liquid resin composition (rb1), (c) relative (b) composition 100 weight portions of the content of composition are 100 weight portions, and solid component concentration is 26.7 weight %, and its average vapour pressure is 2.3mmHg.
Then, except that using liquid resin composition (rb1), other is identical with embodiment 1, repairs the hole.But, because liquid resin composition (rb1) not fully sclerosis after the volatilization of (e) composition so after the sclerosis flowability is arranged also, is not suitable for repairing.
Claims (2)
1. radiation-sensitive resin composition, said composition contain the combination, (D) Photoepolymerizationinitiater initiater of (A) pigment, (B) alkali soluble resin, (C) multi-functional monomer or itself and simple function monomer and (E) solvent; It is characterized in that, (C) multi-functional monomer or its content with the combination of simple function monomer relative (B) alkali soluble resin 100 weight portions are 350～1,000 weight portion, (E) solvent 20 ℃ average vapour pressure less than 3.0mmHg, solid component concentration is 25～50 weight %, and, be used for the colored filter defect repair.
2. a colored filter defect-restoration method therefor is characterized in that, comprises the operation of the following stated order:
(1) remove the colored filter defective part, in the hole that forms, fill the described colored filter defect repair of claim 1 with radiation-sensitive resin composition after, remove the operation of desolvating;
(2) make the operation of radiation exposure filling part;
(3) operation of the postradiation filling part of heating.
Applications Claiming Priority (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004012832 | 2004-01-21 | ||
| JP12832/2004 | 2004-01-21 | ||
| JP324176/2004 | 2004-11-08 | ||
| JP2004324176A JP4775535B2 (en) | 2004-01-21 | 2004-11-08 | Radiation-sensitive resin composition for color filter defect repair and color filter defect repair method |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN1673780A true CN1673780A (en) | 2005-09-28 |
Family
ID=35017501
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNA2005100046684A Pending CN1673780A (en) | 2004-01-21 | 2005-01-21 | Radiation sensitive composition for repairing a color filter defect and method of repairing a color filter defect |
Country Status (5)
| Country | Link |
|---|---|
| JP (1) | JP4775535B2 (en) |
| KR (1) | KR100863118B1 (en) |
| CN (1) | CN1673780A (en) |
| SG (1) | SG113570A1 (en) |
| TW (1) | TWI379158B (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102286218A (en) * | 2006-09-04 | 2011-12-21 | Jsr株式会社 | Pigment resin composition, resin composition for ink jet mode color filter, color filter and liquid crystal display device |
| CN102352122A (en) * | 2006-09-04 | 2012-02-15 | Jsr株式会社 | Pigment-resin composition, resin composition for ink-jet type color filter, the ink-jet type color filter and liquid crystal display device |
| CN103304148A (en) * | 2012-03-06 | 2013-09-18 | Ntn株式会社 | Pattern correcting method and pattern correcting device |
| CN105074570A (en) * | 2013-03-15 | 2015-11-18 | 富士胶片株式会社 | Colored radiation-sensitive composition, colored cured film, color filter, color pattern formation method, method for producing color filter, solid-state imaging element, and liquid crystal display device |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4817611B2 (en) * | 2004-03-31 | 2011-11-16 | 東洋インキＳｃホールディングス株式会社 | COLORING COMPOSITION FOR CORRECTION OF COLORED PATTERN DEFECT AND METHOD FOR CORRECTING COLOR FILTER |
| JP4820614B2 (en) * | 2005-09-27 | 2011-11-24 | 東洋インキＳｃホールディングス株式会社 | Coloring composition for correcting green color filter and color filter corrected using the composition |
| JP2010231147A (en) * | 2009-03-30 | 2010-10-14 | Dnp Fine Chemicals Co Ltd | Ink for correcting minute defect in colored pattern and method for correcting minute defect in colored pattern |
| JP5655382B2 (en) * | 2009-06-08 | 2015-01-21 | 大日本印刷株式会社 | Color filter defect correction ink |
| JP5277181B2 (en) * | 2010-01-08 | 2013-08-28 | 東洋インキＳｃホールディングス株式会社 | COLORING COMPOSITION FOR COLORED PATTERN DEFECT CORRECTION AND COLOR FILTER DEFECT CORRECTION METHOD |
| CN103376657B (en) | 2013-07-15 | 2016-12-28 | 京东方科技集团股份有限公司 | Light resistance composition and preparation method thereof, color membrane substrates and display device |
| KR101689058B1 (en) | 2014-03-07 | 2016-12-22 | 동우 화인켐 주식회사 | Colored photosensitive resin composition and color filter using the same |
| CN103901721A (en) * | 2014-03-21 | 2014-07-02 | 京东方科技集团股份有限公司 | Light resistance composition, color film substrate and display device |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3564836B2 (en) * | 1995-11-22 | 2004-09-15 | Ｊｓｒ株式会社 | Radiation-sensitive composition for color filter and color filter |
| JPH10282322A (en) * | 1997-04-02 | 1998-10-23 | Toray Ind Inc | Correcting method and device for partial defect of substrate as well as manufacture of color filter and device thereof |
| JPH11142635A (en) * | 1997-11-07 | 1999-05-28 | Toray Ind Inc | Color paste to correct defect in small colored pattern and correcting method |
| JP4019475B2 (en) | 1997-12-05 | 2007-12-12 | 凸版印刷株式会社 | How to correct the color filter |
| JPH11242106A (en) | 1998-02-25 | 1999-09-07 | Toppan Printing Co Ltd | Manufacture of color filter |
| JP3807108B2 (en) * | 1998-08-03 | 2006-08-09 | Ｊｓｒ株式会社 | Radiation sensitive composition for color filter |
| JP4521741B2 (en) * | 1999-06-25 | 2010-08-11 | 大日本印刷株式会社 | Color filter defect correction method |
-
2004
- 2004-11-08 JP JP2004324176A patent/JP4775535B2/en not_active Expired - Fee Related
-
2005
- 2005-01-03 KR KR1020050000220A patent/KR100863118B1/en active IP Right Grant
- 2005-01-14 TW TW094101168A patent/TWI379158B/en not_active IP Right Cessation
- 2005-01-19 SG SG200500257A patent/SG113570A1/en unknown
- 2005-01-21 CN CNA2005100046684A patent/CN1673780A/en active Pending
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102286218A (en) * | 2006-09-04 | 2011-12-21 | Jsr株式会社 | Pigment resin composition, resin composition for ink jet mode color filter, color filter and liquid crystal display device |
| CN102352122A (en) * | 2006-09-04 | 2012-02-15 | Jsr株式会社 | Pigment-resin composition, resin composition for ink-jet type color filter, the ink-jet type color filter and liquid crystal display device |
| CN103304148A (en) * | 2012-03-06 | 2013-09-18 | Ntn株式会社 | Pattern correcting method and pattern correcting device |
| CN105074570A (en) * | 2013-03-15 | 2015-11-18 | 富士胶片株式会社 | Colored radiation-sensitive composition, colored cured film, color filter, color pattern formation method, method for producing color filter, solid-state imaging element, and liquid crystal display device |
| CN105074570B (en) * | 2013-03-15 | 2019-06-07 | 富士胶片株式会社 | Colour radiation sensitive compositions and its purposes |
Also Published As
| Publication number | Publication date |
|---|---|
| JP4775535B2 (en) | 2011-09-21 |
| KR20050076606A (en) | 2005-07-26 |
| SG113570A1 (en) | 2005-08-29 |
| JP2005234532A (en) | 2005-09-02 |
| TWI379158B (en) | 2012-12-11 |
| TW200534039A (en) | 2005-10-16 |
| KR100863118B1 (en) | 2008-10-14 |
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