CN1609550A - Apparatus for measuring convex shape and method thereof - Google Patents
Apparatus for measuring convex shape and method thereof Download PDFInfo
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- CN1609550A CN1609550A CNA2004100807924A CN200410080792A CN1609550A CN 1609550 A CN1609550 A CN 1609550A CN A2004100807924 A CNA2004100807924 A CN A2004100807924A CN 200410080792 A CN200410080792 A CN 200410080792A CN 1609550 A CN1609550 A CN 1609550A
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- convex shape
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
- G01B11/0608—Height gauges
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- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
- G06T7/00—Image analysis
- G06T7/0002—Inspection of images, e.g. flaw detection
- G06T7/0004—Industrial image inspection
- G06T7/0006—Industrial image inspection using a design-rule based approach
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/46—Manufacturing multilayer circuits
- H05K3/4611—Manufacturing multilayer circuits by laminating two or more circuit boards
- H05K3/4614—Manufacturing multilayer circuits by laminating two or more circuit boards the electrical connections between the circuit boards being made during lamination
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/46—Manufacturing multilayer circuits
- H05K3/4644—Manufacturing multilayer circuits by building the multilayer layer by layer, i.e. build-up multilayer circuits
- H05K3/4647—Manufacturing multilayer circuits by building the multilayer layer by layer, i.e. build-up multilayer circuits by applying an insulating layer around previously made via studs
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
- G06T2207/00—Indexing scheme for image analysis or image enhancement
- G06T2207/30—Subject of image; Context of image processing
- G06T2207/30108—Industrial image inspection
- G06T2207/30152—Solder
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/03—Conductive materials
- H05K2201/0332—Structure of the conductor
- H05K2201/0364—Conductor shape
- H05K2201/0367—Metallic bump or raised conductor not used as solder bump
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
- H05K2203/16—Inspection; Monitoring; Aligning
- H05K2203/163—Monitoring a manufacturing process
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/40—Forming printed elements for providing electric connections to or between printed circuits
- H05K3/4007—Surface contacts, e.g. bumps
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Quality & Reliability (AREA)
- Computer Vision & Pattern Recognition (AREA)
- Theoretical Computer Science (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Electric Connection Of Electric Components To Printed Circuits (AREA)
Abstract
The present invention provides a bump shape measuring apparatus comprising an illumination optical system which illuminates bumps arranged on a board with illumination light of a low tilt angle to a surface of the board; a detection optical system where reflected light from the bumps is condensed for detection of image signals of the bumps by a high tilt angle to the surface of the board; an image processing unit where an outline of the tip and the base of each of the bumps is calculated based on the image signals of each of the bumps, and geometric characteristics including at least a position and height of each of the bumps are calculated based on the outline of the tip and the base of each of the bumps; and a main control unit where information on the calculated geometric characteristics of the bumps is displayed on a display unit.
Description
Technical field
The present invention, for example, relate to measurement when making multilayer printed board and when semiconductor devices is installed on substrate the apparatus for measuring convex shape and the method thereof of formed convex shape, moreover, also relate to the manufacture method of the multilayer printed board that has comprised the convex shape management.
Background technology
In the manufacturing of in recent years printed base plate, in order to realize the high precision int densification, miniaturization multiple stratification technology is being striden along.Interlayer at multilayer printed board connects, and the hole is set in the coupling part, also realizes that with electroplating the mode of conducting once was a main flow with drill bit or laser etc.But, in recent years, be accompanied by above-mentioned densification and cost degradation, constantly adopting the connected mode of using projection.
On the other hand, as with video camera its whether good technical being judged by Flame Image Process in the projected electrode of formed overshooting shape in semiconductor element etc. the back of making a video recording, known has: open the technology of being recorded and narrated in the 4th page of flat 11-26534 communique, the 4th figure (prior art 1) and robotization Vol.46 No.4 (2001.4), the 16th page-17 pages, the 4th, 5 figure (prior art 2) the spy.
In prior art 1, recorded and narrated: the light that will be advanced by the main surface parallel with circuit block maybe will have the illumination light that the light with the main surface parallel composition forms and project projected electrode, allow and incide camera head to reflected light with the above-mentioned interarea vertical direction of above-mentioned illumination light, relatively, judge according to the degree of unanimity whether projected electrode is good by the resulting inspection image data of this camera head and the benchmark image data of in memory storage, being stored in advance.
In prior art 2,, recorded and narrated: will shine projection from the illumination of tilted direction, and detect the method for the length of this shadow as method by the image measurement height of projection.
In order to make multilayer printed board, adopted in the occasion of protruding connected mode in use, in order to ensure high qualification rate, the printed base plate of lower floor form projection process after, will be at once whether confirm on whole of substrate by the shape that has manufactured and designed protruding position and height or base diameter etc. with apparatus for measuring convex shape, as its result, pressurize the conducting that relies on projection when being connected at printed base plate, need elimination to cause the possibility of poor flow the printed base plate of lower floor and upper strata.
On the other hand, adopted the product of this multilayer printed board, for example, majority is the product that requires small-sized high-density installation such as mobile phone or digital camera etc., and in order to reduce the cost of printed base plate itself by the cheap of product, so it also is inexpensive requiring apparatus for measuring convex shape, and can measure accurately the high reliability of printed base plate quickly and accurately.
But, in above-mentioned prior art 1,2, do not take into full account these requirements.
Summary of the invention
The present invention provides: become simple in structure and can be rapidly and be measured as apparatus for measuring convex shape and the method thereof that conducting positively connects the parameter of required projection accurately.
In addition, the present invention provides: can point out in protruding manufacturing installation apparatus for measuring convex shape and method thereof for the required relevant protruding data of creating conditions.
In addition, a further object of the present invention is to provide: can be with the high reliability of no poor flow and with high qualification rate and can improve the manufacture method of the multilayer printed board of the multilayer printed board that output manufacturing adopted protruding connected mode.
That is, in the present invention, be equipped with following part and constituted apparatus for measuring convex shape, be equipped with:
Mounting has disposed as the substrate of a plurality of projectioies of measured object and the objective table that moves it;
To the projection that disposed on by the aforesaid substrate that this objective table moved, use the lamp optical system that the lighting optical axis illumination illumination light of low dip angle is arranged for the mask of aforesaid substrate;
Detect the detection optical system of the picture signal of projection for the reflected light of the face of the aforesaid substrate projection that this lamp optical system throws light on of using the detection optical axis optically focused at high angle of inclination, the angle of inclination lower to use by oneself than above-mentioned illumination light;
To carry out the A/D conversion by the picture signal of the projection that this detection optical system detected, according to point at least and the picture signal of bottom, the point at least that calculates projection and the profile of bottom, according to the profile of the point at least of the projection that is calculated and bottom, calculate image processing part by the position at least of projection and the geometric characteristic quantity highly formed according to the resulting projection of protruding data image signal of this A/D conversion; With
Information by the geometric characteristic quantity of the relevant projection that this image processing part calculated is presented at master control part on the display device.
In addition, in the present invention, be equipped with following part and constituted apparatus for measuring convex shape, be equipped with:
Mounting has disposed as the substrate of a plurality of projectioies of measured object and the objective table that moves it;
To the projection that disposed on by the aforesaid substrate that this objective table moved, use the lamp optical system that the lighting optical axis illumination illumination light of low dip angle is arranged for the mask of aforesaid substrate;
Use the detection optical system that detects the picture signal of projection for the reflected light of the face of the aforesaid substrate projection that this lamp optical system throws light on of using the detection optical axis optically focused at high angle of inclination, the angle of inclination lower to use by oneself than above-mentioned illumination light;
To carry out the A/D conversion by the picture signal of the projection that this detection optical system detected, according to point at least and the picture signal of bottom, the point at least that calculates projection and the profile of bottom, according to the profile of the point at least of the projection that is calculated and bottom, calculate by the position at least of projection and the geometric characteristic quantity of highly forming, judge whether preferable image handling part of projection according to the geometric characteristic quantity of this projection that this calculated according to the resulting projection of protruding data image signal of this A/D conversion; With
Whether the projection that output is judged by this image processing part the master control part of good information.
In addition, in the present invention, have following engineering and constituted the manufacture method of multilayer printed board, have:
On lower floor's printed base plate, form the protruding manufacturing engineering of projection;
Judge protruding whether good measuring convex shape engineering to carry out optical measurement by the position at least of the formed projection of this projection manufacturing engineering and the geometric characteristic quantity highly formed;
On the printed base plate of the lower floor that has formed the good projection of being judged by the measuring convex shape engineering, make the outstanding interlayer dielectric that forms interlayer dielectric of point of projection form engineering; With
Load onto pressurization behind the printed base plate on upper strata by aligned position on by the point that forms the projection that the formed interlayer dielectric of engineering given prominence to this interlayer dielectric, interlayer dielectric be clipped between the printed base plate on the printed base plate of lower floor and upper strata, carry out the pressurization engineering that conducting connects by above-mentioned projection.
According to the present invention, receive such effect: can make simple in structure, be measured as the parameter that certain conducting connects required projection rapidly and accurately.
In addition, according to the present invention, can realize to point out in protruding manufacturing installation apparatus for measuring convex shape for the required relevant protruding data of creating conditions.
According to the present invention, receive such effect: feed back to protruding manufacturing installation successively by height profile and offset with measured projection, can be with the high reliability of no poor flow and with high qualification rate and can improve the multilayer printed board that output manufacturing has been adopted protruding connected mode.
Above-mentioned these and other purpose of the present invention and feature, advantage can be clearer the explanation of more detailed examples of implementation below shown in the drawings.
Description of drawings
Fig. 1, be to use the protruding method of attachment that the present invention relates to the multilayer printed board manufacturing engineering one
The key diagram of embodiment.
Fig. 2 is the pie graph of the 1st embodiment of the apparatus for measuring convex shape that the present invention relates to of expression.
Fig. 3 is by the picture signal that detection optical system detected shown in Figure 2 with at the key diagram of the Flame Image Process of image processing part.
Fig. 4 (a), it is the distribution plan of representing the geometric features amount of projection with color, deep or light, shape etc., Fig. 4 (b), it is the distribution plan of representing the geometric features amount of projection with tri-vector, Fig. 4 (c), be that expression will have been made the histogrammic figure of curve at the frequency (number) of the projection of geometric features amount, Fig. 4 (d) is the figure that expresses after additional boost line on the picture signal of detected projection.Fig. 4 (e) represents the detected image of bad projection, and Fig. 4 (f) is the timeliness variation diagram of the geometric features amount of expression projection.
Fig. 5 is the apparatus for measuring convex shape that will the present invention relates to key diagram when being applicable to protruding manufacturing installation and CAD system.
Fig. 6 is an oblique view of representing 2nd embodiment different with the 1st embodiment of detection optical system shown in Figure 2.
Fig. 7 is the planimetric map of the 2nd embodiment of detection optical system shown in Figure 6.
Fig. 8 is the oblique view of expression 3rd embodiment different with the 1st and the 2nd embodiment of lamp optical system.
Fig. 9 is the planimetric map of the 3rd embodiment of lamp optical system shown in Figure 8.
Figure 10 is a front view (FV) of representing 2nd embodiment different with the 1st embodiment of detection optical system shown in Figure 2.
Figure 11 (a), it is the constitutional diagram that expression is made a video recording protruding in focus point the 1st linear imaging sensor with detection optical system shown in Figure 10, Figure 11 (b) is the constitutional diagram that expression is made a video recording protruding in focus base portion the 2nd linear imaging sensor with detection optical system shown in Figure 10.
Figure 12 is the front view (FV) of expression 3rd embodiment different with the 1st and the 2nd embodiment of detection optical system.
Figure 13 is the constitutional diagram that base portion the 2nd linear imaging sensor that expression is made a video recording protruding in focus point the 1st linear imaging sensor with detection optical system shown in Figure 12, projection in focus is made a video recording.
Figure 14 is the pie graph of the 2nd embodiment of the apparatus for measuring convex shape that the present invention relates to of expression.
Figure 15 is the key diagram that the measuring convex shape that carries out with apparatus for measuring convex shape shown in Figure 14 and hole shape are measured.
Figure 16 is the key diagram of manufacture process that becomes the multilayer printed board of the measured object of measuring with apparatus for measuring convex shape shown in Figure 14.
Embodiment
Below, with accompanying drawing embodiments of the invention are described.
In printed base plate was in recent years made, in order to realize the high precision int densification, miniaturization multiple stratification technology was being striden along.Particularly in the printed base plate field that notebook computer, PDA, mobile phone are used, with the high packing density of parts in, the densification miniaturization is being carried out in being connected also between the wiring on the substrate and substrate layer.
So, be accompanied by such densification and cost degradation, in the constant connected mode that is suitable for use projection shown in Figure 1.At first, shown in Fig. 1 (a), on the point of the substrate that is connected to the upper strata on the printed base plate 170 of the lower floor that forms wiring, forming the height with copper or silver etc. is the projection 171 of the simulation cone shape of 200 μ m.Certainly, on the printed base plate 170 of lower floor,, form the pedestal that connects by wiring in the position that forms projection 171.This projection 171 by with solvent the particle of copper or silver etc. being made pasty state, waits the paste of printed silver or copper etc. with screen painting, and its drying is formed.In addition, also the paste of silver or copper etc. can be applied on the printed base plate 170 of lower floor, make its dry back with forming by etching after the optical processing.
In this stage, for accomplish projection 171 can be positively be connected with printed base plate 173 conductings on the printed base plate 170 of lower floor and upper strata and adjacent between not short circuit, that is, in order to eliminate the possibility that causes poor flow, the projection 171 of simulation cone shape is height, the diameter of base portion and the position of XY direction etc. at least, must be in desirable scope.Therefore, in the measuring convex shape engineering 100 shown in Fig. 1 (b), at least whether height, the diameter of base portion and the position of XY direction etc. are manufactured according to design in whole of substrate in order to confirm projection 171, to measure with the apparatus for measuring convex shape that the present invention relates to, all projectioies are the printed base plates 170 of the lower floor of good OK, are fed to next engineering.On the other hand, there is the printed base plate 170 of lower floor of the NG of bad projection, discards or bad projection is revised, simultaneously, be fed back to creating conditions or design and to make the projection of manufacturing thereafter be modified into certified products of screen painting etc.
In next engineering, as Fig. 1 (c,) shown in, for example interlayer dielectrics such as polyimide film 172 are coated with or make on the lamellar printed base plate 170 that is contained in by qualified projection 171 formed lower floors, come perforate to obtain the point of projection by paying plus-pressure from the outstanding a little state of interlayer dielectric 172 in the occasion of lamellar interlayer dielectric 172.At this moment, the thickness of interlayer dielectric 172, decision makes the point of projection outstanding a little from interlayer dielectric 172.In the occasion of coating interlayer dielectric 172, need remove the resin molding that carries out etching etc. and adhere at the point of projection.
Then, shown in Fig. 1 (d), be used for connecting the upper strata printed base plate 173 of the pedestal of distribution and projection 171 in formation, and the printed base plate 170 of lower floor between be installed on the point of projection after being positioned in the XY direction.
Then, shown in Fig. 1 (e), align, pressurize with the printed base plate 170 of lower floor by the printed base plate 173 with the upper strata, compression lobes realizes being connected with the conducting of the printed base plate 173 on upper strata.Thus, can realize that by the good projection of being inserted in the interlayer dielectric 172 between the printed base plate 173 on the printed base plate 170 of lower floor and upper strata conductor connects.
Then, by repeating the engineering shown in Fig. 1 (a)～Fig. 1 (e), just can make by the multilayer printed board of miniaturization multiple stratification with high qualification rate.
In the method for attachment that relies on such projection, compare with relying on traditional being connected of hole processing plating, can expect to realize the miniaturization cost degradation.
Below, describe with regard to the embodiment of its engineering 100 employed apparatus for measuring convex shape that the present invention relates in measuring convex shape.
Fig. 2 is the pie graph of the 1st embodiment of the apparatus for measuring convex shape that the present invention relates to of expression.
Be formed the printed base plate (substrate) 1 of a plurality of projectioies 171 as measured object, be adsorbed and carry in 3 directions of XYZ movably on the objective table 2.Objective table 2 adsorbs in this wise and keeps printed base plate 1, in order that eliminate the warpage of printed base plate 1.Owing to eliminate warpage like this, and the height of projection 171 approximately is about 200 μ m, so, the automatic focusing control system at the collector lens 6 on the surface of printed base plate 1 also can be set.Certainly, by automatic focusing control system is set, even the variation in thickness of printed base plate 1 also can be made the image imaging of identical projection by collector lens 6 on the image detection video camera.Moreover for example the white light that penetrates from light sources such as Halogen lamp LED 3 via optical fiber 5, incides illuminating lens system 4.As lamp optical system, be to constitute by light source 3, optical fiber 5 and illuminating lens system 4.
Forming the wiring diagram of copper etc. on printed base plate 1, is occasions of silver projection as projection 171, in order to obtain than the protruding 171 backgrounds image of high-contrast more, as the illumination light wavelength following short wavelength of 570nm (green) preferably.Certainly, also can be the above-mentioned white light that includes many above-mentioned wavelength components in this wise.Generally speaking, just can be as illumination light for the clear projection that manifests of background by the light that utilizes the following wavelength of white light or 570nm (green).Illuminating lens system 4 is as shown in the enlarged drawing 220 of Fig. 3, by becoming for example cylindrical lens of faciola shape light beam (slit-shaped light beam) 231 to constitute for 1 of printed base plate at vertical direction optically focused.And illuminating lens system 4 is the following low angle irradiation irradiates lights 14 of 30 degree for printed base plate 1 with α.Yet,,, can cause influence to adjacent protrusion if light angle (the illumination chief ray is facing to the angle of lighting optical axis) α was made low angle because projection 171 is configured on the printed base plate 1 to high-density.By shining irradiates light 14 with the following low angle α of 30 degree in this wise, owing to comprise that pedestal is not incided collector lens 6 in the major part of the reflection on the surface of printed base plate 1 for normal reflection and detected darkly as a setting, owing to be bordering on normal reflection light and incided collector lens 6 so detected brightly in the major part of the light at random on protruding 171 surfaces.Because strong,, can only clearly manifest projection 171 so just uprise with the contrast of the printed base plate 1 that becomes background from the reflection intensity at random on projection 171 surface.
The major part of the reflection light at random on the surface of the projection 171 that next free illumination light 14 is thrown light on incides collector lens 6, like this, just can make a video recording with the image of 7 pairs of projectioies that on the background of dark, clearly manifest brightly 171 of image detection video camera of for example forming by ccd linear sensor.Image detection video camera 7 for the image that comprises more protruding 171 elevation information is made a video recording, makes detection inclined light shaft angle beta with respect to projection 171, for example detects the image of projection 171 with the β=angle of 30～50 degree.Detect 6 the optical axis of optical axis corresponding to collector lens.In addition, image detection video camera 7, it for example is ccd linear sensor, by objective table control part 12 and master control part 13, the scan-synchronized of the objective table of representing as camera watch region that recorded and narrated, ccd linear sensor (shooting visual field) in the enlarged drawing 220 of Fig. 3 241 and arrow 2 moves, comes 201 picture signal of detected image surveyed area continuously.At this moment, objective table control part 12, input is used in the displacement of the measured XYZ of the set displacement meter of XYZ objective table 2, so, the displacement of XYZ objective table is provided for master control part 13.Then, be fed to image processing part 9 by image detection video camera 7 detected picture signals 8.
Image processing part 9, by constituting with the lower part:
Detected picture signal 8 is carried out the A/D transformation component 9 of A/D conversion; Store deep or light value (deep or light grade point) picture signal F (x, y) 202 the video memory 92 of this A/D conversion; The deep or light value picture signal F (x that is stored from this video memory 92, y) 202, cut out the deep or light value signal [P1 (i of each projection according to the arrangement design data of projection, j)～Pn (i, j)] (image in zone that from detected image, only comprises projection) 204 cut out circuit 93; According to cutting out circuit 93 by this at deep or light value signal [P1 (i that each projection cut out, j)～Pn (i, j)] 204 height that calculate projection, bottom (base portion) diameter, its center etc. geometry data, the geometry data and the determinating reference of this projection that calculates compared carry out whether good judgement, also whether good the geometry data of the above-mentioned projection of calculating and result of determination etc. are exported to the master image handling part 94 of master control part 13.
View data preservation portion 11 will be about (i j) cuts out and long preservation from the deep or light value picture signal Pk of the resulting bad at least projection of master control part 13 by cutting out circuit 93 by video memory 92.Therefore, master control part 13 can be according to user's requirement will (i j) be shown on the display device 20 once more about the deep or light value picture signal Pk of bad projection.In addition, master control part 13 can (i j) offers protruding manufacturing installation 111 with the deep or light value picture signal Pk about the bad at least projection of being preserved in view data preservation portion 11.
Moreover, cut out circuit 93, not necessarily formed all protruding devices on printed base plate are all cut out, can cut out the projection that is used as representative and get final product.The projection of representative for example, shown in Fig. 4 (a), obtains by utilizing measured in the past result shown on the display device 20 to specify.In addition, the projection of representative also can be specified as measuring secret formula according to creating conditions.
In addition, display device 20 shows various measurement results and measures secret formula, measuring condition etc.
Input media 21, the measurement secret formula of the relevant measured object of input (as shown in Figure 5, for example, relevant resulting from CAD system 110, the projection that comprises the design data of printed base plate 1 of kind of printed base plate 1 and the design data 116 (for example the printing mode of screen painting is pairing) of on the printed base plate of kind that also comprises projection, being arranged and obtained from protruding manufacturing installation 111 create conditions 115), measuring condition (for example, judge the determinating reference that projection is whether good or the appointment of good projection and bad projection), and show or the demonstration of output measurement result or the selection instruction of the way of output.
Output unit 22 also comprises network that feeds back to protruding manufacturing installation 111 that Fig. 5 represents and CAD system 110 etc. etc.
The flow process of the processing of the measuring convex shape that the present invention relates to then, is described with Fig. 3.Originally, master control part 13 according to the convex configuration data of the printed base plate of being imported with input media 21, but is set image detection zone 201 so that efficient detection disposes the zone as the projection 171 of measuring object.Absorption keeps the objective table 2 of printed base plate 1, by the control of basis from the objective table control part 2 of the instruction of master control part 13, according to specified order, move so that the camera watch region 241 scan camera shooting surveyed areas 201 of the linear transducer of image detection video camera 7 are made a video recording in the XYZ direction.Simultaneously, by illuminating lens system 4, with the light of white light or the wavelength below the 570nm, make that slit-shaped light beam 231 shines so that from moving direction, with the following low angle α of 30 degree, shine above-mentioned camera watch region 241.Its result will store video memory 92 into as picture signal 202 by the picture signal that image detection video camera 7 and objective table scan-synchronized are obtained after A/D transformation component 91 is transformed to data image signal.
Next, cut out circuit 93, by the picture signal 202 of in video memory 92, being stored, by the raised position cad data (convex configuration data) 203 of reference from master control part 13 acquisitions, extract (cutting out) the only view data Pk of a projection (i, j) 204 out.Become such usefulness and cut out only view data Pk (i of a projection of circuit 93 extractions (cutting out), j) 204, make and in master image handling part 94, carry out Flame Image Process and become easily,, just this necessity may not be arranged if each protruding bottom position and height and base diameter are all meeted the requirements.
Next, master image handling part 94, (i j) 204 is suitable for image processing algorithm for a raised image data Pk who is extracted out.Image detection video camera 7, at moving direction, make a video recording with the inclination angle beta of 45 degree, so, by a projection obtain with background (surface of pedestal and printed base plate 1) as portion secretly, by bright view data Pk that forms (i, j) 204.Therefore, by to this view data Pk (i, j) 204 with certain threshold value carry out 2 values, obtain the projection edge (profile) coordinate data.In addition, by (i, j) 204 carry out differential and handle edge (profile) coordinate data that the coordinate ask for peak value can obtain projection to above-mentioned view data Pk.
Next, on view data, for example, set (profile) 205 by the marginal point of raised tip portion, calculate 2 curve of approximation or oval curve of approximation 208,, calculate 2 curve of approximation or oval curve of approximation 209,210a, 210b by set (profile) 206,207a, the 207b of the marginal point of the bottom of the base portion of projection and crest line, the geometry shapes of 2 dimensions when thus, stably detecting from 30～inclination of 50 degrees angle beta observation projection.By calculating the distance of descending point most that goes up point and curve 209 most, just can ask for the height H of the projection on view data from these curves that calculate 208.In addition, can ask for base diameter (diameter of base portion) D on view data.In addition, the middle point coordinate of the intersecting point coordinate by asking for the curve 209 that calculates and curve 210a, 210b, can ask for position coordinates as the projection of the center 212 of base portion.
In the occasion of the size of the height dimension of wanting to ask for actual projection, base diameter, as long as multiply by correction factor based on detection angles β composition.As the acquiring method of correction factor, the result that can go out with the survey instrument actual measurement according to projection for representative and as mentioned above on view data the height H of measured projection and base diameter D calculate.
As mentioned above, for the printed base plate 173 on the printed base plate 170 that can confirm to become projection 171 and lower floor and upper strata positively can conducting be connected and adjacent between not short circuit, because the shape of projection 171 is simulation cone shapes, so, as the measurement result of apparatus for measuring convex shape, will obtain at least is the position 212 of height H and protruding base diameter D and projection of essential projection.By obtaining the position, bottom (base portion) 212 of these protruding height H and protruding base diameter (diameter of base portion) D and projection, just can judge whether the projection that poor flow does not take place is good.The position, bottom (base portion) 212 of the height H of projection and projection is for will being connected do solid with the conducting of the base of the printed base plate 173 on upper strata.The position, bottom (base portion) 212 of projection base diameter D and projection is for will being connected do solid with the conducting of the base of the printed base plate 170 of lower floor.
As the geometric configuration of projection, in addition, consider the shape (simulation cone angle) and the volume of point.The shape of point (simulation cone angle) can be asked for by 2 curve of approximation that calculate or oval curve of approximation 208.Volume can be asked for according to the shape (simulation cone angle) of base diameter D, height and point.But, forming projection 171 occasion as screen painting, obviously, have between the height of projection and the shape (simulation cone angle) of point related, so, if whether good carry out judgement with protruding elevation information just enough usually.
Next, the measuring convex shape result's that carries out of subtend master control part 13 the display device 20 or the way of output of output unit 22 describe.Fig. 4 (a) is the result data of measuring as master control part 13, as the distribution 120 of the height of each the protruding geometric feature on the printed base plate, base diameter, bottom position etc., the result who represents on the picture of display device 20.This distributes 120, abides by the color or the deep or light or shape that change each projection 121 from the displacement of design load.In addition, master control part 13 simultaneously also can will be distinguished separately bad of height, base diameter, bottom position and is judged as on the picture that bad projection is presented at display device 20.Being judged as bad projection by show distinguishing each bad kind (highly, base diameter, bottom position) in this wise, can easily finding out the reason of bad generation.
In addition, Fig. 4 (b), be the result data of measuring as master control part 13, will be as the distribution 130 of the height of each the protruding geometric feature on the printed base plate, base diameter, bottom position etc., with 3 dimensional vectors 131, be presented at the result on the picture of display device 20.Like this, by representing measurement result, just can easily grasp the state in the protruding manufacturing engineering shown in Fig. 1 (a) with the distribution on the printed base plate.
Like this, Fig. 4 (a) and (b) is the information of the geometric feature (highly, base diameter, bottom position etc.) as relevant projection, has expressed the distribution 120,130 of the geometric feature of the projection on the printed base plate.
In addition, Fig. 4 (c), be the result data of measuring as master control part 13, in whole printed base plate or each specific region, will get the bias of height, base diameter or the position etc. of projection and design load at transverse axis, be presented at the result on the picture of display device 20 at Nogata Figure 140 that the longitudinal axis is got frequency (number).By such demonstration Nogata Figure 140, can grasp number and distribution thereof in determinating reference (design tolerance) 141 is judged in whole printed base plate or each specific region whether good, so, for example can carry out reappraising as the setting of the determinating reference (design tolerance) of measuring secret formula.In addition, carrying out histogram when showing, also can be with the distribution or 3 dimensional vectors of the displacement of the projection shown in histogram shows on displayed map 4 (a) and (b).So, just can find that height, base diameter, bottom position etc. owing to projection strengthen the reason of scattered error.
Like this, Fig. 4 (c) as the information of the geometric feature of relevant projection (highly, base diameter, bottom position etc.), has expressed the generation frequency 140 of projection of the geometric feature of the projection on the printed base plate.
If to Fig. 4 (a) and (b) that illustrated more than each protruding manufacturing installation (for example screen printer) demonstration, the picture shown in (c), just can grasp the machine error of protruding manufacturing installation.
In addition, Fig. 4 (d), be by for example under the state that has shown the picture shown in Fig. 4 (a) with display device 20, specifying certain zone, will add the image of the projection of in specified zone, in view data preservation portion 11, being preserved itself with the subsidy line and the projection of the raised brim (profile) that in master image handling part 94, calculated by this image, be presented at the result on the picture of display device 20 with input media 21.Because expression will be subsidized the image that line has appended to the projection on the edge in this wise, so, the state of actual projection can be observed.The image of the projection that is detected has obtained high contrast with respect to background, so, not necessarily leave no choice but show the subsidy line.
In addition, Fig. 4 (e), be by for example specifying bad projection at the state with the picture of the bad projection of the expression shown in display device 20 displayed map 4 (a) with input media 21, master control part 13 is selected the result who has been presented at after the above-mentioned specified bad raised image 150 on the display device 20 from the image that view data preservation portion 11 is preserved.By the image of the bad projection of such expression, so, can confirm whether correctly to have carried out to judge whether well to wait and measure secret formula.
In addition, Fig. 4 (f) is that master control part 13 changes, also this timeliness of calculating variation is presented on the picture of display device 20 with the timeliness that printed base plate unit or batch unit calculating are stored in memory storage 23 protrusions shape measure results.That is, Fig. 4 (f) is that the information as the geometric feature (highly, base diameter, bottom position etc.) of relevant projection, the timeliness of having expressed about the geometric feature of projection change.As calculating the measuring convex shape result that timeliness changes, consider the scattered error of the height, base diameter, bottom position etc. of the mean value of height, base diameter, bottom position etc. of projection and projection.The timeliness of the shape by exporting such projection changes, for example can grasp in the occasion of screen painting owing to produce mesh obstruction etc. timeliness changes to increase gradually and causes near the situation in the determinating reference (design tolerance), before the bad projection of a large amount of generations, can give a warning (warning) takes some countermeasures in advance in advance.In addition, feed back to protruding manufacturing engineering, make its variation of creating conditions corresponding, thus, can seek bad creating conditions takes place with projection by this timeliness is changed.
Above Shuo Ming formation apparatus for measuring convex shape 112 as shown in Figure 5 can be monitored the state of the manufacture process of projection.That is, apparatus for measuring convex shape 112, master control part 13, as the measuring convex shape result, for example, the specific regional determination on printed base plate 1 is the height of projection, the occasion that base diameter geometric ratio design allowable value (determinating reference) is not enough, output is to the warning messages such as supply deficiency of this regional raised material, should export result 113 via the output unit 22 of network etc. and offer protruding manufacturing installation 111, thus, can give the alarm at protruding manufacturing installation 111.Like this, the master control part 13 of apparatus for measuring convex shape 112, feed back 113 by protruding measurement result the creating conditions in protruding manufacturing installation (for example screen printer) 111 (environment (temperature, humidity, air pressure), material (concentration of kind, solvent), device No.) that will in memory storage 23 and view data preservation portion 11, store, above-mentioned the creating conditions of control in protruding manufacturing installation 111, thus, can carry out stable projection manufacturing.
In addition, even feeding back the occasion that to improve to protruding manufacturing installation 111, apparatus for measuring convex shape 112, by measuring convex shape result 114 is offered CAD system 110, CAD system 110 also can be carried out the support to the design conditions change of the configuration (density) of more stable projection etc.This occasion, apparatus for measuring convex shape 112, the histograms of foundation measuring object project shown in Fig. 4 (c) etc. are held number and distribution thereof in the design tolerance (determinating reference) 141, thus, make the setting of the design tolerance of reappraising become easy.In addition, protruding manufacturing installation 111 even can not improve the bad occasion of generation protruding the creating conditions of control, is created conditions to find out according to projection and is not taken place after the bad design conditions it to be fed back CAD system 110, carries out design alteration thus.
Then, utilize Fig. 6 and Fig. 7 that the 2nd embodiment of the lamp optical system in the apparatus for measuring convex shape that the present invention relates to is described.That is, in the 2nd embodiment, difference with the 1st embodiment shown in Figure 2 is: for as the projection 171 on the printed base plate 1 of measured object, be provided with from two lamp optical systems (illumination component) 302 and 303 of at least 2 directional lightings of a plurality of directions.Two lamp optical systems 302 and 303 angle of elevation alpha are than the lower angle of angle beta that detects lens (collector lens) 6, and for example about 10 degree, the angle γ between two illuminations is that for example 150 spend than the also narrow angle of 180 degree.In addition, obviously,, also can be plural a plurality of as lamp optical system.
With Fig. 7 this example is described.Fig. 7 is an illuminator oblique view of observing Fig. 6 from the top.Always throw light on from right and left for object projection two illuminators 302 of 171 usefulness and 303.Thus, whole projection is thrown light on, and angle of elevation alpha is the angle lower than detection optical system 6, therefore, detects lens 6, can only clearly manifest and detect the part of lobed elevation information with respect to background., the crest line with projection 171 of simulating cone shape is compared with background become significantly bright from 2 directional lightings by like this.
Next, utilize Fig. 8 and Fig. 9 that the 3rd embodiment of the lamp optical system in the apparatus for measuring convex shape that the present invention relates to is described.That is, in the 3rd embodiment, difference with the 1st and the 2nd embodiment, be to have made: the place ahead at illumination component or lamp optical system Figure 50 1 is provided with diverging lens 502, to expand to horizontal direction from the illumination light of illumination component or lamp optical system Figure 50 1, make diffusion light 503 not only shine the front of projection 171, also shine the side.The angle of elevation alpha of illumination component or lamp optical system Figure 50 1 is than detecting the lower angle of lens 6, for example 10 degree.Fig. 9 is an illuminator oblique view of observing Fig. 8 from the top.Throw light on illumination component or lamp optical system Figure 50 1 and diverging lens 502 from the direction that detects lens 6 for measured object projection 171.Thus, whole projection is thrown light on, and angle of elevation alpha is the angle lower than detection optical system 6, therefore, detects lens 6, can only clearly manifest and detect the part of lobed elevation information with respect to background.
Then, utilize Figure 10 and Figure 11 that the 2nd embodiment of the detection optical system in the apparatus for measuring convex shape that the present invention relates to is described.That is, in the 2nd embodiment, difference with the 1st embodiment shown in Figure 2 is: be provided with the imaging lens 703 of the point of projection 171 in focus and linear responsive video camera 704 (for example CCD linear imaging sensor) and the imaging lens 705 and the linear responsive video camera 706 (for example CCD linear imaging sensor) of the bottom (base portion) of projection 171 in focus.By constituting in this wise, linear responsive video camera 704 is taken distinct image for the point of projection 171, and linear responsive video camera 706 is taken distinct image for the bottom of projection 171.That is, for as the projection 171 on the substrate 1 of measured object, throw light on above-mentioned angle [alpha] by the embodiment of the 1st of lamp optical system～3rd.
Detect lens 701 (6), to be set up with the same elevation angle β of the 1st embodiment of detection optical system shown in Figure 2.By detecting the reflected light 707 that lens 701 are detected, be separated into the 1st light 708 and the 2nd light 709 with beam splitting system 702 from projection.The imaging on the responsive video camera 704 of linearity of the 1st light 708 usefulness imaging lenses 703.In addition, same, the imaging on the responsive video camera 706 of linearity of the 2nd light 709 usefulness imaging lenses 705.
Figure 11 (a) expression is made the captured example of focusing state by the linear responsive video camera 704 of imaging lens 703 usefulness with the point of projection 171, and Figure 11 (b) expression is made the captured example of focusing state by the linear responsive video camera 706 of imaging lens 705 usefulness with the bottom of projection 171.Visual field 801, expression is with the captured visual field of linear responsive video camera 704.And, for make linear responsive video camera 704 in detectable region 803 in the detection position 805 whens scanning the point of projection is made a video recording, imaging lens 703 is adjusted to and make its protruding point be focusing.In addition, visual field 802, expression is with the captured visual field of linear responsive video camera 706.And, for make linear responsive video camera 706 in detectable region 804 in the detection position 806 whens scanning made a video recording in the bottom of projection, imaging lens 705 is adjusted to the bottom that makes its projection and be focusing.
Like this, by in different focal plane detected image, even improved the occasion of measuring accuracy of the shape of projection 171 strengthening the magnification that detects lens 701 (6), also can prevent by the depth of focus not enough and produce image blurring.Certainly, the occasion that has uprised at projection 171 height is also made a video recording under the focusing state of furnishing separately to the bottom of the point of projection and projection, so, can correctly detect the shape of projection with high resolving power, the result can improve the measuring accuracy of projection 171 shape.
Then, utilize Figure 12 and Figure 13 that the 3rd embodiment of the detection optical system in the apparatus for measuring convex shape that the present invention relates to is described.That is, in the 3rd embodiment, difference with the 2nd embodiment, be: make a video recording with 902 pairs of images of linear sensitive element, make a video recording with 903 pairs of images of linear sensitive element by the bottom (base portion) of the projection 171 of imaging lens 901 imagings by the point of the projection 171 of imaging lens 901 imagings.That is it is focusing state that the sensitive surface of linear sensitive element 902 is configured to make its protruding point, and it is focusing state that the sensitive surface of linear sensitive element 903 is configured to make the bottom of its projection.On Figure 13, express the example of linear sensitive element 902 and 903 shootings.Visual field 101 is represented with linear sensitive element 902 and 903 captured visual fields.In detectable region 102, constituted and make it obtain the image via line 103 of point that comprises projection, constituted and make it obtain the image that comprises protruding bottom with linear sensitive element 903 via line 104 with linear sensitive element 902.Like this, in the 3rd embodiment too in different focal plane detected image, so, can obtain the effect same with the 2nd embodiment.
Then, utilize Figure 14, Figure 15 and Figure 16 that the 2nd embodiment of the apparatus for measuring convex shape that the present invention relates to is described.The 2nd embodiment, relatively with the 1st embodiment, having appended also can be to the illumination optical system that formed through hole (hole) on printed base plate 10 the is checked detection optical system of unifying.As the printed base plate 10 of measured object one of, for the multilayer printed board shown in Figure 16 (a) of method manufacturing shown in Figure 1, shown in Figure 16 (b), to consider the through hole (hole) 180 with drill bit or Laser Processing in the zone that is not forming projection.In addition, as beyond the printed base plate 10 of measured object, also can be the printed base plate that forms common through hole.
That is, the 2nd embodiment, relatively with the 1st embodiment, for example append from the top to multilayer printed board 10 carry out ring-shaped lighting lamp optical system 17 and by from top optically focused by multilayer printed board 10 resulting catoptrical detection lens 16 with receive the detection optical system that the detection video camera 15 of light image of the mode chart (through hole) 180 of the multilayer printed board 10 that is obtained by these detection lens 16 is constituted, and become the structure that also can detect the image of multilayer printed board 10 from the top.By making such structure, image processing part 9 just can be used by responsive video camera 7,704,706,902,903 picture signals that detected 8 of linearity and measure formed protruding 171 position and shape on printed base plate 1, moreover image processing part 9 can also use the picture signal 8 that is obtained by detection video camera 15 to measure the position and the shape of the through hole of being processed (hole) 180 in multilayer printed board 10.
Then, utilize Figure 15 that the example of applying flexibly of the 2nd embodiment is described.For the protruding printed base plate 1 that has loaded measured object, according to position and the shape of measuring projection 171 by responsive video camera 7,704,706,902,903 picture signals that detected 8 of linearity by image processing part 9 and master control part 13.For the multilayer printed board after the perforate 10, according to the position and the shape of coming measured hole 180 by image processing part 9 and master control part 13 by detection video camera 15 resulting picture signals 8.Detect video camera 15, picture signal with dark portion detects circular hole portion, detect the periphery of circular port portion with the picture signal of bright portion, so, at master image handling part 94, the picture signal that for example will be stored in the hole near zone (also can be the zone that each hole is cut out) of video memory 92 after the A/D conversion projects to X-direction and Y direction (picture signal is carried out integration), ask for the diameter of Y direction with the distance between the two edges of Y direction, by asking for the position coordinates that Y direction can be asked in its center, ask for the diameter of X-direction with the distance between the two edges of X-direction, by asking for the position coordinates that X-direction can be asked in its center.
Master control part 13, will be with measurement mechanism (not shown) the measured and reference mark position that is stored in memory storage 23 as benchmark, come both positional informations of comparison, thus, acquisition as the measurement result 155 of raised position the position 156 of the projection on the printed base plate 1 and interrelated as between the position 158 in the hole on the multilayer printed board 10 of the measurement result 157 of perforate state, can be easily the bias that is held in both positions on the multilayer printed board 10.In addition, be to make: on printed base plate 1 and multilayer printed board 10 both sides, form reference mark.
Like this, in the hole 180 of measured multilayer printed board 10, shown in Figure 16 (c), form through hole conductor 181 by electroplating to wait thereafter.Therefore, in the occasion that disposes conductor (projection 171 or through hole conductor 181) to high-density, for example,, can eliminate short circuit or near the state of short circuit by confirming the distance with the immediate projection of through hole conductor.
As above illustrated,, on printed base plate, made in the method and production line of projection, and can measure convex geometry simply with the short time and distribute according to present embodiment.Therefore, for example, after convexing to form, measure,, can stably carry out device management and generative process management in protruding manufacture process by successively the height profile and the position deviation of projection being fed back to protruding manufacturing installation.In addition, by protruding measurement data and design data are compared, it is useful improving for the precision of making emulation, can also carry out the optimization of the design alteration of convex shape.
In addition, according to present embodiment, when making multilayer printed board with the method for attachment that relies on projection, the multilayer printed board that can high qualification rate manufacturing has high reliability, and can improve output, can seek the raising of the turnout of whole process.
In addition,, be described, in addition, also comprise the projection that is loaded onto on semiconductor pole plate and the semi-conductor chip and hemisphere jut etc. with regard to its situation about being loaded onto on the printed base plate as projection.
The present invention can implement with other particular forms under the situation that does not break away from its aim or essential characteristic.Present embodiment, must consider all about explanation and with the meaning of the claim equivalence that will implement and all mutation in the scope, and be not limited to claim.
Claims (22)
1. an apparatus for measuring convex shape is characterized in that,
Include:
Mounting has disposed as the substrate of a plurality of projectioies of measured object and the objective table that moves it;
To the projection that disposed on by the aforesaid substrate that this objective table moved, the lamp optical system of using the mask for aforesaid substrate to have the lighting optical axis of low dip angle to throw light on;
Use mask for aforesaid substrate to have the detection optical axis optically focused at also high angle of inclination, the angle of inclination lower to come the reflected light of the projection that free this lamp optical system throws light on to detect the detection optical system of the picture signal of projection than above-mentioned illumination light;
To carry out the A/D conversion by the picture signal of the projection that this detection optical system detected, according to point at least and the picture signal of bottom, the point at least that calculates projection and the profile of bottom, according to the profile of the point at least of the projection that this calculated and bottom, calculate image processing part by the position at least of projection and the geometric characteristic quantity highly formed according to the resulting projection of protruding data image signal of this A/D conversion; With
Information by the geometric characteristic quantity of the relevant projection that this image processing part calculated is presented at master control part on the display device.
2. apparatus for measuring convex shape according to claim 1 is characterized in that,
In above-mentioned image processing part, the geometric characteristic quantity of the projection that goes out as aforementioned calculation also comprises the diameter of the base portion of projection.
3. apparatus for measuring convex shape according to claim 1 is characterized in that,
In above-mentioned image processing part, also judge according to the geometric characteristic quantity of the projection that is calculated whether projection is good, and this result of determination is offered above-mentioned master control part.
4. apparatus for measuring convex shape according to claim 1 is characterized in that,
Above-mentioned detection optical system has:
Each protruding reflected light is carried out the collector lens of optically focused; With
Be subjected to light by each protruding reflected light of this collector lens institute optically focused and be transformed into the linear imaging sensor of picture signal.
5. apparatus for measuring convex shape according to claim 1 is characterized in that,
Above-mentioned lamp optical system is constituted as for above-mentioned each projection and can be thrown light on by above-mentioned illumination light from a plurality of directions.
6. apparatus for measuring convex shape according to claim 1 is characterized in that,
Above-mentioned lamp optical system is as above-mentioned illumination light illumination diffused illumination light.
7. an apparatus for measuring convex shape is characterized in that,
Include:
Mounting has disposed as the substrate of a plurality of projectioies of measured object and the objective table that moves it;
To the projection that disposed on by the aforesaid substrate that this objective table moved, the lamp optical system of using the mask for aforesaid substrate to have the lighting optical axis of low dip angle to throw light on;
Use mask for aforesaid substrate to have the detection optical axis optically focused at also high angle of inclination, the angle of inclination lower to come the reflected light of the projection that free this lamp optical system throws light on to detect the detection optical system of the picture signal of projection than above-mentioned illumination light;
To carry out the A/D conversion by the picture signal of the projection that this detection optical system detected, according to point at least and the picture signal of bottom, the point at least that calculates projection and the profile of bottom, according to the profile of the point at least of the projection that this calculated and bottom, calculate by the position at least of projection and the geometric characteristic quantity of highly forming, judge whether preferable image handling part of projection according to the geometric characteristic quantity of this projection that is calculated according to the resulting projection of protruding data image signal of this A/D conversion; With
Whether the projection that output is judged by this image processing part the master control part of good information.
8. apparatus for measuring convex shape according to claim 7 is characterized in that,
In above-mentioned image processing part, the geometric characteristic quantity of the projection that goes out as aforementioned calculation also comprises the diameter of the base portion of projection.
9. apparatus for measuring convex shape according to claim 7 is characterized in that,
Above-mentioned master control part constitutes and can be shown on the display device about the information by the geometric characteristic quantity of the projection that above-mentioned image processing part calculated.
10. apparatus for measuring convex shape according to claim 7 is characterized in that,
In above-mentioned master control part, as allowing the shown information of above-mentioned display device, comprise more than any one among changing for timeliness at the geometric characteristic quantity of the generation frequency of the projection of the distribution of the geometric characteristic quantity of the projection on the aforesaid substrate or geometric characteristic quantity or projection about the geometric characteristic quantity of projection.
11. apparatus for measuring convex shape according to claim 7 is characterized in that,
Also have preservation by above-mentioned image processing part obtain at least as the bad projection that is determined by the view data preservation portion of the picture signal of A/D conversion.
12. apparatus for measuring convex shape according to claim 7 is characterized in that,
In above-mentioned lamp optical system, above-mentioned illumination light is the light with the wavelength below white light or the 570nm.
13. apparatus for measuring convex shape according to claim 7 is characterized in that,
Above-mentioned detection optical system has the collector lens that each protruding reflected light is carried out optically focused; With
Be subjected to light by each protruding reflected light of this collector lens institute optically focused and be transformed into the linear imaging sensor of picture signal.
14. apparatus for measuring convex shape according to claim 7 is characterized in that,
Above-mentioned lamp optical system is constituted as for above-mentioned each projection and can be thrown light on by above-mentioned illumination light from a plurality of directions.
15. apparatus for measuring convex shape according to claim 7 is characterized in that,
Above-mentioned lamp optical system is as above-mentioned illumination light illumination diffused illumination light.
16. apparatus for measuring convex shape according to claim 13 is characterized in that,
Above-mentioned linear imaging sensor, by will be in focus each protruding point and be subjected to the 1st linear imaging sensor of light and each protruding base portion and constituted by the 2nd linear imaging sensor of light in focus.
17. apparatus for measuring convex shape according to claim 13 is characterized in that,
Above-mentioned lamp optical system is constituted as for the light area of the corresponding above-mentioned linear imaging sensor of above-mentioned each projection and carries out the illumination of faciola shape ground.
18. a measuring convex shape measuring method is characterized in that,
Have following steps:
From for the projection that is disposed on the 1st low angle illuminating board of the face of this substrate;
By detecting the picture signal that obtains above-mentioned projection from the 1st angle direction illumination by the reflected light that above-mentioned projection reflected for the face of aforesaid substrate the 2nd angle direction also higher than above-mentioned the 1st angle;
The picture signal of the above-mentioned projection that processing is obtained by this detection also calculates the position at least that comprises above-mentioned projection and the geometric characteristic quantity of elevation information; Then,
To be shown on the picture about the information of the geometric characteristic quantity of this above-mentioned projection that calculates.
19. measuring convex shape method according to claim 18 is characterized in that,
Detecting the step that above-mentioned reflected light obtains picture signal from the step of the 1st angle direction illumination aforesaid substrate with at the 2nd angle direction, be at least 1 direction mobile continuously aforesaid substrate.
20. measuring convex shape method according to claim 18 is characterized in that,
In being shown to the step of above-mentioned picture,, will be shown on the above-mentioned picture about the information in the distribution on the aforesaid substrate of height, base diameter and the position of above-mentioned projection as information about the geometric characteristic quantity of above-mentioned projection.
21. measuring convex shape method according to claim 18 is characterized in that,
In being shown to the step of above-mentioned picture,, will be shown on the above-mentioned picture about the bad information separately of height, base diameter and the position of above-mentioned projection as information about the geometric characteristic quantity of above-mentioned projection.
22. measuring convex shape method according to claim 18 is characterized in that,
What is called calculates the position at least that comprises above-mentioned projection and the geometric characteristic quantity of elevation information, be the profile of the point of above-mentioned at least projection in the picture signal of the above-mentioned projection that obtains according to above-mentioned detection and the picture signal of base portion, the point at least that calculates projection and base portion and according to the profile of the point at least of this above-mentioned projection that calculates and base portion, calculate the position at least of above-mentioned projection and the geometric characteristic quantity of composition highly.
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| Application Number | Priority Date | Filing Date | Title |
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| JP2003357510A JP4147169B2 (en) | 2003-10-17 | 2003-10-17 | Bump shape measuring apparatus and method |
| JP2003357510 | 2003-10-17 |
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| CN1609550A true CN1609550A (en) | 2005-04-27 |
| CN1310013C CN1310013C (en) | 2007-04-11 |
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| CNB2004100807924A Expired - Fee Related CN1310013C (en) | 2003-10-17 | 2004-10-15 | Apparatus for measuring convex shape and method thereof |
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| Country | Link |
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| US (1) | US7336816B2 (en) |
| JP (1) | JP4147169B2 (en) |
| KR (1) | KR100796113B1 (en) |
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- 2004-10-15 KR KR1020040082503A patent/KR100796113B1/en not_active IP Right Cessation
- 2004-10-15 US US10/964,690 patent/US7336816B2/en not_active Expired - Fee Related
- 2004-10-15 CN CNB2004100807924A patent/CN1310013C/en not_active Expired - Fee Related
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| CN101356417B (en) * | 2006-01-11 | 2011-07-06 | 西门子公司 | System and method for detecting a geometry of a workpiece |
| CN104136881A (en) * | 2012-02-03 | 2014-11-05 | 独立行政法人产业技术综合研究所 | Method of measuring height of projections or protrusions on article surface, and device therefor |
| CN104136881B (en) * | 2012-02-03 | 2017-08-29 | 独立行政法人产业技术综合研究所 | The method and device for the method for the height of projection or ridge on measurement article surface |
| CN104657532A (en) * | 2013-11-20 | 2015-05-27 | 台湾积体电路制造股份有限公司 | Semiconductor Device Design Methods and Conductive Bump Pattern Enhancement Methods |
| CN104657532B (en) * | 2013-11-20 | 2018-07-27 | 台湾积体电路制造股份有限公司 | semiconductor device design method and conductive bump pattern enhancement method |
| CN110470229A (en) * | 2018-05-11 | 2019-11-19 | 株式会社荏原制作所 | Bump height check device, substrate board treatment, bump height inspection method and storage medium |
| CN110470229B (en) * | 2018-05-11 | 2022-07-22 | 株式会社荏原制作所 | Bump height inspection device, substrate processing device, bump height inspection method, and storage medium |
| CN113544464A (en) * | 2019-03-11 | 2021-10-22 | 三菱电机株式会社 | Setting value adjusting device of displacement meter |
| CN113544464B (en) * | 2019-03-11 | 2022-08-26 | 三菱电机株式会社 | Setting value adjusting device of displacement meter |
| CN111623723A (en) * | 2020-05-06 | 2020-09-04 | 深圳中科飞测科技有限公司 | Detection device and detection method |
Also Published As
| Publication number | Publication date |
|---|---|
| TWI241397B (en) | 2005-10-11 |
| CN1310013C (en) | 2007-04-11 |
| HK1077627A1 (en) | 2006-02-17 |
| JP4147169B2 (en) | 2008-09-10 |
| KR100796113B1 (en) | 2008-01-21 |
| TW200514962A (en) | 2005-05-01 |
| US7336816B2 (en) | 2008-02-26 |
| JP2005121508A (en) | 2005-05-12 |
| US20050129304A1 (en) | 2005-06-16 |
| KR20050037375A (en) | 2005-04-21 |
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