CN1599055A - Mask and method for forming high elensity nonvolatility memory code - Google Patents
Mask and method for forming high elensity nonvolatility memory code Download PDFInfo
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- CN1599055A CN1599055A CN 03158565 CN03158565A CN1599055A CN 1599055 A CN1599055 A CN 1599055A CN 03158565 CN03158565 CN 03158565 CN 03158565 A CN03158565 A CN 03158565A CN 1599055 A CN1599055 A CN 1599055A
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Abstract
The invention provides the masking of the high density non volatile memorizer encoding and its method. The non volatile memorizer of the invention has array regions, which have multi programmable regions in arrays. The masking has line/space figures to be used in programming the array regions. The method of forming the high density non volatile memorizer encoding includes: provide the array regions, which have multi programmable regions in arrays; form the figure covering layer on the array regions to cover the programmable regions selectively and the covering layer has line/space figures; carry out the ion implantation to the array regions which are not covered by covering layers to routinize the array regions.
Description
Technical field
The present invention relates to a kind of mask and method of non-volatility memorizer coding, particularly relate to a kind of mask that can form high density non-volatility memorizer coding and associated method.
Background technology
Mask-type ROM (mask read only memory; Mask ROM) is a kind of of non-volatility memorizer, in manufacture process, by encoding mask (coding mask), store the data in the integrated circuit, therefore promptly can't change after in a single day data write, be low cost, high reliability and jumbo memory, it is widely used in electronic products such as various information, communication, consumer electronics.
Figure 1A is the data top views in the array district before the write memory not as yet, and Figure 1B is for prolonging the sectional drawing of AA line among Figure 1A, and Fig. 1 C is for prolonging the sectional drawing of BB line among Figure 1A.Parallel a plurality of grooves 10 are arranged in the array district 80, and these grooves 10 are called again buries Lou band (buried drain strip).Because in groove 10, will form and bury Lou (burieddrain).Each groove 10 is to be used as etch stop layer, etching substrate 12 by the one silica layer 14 of both sides and a silicon nitride layer 16.Precoding (pre-coding) technology can form a plurality of precoding grooves 18 in array district 80, form with etching one silicon nitride layer 22.Precoding groove 18 is roughly perpendicular with groove 10.Each precoding groove 18 is a programmable district (but write area) with the zone that groove 10 intersects, and is the place that data can store.So, just shown 9 programmable districts that line up matrix among Figure 1A.
The known mode to 80 codings of the array district among Figure 1A is to use the encoding mask (coding mask) 30 as Fig. 2, and the district 80 that defines arrays will accept the place that ion injects.Fig. 2 is a two-dimensional mask, has groove/space pattern, means the pattern that is made of printing opacity groove 32.And be lighttight zone between two printing opacity grooves 32.
Fig. 3 A shifts the top view of the photoresist layer of pattern to the array district for the encoding mask that uses Fig. 2.Fig. 3 B is for prolonging the sectional drawing of AA line among Fig. 3 A.Also form and the similar groove/space pattern of Fig. 2 on the photoresist layer 28.The photoresist layer 28 in correspondence light tight zone on encoding mask 30 keeps.28 exposure imagings of photoresist layer of printing opacity groove 22 on the corresponding encoding mask 30 are removed and are become recessed.Groove/space pattern on the photoresist layer 28 is as shown in Fig. 3 A, because fillet effect (cornerrounding) can appear in proximity effect (proximity effect).The programmable zone that photoresist layer 28 is not covered in can be subjected to the influence of follow-up ion implantation technology, and write data.
Groove/space pattern of Fig. 3 A has following shortcoming:
1. be very difficult to dwindle pattern: semiconductor chips area just means the cost of integrated circuit.Therefore, all semiconductor manufacturing factories are target to make the littler next-generation of area all.And well-known, the necessary condition that forms the photoresist layer of groove/space pattern is a well that must guarantee to form on the photoresist layer, shown in the lower left corner of Fig. 3 A.Form the exposure imaging of a well on the photoresist layer, when the size (dimension) of this well more and more hour, will be more and more difficult.
2. for the suitable sensitivity of the misalignment in the production process (mis-alignment) meeting: follow-up ion implantation technology can be injected the two side of groove 10, shown in Fig. 3 B.Suppose the misalignment because of encoding mask, the groove/space pattern on the photoresist layer 28 is aimed at the array district 80 of below, for example, and horizontal skew certain distance.Shown in Fig. 3 C, this figure shows the problem that misalignment causes.Because stopping of top photoresist layer 28, cause follow-up ion implantation technology to inject for one of them of two side, make data write failure.
Summary of the invention
In view of this, the non-volatility memorizer Methods for Coding that provides a kind of comparison can dwindle pattern is provided main purpose of the present invention.
Another main purpose of the present invention is to reduce the susceptibility of non-volatility memorizer for the encoding mask misalignment.
According to above-mentioned purpose, the invention provides a kind of formation high density non-volatility memorizer Methods for Coding.At first provide array district (array region), and this array district has a plurality of programmables zone of the array lined up.Then form the shielding layer of patterning in this array district, optionally cover described programmable zone, this shielding layer has line/space (line/space) pattern.At last, to not carried out ion and inject in this array district, with this array district of sequencing by this shielding layer covering place.
The present invention provides a kind of mask that is used for the non-volatility memorizer coding of sequencing in addition.This non-volatility memorizer has the array district, and this array district has a plurality of programmables zone of the array lined up.This mask has line/space pattern, in order to this array district of sequencing.
On mask, line/space pattern means that this pattern is the pattern that is made of lighttight lines.For this shielding layer, line/space pattern means by the next pattern that lines constituted of projection.
The invention has the advantages that line/space (line/space) pattern can be than being easier to minification, therefore than being easier to produce follow-on non-volatility memorizer on semiconductor technology.
Another advantage of the present invention is that the coding of non-volatility memorizer will more not be subjected to the influence of misalignment, improves the acceptance rate of the technology of non-volatility memorizer.
For above-mentioned purpose of the present invention, feature and advantage can be become apparent, especially exemplified by a preferred embodiment, and cooperate appended graphicly, be described in detail below:
Description of drawings
Figure 1A is the data top views in the array district before the write memory not as yet;
Figure 1B is for prolonging the sectional drawing of AA line among Figure 1A;
Fig. 1 C is for prolonging the sectional drawing of BB line among Figure 1A;
Fig. 2 is known encoding mask;
Fig. 3 A shifts the top view of the photoresist layer of pattern to the array district for the encoding mask that uses Fig. 2;
Fig. 3 B is for prolonging the sectional drawing of AA line among Fig. 3 A;
Fig. 3 C shows the problem that misalignment caused in the known technology;
Fig. 4 is according to encoding mask of the present invention;
Fig. 5 A shifts the top view of the photoresist layer of patterns to the array district for the encoding mask 50 that uses Fig. 4;
Fig. 5 B is for prolonging the sectional drawing of AA line among Fig. 5 A;
The mask of Fig. 5 C displayed map 4 is the formed sectional drawing of misalignment when lithography process.
Embodiment
As shown in Figure 4, this figure is according to two dimension of the present invention (binary) mask, also is encoding mask (coding mask) 50.This encoding mask 50 is used for the array district 80 among sequencing Figure 1A.Described as known technology, parallel a plurality of grooves 10 are arranged in the array district 80, or be called and bury Lou band (buried drain strip).Each groove 10 is to be used as etch stop layer, etching substrate 12 by the one silica layer 14 of both sides and a silicon nitride layer 16.Precoding groove 18 is roughly perpendicular with groove 10.Each precoding groove 18 is a programmable zone (but write area) with the zone that groove 10 intersects, and is the place that data can store.Arrange in the array mode in array district 80 in a plurality of programmables zone.
Main being characterised in that of encoding mask 50 of the present invention has line/space pattern.For mask, line/space pattern means that this pattern is the pattern that is made of lighttight lines 52.Zone between the lines 52 then is a transparent area in twos, as shown in Figure 4.
Fig. 5 A shifts the top view of the photoresist layer of patterns to the array district for the encoding mask 50 that uses Fig. 4.Fig. 5 B is for prolonging the sectional drawing of AA line among Fig. 5 A.Photoresist layer 28 stops that as shielding layer follow-up ion injects.Also form and the similar line/space pattern of Fig. 4 on the photoresist layer 28.The photoresist layer 28 of the transparent area on the corresponding encoding mask 30 is because the exposure imaging removal; 28 of the photoresist layers of corresponding light tight lines 52 on encoding mask 30 keep and formation protrusion lines.Therefore, for photoresist layer 28, line/space pattern means by the next pattern that lines constituted of projection, shown in Fig. 5 A.Because fillet effect (corner rounding) can appear in proximity effect (proximityeffect), photoresist layer 28.The programmable zone that photoresist layer 28 is not covered in can be subjected to the influence of follow-up ion implantation technology, and write data, shown in Fig. 5 B.
Roughly parallel by the 52 formed photoresistance lines of the light tight lines on the encoding mask 50 with groove 10.What the photoresistance lines can design flushes with groove 10.That is to say that under the condition of aiming at, the photoresistance lines just just in time drop on the groove 10.
Encoding mask of the present invention is not limited to two dimension (binary) mask, also can be phase shift (phase shift) mask or Chrome-free (chromeless) mask.Importantly, mask of the present invention must form line/space pattern in the array district.
Can find behind comparison diagram 5A and Fig. 3 A that the groove/space pattern of the photoresist layer of known technology mainly is that expose to the open air need be by the programmable zone of sequencing, and covers other zone; Line/the space pattern of photoresist layer of the present invention mainly is to cover the programmable zone that does not need by sequencing, and exposes other zone to the open air.In other words, if when the zone definitions outside the programmable zone in the array district 80 is non-sensitive district, known technology is to cover most non-sensitive district, and the present invention exposes most non-sensitive district to the open air.
Such line/space pattern has following advantage:
1. be easy to dwindle pattern: well-known, the necessary condition that forms the photoresist layer of line/space pattern is the island (dot-island) that must guarantee to form a point on the photoresist layer, shown in the middle left of Fig. 5 A.And to form the exposure imaging of the island of a point on the photoresist layer, with respect to form on the photoresist layer a well relatively, will be than being easier to.So method of the present invention can effectively apply to follow-on integrated circuit (IC) products.
2. can be more insensitive for misalignment (mis-alignment): follow-up ion implantation technology can be injected the two side of groove 10, shown in Fig. 5 B.Suppose the misalignment because of encoding mask, the groove/space pattern on the photoresist layer is aimed at the array district 80 of below, for example, and the lateral shift certain distance.Shown in Fig. 5 C, the mask of this figure displayed map 4 is the formed sectional drawing of misalignment when lithography process.Even there is the situation of misalignment to take place,,, the two side of groove 10 injects so all can being subjected to ion because photoresistance lines distance is enough far away.The groove 10 that should do not injected by ion as for both sides among Fig. 5 C can not covered by photoresist layer 28 fully because of misalignment.So situation can't make the data mistake write in the groove 10.Because it is the injection technology of a wide-angle that the coding ion injects, the dark too high channel bottom sidewall of height ratio (depth-to-height ratio) will can not be subjected to the injection technology influence of wide-angle.That is to say that method of the present invention and mask have reduced the influence of misalignment, thereby accurately data are write in the array district 80.
In sum; though the present invention discloses as above with aforesaid preferred embodiment; yet be not in order to limit the present invention; protection scope of the present invention should be as the criterion with the scope that claims define; those skilled in the art; a little change of being done without departing from the spirit and scope of the present invention all should be included within protection scope of the present invention.
Claims (15)
1. one kind forms high density non-volatility memorizer Methods for Coding, it is characterized in that, comprising:
One array district is provided, and it has a plurality of programmables zone of the array lined up;
Form the shielding layer of patterning in this array district, optionally cover described programmable zone, this shielding layer has line/space pattern; And
Inject not carried out ion in this array district, with this array district of sequencing by this shielding layer covering place.
2. formation high density non-volatility memorizer Methods for Coding as claimed in claim 1, it is characterized in that, this array district comprises many first grooves, and many precoding grooves, described first groove and described precoding groove are perpendicular, and each programmable zone is constituted by described first groove one of them and one of them formed intersection region of described precoding groove.
3. formation high density non-volatility memorizer Methods for Coding as claimed in claim 2 is characterized in that many lines in this line/space pattern roughly parallel with described first groove.
4. formation high density non-volatility memorizer Methods for Coding as claimed in claim 2 is characterized in that many lines in this line/space pattern roughly are positioned on described first groove.
5. formation high density non-volatility memorizer Methods for Coding as claimed in claim 2 is characterized in that, many lines in this line/space pattern flush with described first groove.
6. formation high density non-volatility memorizer Methods for Coding as claimed in claim 2 is characterized in that this array district between described first groove piles up silicon oxide layer and silicon nitride layer are arranged.
7. formation high density non-volatility memorizer Methods for Coding as claimed in claim 2 is characterized in that this array district between the described precoding groove has silicon oxide layer.
8. the mask of a formation high density non-volatility memorizer coding that is used for sequencing, it is characterized in that this non-volatility memorizer has the array district, this array district has a plurality of programmables zone of the array lined up, this mask has line/space pattern, in order to this array district of sequencing.
9. the mask of non-volatility memorizer coding as claimed in claim 8, it is characterized in that, this array district comprises many first grooves, and many precoding grooves, described first groove and described precoding groove are perpendicular, and each programmable zone is constituted by described first groove one of them and one of them formed intersection region of described precoding groove.
10. the mask of non-volatility memorizer coding as claimed in claim 9 is characterized in that this line/space pattern is transferred to the shielding layer in this array district before this array district of sequencing.
11. the mask of non-volatility memorizer coding as claimed in claim 10 is characterized in that many lines in this shielding layer roughly parallel with described first groove.
12. the mask of non-volatility memorizer coding as claimed in claim 10 is characterized in that many lines in this shielding layer roughly are positioned on described first groove.
13. the mask of non-volatility memorizer coding as claimed in claim 10 is characterized in that many lines in this shielding layer flush with described first groove.
14. the mask of non-volatility memorizer coding as claimed in claim 10 is characterized in that pile up in this array district between described first groove an one silica layer and a silicon nitride layer.
15. the mask of non-volatility memorizer as claimed in claim 8 coding is characterized in that, this mask be phase shifting mask, two-dimensional mask and do not have chrome mask one of them.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB031585655A CN1324681C (en) | 2003-09-19 | 2003-09-19 | Mask and method for forming high elensity nonvolatility memory code |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB031585655A CN1324681C (en) | 2003-09-19 | 2003-09-19 | Mask and method for forming high elensity nonvolatility memory code |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1599055A true CN1599055A (en) | 2005-03-23 |
| CN1324681C CN1324681C (en) | 2007-07-04 |
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| Application Number | Title | Priority Date | Filing Date |
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| CNB031585655A Expired - Fee Related CN1324681C (en) | 2003-09-19 | 2003-09-19 | Mask and method for forming high elensity nonvolatility memory code |
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Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5691216A (en) * | 1995-05-30 | 1997-11-25 | Macronix International Co., Ltd. | Integrated circuit self-aligning process and apparatus |
| US5959325A (en) * | 1997-08-21 | 1999-09-28 | International Business Machines Corporation | Method for forming cornered images on a substrate and photomask formed thereby |
| CN1153282C (en) * | 2001-04-17 | 2004-06-09 | 华邦电子股份有限公司 | Process for preparing high-density mask-type ROM |
| CN1303671C (en) * | 2001-11-30 | 2007-03-07 | 旺宏电子股份有限公司 | Structure and manufacture of shaded ROM |
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2003
- 2003-09-19 CN CNB031585655A patent/CN1324681C/en not_active Expired - Fee Related
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