CN1591055A - Method for mfg. colour optical filter - Google Patents
Method for mfg. colour optical filter Download PDFInfo
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- CN1591055A CN1591055A CN 03156640 CN03156640A CN1591055A CN 1591055 A CN1591055 A CN 1591055A CN 03156640 CN03156640 CN 03156640 CN 03156640 A CN03156640 A CN 03156640A CN 1591055 A CN1591055 A CN 1591055A
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Abstract
The production method of colour filter includes the following steps: tightly fitting a flat-plate mould whose fitting surface has a recessed pattern against a light-transmitting base plate surface, the space formed by utilizing said recessed groove and light-transmitting base plate surface is communicated with exterior by means of pipeline in the flat-plate mould; injecting colour photopolymerisable high-molecular solution by means of pipeline in the flat-plate mould; then using UV ray to irradiate the back surface of said light-transmitting base data to make the solid matter contained in colour photopolymerisable high-molecular solution injected into the recessed groove be reacted and settled on the surface of said light-transmitting base plate. Said invention reduces production procedures, and can reduce production cost, and is suitable for producing base plate with ultralarge size.
Description
Technical field
The invention relates to a kind of photopolymerization macromolecule method of patterning of on the planar substrates of a printing opacity, making.Particularly about a kind of manufacturing method of color filters.
Background technology
The color liquid crystal flat-panel screens has been widely used for notebook computer, monitor and televisor and the various mancarried device that screen is arranged, as personal digital assistant and mobile phone etc.The color liquid crystal flat-panel screens generally comprises a white backlight module that provides even towards light source; A transparent substrates that is loaded with counter electrode by the colored filter that is loaded with electrode and another sheet combines and is perfused with the liquid crystal casket of one deck liquid crystal between two plate bases; Liquid crystal casket and two Polarizers that are attached to its front and back form the light valve (LightValve) of a control by the luminous flux of each picture element jointly; And the driving circuit that is connected with above-mentioned electrode tips and signal, power control system.
Colored filter is mainly to comprise the color filtering film pattern of red, green, blue three looks, is coated on the transparent substrates and corresponding each picture element is controlled the color of the light that penetrates light valve.Also have in addition on the real estate of colored filter with under the colour filter film reflectance coating pattern of part opening being set, make liquid crystal casket light valve that the semi-reflection-type LCD of part printing opacity, partial reflection be arranged at each picture element.In the reflecting part, the light means of access has more than the twice colour filter film thickness, in the light transmission part then light only by once, so homogeneity of colour filter film thickness or to distribute also be to influence the factor that color presents.Generally speaking, accounting for the colored filter of the maximum material cost ratio of color liquid crystal panel, is the vital part of decision LCD colour picture quality.
General colored filter is combined as a picture element with the colour filter film that comprises red, green, blue three looks, comes a base unit of corresponding colour liquid crystal display device picture.Just picture element comprises the sub picture element of red, green, blue three looks.When the liquid crystal in the pairing liquid crystal casket of each sub picture element zone changed arrangement by the control of drive signal, light penetrates Polarizer through this sub picture element luminous flux had certain variation.The observer can discover the color that is presented after three red, green, blue sub picture element three mixture of colours in this zone in a flash at this.Here it is uses the principle that presents in the three primary colors colour mixture that comprises on the general display such as color cathode ray tube.Except colour liquid crystal display device, the plasma display panel (Plasma Display) of organic light emitting diode that emits white light (Organic EL Display) or PLED (Polymer EL Display) display, excitation deficiency or Field Emission Display (Field Emission Display) also have the needs that use colored filter.
The sub picture element of red, green, blue three looks of colored filter generally is generally called black matrix" (Black Matrix) usually with lighttight grid matrix frame, comes its position of standard, also can prevent adjacent sub picture element light leak simultaneously, strengthens the contrast of picture.The live width of black matrix" frame is usually ten to tens of microns sizes.With the synthetic single square picture element of adjacent red, green, blue three look sub picture elements, its size then many more than 100 microns to hundreds of microns scope.Red, green, blue three look sub picture elements be arranged in the application of popularizing at present, the most in vogue with the adjacent in line shape of three color ratios, as notebook computer, monitor and televisor and various mancarried device such as personal digital assistant and the mobile phone etc. that screen is arranged.
On a planar substrates, settle fine pattern traditionally, how with various print process and utilize photoresistance to cooperate light lithography imaging method (Photolithography) to make.And the manufacturing technology of colored filter is to develop in this way.
Colored filter is mainly being made with so-called pigment dispersing method (Pigment DispersedColor Filter Method) in recent years, and be supplied to thin film transistor (TFT) (Thin Film Transistor, TFT) type or supertwist are to row (Super Twisted Nematic, STN) type liquid crystal panel manufacturer.Pass by in addition also to have and method with electricity and make the liquid crystal panel colored filter.Other method that is used to produce colored filter also has decoration method, print process and various motion, and detailed content can be consulted two jiaos of Shens of Japanese and be controlled " Color Filter " a book of writing.
With the product that the pigment dispersing method is produced, make ability and become main flow with high-reliability and fine pattern.Its processing procedure is on the transparent substrates of glass, quartz or plastic material, black matrix", red, green and blue pattern is reused light lithography imaging processing procedure make.Each layer pattern all passes through the step of cleaning, coating, drying, exposure, development and baking.
Black matrix pattern can be to have on the transparent substrates of one deck shading chromium film at sputter, uses that the eurymeric photoresistance exposes, development and etched conventional photolithographic processing procedure make.Also can use the black resin photoresistance of minus directly to make black matrix pattern in addition, save the step of plated film, etching and eurymeric photoresistance stripping.Black matrix" is general to be required to have enough shaded effects and is index with optical concentration (Optical Density).Giant display requires usually greater than 3, and small-medium size person then is not less than 1.0.Therefore the general chromium film thickness that uses is the scope below hundreds of nanometers greatly, the black resin photoresistance then about about one micron to several microns scope.Black matrix pattern is the first road processing procedure normally, is used to set various to bit pattern.Because of the existing problems of chromium metal in environmental protection, make the method for utilizing the black resin photoresistance to make black matrix pattern come into one's own gradually, because can having reduced the chromium film, it is plating and etched step.But the optical concentration of black resin is low, and thickness must just can be accepted more than one micron about.And when making red, green and blue photoresistance pattern, because all inevitably there is not accuracy error in the control of exposure aligning precision and pigmented light wire spoke.Must make each colored pattern and black matrix pattern have certain overlapping to avoid light leak in the conventional pigment dispersion method at intersection.The storehouse that therefore the coloured light resistance layer is unavoidably arranged on the black matrix pattern edge.When everybody pursued the high optical concentration of resin black matrix, its thickness also and then increased, and causes the smooth inadequately difficulty of colored filter integral surface to be difficult to more overcome.
Red, green and blue pattern is identical with black resin photoresistance processing procedure, equally uses the pigmented light material through coating, drying, exposure, development and sclerosis.Each colour filter film thickness many about about one micron to several microns scope, monochromatic uniform film thickness degree is with the highest scope of comparing with minimum then at 0.1～0.2 micron.With the black matrix" of TFT LCD use chromium film, film thickness difference of all kinds, or the common name section is poor, then allows the scope at 0.2～0.3 micron.If use resin black matrix then because of repeatedly the look drop is big, in the conventional process often with the flatness layer that is coated with several micron thickness or often be called protective seam (overcoat) and obtain about 0.2 micron flatness.Protective seam is generally the thermohardening type macromolecule.They utilize macromolecule to add heat flow basically, lean on gravity and surface tension to cover the out-of-flatness of substrate surface.In addition on the one hand, utilizing the large-area flat-plate abrasive method to strengthen flatness also uses for the dealer already.
Pigmented light makes pigment dispersing in pigment dispersing method processing procedure in minus photoresistance solution.General pigmented light, except that pigment, with the photoresistance of most photopolymerization polymer system by identical forming.They mainly comprise the photoreactive monomer that contains single or multiple unsaturated double-bond functional groups of using free radical polymerization, and as esters of acrylic acid, methyl acrylic ester, phenylethylene etc. and their derivative compound, and exposure produces the light initiator of free radical.Various pigment dispersion methods can be seen in many disclosed documents.The commercial pigmented light material of many families also is widely used in each colored filter factory.The colored filter made from the pigment dispersing method becomes main flow with high-reliability and fine pattern making ability.But it need pass through the step of little shadow imaging (Photolithography) of multiple tracks complexity, and will use expensive coating and contraposition exposure sources.Especially when the pursuit productivity effect was amplified substrate area rapidly, its cost of investment can further increase the weight of the producer's burden.
In half reflection color monitor purposes, aluminum metal and its alloy often are used as reflectance coating.And the black photoresistance is made into product with red, green and blue colour filter film with identical light lithography imaging method.But since in the sub picture element of all kinds at the colour filter film thickness of reflectance coating light transmission part and reflecting part much at one, therefore when the printing opacity position presents enough excitations and brightness, reflect the position and come and gone twice owing to the light one-in-and-one-out, make brightness or reflectivity deficiency.The colour filter film is suitable with the reflection position at the thickness of reflectance coating opening in the colored half-reflecting display of tradition, therefore when backlight when showing the colour picture of suitable excitation, no reflection type color picture backlight can have the problem of luminance shortage because of light through the absorption of twice colour filter film.If the colour filter film thickening at printing opacity position then can be cooperated the light openings area easily, adjust the balance of the colour picture at reflection position and printing opacity position.Yet in conventional process, have only through every look repeat once to be coated with, the processing procedure of little shadow imaging, development and baking, just might thicken the colour filter film at printing opacity position.Such manufacturing cost is difficult to be accepted by the manufacturer.
Summary of the invention
For overcoming the shortcoming of above-mentioned prior art, fundamental purpose of the present invention is to provide a method for manufacturing colored filtering substrate, and this method can reduce the manufacturing course of numerous and diverse costliness and reduce manufacturing cost.
For achieving the above object, the invention provides a kind of method for manufacturing colored filtering substrate, this method is at the flat plate mold with the open fine diversion groove of single face, after the transparent substrates applying that is equipped with black matrix pattern, make each painted light reaction Polymer Solution be full of the transparent substrates face of each sub picture element position and the space between the diversion groove, expose from transparent substrates side light reflex Polymer Solution again, make wherein consolidate contain the thing polymerization, sedimentation adheres to the transparent substrates face.
Black matrix pattern among the present invention is to make of black resin, and when when the transparent substrates side expose, the colored photopolymerizable macromolecule is deposited within the black matrix" frame more, has therefore avoided changing look in the prior art and produces irregular shortcoming.
The present invention also provides a kind of method for manufacturing colored filtering substrate, this method is utilized the adjustment that can contain the concentration of thing in the colored photopolymerizable Polymer Solution through consolidating of light reactive deposition, make sclerosis back thickness of all kinds close, thereby avoid using flatness layer with black resin matrix pattern thickness.
The present invention further provides a kind of method for manufacturing colored filtering substrate, this method is utilized uncoloured transparent optical polymerization macromolecule solution, via the pipeline in the same plane mould, before the colored photopolymerizable Polymer Solution injects or finish after exposure deposits, carry out the injection identical, exposure depositional mode, to obtain suitable thickness and light-filtering characteristic of all kinds with above-mentioned colored photopolymerizable macromolecule.Because uncoloured transparent optical polymerization macromolecule is to inject, obtain the photopolymerization macromolecule composition of flatness so still can add heat flow easily after the polymerization of can selecting to expose after the colored photopolymerizable Polymer Solution is finished exposure deposition.
Processing procedure of the present invention has reduced expensive step such as the coating of red, green, blue three coloured light resistance at least and exposure, development, significantly reduced production cost, and unlike traditional method of spin coating, can there be large-sized restriction that is not easy to do because of substrate area is big or small, thereby be particularly suitable for the manufacturing of oversize substrate.
The processing procedure of color filtering film pattern provided by the invention and black matrix pattern is independently finished respectively, exempts the projection that pattern overlaps and produces in the conventional pigment dispersion method processing procedure, must be coated with the puzzlement of thick flatness layer or grinding.
Description of drawings
Fig. 1 is a matched moulds exposure diagrammatic cross-section of the present invention, comprise a flat plate mold 1 with groove (indicating with 2,3,4 according to red, green, blue three order of colors respectively) of corresponding red, green, blue three look sub picture elements, fit with transparent substrates 5 contrapositions, groove next door 6 directly is pressed together on the black matrix" picture frame 7, and the space of groove and transparent substrates 5 (indicating with 8,9,10 according to red, green, blue three order of colors respectively) will inject painted Polymer Solution, use ultraviolet ray 11 from transparent substrates 5 back-exposures again.
Fig. 2 is a painted macromolecule exposure sedimentation diagrammatic cross-section of the present invention, the groove of flat plate mold 1 (indicating with 2,3,4 according to red, green, blue three order of colors respectively) is fitted with transparent substrates 5 contrapositions, groove next door 6 directly is pressed together on the black matrix" picture frame 7, and consolidating in the solution contains thing (indicating with 12,13,14 according to red, green, blue three order of colors respectively) and is deposited on transparent substrates 5 surfaces because of ultraviolet ray 11 exposures.
Fig. 3 is a mould lamination pipeline sectional view of the present invention, the groove pipeline 15 that comprises certain sub picture element direction of the same colour of contacting, the groove pipe layers 16 of contact transparent substrates, the through hole 17 of communication groove and the via layer 18 at place thereof, it on the via layer 18 shunt conduit layer 19, having in this shunt conduit layer 19 and the vertical shunt conduit 20 of red, green, blue three look picture element orientations, is feed layer 21 on the shunt conduit 20, is carved with feed orifice 22 on the feed layer 21 and is used to be communicated with charging aperture 23.
Fig. 4 is a pipeline connectivity structure skeleton view in the mould of the present invention, and by groove surface perspective groove pipe layers plane 24, it extends to the plane, next door 25 of separating each colored photopolymerizable Polymer Solution.It is next to be the through hole 17 of via layer, descends the shunt conduit 20 of one deck to be communicated with feed orifice 26 under it again.
Fig. 5 is the floor map of groove pipe layers of the present invention, and its middle twill clathrate long strip type pattern 27 is flat surface of corresponding sub picture element of all kinds, then is the groove pipeline 28 for black light polymerization macromolecule flow of solution therebetween.
Fig. 6 is the skeleton view of the present invention towards the groove surface of mould, comprises the long strip type groove 29 of corresponding clathrate sub picture element, the groove next door 30 of corresponding black matrix pattern, and each homochromy groove of conducting and be positioned at the sub picture element intercommunicating pore 31 of via layer.
Fig. 7 is the planimetric map of groove pipe layers of the present invention, comprises the long strip type groove 32 of corresponding clathrate sub picture element and sub picture element opening 33 is left at its two ends.
Fig. 8 is the matched moulds diagrammatic cross-section of the corresponding sub picture element of the present invention, comprise the transparent substrates 35 applying moulds 36 that are loaded with reflectance coating pattern 34, and the groove next door 30 of this mould is pressed together on opening 37.After being full of long strip type groove 29 in the presence of coloured light polymerization macromolecule solution, ultraviolet light source 38 at random is from transparent substrates 35 back side illuminatons, makes to contain thing in the groove 29 admittedly and be deposited on reflectance coating top and opening 39 in the sub picture element scope, and there is thicker deposition 40 at this position.
Embodiment
Embodiment
The present invention is described in further detail below in conjunction with accompanying drawing.
The transparent substrates face that the invention relates to tightens a closely connected unification flat plate mold at the fluted pattern of binding face, and the space that this groove and transparent substrates face form is in communication with the outside by the pipeline in the flat plate mold, inject the photopolymerization Polymer Solution via the pipeline in the flat plate mold again, shine with ultraviolet ray via this transparent substrates back side then, make consolidating of the photopolymerization Polymer Solution that injects groove contain the thing reaction and be deposited on the transparent substrates face, and can comprise in this solution that colorant is to be used for making color filter patterns and products thereof.
The principal character of method for manufacturing colored filtering substrate among the present invention can be found out from schematic cross-section shown in Figure 1.Processing procedure of the present invention, be to use a flat plate mold 1, the one side has a plurality of parallel to each other and grooves respectively corresponding red, green, blue three look sub picture elements (indicating with 2,3,4 according to red, green, blue three order of colors respectively), and this groove is vertically through the direction of drawing.During concrete enforcement, the mould groove side is fitted towards transparent substrates 5 contrapositions of making black matrix pattern, groove next door 6 directly is pressed together on the black matrix" picture frame 7, again the colored photopolymerizable Polymer Solution is injected, and be full of the space (indicating with 8,9,10 according to red, green, blue three order of colors respectively) of red, green, blue three look grooves and transparent substrates 5.Expose facing to coloured light polymerization macromolecule solution from transparent substrates 5 back sides with ultraviolet ray 11 this moment again.The light reaction that ultraviolet ray 11 is passed in the colored photopolymerizable Polymer Solution that transparent substrates 5 excites red, green, blue three looks is formed.As shown in Figure 2, make to dissolve originally or be dispersed in consolidating in the solution to contain thing (indicating with 12,13,14 according to red, green, blue three order of colors respectively), because of the light reaction polymerization is deposited on transparent substrates 5 surfaces.Above-mentioned transparent substrates 5 can or be inhaled vacuum and strengthen fitting with the applying of flat plate mold 1 by pressurization.Be used to disperse or dissolve the molecular most of solvent of colored photopolymerizable high score, separate the space that is full of groove and can contain thing with consolidating of deposition.Can discharge flat plate mold 1 with colored photopolymerizable Polymer Solution unnecessary in solvent and each connecting pipe this moment by the mode of pressurization or vacuum absorption.And then transparent substrates 5 separated with flat plate mold 1, so flat plate mold 1 can repeat to re-use.
The making of middle plateform mould 1 of the present invention can utilize the contraposition lamination compression method that uses in the accurate multilayer board processing procedure to make.Flat plate mold 1 inside comprises the three-dimensional tube structure, as the shunting of guiding colored photopolymerizable Polymer Solution, injection and control fluid consecutive, for defeated pipeline.We can be simple this three-dimensional structure is cut apart by level in advance, each layer made respectively separately, contraposition gummed again makes each pipeline be communicated with and be communicated with the groove and the charging aperture in the outside, flat plate mold 1 two sides afterwards.The material of each layer use is optional from the metal material that is used for electronic installation.
The laminar metal material that has the excellent dimensions stability in principle all can use, and the metal material of particularly can be easily making through hole and pipeline in the photoetch mode is good.The proper metal material can be selected from stainless steel, copper, aluminium, iron-nickel alloy of common sheet form etc.The photoetch processing procedure is the same as the processing procedure of inner layer of printed-circuit board, uses eurymeric or minus photoresistance usually, finishes through steps such as coating, exposure, development, etching and strippings.Be applicable to various industrial positive and negative type photoresist of the present invention system, " " book all had detailed explanation to PhotoresistMaterialsand Processing in that Deforest showed.
When each metal level of making as shown in Figure 3, also can on same metal substrate face, repeat photoetch and control each etched depth, thereby finish as shown in Figure 3 merging via layer 16 and the three-dimensional structure of shunt conduit layer 17.Perhaps do two-sided contraposition exposure and etching, to reduce the step of primary gluing with a metal substrate.
Each metal level is after finishing the photoetch making; also can be coated with layer protective layer again; as the inert metal that coats one deck thickness below one micron with the mode of electroplating or electroless plating mode; perhaps as the sheet members of common metal die cast; the mode application with the macromolecule electricity and count micron thickness and heat film forming again and handle, make layer on surface of metal avoid oxidative attack.The macromolecule electricity coating also can comprise the ultraviolet composition of absorption, as dyestuff or pigment etc.
Be generally used for the photosensitivity organic dielectric materials of electronic installation, also can be used to make flat plate mold 1.The for example common photosensitivity pi that utilizes the radical photopolymerization reaction, the epoxy compound of acrylic upgrading or phenolics, and other light reaction polymer system etc. that utilizes cationic photopolymerization.These light reaction polymer systems can utilize light lithography imaging method (photolithography) successively with the mode pattern-making of contraposition, are stacked into three-dimensional pipeline configuration.
The size of groove pipeline, through hole, shunt conduit and the feed orifice etc. of each layer is decided according to colored filter product pattern fineness among above-mentioned Fig. 3 and Fig. 4.Concerning the LCD of large scale TFT LCD and hand-held small-medium size, the spacing of its red, green, blue three look sub picture element center to center is mostly about in the of 100 microns, and the wire spoke of black matrix" is many more than tens microns.Therefore with plane wide cut size, also 100 microns scopes up and down, through hole then is slightly less than 100 microns to the groove pipeline approximately, and shunt conduit then can be wide to hundreds of microns, can be tens of to hundreds of microns between each shunt conduit, the feed orifice size be then allowed bigger design.Charging aperture then can the machine drilling mode be made and is cooperated the connection of each fluid turnover with pipeline.Each layer thickness is then mostly about the scope more than tens microns.Because each layer is communicated with the error of contraposition at least greatly about more than 5 microns, therefore its precision less demanding on making in the processing procedure of traditional color filter.
The applying of each interlayer in the Mold Making then can utilize the resin glue contraposition bonding.Resin glue is principle according to the solvent property of colored photopolymerizable Polymer Solution to be difficult for by the nip person.Suitable glue material can be selected from various pressure-sensitive glue materials commonly used, as acrylic polymkeric substance or silica gel and rubber and hot melt adhesive etc.Suitable glue material also can be selected from the macromolecular compound of various heat-curing types commonly used, as the unsaturated acrylic functional group of tool resin, vinyl resins, epoxy radicals resinoid and the U.S. resin of anti-ware the etc.
And the next door between the groove that transparent substrates 5 is fitted can make in the photoetch mode of metal material as previously discussed, perhaps also can utilize the light reaction macromolecular material to make by the light lithography imaging method.Suitable light reaction macromolecular material can be selected from general photoresist, especially with comparatively suitable than the flexible minus photoresistance of tool in the design of molecular structure.Minus photoresistance commonly used can utilize various macromolecule resins that the acrylic free radical carries out the photosensitivity cross-linking reaction and composition thereof to be representative.Make one's options according to the opposing character of macromolecule resin behind the commissure in principle facing to coloured light polymerization macromolecule solution.Suitably the photoresist composition also can add composition, dyestuff or the pigment that ultraviolet ray is had the strong molecular structure that absorbs.
After above-mentioned each pipe layers, the independent making of each layer, the upright method for making of gummed group mainly is for clearly demonstrating the arrangement of pipeline in the mould.Pipeline configuration among the present invention also can be that metal level mixes stack and makes with photosensitive polymer layer, and it is upright also to be not limited to the independent back gummed group of making of each layer.With metal level, the two-sided contraposition and (half etching) technology that etches partially are already by being familiar with as the typographical printing industry and using.Therefore for example, via layer and shunt conduit layer also can be produced in the metal level simultaneously.But the structure of mould also frame is upright or be glued at a dull and stereotyped pedestal, as on smooth glass, quartz or metal and the engineering plastics plate to keep planarization.
Three-dimensional tube connectivity structure in the flat plate mold 1 can be as Fig. 3, in a corresponding colored filter, further specifies along the section of the groove pipeline 15 of the direction of consecutive sub picture element of the same colour.Comprising the groove pipe layers 16 of preparing contact transparent substrates 5 among the figure, adhere to the via layer 18 that is drilled with for the through hole 17 of fluid turnover closely, then is for the shunt conduit layer 19 of transporting fluid to each groove on it via each through hole.Owing to there are three coloured light polymerization macromolecule solution to go out at the shunt conduit laminar flow influent stream of the direction of a certain sub picture element of above-mentioned consecutive, therefore the parallel red, green, blue three look orientations of a corresponding colored filter respectively have three shunt conduit 20 to use for red, green, blue three coloured light polymerization macromolecule solution end to end.The direction of shunt conduit is to intersect vertically with the groove pipeline perpendicular to this drawing and be connected with through hole 17 in the junction.On the shunt conduit layer 19, then be carved with feed orifice 22, be used to be communicated with charging aperture 23 for feed layer 21.
Fig. 4 is the pipeline connectivity structure behind the gummed, to get the skeleton view that a fritter leans on the pixel set of picture housing and faces the groove surface of flat plate mold 1 in the corresponding colored filter, further describes the position of each pipeline and through hole.Begin to have the part of vertical shading among this figure by groove pipe layers 16 (referring to Fig. 3), the groove pipe layers plane 24 that representative will be fitted with transparent substrates 5.This plane extends to the plane, next door 25 of separating each colored photopolymerizable Polymer Solution.Then via layer 18 (referring to Fig. 3) on the groove pipe layers,, staggered according to the colored photopolymerizable Polymer Solution respectively among Fig. 4 in the groove duct orientation with the through hole 17 of ten o'clock direction twill shade sign.Again in the shunt conduit 20 of last layer then in these corresponding photopolymerization Polymer Solution of all kinds and groove pipeline 15 homeotropic alignments, and be communicated with via through hole 17 with homochromy groove pipeline.Each colored photopolymerizable Polymer Solution then as being example with certain feed orifice of the same colour 26 among Fig. 4, is communicated with importing from the upper strata with shunt conduit 20.
Its viscosity of colored photopolymerizable Polymer Solution among the present invention serves as suitable to be no more than 100cps person.Viscosity is too high, can make the time lengthening that injects groove and be not suitable for producing.Tradition is used the pigmented light of making colored filter at pigment dispersing method processing procedure, perhaps uses organic pigment other minus pigmented light or other colored photopolymerizable macromolecular material in addition all applicable.The unique difference of pigmented light and colored photopolymerizable macromolecular material is that the former must consider that unexposed material with exposure will have dissolving and undissolved contrast when developing.Both there is no too big difference in an application of the invention principle.Use its viscosity of commercial pigmented light of organic pigment generally all to be no more than 20cps.In principle, above-mentioned various photoresistance or photopolymerization Polymer Solution are many can adjust its viscosity with the addition of solvent easily.
The high molecular composition of colored photopolymerizable consists essentially of colorant, photopolymerization reaction initiator and the monomer or the higher few body of molecular weight that have the polyreaction functional group.Polymerization single polymerization monomer wherein can be to have the single reaction functional group, also can be to have two above reactive functional group bases.When containing an amount of single reaction functional group monomer in the composition, the texture ratio of exposure polymerization is easier to flow when heated baking and becomes smooth.Processing procedure of the present invention also has the uncoloured photopolymerization macromolecule of use to adjust thickness, and its suitable composition is identical with the high molecular composition of colored photopolymerizable except colorant.Also normal in addition selection adds and is used for the agent of stable dispersion dispersing of pigments, increases the heat polymerization functional group of commissure degree, promotes the smooth agent (leveling agent) of flatness etc.In many documents of having delivered, use organic pigment and use at colored filter, for example United States Patent (USP) 6,514,644, United States Patent (USP) 6,348, and 298 and United States Patent (USP) 6,284,432, the colored photopolymerizable macromolecule of organic solvent type is formed the explanation that detailed complete is all arranged.Same, form at water-based colored photopolymerizable macromolecule, then can see as United States Patent (USP) 6,475 683 and United States Patent (USP) 6,416,174 documents such as grade for details.
Processing procedure of the present invention can vacuumize after the groove surface pressing with transparent substrates 5 and flat plate mold 1, so that the next door face and the substrate of groove are fitted closely when applying again.Before the colored photopolymerizable Polymer Solution injected, available changeover valve door switch was controlled, direct traffic.In case solution is full of the space in the flat plate mold 1, can closes charging aperture of all kinds immediately and keep other outlet and keep the state that vacuumizes.And then, make that containing thing admittedly in the solution is deposited on the transparent substrates face from transparent substrates 5 back side illuminaton ultraviolet rays.Close ultraviolet ray subsequently, again each charging aperture is opened, allow air or appropriate solvent flow into and remove residual liquid in the pipeline.Deposit the second layer if desired again,, can repeat above-mentioned steps as the photopolymerization Polymer Solution.As denying die sinking after then the available air pressurization pours into, separation transparent substrates 5 and mould 1.The transparent substrates of finishing 5 is again through heat treated, to drive residual solvent and to make the planarization of flowing of photopolymerization macromolecule.Further sclerosis usually need high temperature, the therefore thermal treatment that also can take segmentation to heat.Thermal treatment heat in principle according to the selection of polymer system, the design of commissure structure and thermal response behind the photopolymerization reaction and deciding.With common acrylic system, mobile planarization can be at 150 degree Celsius approximately following and then be warming up near 200 degree spend to 250 between the unreacted unsaturated link of commissure polymerization.The photopolymerization macromolecule utilizes limited commissure structure more when light reaction, adding heat flow and still can carry out after making.Limited commissure structure is all reached to use more low reaction functional group and do not have a macromolecule sticker (binder) of light reaction function in the composition of photoreactive monomer.
How the manufacturing of general colored filter makes a plurality of colored filters on same transparent substrates 5, such as substrate size with so-called TFT three generations production line 550 * 650mm, can arrange the colored filter that 4 diagonal angles, 15 English inch size is used for monitor, or, can dispose the up to a hundred colored filters that are lower than 2 English inch sizes for mobile phone use, diagonal line as 370 * 470mm substrate.When using technology of the present invention to make colored filter, can in shunt conduit layer 19 as shown in Figure 3, utilize shunt conduit 20 color separations to be communicated with the pipeline of corresponding each colored filter.To the injection and the discharge of certain solution of the same colour, can only utilize a charging aperture and be communicated to each colored filter, discharge by a single outlet then.The configuration how many colored filters are arranged on the same plate base is depended in the arrangement of charging aperture and escape hole quantity and position.Suitably used diaphragm and ito transparent electrode among the present invention are employed identical with conventional process.
Black matrix pattern on the transparent substrates 5 that uses in the above-mentioned processing procedure, the photopolymerization Polymer Solution that also can utilize black is according to making as above-mentioned processing procedure.But wherein need only use a kind of colored photopolymerizable Polymer Solution, and groove pattern is same as black matrix pattern, as shown in Figure 5.Fig. 5 is the floor map of a flat plate mold 1 groove pipe layers 16, and its middle twill clathrate long strip type pattern 27 is flat surface of corresponding sub picture element of all kinds, then is corresponding black matrix pattern and the groove pipeline 28 that supplies black light polymerization macromolecule flow of solution therebetween.The twill grid pattern of left side and upside periphery is identical with the flat surface 27 of above-mentioned corresponding sub picture element of all kinds among Fig. 5, is used for standard black light polymerization macromolecule flow of solution.After the photopolymerization macromolecule sedimentation of black, finish the making of black matrix" again through opening film, baking, sclerosis.So processing procedure of the present invention also thereby can not use expensive precision coating and contraposition exposure machine has fully also been exempted simultaneously the burden of handling coloured waste liquid in the developing machine.
Red, green, blue trichromatic diagram case is carried out heated baking according to conventional process to substrate after finishing again, and it is moving to make that consolidating of red, green, blue three looks deposition contains logistics, increases flatness, also hardens because of hot cross-linking reaction simultaneously.Be coated with transparency electrode at last again, (Indium TinOxide ITO), thereby finishes the making of colored filter as the tin indium oxide.Also can add the polymer protection layer (overcoat) of last layer printing opacity before the ITO coating earlier with traditional coating method, obtain more smooth surface.Also can not use the colored filter of transparency electrode on the other hand, for example can be used for the plane liquid crystal that wide viewing angle shows reverse (In Plane Switching, IPS).
The present invention uses at the mould of each sub picture element as the clathrate sub picture element groove of unit, after red, green, blue trichromatic diagram case is finished deposition, sclerosis, on transparent substrates 5, be coated with one deck black resin photoresistance comprehensively, again through making black photoresistance polymerization between the red, green, blue trichromatic diagram case with ultraviolet ray 11 exposures from transparent substrates 5 back sides, on the red, green, blue trichromatic diagram case black photoresistance then because of three look pigment to the ultraviolet polymerization deficiency that partially absorbs, therefore can be developed the liquid flush away.The mould of above-mentioned clathrate sub picture element groove, as Fig. 6 towards shown in the perspective diagram of the groove surface of mould, it is the long strip type groove 29 that comprises clathrate sub picture element on the corresponding colored filter, the groove next door 30 of corresponding black matrix pattern, be positioned at groove pipe layers 16, and be used for each homochromy groove of conducting and be positioned at sub picture element intercommunicating pore 31 as the via layer 18 of Fig. 3 as Fig. 3.Processing procedure of the present invention has omitted the step that flat plate mold 1 is fitted to transparent substrates 5 contrapositions, further reduces the burden of precision equipment.Also can do some change in addition, simplify the making of via layer 18 in long strip type groove 29 and groove next door 30.The planimetric map of groove pipe layers 16 as shown in Figure 7 can stay sub picture element opening 33 in the two ends of the long strip type groove 32 of each clathrate sub picture element on corresponding colored filter, exempt the making of sub picture element intercommunicating pore 31 among Fig. 6.
Utilize the black resin photoresistance after red, green, blue three looks are finished, on transparent substrates 5, be coated with one deck black resin photoresistance comprehensively, then from back-exposure, only stay the method that the black resin photoresistance between the red, green, blue three look sub picture elements is made black matrix pattern after the development, in the colored filter manufacturing industry is the technology of knowing, and at the existing report of disclosed document, for example United States Patent (USP) 5,213,850 etc.Yet when reserving under the situation of sub picture element the window's position of all kinds in advance at no black matrix pattern with conventional pigment dispersion method processing procedure, make red, green, blue three looks respectively, will be limited by the not accuracy of contraposition exposure, so that can't fix the distance between the sub picture element of all kinds, also just can't obtain correct black matrix pattern.And the foregoing invention processing procedure does not have the problem of contraposition with red, green, blue three looks according to mould groove pattern once-paving, therefore can obtain correctly black matrix pattern accurately.
The present invention further provides a method of making the colored filter that is used in the semi-reflective color monitor.As Fig. 8 with a sub picture element shown in the section of colored photopolymerizable Polymer Solution flow direction, one transparent substrates 35 that presets light tight reflectance coating pattern 34 is fitted tightly an identical as shown in Figure 6 mould 36, and make the groove next door 30 of this mould be pressed together on the opening 37 of corresponding black matrix pattern in the reflectance coating pattern.After being full of long strip type groove 29 in the presence of coloured light polymerization macromolecule solution, with radiation direction ultraviolet light source 38 comparatively at random, all contain thing admittedly and almost all deposit in groove 29 from transparent substrates 35 back side illuminatons, so make the opening 39 of reflectance coating in each sub picture element scope, compare with the reflectance coating top, the high molecular deposition 40 of thicker colored photopolymerizable is arranged.Reflectance coating wide cut in the reflectance coating pattern between each adjacent apertures 39 is exceeded with groove 29 degree of depth that are not more than mould.So the oblique fire ultraviolet light cooperates free radical or the cationic high-molecular chain reaction characteristic that has activity originally, can carry out the polymerization deposition in the zone of no ultraviolet vertical exposure above reflectance coating.Transparent substrates can make film thickness uniformity improve through overbaking after the die sinking, also guarantees that there are enough colour filter film thicknesses the reflectance coating top simultaneously.After the colour filter film sclerosis, the painting black photoresistance as above-mentioned behind exposure manufacture process, makes among Fig. 8 that the black photoresistance on the real estate of the opening 37 of corresponding black matrix pattern is retained in the reflectance coating pattern then after development on transparent substrates.
Therefore this processing procedure has describedly been exempted the step that repeats in the conventional process and has been reduced the equipment cost except previous, has more promoted reflection and the balance that penetrates the picture of two kinds of patterns.
Claims (15)
1. the manufacture method of a photopolymerization macromolecule pattern is characterized in that, this method comprises the steps:
Tighten closely connected unification a flat plate mold at a transparent substrates face, and the space of this groove and the formation of transparent substrates face is in communication with the outside by the pipeline in the flat plate mold at the fluted pattern of binding face;
Inject the photopolymerization Polymer Solution via the pipeline in the flat plate mold again;
Shine with ultraviolet ray via this transparent substrates back side then, be deposited in the transparent substrates face and make consolidating of the photopolymerization Polymer Solution that injects groove contain the thing reaction;
On transparent substrates, finish photopolymerization macromolecule pattern through die sinking again.
2. manufacture method as claimed in claim 1 is characterized in that, the photopolymerization Polymer Solution is formed and comprised colorant.
3. a manufacturing method of color filters is characterized in that, this method comprises the steps:
Tighten closely connected unification a flat plate mold at a transparent substrates face, and the space of this groove and the formation of transparent substrates face is in communication with the outside by the pipeline in the flat plate mold at the fluted pattern of binding face;
Inject the colored photopolymerizable Polymer Solution via the pipeline in the flat plate mold again;
Shine with ultraviolet ray via this transparent substrates back side then, be deposited in the transparent substrates face and make consolidating of the colored photopolymerizable Polymer Solution that injects groove contain the thing reaction.
4. manufacture method as claimed in claim 3, it is characterized in that, after consolidating in the colored photopolymerizable Polymer Solution contains thing and is deposited in the transparent substrates face, consolidating of sedimentation contains thing residual liquid in addition in the removing groove earlier, again not contain colorant and can after photopolymerization, heat the high molecular solution of the photopolymerization of planarization and inject, repeat the ultraviolet ray irradiation afterwards and make it contain thing admittedly to be deposited on the colored photopolymerizable macromolecule.
5. a manufacturing method of color filters is characterized in that, this method comprises the steps:
Tightening closely connected unification at a transparent substrates face has the flat plate molds of many group grooves at binding face, and the spaces that should many group grooves form with the transparent substrates face, organizes independently by complying with each in the flat plate mold that pipeline is in communication with the outside;
Via respectively organizing independently pipeline in the flat plate mold, inject the colored photopolymerizable Polymer Solution of different colours respectively according to group again;
Shine with ultraviolet ray via this transparent substrates back side then, be deposited in the transparent substrates face and make consolidating of the colored photopolymerizable Polymer Solution that injects groove contain the thing reaction.
6. manufacture method as claimed in claim 5 is characterized in that transparent substrates is loaded with black matrix pattern in advance at binding face, and fits with the position contraposition of printing opacity in the groove position of flat plate mold and the black matrix".
7. manufacture method as claimed in claim 5, it is characterized in that, after consolidating in the colored photopolymerizable Polymer Solution contains thing and is deposited in the transparent substrates face, consolidating of sedimentation contains thing residual liquid in addition in the removing groove earlier, again not contain colorant and can after photopolymerization, heat the high molecular solution of the photopolymerization of planarization and inject, repeat the ultraviolet ray irradiation afterwards and make it contain thing admittedly to be deposited on the colored photopolymerizable macromolecule.
8. manufacture method as claimed in claim 5 is characterized in that, groove is divided into 3 groups, injects red, green and blue colored photopolymerizable Polymer Solution respectively.
9. manufacture method as claimed in claim 8 is characterized in that, the corresponding red, green, blue of the groove of flat plate mold sub picture element pattern of all kinds is arranged with clathrate, and homochromy adjacent grooves communicates with each other via the through hole in the flat plate mold.
10. manufacture method as claimed in claim 5, it is characterized in that, transparent substrates finish contain the thing sedimentation admittedly after, after die sinking, thermal treatment sclerosis, on transparent substrates, be coated with one deck black photoresistance again, then by the transparent substrates back-exposure, and containing beyond the thing sedimentation position admittedly and retaining black matrix pattern through developing again through exposed areas.
11. manufacture method as claimed in claim 10, it is characterized in that, transparent substrates is loaded with the reflectance coating pattern in advance at binding face, and this reflectance coating pattern comprises the printing opacity pattern of the black matrix pattern of corresponding colored filter, and corresponding to a plurality of openings in the sub picture element of all kinds zone, and each adjacent apertures Edge Distance is not more than the degree of depth of mould groove, and when flat plate mold and transparent substrates applying, the position contraposition of the sub picture element of all kinds of reflectance coating pattern is fitted on the groove position of mould and the transparent substrates, and with the ultraviolet ray of diffusion from the transparent substrates back side illuminaton.
12. manufacture method as claimed in claim 8, it is characterized in that, the corresponding red, green, blue of the groove of flat plate mold sub picture element pattern of all kinds is arranged with clathrate, and has less than the opening of its adjacent boundary length between corresponding homochromy sub picture element and the adjacent groove and communicate with each other.
13. manufacture method as claimed in claim 5 is characterized in that, transparent substrates finish contain the thing sedimentation admittedly after, after die sinking, thermal treatment sclerosis, coating one deck black photoresistance on transparent substrates by the transparent substrates back-exposure, is finished black matrix pattern through development then more again.
14. manufacture method as claimed in claim 13, it is characterized in that, transparent substrates is loaded with the reflectance coating pattern in advance at binding face, and this reflectance coating pattern comprises the printing opacity pattern of the black matrix pattern of corresponding colored filter, and corresponding to a plurality of openings in the sub picture element of all kinds zone, and each adjacent apertures Edge Distance is not more than the degree of depth of mould groove, and when flat plate mold and transparent substrates applying, the position contraposition of the sub picture element of all kinds of reflectance coating pattern is fitted on the groove position of mould and the transparent substrates, and with the ultraviolet ray of diffusion from the transparent substrates back side illuminaton.
15. a colored filter is made via manufacture method as claimed in claim 5.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 03156640 CN1591055A (en) | 2003-09-05 | 2003-09-05 | Method for mfg. colour optical filter |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 03156640 CN1591055A (en) | 2003-09-05 | 2003-09-05 | Method for mfg. colour optical filter |
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| CN1591055A true CN1591055A (en) | 2005-03-09 |
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| CN 03156640 Pending CN1591055A (en) | 2003-09-05 | 2003-09-05 | Method for mfg. colour optical filter |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1900747B (en) * | 2005-07-18 | 2010-04-14 | 中华映管股份有限公司 | Method and device for producing color filter sheet |
| CN102644864A (en) * | 2011-02-21 | 2012-08-22 | 松下电器产业株式会社 | Light-emitting device and lighting fixture using the same |
| CN105158829A (en) * | 2015-07-30 | 2015-12-16 | 京东方科技集团股份有限公司 | Substrate, color filter module, method for forming substrate module and display device |
| JP2016029457A (en) * | 2014-07-18 | 2016-03-03 | 大日本印刷株式会社 | Low reflection sheet |
| TWI602171B (en) * | 2016-03-18 | 2017-10-11 | 財團法人工業技術研究院 | Display device |
-
2003
- 2003-09-05 CN CN 03156640 patent/CN1591055A/en active Pending
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1900747B (en) * | 2005-07-18 | 2010-04-14 | 中华映管股份有限公司 | Method and device for producing color filter sheet |
| CN102644864A (en) * | 2011-02-21 | 2012-08-22 | 松下电器产业株式会社 | Light-emitting device and lighting fixture using the same |
| JP2016029457A (en) * | 2014-07-18 | 2016-03-03 | 大日本印刷株式会社 | Low reflection sheet |
| CN105158829A (en) * | 2015-07-30 | 2015-12-16 | 京东方科技集团股份有限公司 | Substrate, color filter module, method for forming substrate module and display device |
| CN105158829B (en) * | 2015-07-30 | 2019-06-04 | 京东方科技集团股份有限公司 | Substrate, colored filter mould group, the method and display device for forming substrate mould group |
| US10317586B2 (en) | 2015-07-30 | 2019-06-11 | Boe Technology Group Co., Ltd. | Substrate, color filter module, method for forming substrate module and display device |
| TWI602171B (en) * | 2016-03-18 | 2017-10-11 | 財團法人工業技術研究院 | Display device |
| US9978821B2 (en) | 2016-03-18 | 2018-05-22 | Industrial Technology Research Institute | Display device |
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