CN1587435A - Ti-Al-O-N hard composite coatingand its preparing method - Google Patents
Ti-Al-O-N hard composite coatingand its preparing method Download PDFInfo
- Publication number
- CN1587435A CN1587435A CN 200410053491 CN200410053491A CN1587435A CN 1587435 A CN1587435 A CN 1587435A CN 200410053491 CN200410053491 CN 200410053491 CN 200410053491 A CN200410053491 A CN 200410053491A CN 1587435 A CN1587435 A CN 1587435A
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- Prior art keywords
- coating
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- hard composite
- preparation
- composite coating
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Links
- 229910018514 Al—O—N Inorganic materials 0.000 title claims abstract description 22
- 239000002131 composite material Substances 0.000 title claims abstract description 19
- 238000000034 method Methods 0.000 title claims description 5
- 238000000576 coating method Methods 0.000 claims abstract description 59
- 239000011248 coating agent Substances 0.000 claims abstract description 56
- 229910004349 Ti-Al Inorganic materials 0.000 claims abstract description 14
- 229910004692 Ti—Al Inorganic materials 0.000 claims abstract description 14
- 238000002360 preparation method Methods 0.000 claims abstract description 12
- 229910045601 alloy Inorganic materials 0.000 claims abstract description 11
- 239000000956 alloy Substances 0.000 claims abstract description 11
- 239000000203 mixture Substances 0.000 claims abstract description 11
- 229910052760 oxygen Inorganic materials 0.000 claims abstract description 9
- 239000000758 substrate Substances 0.000 claims abstract description 8
- 238000004544 sputter deposition Methods 0.000 claims abstract description 7
- 239000002184 metal Substances 0.000 claims abstract description 6
- 229910052751 metal Inorganic materials 0.000 claims abstract description 6
- 239000013078 crystal Substances 0.000 claims abstract description 3
- 238000005546 reactive sputtering Methods 0.000 claims description 8
- 150000001875 compounds Chemical class 0.000 claims description 7
- 239000000463 material Substances 0.000 claims description 7
- 239000004615 ingredient Substances 0.000 claims description 6
- 239000011159 matrix material Substances 0.000 claims description 4
- 239000013077 target material Substances 0.000 claims description 2
- 230000003647 oxidation Effects 0.000 abstract description 9
- 238000007254 oxidation reaction Methods 0.000 abstract description 9
- 229910018509 Al—N Inorganic materials 0.000 abstract description 2
- 238000005524 ceramic coating Methods 0.000 abstract description 2
- 229910010293 ceramic material Inorganic materials 0.000 abstract 1
- 238000006243 chemical reaction Methods 0.000 abstract 1
- 238000005520 cutting process Methods 0.000 description 11
- 238000005516 engineering process Methods 0.000 description 6
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 5
- 238000012545 processing Methods 0.000 description 4
- 239000007789 gas Substances 0.000 description 3
- 229910018516 Al—O Inorganic materials 0.000 description 1
- 241000024287 Areas Species 0.000 description 1
- 229910010037 TiAlN Inorganic materials 0.000 description 1
- 229910011210 Ti—O—N Inorganic materials 0.000 description 1
- 229910003077 Ti−O Inorganic materials 0.000 description 1
- 229910003088 Ti−O−Ti Inorganic materials 0.000 description 1
- 239000003963 antioxidant agent Substances 0.000 description 1
- 230000003078 antioxidant effect Effects 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 239000012809 cooling fluid Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000009776 industrial production Methods 0.000 description 1
- 238000007733 ion plating Methods 0.000 description 1
- 238000013332 literature search Methods 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- 239000011224 oxide ceramic Substances 0.000 description 1
- 229910052574 oxide ceramic Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 238000005728 strengthening Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
- Cutting Tools, Boring Holders, And Turrets (AREA)
Abstract
The present invention relates to composite Ti-Al-O-N coating and its preparation process, and to ceramic coating. The coating consists of Ti 18-36 at%, Al 17-32 at%, O 4-24 at% and N 27-41 at%, and exists as crystal state. The coating is prepared on metal or ceramic material substrate with Ti-Al alloy target or composite Ti-Al target and through reaction and sputtering with Ar, N2 and O2 mixture gas. Adding O element into traditional Ti-Al-N coating makes the coating possess excellent high temperature oxidation resistance and high hardness over 32 GPa. The present invention has high application value as antiwear coating on high speed cutter, dry cutter and high temperature work part.
Description
Technical field
What the present invention relates to is a kind of Ti-Al-O-N hard composite coating and preparation method thereof, is used for the ceramic coating technical field of material type.
Background technology
The high speed cutting of cutting speed 〉=100m/min and the DRY CUTTING technology that do not add cooling fluid are because mechanical workout efficient height, and be low in the pollution of the environment, becomes the main flow of cutting technology development just day by day, but these cutting technologies have proposed requirements at the higher level to the performance of cutter coat.Not only require cutter coat to have the hardness height, fundamental property such as frictional coefficient is little, and stronger high-temperature oxidation resistance will be arranged.The vapour deposition coating surface strengthening layer of metallic substance tool and mould adopts the coating of nitride, carbide or carbonitride usually in the prior art, for example TiN, (Ti, Al) N, TiC, Ti (CN) etc.Wherein the TiN coating is widely used in industrial production because of having good antiwear and friction reduction property, its hardness HV25 ± 2GPa, and oxidizing temperature is about 500 ℃; Ti (CN) coating hardness is up to HV40GPa, and oxidation resistance temperature but has only 400 ℃; Best at present TiAlN coating hardness is HV35 ± 5GPa, and oxidation resistance temperature can reach 800 ℃, but still can not satisfy the needs of the harsh service condition of tool and mould in Application Areass such as high speed cutting and DRY CUTTING.Press for the coated material compositional system that has strong high-temperature oxidation resistance and have high rigidity simultaneously and technology of preparing thereof at present to satisfy the requirement of mechanical industry technical progress.
Through the literature search of prior art being found U.S. Pat 6565957, US6638571, US5766782 and Chinese patent 95108982.X etc.) in will have the oxide compound of excellent high-temperature resistance of oxidation (as Al
2O
3) and other mechanically resistant material, as TiN, TiC, TiCN and (Ti, Al) N etc. uses the coating that forms compound coating or multilayered structure together.Although above-mentioned oxycompound coating has improved the high-temperature oxidation resistance of coating to a great extent, the hardness of coating but decreases.The approach that improves the coating high-temp oxidation-resistance be at TiN, (Ti Al) adds O in the coating such as N, thereby forms Ti-O-N and Ti-Al-O-N compound coating, utilizes to form the Ti-O compound or/and the Al-O compound improves the high-temperature oxidation resistance of coating in coating.K.Tonshoff etc. have just reported and have adopted three kinds of ion plating techniques, at substrate temperature is the method for this coating of preparation more than 400 ℃, the coating that the result shows gained has good effect (referring to K.Tonshoff in DRY CUTTING is used, B.Karpuschewski, A.Mohlfeid, T.Leyendecker, G.Erken, H.G.Fu β, R.Wenke, the DRY CUTTING performance of Performance ofoxygen-rich TiAlON coatings in dry cutting applications/ oxygen enrichment TiAlON coating, Surface and Coatings Technology, 108-109,1998,535-542).But the hardness of the TiAlON coating that they prepare is not improved significantly, its hardness only is about 20GPa, not only far below (Ti, Al) hardness of N coating (35GPa), and also have certain amplitude to reduce, thereby its application on cutter coat is restricted than the hardness (25GPa) of TiN.
The objective of the invention is to overcome deficiency of the prior art, a kind of Ti-Al-O-N hard composite coating and preparation method thereof is provided.Make it select the Ti-Al-N coating system for use, and add the O element therein and prepare the Ti-Al-O-N coating, reach and have high rigidity and high antioxidant ability.
The present invention is achieved by the following technical solutions:
Ti-Al-O-N hard composite coating constituent atoms per-cent of the present invention is: 18～36at%Ti, 17～32at%Al, 4～24at%O, 27～41at%N.Total coating thickness is l μ m～5 μ m.Coating exists with the crystal attitude.
The preparation method of Ti-Al-O-N hard composite coating of the present invention is specific as follows:
On the matrix of metal or stupalith, adopt Ti-Al alloys target or Ti-Al composite target material and with Ar, N
2And O
2Mixed gas carry out reactive sputtering and produce.
Described sputter is produced, and at first the matrix surface of metal or pottery is made mirror polish and handles, and adopts the method for radio frequency or dc reactive sputtering to produce compound coating then, and wherein the Ti-Al of target Ti-Al alloys target or the ratio of suitable composition with alloys target inlays composition target.
Described Ti-Al alloys target composition is 30～70at%Al, and surplus is Ti.
Described Ti-Al inlays composition target and is made by inlaying by pure Ti and pure Al piece.The target surface ratio of two kinds of materials is as the criterion with the film that can obtain in sputter with the suitable composition of above-mentioned alloys target.
Described reactive sputtering, its negative electrode adopts direct current negative electrode or radio frequency negative electrode.The sputtering power density of negative electrode is 2～10W/cm
2
Described sputter is produced, and reactive sputtering gas is Ar, N
2And O
2Mixed gas, Ar dividing potential drop P wherein
Ar=1.6～6.0 * 10
-1Pa, N
2Dividing potential drop
O
2Dividing potential drop
The temperature of substrate material is room temperature～300 ℃.
The present invention has substantive distinguishing features and marked improvement, and the surface hardening that can be widely used in the metal tool and mould is handled, and this coating has obtained the excellent mechanical property of high rigidity high-modulus when having oxide ceramics inherent high-temperature oxidation resistance.The hardness of gained coating of the present invention can reach more than the 32GPa, and maximum hardness is 35Gpa, and high elastic coefficient is 419GPa, has very big using value on the mould of being on active service under high speed cutting tool, the hot conditions and other wear-resisting workpiece.It is higher that the present invention prepares the efficient of coating, controls easyly, can improve practicality and efficient that large-scale industrialization is produced greatly.
Embodiment
Embodiment 1
Processing parameter is P
Ar=1.6 * 10
-1Pa,
Sputtering power is 200W, and substrate temperature is a room temperature.Ti-Al-O-N coating ingredients atomic percent is, Ti:18.8at%, and Al:27.7at%, O:18.2at%, during N:35.3at%, hardness is 32.2GPa, Young's modulus is 416GPa.
Embodiment 2
Processing parameter is P
Ar=6.0 * 10
-1Pa,
Sputtering power is 200W, and substrate temperature is a room temperature.Ti-Al-O-N coating ingredients atomic percent is Ti:23.3at%, Al:24.9at%, and O:18.4at%, during N:33.4at%, hardness is 35.0GPa, Young's modulus is 371GPa.
Embodiment 3
Processing parameter is P
Ar=6.0 * 10
-1Pa,
Sputtering power is 200W, and substrate temperature is 300 ℃.Ti-Al-O-N coating ingredients atomic percent is Ti:25.2at%, Al:31.3at%, and O:4.5at%, during N:39.0at%, hardness is 34.9GPa, Young's modulus is 408GPa.
Embodiment 4
Processing parameter is P
Ar=1.6 * 10
-1Pa,
Sputtering power is 200W, and substrate temperature is 300 ℃.Ti-Al-O-N coating ingredients atomic percent is Ti:19.7at%, Al:32.6at%, and O:14.0at%, during N:33.7at%, hardness is 35.3GPa, Young's modulus is 419GPa.
Claims (9)
1, a kind of Ti-Al-O-N hard composite coating is characterized in that, the coating ingredients atomic percent is: 18～36at%Ti, 17～32at%Al, 4～24at%O, 27～41at%N.
According to the described Ti-Al-O-N hard composite coating of claim 1, it is characterized in that 2, described total coating thickness is 1 μ m～3 μ m.
3, according to the described Ti-Al-O-N hard composite coating of claim 1, it is characterized in that described coating exists with the crystal attitude.
4, a kind of preparation method of Ti-Al-O-N hard composite coating is characterized in that, on the matrix of metal or stupalith, adopt Ti-Al alloys target or Ti-Al composite target material and with Ar, N
2And O
2Mixed gas carry out reactive sputtering and produce, the coating ingredients atomic percent of producing is: 18～36at%Ti, 17～32at%Al, 4～24at%O, 27～41at%N.
5, according to the preparation method of the described Ti-Al-O-N hard composite coating of claim 4, it is characterized in that, described reactive sputtering, its negative electrode adopts direct current negative electrode or radio frequency negative electrode, and the sputtering power density of negative electrode is 2～10W/cm
2
6, according to the preparation method of the described Ti-Al-O-N hard composite coating of claim 4, it is characterized in that, described sputter is produced, at first the matrix surface of metal or pottery being made mirror polish handles, adopt the method for radio frequency or dc reactive sputtering to produce compound coating then, wherein the Ti-Al of target Ti-Al alloys target or the ratio of suitable composition with alloys target inlays composition target.
According to the preparation method of claim 4 or 6 described Ti-Al-O-N hard composite coatings, it is characterized in that 7, described sputter is produced, reactive sputtering gas is Ar, N
2And O
2Mixed gas, Ar dividing potential drop P wherein
Ar=1.6～6.0 * 10
-1Pa, N
2Dividing potential drop P
N2=1.0～4.0 * 10
-2Pa, O
2Dividing potential drop P
O2=0.5～6.0 * 10
-3Pa, the temperature of substrate material is room temperature～300 ℃.
According to the preparation method of the described Ti-Al-O-N hard composite coating of claim 6, it is characterized in that 8, described Ti-Al alloys target composition is 30～70at%Al, surplus is Ti.
9, according to the preparation method of the described Ti-Al-O-N hard composite coating of claim 6, it is characterized in that, described Ti-Al inlays composition target and is made by inlaying by pure Ti and pure Al piece, and the target surface ratio of two kinds of materials is as the criterion with the film of acquisition in sputter with the suitable composition of above-mentioned alloys target.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200410053491 CN1277949C (en) | 2004-08-05 | 2004-08-05 | Ti-Al-O-N hard composite coatingand its preparing method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200410053491 CN1277949C (en) | 2004-08-05 | 2004-08-05 | Ti-Al-O-N hard composite coatingand its preparing method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1587435A true CN1587435A (en) | 2005-03-02 |
| CN1277949C CN1277949C (en) | 2006-10-04 |
Family
ID=34602883
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 200410053491 Expired - Lifetime CN1277949C (en) | 2004-08-05 | 2004-08-05 | Ti-Al-O-N hard composite coatingand its preparing method |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN1277949C (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101781748A (en) * | 2010-03-31 | 2010-07-21 | 西安交通大学 | Method for preparing amorphous carbon composite coating on surface of hard alloy material and high-speed steel material |
| CN101671812B (en) * | 2009-09-30 | 2011-05-18 | 株洲钻石切削刀具股份有限公司 | Heat treatment method of Ti-Al-N coating on hard alloy substrate |
| CN114672786A (en) * | 2022-03-17 | 2022-06-28 | 赣州澳克泰工具技术有限公司 | High-temperature-oxidation-resistant self-lubricating multilayer coating cutter and preparation method thereof |
| CN115948711A (en) * | 2022-12-14 | 2023-04-11 | 株洲华锐精密工具股份有限公司 | Composite hard coating and preparation method and application thereof |
-
2004
- 2004-08-05 CN CN 200410053491 patent/CN1277949C/en not_active Expired - Lifetime
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101671812B (en) * | 2009-09-30 | 2011-05-18 | 株洲钻石切削刀具股份有限公司 | Heat treatment method of Ti-Al-N coating on hard alloy substrate |
| CN101781748A (en) * | 2010-03-31 | 2010-07-21 | 西安交通大学 | Method for preparing amorphous carbon composite coating on surface of hard alloy material and high-speed steel material |
| CN114672786A (en) * | 2022-03-17 | 2022-06-28 | 赣州澳克泰工具技术有限公司 | High-temperature-oxidation-resistant self-lubricating multilayer coating cutter and preparation method thereof |
| CN114672786B (en) * | 2022-03-17 | 2023-04-28 | 赣州澳克泰工具技术有限公司 | High-temperature oxidation resistant self-lubricating multilayer coating cutter and preparation method thereof |
| CN115948711A (en) * | 2022-12-14 | 2023-04-11 | 株洲华锐精密工具股份有限公司 | Composite hard coating and preparation method and application thereof |
| CN115948711B (en) * | 2022-12-14 | 2024-09-20 | 株洲华锐精密工具股份有限公司 | Composite hard coating and preparation method and application thereof |
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| Publication number | Publication date |
|---|---|
| CN1277949C (en) | 2006-10-04 |
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Granted publication date: 20061004 |