CN1629601A - Laser test control device and method for pavement construction flatness - Google Patents
Laser test control device and method for pavement construction flatness Download PDFInfo
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Abstract
This invention relates to a laser test method for the flatness of road surface construction and devices. Said devices include a rotation laser source, a linear array image sensor and its related test and control unit. The method includes: a rotation laser beam forms horizontal primary light plane in space to be received by the linear array image sensor mounted on the test signpost. When machines walk on the road, the sensor gets the variations of the height corresponding to the level laser plane, the tilt angle of a spreader operation plate is controlled by the test unit and a spreader hopper cylinder controller to control the spreading thickness of asphalt and concrete spreaders and increase the quality of flatness and slope.
Description
Technical field
The present invention relates to a kind of observation and control technology of the flatness of pavement construction on a large scale, relate in particular to the laser observing and controlling apparatus and method that express highway pavement construction flatness is carried out continuous observing and controlling.
Background technology
The pavement construction flatness comprises the flatness and the gradient, is the important quality standard of highway pavement construction.Especially under the situation that at present highway develops rapidly, control the flatness of pavement construction well, the road surface of guaranteeing to construct after finishing has good driving condition, is a fundamental task crucial for generations to come, and is related to the adjustment of balance operation of whole national economy.At present, domestic aspect control pavement construction flatness, main piling extension steel wire and the rigidity aluminum strip cushion block method of adopting.The method that steel wire is hung in piling is that a stake is played every several meters at the construction field (site) highway both sides, in stake, pull on steel wire and make steel wire be in straightened condition, in construction, the sensor mark post on the paver is leaned against on the steel wire, as benchmark, thereby the control operating paver is to guarantee the flatness on road surface.The shortcoming of this method is, piling costs a lot of money in the road both sides, and in addition, the poor rigidity of steel wire is not easy to keep straight, thereby influences the construction quality on road surface.Rigidity aluminum strip cushion block method is that straight rigidity aluminum strip is placed at the construction field (site) highway both sides, adds a cushion block every 0.5 meter below the aluminum strip, and the workman adjusts the thickness of cushion block, thereby aluminum strip is horizontal by range estimation aluminum strip levelness.In construction, the sensor mark post on the paver is leaned against on the aluminum strip, the levelness of aluminum strip is passed to the control module of paver, thereby guarantee the flatness of paving concrete pavement by mark post.This method can keep flatness preferably in short distance, but then is difficult to keep in long distance.And rely on range estimation, and inefficiency, measuring accuracy is poor, is difficult to guarantee pavement quality.
Summary of the invention
The present invention is a kind of pavement construction flatness laser observing and controlling apparatus and method that effectively guarantee the pavement construction flatness in the noncontact mode that provide for the shortcoming that overcomes existing pavement construction flatness measure and control device, this method high efficiency, the measuring accuracy height, and can guarantee pavement quality.
The technical measures that the present invention taked are: a kind of pavement construction flatness laser measure and control device, comprise that mainly rotary laser source and linear array laser receive controller, linear array laser receives controller and comprises linear array image sensor and corresponding measure-controlling unit, the rotary laser source is arranged on the construction road or its roadside, the linear array image sensor is installed on the overcasting staff of paver, measure-controlling unit is arranged on the paver and with hopper of paver oil cylinder controller and links to each other, award the noncontact contact with the receipts of laser between rotary laser source and the linear array image sensor, the linear array image sensor links to each other with the measure-controlling unit electric signal.
Above-mentioned pavement construction flatness laser measure and control device, wherein, described rotary laser source is installed on the tripod support frame, comprises semiconductor laser light source, electric rotating machine, 45 ° of rotating prisms and levelness adjusting mechanism; Semiconductor laser light source is vertically mounted on the framework platform center, and the electric rotating machine main shaft is installed in the bottom surface of framework upper plate down, and 45 ° of rotating prisms are installed in the front-end of spindle of electric rotating machine, and the levelness adjusting mechanism is fixed on the framework platform.
Above-mentioned pavement construction flatness laser measure and control device, wherein, described levelness adjusting mechanism comprises X-axis obliquity sensor, Y-axis obliquity sensor, X-axis controller, Y-axis controller, X-axis motor and y-axis motor; X-axis obliquity sensor and Y-axis obliquity sensor are fixed on the vertical both sides of framework platform, the X-axis controller links to each other with X-axis obliquity sensor signal and is mounted on the side of X-axis obliquity sensor with the X-axis motor, and the Y-axis controller links to each other with Y-axis obliquity sensor signal and is mounted on the side of Y-axis obliquity sensor with y-axis motor.
Above-mentioned pavement construction flatness laser measure and control device, wherein, described measure-controlling unit comprises Weak-signal detector, signal preprocessor, microprocessor, widened pulse controller and keyboard display; Weak-signal detector is connected the signal output part of linear array image sensor; Signal preprocessor is connected the signal output part of Weak-signal detector, signal preprocessor and with the widened pulse controller, microprocessor is two-way is connected; The output terminal of widened pulse controller is connected with the input end of the oil cylinder controller of paver; Microprocessor also is connected with keyboard display is two-way.
Above-mentioned pavement construction flatness laser measure and control device, wherein, described linear array image sensor is made up of a plurality of photodiodes, forms microscler photoelectricity linear array.
Above-mentioned pavement construction flatness laser measure and control device, wherein, the photodiode that described linear array image sensor is 1mm by 1000 sensitive surfaces is formed, and forms the long photoelectricity linear array of 200mm, exports 200 road useful signals.
A kind of pavement construction flatness Laser Measuring control method is characterized in: may further comprise the steps:
A, a rotary laser source is set in the appropriate location in construction road or its roadside; On the construction paver, fix a vertical survey mark post; Suitable height installing linear array image sensor at overcasting staff; On the construction paver measure-controlling unit that links to each other and link to each other with hopper of paver oil cylinder controller with linear array image sensor signal is installed, this measure-controlling unit comprises Weak-signal detector, signal preprocessor, microprocessor, widened pulse controller and the keyboard display that electric signal links to each other;
A slewed laser beam is launched in b, rotary laser source, and the space around it forms a horizontal reference optical plane;
The linear array image sensor of c, measure-controlling unit successively detects the height and position information of rotary laser plane on sensor, measures pavement-height, signal is passed to the Weak-signal detector of measure-controlling unit;
Weak-signal detector in d, the measure-controlling unit receives the signal of linear array image sensor output, removes light undesired signals such as sight after filtration, detects useful laser signal, then many useful signals is sent into signal preprocessor;
E, signal preprocessor continuous several times, each multiple signals are given microprocessor with signal, judge that after microprocessor computing, processing laser plane is radiated at the position of linear array image sensor, measure pavement-height, to judge the thickness that current paver paves, revise the widened pulse width, send the adjustment signal to hopper of paver oil cylinder controller;
F, oil cylinder controller are controlled the action of oil cylinder to change the angle of inclination of paver running plate, control pavement asphalt or concrete paving thickness, the flatness and the gradient on assurance road surface after receiving and adjusting signal.
Above-mentioned pavement construction flatness Laser Measuring control method, wherein: the horizontal accuracy of the horizontal reference optical plane of the slewed laser beam that described rotary laser source is launched is 15 " in.
Above-mentioned pavement construction flatness Laser Measuring control method, wherein: the method that the described signal preprocessor of step e is given microprocessor is: continuous 25 times of signal preprocessor, each 8 tunnel is given microprocessor with signal.
Pavement construction flatness laser observing and controlling apparatus and method of the present invention adopt slewed laser beam to form the reference light plane in the space, and the overcasting staff that the linear array image sensor is housed is vertically fixed on pavement constructions such as asphalt paver, concrete paver mechanically.When construction machinery during at ground running, the linear array image sensor obtains the high variable quantity with respect to the horizontal laser light plane, angle of inclination by measure-controlling unit and hopper of paver oil cylinder controller control paver running plate, reach the paving thickness of control asphalt paver, concrete paver, can improve the flatness and the gradient quality on road surface on a large scale.Realize automated job simultaneously, improved work efficiency.In addition, use laser beam to have good rectilinearity and monochromaticity, not affected by environment, the optical plane flatness is fabulous; Its power consumption is extremely low, only needs number mw, just can set up reference light plane on a large scale; Available powered battery is convenient to field work; Anti-light interference is strong, is easy to detect etc.These have all constituted huge superiority of the present invention.
Description of drawings
Specific structural features of the present invention is further described by following embodiment and accompanying drawing thereof.
Fig. 1 is a pavement construction flatness laser measure and control device of the present invention view in use;
Fig. 2 is the basic structure in the rotary laser source in the pavement construction flatness laser measure and control device of the present invention and the generation principle schematic of horizontal laser beam;
Fig. 3 is the electrical block diagram that the linear array laser in the pavement construction flatness laser measure and control device of the present invention receives controller.
Embodiment
See also Fig. 1, Fig. 1 is a pavement construction flatness laser measure and control device of the present invention view in use.Pavement construction flatness laser measure and control device of the present invention comprises that mainly rotary laser source 1 and linear array laser receive controller 2, linear array laser receives controller and comprises linear array image sensor 21 and corresponding measure-controlling unit 22, rotary laser source 1 be arranged on the construction road or the gusseted framework 3 in its roadside on, linear array image sensor 22 is installed on the overcasting staff 4 of paver, measure-controlling unit 22 is arranged on the paver 5 and with hopper of paver oil cylinder controller and links to each other, award the noncontact contact with the receipts of laser between rotary laser source 1 and the linear array image sensor 21, linear array image sensor 21 links to each other with measure-controlling unit 22 electric signal.
See also Fig. 2, Fig. 2 is the basic structure and the lasing light emitter principle schematic in the rotary laser source in the pavement construction flatness laser measure and control device of the present invention.Rotary laser source 1 among the present invention is arranged on the tripod support frame 3.Comprise semiconductor laser light source 11,12,45 ° of rotating prisms 13 of electric rotating machine and levelness adjusting mechanism 14.The levelness adjusting mechanism comprises X-axis obliquity sensor 141, Y-axis obliquity sensor 142, X-axis controller 143, Y-axis controller 144, X-axis motor 145 and y-axis motor 146; Tripod support frame 3 comprises tripod (this figure is not shown, referring to Fig. 1), is movably connected in framework platform 31 and framework upper plate 32 parallel with framework platform and that fixedly connected with framework platform on the tripod.Semiconductor laser light source 11 is vertically mounted on framework platform 31 centers, electric rotating machine 12 main shafts are installed in the bottom surface of framework upper plate 32 down, 45 ° of rotating prisms 13 are installed in the front-end of spindle of electric rotating machine, X-axis obliquity sensor 141 and Y-axis obliquity sensor 142 are fixed on the vertical both sides of framework platform, X-axis controller 143 links to each other with X-axis obliquity sensor signal and is mounted on the side of X-axis obliquity sensor with X-axis motor 145, and Y-axis controller 144 links to each other with Y-axis obliquity sensor signal and is mounted on the side of Y-axis obliquity sensor with y-axis motor 146.In practicality, when framework platform was out-of-level, X-axis obliquity sensor and Y-axis obliquity sensor had an electric signal to send, respectively by the corresponding electric rotating machine rotation of coupled controller drives, make framework platform and framework upper plate recover horizontal level, precision is ± 15 " in.Therefore, can guarantee that the optical plane of the slewed laser beam formation that 45 ° of rotating prisms send is horizontal all the time, precision is ± 15 " in.
See also Fig. 3, Fig. 3 is the electrical block diagram that the linear array laser in the pavement construction flatness laser measure and control device of the present invention receives controller.Linear array laser of the present invention receives controller 2 and comprises linear array image sensor 21 and corresponding measure-controlling unit 22, and measure-controlling unit 22 mainly comprises Weak-signal detector 221, signal preprocessor 222, microprocessor 223, widened pulse controller 224, keyboard display 225 and corresponding power supply part.Linear array image sensor 21 is installed on the vertical survey mark post 4 of paver, and its laser incident end is towards rotary laser source 1, and measure-controlling unit 22 is installed on the paver.In the measure-controlling unit 22, Weak-signal detector 221 is connected the signal output part of linear array image sensor 21, and this Weak-signal detector 221 is made of operational amplifier in the present embodiment, and its model for example is LM339; Signal preprocessor 222 is connected the signal output part of Weak-signal detector 221, signal preprocessor 222 and with widened pulse controller 224,223 two-way connections of microprocessor, this signal preprocessor 222 is made of extensive Programmable Logic Device CPLD; Microprocessor 223 and with 225 two-way connections of keyboard display, to adopt models be 89LV55 to this microprocessor 223 in the present embodiment; The output terminal of widened pulse controller 224 is connected with the input end of the oil cylinder controller of paver 5, this widened pulse controller 224 is realized by the function in the microprocessor 223 in the present embodiment, at the oil cylinder controller of the PWM of this microprocessor 223 interface output widened pulse to paver 5.
Pavement construction flatness Laser Measuring control method of the present invention can be described as follows with reference to Fig. 1, Fig. 2, Fig. 3: the tripod support frame 3 that will install rotary laser source 1 in advance is fixed on a certain position in construction road or its roadside, on construction paver 5, fix a vertical survey mark post 4, install a linear array image sensor 21 at the suitable height of overcasting staff 4, on the construction paver, a measure-controlling unit 22 that links to each other and link to each other with hopper of paver oil cylinder controller with linear array image sensor 21 electric signal is installed.When the paver construction operation, the semiconductor laser light source Vertical Launch goes out beam of laser, impinges upon on the 45 degree rotating prisms, and electric rotating machine horizontally rotates with 600 rev/mins speed drive prism, produce a branch of laser beam that horizontally rotates in the space, the space around it forms a horizontal reference optical plane.Owing to be provided with the levelness adjusting mechanism on tripod support frame 3, the horizontal accuracy that can guarantee the horizontal reference optical plane is 15 " in.The linear array image sensor 21 that is installed on the overcasting staff successively detects the height and position information of rotary laser plane on sensor, the photodiode that the linear array image sensor is 1mm by 1000 resolution is formed, can form the long photoelectricity linear array of 200mm, export 200 road useful signals.The signal of output is through light undesired signals such as Weak-signal detector filtering daylight, detect useful laser signal, then 200 road useful signals are sent into signal preprocessor, continuous 25 times of signal preprocessor, each 8 road signals are given microprocessor with signal, microprocessor is through computing, handle the back and judge that laser plane is radiated at the position of linear array image sensor, measure pavement-height, to judge the thickness that present paver paves, revise the widened pulse width, send the adjustment signal to hopper of paver oil cylinder controller, the action of oil cylinder controller control oil cylinder is to change the angle of inclination of paver running plate, thereby control pavement asphalt or concrete paving thickness, the flatness and the gradient on assurance road surface.
Linear array image sensor among the present invention is made up of 1000 photodiodes, and its resolution is 1mm, and length overall is 200mm, as long as the rotary laser plane falls into photoelectricity linear array scope, can both demonstrate the residing height and position of optical plane.If light sensing processor is 100 meters apart from lasing light emitter, the lasing light emitter rotational speed is 600 rev/mins, is on the photodiode of 1mm at diameter then, and the width of light pulse is 0.16 μ s, so Weak-signal detector must can detect extremely narrow light signal.But under the sunshine, sun light intensity is enough to make the photovalve trend saturated by day.The present invention adopts photodiode reversal connection method, has solved the problem that strong daylight disturbs, and has improved the Testing of Feeble Signals ability.
Claims (9)
1, a kind of pavement construction flatness laser measure and control device, it is characterized in that: comprise that mainly rotary laser source and linear array laser receive controller, linear array laser receives controller and comprises linear array image sensor and corresponding measure-controlling unit, the rotary laser source is arranged on the construction road or its roadside, the linear array image sensor is installed on the overcasting staff of paver, measure-controlling unit is arranged on the paver and with hopper of paver oil cylinder controller and links to each other, award the noncontact contact with the receipts of laser between rotary laser source and the linear array image sensor, the linear array image sensor links to each other with the measure-controlling unit electric signal.
2, pavement construction flatness laser measure and control device according to claim 1, it is characterized in that: described rotary laser source is installed on the tripod support frame, comprises semiconductor laser light source, electric rotating machine, 45 ° of rotating prisms and levelness adjusting mechanism; Semiconductor laser light source is vertically mounted on the framework platform center, and the electric rotating machine main shaft is installed in the bottom surface of framework upper plate down, and 45 ° of rotating prisms are installed in the front-end of spindle of electric rotating machine, and the levelness adjusting mechanism is fixed on the framework platform.
3, pavement construction flatness laser measure and control device according to claim 1, it is characterized in that: described levelness adjusting mechanism comprises X-axis obliquity sensor, Y-axis obliquity sensor, X-axis controller, Y-axis controller, X-axis motor and y-axis motor; X-axis obliquity sensor and Y-axis obliquity sensor are fixed on the vertical both sides of framework platform, the X-axis controller links to each other with X-axis obliquity sensor signal and is mounted on the side of X-axis obliquity sensor with the X-axis motor, and the Y-axis controller links to each other with Y-axis obliquity sensor signal and is mounted on the side of Y-axis obliquity sensor with y-axis motor.
4, pavement construction flatness laser measure and control device according to claim 1, it is characterized in that: described measure-controlling unit comprises Weak-signal detector, signal preprocessor, microprocessor, widened pulse controller and keyboard display; Weak-signal detector is connected the signal output part of linear array image sensor; Signal preprocessor is connected the signal output part of Weak-signal detector, signal preprocessor and with the widened pulse controller, microprocessor is two-way is connected; The output terminal of widened pulse controller is connected with the input end of the oil cylinder controller of paver; Microprocessor also is connected with keyboard display is two-way.
5, pavement construction flatness laser measure and control device according to claim 1, it is characterized in that: described linear array image sensor is made up of a plurality of photodiodes, forms microscler photoelectricity linear array.
6, pavement construction flatness laser measure and control device according to claim 5, it is characterized in that: the photodiode that described linear array image sensor is 1mm by 1000 sensitive surfaces is formed, and forms the long photoelectricity linear array of 200mm, exports 200 road useful signals.
7, a kind of pavement construction flatness Laser Measuring control method is characterized in that: may further comprise the steps:
A, a rotary laser source is set in the appropriate location in construction road or its roadside; On the construction paver, fix a vertical survey mark post; Suitable height installing linear array image sensor at overcasting staff; On the construction paver measure-controlling unit that links to each other and link to each other with hopper of paver oil cylinder controller with linear array image sensor signal is installed, this measure-controlling unit comprises Weak-signal detector, signal preprocessor, microprocessor, widened pulse controller and the keyboard display that electric signal links to each other;
A slewed laser beam is launched in b, rotary laser source, and the space around it forms a horizontal reference optical plane;
The linear array image sensor of c, measure-controlling unit successively detects the height and position information of rotary laser plane on sensor, measures pavement-height, signal is passed to the Weak-signal detector of measure-controlling unit;
Weak-signal detector in d, the measure-controlling unit receives the signal of linear array image sensor output, removes light undesired signals such as daylight after filtration, detects useful laser signal, then many useful signals is sent into signal preprocessor;
E, signal preprocessor continuous several times, each multiple signals are given microprocessor with signal, judge that after microprocessor computing, processing laser plane is radiated at the position of linear array image sensor, measure pavement-height, to judge the thickness that current paver paves, revise the widened pulse width, send the adjustment signal to hopper of paver oil cylinder controller;
F, oil cylinder controller are controlled the action of oil cylinder to change the angle of inclination of paver running plate, control pavement asphalt or concrete paving thickness, the flatness and the gradient on assurance road surface after receiving and adjusting signal.
8, pavement construction flatness Laser Measuring control method according to claim 7, it is characterized in that: the horizontal accuracy of the horizontal reference optical plane of the slewed laser beam that described rotary laser source is launched is in 15 °.
9, pavement construction flatness Laser Measuring control method according to claim 7, it is characterized in that: the method that the described signal preprocessor of step e is given microprocessor is: continuous 25 times of signal preprocessor, each 8 tunnel is given microprocessor with signal.
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| CNB2003101093950A CN100389301C (en) | 2003-12-15 | 2003-12-15 | Laser test control device and method for pavement construction flatness |
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| CNB2003101093950A CN100389301C (en) | 2003-12-15 | 2003-12-15 | Laser test control device and method for pavement construction flatness |
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| CN101788277A (en) * | 2010-03-08 | 2010-07-28 | 上海交通大学 | Measuring device for planeness of revolving platform |
| CN102535482A (en) * | 2012-03-22 | 2012-07-04 | 中冶建工集团有限公司 | Cubic meter of earth and stone leveling method |
| CN102852080A (en) * | 2012-10-12 | 2013-01-02 | 中联重科股份有限公司 | Method, device and system for controlling operation of paver and paver |
| CN106500603A (en) * | 2016-10-27 | 2017-03-15 | 中国冶集团有限公司 | A kind of slidingtype infrared ray absolute altitude control and measure device and measuring method |
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| TWI588444B (en) * | 2015-10-08 | 2017-06-21 | 國立勤益科技大學 | Pavement detecting method, pavement detecting device and pavement detecting system |
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| CN109468929A (en) * | 2018-12-25 | 2019-03-15 | 河南城建学院 | Flatness detection trolley based on CPLD |
| CN109610271A (en) * | 2018-12-07 | 2019-04-12 | 中联重科股份有限公司 | Method and device for controlling paving thickness, paver and machine-readable storage medium |
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| CN2429552Y (en) * | 2000-06-07 | 2001-05-09 | 张金春 | Laser controller for adjusting hight for paving apparatus |
| US6558073B1 (en) * | 2001-11-02 | 2003-05-06 | Joseph D. Wrazidlo | Portable, oscillating grade determinant apparatus incorporating laser signal receiver |
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| CN101788277A (en) * | 2010-03-08 | 2010-07-28 | 上海交通大学 | Measuring device for planeness of revolving platform |
| CN102535482A (en) * | 2012-03-22 | 2012-07-04 | 中冶建工集团有限公司 | Cubic meter of earth and stone leveling method |
| CN102852080A (en) * | 2012-10-12 | 2013-01-02 | 中联重科股份有限公司 | Method, device and system for controlling operation of paver and paver |
| CN102852080B (en) * | 2012-10-12 | 2015-06-03 | 中联重科股份有限公司 | Method, device and system for controlling operation of paver and paver |
| TWI588444B (en) * | 2015-10-08 | 2017-06-21 | 國立勤益科技大學 | Pavement detecting method, pavement detecting device and pavement detecting system |
| CN106500603A (en) * | 2016-10-27 | 2017-03-15 | 中国冶集团有限公司 | A kind of slidingtype infrared ray absolute altitude control and measure device and measuring method |
| CN106767472A (en) * | 2016-12-25 | 2017-05-31 | 重庆市永川区益锐机械有限责任公司 | Worm screw range unit |
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| CN106918337A (en) * | 2017-03-12 | 2017-07-04 | 中铁四局集团有限公司 | Paving three-dimensional positioning device suitable for F2 track and control method thereof |
| CN106918337B (en) * | 2017-03-12 | 2024-02-09 | 中铁四局集团有限公司 | Paving three-dimensional positioning device suitable for F2 race track and control method thereof |
| CN107121129B (en) * | 2017-06-09 | 2023-09-29 | 中国新兴建筑工程有限责任公司 | Rotary light beam laser slope ratio monitor |
| CN107121129A (en) * | 2017-06-09 | 2017-09-01 | 中国新兴建筑工程总公司 | Compare monitor in a kind of rotary light beam laser slope |
| CN107329486A (en) * | 2017-08-11 | 2017-11-07 | 深圳班翟机器人有限公司 | Terrestrial positioning regulation device and method |
| CN107419643A (en) * | 2017-08-31 | 2017-12-01 | 合肥益企学科技有限公司 | A kind of pitch spreads out and puts on the leveling unit of machine |
| CN109610271A (en) * | 2018-12-07 | 2019-04-12 | 中联重科股份有限公司 | Method and device for controlling paving thickness, paver and machine-readable storage medium |
| CN109468929A (en) * | 2018-12-25 | 2019-03-15 | 河南城建学院 | Flatness detection trolley based on CPLD |
| CN110453578A (en) * | 2019-07-08 | 2019-11-15 | 南京宁政工程咨询有限公司 | A kind of urban road detection robot system |
| CN110596904A (en) * | 2019-09-27 | 2019-12-20 | 浙江大学 | Laser plane generating device based on micro-cylindrical lens array |
| CN110596904B (en) * | 2019-09-27 | 2021-05-18 | 浙江大学 | Laser plane generating device based on micro-cylindrical lens array |
| CN111364334A (en) * | 2019-12-19 | 2020-07-03 | 长沙理工大学 | Pavement neatness detection device for paving construction |
| CN111322968A (en) * | 2020-03-30 | 2020-06-23 | 中建八局第二建设有限公司 | Novel ground flatness detects device |
| CN112743447A (en) * | 2020-12-31 | 2021-05-04 | 泉芯集成电路制造(济南)有限公司 | Rotating shaft angle confirming mechanism and silicon wafer grinding device |
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| CN100389301C (en) | 2008-05-21 |
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