CN1603778A - High and low temperature recycle unit with wide temperature range - Google Patents
High and low temperature recycle unit with wide temperature range Download PDFInfo
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- CN1603778A CN1603778A CN 200410067891 CN200410067891A CN1603778A CN 1603778 A CN1603778 A CN 1603778A CN 200410067891 CN200410067891 CN 200410067891 CN 200410067891 A CN200410067891 A CN 200410067891A CN 1603778 A CN1603778 A CN 1603778A
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Abstract
It is temperature recycle apparatus from high to low with large temperature range, which is main applied in man-made satellite infrared detector environment strain filtering. The apparatus comprises one main system, a slave system and a PC machine. The main system is responsible for temperature recycle and its control, while the slave system is for automatic compensation of liquid nitrogen of the cold environment of main system. The apparatus can record heat environment temperature and display the recycle times on the control panel.
Description
Technical field:
The present invention relates to a kind of reliability testing and environmental stress screening equipment of semiconductor devices, especially be suitable for the cryogenic semiconductor device reliability test of satellite infrared detector for example etc.Temperature range is to 300 ℃ below-173 ℃.
Background technology:
Because the life problems of sterlin refrigerator, the satellite infrared detector has adopted the service intermittent mode in some cases, so they can stand thousands of times the temperature cycles of from normal temperature (about 20 ℃) to low temperature (≤-173 ℃) in space.For this reason, must carry out reliability demonstration on the ground earlier, a large amount of engineering practices prove that temperature cycles is the most effective filtering mode in the environmental stress screening, and the number of faults that it excited accounts for the over half of environmental stress screening total failare number.The high and low temperature circulating device of wide temperature range can adapt to this requirement.By simulation refrigeration machine service intermittent mode, utilize temperature cycling test to verify and improve the reliability of long wave detector in the satellite use, concrete research contents comprises the quality of welding spot that detects each lead-in wire, and the expansion coefficient of investigating different materials is to influence of device reliability or the like.
Sterlin refrigerator can reach below-173 ℃, if still be used for doing the ground test of infrared eye, each test can only be tested a device, and efficient is low, the cost height.Present other semiconductor devices temperature cycles equipment or can not reach below-173 ℃, or can not realize temperature cycles under the vacuum condition, or need manpower to reach the manual operations of some months can not accomplish that temperature follows the robotization of test.
Summary of the invention:
In sum, how to overcome the shortcoming of prior art, make it to reach below the low temperature-173 ℃, can realize the temperature cycles under the vacuum condition again, and high efficiency is a technical matters to be solved by this invention, therefore, the purpose of this invention is to provide a kind of high and low temperature circulating device of wide temperature range, particularly be suitable for the performance test of the infrared eye that artificial satellite is used.
Technical solution of the present invention is as follows:
High and low temperature circulating device according to a kind of wide temperature range of the present invention comprises:
One has the main system of temperature cycles function, it contains a vacuum tank, be located at its inner and be arranged in order sub-cylinder of liquid nitrogen that cold temperature source is provided from top to bottom, the one heat transfer platform and that can put tested device provides the warm table of high temperature source, and below this vacuum tank, establish a stepper motor, one sleeve connects this heat transfer platform and vertically passes warm table and vacuum tank and go to the bottom and connect this sleeve and stepper motor by a screw rod, this stepper motor is controlled just to be changeed, and makes sleeve promote the heat transfer platform and rises and go to the bottom close contact and step motor stop and make tested device be in low temperature environment with the sub-cylinder of liquid nitrogen; Afterwards, the controlled counter-rotating of stepper motor, sleeve descends and drives heat transfer platform and warm table close contact and stall, makes tested device be in hot environment; This stepper motor connects data through a motor driver and comes truck; Each the only tested device that is positioned on this heat transfer platform connects a thermometric platinum resistance; The thermometric platinum resistance is established in nearly bottom down and nearly exit at the sub-cylinder of this liquid nitrogen respectively, these above-mentioned several platinum resistance all connect one resistance/voltage transformation module respectively and with this data acquisition card connection;
One for temperature cycles provide low temperature environment from system, its the female cylinder of liquid nitrogen, woven hose one end that contains tool insulated enclosure lid passes the positon of near bottom that gland bonnet reaches the female cylinder of this liquid nitrogen, and establish a temperature detecting resistance, the other end then pass on this vacuum tank the top and the nearly bottom of stretching into the sub-cylinder of this liquid nitrogen in the platinum resistance place, one gas-liquid arm passes the cylinder mouth that the sealing lid extends the female cylinder of liquid nitrogen, and its upper end closed and a branch connect a solenoid valve is connected an aerostatic press with another branch escape pipe; Same this platinum resistance becomes circuit to be connected with resistance/voltage transformation module; An and PC, resident automatic infusion nitrogen control program and stepper motor to-and-fro movement control program in it, and connect data collecting card with bus, gather the resistance/voltage data of the thermometric platinum resistance of joining and carry out of the environment temperature cycle control of stepper motor to-and-fro movement control program tested device with tested device; Gather the resistance/voltage data of the temperature detecting resistance on liquid nitrogen cylinder and the sub-cylinder, and also carry out automatically defeated nitrogen control program and carry out automatic liquid feeding nitrogen.
Further, said high temperature source is an ambient temperature, and cold temperature source is≤-173 ℃;
Said warm table is made of copper, and the sealing and in establish two 80 watts of electric heating sheets, be provided with the thermometric platinum resistance outward, and external warm table temperature display module, PID temperature control module, SSR solid-state relay and the 30V direct supply that becomes circuit to connect successively, and connect described platinum resistance and the 30V direct voltage source inserts this warm table by the PID temperature control module;
Preferably, the bottom of the sub-cylinder of described liquid nitrogen is to be made by smooth copper plate, and warm table is that smooth annular copper constitutes by end face;
Preferablely be, also be provided with protective device, it comprise have above the outer sleeve of vacuum tank one with its metal contact that is connected by the insulating epoxy plate and below vacuum tank a pair of fixing position-limiting spring leaf, and this metal contact becomes circuit to be connected with position-limiting spring leaf with a holding circuit module;
Equally preferably, also be provided with cycle index counting and display unit, it comprises the output terminal that connects data collecting card, and is connected to the cycle index counting module of circuit connection and the gauge outfit on the control panel successively;
Herein, the temperature of the described high temperature source temperature that also can be 300 ℃ and cold temperature source for≤-173 ℃.
The present invention has the following advantages: 1, the computer-controlled body temperature circulation system, the automatic infusion nitrogen device of safety and stability, add device hardware protection system and effectively avoided the loss that unexpected situation is brought in the control procedure, realize the robotization of equipment set operation, needed operating personnel to nurse hardly; 2, temperature range is very wide, below-173 ℃ to 300 ℃; 3, can test at least 4 devices simultaneously; 4, the temperature cycling test under the vacuum condition.
Description of drawings:
Fig. 1 is a system summary structure schematic diagram of the present invention;
Fig. 2 is the resistance/voltage transitions schematic diagram among the present invention;
Fig. 3 is the holding circuit hardware elementary diagram among the present invention;
Fig. 4 is the PID temperature control module synoptic diagram among the present invention;
Fig. 5 is the temperature cycles number of times counting module synoptic diagram among the present invention;
Fig. 6 is the step motor control module diagram among the present invention;
Fig. 7 is the main system control procedure synoptic diagram among the present invention;
Fig. 8 is the process flow diagram of the automatic infusion nitrogen software control procedure among the present invention;
Fig. 9 is the process flow diagram of the stepper motor software control procedure among the present invention;
Figure 10 is a device temperature circulation experiment record synoptic diagram of the present invention.
Embodiment:
Provide one of the present invention embodiment preferably according to Fig. 1～Fig. 9 below, and in conjunction with description to embodiment, further provide ins and outs of the present invention, enable to illustrate better originally bright architectural feature and functional characteristics, but not to be used for limiting the scope of the invention, therefore, all conforming with, all should be included within the category of the present invention in the spirit of the scope of the invention and the embodiment of similar variation.
See also shown in Figure 1ly, present device constitutes by main system with from system.Main system comprises: vacuum tank and heat transfer mechanism, temperature test circuit and computer screen demonstration, drive of motor and control gear, electric heater and control and display screen, cycle index counting display screen and equipment protecting equipment; Comprise the female cylinder of liquid nitrogen, the sub-cylinder of liquid nitrogen, the empty cylinder warning device of the female cylinder of liquid nitrogen and corresponding automatic infusion nitrogen control from system.Independently control with the PID temperature control module except electric heater, outside the cycle index counting module is independently controlled and holding circuit independently controls, the test of being left and control and all finish by data collecting card and peripheral circuit thereof by PC.
Concrete condition is as follows:
(1) main system part
A. as shown in Figure 1 and Figure 4, electric heater and control and display screen: PID temperature control module 401 among Fig. 1, warm table temperature display module 402, two 80W electric heating sheets 407,408 are closedly fixed 406 li of copper warm tables, post platinum resistance 405 on the warm table 406 and be used for reflecting the warm table variation of temperature, the resistance of platinum resistance changes with the temperature variation and the PID temperature control setting of warm table 406.Among Fig. 4, the C4 end and the D4 end of PID temperature control module 401 are introduced platinum resistance 405, E4 end and F4 termination are gone into the 220V AC power, and output terminal G4 and H4 output high level (5V) and low level (0V) are in order to control SSR solid-state relay 403, and SSR seals in the circuit of 30V direct supply 404.Just can give warm table 406 heating and stop heating by the break-make of control SSR solid-state relay 403 like this.
B. as depicted in figs. 1 and 2, temperature test circuit and display screen: among Fig. 1, platinum resistance 803 is used for monitoring whether the female cylinder 813 of liquid nitrogen has liquid nitrogen 810, and platinum resistance 805 is used for surveying and monitors whether the sub-cylinder 809 of liquid nitrogen has liquid nitrogen, and platinum resistance 804 is used for monitoring whether sub-cylinder 809 is filled it up with soon.Several platinum resistance 107 are used for monitoring each measured device 108 temperature over time.Because in the liquid nitrogen cylinder, with subsurface platinum resistance resistance obvious variation can take place on the liquid level, platinum resistance also can vary with temperature and very fast variation in addition, so platinum resistance can be monitored temperature value everywhere basically.Platinum resistance 107,803,804,805 are transformed into voltage signal by resistance/voltage conversion circuit shown in Figure 2 (being the module 22 among Fig. 1) with its resistance, are input to data collecting card 99 from analog port, and data collecting card is set up with PC and is communicated by letter.By the LabView software programming, can on the PC screen, see 804,805 magnitude of voltage that reflects and temperature values by platinum resistance 107,803.
C. as Fig. 1 and shown in Figure 6, drive of motor and control gear: among Fig. 1, stepper motor 103, motor driver 102, driver direct current 24V power supply 101, screw rod 104, sleeve 110, heat transfer platform 109.When data collecting card 99 provides the voltage data of each road analog input to PC after, by software programming, allow data collecting card 99 output high-low levels come control step motor 103 to turn round on request to motor driver 102, among Fig. 6, the C6 of driver 102 and D6 termination come from PC is issued driver by data collecting card 99 rotating order, E6 and F6 termination are received the step-by-step impulse order, G6 and H6 termination 24V direct supply 101, and direct supply is got by AC-DC by AC power 11.The output terminals A 6 and the A6 of driver 102, B6 and B6 connect the winding wire of two-phase stepping motor 103 respectively.Stepper motor 103 drives screw rod 104 motions, and when having limited the revolution of the sleeve 110 that cooperates with screw rod, sleeve 110 can move up and down.
D. as Fig. 1 and shown in Figure 5, cycle index counting and display screen: motor driver 102 is incorporated into C5 shown in Figure 5, D5 end simultaneously with the high-low level of control step motor 103 positive-negative rotation states among Fig. 1.E5, F5 are the 5V power input of cycle index counting module 501, when stepper motor 103 rotatings once, once low level is to the counter-rotating of high level for the positive-negative rotation state control level, and counter adds one, and the cycle index reading shows by the gauge outfit on the control panel 502.
E. as shown in Figure 1, vacuum tank and heat transfer mechanism: vacuum tank 808 is as the sub-cylinder 809 of the liquid nitrogen of cold environment, and the bottom of sub-cylinder is to be made of smooth copper plate 811, and the end face of annular copper warm table 406 is smooth.Measured device 108 is fixed on the heat transfer platform 109, and several platinum resistance 107 are separately fixed on this each device 108.When heat transfer platform 109 was adjacent to warm table 406 by motor-driven, measured device 108 was along with warm table heats up; When heat transfer platform 109 is adjacent to cold junction 811, realize cooling.
F. as shown in figures 1 and 3, equipment protecting equipment: go beyond the scope in order to prevent motor 103 motions, must add protective device to equipment.Among Fig. 1, fix a metal contact 105 on sleeve 110, metal contact 105 is connected with the epoxy plate of sleeve 110 usefulness insulation.Fixing pair of metal position-limiting spring leaf 106 below vacuum tank 808, position-limiting spring leaf 106 be with apparatus insulated, but this a pair of metal positive stop spring plate 106 is to bend two head with same sheet metal.Metal contact 105 and lead of positive stop spring plate 106 top each soldering insert the A and the B end of holding circuit module 33.Among Fig. 3, B termination 5V direct supply 301, dc solid-state relay 303, U301 are a phase inverter, select suitable resistance R 301, resistance R 302 and capacitor C 301.
(2) from components of system as directed
As shown in Figure 1, the female cylinder 813 of liquid nitrogen is the nitrogen storage tank of a volume greater than the sub-cylinder 809 of liquid nitrogen, do a gland bonnet 812 with thermal insulation material, pass gland bonnet 812, woven hose 806 reaches from the place of about 2 centimetres in the female cylinder bottom of liquid nitrogen portion, and platinum resistance 803 reaches the place from about 2 centimetres in the female cylinder bottom of liquid nitrogen portion.Gas-liquid arm 814 passes gland bonnet 812 and passes slightly, and one of gas-liquid arm 814 connects solenoid valve 807, and another connects the escape pipe 802 of aerostatic press 602.810 is liquid nitrogen.
The other end of woven hose 806 reaches from about 1 centimetre place, liquid nitrogen cylinder 809 bottoms, platinum resistance 803 and 804,805 is used for monitoring the position of female cylinder 813 and 809 li liquid nitrogen 810 of sub-cylinder respectively, these three platinum resistance all are introduced into resistance/voltage module 22, read in computing machine by data collecting card 99, so that realize the automatic control that computing machine is carried liquid nitrogen 810.
Below in conjunction with accompanying drawing, the specific embodiment of the present invention is described in further detail:
Finish the function of temperature cycles from main system as can be seen shown in Figure 7.The resistance of the platinum resistance 107 of installing on measured device 108 is along with the temperature variation of measured device 108; change the negative voltage signal of variation into by temperature/voltage conversion circuit shown in Figure 3; when for example process 301 platinum resistance 107 are as cold as-172.5 ℃ with measured device 108; voltage is output as-0.319V; through process 302; motor just changes → process 303, and the heat transfer platform is adjacent to warm table, process 304; caging system protection → process 305; when motor stall → process 306, platinum resistance 107 were heated to 19.5 ℃ with measured device 108, voltage was output as-1.133V; afterwards; process 307, motor counter-rotating → process 308, the heat transfer platform is adjacent to the liquid nitrogen cylinder bottom; process 309; measured device drops to below-173 ℃ in the caging system protection → process 310, motor stall → process 301,20 minutes.Resistance shown in Figure 1/voltage conversion circuit module 22 is responsible for each road platinum resistance 107 is changed into the negative voltage signal of variation.
Warm table 406 is controlled by PID temperature control module 401 as shown in Figure 4, and the control temperature of this temperature control module 401 is set at 40 ℃.Like this, as shown in Figure 1,808 li of vacuum tanks, when the heat transfer platform 109 that is loaded with measured device 108 is adjacent to warm table 406, this warm table 406 gives the heat transfer platform 109 heating by heat conduction, when being heated to measured device 108 temperature when being 19.5 ℃, the voltage Vi0 that produces because of platinum resistance 107 is-1.133V, be input to data collecting card 99 by described module 22, PC reads in this data, by step motor control program 900 as shown in Figure 9, allow data collecting card 99 receive the C6 of motor driver shown in Figure 6 102 from the 0th digital channel output low level, the D6 end presets motor 103 and is just changeing, thereby heat transfer platform 109 is moved upward, data collecting card 99 makes motor 103 rotate from the 1st digital channel output sequence square wave (high level is+5V that low level is 0V) pulse simultaneously.By experiment, know that motor 103 runnings make heat transfer platform 109 reach assigned address and need 2 minutes, because the relation of thermograde, measured device 108 can continue be heated to 20 ℃ by the high slightly heat transfer platform 109 of temperature in 1 minute, and the measured device temperature remains between 20～21 ℃ substantially in remaining 1 minute like this.
When moving to, heat transfer platform 109 is adjacent to 809 ends of the sub-cylinder of liquid nitrogen during cold copper coin 811, measured device 108 reduces along with the temperature of heat transfer platform 109, when the temperature that drops to measured device 108 is-172.5 ℃, the voltage Vi0 that produces because of platinum resistance 107 is-0.319V, by step motor control program 900, execution in step 901, program start, execution in step 902, the voltage Vio of sampler temperature correspondence, execution in step 903, Vio＜-1.133V, execution in step 904, allow data collecting card 99 from the 0th digital channel output high level, preset motor 103 counter-rotatings, thereby heat transfer platform 109 is moved downward, while execution in step 907, data collecting card 99 makes motor 103 rotate from the 1st digital channel output sequence square-wave pulse.Equally, because the relation of thermograde, measured device can continue be as cold as-173 ℃ by the low slightly heat transfer platform of temperature in 1 minute, and device temperature remains between-173～-174 ℃ substantially in remaining 1 minute like this.Fig. 9 represents the flow process of step motor control program 900.
Execution in step 905, Vio＞-0.319V, the high-low level of the 0th digital channel output of data collecting card 99 is introduced in C5, the D5 end of cycle index counting module 501 as shown in Figure 5 simultaneously, when level reverses from low to high, counting module 501 will be counted and add one, and be presented on the gauge outfit 502, this process stepper motor 103 has been finished a rotating, and promptly device has been finished heating and cooling circulation.
Warm table 406 design temperatures are 40 ℃, when its temperature is lower than 40 ℃, platinum resistance 405 temperature also can and then drop to below 40 ℃, at this moment the relay output end of PID temperature control module 401 output high level, the output terminal conducting of relay 403, power supply 404 gives heating plate 407,408 power supplies, the heating plate heating, thus warm table 406 is heated up; When the warm table temperature is higher than in 40 ℃, the relay output end output low level of PID temperature control module 401, power supply 404 stops to heating plate 407,408 power supplies.Make warm table 406 temperature basicly stable like this at 40 ℃ that set.As shown in Figure 4.
Under normal condition, metal contact 105 is not run into positive stop spring plate 106 with being adjacent to the sub-cylinder bottom plate 811 of liquid nitrogen to be adjacent to warm table with heat transfer platform 109, is the initial sum terminating point of metal contact 105 (or sleeve 110) effective travel.Effective travel is in the centre of a pair of positive stop spring plate distance, and wherein, following shell fragment hangs down 1 millimeter than the starting point of effective travel, and last shell fragment is higher 1 millimeter than the terminating point of effective travel.As shown in Figure 1.
When motor 103 misoperations make that sleeve 110 exceeds effective travel; will inevitably make metal contact 105 touch positive stop spring plate 106; as shown in Figure 3; A; B two input ends are equivalent to link to each other with a lead; be in conducting state; at this moment relay 303 input ends are low level; general supply 11 disconnects; several modules of general supply 11 services are step motor control modules A 3; Gas Compressor Control module B3; solenoid control module C3; resistance/voltage conversion circuit module 22; the female cylinder 813 empty cylinder alarm module E3 of liquid nitrogen all cut off the power supply; the equipment major part is in off-position; thereby realized the position limitation protection of motor 103 motions, protected the safety of equipment.But the temperature cycles counting module 501 of this moment and demonstration thereof are still worked, thereby know which circulation equipment work has arrived.Otherwise when move distance does not exceed effective travel, metal contact 105 can not touch metal clips 106, and A, B two ends disconnect, and relay 303 input ends are high level, general supply 11 conductings, and equipment is in running order.
As can be seen from Figure 8, mainly be to provide a low temperature environment to temperature cycles from system in order to continue.Experiment show when the voltage Vi3 that produces because of platinum resistance 805＜-during 0.225V, the liquid nitrogen that the sub-cylinder of liquid nitrogen is 808 li soon consumes dried; When the voltage Vi4 that produces because of platinum resistance 804＞-during 0.24V, the liquid nitrogen that the sub-cylinder of liquid nitrogen is 808 li is soon filled it up with.Automatic infusion control program 200, when step 201, program start, and step 202 are the criterion that adds liquid nitrogen with the former, step 205 is the criterion that stops to add liquid nitrogen with the latter.Step 202 when Vi3＜-during 0.225V, the 3rd digital channel output of step 203 data collecting card 99 high level, relay 601 output terminal conductings, aerostatic press 602 work, the 4th passage output low level of step 204, the output terminal of relay 801 disconnects, solenoid valve 802 cuts out, and begins to add liquid nitrogen; Be step 205, when Vi4＞-during 0.24V, step 206, the 3rd digital channel output low level aerostatic press 602 of data collecting card 99 quits work, step 207, the 4th digital channel output high level solenoid valve 802 opened, and stops to add liquid nitrogen.Up to execution in step 202 again next time, Vi3＜-during 0.225V, just begin to add once more liquid nitrogen and when execution in step 205, when Vi4＞-during 0.24V, just stop to add liquid nitrogen once more, so circulate and low temperature environment be provided.
Experiment shows, when the voltage Vi5 that produces because of platinum resistance 803＜-during 0.25V, the liquid nitrogen that the female cylinder of liquid nitrogen is 813 li soon is drained, as shown in Figure 1, data collecting card 99 output high level, solid-state relay 701 output terminal conductings, audible-visual annunciator 702 work remind the operator to add liquid nitrogen toward female cylinder 813.
Device pin on the heat transfer platform is contacted, and draw vacuum tank by the vacuum socket, can monitor in real time the electrical characteristics of pin by computing machine or manually-operated with lead.
The high low temperature circulation track of present embodiment is expressed by empirical curve shown in Figure 10.
Claims (7)
1, a kind of high and low temperature circulating device of wide temperature range comprises:
One has the main system of temperature cycles function, it contains a vacuum tank (808), be located at its inner and be arranged in order sub-cylinder of liquid nitrogen (809) that cold temperature source is provided from top to bottom, the one heat transfer platform (109) and that can put tested device (108) provides the warm table (406) of high temperature source, and establish a stepper motor (103) in this vacuum tank (808) below, one sleeve (110) connects this heat transfer platform (101) and passes vertically that warm table (406) and vacuum tank (808) are gone to the bottom and connect this sleeve (110) and stepper motor (103) by a screw rod (104), this stepper motor (103) is controlled just to be changeed, and makes sleeve (110) promote heat transfer platform (109) and rises and go to the bottom close contact and stepper motor (103) stall and make tested device (108) be in low temperature environment with the sub-cylinder of liquid nitrogen (809); The controlled counter-rotating of stepper motor (103), sleeve (110) descend and drive heat transfer platform (101) and warm table (406) close contact and stall, make tested device (108) be in hot environment;
This stepper motor (103) connects data through a motor driver (102) and comes truck (99);
Each the only tested device (108) that is positioned on this heat transfer platform (101) connects a thermometric platinum resistance (107); Thermometric platinum resistance (805,804) is established in nearly bottom down and nearly exit at the sub-cylinder of this liquid nitrogen (809) respectively, and this platinum resistance (107,805,804) connects one resistance/voltage transformation module (22) and is connected with this data collecting card (99);
One for temperature cycles provide low temperature environment from system, it contains the female cylinder (813) of liquid nitrogen of the adiabatic gland bonnet of a tool (812), one woven hose (806) one end passes the positon of near bottom that gland bonnet (812) reaches the female cylinder of this liquid nitrogen (813), and establish a temperature detecting resistance (803), the other end passes then that this vacuum tank (808) is gone up the top and the nearly bottom of stretching into the sub-cylinder of this liquid nitrogen (809) is located in platinum resistance (805), one gas-liquid arm (814) passes the cylinder mouth that sealing lid (812) extends the female cylinder of liquid nitrogen (813), and its upper end closed and a branch connect a solenoid valve (807) is connected an aerostatic press (602) with another branch escape pipe (803); This platinum electricity (803) becomes circuit to be connected with this platinum resistance/voltage transformation module (22); An and PC, automatic infusion nitrogen control program (200) and stepper motor to-and-fro movement control program (900) have been write, and connect data collecting card (99) with bus, gather the resistance/voltage data of thermometric platinum resistance (107) and carry out the environment temperature cycle control of stepper motor to-and-fro movement control program (900) tested device (108); Gather the resistance/voltage data of temperature detecting resistance (803,804,805), and also carry out automatically defeated nitrogen control program (200) and carry out automatic liquid feeding nitrogen.
2, the high and low temperature circulating device of wide temperature range according to claim 1 is characterized in that, said high temperature source is an ambient temperature, and cold temperature source is≤-173 ℃.
3, according to the high and low temperature circulating device of claim 1 or 3 described wide temperature ranges, it is characterized in that, said warm table (406) is made of copper, and the sealing and in establish two 80 watts of electric heating sheets (407,408), be provided with thermometric platinum resistance (405) outward, and external warm table temperature display module (402), PID temperature control module (401), SSR solid-state relay (403) and the 30V direct supply (404) that becomes circuit to connect successively, and insert this warm table (406) by PID temperature control module (401) connection platinum resistance (405) and 30V direct voltage source.
4, the high and low temperature circulating device of wide temperature range according to claim 1 is characterized in that, the bottom of the sub-cylinder of described liquid nitrogen (809) is to be made by smooth copper plate (811), and warm table (406) is that smooth annular copper constitutes by end face.
5, the high and low temperature circulating device of wide temperature range according to claim 1; it is characterized in that; also be provided with protective device; it comprise be positioned at be provided with above the outer sleeve (110) of vacuum tank (808) one with its metal contact that is connected by the insulating epoxy plate (105) and a pair of fixing position-limiting spring leaf (106), and this metal contact (105) is connected with position-limiting spring leaf (106) and a holding circuit module (33) one-tenth circuit.
6, the high and low temperature circulating device of wide temperature range according to claim 1, it is characterized in that, also be provided with cycle index counting and display unit, it comprises the output terminal that connects data collecting card (99), and is connected to the gauge outfit (502) on cycle index counting module (501) and the control panel successively.
7, the high and low temperature circulating device of wide temperature range according to claim 1 is characterized in that, the temperature that the temperature of described high temperature source also can be 300 ℃ and cold temperature source for≤-173 ℃.
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| CNB2004100678919A CN100359310C (en) | 2004-11-05 | 2004-11-05 | High and low temperature recycle unit with wide temperature range |
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| CNB2004100678919A CN100359310C (en) | 2004-11-05 | 2004-11-05 | High and low temperature recycle unit with wide temperature range |
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| CN100401081C (en) * | 2006-01-17 | 2008-07-09 | 中国科学院上海技术物理研究所 | Heat conduction mechanism of high and low temperature circulating device with wide temperature range |
| CN102662141A (en) * | 2012-06-04 | 2012-09-12 | 扬州扬杰电子科技股份有限公司 | Method for evaluating reliability of semiconductor device |
| CN102890006A (en) * | 2012-10-24 | 2013-01-23 | 上海交通大学 | High/low temperature space environment simulating container with high temperature change rate |
| CN110412441A (en) * | 2019-06-24 | 2019-11-05 | 深圳市森美协尔科技有限公司 | Vacuum high/low temperature semiconducter device testing probe station and semiconducter device testing method |
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| CN1077029A (en) * | 1992-04-02 | 1993-10-06 | 上海制冷设备厂 | Energy-saving high-low temperature test equipment |
| JP3880448B2 (en) * | 2002-05-10 | 2007-02-14 | エルピーダメモリ株式会社 | Semiconductor test apparatus and semiconductor test method |
| CN2613043Y (en) * | 2003-04-15 | 2004-04-21 | 中国科学院上海技术物理研究所 | Infrared detector aging device with automatic liquid nitrogen supply |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100401081C (en) * | 2006-01-17 | 2008-07-09 | 中国科学院上海技术物理研究所 | Heat conduction mechanism of high and low temperature circulating device with wide temperature range |
| CN102662141A (en) * | 2012-06-04 | 2012-09-12 | 扬州扬杰电子科技股份有限公司 | Method for evaluating reliability of semiconductor device |
| CN102890006A (en) * | 2012-10-24 | 2013-01-23 | 上海交通大学 | High/low temperature space environment simulating container with high temperature change rate |
| CN102890006B (en) * | 2012-10-24 | 2015-09-30 | 上海交通大学 | A kind of high/low temperature space environment simulation container of high Cooling rate |
| CN112014653A (en) * | 2019-05-28 | 2020-12-01 | 山东交通学院 | Electrician electronic product low temperature test ability verification equipment |
| CN112014653B (en) * | 2019-05-28 | 2023-05-12 | 山东交通学院 | Low-temperature test capability verification equipment for electrical and electronic products |
| CN110412441A (en) * | 2019-06-24 | 2019-11-05 | 深圳市森美协尔科技有限公司 | Vacuum high/low temperature semiconducter device testing probe station and semiconducter device testing method |
| CN110646315A (en) * | 2019-10-08 | 2020-01-03 | 北京卫星环境工程研究所 | Wide-temperature-zone rapid temperature impact test system for product based on liquid nitrogen immersion deep space detection |
| CN113655087A (en) * | 2021-08-18 | 2021-11-16 | 雄芯光电科技有限责任公司 | Conductive adhesive testing device |
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|---|---|
| CN100359310C (en) | 2008-01-02 |
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