CN1589950A - Filter device - Google Patents
Filter device Download PDFInfo
- Publication number
- CN1589950A CN1589950A CNA2004100714559A CN200410071455A CN1589950A CN 1589950 A CN1589950 A CN 1589950A CN A2004100714559 A CNA2004100714559 A CN A2004100714559A CN 200410071455 A CN200410071455 A CN 200410071455A CN 1589950 A CN1589950 A CN 1589950A
- Authority
- CN
- China
- Prior art keywords
- fluid passage
- filter
- installation
- vortex shape
- exhaust gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000012530 fluid Substances 0.000 claims description 56
- 238000009434 installation Methods 0.000 claims description 28
- 230000004888 barrier function Effects 0.000 claims description 3
- 239000000498 cooling water Substances 0.000 claims 1
- 239000002245 particle Substances 0.000 abstract description 28
- UGFAIRIUMAVXCW-UHFFFAOYSA-N Carbon monoxide Chemical compound [O+]#[C-] UGFAIRIUMAVXCW-UHFFFAOYSA-N 0.000 abstract 2
- 239000003546 flue gas Substances 0.000 abstract 2
- 238000000638 solvent extraction Methods 0.000 abstract 2
- 239000007789 gas Substances 0.000 description 43
- 238000004519 manufacturing process Methods 0.000 description 12
- 239000004065 semiconductor Substances 0.000 description 11
- 239000000463 material Substances 0.000 description 7
- 239000007788 liquid Substances 0.000 description 6
- 239000000835 fiber Substances 0.000 description 4
- 244000287680 Garcinia dulcis Species 0.000 description 3
- 230000009471 action Effects 0.000 description 3
- 239000007795 chemical reaction product Substances 0.000 description 3
- 230000008676 import Effects 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 2
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 2
- 239000003153 chemical reaction reagent Substances 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 239000004927 clay Substances 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- 238000007599 discharging Methods 0.000 description 2
- 239000000428 dust Substances 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 230000007246 mechanism Effects 0.000 description 2
- 239000007769 metal material Substances 0.000 description 2
- 239000003595 mist Substances 0.000 description 2
- 238000000465 moulding Methods 0.000 description 2
- 238000011144 upstream manufacturing Methods 0.000 description 2
- NWUYHJFMYQTDRP-UHFFFAOYSA-N 1,2-bis(ethenyl)benzene;1-ethenyl-2-ethylbenzene;styrene Chemical compound C=CC1=CC=CC=C1.CCC1=CC=CC=C1C=C.C=CC1=CC=CC=C1C=C NWUYHJFMYQTDRP-UHFFFAOYSA-N 0.000 description 1
- BPQQTUXANYXVAA-UHFFFAOYSA-N Orthosilicate Chemical compound [O-][Si]([O-])([O-])[O-] BPQQTUXANYXVAA-UHFFFAOYSA-N 0.000 description 1
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- BOTDANWDWHJENH-UHFFFAOYSA-N Tetraethyl orthosilicate Chemical compound CCO[Si](OCC)(OCC)OCC BOTDANWDWHJENH-UHFFFAOYSA-N 0.000 description 1
- 239000003463 adsorbent Substances 0.000 description 1
- 239000004411 aluminium Substances 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910021529 ammonia Inorganic materials 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000002485 combustion reaction Methods 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 239000002826 coolant Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 239000003456 ion exchange resin Substances 0.000 description 1
- 238000005468 ion implantation Methods 0.000 description 1
- -1 ion implantation Chemical class 0.000 description 1
- 229920003303 ion-exchange polymer Polymers 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 230000000505 pernicious effect Effects 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 239000000047 product Substances 0.000 description 1
- 229910000077 silane Inorganic materials 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
- B01D46/52—Particle separators, e.g. dust precipitators, using filters embodying folded corrugated or wound sheet material
- B01D46/521—Particle separators, e.g. dust precipitators, using filters embodying folded corrugated or wound sheet material using folded, pleated material
- B01D46/525—Particle separators, e.g. dust precipitators, using filters embodying folded corrugated or wound sheet material using folded, pleated material which comprises flutes
- B01D46/527—Particle separators, e.g. dust precipitators, using filters embodying folded corrugated or wound sheet material using folded, pleated material which comprises flutes in wound arrangement
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
- B01D46/0002—Casings; Housings; Frame constructions
- B01D46/0005—Mounting of filtering elements within casings, housings or frames
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
- B01D46/10—Particle separators, e.g. dust precipitators, using filter plates, sheets or pads having plane surfaces
- B01D46/12—Particle separators, e.g. dust precipitators, using filter plates, sheets or pads having plane surfaces in multiple arrangements
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
- B01D46/42—Auxiliary equipment or operation thereof
- B01D46/4263—Means for active heating or cooling
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2258/00—Sources of waste gases
- B01D2258/02—Other waste gases
- B01D2258/0216—Other waste gases from CVD treatment or semi-conductor manufacturing
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Filtering Of Dispersed Particles In Gases (AREA)
- Separating Particles In Gases By Inertia (AREA)
- Processes For Solid Components From Exhaust (AREA)
Abstract
To provide a filter apparatus capable of removing particulates, which are contained in a flue gas and include larger particulates with a large particle size and smaller particulates with a small particle size, proportionally with the speed of the flue gas. The filter apparatus comprises a casing 2 having an inlet 6 and an outlet 8, partitioning walls 3 having a plurality of swirling parts and installed in the casing 2 so as to form a swirling current path 11, and a filter member 4 installed at least one face of the partitioning walls 3 and the channel width A of the swirling part 3a at the outermost side of the swirling current path 11 is made wider than the channel width B of a swirling part 3b positioned in the inner side of the swirling part 3a.
Description
Background of invention
The invention technical field
The present invention relates to a kind of filter for installation, for example be used for semiconductor fabrication and liquid crystal manufacture process particulates such as reaction product configuration, that emission gases is contained are removed or with liquid in the mist that contains reclaim.
Prior art
In semiconductor fabrication, employing comprises the etching method of metals such as ion implantation, aluminium, the variety of way of CVD method, but no matter in the semiconductor fabrication of which kind of mode of employing, all generate the exhaust gas of particulates such as impurity such as pernicious gases such as being mixed with hydrofluoric acid, silane gas, tetraethoxysilane, ammonia and reaction product, other mists and dust.As everyone knows, particularly in the semiconductor fabrication of CVD method, the quantity that is blended in the particulate in the exhaust gas is many.
For this reason, in semiconductor fabrication, dispose the equipment of removing the evil that is used for removing the particulate that is blended in exhaust gas.
The existing equipment of removing the evil, the particulate that contains in the exhaust gas is adsorbed on the sorbing material of ion exchange resin or silicate and so on, or make it to be adsorbed in waterborne by water scrubber, and or utilize burner to burn and decompose, adopt such method to remove the particulate that contains in the exhaust gas.
When removing the particulate in the exhaust gas, in utilizing the equipment of removing the evil of sorbing material, the problem that existence causes the pressure loss of sorbing material per unit area to increase because of adsorbent particles, in the equipment that utilizes water scrubber to remove the evil, exist owing to make adsorption liquid become the clay shape and be necessary to carry out the problem that clay is handled by particulate, in the equipment of removing the evil that utilizes burning, there is the spray nozzle clogging of burner and the problem of contamination combustion chamber.
The applicant has developed that upstream one side of the equipment of removing the evil that disposes disposes as pretreating device in semiconductor fabrication, even when containing a large amount of particulate in the exhaust gas in the semiconductor fabrication, the filter for installation (for example with reference to Patent Document 1) of the maintenance of the equipment of also removing the evil easily.
Above-mentioned filter for installation, comprise: housing with entrance and exit, in housing, dispose, have a plurality of scroll portion and form the dividing plate of continuous vortex shape fluid passage, at least the filter member that on the one side of dividing plate, disposes, when the exhaust gas that imports in housing being advanced along the vortex shape fluid passage, utilization is configured in the filter member of vortex shape fluid passage the particulate that contains in the exhaust gas is removed, and sends into the equipment of removing the evil from exporting the exhaust gas that will remove particulate.
Patent Document 1 spy opens 2001-149723 communique (the 3rd page, Fig. 3)
Above-mentioned filter for installation, because the fluid passage width of the scroll portion of vortex shape fluid passage is set at identical dimension width from the outer end to the inner, the linear velocity that flows through the exhaust gas of vortex shape fluid passage accelerates in the outside of vortex shape fluid passage, slack-off in the inboard, therefore can not will arrange particulate removal that contain in the exhaust gas, pro rata with the speed of exhaust gas from the big particle of particle diameter to the little particle of particle diameter.
Summary of the invention
Consider the problems referred to above point, the object of the present invention is to provide a kind of filter for installation, this filter for installation can be by will flowing through the vortex shape fluid passage the linear velocity of exhaust gas slack-off in outside scroll portion, accelerate in inboard scroll portion, remove particulate that contain in the exhaust gas, pro rata with the speed of exhaust gas from the big particle of particle diameter to the little particle of particle diameter.
Constituting of filter for installation of the present invention, comprise: housing with entrance and exit, have a plurality of scroll portion and be configured in the housing to form the dividing plate of continuous vortex shape fluid passage, at least the filter member that disposes on the one side of dividing plate, the width of the fluid passage of the outermost scroll portion of vortex shape fluid passage is wideer than the fluid passage width of inboard scroll portion.
In addition, filter for installation of the present invention is the inner space layout circle cartridge filter at dividing plate, can make compact overall structure.
Because filter for installation of the present invention makes the linear velocity of the exhaust gas that flows through the vortex shape fluid passage slow down, speed in inboard scroll portion in outside scroll portion, so, by catching the big particle of the particle diameter that contains in the exhaust gas at the Outboard Sections of vortex shape fluid passage, catch the little particle of particle diameter, can remove particulate that contain in the exhaust gas, pro rata with the speed of exhaust gas from the big particle of particle diameter to the little particle of particle diameter in the inboard of vortex shape fluid passage.
Description of drawings
Fig. 1 is the longitudinal sectional drawing of the filter for installation of the preferred example of the present invention.
Fig. 2 is the profile along the line A-A of Fig. 1.
Fig. 3 is the figure of expression according to other examples of filter for installation of the present invention.
Best example
Below, describe filter for installation of the present invention with reference to the accompanying drawings in detail.
As depicted in figs. 1 and 2, filter for installation of the present invention comprises: cylinder shell 2, be configured in the Vorticose dividing plate 3 of the inside of cylinder shell 2, be configured in the filter member 4 on cylinder shell 2 and dividing plate 3 inner surfaces, and the cylinder-shaped filter 5 that is configured in the central portion of dividing plate 3.
As shown in Figure 1, above-mentioned cylinder shell 2 has: the 6 cylinder shell bodies 7 of upper end open that are arranged on the top of sidewall 7a that will enter the mouth have outlet 8 and are fixed on the lid 9 of the openend of cylinder shell body 7 at central portion.On the lower surface of lid 9, by fixed mechanism 10 cylinder-shaped filter 5 is installed accordingly with outlet 8.
As shown in Figure 2, above-mentioned vortex shape dividing plate 3 has 3 scroll portion 3a, 3b, 3c.The height of vortex shape dividing plate 3 is consistent with the height of tubular shell body 7 basically.When cylinder shell 2 internal configurations vortex shape dividing plates 3, form the vortex shape fluid passage 11 that extends continuously from outside to inside in the inside of cylinder shell 2.Preferably make the surface of vortex shape dividing plate 3 form male and fomale(M﹠F) or on vortex shape dividing plate 3, barrier plate is set.
Be formed at the inwall 2a of the cylinder shell 2 in the above-mentioned vortex shape fluid passage 11 and the vortex shape fluid passage 11a between outermost scroll portion 3a is set at its fluid passage width A, wideer than the fluid passage width B that is formed at scroll portion 3a and the fluid passage 11b between the scroll portion 3b of its inner side.Similarly, the fluid passage width B of the fluid passage 11b that will form between scroll portion 3a in the above-mentioned vortex shape fluid passage 11 and scroll portion 3b is set at, and is wideer than the fluid passage width C of the fluid passage 11c that forms between scroll portion 3b and the scroll portion 3c at its inner side.That is, vortex shape fluid passage 11 makes the fluid passage narrowed width in order by exhaust gas direction of advance, ecto-entad.
In the above-mentioned example, form by 3 scroll portion though form the vortex shape dividing plate 3 of vortex shape fluid passage 11, as required the quantity of changeable scroll portion.When the quantity of scroll portion is 6 when above, can make the fluid passage width of a plurality of fluid passages that comprise fluid passageway is identical width.
Above-mentioned filter member 4 is the lamellar moulding product that formed by hear resistance and resistance to chemical reagents fiber with excellent material, and the direction along the inner surface of vortex shape dividing plate 3 along vortex shape fluid passage 11 is configured.Filter member 4 is also configurable on two surfaces of vortex shape dividing plate 3.
Because above-mentioned filter member 4 utilizes the magnetic fibre moulding, so can reclaim powder and liquid or liquid entrainment effectively.
Identical with above-mentioned filter member 4, above-mentioned cylinder-shaped filter 5 is formed by hear resistance and resistance to chemical reagents fiber with excellent material.Cylinder-shaped filter 5 is configured in the central portion of dividing plate 3.The particulate that cylinder-shaped filter 5 will can not fully be removed in filter member 4, that particularly particle diameter is tiny is removed.Cylinder-shaped filter 5 also can utilize the material by composite fibre material and metal material to be formed, and also can only be formed by metal material.
In addition, corresponding to the situation that the temperature of exhaust gas raises,, also can surround the outer surface ground configuration cooling usefulness sleeve pipe 12 of cylinder shell 2 for coolant exhaust gas.Cooling is that can keep so that filter for installation 1 is freezed is purpose cold-producing medium or the mechanism that makes the cold-producing medium circulation with sleeve pipe 12.As cold-producing medium, be not particularly limited, normally used is water.
Next illustration.
Filter for installation 1 of the present invention is configured in upstream one side of the equipment of removing the evil of not shown semiconductor fabrication, is used for removing the processed gas of discharging from the treating apparatus of semiconductor fabrication and is the impurity such as reaction product of exhaust gas and contain the particulate of other mists or dust.
The exhaust gas of discharging from semiconductor fabrication by not shown pipe arrangement, imports to the vortex shape fluid passage 11 that is configured in cylinder shell 2 inside from the inlet 6 of filter for installation 1.Because it is wideer than the fluid passage width B of the inboard fluid passage 11b of its adjacency that vortex shape fluid passage 11 is set at the fluid passage width A of outermost fluid passage 11a, so the linear velocity of the outermost fluid passage 11a of the exhaust gas that advances in vortex shape fluid passage 11 is slower than the linear velocity of the inboard fluid passage 11b of its inboard.Therefore, the particulate that the particle diameter in the particulate that contains in the exhaust gas is big because of being subjected to and the proportional action of centrifugal force of exhaust gas speed, bumps with the filter member 4 that disposes on the inner surface of cylinder shell 2.Particulate with the filter member 4 of the inner surface of cylinder shell 2 bumps on filter member 4, or is subjected to the effect of gravity to fall and be collected in the cylinder shell 2.
The exhaust gas of outermost fluid passage 11a by vortex shape fluid passage 11, because the linear velocity of the inboard fluid passage 11b of exhaust gas is slower than the linear velocity of the inboard fluid passage 11c of its inboard, similarly, the big particle of particle diameter is because of being subjected to and the proportional action of centrifugal force of the speed of processed gas, bump with the filter member 4 that on the inner surface of vortex shape dividing plate 3, disposes, the particulate that bumps with filter member 4 is attached on the filter member, or falls and be collected in the cylinder shell 2.
The exhaust gas of inboard fluid passage 11b by vortex shape fluid passage 11 is subjected to action of centrifugal force, bump with the filter member 4 that on the inner surface of vortex shape dividing plate 3, disposes, the particulate that bumps with filter member 4 is attached on the filter member, or falls and be collected in the cylinder shell 2.
So, in radial direction during lateral movement, proportional with the speed of exhaust gas, the particle big from particle diameter all is removed to the little particle of particle diameter the particulate that contains in the exhaust gas along vortex shape fluid passage 11.The tiny particulate of not removing in vortex shape fluid passage 11 of particle diameter, the cylinder-shaped filter 5 of the central portion by being configured in dividing plate 3 is removed.
And the exhaust gas that will remove particulate in filter for installation 1 imports to the equipment of removing the evil by not shown pipe arrangement from the outlet 8 of filter for installation 1.
Fig. 3 represents another example of the present invention.The filter for installation 1 that filter for installation 20 and Fig. 1 that Fig. 3 represents represents is compared, and difference only is: the aspect ratio cylinder shell of dividing plate 3 is 21 low, forming space 22, the configuration using stainless (steel) wire forms in this space 22 circular element 23 above the cylinder-shaped filter 5.Exhaust gas direct collision by cylinder-shaped filter 5 is passed the barrier plate 24 and the gap between the cylinder shell 21 that are installed on lid 9 lower surfaces behind circular element 23, export 8 and be directed to.Thus, more effectively removed the particulate that contains in the exhaust gas.
Have again, in above-mentioned example,, also can use be used for the mist that withdrawal liquid and withdrawal liquid contain though only be illustrated to utilizing filter for installation 1 to remove the particulate that contains in the exhaust gas.
In the streamline of the exhaust gas by filter for installation of the present invention being assembled in semiconductor fabrication etc., the load that can alleviate the equipment of removing the evil, and cleaning number of times and the equipment life that can improve the equipment of removing the evil significantly.
Claims (5)
1, a kind of filter for installation, comprise: housing with entrance and exit, have a plurality of scroll portion and be configured in the housing to form the dividing plate of continuous vortex shape fluid passage, at least the filter member that on the one side of dividing plate, disposes, it is characterized in that the fluid passage width of scroll portion of outer end one side that is positioned at above-mentioned vortex shape fluid passage is wideer than the fluid passage width that is positioned at its inboard scroll portion.
2, as the filter for installation of record in the claim 1, it is characterized in that the vortex shape fluid passage narrows down scroll portion fluid passage width outside-in in proper order.
3, as the filter for installation of record in the claim 1, it is characterized in that cylinder-shaped filter is configured in the space that is formed at the dividing plate inboard.
4, as the filter for installation of record in the claim 1, it is characterized in that, on the lower surface of lid, barrier plate is installed, and circular element is configured in the superjacent air space of cylinder-shaped filter.
5, as the filter for installation of record in the claim 1, it is characterized in that cooling water pipe is configured on the outer surface of housing.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP310023/2003 | 2003-09-02 | ||
| JP310023/03 | 2003-09-02 | ||
| JP2003310023A JP4864283B2 (en) | 2003-09-02 | 2003-09-02 | Filter device and exhaust gas particulate removal method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1589950A true CN1589950A (en) | 2005-03-09 |
| CN100393388C CN100393388C (en) | 2008-06-11 |
Family
ID=34412010
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB2004100714559A Expired - Lifetime CN100393388C (en) | 2003-09-02 | 2004-06-18 | Filter device |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP4864283B2 (en) |
| KR (1) | KR20050025225A (en) |
| CN (1) | CN100393388C (en) |
| TW (1) | TWI291365B (en) |
Families Citing this family (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007039751A (en) * | 2005-08-03 | 2007-02-15 | Hitachi Kokusai Electric Inc | Substrates processing system and its trapping mechanism |
| JP4769164B2 (en) * | 2006-02-06 | 2011-09-07 | 株式会社育良精機製作所 | Machine tool and gas-liquid separator |
| JP5919824B2 (en) * | 2012-01-05 | 2016-05-18 | セントラル硝子株式会社 | Gas generator |
| US9909405B2 (en) | 2012-02-13 | 2018-03-06 | Specialized Desanders Inc. | Desanding apparatus and a method of using same |
| US9938812B2 (en) | 2012-02-13 | 2018-04-10 | Specialized Desanders Inc. | Desanding apparatus and a method of using same |
| JP5848175B2 (en) * | 2012-03-23 | 2016-01-27 | パンパシフィック・カッパー株式会社 | Cleaning method for eliminator |
| RU2496553C1 (en) * | 2012-10-09 | 2013-10-27 | Федеральное государственное бюджетное образовательное учреждение высшего профессионального образования "Кубанский государственный аграрный университет" | Flow-through separator for separation of dispersed particles from gas |
| CA2836437A1 (en) | 2013-12-16 | 2015-06-16 | Specialized Desanders Inc. | An desanding apparatus and a method of using the same |
| AU2018276084B2 (en) | 2017-05-30 | 2023-05-04 | Specialized Desanders Inc. | Gravity desanding apparatus with filter polisher |
| JP2024117385A (en) * | 2023-02-17 | 2024-08-29 | トヨタ車体株式会社 | Processing Equipment |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4940737B2 (en) * | 1971-11-19 | 1974-11-05 | ||
| GB2055634B (en) * | 1979-08-16 | 1983-01-26 | Ishikawajima Harima Heavy Ind | Gas-liquid separators |
| JPS5832729Y2 (en) * | 1981-03-05 | 1983-07-21 | 北越工業株式会社 | Oil separator for oil-cooled rotary compressor |
| JPH0796087B2 (en) * | 1989-12-29 | 1995-10-18 | 明雄 五十嵐 | Liquid filtration device |
| US6068674A (en) * | 1992-02-18 | 2000-05-30 | Francis A. L. Dullien | Removal of suspended fine particles from gases by turbulent deposition |
| JP4359975B2 (en) * | 1999-10-26 | 2009-11-11 | 株式会社Ｉｈｉ | Solid separation device |
| JP4636640B2 (en) * | 1999-11-26 | 2011-02-23 | 東洋紡績株式会社 | Filter unit and filter |
| JP2001269542A (en) * | 2000-03-24 | 2001-10-02 | Nippon Donarudoson Kk | Catalytic treatment device for nitrous oxide gas |
| JP2002013845A (en) * | 2000-06-30 | 2002-01-18 | Mitsubishi Electric Corp | Oil separator, and freezing cycle, and its oil separation method |
-
2003
- 2003-09-02 JP JP2003310023A patent/JP4864283B2/en not_active Expired - Lifetime
-
2004
- 2004-06-15 KR KR1020040044146A patent/KR20050025225A/en not_active Application Discontinuation
- 2004-06-17 TW TW093117483A patent/TWI291365B/en not_active IP Right Cessation
- 2004-06-18 CN CNB2004100714559A patent/CN100393388C/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| TW200510052A (en) | 2005-03-16 |
| TWI291365B (en) | 2007-12-21 |
| JP4864283B2 (en) | 2012-02-01 |
| CN100393388C (en) | 2008-06-11 |
| JP2005074362A (en) | 2005-03-24 |
| KR20050025225A (en) | 2005-03-14 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CX01 | Expiry of patent term |
Granted publication date: 20080611 |
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| CX01 | Expiry of patent term |