CN1604335A - CCD image sensor and high accuracy linear dimension measuring device and measuring method thereof - Google Patents
CCD image sensor and high accuracy linear dimension measuring device and measuring method thereof Download PDFInfo
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Abstract
This invention is a CCD image sensor and its measurement device and method. The sensor is composed of multiple crossed photoelectron diodes, each of which has relative one row of charge transfer device 2 connected with the photoelectron diode row through reading the grating. The measurement method is to put the subject to be measured between the optics lens and sensor and to measure the total length between the light-emitting diodes without apparent light sensitivity due to the subject blinding to compute the subject length.
Description
Technical field:
The present invention is relevant with ccd image sensor, and is relevant with the linear dimension measuring device that utilizes this transducer, relevant with the method for measurement of utilizing this device.
Background technology:
In recent years, ccd image sensor is used widely in non-contact measurement and computer vision imaging.In ccd image sensor was measured, the precision that improves its measurement was a problem must considering.And the way that solves can realize from two aspects: can directly improve the resolution of its imaging from the CCD hardware configuration on the one hand, can improve and adopt suitable data processing method to improve certainty of measurement the part in addition of CCD in the measuring system on the other hand., all fail to break through the influence of CCD pixel spacing, thereby be difficult to make certainty of measurement that qualitative leap is arranged from the effective ways of different angle proposition raising certainties of measurement at present.
At first, the ccd image sensor structure is analyzed.
Fig. 1 is the floor map of traditional C CD imageing sensor 100A.
Its formation mainly contain photodiode capable 102 that a plurality of photodiodes that are arranged in a row form with the capable corresponding charge transfer device 101 that is arranged into a row of photodiode.Each photodiode in the photodiode capable 102 is by reading grid 103, to charge transfer device 101 output signal electric charges.Electric charge on the charge transfer device 101 is transferred to the coherent signal treatment circuit again, finally forms the output signal of ccd image sensor.
Fig. 2 is the floor map of another traditional C CD imageing sensor 200B of two CCD structures of proposing in Japanese Patent Application Publication No.11-164087.
This imageing sensor comprises two row charge transfer device 201a and 201b, and corresponding photodiode capable 202.Photodiode is capable to be divided into two groups, and one group of 202a penetrates electric charge to charge transfer device 201a, and one group of 202b penetrates electric charge to charge transfer device 201b.Under such arranging situation, charge transfer device 201a and 201 can be according to equidistantly arranging with the interval of the charge transfer device 201 of single CCD structure shown in Figure 1.So just can under the situation that the photodiode size reduces by half, make two ccd image sensors have the photodiode that quantitatively doubles single ccd image sensor, and need not make the charge transfer device of reduced size.
Fig. 3 is the floor map of arranging comprising of proposing capable another ccd image sensor 300C of two photodiodes in Japanese Patent Application Publication No.2001-203342 to be staggered.
Ccd image sensor 300C shown in Figure 3 comprises two capable 302a of the photodiode that separates and 302b, and the corresponding first charge transfer device 301a and the second charge transfer device 301b.Half of two capable 302a of photodiode and 302b and two adjacent photodiode spacings arranged alternately.Similar with two ccd image sensor 200B shown in Figure 2, this structure allows ccd image sensor 300C to have the photodiode that quantitatively doubles single CCD type ccd image sensor, and does not need to make the charge transfer device of reduced size.In addition, ccd image sensor 300C also has a tangible advantage with respect to two ccd image sensor 200B: can make the photodiode of large-size, guarantee the signal to noise ratio that this transducer is higher and the dynamic range of broad.
Fig. 4 is the floor map of arranging the capable ccd image sensor 400D of a plurality of photodiodes to be staggered that comprises that proposes in the open No.200310119527.8 of Chinese patent application.
Ccd image sensor 400D shown in Figure 4 comprises first row of diodes, 402, the second row of diodes 402.And every capable diode is divided into two parts by the odd even order, is respectively 402a, 402b and 402c, 402d; The first charge transfer device 401a, the second charge transfer device 401b, tricharged transferring device 401c and the 4th charge transfer device 401d.First row of diodes and second row of diodes are arranged bearing of trend along photodiode and are arranged with half interleaved of photodiode in first row of diodes.First charge transfer device shifts the signal charge that receives K photodiode in first row of diodes, and K is an odd number; Second charge transfer device shifts the signal charge that receives L photodiode in first row of diodes, and L is an even number; The tricharged transferring device shifts the signal charge that receives K photodiode in second row of diodes, and K is an odd number; The 4th charge transfer device shifts the signal charge that receives L photodiode in second row of diodes, and L is an even number; Ccd image sensor 400D can arrange photodiode with higher density, and need not to make the charge transfer device of reduced size, and can improve owing to abut against tediously long below the output grid and collude distortion in the electric charge transfer that length causes.
More than four types ccd image sensor, first kind is basic model, other three kinds is respectively the modification of carrying out at first kind of structure, its objective is to make the more photodiode of number of the arrangement in limited area.
The photoelectric diode that Figure 5 shows that the super ccd image sensor 500E that Japanese fuji company releases is arranged floor map.In " super CCD principle " literary composition of " sensor technology " 2003 the 4th phases, its structural principle has been carried out labor.
Among the super ccd image sensor 500E, replace common rectangle diode, and photodiode is arranged to form a cellular arrangement architecture by 45 with the octangle photodiode.Super CCD was developed in 1999, and octagonal photodiode and cellular pixel are arranged the space validity of having improved the photodiode in each pixel cell greatly.This has brought numerous additional benefits, and such as for the traditional C CD that same number of pixels is arranged, it has higher sensitivity, higher signal noise ratio and dynamic range widely.Its maximum characteristics are that photodiode is arranged by 45, and such arrangement architecture matches with RGB three look patterns, and the signal that adjacent photodiode is obtained is used fully.When data processing, super ccd image sensor constitutes a colour element with per three R, G, B light sensitive diode, though photosensitive unit has only three primary colours, but each is unit multiplexed 6 times, therefore, though super ccd image sensor light sensitive diode data do not change, generation pixel count in processing back is 2 times of common CCD imageing sensor.Super ccd image sensor has tangible advantage in the digital color imaging, and is used widely, but there is no clear superiority in high-acruracy survey is used.
Below to by changing other device except that ccd image sensor in the measuring system, reach the method that improves ccd image sensor measuring system certainty of measurement with data processing algorithm and analyze.
Fig. 6 is that optical measuring system is amplified in a kind of utilization, the measurand projection is amplified the method principle schematic that improves certainty of measurement.
Amplification optical measuring system shown in Figure 6 mainly comprises light source 601, optical lens group 602, and measurand 603, ccd image sensor 604 constitutes.In the method, measured object is exaggerated under the irradiation of diverging light, the shadow of amplification photosensitive imaging on ccd image sensor, ccd image sensor has just measured through the measurand projection after amplifying like this.By such processing, still by pixel spacing (distance between the adjacent photodiode) decision of ccd image sensor, the most very much not can surpass a pixel spacing to the error (monolateral) of measurand projection measurement.Divided by optical magnification, can obtain the measured value of measurand to tested data, can make measure error reduce corresponding optical magnification basically.As being the object of 1.0145mm to length, be that the linear array CCD image transducer of 10 μ m is measured with the pixel spacing, if optical magnification is 10, the projected length of measurand is 10.145mm so.Suppose that without other edge treated method the projected length of measurand may be 10.14mm or 10.15mm so, divided by optical magnification 10, the measured value that obtains measurand is 1.014mm or 1.015mm, and worst error is 0.0005mm.If directly utilize 1: 1 optical imaging system to measure, then the measured value maximum possible is 1.02mm, and minimum may be 1.01mm, and worst error is 0.0055mm.As seen adopt optics amplification imaging system, measure error can be reduced corresponding optical magnification basically.
In " a kind of new method of the CCD of raising certainty of measurement " of " Sichuan University's journal " the 5th phase of calendar year 2001 to having introduced a kind of fuzzy imaging method.This method is a kind of by increasing the method that the measuring system element reaches raising CCD certainty of measurement.
The characteristics of fuzzy imaging method are that the signal to the CCD measuring system obtains part and simply improves, specifically be in set of lenses, to add a sizeable aperture diaphragm, make sharp edge obfuscation after the CCD imaging of object, utilize the size on light hurdle, the known conditions such as focal length of lens that measurement result is carried out match again, to obtain the accurate marginal information of testee.This method is difficult to determine exactly theoretically the raising degree of certainty of measurement, but from experimental data, its effect in certain scope is significant, as to use the pixel spacing be that the line array CCD of 14 μ m comes the diameter of a master body is measured, and its measure error can be controlled in the 5 μ m basically.
In " improving a kind of trial of CCD resolution " literary composition of " modern measurement technology " the 3rd phase in 1997, introduced a kind of edge fitting method of CCD imaging.
The proposition of edge fitting method is based on a such fact, in the measuring system of reality, because the diffraction of light effect, and the existence of the spherical aberration of imaging system, aberration and error of focusing, and The noise, the output of ccd image sensor is a kind of curve that is mixed with the similar slope of noise.And the edge fitting method is exactly to carry out algorithm process by the signal curve to the actual output of ccd image sensor, to obtain more accurate marginal position.Its basic design philosophy is: at first original gray level image is carried out smoothing processing (match), ask gradient to handle to the image after level and smooth again, then, find the position of the point of Grad maximum on gradient image, then the position that will put just is decided to be the position of marginal point.Equally, this method is difficult to determine exactly theoretically the raising numerical value of its certainty of measurement, but from statistics, reasonably uses it can make measure error reduce one times at least.
No matter be with amplifying optical measuring system, still adopt the marginal date processing method, all can improving the DATA REASONING precision of ccd image sensor.But all these processing methods all are to take under the situation that influences that can't break through ccd image sensor pixel spacing at present, thereby are difficult to make certainty of measurement that qualitative leap is arranged.
The content of invention:
The purpose of this invention is to provide a kind of ccd image sensor that is particularly suitable for measuring along the demanding linear dimension of a certain directional precision.
Another purpose of the present invention provides a kind of high accuracy linear dimension measuring device that contains above-mentioned ccd image sensor.
Another purpose of the present invention provides a kind of high-precision measuring method that utilizes said apparatus.
The present invention is achieved in that
Ccd image sensor of the present invention, constitute by staggered a plurality of photodiodes capable 1, each photodiode capable 1 has correspondence to be arranged into the charge transfer device 2 of delegation, photodiode capable 1 is connected with charge transfer device 2 by reading grid 3, the output of all charge transfer devices 2 is connected with control circuit 4, the output of control circuit 4 is connected with signal processing circuit, on the direction that N photodiode capable 1 is expert at by distance H
1Equidistantly staggered, H
1=H/N, H are the distance at adjacent two electric diode centers of photodiode capable 1, and N is the photodiode line number.
Signal processing circuit is made of image collecting device and microcomputer, the output of the input connection control circuit 4 of the amplification filtering circuit of image collecting device, the output of amplification filtering circuit connects the A/D change-over circuit, the A/D change-over circuit is connected with microprocessor with the memory of microcomputer respectively, and microprocessor is connected with memory, outlet terminal.
Constitute by layout successively by light source 5, optical lens group 6, measurand 7 and ccd image sensor 8, the edge projection of measurand 7 is positioned on the conplane ccd image sensor 8 at one or two, the capable axis normal of photodiode of edge projection line and ccd image sensor 8 or intersect.
Method of the present invention, its step is as follows:
(1) measurand 7 is placed between optical lens group 6 and the ccd image sensor 8, the capable intersect vertical axis of photodiode of measurand projection line and ccd image sensor 8, and its two edges projection is all on transducer 8,
(2) determine that the measured object edge drops between first photodiode of ccd image sensor 8 on capable n and n+1 the pixel, n pixel do not have obvious sensitization, n+1 the obvious sensitization of pixel, and measure all photodiode line number m that possesses above-mentioned condition
1, determine that according to same method all n pixel that measured object opposite side edge drops on ccd image sensor (8) do not have obvious sensitization, the line number m of n+1 the obvious sensitization of pixel
2,
(3) measure on the ccd image sensor 8 because of blocking of measured object 7 and do not have total length a between the photodiode of obvious sensitization, a=H * (n
2-n
1), n
1Be the array element columns of the photodiode correspondence of first not obvious sensitization, n
2Be the pairing array element columns of the photodiode of last not obvious sensitization, H is the pixel spacing that transducer follows direction.
(4) calculate the measurand length L:
L＝[a+(H/N)(m
1-1)+(H/N)(m
2-2)]/M
H is the pixel spacing that ccd image sensor follows direction
N is total line number of photodiode
M is the measuring system optical magnification.
Method of the present invention, its step is as follows:
(1) measurand 7 is placed between optical lens group 6 and the ccd image sensor 8, the capable axis normal of photodiode of the projection line of measurand and ccd image sensor 8, and the one edge projection is on transducer 8,
(2) determine that n pixel do not have obvious sensitization between n pixel and n+1 pixel of measurand 7 edge projection on first photodiode of transducer 8 is capable, n+1 the obvious sensitization of pixel, and measure the photodiode line number m that possesses above-mentioned condition,
(3) measure on the ccd image sensor 8 because of blocking of measured object 7 and do not have total length a between the photodiode of obvious sensitization, measure the distance b of measurand away from an end and transducer 8 close measurand one ends of transducer 8, b demarcates a=H * (n with the little 1 μ m microspindle calibrator of resolution
2-n
1), H is the pixel spacing that transducer follows direction, n
1Be the array element columns of the photodiode correspondence of first not obvious sensitization, n
2Be the array element columns of the photodiode correspondence of last not obvious sensitization,
(4) calculate the measurand length L:
L=[a+b+ (H/N) is (m-1)]/M or
L＝[a+b+(H/N)(m-2)]/M
N is total line number of photodiode,
M is an optical magnification.
Method of the present invention, its step is as follows:
(1) measurand is placed between optical lens group 6 and the ccd image sensor 8, the capable intersect vertical axis of photodiode of measurand projection line and two transducers 8 in the same plane, and its two edges are projected on the different transducer 8,
(2) determine that measurand one lateral edges drops between first photodiode of first sensor 8 n and n+1 pixel on capable, the n pixel does not have obvious sensitization, and the photodiode line number m that first sensor possesses above-mentioned condition is measured in the obvious sensitization of n+1 pixel
1,, measure the opposite side edge of measurand and count m in the photodiode institute that the last projection of second transducer (8) makes second transducer 8 possess above-mentioned condition according to Same Way
2,
(3) measure two sensors 8 mutually near the distance b of end, do not have the photodiode length b of obvious sensitization on first, second transducer 8 because of blocking of measured object
1, b
2, b demarcates with the microspindle calibrator, b
1, b
2Equal H * (n
2-n
1) value, H is that transducer follows direction pixel spacing, n
1Be the array element columns of the photodiode correspondence of first not obvious sensitization, n
2Be the array element columns of the photodiode correspondence of last not obvious sensitization,
(4) calculate the measurand length L
L＝[b+b
1+b
2+(H/N)(m
1-1)+(H/N)(m
2-2)]/M
N=is total photodiode line number of two transducers (8).
M is an optical magnification.
Description of drawings:
Fig. 1 is the floor map of traditional C CD imageing sensor.
The floor map of Fig. 2 traditional double CCD type ccd image sensor.
Fig. 3 comprises the floor map of arranging the capable ccd image sensor of two photodiodes to be staggered.
Fig. 4 comprises the floor map of arranging the capable ccd image sensor of a plurality of photodiodes to be staggered.
Fig. 5 is that the photoelectric diode of super ccd image sensor is arranged floor map.
Fig. 6 amplifies the optical measuring device schematic diagram.
Fig. 7 is with the equidistant staggered ccd image sensor floor map of three row diodes.
Fig. 8 is with the equidistant staggered ccd image sensor floor map of seven row diodes.
Fig. 9 is how equidistant staggered ccd image sensor judges the measured object edge contour in measuring process a flow chart.
Figure 10 is the ccd image sensor optical imagery measurement mechanism schematic diagram of first embodiment of the invention.
Figure 11 is the ccd image sensor optical imagery measurement mechanism schematic diagram of second embodiment of the invention.
Figure 12 is the ccd image sensor optical imagery measurement mechanism schematic diagram of third embodiment of the invention.
Figure 13 is along the equidistant staggered structural representation of its length direction with a plurality of traditional wire array CCD image sensors.
Figure 14 is the control circuit schematic diagram.
Embodiment:
Embodiment 1:
As shown in figure 10, be the ccd image sensor optical imagery measurement mechanism schematic diagram of first embodiment of the invention.First embodiment of the invention mainly comprises the equidistant wrong row's ccd image sensor 8 of photodiode, optical lens group 6, and light source 5, signal processing circuit 4 and measurand 7 constitute.Each photodiode of ccd image sensor is capable equidistantly staggered, and the line number of photodiode is by certainty of measurement and follow adjacent two the photodiode spacings decision of direction.The multiplication factor of optical imaging system can be 1 times, also can be any greater than 1 multiple.The characteristics of first embodiment of the invention are: each row of photodiode is equidistantly staggered in the ccd image sensor, and measured object is carried out bilateral measurement, and promptly measured object two ends perfect imaging is on ccd image sensor.The measured object center can be placed on the centre section of ccd image sensor, also measured object can be placed on other suitable place, as long as can make measured object energy complete imaging on ccd image sensor just passable.Measurement data can directly be obtained by the number to the photodiode that is blocked on the ccd image sensor.
Be in the measurement mechanism as shown in figure 14, ccd image Signal Processing Principle of Process figure.
Because of measured object to the blocking of light, and on each light sensitive diode of ccd image sensor, produce different photoreceptor signals, this signal is as the output of CCD, through amplification filtering, A/D conversion, can directly send into CPU and carry out computing, also can send into memory earlier, handle again after a while.The result who handles can export by modes such as display, printers.
Ccd output signal amplification filtering and A/D change this part circuit, have ripe data collecting card can finish the work of treatment of this respect at present, as CA-MPE-1000 type image pick-up card.CPU, memory and output then can be finished by a PC fully.Therefore to the processing of ccd output signal, can adopt existing data collecting card and PC to carry out.Need only work out handling procedure by corresponding flow process gets final product.
In the processing procedure of data, in the ccd image sensor first row is gone up the signal of telecommunication of each light sensitive diode output, deposit in respectively successively in first row of memory array, respectively the photoreceptor signal of other each row light sensitive diode on the ccd image sensor is deposited successively in the correspondence position of array in this way respectively.Suppose this array be D (i j), is a two-dimensional array, the line number of array and columns, line number and the columns with ccd image sensor is identical respectively.And element wherein is corresponding one by one with light sensitive diode on the ccd image sensor.So when data processing, each element in this array is with regard to each light sensitive diode on the corresponding ccd image sensor of difference.
The measurement result analytic process can be briefly described as follows: at first read first row element among the array D, read from first first element of row earlier, up to first last element of row, find wherein n the obvious sensitization of element (not obvious sensitization), and those two light sensitive diode positions of n+1 the not obvious sensitization of element (obviously sensitization), and demarcate it.Then tested edge just drops on this photodiode on capable between the pixel corresponding with the n of array and n+1 element.Then, read among the array D second row, seek with first row in the identical array element of photodiode columns demarcated, judge and their sensitization situation, then continue to read the next line data, otherwise demarcation m as identical with first row
1(m
2), number be i, then m as current line
1(m
2)=i-1.Calculate measured marginal position by data processing at last.
Concrete judge the whether obvious sensitization of a certain pixel, can adopt the simplest two-value method to carry out.A threshold values promptly is set, when the photoreceptor signal voltage of this pixel is higher than this threshold values, then thinks the obvious sensitization of this pixel, otherwise, then think the not obvious sensitization of this pixel.For instance, as to the CCD output signal of telecommunication by handling, convert the normal voltage of 0～12V to, can set threshold values is 5V, when the sensitization signal of telecommunication of certain pixel is higher than 5V, then posthumous title is the obvious sensitization of this pixel, otherwise, think the not obvious sensitization of this pixel.Specifically in use, threshold values determines and can adjust repeatedly and obtain a more reasonably value by repeatedly examination survey.
For determining of a among the embodiment 1:
In array D first row element, if the pairing array element columns of the photodiode of first not obvious sensitization is n
1, and the pairing array element columns of the photodiode of last not obvious sensitization is n
2, H is in the heart a distance in capable adjacent two photodiodes of photodiode, then:
a＝H×(n
2-n
1)
L＝[a+(H/N)(m
1-1)+(H/N)(m
2-2)]/M
H is the pixel spacing that ccd image sensor follows direction.
N is total line number of photodiode, and M is an optical magnification.
Embodiment 2:
As shown in figure 11, be the ccd image sensor optical imagery measurement mechanism schematic diagram of second embodiment of the invention.Second embodiment of the invention mainly comprises the equidistant wrong row's ccd image sensor 8 of photodiode, optical lens group 6, and light source 5, signal processing circuit 4 and measurand 7 constitute.Wherein b represents in the measuring process, and measured object is away from the distance of ccd image sensor one end and close measured object one end of ccd image sensor, and in measurement mechanism, measured object is placed on the datum level away from ccd image sensor one end, so b is invariable.Each photodiode of ccd image sensor is capable equidistantly staggered in the second embodiment of the invention, and the line number of photodiode is by certainty of measurement and follow adjacent two the photodiode spacings decision of direction.The multiplication factor of optical imaging system can be 1 times, also can be any greater than 1 multiple.The characteristics of second embodiment of the invention are: each row of photodiode is equidistantly staggered in the ccd image sensor, measured object is carried out monolateral measurement, be that measured object has only part (end) to be imaged on the ccd image sensor, can carry out high-acruracy survey the large-size measurand.Measurement data is obtained by the number of the photodiode that is blocked on b value and the ccd image sensor among Figure 11, and measured object projected length on the ccd image sensor.
For determining of m, a and b in the monolateral measurement of embodiment 2:
In embodiment 2, at first use resolution to come b is demarcated less than the microspindle calibrator of 1 μ m, and calibration.
Read first row element among the array D earlier, read from first first element of row earlier,, find wherein n not obvious sensitization of element up to first last element of row, and those two light sensitive diode positions of n+1 the obvious sensitization of element, and demarcate it.Then, read second row among the group D, seek with first row in the identical array element of photodiode columns demarcated, judge and their sensitization situation, then continue to read the next line data, otherwise demarcation m as identical with first row, number be i as current line, then:
m＝i-1
In array D the one row element, if the pairing array element columns of the photodiode of first not obvious sensitization is n
1, and the pairing array element columns of the photodiode of last not obvious sensitization is n
2, H is in the heart a distance in capable adjacent two photodiodes of photodiode, then:
a＝H×(n
2-n
1)
L＝[a+b+(H/N)(m-1)]/M
Embodiment 3:
As shown in figure 12, be the ccd image sensor optical imagery measurement mechanism schematic diagram of third embodiment of the invention.Third embodiment of the invention mainly comprises the equidistant wrong row's ccd image sensor 8 of two photodiodes, optical lens group 6, and light source 5, signal processing circuit 4 and measurand 7 constitute.Wherein b represents in the measuring process, and the distance between the mutually close two ends of ccd image sensor 8a and ccd image sensor 8b is certain value.Ccd image sensor 81a and ccd image sensor 81b put along same rectilinear direction in measurement mechanism.Each photodiode of ccd image sensor is capable equidistantly staggered in the third embodiment of the invention, and the line number of photodiode is by certainty of measurement and follow adjacent two the photodiode spacings decision of direction.The multiplication factor of optical imaging system can be 1 times, also can be any greater than 1 multiple.The characteristics of third embodiment of the invention are: each row of photodiode is equidistantly staggered in the ccd image sensor, and measured object is carried out bilateral measurement, can carry out high-acruracy survey to the large-size measurand.Measurement data is obtained by the number of the photodiode that is blocked on b value and the ccd image sensor among Figure 12, and the measured object projected length is specifically judged on the ccd image sensor.
For m in the monolateral measurement of embodiment 3
1(m
2), b, b
1, b
2Determine:
In embodiment 3, at first use resolution to come b is demarcated less than the microspindle calibrator of 1 μ m, hand over calibration.
The photodiode sensitization data of ccd image sensor 1201a deposits array D in
1, the photodiode sensitization data of ccd image sensing 1201b deposits array D in
2
Read array D earlier
1In first row element, read earlier from first first element of row, up to first last element of row, find wherein n not obvious sensitization of element, and those two light sensitive diode positions of n+1 the obvious sensitization of element, and demarcate it.Then, read group D
1In second row, seek with first row in the identical array element of photodiode columns demarcated, judge and their sensitization situation, then continue to read the next line data, otherwise demarcation m as identical with first row
1, number be i as current line, then:
m
1＝i-1
Read array D again
2In first row element, read earlier from first first element of row, up to first last element of row, n not obvious sensitization of element in finding, and those two light sensitive diode positions of n+1 the obvious sensitization of element, and demarcate it.Then, read array D
2In second row, seek with first row in the identical array element of photodiode columns demarcated, judge and their sensitization situation, then continue to read the next line data, otherwise demarcation m as identical with first row
2, number be j as current line, then:
m
2＝j-1
At array D
1In first row element, if the total number of the pairing array element of the photodiode of not obvious sensitization is n
1, then:
b
1＝H×n
1。
At array D
2In first row element, if the total number of the pairing array element of the photodiode of not obvious sensitization is n
2, then:
b
2＝H×n
2。
L＝[b+b
1+b
2+(H/N)(m
1-1)+(H/N)(m
2-2)]/M
Embodiment 4:
As shown in figure 13, be along the equidistant staggered structural representation of its length direction with a plurality of traditional wire array CCD image sensors.Following the distance that staggers between each linear array CCD image transducer of direction by certainty of measurement and follow adjacent two the photodiode spacings decision of direction, is the linear array CCD image sensor groups with so a plurality of equidistant wrong row's linear array CCD image scales.In Figure 13, linear array CCD image sensor groups 8 is made up of linear array CCD image transducer 8,8,8c, 8d, and the linear array CCD image number of sensors of forming linear array CCD image sensor groups 8 as required can be any greater than 1 integer.Ccd image sensor part among first embodiment of the invention, second embodiment, the 3rd embodiment is replaced with this linear array CCD image sensor groups respectively, follow the equidistant staggered structure of photodiode row among the similar first embodiment of the invention of direction, second embodiment, the 3rd embodiment with formation.The multiplication factor of optical imaging system can be 1 times, also can be any greater than 1 multiple.The characteristics of fourth embodiment of the invention are: adjacent C CD imageing sensor is equidistantly staggered in the linear array CCD image sensor groups.Can replace the ccd image sensor in the third embodiment of the invention by the equidistant wrong winding displacement array CCD image sensor group in the fourth embodiment of the invention respectively, and obtain corresponding measurement mechanism.
Claims (6)
1, a kind of ccd image sensor, constitute by staggered a plurality of photodiodes capable (1), each photodiode capable (1) has correspondence to be arranged into the charge transfer device (2) of delegation, photodiode capable (1) is connected with charge transfer device (2) by reading grid (3), the output of all charge transfer devices (2) is connected with control circuit (4), the output of control circuit (4) is connected with signal processing circuit, it is characterized in that on the direction that N photodiode capable (1) be expert at by distance H
1Equidistantly staggered, H
1=H/N, H are the distance at adjacent two electric diode centers of photodiode capable (1), and N is the photodiode line number.
2, ccd image sensor according to claim 1, it is characterized in that said signal processing circuit is made of image collecting device and microcomputer, the output of the input connection control circuit (4) of the amplification filtering circuit of image collecting device, the output of amplification filtering circuit connects the A/D change-over circuit, the A/D change-over circuit is connected with microprocessor with the memory of microcomputer respectively, and microprocessor is connected with memory, outlet terminal.
3, a kind of high accuracy linear dimension measuring device that comprises claim 1 or 2 described ccd image sensors, it is characterized in that constituting by layout successively by light source (5), optical lens group (6), measurand (7) and ccd image sensor (8), the edge projection of measurand (7) is positioned on the conplane ccd image sensor (8) at one or two, the capable axis normal of photodiode of edge projection line and ccd image sensor (8) or intersect.
4, a kind of method of the measurement measurand linear dimension based on the described device of claim 3, its step is as follows:
(1) measurand (7) is placed between optical lens group (6) and the ccd image sensor (8), the capable intersect vertical axis of photodiode of measurand projection line and ccd image sensor (8), and its two edges projection is all on transducer (8),
(2) determine that the measured object edge drops between first photodiode of ccd image sensor (8) on capable n and n+1 the pixel, n pixel do not have obvious sensitization, n+1 the obvious sensitization of pixel, and measure all photodiode line number m that possesses above-mentioned condition
1, determine that according to same method all n pixel that measured object opposite side edge drops on ccd image sensor (8) do not have obvious sensitization, the line number m of n+1 the obvious sensitization of pixel
2,
(3) measure ccd image sensor (8) and go up the total length a between the photodiode that does not have obvious sensitization of blocking because of measured object (7), a=H * (n
2-n
1), n
1Be the array element columns of the photodiode correspondence of first not obvious sensitization, n
2Be the pairing array element columns of the photodiode of last not obvious sensitization, H is the pixel spacing that transducer follows direction.
(4) calculate the measurand length L:
L＝[a+(H/N)(m
1-1)+(H/N)(m
2-2)]/M
H is the pixel spacing that ccd image sensor follows direction
N is total line number of photodiode
M is the measuring system optical magnification.
5, a kind of method of linear dimension of the measurement measured object object based on the described device of claim 3, its step is as follows:
(1) measurand (7) is placed between optical lens group (6) and the ccd image sensor (8), the capable axis normal of photodiode of the projection line of measurand and ccd image sensor (8), and the one edge projection is on transducer (8),
(2) determine between n pixel and n+1 pixel of measurand (7) edge projection on first photodiode of transducer (8) is capable, n pixel do not have obvious sensitization, n+1 the obvious sensitization of pixel, and measure the photodiode line number m that possesses above-mentioned condition
(3) measure ccd image sensor (8) and go up the total length a between the photodiode that does not have obvious sensitization of blocking because of measured object (7), measure the distance b of measurand away from an end and close measurand one end of transducer (8) of transducer (8), b demarcates a=H * (n with the little 1 μ m microspindle calibrator of resolution
2-n
1), H is the pixel spacing that transducer follows direction, n
1Be the array element columns of the photodiode correspondence of first not obvious sensitization, n
2Be the array element columns of the photodiode correspondence of last not obvious sensitization,
(4) calculate the measurand length L:
L=[a+b+ (H/N) is (m-1)]/M or
L＝[a+b+(H/N)(m-2)]/M
N is total line number of photodiode,
M is an optical magnification.
6, a kind of method of the measurement measurand linear dimension based on the described device of claim 3, its step is as follows:
(1) measurand is placed between optical lens group (6) and the ccd image sensor (8), the capable intersect vertical axis of photodiode of measurand projection line and two transducers (8) in the same plane, and its two edges are projected on the different transducer (8)
(2) determine that measurand one lateral edges drops between first photodiode of first sensor (8) n and n+1 pixel on capable, the n pixel does not have obvious sensitization, the photodiode line number m that first sensor possesses above-mentioned condition is measured in the obvious sensitization of n+1 pixel
1,, measure the opposite side edge of measurand and count m in the photodiode institute that the last projection of second transducer (8) makes second transducer (8) possess above-mentioned condition according to Same Way
2,
(3) measure two sensors (8) mutually near the distance b of end, first, second transducer (8) is gone up the photodiode length b that does not have obvious sensitization because of blocking of measured object
1, b
2, b demarcates with the microspindle calibrator, b
1, b
2Equal H * (n
2-n
1) value, H is that transducer follows direction pixel spacing, n
1Be the array element columns of the photodiode correspondence of first not obvious sensitization, n
2Be the array element columns of the photodiode correspondence of last not obvious sensitization,
(4) calculate the measurand length L
L＝[b+b
1+b
2+(H/N)(m
1-1)+(H/N)(m
2-2)]/M
N=is total photodiode line number of two transducers (8).
M is an optical magnification.
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Assignee: Chengdu Chengliang Tools Group Co., Ltd. Assignor: Xihua University Contract fulfillment period: 2008.9.10 to 2013.9.10 contract change Contract record no.: 2009510000033 Denomination of invention: CCD image sensor and high accuracy linear dimension measuring device and measuring method thereof Granted publication date: 20080227 License type: Exclusive license Record date: 2009.9.15 |
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