CN1598521A - Performance detecting device of light-beam scanner - Google Patents

Performance detecting device of light-beam scanner Download PDF

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Publication number
CN1598521A
CN1598521A CN 200410043781 CN200410043781A CN1598521A CN 1598521 A CN1598521 A CN 1598521A CN 200410043781 CN200410043781 CN 200410043781 CN 200410043781 A CN200410043781 A CN 200410043781A CN 1598521 A CN1598521 A CN 1598521A
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China
Prior art keywords
input end
input
output terminal
output
lens combination
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CN 200410043781
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Chinese (zh)
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CN1327203C (en
Inventor
孙秀冬
赵远
陈钟贤
张宇
刘丽萍
唐勐
吴杰
靳辰飞
张勇
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Harbin Institute of Technology
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Harbin Institute of Technology
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Publication of CN1598521A publication Critical patent/CN1598521A/en
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Abstract

The invention is a performance detecting device for beam scanner; it is concretely a beam scanner performance detecting device. It is made up of CCD optical system, image collecting model, exposure reading model, computer, data outputting and inputting ports; the control output and input ends of the CCD optical system is connected to the control output and input ends of the computer, the image signal output end of the CCD is connected to the image signal input end of the exposure reading model, the exposure reading signal output and input ends of the CCD are connected to the signal output and input ends of the exposure reading model, the image data output end of the image collecting model is connected to the image data input end of the computer. The data output and input ends of the exposure reading model is connected to a data input and output end, another data output and input ends of the computer is connected to the data input and output end of the data output and input ends. The invention can carry on detection to optical performance of optical scanning system, it can detect the absolute position, relative position, linearity, evenness of scan of the optical scanning system, the structure is simple, and the volume is small, and the cost is low.

Description

The optical beam scanner device for detecting performance
Technical field:
What the present invention relates to is pick-up unit, specifically is a kind of optical beam scanner device for detecting performance.
Background technology:
In laser scanning imaging system, do not carry out the equipment that performance evaluation detects at the optical beam scanning system performance, for said system is in the normal duty, we are necessary to develop a kind of about optical beam scanning system being carried out the equipment of Performance Detection.
Summary of the invention:
The purpose of this invention is to provide a kind of optical beam scanner device for detecting performance.The present invention can carry out the detection of optical property to optical beam scanning system.The present invention reads module 3, computing machine 4, data I/O mouth 5 by CCD optical system 1, image acquisition module 2, exposure and forms; The control I/O of CCD optical system 1 connects the control input/output terminal of computing machine 4, the picture intelligence output terminal of CCD optical system 1 connects the picture intelligence input end of visual acquisition module 2, the exposure read output signal I/O of CCD optical system 1 connects exposure and reads the signal I/O of module 3, the pictorial data output terminal of image acquisition module 2 connects the pictorial data input end of computing machine 4, a data input/output terminal of the data I/O connection computing machine 4 of module 3 is read in exposure, and another data I/O of computing machine 4 connects the data input/output terminal of data input/output port 5; Described CCD optical system 1 comprises lens combination 1-1, CCD camera 1-2; Scanning light beam is input to the input end of lens combination 1-1 after lens combination 1-1 transmission and output to the input end of CCD camera 1-2 from the output terminal of lens combination 1-1, two data I/Os of CCD camera 1-2 connect the data-signal input/output terminal that module 3, computing machine 4 are read in exposure respectively, and the picture intelligence output terminal of CCD camera 1-2 connects the picture intelligence input end of visual acquisition module 2.Principle of work: treat to incide among the CCD camera 1-2 after photometry is by the lens combination 1-1 in the CCD optical devices 1, after the picture information that produces among the CCD camera 1-2 is read the data processing of module 3 by image acquisition module 2, exposure, be input to and carry out comprehensive computing in the computing machine 4 and draw every data target for the treatment of photometry, simultaneous computer 4 can carry out exchanges data with the outside by data I/O mouth 5.The present invention can carry out the detection of optical property to optical beam scanning system, can carry out complete detection to the hot spot characteristic and the scanning light spot dot matrix characteristic of optical beam scanning system, the absolute position that comprises hot spot, relative position, position accuracy, multiplicity, instantaneous field of view, scanning field of view, the scanning linearity degree, the scanning uniformity coefficient detects, and has a precision height, response speed is fast, simple in structure, regulate flexibly, volume is little, the advantage that cost is low, and can realize external trigger programmed control and two kinds of mode of operations of external trigger level control, and can be used for heavy caliber, big visual field, beam flying under high strength or the complex environment detects.
Description of drawings:
Fig. 1 is an one-piece construction synoptic diagram of the present invention, Fig. 2 is the one-piece construction synoptic diagram of CCD optical system 1, Fig. 3 is the structural representation of embodiment two, Fig. 4 is the structural representation of embodiment three, Fig. 5 is the structural representation of embodiment four, Fig. 6 is the structural representation of embodiment five, and Fig. 7 is the structural representation of embodiment six, and Fig. 8 is the structural representation of embodiment seven.
Embodiment:
Embodiment one: in conjunction with Fig. 1, Fig. 2 present embodiment is described, present embodiment is read module 3, computing machine 4, data I/O mouth 5 by CCD optical system 1, image acquisition module 2, exposure and is formed; The control I/O of CCD optical system 1 connects the control input/output terminal of computing machine 4, the picture intelligence output terminal of CCD optical system 1 connects the picture intelligence input end of visual acquisition module 2, the exposure read output signal I/O of CCD optical system 1 connects exposure and reads the signal I/O of module 3, the pictorial data output terminal of image acquisition module 2 connects the pictorial data input end of computing machine 4, a data input/output terminal of the data I/O connection computing machine 4 of module 3 is read in exposure, and another data I/O of computing machine 4 connects the data input/output terminal of data input/output port 5; Described CCD optical system 1 comprises lens combination 1-1, CCD camera 1-2; Scanning light beam is input to the input end of lens combination 1-1 after lens combination 1-1 transmission and output to the input end of CCD camera 1-2 from the output terminal of lens combination 1-1, two data I/Os of CCD camera 1-2 connect the data-signal input/output terminal that module 3, computing machine 4 are read in exposure respectively, and the picture intelligence output terminal of CCD camera 1-2 connects the picture intelligence input end of visual acquisition module 2.The model that image processing circuit 2 is selected for use is an Euresys Grablink Value image card, the model that exposure sensing circuit 3 is selected for use is an EuresysGrablink Value image card, and the model that CCD camera 1-6 selects for use is Basler A201b/F-mount and Nikon 50mm f/1.4D AF camera lens.
Embodiment two: in conjunction with Fig. 3 present embodiment is described, present embodiment increases on the basis of embodiment one attenuator 1-3; Scanning light beam is input to the input end of attenuator 1-3 after attenuator 1-3 transmission and output to the input end of lens combination 1-1 from the output terminal of attenuator 1-3.Other composition is identical with embodiment one with annexation.
Embodiment three: present embodiment is described in conjunction with Fig. 4, the difference of present embodiment and embodiment two is, scanning light beam is input to the input end of lens combination 1-1 after lens combination 1-1 transmission and output to the input end of attenuator 1-3 from the output terminal of lens combination 1-1, outputs to the input end of CCD camera 1-2 through the light of the attenuator 1-3 transmission output terminal from attenuator 1-3.Other composition is identical with embodiment two with annexation.
Embodiment four: in conjunction with Fig. 5 present embodiment is described, present embodiment increases on the basis of embodiment three shutter 1-4; Light through attenuator 1-3 transmission is exported and by behind the shutter 1-4, is input in the input end of CCD camera 1-2 from the output terminal of attenuator 1-3.Other composition is identical with embodiment three with annexation.
Embodiment five: present embodiment is described in conjunction with Fig. 6, the difference of present embodiment and embodiment four is, scanning light beam is input to the input end of lens combination 1-1 after by shutter 1-4 after lens combination 1-1 transmission and output to the input end of attenuator 1-3 from the output terminal of lens combination 1-1, outputs to the input end of CCD camera 1-2 through the light of the attenuator 1-3 transmission output terminal from attenuator 1-3.Other composition is identical with embodiment four with annexation.
Embodiment six: in conjunction with Fig. 7 present embodiment is described, present embodiment increases on the basis of embodiment one light filter 1-5; Scanning light beam is input to the input end of light filter 1-5 after light filter 1-5 transmission and output to the input end of lens combination 1-1 from the output terminal of light filter 1-5.Other composition is identical with embodiment one with annexation.
Embodiment seven: present embodiment is described in conjunction with Fig. 8, the difference of present embodiment and embodiment six is, scanning light beam is input to the input end of lens combination 1-1 after lens combination 1-1 transmission and output to the input end of light filter 1-5 from the output terminal of lens combination 1-1, outputs to the input end of CCD camera 1-2 through the light of the light filter 1-5 transmission output terminal from light filter 1-5.Other composition is identical with embodiment six with annexation.

Claims (8)

1. optical beam scanner device for detecting performance is characterized in that it reads module (3), computing machine (4), data I/O mouth (5) by CCD optical system (1), image acquisition module (2), exposure and form; The control I/O of CCD optical system (1) connects the control input/output terminal of computing machine (4), the picture intelligence output terminal of CCD optical system (1) connects the picture intelligence input end of visual acquisition module (2), the exposure read output signal I/O of CCD optical system (1) connects exposure and reads the signal I/O of module (3), the pictorial data output terminal of image acquisition module (2) connects the pictorial data input end of computing machine (4), a data input/output terminal of the data I/O connection computing machine (4) of module (3) is read in exposure, and another data I/O of computing machine (4) connects the data input/output terminal of data input/output port (5).
2. optical beam scanner device for detecting performance according to claim 1 is characterized in that CCD optical system (1) comprises lens combination (1-1), CCD camera (1-2); Scanning light beam is input to the input end of lens combination (1-1) after lens combination (1-1) transmission and output to the input end of CCD camera (1-2) from the output terminal of lens combination (1-1), two data I/Os of CCD camera (1-2) connect the data-signal input/output terminal that module (3), computing machine (4) are read in exposure respectively, and the picture intelligence output terminal of CCD camera (1-2) connects the picture intelligence input end of visual acquisition module (2).
3. optical beam scanner device for detecting performance according to claim 2 is characterized in that its increase has attenuator (1-3); Scanning light beam is input to the input end of attenuator (1-3) after attenuator (1-3) transmission and output to the input end of lens combination (1-1) from the output terminal of attenuator (1-3).
4. according to claim 2 or 3 described optical beam scanner device for detecting performance, it is characterized in that input end that scanning light beam is input to lens combination (1-1) after lens combination (1-1) transmission and output to the input end of attenuator (1-3), output to the input end of CCD camera (1-2) through the light of attenuator (1-3) transmission output terminal from attenuator (1-3) from the output terminal of lens combination (1-1).
5. optical beam scanner device for detecting performance according to claim 4 is characterized in that increase has shutter (1-4); Light through attenuator (1-3) transmission is exported and by behind the shutter (1-4), is input in the input end of CCD camera (1-2) from the output terminal of attenuator (1-3).
6. optical beam scanner device for detecting performance according to claim 5, it is characterized in that input end that scanning light beam passes through to be input to behind the shutter (1-4) lens combination (1-1) after lens combination (1-1) transmission and output to the input end of attenuator (1-3), output to the input end of CCD camera (1-2) through the light of attenuator (1-3) transmission output terminal from attenuator (1-3) from the output terminal of lens combination (1-1).
7. optical beam scanner device for detecting performance according to claim 2 is characterized in that its increase has light filter (1-5); Scanning light beam is input to the input end of light filter (1-5) after light filter (1-5) transmission and output to the input end of lens combination (1-1) from the output terminal of light filter (1-5).
8. according to claim 2 or 7 described optical beam scanner device for detecting performance, it is characterized in that input end that scanning light beam is input to lens combination (1-1) after lens combination (1-1) transmission and output to the input end of light filter (1-5), output to the input end of CCD camera (1-2) through the light of light filter (1-5) transmission output terminal from light filter (1-5) from the output terminal of lens combination (1-1).
CNB2004100437819A 2004-08-06 2004-08-06 Performance detecting device of light-beam scanner Expired - Fee Related CN1327203C (en)

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CNB2004100437819A CN1327203C (en) 2004-08-06 2004-08-06 Performance detecting device of light-beam scanner

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Application Number Priority Date Filing Date Title
CNB2004100437819A CN1327203C (en) 2004-08-06 2004-08-06 Performance detecting device of light-beam scanner

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CN1598521A true CN1598521A (en) 2005-03-23
CN1327203C CN1327203C (en) 2007-07-18

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Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102384839A (en) * 2010-09-06 2012-03-21 信义超薄玻璃(东莞)有限公司 Device for obtaining optical performance of glass
CN105571821A (en) * 2015-12-14 2016-05-11 东莞铭普光磁股份有限公司 TO screening system
CN108844718A (en) * 2018-07-27 2018-11-20 成都理想境界科技有限公司 A kind of laser scanning projection's device, equipment and detection method
CN109387354A (en) * 2018-11-14 2019-02-26 中国航空工业集团公司洛阳电光设备研究所 A kind of optical scanner test device and test method
US11536792B2 (en) * 2020-04-30 2022-12-27 Applied Materials Israel Ltd. Test of an examination tool

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09218129A (en) * 1996-02-08 1997-08-19 Fuji Xerox Co Ltd Measuring device for scanning optical system
JP3920027B2 (en) * 2001-01-17 2007-05-30 株式会社リコー Scanning beam measuring apparatus and measuring method
JP4426131B2 (en) * 2001-05-29 2010-03-03 株式会社リコー Scanning beam measurement evaluation method and measurement evaluation apparatus for scanning optical system
CN1420347A (en) * 2002-10-23 2003-05-28 力捷电脑(中国)有限公司 Method for measuring optical resolution ability of scanning head

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102384839A (en) * 2010-09-06 2012-03-21 信义超薄玻璃(东莞)有限公司 Device for obtaining optical performance of glass
CN105571821A (en) * 2015-12-14 2016-05-11 东莞铭普光磁股份有限公司 TO screening system
CN105571821B (en) * 2015-12-14 2017-12-19 东莞铭普光磁股份有限公司 A kind of TO screening systems
CN108844718A (en) * 2018-07-27 2018-11-20 成都理想境界科技有限公司 A kind of laser scanning projection's device, equipment and detection method
CN109387354A (en) * 2018-11-14 2019-02-26 中国航空工业集团公司洛阳电光设备研究所 A kind of optical scanner test device and test method
US11536792B2 (en) * 2020-04-30 2022-12-27 Applied Materials Israel Ltd. Test of an examination tool

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