CN1650679A - Method and device for treating flat and flexible work pieces - Google Patents
Method and device for treating flat and flexible work pieces Download PDFInfo
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- CN1650679A CN1650679A CNA038100436A CN03810043A CN1650679A CN 1650679 A CN1650679 A CN 1650679A CN A038100436 A CNA038100436 A CN A038100436A CN 03810043 A CN03810043 A CN 03810043A CN 1650679 A CN1650679 A CN 1650679A
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- 238000000034 method Methods 0.000 title claims abstract description 117
- 239000012530 fluid Substances 0.000 claims abstract description 124
- 238000012545 processing Methods 0.000 claims abstract description 72
- 238000011282 treatment Methods 0.000 claims abstract description 17
- 230000008569 process Effects 0.000 claims description 84
- 230000032258 transport Effects 0.000 claims description 32
- 238000007599 discharging Methods 0.000 claims description 16
- 239000007788 liquid Substances 0.000 claims description 15
- 230000000052 comparative effect Effects 0.000 claims description 5
- 230000015572 biosynthetic process Effects 0.000 claims description 4
- 238000004519 manufacturing process Methods 0.000 claims description 4
- 230000001737 promoting effect Effects 0.000 claims description 4
- 238000007704 wet chemistry method Methods 0.000 claims description 4
- 230000008859 change Effects 0.000 claims description 3
- 230000035945 sensitivity Effects 0.000 claims description 2
- 230000005518 electrochemistry Effects 0.000 claims 2
- 230000001105 regulatory effect Effects 0.000 claims 1
- 238000009713 electroplating Methods 0.000 abstract description 12
- 238000005530 etching Methods 0.000 abstract description 5
- 239000000126 substance Substances 0.000 abstract description 5
- 230000001681 protective effect Effects 0.000 abstract 5
- 239000011888 foil Substances 0.000 description 12
- 238000012546 transfer Methods 0.000 description 5
- 230000000694 effects Effects 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 230000000630 rising effect Effects 0.000 description 4
- 230000005484 gravity Effects 0.000 description 3
- 238000007654 immersion Methods 0.000 description 3
- 238000007747 plating Methods 0.000 description 3
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- 238000010586 diagram Methods 0.000 description 2
- 239000006185 dispersion Substances 0.000 description 2
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- 230000005611 electricity Effects 0.000 description 2
- 230000002706 hydrostatic effect Effects 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
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- 238000005086 pumping Methods 0.000 description 2
- 238000007634 remodeling Methods 0.000 description 2
- 230000011218 segmentation Effects 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 238000006424 Flood reaction Methods 0.000 description 1
- 238000001994 activation Methods 0.000 description 1
- 230000004913 activation Effects 0.000 description 1
- 238000002048 anodisation reaction Methods 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 238000007664 blowing Methods 0.000 description 1
- 239000000969 carrier Substances 0.000 description 1
- 239000012141 concentrate Substances 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000007598 dipping method Methods 0.000 description 1
- 238000010130 dispersion processing Methods 0.000 description 1
- 238000005868 electrolysis reaction Methods 0.000 description 1
- 238000000866 electrolytic etching Methods 0.000 description 1
- 238000005429 filling process Methods 0.000 description 1
- 230000004941 influx Effects 0.000 description 1
- 210000003141 lower extremity Anatomy 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000012811 non-conductive material Substances 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 238000012958 reprocessing Methods 0.000 description 1
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- 238000009991 scouring Methods 0.000 description 1
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Classifications
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/10—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
- H05K3/18—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using precipitation techniques to apply the conductive material
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D17/00—Constructional parts, or assemblies thereof, of cells for electrolytic coating
- C25D17/06—Suspending or supporting devices for articles to be coated
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/0085—Apparatus for treatments of printed circuits with liquids not provided for in groups H05K3/02 - H05K3/46; conveyors and holding means therefor
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- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Manufacturing & Machinery (AREA)
- Organic Chemistry (AREA)
- Metallurgy (AREA)
- Materials Engineering (AREA)
- Electrochemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electroplating Methods And Accessories (AREA)
- Manufacturing Of Printed Wiring (AREA)
- Chemically Coating (AREA)
- Shaping Metal By Deep-Drawing, Or The Like (AREA)
- ing And Chemical Polishing (AREA)
Abstract
The device in accordance with the invention and the method serve to treat flat and flexible work pieces ( 1 ) with a fluid, preferably in electroplating plants and etching facilities. The device and the method permit to place foil-type work pieces ( 1 ) in particular in such a manner into the fluid, a wet-chemical or electrochemical processing fluid for example, that the work pieces ( 1 ) will not deform or hit the side walls of a processing tank ( 3 ) or other built-in components. For this purpose, the processing tank ( 3 ) is assigned a protective carrier ( 5 ) into which the work pieces ( 1 ) are lowered, said carrier ( 5 ) being in a largely empty condition. For treatment, the protective carrier ( 5 ) is for example lowered into a tank ( 3 ) which is filled with processing fluid, said processing fluid flowing into the protective carrier ( 5 ). Means are provided on the protective carrier ( 5 ) by means of which the processing fluid is allowed to controlledly flow into the protective carrier ( 5 ).
Description
The present invention relates to be used for handling flat and equipment and method flexible work pieces, preferably on electroplating assembly line and etching facility, more particularly during wet-chemical or electrochemical treatments, when the foil-type workpiece vertically is immersed in the treatment pond, be used for handling workpiece.
In wet-chemical process production line, electroplating assembly line and etching facility special handle as the method for the thin workpiece of printed circuit paillon foil including, but not limited to, to the method step of described printed circuit paillon foil cleaning, activation, plating and reprocessing.In the workpiece that portion is made by electrically non-conductive material, several treatment step manufacturings are divided in printed circuit pattern and logical plating hole within it.For special application, foil thickness amounts to and is no more than the 30-50 micron, thereby these paillon foils have high sensitivity to mechanical stress.This surface is pliable and tough usually, thereby this workpiece can not transmit between cylinder.In this case, adopt for example vertical process for producing line of electroplating assembly line.In these production lines, by means of clamp, anchor clamps or screw, this printed circuit paillon foil is fixed to stroke lever by their outer rim.Usually, a plurality of paillon foils side by side and sometimes also one below another, be arranged on the stroke lever.
For the electrolytic deposition of conductive layer, this workpiece is connected to power cathode via these anchor clamps and stroke lever.In this case, correspondingly can conduct electricity as the comparative electrode of anode and be connected on this positive pole.During electrolytic etching, this polarity replaces.This workpiece is therefore by anodization.
The fixing stroke lever of this workpiece remains on and transmits on the carriage, thereby this workpiece is transported to another immersion liquid processing pond from an immersion liquid processing pond,, in it can be immersed in the corresponding immersion liquid processing pond, and from after processing once more from wherein promoting.
This treatment pond that is used to various process is with watery fluid-operated.According to the difference of composition, described fluid has different surface tension.For the thin workpiece falling of for example this paillon foil in this treatment pond, they need have minimum hardness and flat as far as possible surface.If situation is not like this, because the surface tension of this fluid, when this paillon foil just is being down in this fluid in for example horizontal direction, possible deflection, and may collide near be positioned at for example anode, heater, cooling device, transducer or the like this groove or the edge of parts.
Then may there be such danger in too big deflection, and promptly these responsive paillon foils will be out of shape or be crooked, even the formation risk of short-circuits is being arranged in electrolysis tank when this deflection paillon foil contacts the utmost point with electricity.Therefore, this reason is to form the relatively poor guiding piece of workpiece by these anchor clamps or tooth bar to cause, perhaps this material shortage hardness.Spraying or the like (convection current) by circulating pump, air causes in this pond that fluid flows and can also make this paillon foil deflection.To reducing the requirement of this thickness of workpiece, they no longer can immerse as traditional thick workpiece along with at present.
The objective of the invention is to eliminate the defective of known method, more particularly, provide a kind of equipment and method that is used to handle flat and pliable and tough workpiece, wherein under small charge guarantees, guarantee that under not producing the destruction situation workpiece falling is in process fluid.
The invention provides according to the equipment of claim 1 with according to the method for claim 14.
The preferred embodiments of the present invention are explained in the dependent claims.
To under destruction situation not, in process fluid, handling before the disclosure and description of the present invention of flat and flexible work pieces, will be appreciated that the present invention is not limited to disclosed concrete equipment, operation and material here.Be understandable that also the term of Shi Yonging only is used to describe the purpose of specific embodiment here, do not want to limit, because scope of the present invention is only limited by accessory claim.Therefore, it should be understood that by technological means and can carry out various remodeling and replacement that wherein these remodeling and replace can be applied under not breaking away from as the situation of accessory claim institute limited range on those contents that are described by means of following example and accompanying drawing.
Apparatus and method according to the invention is used for utilizing the substantially perpendicularly flat and pliable and tough workpiece of fluid treatment of position, specifically, preferably carries out on electroplating assembly line and etching facility.This equipment and method allow the foil-type workpiece is placed in the fluid, particularly in such a way, be placed on for example is in the process fluid (treatment pond), wherein this workpiece can not be out of shape and/or shift position basically, thereby they are prevented from and the sidewall of this processing groove (groove) or the parts collision of dress in other.
Equipment according to the present invention comprises the protection carrier that at least one is used to keep this workpiece; this carrier can be admitted by the groove that this fluid is housed; comprise also that simultaneously at least one makes fluid flow into the interior device of this protection carrier; wherein in such a way; promptly the workpiece in this protection carrier can not be out of shape and/or shift position basically, at least fluid flow into and filling process during these can not take place.Preferably, this fluid is to be used to wet-process fluid of chemistry or electrochemical treatments.This fluid that uses also can be the gas that for example is used for dry hot-air.In order to simplify, term " process fluid " will be used for following description, to represent any fluid.
In order to realize the method according to this invention, this workpiece is fixed in stroke lever, for example by means of transfer system this workpiece is sent to the described stroke lever of various processing grooves.According to the present invention, thereby this workpiece does not drop in this fluid, but at first is received in the protection carrier, wherein this carrier emptying process fluid basically for example.This protection carrier is sent in the processing groove that is placed on wherein.Then, this protection carrier is full of this process fluid, and mode is that this workpiece can not be out of shape and/or the shift position basically.Then, it is also processed to have only workpiece to contact with this process fluid.
This protection carrier comprises chemical substance and the material of predetermined pond temperature, for example plastics or the metal that is suitable for adopting.The device that utilizes gravity that this process fluid is contained in this protection carrier is at least one aperture in this protection carrier.Preferably, this protection carrier is made up of sidewall and diapire, and this aperture separates equably and is distributed on the described wall.Being dimensioned to like this of this aperture, i.e. this process fluid may command and flowing into lentamente in the described carrier, and do not make this responsive workpiece crooked or push open.Preferably, the size in each aperture (runner zone) scope is from 1 to 500 square millimeter.In order to consider for example to use the specific (special) requirements of process fluid different surfaces tension force, wherein this different surfaces tension force depends on the sensitiveness of this process fluid composition or this workpiece, and the aperture in this protection carrier can be made differently or scalable.For example, utilize replaceable gate or orifice plate, runner variableization of zone and the adjustment in this aperture.Described gate or orifice plate can be installed on the wall of this protection carrier.By replacing gate or the orifice plate with respect to this aperture, with respect to the position changeableization of position, aperture on this protection carrier walls, the opening on this protection carrier can be capped partly or be closed in this this orifice plate aperture.As a result, entering into the fluid of this protection carrier and the volume flow speed of this fluid can change.By replacing this gate and orifice plate, be closed in the aperture on this protection carrier partly, the time per unit influx has reduced.
For example, as the function of flow velocity, during this process fluid flow into this carrier, eddy current occurred in this process fluid of back, aperture on the protection carrier.In addition, the fluidised form of the dispersion that departs from this opening is towards this protection carrier inside direction orientation, and when when meeting, also forming eddy current.These eddy current can make responsive workpiece deformation.The degree that forms effect by this eddy current on this workpiece for example depends on that this workpiece is with respect to the orientation of eddy generation and apart from the distance or the flow direction of eddy generation.In the specific embodiment of this protection carrier, this process fluid only is passed in the aperture that is parallel to this workpiece on this protection carrier sidewall, and the aperture that may exist on side is in addition sealed simultaneously.This setting is to be used for stoping easily deformable especially workpiece owing to the bending of flowing and cancelling each other out and forming, and wherein should flow in this case almost pro impinges upon on this workpiece, thereby this workpiece can not depart from their position basically.
For example during this carrier rises; in order after processing, to protect this process fluid of carrier emptying from this fast; the diapire of this protection carrier can preferably have discharging baffle plate or big surface discharge gate; when this protection carrier by via the rising movement of handlebar stem or when passing through float and promoting; these discharging baffle plates or big surperficial gate are opened automatically; in the time of simultaneously in dropping into this groove, automatically close once more.
During this electrochemical treatments of this workpiece (by electroplating or electric polishing procedure), anode that the plating of formation electrolytic cell needs or the negative electrode that is used for etching can be fixed in the wall of this protection carrier.If the chemical resistance of this protection carrier and this electrochemical process are suitable, then this wall itself can play the effect of this anode or negative electrode.
If this anode (comparative electrode) is fixed on any side in the workpiece both sides near this groove edge in mode well-known in the art; then this protection carrier is except playing opposing convection current and protecting the effect of this workpiece in this protection carrier, also can play the opposing electric field magnetic line of force and shields the effect of comparative electrode.For this reason, for example, preferably, be used to admit for example this aperture of boring of this process fluid can not be located at the peripheral region of this protection carrier walls in this protection carrier, perhaps they are comparable little and/or few at these region quantities at these those diameters of wall middle section.This is just avoided having the undesirable strong magnetic line of force to concentrate in this workpiece peripheral region.In this case, the material of this carrier does not allow to have on the surface at least at it feature of conductivity, because this electric field magnetic line of force can not penetrate into this carrier and arrive this workpiece.
Be full of this carrier in order to be received at this workpiece behind this protection carrier or when they are being introduced in this protection carrier; this process fluid is fed to this protection carrier by hydrostatic gradient, and hydrostatic gradient wherein forms by tank liquor faces different inside and outside this protection carrier.By this protection carrier inside and outside fluid height difference, have various may be to form this gradient, when this protection carrier was down in this groove, the fluid in this processing groove was for example replaceable.
For example, this processing groove can be made up of protection carrier fixing, that promptly firmly install.In this case, utilize transfer system, remain on workpiece on the trip bar and be sent to and be positioned at the empty protection of this dead slot carrier.In this case; before being down into the trip bar in this dead slot; this process fluid for example is contained in the independent reservoir; and after the trip bar has been down into this work nest fully this workpiece has sunk in this protection carrier simultaneously; utilize feed system (pumping system or gravity) and pipeline, this fluid is fed to the vallecular cavity that is positioned at this protection carrier outside.After this wet-chemistry or electrochemical treatments were finished, this workpiece promoted to come out and be transported to next processing groove from this groove by means of this transfer system.This process fluid is recycled to this reservoir.Then, this protection carrier prepares to admit next workpiece.
In another embodiment, by this protection carrier that keeps this workpiece is down in this groove, the liquid level that can obtain in this groove is poor, and wherein this process fluid is fed to this groove during falling into this carrier or after falling into.In this case; this process fluid for example is contained in the independent reservoir; during this stroke lever that has this workpiece has been down into this work nest fully or has fallen into; utilize feed system (pumping system or gravity) and pipeline, this fluid is fed to the vallecular cavity that is positioned at this protection carrier outside.This reservoir both can be used as independent unit and had placed against this work nest, also can form by the independent side chamber in this processing groove or on this groove.For example blender, heater, cooler or the like device of being used to process this process fluid can be installed in this reservoir.After this chemistry or electrochemical treatments were finished, the trip bar that has this workpiece promoted from this groove, and this process fluid is recycled to this reservoir simultaneously.
In another embodiment, the liquid level difference in the groove that is full of process fluid can keep the processing groove of this workpiece to obtain by this protection carrier is down into.
The embodiment of Miao Shuing is at this protection carrier is sent to this processing groove and the mode from wherein shifting out in the back, and replacing the variation scheme that this protection carrier is sent to the above-mentioned method and apparatus in the groove that is full of or is not full of process fluid can combine with described embodiment arbitrarily.For example, utilize various devices, this protection carrier can be down in the processing groove that is full of.Preferably, this device can be made up of fixing protection carrier lifting device, and this lifting device is connected with this groove, utilizes this device simultaneously, and this protection carrier is transported in this groove.In another preferred exemplary embodiments, be installed to transporting of transfer system be used to transmit this workpiece on the carriage protection carrier lifting device protect this carrier to be sent in this groove so long.
In fixing protection carrier lifting device situation, in the trip bar is down into this processing groove before, this lifting device rises to upper position to this protection carrier.Therefore in this position, at this moment, this protection carrier takes out from this processing groove, and when workpiece is down into this protection carrier in the time, the process fluid outflow so far forth so that this workpiece can not be immersed in this process fluid.For process fluid is promptly flowed out; when this protection carrier promotes; the discharging baffle plate or the discharging door that are arranged on this protection carrier base for example can be opened; by lifter motion by means of handlebar stem; described discharging baffle plate or discharging door are opened automatically; and by descending motion, close automatically.Certainly, this discharging baffle plate and discharging door also can be by means of motors or are are for example opened and closed by any other drivings such as hands.
In order to handle, preferably, this protection carrier and workpiece synchronously are down in this processing groove.Therefore, remain on the replaceable one-tenth of the fluid degree that liquid level increases in this groove in this processing groove, cause inside and outside this protection carrier, existing liquid level poor.As a result, this process fluid can flow in this protection carrier through the vestibule that is provided with equably, and does not therefore destroy this workpiece.Change the area of flowing through of this vestibule by utilization flashboard in protection carrier sidewall; therefore the area of flowing through of this vestibule can be suitable for such speed, and in this speed, this lifting device reduces this workpiece; thereby process fluid is inwardly flowed, to be adapted to the workpiece performance.After processing, normal conditions in this facility, this workpiece can directly utilize the carriage lifting device that transports of the system of transporting to shift out.Then, by transporting moving of carriage, this workpiece can be sent in the next processing groove.This protection carrier remains on this processing groove low inside and puts, and prepares on above-mentioned processing groove and waits for up to next workpiece, transports moving of carriage not hinder.
In the specific embodiment of modification of the present invention, being installed in the workpiece lifting device that transports on the carriage usually can not need, and the lifting device that is used to protect carrier and be used for workpiece is installed in each processing groove at this moment.After this lifting device promoted workpiece out from processing station and takes upper position to, the carriage that transports of arrival was admitted the workpiece that is positioned on the trip bar.Utilize the lifting device and the stroke lever that arbitrarily hang this moment, the protection carrier that also is raised is fallen once more, is movable to next processing groove.The protection carrier that belongs to that groove is raised.Here, this protection carrier is admitted the trip bar, and will go into it in the processing pond.Then, this transports carriage and is movable to next work station.
If the protection carrier is installed to and transports on the carriage, this protection carrier can utilize described lifting device to be down into this processing groove and come out from lifting wherein.For this reason, this transports carriage pending carriage is sent to this processing groove.Before the wet-chemical pond was loaded, this protection carrier storage was in processing groove one of corresponding.Normally, this transports carriage and arrives the processing pond with the pending workpiece that is in the lifting state in general dipping workshop.Do not resemble that stroke lever is down in the processing groove immediately in the art methods, the present invention's suggestion at first promotes the protection carrier in the processing groove with protection carrier lifting device and comes out to reach workpiece, therefore by very empty protection carrier admittance.Then, the trip bar and protection carrier are down in the process fluid of processing station lentamente with basic identical speed.It is being down in the groove internal procedure, thereby this process fluid flow in the protection carrier that holds responsive workpiece equably, and make workpiece not deflection or distortion.In order to shift out them, only promote the stroke lever that has the workpiece lifting device.Stop the lower bottom part position at the protection carrier lifting device and the protection carrier in groove that transmit on the carriage, transport carriage simultaneously and move to next processing station.This embodiment allows not protect carrier fixedly to operate under the lifting device situation at processing station, and the whole height that needs almost floods the needs in workshop corresponding to prior art.
In the specific embodiment of modification of the present invention, the protection carrier is fixed to and transports carriage, thereby one of corresponding in the vertical moving and the processing station of walking.This protection carrier can be designed to have two parts at least with workpiece, and in bottom and two opposing sidewalls, has the baffle plate of automatic driving, and when needs, this baffle plate can be opened the protection carrier at this bottom and sidepiece.In case this baffle plate is opened, the protection carrier is divided into two and half parts, and the suspension parallel to each other of this two and half part is fixed on and transports on the carriage, and no longer fully around having on the stroke lever of workpiece.Preferably, this workpiece and the substantially parallel orientation of two and half parts.In order to admit workpiece, the stroke lever that is arranged on the piece-holder workpiece that transports on the carriage is in addition shifted onto in this protection carrier that opens wide.In case the stroke lever of holding workpiece reaches upper position, the flapper closure of bottom and sidepiece, two carrier halves branches combine to close baffle plate simultaneously.Under this condition, transport carriage and move to next processing station, wherein this carriage is down into this processing station to the protection carrier and the workpiece that have stroke lever.In case process fluid has entered into the protection carrier fully; in case this means the pond face inside and outside the protection carrier much at one the time, bottom and sidepiece baffle plate are opened, and protect carrier to be promoted by protection carrier lifting device once more simultaneously; up to reaching upper position, promptly protect the transporting position of carrier.This workpiece is processed, simultaneously, transports carriage and protects carrier to recover mobile together, transports task thereby carry out the next one.Do not make responsive workpiece substantial deviation than maelstrom in order to make in the lifting process of protection carrier in the inner fluid of pond, sidewall and baffle plate must correspondingly be designed to convenient flowing, and for example have rounded edge, smooth surface and do not have protuberance.Utilize this embodiment, unnecessarily each processing station is furnished with the protection carrier, but this feature also has such shortcoming, promptly correspondingly be brought to next work station attached to the process fluid on the protection carrier.This shortcoming for example can suppress in lifting process by being arranged on the wiping or the blowing apparatus that transport on the carriage, perhaps reduces at least basically and adheres to Fluid Volume.This embodiment is particularly suitable for that fluid will not have bigger disadvantageous situation in the wherein residual pond, for example, be used for from a service sink to another transport, be used for this workpiece is sent to the processing pond of unusual similar structures, multistage cleaning pond or be used for situation that process fluid takes out of continuously, for example be used for pool structure is restored for example.In transporting the carriage walking process, close baffle plate in this protection carrier base and can be used as catch tray simultaneously.Preferably, the process fluid of having shaken off down by walking movement is by closing baffle collected.When this baffle plate when next work station is opened, this residual fluid can be discharged from.For this reason, collection funnel can be set, this funnel stops any residual fluid to flow into this processing station, rather than for example directly is directed to Waste Water Treatment.In other embodiment of the present invention, after processing, the protection carrier will not be retained in the treatment pond.In order to load and unload this workpiece, this protection carrier has door on its side, and this door is towards depot.In this embodiment, stroke lever with the protection carrier be brought in the processing station one of corresponding on, be down into lentamente in this pond therein.In the landing process, this process fluid flow in this protection carrier equably, and does not make workpiece deformation.Utilize this embodiment, this outfit expense is very low, on the other hand, comes from attached to waste fluid on protection wall of carrier and the vestibule and the residual process Fluid Volume that is pulled away to another pond along a pond very big.
In fact, various embodiments of the invention can combine in electroplating workshop.
Apparatus and method according to the invention will further be explained at accompanying drawing.In this accompanying drawing, show the processing station (groove) of dispersion with cutaway perspective form.In the accompanying drawings:
Fig. 1 is the emissions groove end view that has and do not have the protection carrier and have reservoir at electroplating workshop;
Fig. 2 has fixing protection carrier and has to be directly installed on the wherein enlarged side view of the groove of reservoir;
Fig. 3 is the schematic diagram at the electroplating workshop groove array that has fixing protection carrier lifting device;
Fig. 4 is for being arranged in the schematic diagram that transports the electroplating workshop processing station of protection carrier lifting device on the carriage having groove and having.
Fig. 1 shows various processing stations 10, and each processing station is made up of groove 3,3 ' or 24.This groove 3 ' leads to reservoir 7 via pipeline 9 and pump 8.The fixing protection carrier of promptly firmly installing 5 with aperture 6 is connected with this groove 3 '.By contrast, having rising of aperture 6 is connected with groove 3 with the protection carrier 5 that descends.The transfer system that is used to transport this workpiece 1 that mainly comprises load bearing arm 23, stroke lever 2 and clamping device 4 is distributed to each processing station.Workpiece 1 for thin printed circuit paillon foil extends perpendicular to figure plane under existing conditions.For example for the trip bar 2 of rectangle copper track with carrier bar 23, admit the trip bar 2 and the carriage (not shown) the same manner that transports that it is sent to this electroplating workshop dispersion processing station 10 illustrated.This workpiece 1 is fixed on the trip bar 2 by means of this clamping device 4.In this scheme, do not protect carrier 5 to be connected with this groove 24.The processing that will carry out here for example can be carried out under gaseous environment, thereby does not need protection carrier 5 usually.If form strong flowing during this is handled, for example by means of the air circulation of powerful fan, this protection carrier 5 here also can utilize, and wherein this aperture 6 is suitably adjusted.
Via these protection carrier 5 sidewall split sheds 6, this process fluid is recycled on the protection carrier 5 with control rate.Under this processing conditions, this groove 3 and 3 ' is full of process fluid up to this tank liquor face 21.
This groove 3 ' is equipped with the pending workpiece 1 that is used to handle, and this process fluid at first is contained in this reservoir 7.In order to load, this workpiece 1 is sent to this processing groove 3 ' by transporting carriage, and is lowered in the protection carrier 5, enters into simultaneously in the groove 3 ', and the two all is empty at this moment.Then, this process fluid is pumped in this groove 3 ' via this pipeline 9 from this reservoir 7 with pump 8.This groove 3 ' is full of process fluid.This causes inside and outside this protection carrier 5 fluid height difference being arranged simultaneously, and this difference in height causes flowing to this protection carrier inside via the process fluid may command in this aperture 6.The speed that fluid flow to this protection carrier 5 is the function of these pump 8 output capacities, is determined by the size in this aperture 6.In practice, speed is from 0.01 to 1m/s maximum.During handling, when for example distributing or be used to refill filter circuit that full solution distributes or agitating device and form when flowing by being used to uniform temperature, this protection carrier 5 also must be carried out and keep the function of strong flow away from this workpiece 1.
After processing, utilize the lifting device (not shown), keep the trip bar 2 of this workpiece 1 from this process fluid, to extract out, this lifting device is installed in this and transports on the carriage, and is brought into scouring stage, for example is used for later process.Simultaneously, perhaps utilize pump 8 by the controlled valve (not shown), perhaps by utilizing the difference in height between this groove 3 ' and this reservoir 7, this Treatment Solution is recycled to this reservoir 7.
In order in groove 3, to handle this workpiece 1; by means of protection carrier lifting device, this protection carrier 5 must at first be lifted out from groove 3, and wherein this lifting device does not here illustrate; can fix or be installed to this and transport on the carriage, this process fluid remains in this groove 3.When this lifting was admitted in these workpiece 1 with the protection carrier 5 that becomes sky basically, this protection carrier 5 was in this workpiece 1 drops to this groove 3.According to the speed that this protection carrier 5 descends, in the decline process, perhaps by the difference in height of outer fluid formation in this protection carrier 5, under higher decrease speed, this process fluid controllably is recycled in this protection carrier 5.
Fig. 2 shows the processing station 10 that has groove, wherein this troughed belt have with Fig. 1 in the fixedly protection carrier 5 of similar manner (groove 3 '), this processing station 10 has the reservoir 25 that directly is installed on this groove.Because it is unnecessary that the whole saturation of this groove is transmitted by pump, so the minimum flow fluid that reservoir 25 keeps can be less than the amount of its actual maintenance.According to the present invention, for this workpiece 1 is down in this groove, this process fluid only is evacuated to the residue tank liquor face that keeps such, and this liquid level only reaches below the lower limb that enters into these protection carrier 5 workpiece 1.
Fig. 3 shows dead slot 24 and comprises the processing station 10 of groove 3, and wherein this groove 3 is full of process fluid and distributes to protection carrier 5.This processing station 10 has protection carrier lifting device (not shown), and this lifting device is distributed to groove 3 and can vertically be moved this protection carrier 5 up and down in arrow 26 directions.Up and down path proximity is equivalent to keep the moving up and down of stroke lever 2 of this workpiece 1.The trip bar 2 transports carriage by means of this and remains on upper position there.Then, thus this protection carrier 5 is thus lifted to this upper position and this workpiece 1 is received in its inside.At this in an instant, almost there is not process fluid in this protection carrier 5.Then, this protection carrier 5 and this workpiece 1 side by side are down in this groove 3 at leisure and almost, up to arriving the precalculated position.In order to take out this workpiece 1 after processing, this protection carrier 5 remains on the position of bottom, by means of this lifting device that transports carriage, has only to keep the stroke lever 2 of this workpiece 1 to withdraw from this station.
Compare flatly to revolve in processing station shown in Fig. 4 and the earlier drawings and turn 90 degrees, thereby this processing station can be seen from the load side of this electroplating workshop.This protection carrier lifting device is connected with the carriage that transports shown in the segmentation.In this embodiment, this protection carrier 5 has guide supports 11 on any side, and this strutting piece 11 leans against on the lower position on these groove 3 edge support surfaces 12, thereby bears this protection carrier 5.Load bearing arm 17 further is installed on the protection carrier 5, utilizes this load bearing arm 17, transporting carriage and can vertically promote this protection carrier 5 by means of this accepting arm 18 and trailer system 20 shown in the segmentation.In this embodiment, this transports carriage and has two lifting devices, i.e. workpiece lifting device and protection carrier lifting device.The major part of this lifting device, as wireline reel, promote gear motor, be used for guiding piece of this protection carrier or the like, these are not used for describing the sealing details that realizes the invention mode, so here do not illustrate.This workpiece 1 is fixed on the trip bar 2 by means of this clamping device 4.The trip bar 2 has load bearing arm 23, utilizes this load bearing arm, and this workpiece lifting device or the trip bar lifting device are caught the trip bar 2 by means of this accepting arm 22, and can raise or reduce the trip bar 2.It will be placed on the guide supports 13 on the trip bar and at the bearing-surface 14 that is used to protect on the bogey of carrier.This transports carriage the workpiece 1 of the state of rise is sent on the processing station that has groove 3.Then, the accepting arm 18 of this protection carrier lifting device be placed on this load bearing arm 17 below, and this protection carrier lifting device promotes this protection carrier 5 by means of trailer system, is positioned at wherein fully up to this workpiece 1.This workpiece lifting device has lifting beam 15, should promote lifting beam 16 by the protection carrier simultaneously.This arrow 26 indicates the lead of this workpiece.
When promoting this protection carrier 5, the process fluid that is mounted in it flows out via this aperture 6, and flow back in the groove 3.In order to protect carrier 5 rapid these fluids of emptying from this; discharging baffle plate 27 is located at the bottom of this protection carrier; for example via this rising movement that utilizes the handlebar stem (not shown) or via float; this baffle plate is automatically opened during lifting process, and is automatically closed once more via this down maneuver simultaneously.The mode that this discharging baffle plate moves is not shown in the accompanying drawings.
Flowed empty back and reached this upper position at this protection carrier 5, promptly in speed much at one, utilized this workpiece lifting device and this protection carrier lifting device simultaneously, this transports carriage and at leisure and synchronously this protection carrier and stroke lever is reduced in this groove 3.When process fluid was replaced in remaining on groove 3, this tank liquor face 21 was these protection carrier 5 outside risings, and according to the structure in this aperture 6, fluid flow in this protection carrier 5 with control rate simultaneously.
Label:
1 workpiece
2 stroke levers
3 for the groove (work nest) of processing at fluid
4 are used for workpiece is remained on clamping device on the trip bar
5 protection carriers
6 are used for the aperture of this process fluid turnover
7 reservoirs
8 pumps
9 pipelines
10 processing stations
11 in the guide supports of this protection on carrier
12 bearing-surfaces on this processing station
13 guide supports on the trip bar
14 bearing-surfaces on this protection carrier bogey
15 transport lifting beam on the carriage workpiece lifting device at this
16 transport lifting beam on the protection carrier lifting device of carriage at this
17 this protection carrier bogey on load bearing arm
18 should protect the accepting arm of this lifting beam of carrier 19
The trailer system of 19 these workpiece lifting devices
20 should protect the trailer system of carrier lifting device
21 tank liquor faces
22 these workpiece lifting beam accepting arms
23 load bearing arms on the trip bar
24 are used for the groove of dry-cure
25 reservoirs
26 should protect the direction of motion of carrier and the trip bar
27 discharging baffle plates
Claims (26)
1. equipment that is used to utilize the flat and flexible work pieces of fluid treatment comprises:
I. at least one is used to keep the protection carrier of this workpiece (1), and described protection carrier (5) is equipped with the usefulness of groove (3) admittance of this fluid for processing; And
Ii. at least one allows this fluid to flow into the device of this protection carrier (5), and its mode is, has been received in this protection carrier (5) afterwards at this workpiece (1), and this workpiece (1) can not be out of shape and/or the shift position basically.
2. according to the equipment of claim 1, wherein this fluid is wet-chemistry or electrochemistry process fluid.
3. according to the equipment of claim 2, wherein be used to allow the device of this process fluid in this protects carrier (5) to be included at least one aperture (6) in this protection carrier (5).
4. according to the equipment of claim 3, wherein this protection carrier (5) comprises sidewall and diapire, this aperture 6) be distributed in simultaneously on this sidewall and/or the diapire with spaced apart equably.
5. according to claim 3 and 4 any one equipment, wherein each aperture (6) size range is from 1 to 500 square millimeter.
6. according to the equipment of claim 5, wherein this aperture (6) are provided with replaceable gate and/or orifice plate, are used to change port size.
7. according to any one equipment of claim 4-6; wherein this aperture (6) are not arranged on the wall border area of this protection carrier (5); perhaps they on diameter less than the border area, and/or they in border area quantity less than quantity, to realize electric screen with respect to comparative electrode at the middle part.
8. according to any one equipment of claim 4-7, wherein this diapire has at least one discharging baffle plate (27) or at least one discharging door.
9. according to any one equipment of claim 2-8, wherein provide at least one to be used to form device, thereby this process fluid allow to flow in this protection carrier (5) in the inside and outside process fluid liquid level difference of this protection carrier (5).
10. according to the equipment of claim 9; the device that wherein is formed on the inside and outside process fluid liquid level difference of this protection carrier (5) comprises at least one reservoir (7) and at least one conveying system, and this process fluid is recycled to from this reservoir (7) and is positioned at this groove (3) and slot space outside this protection carrier (5) whereby.
11. according to claim 9 and 10 any one equipment; wherein this device that is formed on the inside and outside process fluid liquid level difference of this protection carrier (5) comprises at least one the fixing protection carrier lifting device that is connected with this groove (3); utilize this device, this protection carrier (5) can be sent in this groove (3).
12. according to claim 9 and 10 any one equipment; wherein this device that is formed on the inside and outside process fluid liquid level difference of this protection carrier (5) comprises at least one protection carrier lifting device; this device is installed in the carriage that transports that is used for this workpiece (1); utilize this device simultaneously, this protection carrier (5) can be sent in this groove (3).
13. equipment according to claim 12; wherein should protect carrier (5) by at least two parts manufacturings; wherein these parts comprise a bottom baffle and two opposite side baffle plates; these baffle plates can automatically drive; and can protect carrier (5) from promoting front opening at this at this groove (3), this workpiece (1) remains in this groove (3) simultaneously.
14. one kind in groove (3) with the method for the flat and flexible work pieces (1) of fluid treatment, comprise following method step:
I. this workpiece (1) is received in the protection carrier (5);
Ii. this protection carrier (5) is sent in this groove (3), perhaps this protection carrier (5) is arranged in this groove (3); Then
Iii. this protection carrier (5) is full of fluid, mode is that this workpiece (1) can not be out of shape and/or the shift position basically; And and then
Iv. use this workpiece of this fluid treatment (1).
15. according to the method for claim 14, wherein this fluid is wet-chemistry or electrochemistry process fluid, and offers this protection carrier (5) via wherein at least one aperture (6).
16. according to the method for claim 15, wherein for this protection carrier (5) is full of this process fluid, poor at the inside and outside formation of this protection carrier (5) process fluid liquid level, this process fluid of described official post flow in this protection carrier (5).
17. method according to claim 16; process fluid liquid level difference formed like this inside and outside wherein this was formed on this protection carrier (5); promptly by this protection carrier (5) being sent to this groove (3) or this protection carrier (5) being arranged in this groove (3), this process fluid offers this groove (3) simultaneously.
18. according to the method for claim 16, wherein the liquid level difference at the inside and outside process fluid of this protection carrier (5) forms by this protection carrier (5) is sent in the groove (3) that holds this process fluid.
19. according to claim 17 and 18 any one methods, wherein utilize the fixing protection carrier lifting device that is connected with this groove, this protection carrier (5) is sent in this groove (3).
20. according to claim 17 and 18 any one methods, wherein utilize and be installed to the carriage that transports that is used for this workpiece (1), this protection carrier (5) is sent in this workpiece (1).
21. according to any one method of claim 17-20, wherein this process fluid is recycled to from reservoir (7) and is positioned at this groove (3) and slot space outside this protection carrier (5).
22. according to any one method of claim 15-21; wherein this process fluid is protected aperture (6) circulation of carrier (5) via this; described protection carrier 5) comprise sidewall and diapire, this aperture (6) are equably with spaced apart and be distributed on the described wall simultaneously.
23. method according to claim 22; wherein this aperture (6) are not arranged on the sidewall of this protection carrier (5); perhaps they on diameter less than the border area, and/or they in sidewall quantity less than quantity, in order to realize electric screen with respect to comparative electrode at the middle part.
24. according to claim 22 and 23 any one methods; wherein for this protection carrier (5) is full of fluid; this process fluid only allows to pass on two sidewalls that this aperture (6) flows to this protection carrier (5), and described parallel sidewalls is orientated in this workpiece (1).
25. according to any one method of claim 15-24, wherein for this protection carrier (5) is full of fluid, according to the mechanical sensitivity of this workpiece (1), the size of regulating at least one aperture (6) by means of replaceable gate and/or orifice plate.
26. according to any one method of claim 22-25; wherein; protect carrier (5) to discharge rapidly in order after processing, to make this fluid from this; the diapire of this protection carrier (5) has at least one baffles (27) or at least one discharging door; this baffle plate or discharging door open wide, and this process fluid can flow out via baffle plate or discharging door simultaneously.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE10224817A DE10224817B4 (en) | 2002-06-05 | 2002-06-05 | Method and device for vertical dipping of film-like material to be treated in baths of electroplating and etching plants |
| DE10224817.6 | 2002-06-05 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN1650679A true CN1650679A (en) | 2005-08-03 |
Family
ID=29594258
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNA038100436A Pending CN1650679A (en) | 2002-06-05 | 2003-05-27 | Method and device for treating flat and flexible work pieces |
Country Status (10)
| Country | Link |
|---|---|
| US (1) | US20050224357A1 (en) |
| EP (1) | EP1510111A1 (en) |
| JP (1) | JP2005529243A (en) |
| KR (1) | KR20050008772A (en) |
| CN (1) | CN1650679A (en) |
| AU (1) | AU2003240725A1 (en) |
| BR (1) | BR0308809A (en) |
| DE (1) | DE10224817B4 (en) |
| TW (1) | TW200403014A (en) |
| WO (1) | WO2003105546A1 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103374744A (en) * | 2013-07-11 | 2013-10-30 | 皆利士多层线路版(中山)有限公司 | PCB (printed circuit board) electroplating copper attached tank |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102004039632A1 (en) * | 2004-08-11 | 2006-02-23 | Atotech Deutschland Gmbh | Container for a galvanic vertical treatment plant and its manufacturing process |
| KR100728889B1 (en) * | 2006-06-07 | 2007-06-20 | (주)에스엠씨 | Device for etching a flexible film |
| KR100728890B1 (en) * | 2006-06-07 | 2007-06-20 | (주)에스엠씨 | Device for etching a flexible film |
| JP5481785B2 (en) * | 2007-12-19 | 2014-04-23 | 日立化成株式会社 | Etching method |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US1374370A (en) * | 1918-11-07 | 1921-04-12 | Herbert P Ewell | Electrochemical gold-separator |
| US1792998A (en) * | 1928-07-05 | 1931-02-17 | Thomas G Melish | Anode container |
| US2365202A (en) * | 1941-06-14 | 1944-12-19 | Connelly Iron Sponge & Governo | Process of making ferric hydrate |
| US2431949A (en) * | 1943-11-24 | 1947-12-02 | Gen Motors Corp | Apparatus for electroplating the inside of bearing shells and the like |
| US2461113A (en) * | 1946-10-14 | 1949-02-08 | Hanson Van Winkle Munning Co | Fluid treatment equipment |
| US3607712A (en) * | 1969-01-21 | 1971-09-21 | Ionic International Inc | Barrel-type processing apparatus |
| US3663406A (en) * | 1971-03-11 | 1972-05-16 | Ppg Industries Inc | Combined electrodialysis and ultrafiltration of an electrodeposition bath |
| US4059493A (en) * | 1976-04-29 | 1977-11-22 | Cities Service Company | Anode, anode basket and method of packaging anodes |
| US4680100A (en) * | 1982-03-16 | 1987-07-14 | American Cyanamid Company | Electrochemical cells and electrodes therefor |
| JPS62222081A (en) * | 1986-03-25 | 1987-09-30 | Toyo Giken Kogyo Kk | Jig for thin sheet |
| DE3612220A1 (en) * | 1986-04-11 | 1987-10-15 | Schering Ag | HOLDING PLIERS |
| JPH0657879B2 (en) * | 1987-10-31 | 1994-08-03 | 日大工業株式会社 | Basket type electrodeposition coating equipment |
| US4817650A (en) * | 1988-01-04 | 1989-04-04 | Herbert Tilton | Self-contained tiltable basket for plating, washing or otherwise treating hollow articles |
| JPH01194497A (en) * | 1988-01-29 | 1989-08-04 | Tanaka Kikinzoku Kogyo Kk | Jig for plating printed wiring board |
| US4966672A (en) * | 1988-08-26 | 1990-10-30 | National Semiconductor Corporation | Electrolytic apparatus with unequal legged basket-carrier |
| JPH06216496A (en) * | 1993-01-13 | 1994-08-05 | Hitachi Ltd | Jig for thin sheet |
| US5472503A (en) * | 1993-06-25 | 1995-12-05 | Lico, Inc. | Vertical load transferring apparatus |
| DE4323698C2 (en) | 1993-07-15 | 1995-06-14 | Atotech Deutschland Gmbh | Device for stabilizing printed circuit boards |
| FR2715146B1 (en) * | 1994-01-19 | 1996-02-16 | Tech Surfaces Sa | Device for processing specially shaped parts. |
| DK0792391T3 (en) * | 1994-11-15 | 1999-04-12 | Siemens Sa | Apparatus for the electrolytic treatment of plate-shaped materials, especially printed circuit boards |
| US5938899A (en) * | 1997-10-28 | 1999-08-17 | Forand; James L. | Anode basket for continuous electroplating |
| IT1296811B1 (en) * | 1997-11-28 | 1999-08-02 | Resco Srl | PROCESS AND MACHINES FOR THE PRODUCTION OF FLEXIBLE AND SEMI-RIGID PRINTED CIRCUITS |
| DE19813528A1 (en) * | 1998-03-26 | 1999-10-07 | Siemens Sa | Device for treating plate-shaped workpieces, in particular printed circuit boards |
| US6261426B1 (en) * | 1999-01-22 | 2001-07-17 | International Business Machines Corporation | Method and apparatus for enhancing the uniformity of electrodeposition or electroetching |
| US6190530B1 (en) * | 1999-04-12 | 2001-02-20 | International Business Machines Corporation | Anode container, electroplating system, method and plated object |
-
2002
- 2002-06-05 DE DE10224817A patent/DE10224817B4/en not_active Expired - Fee Related
-
2003
- 2003-05-27 BR BR0308809-0A patent/BR0308809A/en not_active IP Right Cessation
- 2003-05-27 KR KR10-2004-7019628A patent/KR20050008772A/en not_active Application Discontinuation
- 2003-05-27 US US10/507,137 patent/US20050224357A1/en not_active Abandoned
- 2003-05-27 EP EP03730130A patent/EP1510111A1/en not_active Withdrawn
- 2003-05-27 JP JP2004512469A patent/JP2005529243A/en not_active Withdrawn
- 2003-05-27 CN CNA038100436A patent/CN1650679A/en active Pending
- 2003-05-27 WO PCT/EP2003/005587 patent/WO2003105546A1/en active Application Filing
- 2003-05-27 AU AU2003240725A patent/AU2003240725A1/en not_active Abandoned
- 2003-06-05 TW TW092115247A patent/TW200403014A/en unknown
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103374744A (en) * | 2013-07-11 | 2013-10-30 | 皆利士多层线路版(中山)有限公司 | PCB (printed circuit board) electroplating copper attached tank |
Also Published As
| Publication number | Publication date |
|---|---|
| WO2003105546A1 (en) | 2003-12-18 |
| US20050224357A1 (en) | 2005-10-13 |
| DE10224817A1 (en) | 2003-12-24 |
| BR0308809A (en) | 2005-01-04 |
| EP1510111A1 (en) | 2005-03-02 |
| KR20050008772A (en) | 2005-01-21 |
| DE10224817B4 (en) | 2005-04-14 |
| TW200403014A (en) | 2004-02-16 |
| JP2005529243A (en) | 2005-09-29 |
| AU2003240725A1 (en) | 2003-12-22 |
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