CN1654430A - Low temperature sintering method for high hardness silicon nitride ceramics - Google Patents
Low temperature sintering method for high hardness silicon nitride ceramics Download PDFInfo
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- CN1654430A CN1654430A CN 200510023369 CN200510023369A CN1654430A CN 1654430 A CN1654430 A CN 1654430A CN 200510023369 CN200510023369 CN 200510023369 CN 200510023369 A CN200510023369 A CN 200510023369A CN 1654430 A CN1654430 A CN 1654430A
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Abstract
The low temperature sintering process of high hardness Si3N4 ceramic with MgSiN2 as sintering assistant belongs to the field of non-oxide ceramic preparing technology. The high performance Si3N4 ceramic is prepared with alpha-Si3N4 powder and MgSiN2 in the ratio of 100 to 2-10, and through mixing and hot pressing sintering. During the preparation, the material is first formed at 2 MPa pressure, then filled into graphite mold and finally hot pressing sintered at 10-30 MPa and 1600-1700 deg.c for 1-5 hr. The prepared Si3N4 ceramic has excellent comprehensive mechanical performance, including hree-point breaking strength higher than 800 MPa, fracture toughness higher than 5.00 MPa.m1/2, and hardness HV higher than 19 GPa.
Description
Technical field
The present invention relates to the low-temperature sintering method of high hardness silicon nitride ceramics, more precisely is with silicon nitride magnesium (MgSiN
2) powder prepares the method for high hardness silicon nitride ceramics as the sintering aid hot pressed sintering, belongs to the non-oxide ceramics preparation field.
Background technology
The Si that last century, the fifties grew up
3N
4Pottery, as high-temperature structural ceramics, have characteristics such as hot strength height, thermal shock resistance is good, high temperature creep is little, wear-resisting, good oxidation-resistance and chemical stability, be widely used in the carrier etc. of support, separator and the fissionable material of crucible in anticorrosive anti-wear parts, the semi-conductor industry in the high temperature resistant component of making internal combustion turbine and engine, the chemical industry and pyroceramic bearing, high speed cutting instrument, radome, nuclear reactor.
Silicon nitride is the strong covalent bond compound, there is not the fixed fusing point, issue estranged separating in the temperature more than 1850 ℃, again because the silicon nitride self-diffusion coefficient is low, have only when sintering temperature during near the silicon nitride decomposition temperature, ion migration just has enough speed, so solid state sintering is difficult to obtain fine and close silicon nitride ceramics.The liquid phase sintering of the most employing of SINTERING FOR SILICON NITRIDE CERAM at present, promptly need to add a certain amount of oxidesintering auxiliary agent, the silicon-dioxide on oxide addition and top layer and silicon nitride reaction generate oxynitride liquid phase acceleration of sintering during high temperature, burn till and form amorphous glassy phase form or crystal boundary precipitated phase after finishing, be present in crystal boundary or crystal boundary triangular space, the state of crystal boundary is a decision polycrystalline ceramics electrical property, an extremely important factor of all performances such as thermal characteristics and mechanical property, for the high-temperature structural ceramics silicon nitride, the formation deterioration of crystal boundary phase the high-temperature behavior of material, the intensity of crystal boundary especially crystal boundary intensity at high temperature be the decision this class material can be the used key of high temperature engineering.It is generally acknowledged that the performance of crystal boundary glassy phase such as intensity, softening temperature etc. are by controlling factors such as sintering aid kind of being added and content, the performance of glassy phase has determined the performance of silicon nitride ceramic material to a great extent, at this problem, people have proposed to improve by the state that changes crystal boundary the mechanical behavior under high temperature of silicon nitride ceramics, promptly so-called " crystal boundary engineering ".
Though the oxidesintering auxiliary agent can form liquid phase with silicon-dioxide and silicon nitride, owing in the liquid phase more foreign ion is arranged, be unfavorable for that the silicon nitride particle of long column shape generates, be difficult to obtain high performance silicon nitride ceramics.The formation of long column shape crystal grain, its advantage is to make that the mechanical property of silicon nitride ceramics significantly improves [1.K.Hirao such as acquisitions such as fracture toughness property, folding strengths, T.Nagaoka, etal.Microstructure control of silicon nitride by seeding with rodlike β-siliconnitride particles.J.Am.Ceram.Soc.77[7] 1857-62 (1994); 2.Sang-hoon Rhee, JaeDo Lee, Doh-Yeon Kim, Effect of heating rate on the exaggerated grain growthbehavior of β-Si
3N
4, Mater.Lett., 32,115-20 (1997)], the same with whisker fibre strengthening and toughening matrix material, by bridging with extract effect crack propagation is applied a closure stress, thereby improve its mechanical property.The raising of mechanical property, can promote simultaneously other performance as resistance to wear, the raising of heat-shock resistance, creep property and anti-fatigue performance etc.
The present invention's proposition as sintering aid, prepares high performance Si by hot pressing sintering method with novel nitride silicon nitride magnesium powder
3N
4Pottery has avoided forming in the preparation of conventional silicon nitride pottery the influence of the final relatively ceramic performance of a large amount of crystal boundaries.Up to the present, do not see as yet with the silicon nitride magnesium powder and prepare Si as sintering aid
3N
4The report of pottery.
Summary of the invention
The object of the present invention is to provide a kind of low-temperature sintering method for preparing the high-performance silicon nitride ceramics with silicon nitride magnesium as sintering aid.
Vegetation method specifically of the present invention is characterised in that:
(1) with α-Si
3N
4With silicon nitride magnesium be starting raw material, both part by weight are 100: 10-2; α-Si wherein
3N
4α phase content＞the 83wt% of powder, particle diameter are between the 0.3-30 μ m, MgSiN
2Powder purity＞98wt%, particle diameter are 0.3-30 μ m.
(2) above-mentioned steps (1) is contained the powder uniform mixing of sintering aid after; earlier with raw material at the 2MPa forming under the pressure; pack in the graphite jig hot pressed sintering under 10-30MPa, 1600 ℃-1700 ℃, soaking time 1-5 hour, nitrogen atmosphere protective condition then into.Sintering finishes the back sample and cools to room temperature with the furnace.
Obviously, the preparation method of high-performance silicon nitride ceramics provided by the invention compares with the preparation method of existing silicon nitride ceramics, has following advantage:
(1) prepares the compact silicon nitride pottery with less relatively sintering aid
(2) under relatively low temperature, prepare fine and close high performance silicon nitride ceramics
Prepared silicon nitride ceramics has good comprehensive mechanical property, and wherein 3 folding strengths reach σ
b＞800MPa, fracture toughness property K
Ic＞5.00MPam
1/2About, hardness H
v＞1900Kg/mm
2, the highest can be greater than 2200Kg/mm
2, promptly greater than 22Gpa.
Description of drawings
Fig. 1 is a process flow diagram of the present invention
Fig. 2 be respectively the silicon nitride ceramics of embodiment 1,2 gained provided by the present invention fracture apperance figure (2a, 2b)
Fig. 3 is the XRD figure of the silicon nitride ceramics of embodiment 3 gained provided by the present invention
Fig. 4 is the XRD figure of the silicon nitride ceramics of embodiment 4 gained provided by the present invention
Embodiment
Below by specific embodiment, further illustrate substantive distinguishing features of the present invention and obvious improvement, but the present invention only is confined to embodiment by no means.
Embodiment 1:
α-the Si that will contain 5wt% sintering aid silicon nitride magnesium
3N
4Behind the powder uniform mixing, earlier with raw material at the 2MPa forming under the pressure, in the graphite jig of packing into then, hot pressed sintering under 20Mpa, 1650 ℃, soaking time 1 hour, nitrogen atmosphere protective condition.Sintering finishes the back sample and cools to room temperature with the furnace.α-Si
3N
4Powder particle size 0.3-30 μ m, MgSiN
2Diameter of particle is 0.3-30 μ m.α-Si in the mixture in the present embodiment
3N
4With MgSiN
2The powder weight ratio is 100: 5.
3 folding strength σ of silicon nitride ceramics by above-mentioned prepared
bBe 1181MPa, fracture toughness property K
ICReach 6.68MPam
1/2About, hardness H
vReach 1974Kg/mm
2(19.74GPa).Its fracture apperance is shown in Fig. 2 (a).
Embodiment 2
α-the Si that will contain 5wt% sintering aid silicon nitride magnesium
3N
4Behind the % powder uniform mixing, earlier with raw material at the 2Mpa forming under the pressure, in the graphite jig of packing into then, hot pressed sintering under 20MPa, 1700 ℃, soaking time 1 hour, nitrogen protection condition.Sintering finishes the back sample and cools to room temperature with the furnace.All the other are with embodiment 1.
3 folding strength σ of silicon nitride ceramics by above-mentioned prepared
bBe 1127MPa, fracture toughness property K
ICReach 6.68MPam
1/2About, hardness H
vReach 19.74GPa.Its fracture apperance is shown in Fig. 2 (b).
Embodiment 3
α-the Si that will contain 5wt% sintering aid silicon nitride magnesium
3N
4Behind the powder uniform mixing, earlier with raw material at the 2MPa forming under the pressure, in the graphite jig of packing into then, hot pressed sintering under 13MPa, 1700 ℃, soaking time 1 hour, nitrogen atmosphere protective condition.Sintering finishes the back sample and cools to room temperature with the furnace.3 folding strength σ of silicon nitride ceramics by above-mentioned prepared
bBe 889MPa, fracture toughness property K
ICReach 7.46MPam
1/2About, hardness H
vReach 19.23GPa.XRD result shows that its principal crystalline phase is β-Si
3N
4, also have a spot of α-Si
3N
4, as shown in Figure 3.
Embodiment 4
After will containing a little powder uniform mixing of 2.5wt% sintering aid silicon nitride magnesium, earlier with raw material at the 2MPa forming under the pressure, in the graphite jig of packing into then, hot pressed sintering under 20MPa, 1600 ℃, soaking time 1 hour, nitrogen protection condition.Sintering finishes the back sample and cools to room temperature with the furnace.
3 folding strength σ of silicon nitride ceramics by above-mentioned prepared
bBe 616MPa, fracture toughness property K
ICReach 5.32MPam
1/2About, hardness H
vReach 22.36GPa.XRD result shows that its principal crystalline phase is β-Si
3N
4, also have more α-Si
3N
4, as shown in Figure 4.The H of present embodiment
vThan first three embodiment height, and sintering temperature is low than first three embodiment, and its reason is quite a few α-Si when low-temperature sintering
3N
4All do not change into β-Si as yet
3N
4
Embodiment 5
After will containing the powder uniform mixing of 5wt% sintering aid silicon nitride magnesium, earlier with raw material at the 2MPa forming under the pressure, in the graphite jig of packing into then, hot pressed sintering under 20MPa, 1650 ℃, soaking time 3 hours, nitrogen protection condition.Sintering finishes the back sample and cools to room temperature with the furnace.
3 folding strength σ of silicon nitride ceramics by above-mentioned prepared
bBe 1190MPa, fracture toughness property K
ICReach 6.94MPam
1/2About, hardness H
vReach 22GPa.XRD result shows that its principal crystalline phase is β-Si
3N
4, also have more α-Si
3N
4
Embodiment 6
After will containing the powder uniform mixing of 3wt% sintering aid silicon nitride magnesium, earlier raw material is depressed moulding at 2MPa, in the graphite jig of packing into then, hot pressed sintering under 20MPa, 1650 ℃, soaking time 5 hours, nitrogen protection condition.Sintering finishes the back sample and cools to room temperature with the furnace.
3 folding strength σ of silicon nitride ceramics by above-mentioned prepared
bBe 1251MPa, fracture toughness property K
ICReach 7.40MPam
1/2About, hardness H
vReach 21GPa.
Embodiment 7
After will containing the powder uniform mixing of 5wt% sintering aid silicon nitride magnesium, earlier with raw material at the 2MPa forming under the pressure, in the graphite jig of packing into then, hot pressed sintering under 30MPa, 1650 ℃, soaking time 1 hour, nitrogen protection condition.Sintering finishes the back sample and cools to room temperature with the furnace.
3 folding strength σ of silicon nitride ceramics by above-mentioned prepared
bBe 1198MPa, fracture toughness property K
ICReach 6.46MPam
1/2About, hardness H
vReach 21.85GPa.
Embodiment 8
After will containing the powder uniform mixing of 9wt% sintering aid silicon nitride magnesium, earlier with raw material at the 2MPa forming under the pressure, in the graphite jig of packing into then, hot pressed sintering under 20MPa, 1650 ℃, soaking time 1 hour, nitrogen protection condition.Sintering finishes the back sample and cools to room temperature with the furnace.
3 folding strength σ of silicon nitride ceramics by above-mentioned prepared
bBe 1203MPa, fracture toughness property K
ICReach 7.05MPam
1/2About, hardness H
vReach 20.79GPa.
From above-mentioned eight embodiments as can be seen, the present invention adopts MgSiN
2Powder is as β-Si
3N
4The sintering aid of pottery preparation, and by pressing methods has obtained the silicon nitride ceramics of high rigidity, high strength, high-fracture toughness.
Claims (3)
1. high rigidity Si
3N
4The low-temperature sintering method of pottery comprises batching, mixing, moulding and sintering, it is characterized in that:
(1) with α-Si
3N
4And MgSiN
2Be starting raw material, both part by weight are 100: 10-2;
(2) above-mentioned steps (1) is contained the powder uniform mixing of sintering aid after; earlier with raw material at the 2MPa forming under the pressure; pack into then in the graphite jig; under 10-30MPa, 1600 ℃-1700 ℃, soaking time 1-5 hour, nitrogen atmosphere protective condition, carry out hot pressed sintering, and cool to room temperature with the furnace.
2. by the described high rigidity Si of claim 1
3N
4The low-temperature sintering method of pottery is characterized in that described α-Si
3N
4α phase content＞the 83wt% of powder, particle diameter are 0.3-30 μ m.
3. by the described high rigidity Si of claim 1
3N
4The low-temperature sintering method of pottery is characterized in that described MgSiN
2Powder purity＞98wt%, particle diameter are 0.3-30 μ m.
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101830030A (en) * | 2010-04-19 | 2010-09-15 | 德隆高性能陶瓷(大连)有限公司 | Radial mould pressing device of silicon nitride green-pressing spheres and method for producing silicon nitride green-pressing spheres |
| CN111362704A (en) * | 2020-03-19 | 2020-07-03 | 西安澳秦新材料有限公司 | High-thermal-conductivity silicon nitride ceramic and preparation method thereof |
| CN111620697A (en) * | 2020-06-08 | 2020-09-04 | 浙江锐克特种陶瓷有限公司 | Silicon nitride substrate material prepared based on hot-pressing sintering method |
| CN114988882A (en) * | 2022-07-11 | 2022-09-02 | 中材高新氮化物陶瓷有限公司 | Silicon nitride high-temperature ceramic part with complex shape and preparation method thereof |
| CN115551818A (en) * | 2020-05-07 | 2022-12-30 | Ａｇｃ株式会社 | Method for producing ceramic sintered body and ceramic sintered body |
| CN117550901A (en) * | 2023-11-13 | 2024-02-13 | 中国人民解放军国防科技大学 | Si adopting core-shell structure 3 N 4 @MgSiN 2 Method for preparing high-heat-conductivity high-strength silicon nitride ceramic from powder |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3648541B2 (en) * | 2000-10-19 | 2005-05-18 | 独立行政法人産業技術総合研究所 | High thermal conductivity silicon nitride ceramics and method for producing the same |
-
2005
- 2005-01-14 CN CNB2005100233695A patent/CN1304333C/en not_active Expired - Fee Related
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101830030A (en) * | 2010-04-19 | 2010-09-15 | 德隆高性能陶瓷(大连)有限公司 | Radial mould pressing device of silicon nitride green-pressing spheres and method for producing silicon nitride green-pressing spheres |
| CN111362704A (en) * | 2020-03-19 | 2020-07-03 | 西安澳秦新材料有限公司 | High-thermal-conductivity silicon nitride ceramic and preparation method thereof |
| CN115551818A (en) * | 2020-05-07 | 2022-12-30 | Ａｇｃ株式会社 | Method for producing ceramic sintered body and ceramic sintered body |
| CN111620697A (en) * | 2020-06-08 | 2020-09-04 | 浙江锐克特种陶瓷有限公司 | Silicon nitride substrate material prepared based on hot-pressing sintering method |
| CN114988882A (en) * | 2022-07-11 | 2022-09-02 | 中材高新氮化物陶瓷有限公司 | Silicon nitride high-temperature ceramic part with complex shape and preparation method thereof |
| CN117550901A (en) * | 2023-11-13 | 2024-02-13 | 中国人民解放军国防科技大学 | Si adopting core-shell structure 3 N 4 @MgSiN 2 Method for preparing high-heat-conductivity high-strength silicon nitride ceramic from powder |
| CN117550901B (en) * | 2023-11-13 | 2024-05-14 | 中国人民解放军国防科技大学 | Si adopting core-shell structure3N4@MgSiN2Method for preparing high-heat-conductivity high-strength silicon nitride ceramic from powder |
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