CN1598521A - Performance detecting device of light-beam scanner - Google Patents

Performance detecting device of light-beam scanner Download PDF

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Publication number
CN1598521A
CN1598521A CN 200410043781 CN200410043781A CN1598521A CN 1598521 A CN1598521 A CN 1598521A CN 200410043781 CN200410043781 CN 200410043781 CN 200410043781 A CN200410043781 A CN 200410043781A CN 1598521 A CN1598521 A CN 1598521A
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input
output
lens group
attenuator
input end
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CN1327203C (en
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孙秀冬
赵远
陈钟贤
张宇
刘丽萍
唐勐
吴杰
靳辰飞
张勇
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Harbin Institute of Technology Shenzhen
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Abstract

光束扫描器性能检测装置，它具体是一种光束扫描器性能检测装置。它由CCD光学系统(1)、图象采集模块(2)、曝光读出模块(3)、计算机(4)、数据输出输入端口(5)组成；(1)的控制输出输入端连接(4)的控制输入输出端，(1)的图象信号输出端连接(2)的图象信号输入端，(1)的曝光读出信号输出输入端连接曝光读出模块(3)的信号输出输入端，(2)的图象数据输出端连接(4)的图象数据输入端，(3)的数据输出输入端连接(4)的一个数据输入输出端，(4)的另一个数据输出输入端连接(5)的数据输入输出端。本发明能对光学扫描系统进行光学性能的检测，能对光学扫描系统进行绝对位置、相对位置、线性度、扫描均匀度进行检测，并具有结构简单、体积小、成本低的优点。

Figure 200410043781

The performance detection device of a light beam scanner is specifically a performance detection device of a light beam scanner. It consists of a CCD optical system (1), an image acquisition module (2), an exposure readout module (3), a computer (4), and a data output and input port (5); the control output and input ports of (1) are connected (4 ), the image signal output end of (1) is connected to the image signal input end of (2), and the exposure readout signal output and input end of (1) is connected to the signal output and input end of the exposure readout module (3) end, the image data output end of (2) is connected to the image data input end of (4), the data output input end of (3) is connected to a data input and output end of (4), and another data output and input end of (4) Connect the data input and output terminals of (5). The invention can detect the optical performance of the optical scanning system, can detect the absolute position, relative position, linearity and scanning uniformity of the optical scanning system, and has the advantages of simple structure, small size and low cost.

Figure 200410043781

Description

The optical beam scanner device for detecting performance
Technical field:
What the present invention relates to is pick-up unit, specifically is a kind of optical beam scanner device for detecting performance.
Background technology:
In laser scanning imaging system, do not carry out the equipment that performance evaluation detects at the optical beam scanning system performance, for said system is in the normal duty, we are necessary to develop a kind of about optical beam scanning system being carried out the equipment of Performance Detection.
Summary of the invention:
The purpose of this invention is to provide a kind of optical beam scanner device for detecting performance.The present invention can carry out the detection of optical property to optical beam scanning system.The present invention reads module 3, computing machine 4, data I/O mouth 5 by CCD optical system 1, image acquisition module 2, exposure and forms; The control I/O of CCD optical system 1 connects the control input/output terminal of computing machine 4, the picture intelligence output terminal of CCD optical system 1 connects the picture intelligence input end of visual acquisition module 2, the exposure read output signal I/O of CCD optical system 1 connects exposure and reads the signal I/O of module 3, the pictorial data output terminal of image acquisition module 2 connects the pictorial data input end of computing machine 4, a data input/output terminal of the data I/O connection computing machine 4 of module 3 is read in exposure, and another data I/O of computing machine 4 connects the data input/output terminal of data input/output port 5; Described CCD optical system 1 comprises lens combination 1-1, CCD camera 1-2; Scanning light beam is input to the input end of lens combination 1-1 after lens combination 1-1 transmission and output to the input end of CCD camera 1-2 from the output terminal of lens combination 1-1, two data I/Os of CCD camera 1-2 connect the data-signal input/output terminal that module 3, computing machine 4 are read in exposure respectively, and the picture intelligence output terminal of CCD camera 1-2 connects the picture intelligence input end of visual acquisition module 2.Principle of work: treat to incide among the CCD camera 1-2 after photometry is by the lens combination 1-1 in the CCD optical devices 1, after the picture information that produces among the CCD camera 1-2 is read the data processing of module 3 by image acquisition module 2, exposure, be input to and carry out comprehensive computing in the computing machine 4 and draw every data target for the treatment of photometry, simultaneous computer 4 can carry out exchanges data with the outside by data I/O mouth 5.The present invention can carry out the detection of optical property to optical beam scanning system, can carry out complete detection to the hot spot characteristic and the scanning light spot dot matrix characteristic of optical beam scanning system, the absolute position that comprises hot spot, relative position, position accuracy, multiplicity, instantaneous field of view, scanning field of view, the scanning linearity degree, the scanning uniformity coefficient detects, and has a precision height, response speed is fast, simple in structure, regulate flexibly, volume is little, the advantage that cost is low, and can realize external trigger programmed control and two kinds of mode of operations of external trigger level control, and can be used for heavy caliber, big visual field, beam flying under high strength or the complex environment detects.
Description of drawings:
Fig. 1 is an one-piece construction synoptic diagram of the present invention, Fig. 2 is the one-piece construction synoptic diagram of CCD optical system 1, Fig. 3 is the structural representation of embodiment two, Fig. 4 is the structural representation of embodiment three, Fig. 5 is the structural representation of embodiment four, Fig. 6 is the structural representation of embodiment five, and Fig. 7 is the structural representation of embodiment six, and Fig. 8 is the structural representation of embodiment seven.
Embodiment:
Embodiment one: in conjunction with Fig. 1, Fig. 2 present embodiment is described, present embodiment is read module 3, computing machine 4, data I/O mouth 5 by CCD optical system 1, image acquisition module 2, exposure and is formed; The control I/O of CCD optical system 1 connects the control input/output terminal of computing machine 4, the picture intelligence output terminal of CCD optical system 1 connects the picture intelligence input end of visual acquisition module 2, the exposure read output signal I/O of CCD optical system 1 connects exposure and reads the signal I/O of module 3, the pictorial data output terminal of image acquisition module 2 connects the pictorial data input end of computing machine 4, a data input/output terminal of the data I/O connection computing machine 4 of module 3 is read in exposure, and another data I/O of computing machine 4 connects the data input/output terminal of data input/output port 5; Described CCD optical system 1 comprises lens combination 1-1, CCD camera 1-2; Scanning light beam is input to the input end of lens combination 1-1 after lens combination 1-1 transmission and output to the input end of CCD camera 1-2 from the output terminal of lens combination 1-1, two data I/Os of CCD camera 1-2 connect the data-signal input/output terminal that module 3, computing machine 4 are read in exposure respectively, and the picture intelligence output terminal of CCD camera 1-2 connects the picture intelligence input end of visual acquisition module 2.The model that image processing circuit 2 is selected for use is an Euresys Grablink Value image card, the model that exposure sensing circuit 3 is selected for use is an EuresysGrablink Value image card, and the model that CCD camera 1-6 selects for use is Basler A201b/F-mount and Nikon 50mm f/1.4D AF camera lens.
Embodiment two: in conjunction with Fig. 3 present embodiment is described, present embodiment increases on the basis of embodiment one attenuator 1-3; Scanning light beam is input to the input end of attenuator 1-3 after attenuator 1-3 transmission and output to the input end of lens combination 1-1 from the output terminal of attenuator 1-3.Other composition is identical with embodiment one with annexation.
Embodiment three: present embodiment is described in conjunction with Fig. 4, the difference of present embodiment and embodiment two is, scanning light beam is input to the input end of lens combination 1-1 after lens combination 1-1 transmission and output to the input end of attenuator 1-3 from the output terminal of lens combination 1-1, outputs to the input end of CCD camera 1-2 through the light of the attenuator 1-3 transmission output terminal from attenuator 1-3.Other composition is identical with embodiment two with annexation.
Embodiment four: in conjunction with Fig. 5 present embodiment is described, present embodiment increases on the basis of embodiment three shutter 1-4; Light through attenuator 1-3 transmission is exported and by behind the shutter 1-4, is input in the input end of CCD camera 1-2 from the output terminal of attenuator 1-3.Other composition is identical with embodiment three with annexation.
Embodiment five: present embodiment is described in conjunction with Fig. 6, the difference of present embodiment and embodiment four is, scanning light beam is input to the input end of lens combination 1-1 after by shutter 1-4 after lens combination 1-1 transmission and output to the input end of attenuator 1-3 from the output terminal of lens combination 1-1, outputs to the input end of CCD camera 1-2 through the light of the attenuator 1-3 transmission output terminal from attenuator 1-3.Other composition is identical with embodiment four with annexation.
Embodiment six: in conjunction with Fig. 7 present embodiment is described, present embodiment increases on the basis of embodiment one light filter 1-5; Scanning light beam is input to the input end of light filter 1-5 after light filter 1-5 transmission and output to the input end of lens combination 1-1 from the output terminal of light filter 1-5.Other composition is identical with embodiment one with annexation.
Embodiment seven: present embodiment is described in conjunction with Fig. 8, the difference of present embodiment and embodiment six is, scanning light beam is input to the input end of lens combination 1-1 after lens combination 1-1 transmission and output to the input end of light filter 1-5 from the output terminal of lens combination 1-1, outputs to the input end of CCD camera 1-2 through the light of the light filter 1-5 transmission output terminal from light filter 1-5.Other composition is identical with embodiment six with annexation.

Claims (8)

1.光束扫描器性能检测装置，其特征在于它由CCD光学系统(1)、图象采集模块(2)、曝光读出模块(3)、计算机(4)、数据输出输入端口(5)组成；CCD光学系统(1)的控制输出输入端连接计算机(4)的控制输入输出端，CCD光学系统(1)的图象信号输出端连接图象采集模块(2)的图象信号输入端，CCD光学系统(1)的曝光读出信号输出输入端连接曝光读出模块(3)的信号输出输入端，图象采集模块(2)的图象数据输出端连接计算机(4)的图象数据输入端，曝光读出模块(3)的数据输出输入端连接计算机(4)的一个数据输入输出端，计算机(4)的另一个数据输出输入端连接数据输入输出端口(5)的数据输入输出端。1. Beam scanner performance detection device is characterized in that it is made up of CCD optical system (1), image acquisition module (2), exposure readout module (3), computer (4), data output input port (5) The control input and output terminals of the CCD optical system (1) are connected to the control input and output terminals of the computer (4), and the image signal output terminals of the CCD optical system (1) are connected to the image signal input terminals of the image acquisition module (2), The exposure readout signal output input end of CCD optical system (1) connects the signal output input end of exposure readout module (3), and the image data output end of image acquisition module (2) connects the image data of computer (4) Input terminal, the data output and input terminal of the exposure readout module (3) is connected to a data input and output terminal of the computer (4), and another data output and input terminal of the computer (4) is connected to the data input and output of the data input and output port (5). end. 2.根据权利要求1所述的光束扫描器性能检测装置，其特征在于CCD光学系统(1)包含透镜组(1-1)、CCD摄像头(1-2)；扫描光束输入到透镜组(1-1)的输入端后经透镜组(1-1)传输并从透镜组(1-1)的输出端输出到CCD摄像头(1-2)的输入端中，CCD摄像头(1-2)的两个数据输出输入端分别连接曝光读出模块(3)、计算机(4)的数据信号输入输出端，CCD摄像头(1-2)的图象信号输出端连接图象采集模块(2)的图象信号输入端。2. beam scanner performance detection device according to claim 1, is characterized in that CCD optical system (1) comprises lens group (1-1), CCD camera (1-2); Scanning light beam is input to lens group (1) -1) is transmitted through the lens group (1-1) after the input end and is output to the input end of the CCD camera (1-2) from the output end of the lens group (1-1), and the CCD camera (1-2) Two data output and input terminals are respectively connected to the data signal input and output terminals of the exposure readout module (3) and the computer (4), and the image signal output terminals of the CCD camera (1-2) are connected to the diagram of the image acquisition module (2) like signal input. 3.根据权利要求2所述的光束扫描器性能检测装置，其特征在于它增加有衰减器(1-3)；扫描光束输入到衰减器(1-3)的输入端后经衰减器(1-3)传输并从衰减器(1-3)的输出端输出到透镜组(1-1)的输入端中。3. The light beam scanner performance detection device according to claim 2, characterized in that it is increased with an attenuator (1-3); after the scanning beam is input to the input end of the attenuator (1-3), the attenuator (1 -3) Transmit and output from the output of the attenuator (1-3) into the input of the lens group (1-1). 4.根据权利要求2或3所述的光束扫描器性能检测装置，其特征在于扫描光束输入到透镜组(1-1)的输入端后经透镜组(1-1)传输并从透镜组(1-1)的输出端输出到衰减器(1-3)的输入端中，经衰减器(1-3)传输的光从衰减器(1-3)的输出端输出到CCD摄像头(1-2)的输入端中。4. The beam scanner performance detection device according to claim 2 or 3, characterized in that the scanning light beam is input to the input end of the lens group (1-1) and then transmitted through the lens group (1-1) and transmitted from the lens group ( The output port of 1-1) is output to the input port of the attenuator (1-3), and the light transmitted through the attenuator (1-3) is output to the CCD camera (1-3) from the output port of the attenuator (1-3). 2) in the input terminal. 5.根据权利要求4所述的光束扫描器性能检测装置，其特征在于增加有快门(1-4)；经衰减器(1-3)传输的光从衰减器(1-3)的输出端输出并通过快门(1-4)后，输入到CCD摄像头(1-2)的输入端中。5. The light beam scanner performance detection device according to claim 4, characterized in that a shutter (1-4) is added; the light transmitted through the attenuator (1-3) is from the output end of the attenuator (1-3) After outputting and passing through the shutter (1-4), it is input into the input terminal of the CCD camera (1-2). 6.根据权利要求5所述的光束扫描器性能检测装置，其特征在于扫描光束通过快门(1-4)后输入到透镜组(1-1)的输入端后经透镜组(1-1)传输并从透镜组(1-1)的输出端输出到衰减器(1-3)的输入端中，经衰减器(1-3)传输的光从衰减器(1-3)的输出端输出到CCD摄像头(1-2)的输入端中。6. The beam scanner performance testing device according to claim 5, characterized in that the scanning beam is input to the input end of the lens group (1-1) after passing through the shutter (1-4) and then passes through the lens group (1-1) Transmission and output from the output end of the lens group (1-1) to the input end of the attenuator (1-3), the light transmitted by the attenuator (1-3) is output from the output end of the attenuator (1-3) To the input end of the CCD camera (1-2). 7.根据权利要求2所述的光束扫描器性能检测装置，其特征在于它增加有滤光器(1-5)；扫描光束输入到滤光器(1-5)的输入端后经滤光器(1-5)传输并从滤光器(1-5)的输出端输出到透镜组(1-1)的输入端中。7. The light beam scanner performance detection device according to claim 2, characterized in that it is increased with an optical filter (1-5); after the scanning beam is input to the input end of the optical filter (1-5), it is filtered The filter (1-5) transmits and outputs from the output end of the optical filter (1-5) to the input end of the lens group (1-1). 8.根据权利要求2或7所述的光束扫描器性能检测装置，其特征在于扫描光束输入到透镜组(1-1)的输入端后经透镜组(1-1)传输并从透镜组(1-1)的输出端输出到滤光器(1-5)的输入端中，经滤光器(1-5)传输的光从滤光器(1-5)的输出端输出到CCD摄像头(1-2)的输入端中。8. The beam scanner performance detection device according to claim 2 or 7, characterized in that the scanning light beam is input to the input end of the lens group (1-1) and then transmitted through the lens group (1-1) and transmitted from the lens group ( The output end of 1-1) is output to the input end of the optical filter (1-5), and the light transmitted by the optical filter (1-5) is output to the CCD camera from the output end of the optical filter (1-5) In the input terminal of (1-2).
CNB2004100437819A 2004-08-06 2004-08-06 Performance detecting device of light-beam scanner Expired - Fee Related CN1327203C (en)

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Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102384839A (en) * 2010-09-06 2012-03-21 信义超薄玻璃(东莞)有限公司 Device for obtaining optical performance of glass
CN105571821A (en) * 2015-12-14 2016-05-11 东莞铭普光磁股份有限公司 A TO screening system
CN108844718A (en) * 2018-07-27 2018-11-20 成都理想境界科技有限公司 A kind of laser scanning projection's device, equipment and detection method
CN109387354A (en) * 2018-11-14 2019-02-26 中国航空工业集团公司洛阳电光设备研究所 A kind of optical scanner test device and test method
US11536792B2 (en) * 2020-04-30 2022-12-27 Applied Materials Israel Ltd. Test of an examination tool

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JPH09218129A (en) * 1996-02-08 1997-08-19 Fuji Xerox Co Ltd Measuring device for scanning optical system
JP3920027B2 (en) * 2001-01-17 2007-05-30 株式会社リコー Scanning beam measuring apparatus and measuring method
JP4426131B2 (en) * 2001-05-29 2010-03-03 株式会社リコー Scanning beam measurement evaluation method and measurement evaluation apparatus for scanning optical system
CN1420347A (en) * 2002-10-23 2003-05-28 力捷电脑(中国)有限公司 Method for measuring optical resolution ability of scanning head

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102384839A (en) * 2010-09-06 2012-03-21 信义超薄玻璃(东莞)有限公司 Device for obtaining optical performance of glass
CN105571821A (en) * 2015-12-14 2016-05-11 东莞铭普光磁股份有限公司 A TO screening system
CN105571821B (en) * 2015-12-14 2017-12-19 东莞铭普光磁股份有限公司 TO screening system
CN108844718A (en) * 2018-07-27 2018-11-20 成都理想境界科技有限公司 A kind of laser scanning projection's device, equipment and detection method
CN109387354A (en) * 2018-11-14 2019-02-26 中国航空工业集团公司洛阳电光设备研究所 A kind of optical scanner test device and test method
US11536792B2 (en) * 2020-04-30 2022-12-27 Applied Materials Israel Ltd. Test of an examination tool

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