CN1629659A - Polarized light assembly with double metallic layer grating and manufacturing method thereof - Google Patents
Polarized light assembly with double metallic layer grating and manufacturing method thereof Download PDFInfo
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- CN1629659A CN1629659A CN 200310120495 CN200310120495A CN1629659A CN 1629659 A CN1629659 A CN 1629659A CN 200310120495 CN200310120495 CN 200310120495 CN 200310120495 A CN200310120495 A CN 200310120495A CN 1629659 A CN1629659 A CN 1629659A
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Abstract
This invention provides a polarized component with double-metal layer gratings. Multiple parallel dielectric layers having a period are formed on a transparent base, a groove is set between adjacent dielectric layers, a first metal layer having a first thickness is formed on the groove, a second metal layer with a second thickness and a width formed on the dielectric layer, in which, a vertical distance of 10~100um is between the first and second metal layers to isolate them. The period is 10~250nm, the thickness is 30~150nm, the first is equal to the second. The proportion of width/period is 25~75%. This invention also discloses the manufacturing method.
Description
Technical field
The present invention relates to a kind of polarisation assembly and manufacture method thereof, particularly relate to a kind of polarisation assembly and manufacture method thereof that is applicable to visible spectrum (visible spectrum) with double-metal layer grating with High Extinction Ratio (extinction ratio).
Background technology
The use array that parallel wire constituted polarizes, and (polarize) radiowave is existing to have surpassed centenary history.At present, metal gate normally is formed on the transparency carrier by the array that thin lead is constituted, and is used for polarity electromagnetic spectrum (electromagnetic spectrum).
Fig. 1 is a traditional single metal layer grating polaroid 100.This metal gate polaroid (wire gridpolarizer) includes many parallel conductor electrodes 110 that are formed on the dielectric substrate 120.The major influence factors of the polarisation mechanism of this metal gate polaroid 100 has: the thickness D of the cycle P of conductor electrode 110, the width W of conductor electrode 110 and conductor electrode 110.Via the incident light 130 that a light source 132 is produced, inject this polaroid 100 with incident angle θ.This metal gate polaroid 100 can be divided into a reflected light 140 and with incident light 130 and penetrate light 150.At this, use general definition, incident light 130 includes TM (transverse magnetic) polarized light and TE (transverse electric) polarized light.This TM polarized light is called P polarized light (P polarized light) again, and it is the polarized light of the electric-field vector of incident light perpendicular to metal gate electrode 110.This TE polarized light is called S polarized light (S polarizedlight) again, and it is parallel to the polarized light of metal gate electrode 110 for the electric-field vector of incident light.And be used for judging whether the function of polarization of polaroid is good, and then be that the extinction ratio (extinction ratio) with penetrance is represented, the extinction ratio of penetrance is defined as the penetrance T of TM light
TMThe penetrance T of/TE light
TEIn the present invention, " extinction ratio of penetrance " is to represent with " extinction ratio " speech simplifiedly.
In No. the 4289381st, United States Patent (USP), a kind of polarisation assembly with double-metal layer is disclosed, it is to use traditional lithography mode (photolithography) to make.Yet the polarisation assembly shown in this method is applicable to infrared spectrum (infrared spectrum, 2～100 μ m), and does not point out how to make the polarisation assembly to have the condition of High Extinction Ratio under visible spectrum.
In No. the 5748368th, United States Patent (USP), a kind of polarisation assembly with single metal layer is disclosed.This patent has pointed out to reach single-layer metal lines length breadth ratio, cycle and the shape of polarisation effect.Yet the extinction ratio of the polarisation assembly of this patent low (about 30: 1), and wave band (wavelength bands) is narrow, thereby be not suitable for the visible spectrum of wide waveband.
In No. the 6122103rd, United States Patent (USP), a kind of polarisation assembly with single metal layer that is applicable to visible spectrum is disclosed.This patent points out by changing the dielectric layer refractive index, and etching part substrate and form the polarisation scope that slit (slots) increases the polarisation assembly.
Disclose in early days in No. 2002/0122235 at United States Patent (USP), disclose a kind of polarisation assembly that utilizes dielectric layer and metal level interlaced (being referred to as intra-wires), in order to improve extinction ratio.Yet owing to need at least six layers dielectric layer and metal level interlaced, thus making and being not easy, and be difficult for practicability.
Disclose in early days in No. 2002/0191286 at United States Patent (USP), disclose a kind of surface and had the metal metaphosphate optical assembly that sine wave (sinewave) rises and falls.Yet the extinction ratio of the polarisation assembly of this mode changes very greatly, and for example the extinction ratio when the 550nm wavelength only has 20: 1.
Can only guarantee mostly that greater than 100 this can not meet the tool demand fully for the optical devices that need superelevation extinction ratio (greater than 1000) owing to be applied to the extinction ratio of the polarisation assembly of visible spectrum at present.And when to be applied to incident light be the optical devices of big incident angle (for example light emitting source is installed on the LCD of side), then known polarisation assembly also can't can both provide High Extinction Ratio under any incident angle.
Summary of the invention
In view of this, fundamental purpose of the present invention is for providing a kind of polarisation assembly and manufacture method thereof with High Extinction Ratio.
Another object of the present invention is for providing a kind of polarisation assembly and manufacture method thereof with double-metal layer grating that is applicable to visible spectrum.
According to above-mentioned purpose, the invention provides a kind of polarisation assembly with double-metal layer grating, comprising: a transparent substrates.Many parallel dielectric layers have one-period p and are formed on this transparent substrates, have a groove between many dielectric layers of wherein adjacent this.One the first metal layer has one first thickness d 1 and is formed in this groove.And one second metal level, have one second thickness d 2 and a width w and be formed on these many dielectric layers, wherein have a vertical range l between this first metal layer and this second metal level and do not link to each other mutually.Wherein, this period p is smaller or equal to 250nm, and this first thickness d 1 and this second thickness d 2 be all smaller or equal to 150nm, and this first thickness d 1 equals this second thickness d 2, and l is smaller or equal to 100nm for this vertical range, and the ratio of this period p of this width w/ is 25～75%.
The present invention also provides a kind of manufacture method with polarisation assembly of double-metal layer grating, comprises the following steps: to provide a transparent substrates.By micro image etching procedure (photolithography) or nano impression (Nanoimprint) processing procedure, form many parallel dielectric layers on this transparent substrates, these many dielectric layers have one-period p, have a groove between many wherein adjacent dielectric layers.Form a first metal layer in this groove, this first metal layer has one first thickness d 1.And forming one second metal level on these many dielectric layers, this second metal level has one second thickness d 2 and a width w, wherein has a vertical range l between this first metal layer and this second metal level and does not link to each other mutually.Wherein, this range of period p is 10～250nm, and the scope of this first and second thickness d 1, d2 is 30～150nm, and this first thickness d 1 equals this second thickness d 2, the scope of this vertical range l is 10～100nm, and the proportional range of this period p of this width w/ is 25～75%.
Thus, characteristics of the present invention are: the scope of the vertical range l that has between this first metal layer and this second metal level is 10～100nm, then resonance effects can be reduced, in visible region, have High Extinction Ratio (greater than 1000) and still have the usefulness of High Extinction Ratio at wide-angle incident light (0～80 °) thereby reach.
For the present invention above-mentioned and other purpose, feature and advantage can be become apparent, cited below particularlyly go out preferred embodiment, and conjunction with figs. is described in detail below.
Description of drawings
Fig. 1 is the schematic perspective view of traditional metal gate polaroid;
Fig. 2 is the section of structure of the polarisation assembly with double-metal layer grating of demonstration first embodiment of the invention;
Fig. 3 is the section of structure of the polarisation assembly with double-metal layer grating of second embodiment of the invention;
Fig. 4 A～Fig. 4 C is the processing procedure diagrammatic cross-section according to the polarisation assembly of first embodiment of the invention;
Fig. 5 A～Fig. 5 D is the processing procedure diagrammatic cross-section according to the polarisation assembly of second embodiment of the invention;
Fig. 6 A is the TE reflection of light rate R of the experimental example 1 according to the present invention
TEWith penetrance T
TEGraph of a relation with visible wavelength;
Fig. 6 B is the TM reflection of light rate R of the experimental example 1 according to the present invention
TMWith penetrance T
TMGraph of a relation with visible wavelength;
Fig. 7 A is the TE reflection of light rate R of the experimental example 3 according to the present invention
TEWith penetrance T
TEGraph of a relation with visible wavelength;
Fig. 7 B is the TM reflection of light rate R of the experimental example 3 according to the present invention
TMWith penetrance T
TMGraph of a relation with visible wavelength;
Fig. 8 A is the TE reflection of light rate R of the comparative example according to the present invention
TEWith penetrance T
TEGraph of a relation with visible wavelength;
Fig. 8 B is the TM reflection of light rate R of the comparative example according to the present invention
TMWith penetrance T
TMGraph of a relation with visible wavelength;
Fig. 9 A for polarisation assembly of the present invention when different cycles p extinction ratio and the relation of wavelength; And
Fig. 9 B be known polarisation assembly when different cycles p extinction ratio and the relation of wavelength.
Wherein, description of reference numerals is as follows:
100 traditional single metal layer grating polaroids; 110 conductor electrodes;
120 dielectric substrate; 130 incident lights;
132 light sources, 140 reflected light;
150 penetrate light; The cycle of P conductor electrode;
The width of W conductor electrode; The thickness of D conductor electrode.
200, the polarisation assembly of 300～this case; 210,310,410,510 transparent substrates;
220,320,420,520 dielectric layers; 320 ', 420 ' residual dielectric layer;
230,330,430,530 grooves; 240,340,440,540 the first metal layers;
250,350,450,550 second metal levels; 260,360 protective seams;
270,370 incident lights; 415,515 dielectric layers;
518 moulds; The cycle of p dielectric layer;
D1 the first metal layer thickness; D2 second metal layer thickness;
W second metal layer width;
Vertical range between the l the first metal layer and second metal level.
Embodiment
The design of polarisation assembly of the present invention is as follows:
At first see also Fig. 2 and Fig. 3, it shows the sectional view that the present invention has the polarisation assembly of double-metal layer grating respectively.
See also Fig. 2, it is for the polarisation assembly 200 with double-metal layer grating of first embodiment of the invention.This polarisation assembly 200 includes following formation.
One transparent substrates 210 of insulation, this transparent substrates 210 is made of glass or plastic material, and its thickness for example is 500～1500 μ m.(refractive index RI) for example is about 1.5 to the refractive index of this transparent substrates 210.Above-mentioned plastic material for example is polycarbonate (PC), polymethylmethacrylate (PMMA), polystyrene (PS) or the like.
Many parallel dielectric layers 220 have one-period p and are formed on this transparent substrates 210, wherein between these dielectric layers 220 are to isolate mutually by a groove 230.Wherein, this groove 230 exposes this transparent substrates 210.This dielectric layer 220 for example is that constituting in order to be used as by polymkeric substance (polymer) is polymethylmethacrylate (PMMA) layer of photoresistance (resist), certainly other suitable dielectric material also can use, and for example can adopt the crosslinked polymkeric substance of UV (UV-curable polymers) or sol-gel material (so-gel material) or the like.
One the first metal layer 240 has one first thickness d 1 and is formed on this transparent substrates 210 in this groove 230 of position.This first metal layer 240 can be gold, silver, copper or aluminium lamination.
One second metal level 250 has one second thickness d 2 and a width w and is formed on these many dielectric layers 220.Wherein have a vertical range l between this first metal layer 240 and this second metal level 250 and do not link to each other mutually.This second metal level 250 can be gold, silver, copper or aluminium lamination, and the material of this first metal layer 240 and this second metal level 250 can be identical or inequality.
In addition, this polarisation assembly 200 also can comprise a protective seam 260, is formed on this first and second metal 240,250, in order to avoid burning.This protective seam 260 is a SiO
2, SiN or SiON layer.In addition, can need, make this protective seam 260 cover whole polarisation assemblies 200 and be flatness layer (not shown) in order to be used as according to processing procedure.
Here the size design that will pay special attention to is, this period p is smaller or equal to 250nm, and its scope for example is 10～250nm.This first thickness d 1 and this second thickness d 2 are all smaller or equal to 150nm, and its scope for example is 30～150nm, and this first thickness d 1 equals this second thickness d 2.L is smaller or equal to 100nm for this vertical range, and its scope for example is 10～100nm.The ratio of this period p of this width w/ is 25～75%.
Symbol 270 expression incident lights (incident light) for example are that (wavelength 400～700nm) is injected this polarisation assembly 200 with incident angle θ to visible light.
Via the design size of the invention described above first embodiment, can make incident angle θ under 0～80 °, its extinctivity can reach more than 1000.Then, see also Fig. 3, it is the polarisation assembly 300 with double-metal layer grating of second embodiment of the invention.This polarisation assembly 300 includes following formation.
One transparent substrates 310, this transparent substrates 310 is made of glass or plastic material, and its thickness for example is 500～1500 μ m.The refractive index of this transparent substrates 310 (RI) for example is about 1.5.Above-mentioned plastic material for example is polycarbonate (PC), polymethylmethacrylate (PMMA), polystyrene (PS) or the like.
Many parallel dielectric layers 320 have one-period p and are formed on this transparent substrates 310, wherein have a groove 330 between these many dielectric layers 320.Wherein, these groove 330 bottoms have residual dielectric layer 320 ', and its thickness is denoted as t.This dielectric layer 320 and 320 ' for example is that what to be made of polymkeric substance is polymethylmethacrylate (PMMA) layer of photoresistance in order to be used as, certainly other suitable dielectric material also can use, and for example can adopt the crosslinked polymkeric substance of UV (UV-curable polymers) or sol-gel material (so-gel material) or the like.
One the first metal layer 340 has one first thickness d 1 and is formed on this residual dielectric layer 320 ' in this groove 330 of position.This first metal layer 340 can be gold, silver, copper or aluminium lamination.
One second metal level 350 has one second thickness d 2 and a width w and is formed on this dielectric layer 320.Wherein have a vertical range l between this first metal layer 340 and this second metal level 350 and do not link to each other mutually.This second metal level 350 can be gold, silver, copper or aluminium lamination, and the material of this first metal layer 340 and this second metal level 350 can be identical or inequality.
In addition, this polarisation assembly 300 can more comprise a protective seam 360, is formed on this first and second metal 340,350, in order to avoid burning.This protective seam 360 is a SiO
2, SiN or SiON layer.In addition, can need, make this protective seam 360 cover whole polarisation assemblies 300 and be flatness layer (not shown) in order to be used as according to processing procedure.
Here the size design that will pay special attention to is, this period p is smaller or equal to 250nm, and its scope for example is 10～250nm.This first thickness d 1 and this second thickness d 2 are all smaller or equal to 150nm, and its scope for example is 30～150nm, and this first thickness d 1 equals this second thickness d 2.L is smaller or equal to 100nm for this vertical range, and its scope for example is 10～100nm.The ratio of this period p of this width w/ is 25～75%.
Via the design size of foregoing invention second embodiment, can so that incident angle θ below 0～80 °, its extinctivity can reach more than 1000.
The method for making of polarisation assembly of the present invention is as follows:
See also Fig. 4 A～Fig. 4 C and Fig. 5 A～Fig. 5 D, it is respectively the example of the distinct methods of making the polarisation assembly 200 with double-metal layer grating of the present invention or 300, but is not in order to limit the present invention.
At first see also Fig. 4 A～Fig. 4 C, it is depicted as making the present invention and has the polarisation assembly 200 of double-metal layer grating or a method of 300.
See also Fig. 4 A, on transparent substrates 410, be coated with the dielectric layer 415 of one deck (for example being) at least in order to be used as the PMMA layer of photoresistance.
See also Fig. 4 B, use this dielectric layer 415 of micro image etching procedure (photolithography) patterning then and form many parallel dielectric layers 420, wherein have a groove 430 between these many dielectric layers 420 with one-period p.At this moment, following transparent substrates 410 can be exposed in these groove 430 bottoms, and also can be on these groove 430 bottoms residual have a remaining dielectric layer 420 ', and this remaining dielectric layer 420 ' can not produce harmful effect to the extinction ratio of polarisation assembly of the present invention.
See also Fig. 4 C, utilize the mode of vacuum evaporation (vacuum evaporation) or sputter (sputtering), side by side form the first metal layer 440 in the position in groove 430 and form second metal level 450 on these many dielectric layers 420, be noted that between the first metal layer 440 and second metal level 450 not link to each other mutually.Can form a protective seam (not shown) on these first and second metal levels 440,450 by chemical vapour deposition technique afterwards.
Then see also Fig. 5 A～Fig. 5 D, it is depicted as makes have the polarisation assembly 200 of double-metal layer grating or 300 other method of the present invention.
See also Fig. 5 A, on transparent substrates 510, be coated with the dielectric layer 515 of one deck (for example being) at least in order to be used as the PMMA layer of photoresistance.
See also Fig. 5 B, use nano impression (Nanoimprint) processing procedure then, with mould (mold) 518 with line image with pressure sintering (hot embossing) or UV casting (UV casting) with pattern transfer to this dielectric layer 515, break away from mould 518 afterwards and form many parallel dielectric layers 520 shown in Fig. 5 C with one-period p.Wherein has a groove 530 between this dielectric layer 520.At this moment, in these groove 530 bottoms remaining dielectric layer (not shown) may residually be arranged, this remaining dielectric layer (not shown) can not produce harmful effect to the extinction ratio of polarisation assembly of the present invention.Certainly, also can carry out reactive ion etching (RIE) program the more remaining dielectric layer (not shown) in the groove 530 is removed, and make these groove 530 bottoms expose following transparent substrates 510 and shown in Fig. 5 C.
See also Fig. 5 D, utilize the mode of vacuum evaporation or sputter, side by side form the first metal layer 540 in groove 530 and form second metal level 550 on this dielectric layer 520, be noted that between the first metal layer 540 and second metal level 550 not link to each other mutually.Can form a protective seam (not shown) on this first and second metal level 540,550 by chemical vapour deposition technique afterwards.
Below, the G that uses commercially available grating to resolve Development Co., Ltd (Grating Solver Development) manufacturing resolves diffraction grating analysis software (Gsolver Diffraction Grating Analysis Software) and analyzes penetrance T and the reflectivity R of polarisation assembly of the present invention under different experimental conditions, and then calculates the extinction ratio T that penetrates light
TM/ T
TE
Experimental example 1
See also Fig. 2 polarisation assembly 200 of the present invention, the wavelength of incident light 270 is 400～700nm (being visible spectrum), and metal level 240 and 250 is an aluminium, and dielectric layer 220 is PMMA, and substrate 210 is a glass.The size condition of its each layer is: substrate 210 thickness 1000 μ m, d1=d2=70nm, l=30nm, p=100nm, w=50nm and θ=0 °.TE reflection of light rate R with this understanding
TEWith penetrance T
TEWith the graph of a relation of visible wavelength then as shown in Figure 6A, and TM reflection of light rate R
TMWith penetrance T
TMWith the graph of a relation of visible wavelength then shown in Fig. 6 B.
Can find out the penetrance T of TM light by Fig. 6 A and Fig. 6 B
TMMajor part is all more than 70%, and the penetrance T of TE light
TE(the actual result about 10 who measures then is almost equal to zero
-4%).With 470nm, 550nm and 610nm are example as lambda1-wavelength, find the extinction ratio T of polarisation assembly of the present invention under visible spectrum via calculating
TM/ T
TEScope is about 6.75E4～2.07E5, so proof polarisation assembly of the present invention has quite high extinction ratio (greater than 1000), promptly the polarisation effect is splendid.
Experimental example 2
See also Fig. 2 polarisation assembly 200 of the present invention.Experiment condition is set at: the wavelength X of incident light 270 is 470nm, 550nm, 610nm, metal level 240 and 250 is an aluminium, dielectric layer 220 is PMMA, substrate 210 is a glass, substrate 210 thickness 1000 μ m, d1=d2=70nm, l=30nm, p=100nm, w=50nm and θ=0 °, 45 °, 80 °.Incident angle θ with this understanding and extinction ratio T
TM/ T
TEExperimental result as shown in table 1:
Table 1
When polarisation assembly of the present invention as shown in Table 1 is big incident angle (80 °) at incident light, still has quite high extinction ratio (greater than 1000).
Experimental example 3
See also Fig. 2 polarisation assembly 200 of the present invention, the wavelength of incident light 270 is 400～700nm (being visible spectrum), and metal level 240 and 250 is a gold, and dielectric layer 220 is PMMA, and substrate 210 is a glass.The size condition of its each layer is: substrate 210 thickness 1000 μ m, d1=d2=70nm, l=30nm, p=180nm, w=90nm and θ=0 °.TE reflection of light rate R with this understanding
TEWith penetrance T
TEWith the graph of a relation of visible wavelength then shown in Fig. 7 A, and TM reflection of light rate R
TMWith penetrance T
TMWith the graph of a relation of visible wavelength then shown in Fig. 7 B.
Can find out the penetrance T of TM light by Fig. 7 A and Fig. 7 B
TMMajor part is all more than 70%, and the penetrance T of TE light
TE(the actual result about 10 who measures then is almost equal to zero
-4%).With 470nm, 550nm and 610nm are example as lambda1-wavelength, find the extinction ratio T of polarisation assembly of the present invention under visible spectrum via calculating
TM/ T
TEScope is about 1E2～3.93E5, so proof polarisation assembly of the present invention has High Extinction Ratio.
Comparative example
See also Fig. 2 polarisation assembly 200 of the present invention, the wavelength of incident light 270 is 400～700nm (being visible spectrum), and metal level 240 and 250 is an aluminium, and dielectric layer 220 is PMMA, and substrate 210 is a glass.The size condition of its each layer is: substrate 210 thickness 1000 μ m, d1=d2=70nm, l=130nm, p=100nm, w=50nm and θ=0 °.TE reflection of light rate R with this understanding
TEWith penetrance T
TEWith the graph of a relation of visible wavelength then shown in Fig. 8 A, and TM reflection of light rate R
TMWith penetrance T
TMWith the graph of a relation of visible wavelength then shown in Fig. 8 B.
Can find out by Fig. 8 A and Fig. 8 B, when vertical range l is greater than 100nm between the first metal layer 240 and second metal level 250, the penetrance T of TM light
TMNearly all below 50%, and the penetrance T of TE light
TEResonance (resonance) phenomenon is then arranged at wavelength 450nm place, and make the extinction ratio T at 450nm place
TM/ T
TEOnly have 28.6, and can't meet the requirement of High Extinction Ratio.
Experimental example 5
See also the second embodiment of the present invention polarisation assembly 300 of Fig. 2 first embodiment of the present invention polarisation assembly 200 and Fig. 3.
Being same as the condition of experimental example 1, and the residual dielectric layer 320 ' of investigation second embodiment of the invention polarisation assembly 300 is to the influence of extinction ratio.Found that the thickness t of residual dielectric layer 320 ' does not almost have harmful effect to extinction ratio within 0～500nm scope the time, and to penetrance also almost not influence.That is to say that even the thickness t of residual dielectric layer 320 ' is 500nm, its extinction ratio is still greater than 1000.
Experimental example 6
See also the known polarisation assembly 100 and Fig. 2 polarisation assembly 200 with double-metal layer grating of the present invention of Fig. 1 with single metal layer grating.Experiment condition is set at: the wavelength X of incident light 130,270 is 400～700nm, metal level 110,240 and 250 is an aluminium, dielectric layer 220 is PMMA, substrate 120,210 is a glass, substrate 120,210 thickness 1000 μ m, D=d1=d2=70nm, l=30nm, W=w=50nm, p=100,130 and 180nm, P=100,130 and 180nm and θ=0 °.Lambda1-wavelength with this understanding and extinction ratio T
TM/ T
TEExperimental result shown in Fig. 9 A, Fig. 9 B.Fig. 9 A for polarisation assembly 200 of the present invention when different cycles p extinction ratio and the relation of wavelength.And Fig. 9 B be known polarisation assembly 100 when different cycles P extinction ratio and the relation of wavelength.
Can find out that by Fig. 9 A, Fig. 9 B under different cycles, the delustring of polarisation assembly of the present invention is still much larger than the extinction ratio of known polarisation assembly.
The invention provides a kind of polarisation assembly and manufacture method thereof with High Extinction Ratio, it is characterized in that: period p is smaller or equal to 250nm, and its scope is 10～250nm.This first thickness d 1 and this second thickness d 2 are all smaller or equal to 150nm, and its scope for example is 30～150nm, and this first thickness d 1 equals this second thickness d 2.L is smaller or equal to 100nm for this vertical range, and its scope for example is 10～100nm.The ratio of this period p of this width w/ is 25～75%.
Via the design size of the invention described above feature, can so that incident angle θ under 0～80 °, its extinctivity can reach more than 1000.
Though the present invention discloses as above with preferred embodiment; yet it is not in order to limit the present invention; for those of ordinary skill in the art; in not breaking away from design of the present invention and scope; can do various changes and modification, so protection scope of the present invention should be as the criterion with the scope that claims were defined.
Claims (22)
1. polarisation assembly with double-metal layer grating comprises:
One transparent substrates;
Many parallel dielectric layers have one-period (p) and are formed on the described transparent substrates, have a groove between wherein adjacent described many dielectric layers;
One the first metal layer has one first thickness (d1) and is formed in the described groove; And
One second metal level has one second thickness (d2) and a width (w) and is formed on described many dielectric layers, has a vertical range (1) between wherein said the first metal layer and described second metal level and does not link to each other mutually;
Wherein, (p) is smaller or equal to 250nm the described cycle;
Wherein, described first thickness (d1) and described second thickness (d2) are all smaller or equal to 150nm, and described first thickness (d1) equals described second thickness (d2);
Wherein, described vertical range (1) is smaller or equal to 100nm;
Wherein, the ratio in described width (w)/described cycle (p) is 25～75%.
2. the polarisation assembly with double-metal layer grating as claimed in claim 1 is characterized in that described channel bottom exposes described transparent substrates.
3. the polarisation assembly with double-metal layer grating as claimed in claim 1 is characterized in that described channel bottom has a residual dielectric layer.
4. the polarisation assembly with double-metal layer grating as claimed in claim 1 is characterized in that, the thickness of described transparent substrates is 500～1500 μ m.
5. the polarisation assembly with double-metal layer grating as claimed in claim 4 is characterized in that described transparent substrates is glass or plastic-substrates.
6. the polarisation assembly with double-metal layer grating as claimed in claim 1 is characterized in that described dielectric layer is a polymethyl methacrylate layers.
7. the polarisation assembly with double-metal layer grating as claimed in claim 1 is characterized in that described the first metal layer is gold, silver, copper or aluminium lamination.
8. the polarisation assembly with double-metal layer grating as claimed in claim 1 is characterized in that described second metal level is gold, silver, copper or aluminium lamination.
9. the polarisation assembly with double-metal layer grating as claimed in claim 1 is characterized in that described first and second metal level is same material.
10. the polarisation assembly with double-metal layer grating as claimed in claim 1 is characterized in that, also comprises:
One protective seam is formed on described first and second metal.
11. the polarisation assembly with double-metal layer grating as claimed in claim 10 is characterized in that described protective seam is a SiO
2, SiN or SiON layer.
12. the polarisation assembly with double-metal layer grating as claimed in claim 1 is characterized in that the scope in described cycle (p) is 10～250nm.
13. the polarisation assembly with double-metal layer grating as claimed in claim 1 is characterized in that, the scope of described first and second thickness (d1, d2) is 30～150nm.
14. the polarisation assembly with double-metal layer grating as claimed in claim 1 is characterized in that the scope of described vertical range (1) is 10～100nm.
15. the polarisation assembly with double-metal layer grating is applicable to visible spectrum, comprising:
One transparent substrates;
Many parallel dielectric layers have one-period (p) and are formed on the described transparent substrates, have a groove between the wherein adjacent described dielectric layer;
One the first metal layer has one first thickness (d1) and is formed in the described groove; And
One second metal level has one second thickness (d2) and a width (w) and is formed on described many dielectric layers, has a vertical range (1) between wherein said the first metal layer and described second metal level and does not link to each other mutually;
Wherein, the scope in described cycle (p) is 10～250nm;
Wherein, the scope of described first and second thickness (d1, d2) is 30～150nm, and described first thickness (d1) equals described second thickness (d2);
Wherein, the scope of described vertical range (1) is 10～100nm;
Wherein, the proportional range in described width (w)/described cycle (p) is 25～75%.
16. the polarisation assembly with double-metal layer grating as claimed in claim 15 is characterized in that described channel bottom exposes described transparent substrates.
17. the polarisation assembly with double-metal layer grating as claimed in claim 15 is characterized in that described channel bottom has a residual dielectric layer.
18. the manufacture method with polarisation assembly of double-metal layer grating comprises the following steps:
One transparent substrates is provided;
Form many parallel dielectric layers on described transparent substrates, described many dielectric layers have one-period (p), wherein have a groove between the adjacent dielectric layers;
Form a first metal layer in described groove, described the first metal layer has one first thickness (d1); And
Form one second metal level on described dielectric layer, described second metal level has one second thickness (d2) and a width (w), has a vertical range (1) between wherein said the first metal layer and described second metal level and does not link to each other mutually;
Wherein, the scope in described cycle (p) is 10～250nm;
Wherein, the scope of described first and second thickness (d1, d2) is 30～150nm, and described first thickness (d1) equals described second thickness (d2);
Wherein, the scope of described vertical range (1) is 10～100nm;
Wherein, the proportional range in described width (w)/described cycle (p) is 25～75%.
19. the manufacture method with polarisation assembly of double-metal layer grating as claimed in claim 18 is characterized in that described channel bottom exposes described transparent substrates.
20. the manufacture method with polarisation assembly of double-metal layer grating as claimed in claim 18 is characterized in that described channel bottom has a residual dielectric layer.
21. the manufacture method with polarisation assembly of double-metal layer grating as claimed in claim 18 is characterized in that, also comprises the following steps:
Form a protective seam on described first and second metal level.
22. the manufacture method with polarisation assembly of double-metal layer grating as claimed in claim 18 is characterized in that, described dielectric layer is to form by micro image etching procedure or nano impression processing procedure.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2003101204953A CN1316265C (en) | 2003-12-16 | 2003-12-16 | Polarized light assembly with double metallic layer grating and manufacturing method thereof |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2003101204953A CN1316265C (en) | 2003-12-16 | 2003-12-16 | Polarized light assembly with double metallic layer grating and manufacturing method thereof |
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| CN1629659A true CN1629659A (en) | 2005-06-22 |
| CN1316265C CN1316265C (en) | 2007-05-16 |
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| CNB2003101204953A Expired - Lifetime CN1316265C (en) | 2003-12-16 | 2003-12-16 | Polarized light assembly with double metallic layer grating and manufacturing method thereof |
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| CN (1) | CN1316265C (en) |
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Family Cites Families (4)
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|---|---|---|---|---|
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