CN1579737A - Optical component mold and method of manufacturing optical component using the same - Google Patents
Optical component mold and method of manufacturing optical component using the same Download PDFInfo
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- CN1579737A CN1579737A CN200410055926.7A CN200410055926A CN1579737A CN 1579737 A CN1579737 A CN 1579737A CN 200410055926 A CN200410055926 A CN 200410055926A CN 1579737 A CN1579737 A CN 1579737A
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- resin system
- system optics
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- 238000004519 manufacturing process Methods 0.000 title claims description 31
- 230000003287 optical effect Effects 0.000 title abstract 5
- 239000011347 resin Substances 0.000 claims abstract description 125
- 229920005989 resin Polymers 0.000 claims abstract description 125
- 238000001746 injection moulding Methods 0.000 claims abstract description 35
- 229910052809 inorganic oxide Inorganic materials 0.000 claims abstract description 9
- 230000015572 biosynthetic process Effects 0.000 claims description 81
- 229910052731 fluorine Inorganic materials 0.000 claims description 25
- 239000011737 fluorine Substances 0.000 claims description 24
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 claims description 23
- 238000000034 method Methods 0.000 claims description 23
- 239000000463 material Substances 0.000 claims description 22
- 238000002347 injection Methods 0.000 claims description 12
- 239000007924 injection Substances 0.000 claims description 12
- 125000001153 fluoro group Chemical group F* 0.000 claims description 9
- 229910003460 diamond Inorganic materials 0.000 claims description 7
- 239000010432 diamond Substances 0.000 claims description 7
- 239000011248 coating agent Substances 0.000 claims description 6
- 238000000576 coating method Methods 0.000 claims description 6
- 229910000077 silane Inorganic materials 0.000 claims description 6
- -1 silane compound Chemical class 0.000 claims description 6
- 229910004298 SiO 2 Inorganic materials 0.000 claims description 5
- 238000000465 moulding Methods 0.000 abstract description 6
- 230000000295 complement effect Effects 0.000 abstract 1
- 239000004973 liquid crystal related substance Substances 0.000 description 37
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 24
- 229910052759 nickel Inorganic materials 0.000 description 12
- 239000012459 cleaning agent Substances 0.000 description 6
- 238000005286 illumination Methods 0.000 description 6
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 5
- 229910052710 silicon Inorganic materials 0.000 description 5
- 239000010703 silicon Substances 0.000 description 5
- 239000000758 substrate Substances 0.000 description 5
- 230000000694 effects Effects 0.000 description 4
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 3
- 239000003513 alkali Substances 0.000 description 3
- 229910052799 carbon Inorganic materials 0.000 description 3
- 239000003795 chemical substances by application Substances 0.000 description 3
- 239000004020 conductor Substances 0.000 description 3
- 230000006866 deterioration Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 239000000155 melt Substances 0.000 description 3
- 230000002035 prolonged effect Effects 0.000 description 3
- 238000004544 sputter deposition Methods 0.000 description 3
- 239000004925 Acrylic resin Substances 0.000 description 2
- 229920000178 Acrylic resin Polymers 0.000 description 2
- 206010059866 Drug resistance Diseases 0.000 description 2
- 206010049976 Impatience Diseases 0.000 description 2
- 229910010413 TiO 2 Inorganic materials 0.000 description 2
- 238000000149 argon plasma sintering Methods 0.000 description 2
- 239000002585 base Substances 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 2
- 238000009826 distribution Methods 0.000 description 2
- 239000008393 encapsulating agent Substances 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
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- 229910052751 metal Inorganic materials 0.000 description 2
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- 230000001902 propagating effect Effects 0.000 description 2
- 238000005979 thermal decomposition reaction Methods 0.000 description 2
- 206010001557 Albinism Diseases 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 239000004411 aluminium Substances 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000004040 coloring Methods 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 238000003618 dip coating Methods 0.000 description 1
- 238000005868 electrolysis reaction Methods 0.000 description 1
- 230000002708 enhancing effect Effects 0.000 description 1
- 239000012467 final product Substances 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 239000012778 molding material Substances 0.000 description 1
- JFNLZVQOOSMTJK-KNVOCYPGSA-N norbornene Chemical compound C1[C@@H]2CC[C@H]1C=C2 JFNLZVQOOSMTJK-KNVOCYPGSA-N 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 239000012188 paraffin wax Substances 0.000 description 1
- 229920005668 polycarbonate resin Polymers 0.000 description 1
- 239000004431 polycarbonate resin Substances 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 238000002310 reflectometry Methods 0.000 description 1
- 239000012508 resin bead Substances 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229920002545 silicone oil Polymers 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 230000003746 surface roughness Effects 0.000 description 1
- 230000000007 visual effect Effects 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/0001—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings specially adapted for lighting devices or systems
- G02B6/0011—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings specially adapted for lighting devices or systems the light guides being planar or of plate-like form
- G02B6/0033—Means for improving the coupling-out of light from the light guide
- G02B6/0035—Means for improving the coupling-out of light from the light guide provided on the surface of the light guide or in the bulk of it
- G02B6/0036—2-D arrangement of prisms, protrusions, indentations or roughened surfaces
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C33/00—Moulds or cores; Details thereof or accessories therefor
- B29C33/56—Coatings, e.g. enameled or galvanised; Releasing, lubricating or separating agents
- B29C33/565—Consisting of shell-like structures supported by backing material
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C33/00—Moulds or cores; Details thereof or accessories therefor
- B29C33/56—Coatings, e.g. enameled or galvanised; Releasing, lubricating or separating agents
- B29C33/60—Releasing, lubricating or separating agents
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C45/00—Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor
- B29C45/17—Component parts, details or accessories; Auxiliary operations
- B29C45/26—Moulds
- B29C45/37—Mould cavity walls, i.e. the inner surface forming the mould cavity, e.g. linings
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C45/00—Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor
- B29C45/17—Component parts, details or accessories; Auxiliary operations
- B29C45/26—Moulds
- B29C45/37—Mould cavity walls, i.e. the inner surface forming the mould cavity, e.g. linings
- B29C45/372—Mould cavity walls, i.e. the inner surface forming the mould cavity, e.g. linings provided with means for marking or patterning, e.g. numbering articles
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29D—PRODUCING PARTICULAR ARTICLES FROM PLASTICS OR FROM SUBSTANCES IN A PLASTIC STATE
- B29D11/00—Producing optical elements, e.g. lenses or prisms
- B29D11/00009—Production of simple or compound lenses
- B29D11/00278—Lenticular sheets
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/0001—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings specially adapted for lighting devices or systems
- G02B6/0011—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings specially adapted for lighting devices or systems the light guides being planar or of plate-like form
- G02B6/0033—Means for improving the coupling-out of light from the light guide
- G02B6/0035—Means for improving the coupling-out of light from the light guide provided on the surface of the light guide or in the bulk of it
- G02B6/0038—Linear indentations or grooves, e.g. arc-shaped grooves or meandering grooves, extending over the full length or width of the light guide
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/0001—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings specially adapted for lighting devices or systems
- G02B6/0011—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings specially adapted for lighting devices or systems the light guides being planar or of plate-like form
- G02B6/0033—Means for improving the coupling-out of light from the light guide
- G02B6/005—Means for improving the coupling-out of light from the light guide provided by one optical element, or plurality thereof, placed on the light output side of the light guide
- G02B6/0053—Prismatic sheet or layer; Brightness enhancement element, sheet or layer
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29K—INDEXING SCHEME ASSOCIATED WITH SUBCLASSES B29B, B29C OR B29D, RELATING TO MOULDING MATERIALS OR TO MATERIALS FOR MOULDS, REINFORCEMENTS, FILLERS OR PREFORMED PARTS, e.g. INSERTS
- B29K2707/00—Use of elements other than metals for preformed parts, e.g. for inserts
- B29K2707/04—Carbon
- B29K2707/045—Diamond
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29K—INDEXING SCHEME ASSOCIATED WITH SUBCLASSES B29B, B29C OR B29D, RELATING TO MOULDING MATERIALS OR TO MATERIALS FOR MOULDS, REINFORCEMENTS, FILLERS OR PREFORMED PARTS, e.g. INSERTS
- B29K2907/00—Use of elements other than metals as mould material
- B29K2907/02—Boron
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29K—INDEXING SCHEME ASSOCIATED WITH SUBCLASSES B29B, B29C OR B29D, RELATING TO MOULDING MATERIALS OR TO MATERIALS FOR MOULDS, REINFORCEMENTS, FILLERS OR PREFORMED PARTS, e.g. INSERTS
- B29K2907/00—Use of elements other than metals as mould material
- B29K2907/04—Carbon
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29L—INDEXING SCHEME ASSOCIATED WITH SUBCLASS B29C, RELATING TO PARTICULAR ARTICLES
- B29L2011/00—Optical elements, e.g. lenses, prisms
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/0001—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings specially adapted for lighting devices or systems
- G02B6/0011—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings specially adapted for lighting devices or systems the light guides being planar or of plate-like form
- G02B6/0065—Manufacturing aspects; Material aspects
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Manufacturing & Machinery (AREA)
- Health & Medical Sciences (AREA)
- Ophthalmology & Optometry (AREA)
- Moulds For Moulding Plastics Or The Like (AREA)
Abstract
The resin optical component mold includes a first mold and a second mold for defining a cavity for molding a resin optical component having a minutely concavo-convex shaped surface, on which a plurality of minute concave or convex portions in units of submicrons is formed, by injection molding light transmitting resin. A master mold 36 formed of an inorganic oxide layer having a minutely concavo-convex shaped surface 36a, on which a concavo-convex shape complementary to the concavo-convex shape formed on the minutely concavo-convex shaped surface of the resin optical component is formed, is provided on the internal surface of the first mold.
Description
Technical field
The present invention relates to be formed with the resin system optics mould of small recess of a plurality of submicron orders or protuberance and use this mould to make the manufacture method of above-mentioned resin system optics.
Background technology
Resin system optics as small recess that is formed with a plurality of submicron orders or protuberance can have for example, for example, and the LGP of the lighting device that is called as preceding light that reflective liquid crystal plate is equipped previously or anti-reflection layer etc.
Fig. 6 is that expression is provided with the profile that the summary of the liquid crystal indicator of having equipped the preceding light that adopts LGP that manufacture method in the past makes and anti-reflection layer constitutes.Liquid crystal indicator 100 shown in this Fig is made of the preceding light 110 that liquid crystal board 120, these liquid crystal board 120 front sides set.
Before the bar-shaped light source 113 that sets of the 112a place, side end face of the flat LGP 112 of light 110 equipment, this LGP 112 and constituting, the light that penetrates from light source 113 is injected in the LGP 112 from the side end face 112c of LGP 112, and reflected by the reflecting surface 112c of LGP 112, thereby change the relay direction of light, its exit facet 112b by LGP 112 is shone to liquid crystal board 120.Be formed with the small recess (groove) 115 that a plurality of sections are wedge shape on the reflecting surface 112c.
And, be formed with anti-reflection layer 117 on the above-mentioned exit facet 112b, make at the light of LGP 112 internal communications efficiently according to liquid crystal board 120 sides, and, can prevent that the reverberation of reflective liquid crystal plate 120 from being produced decay by LGP 112 surface reflections.The surface of anti-reflection layer 117 is formed with a plurality of small protuberance (projection) that is called as AR (antireflection) grid.
In the past, make the method that aforesaid LGP 112 and anti-reflection layer 117 etc. are formed with the small recess or resin system optics protuberance, that have small concavo-convex formation face of a plurality of submicron orders, be to use be formed with on the die cavity space with the nickel electroformed mould of the opposite concaveconvex shape of above-mentioned small concavo-convex formation face, die cavity space in the silicon of injection optics material be the injection molding method (for example, with reference to patent documentation 1,2) of resin etc.In order to make above-mentioned nickel electroformed mould, use the grand master pattern that has identical concaveconvex shape with above-mentioned resin system optics profile, by electrolysis after adhering to the nickel of necessary thickness on this master surface, carry out the demoulding, just can obtain profile concaveconvex shape and the opposite electroformed mould of master surface concaveconvex shape concave and convex direction.
Patent documentation 1: the spy opens flat 6-201908 communique
Patent documentation 1: the spy opens the 2002-372603 communique
But, in the manufacture method of the resin system optics in the past that uses the nickel electroformed mould, if during the resin system optics of wanting to make submicron order by the small recess or the protuberance of above-mentioned small concavo-convex formation face, the accuracy of repetition that the concaveconvex shape of above-mentioned grand master pattern copies to the nickel electroformed mould is low, causes the dimensional accuracy of the resin system optics that finally obtains low.And because the release property of resin injection molding thing (resin system optics) during from the demoulding of nickel electroformed mould is poor, existence can't improve the problem of making efficient.These problems are more outstanding greater than the occasion of 1 resin system optics in the aspect ratio of the small recess of making above-mentioned small concavo-convex formation face or protuberance, specifically, the protuberance height of resin system optics or recess depths appearred than the little phenomenon more than 10% of target size.
Further, as the technology of conveniently stripped operation, the method for smearing releasing agents such as high melting point paraffin class and silicone oil on nickel electroformed mould surface is arranged.But the operation of smearing releasing agent on nickel electroformed mould surface is pretty troublesome, and, since every through just smearing releasing agent after the injection several times, make efficient and reduce.
Summary of the invention
The present invention proposes for addressing the above problem, and one of its purpose is to provide a kind of resin system optics mould of the release property can have the resin system optics of the small concavo-convex formation face that has formed small recess of a plurality of submicron orders or protuberance and can improve the resin injection molding thing from the mould demoulding with the high dimensional accuracy manufacturing time.
And another purpose of the present invention is to provide a kind of can be had the resin system optics of the small concavo-convex formation face that has formed small recess of a plurality of submicron orders or protuberance and can improve the manufacture method of the resin system optics of making efficient by the release property that improves the resin injection molding thing with the high dimensional accuracy manufacturing.
In order to achieve the above object, the present invention adopts following formation:
Resin system optics mould with small male and fomale(M﹠F) of the present invention; be the mould that is used for thereby the translucent resin injection mo(u)lding is formed resin system optics; this resin system optics has the small concavo-convex formation face that has formed small recess of a plurality of submicron orders or protuberance; it is characterized in that: be equipped with first master mold and second master mold; the inner surface of at least one side in above-mentioned first master mold and second master mold is provided with the grand master pattern that is made of the inorganic oxide layer; wherein first master mold and second master mold delimited the die cavity space that is used for forming resin system optics; this resin system optics has the small concavo-convex formation face that has formed small recess of a plurality of submicron orders or protuberance; grand master pattern has small concavo-convex formation face, and this small concavo-convex formation face is formed with the concaveconvex shape opposite with the small concavo-convex formation face of above-mentioned resin system optics.
In the resin system optics mould of the present invention, owing to be provided with small concavo-convex formation face on the inner surface of at least one side in above-mentioned first master mold and second master mold with concaveconvex shape opposite with the small concavo-convex formation face of above-mentioned resin system optics, the grand master pattern that constitutes by the inorganic oxide layer, after in the die cavity space, injecting translucent resin during the resin system of manufacturing optics, the concaveconvex shape of the small concavo-convex formation face of this grand master pattern can directly copy on the resin injection molding thing (resin system optics), and because do not destroy shape when duplicating, with duplicating of past the nickel electroformed mould of grand master pattern concaveconvex shape compare, can have the resin system optics of the small concavo-convex formation face that has formed small recess of a plurality of submicron orders or protuberance with the high dimensional accuracy manufacturing.And, because grand master pattern is made of the inorganic oxide layer, so the release property during from the demoulding of resin injection molding thing also can improve.
And, in the resin system optics mould of the present invention, be 4 μ J/cm owing to be formed with surface free energy on the small concavo-convex formation face of above-mentioned grand master pattern
2Following cover layer dies down with the physical bond that is replicated thing (resin injection molding thing), and the release property of resin injection molding thing during from the mould demoulding is good.And owing to formed above-mentioned cover layer, the small concavo-convex formation face of grand master pattern does not expose and is protected, and therefore can improve the drug resistance and the wearability of grand master pattern.This be because, when using resin system optics mould of the present invention to carry out injection mo(u)lding, adhere to the gas that produces after the moulding material thermal decomposition such as translucent resin on the inner surface of mould, therefore, maintenance such as need to clean after every inject for tens thousand of times.The cleaning agent kind difference of using during according to cleaning, may destroy the shape of above-mentioned grand master pattern, so on the small concavo-convex formation face of grand master pattern, cover above-mentioned cover layer,, prolonged its life-span as mould even be exposed to the shape that also can keep above-mentioned grand master pattern in the cleaning agent.Particularly, above-mentioned grand master pattern is by SiO described later
2The occasion that layer forms, SiO
2To strong basicity cleaning agent impatience (alkali resistance is poor), be easy to destroy shape, so form the deterioration that can prevent above-mentioned grand master pattern behind the above-mentioned cover layer, keep its shape.
In resin system optics mould of the present invention, the cover layer that forms on the small concavo-convex formation face of above-mentioned grand master pattern can constitute by fluorine-containing diamond carbon-coating or by the silane compound layer that contains the fluorine structure.The occasion that above-mentioned cover layer is made of fluorine-containing diamond carbon-coating, because above-mentioned cover layer is fluorine-containing, can reduce surface free energy, weaken, so the release property can improve the resin injection molding thing from the mould demoulding time with the physical bond of resin injection molding thing (being replicated thing).And, use diamond carbon (DLC) layer can reduce the cover surface roughness, because grand master pattern and be replicated the coefficient of friction of (being above-mentioned cover layer and above-mentioned being replicated between thing in detail) between thing can reduce to be replicated thing the time, thereby can improve release property from the mould demoulding.
And the DLC layer can obtain by sputtering film-forming, and is very fine and close, therefore, covers the small concavo-convex face that forms of grand master pattern by the cover layer that is made of such DLC layer, can protect grand master pattern, improves the drug resistance and the wearability of grand master pattern.
The occasion that above-mentioned cover layer is made of the silane compound layer that contains the fluorine structure, because above-mentioned cover layer contains the fluorine structure, can reduce surface free energy, weaken with the physical bond of resin injection molding thing (being replicated thing), so the release property can improve the resin injection molding thing from the mould demoulding time.
In addition, the said here fluorine structure of containing is meant by chemical bond and makes the meaning that contains fluorine atom in the molecule.
The occasion that above-mentioned cover layer is made of fluorine-containing DLC layer, the fluorine concentration of tectal thickness direction can distribution gradient.
The cover layer that forms on the small concavo-convex formation face of the grand master pattern among the present invention reaches at least 4 μ J/cm
2(40erg/cm
2) following surface free energy get final product, and preferably small concavo-convex formation face one side has adherence well with the inorganic oxide layer that constitutes grand master pattern, therefore, the fluorine concentration by making small concavo-convex formation face one side is come tilt distribution fluorine concentration less than a surperficial side.
And in the resin system optics mould of the present invention, preferably above-mentioned tectal thickness is below the 50nm.If above-mentioned tectal thickness is below the 50nm, then can on above-mentioned cover layer, form the same concaveconvex shape of small concavo-convex formation face with grand master pattern, thus do not influence the shape of resin injection molding thing, can the accurate resin system optics of manufacturing dimension.
And, in the resin system optics mould of the present invention,, be preferably in and cover the diaphragm that constitutes by the material of anti-the fluidity on the small concavo-convex formation face of above-mentioned grand master pattern according to following reason.
When using resin system optics mould of the present invention to carry out injection mo(u)lding, be attached with the gas that produces after the moulding material thermal decomposition such as translucent resin on the inner surface of mould, therefore, maintenance such as need to clean after every tens thousand of injections.The cleaning agent kind difference of using when cleaning may be destroyed the shape of above-mentioned grand master pattern, so, by on the small concavo-convex formation face of grand master pattern, forming the diaphragm that constitutes by the material of anti-the fluidity, can keep the shape of above-mentioned grand master pattern, prolonged life-span as mould.Particularly, above-mentioned grand master pattern is by SiO
2The occasion that layer forms, SiO
2To strong basicity cleaning agent impatience (alkali resistance is poor), be easy to destroy shape, so form deterioration that above-mentioned strong alkali resistance diaphragm can prevent above-mentioned grand master pattern, keep its shape.The material of anti-fluidity that said protection film is used has diamond carbon (DLC), TiO
2Deng oxide.And, also can use the metal film of nickel etc. as diaphragm, in this occasion, can realize the surface modification of grand master pattern, can further improve release property.
And in the resin system optics mould of the present invention, preferably the thickness of said protection film is below the 50nm.
If the thickness of said protection film below 50nm, then can also form the same concaveconvex shape of small concavo-convex formation face with grand master pattern on said protection film, thereby do not influence the shape of resin injection molding thing, can the accurate resin system optics of manufacturing dimension.
In the resin system optics mould of the present invention, the small recess that forms on the small concavo-convex formation face of above-mentioned grand master pattern or the aspect ratio of protuberance (occasion of recess refers to the ratio of the ratio of the degree of depth and width or the degree of depth and the spacing of recess, and the occasion of protuberance refers to the ratio of depth-width ratio or height and the spacing of protuberance) can be for more than 1.
Like this in the resin system optics mould of Gou Chenging, though the aspect ratio of the small recess of the small concavo-convex formation face that is provided with in the resin system optics or protuberance greater than 1, also can the accurate resin system optics of manufacturing dimension.
And in the resin system optics mould of the present invention, above-mentioned grand master pattern also can be by SiO
2Layer forms.
And, manufacture method with resin system optics of small male and fomale(M﹠F) of the present invention, be to utilize mould to make the manufacture method of resin system optics by injection molding forming method, this resin system optics has the small concavo-convex formation face that has formed small recess of a plurality of submicron orders or protuberance, it is characterized in that: use the resin system optics mould described in the claim 1 or 2 as above-mentioned mould, injection mo(u)lding translucent resin in the die cavity space of this mould is replicated in the small concaveconvex shape of the small concavo-convex formation face of above-mentioned grand master pattern on the resin system optics.
Employing has the manufacture method of resin system optics of the small male and fomale(M﹠F) of this formation, can size accurately make the resin system optics with the small concavo-convex formation face that has formed small recess of a plurality of submicron orders or protuberance.And the release property during owing to the demoulding of resin injection molding thing is good, so can make above-mentioned resin system optics efficiently.
Description of drawings
Fig. 1 is the profile of a specific embodiment of the liquid crystal indicator of the expression anti-reflection layer of having equipped the manufacture method manufacturing of adopting the resin system optics with small male and fomale(M﹠F) of the present invention.
Fig. 2 is the partial perspective view that schematically shows the surface configuration of anti-reflection layer shown in Figure 1.
Fig. 3 is the part sectioned view of the anti-reflection layer among Fig. 2.
The profile that the summary of the anti-reflection layer mould that Fig. 4 uses when being the anti-reflection layer of representing in the shop drawings 2 constitutes.
Fig. 5 is the partial enlarged drawing of the grand master pattern that is equipped with of the anti-reflection layer mould in the presentation graphs 4.
Fig. 6 is that the profile that the summary of the liquid crystal indicator that adopts LGP that manufacture method in the past makes and anti-reflection layer constitutes has been equipped in expression.
Among the figure: 1 liquid crystal indicator; 7 protuberances; light (lighting device) before 10; 12 LGPs (resin system optics); 12a side end face (incidence surface); the 12b exit facet; 12c reflecting surface (small concavo-convex formation face); 13 light sources; 14 protuberances; 17 anti-reflection layers; the small concavo-convex formation face of 17a; 30 anti-reflection layer moulds (resin system optics mould); 30a first master mold; 30b second master mold; 31a; the 31b inner surface; 32 exits wound of bullet; 35 die cavity spaces; 36 grand master patterns; the small concavo-convex formation face of 36a; 37 recesses; 38 organic films (diaphragm); the P spacing; the H height; the P2 spacing; the D degree of depth.
The specific embodiment
Below, the specific embodiment that present invention will be described in detail with reference to the accompanying.
Fig. 1 is the profile of a specific embodiment of the liquid crystal indicator of the expression anti-reflection layer of having equipped the manufacture method manufacturing of adopting the resin system optics with small male and fomale(M﹠F) of the present invention.This liquid crystal indicator 1 is equipped the preceding light (lighting device) 10 of reflective liquid crystal plate 20 and former configuration thereof and is constituted.
Before light 10 equipment slightly be the light source 13 that the 12a place, side end face (incidence surface) of flat LGP 12 and this LGP 12 sets and constitute.LGP 12 is made of translucent resins such as acrylic resin or polycarbonate resins, the exit facet 12b of the illumination light of light 10 before side below the diagram of this LGP 12 (liquid crystal indicator 20 1 sides) forms and penetrates, the diagram upper face side of LGP 12 (an opposite side of liquid crystal indicator 20) go up the formation section and are the wavy prism shape of triangle.The protuberance 14 of the section shape triangular in shape that in more detail, has formed a plurality of 14a of gently sloping surface portion that are formed slopely by above-mentioned relatively exit facet 12b in parallel to each other and constituted with the 14b of escarpmetnt portion that forms than this gently sloping surface portion steeper angle of inclination of 14a.And, be formed with anti-reflection layer (resin system optics) 17 on the exit facet 12b of LGP 12.
The light source 13 that the 12a place, side end face of LGP 12 sets is the bar-shaped light sources that are provided with along LGP 12 side end face 12a, more particularly, sets the light-emitting component 13a that is waited formation by each White LED (light emitting diode) at the both ends of bar-shaped light conductor 13b.And, make and inject LGP 12 through light conductor 13b from the light of light-emitting component 13a ejaculation.By between light-emitting component 13a and LGP 12, bar-shaped light guide 13b being set, can be radiated at equably on the side end face 12a of LGP 12 as the light of the light-emitting component 13a of spot light.In addition, can use as long as light source 13 can import light among the side end face 12a of LGP 12, for example, light source 13 can be by constituting along LGP 12 side end face 12a light-emitting component arranged side by side.And, also can be the formation that only is equipped with single light-emitting component 13a.
As above the preceding light 10 of Gou Chenging light that light source 13 is penetrated is injected in the LGP 12 from the side end face 12a of LGP 12, the be reflected 14b of the escarpmetnt portion reflection of the protuberance 14 that is provided with on the face 12c of this light of in LGP 12, propagating, thereby the direction of propagation of light is changed, it is penetrated by exit facet 12b as illumination light.
The LGP 12 of the preceding light 10 in the present embodiment is formed with the anti-reflection layer 17 that adopts manufacture method of the present invention to make in its exit facet 12b one side, and the surface of this anti-reflection layer 17 is the clathrate alignment arrangements by small recess of submicron order or protuberance and forms.
Followingly this anti-reflection layer 17 is described with reference to Fig. 2 and Fig. 3.Fig. 2 is the partial perspective view that schematically shows the surface configuration of anti-reflection layer 17.Fig. 3 is the part sectioned view of the anti-reflection layer 17 among Fig. 2.
One of them surface of anti-reflection layer 17 (surface of LGP one side) upward is the clathrate alignment arrangements by a plurality of small protuberance 7 of (or the spacing of protuberance 7 is about 0.15-0.4 μ m) about diameter 0.15-0.4 μ m and forms, so that the luminous energy in the big wave-length coverage sees through with high permeability.It is that each protuberance of small concaveconvex shape is arranged with height below the visual range wavelength and repetition interval and formed, so do not reflect the light of incident that the reason that aforesaid small concaveconvex shape can prevent light reflection is set.The face that is provided with a plurality of above-mentioned small protuberances 7 in anti-reflection layer 17 surfaces is called as small male and fomale(M﹠F) 17a.The above-mentioned small male and fomale(M﹠F) 17a of anti-reflection layer 17 is configured in the exit facet 12b side of LGP 12.
Then, by above-mentioned anti-reflection layer 17 is set, the light of propagating in the LGP 12 produces reverberation hardly when exit facet 12b incident, can efficiently throw light on to liquid crystal board 20.And light is hardly by the reflection of the medial surface of exit facet 12b, and the albinism that produces so the light that can suppress to be reflected by exit facet 12b arrives the user can strengthen contrast, improves display quality.
And the light of the liquid crystal board of reflection type 20 reflections is during from the exit facet 12b incident of LGP 12, and this anti-reflection layer 17 also can effectively be worked, and the reverberation of liquid crystal board 20 is seen through with high permeability, and the result can obtain the demonstration of high brightness.This be because, the reverberation of liquid crystal board 20 is if reflected by the exit facet 12b of LGP 12, the then part of display light loss, cause brightness to reduce, and the reflection of exit facet 12b cause the albefaction of LGP 12, cause showing that contrast reduces, but,, can prevent above-mentioned phenomenon by on above-mentioned LGP 12, anti-reflection layer 17 being set.
And the diameter or the spacing of preferred protuberance 7 are below the 0.3 μ m, and the height of protuberance 7 is more than the 0.13 μ m.This is because if spacing P surpasses 0.3 μ m, coloring phenomenon takes place when LGP incident light.And if the discontented 0.13 μ m of the height of protuberance 7, anti-reflection effect is insufficient, and reflectivity increases.
Though the transmitance of the more little anti-reflection layer 17 of the spacing of raised part 7 is high more, but, it is very difficult that atomic little protuberance 7 below the 0.13 μ m is carried out alignment arrangements with the size of homogeneous, can cause manufacturing cost to increase, therefore, from practical angle, the lower limit of the spacing of protuberance 7 is approximately 0.20 μ m.And the aspect ratio of protuberance 7 (height H with the spacing P of protuberance 7 ratio) is the scope more than 1, is preferably in the scope more than 1, below 2.This is because if the aspect ratio of protuberance 7 is discontented with 1, can not obtain sufficient reflecting effect.It is translucent resins such as resin, acrylic resin and norbornene resin that the material of anti-reflection layer 17 is used silicon.
Further, in the LGP 12 of the present invention, anti-reflection layer 17 not only is arranged on the exit facet 12b, also can form anti-reflection layer on the side end face 12a of configuration light source 13.Like this, by the side end face 12a of LGP 12 reflection, therefore, further improved the utilization ratio of light source, the brightness of light 10 before can improving in the time of also suppressing light from light source 13 (light conductor 13b) importing LGP 12.And, as anti-reflection layer 17, the occasion of a plurality of small protuberances 7 is set on the surface of LGP one side though it has been described, the small recess of a plurality of submicron orders is set on the surface of LGP one side also is fine.And, as anti-reflection layer 17, though it has been described the occasion of a plurality of small male and fomale(M﹠F)s is set on the surface of LGP one side, on the two sides of anti-reflection layer 17 (face of the face of LGP one side and liquid crystal board one side), small concavo-convex formation face is set and also is fine.
Be formed with liquid crystal key-course 26 on inner surface one side of upper substrate 21 (infrabasal plate 22 1 sides), formed on inner surface one side of infrabasal plate 22 (upper substrate 21 1 sides) have be used to reflect before the reflecting layer 27 of metallic film of the illumination light of light 10 or exterior light, be formed with liquid crystal key-course 28 on this reflecting layer 27.
Liquid crystal key- course 26,28 contains the electrode that is used for driving control liquid crystal layer 23, alignment film etc., also contains the semiconductor element of the above-mentioned electrode of switch etc.And, according to the needs of different occasions, also can be equipped with and carry out the colored colour filter that shows.Then, as shown in Figure 1, the liquid crystal key-course 28 of infrabasal plate 22 1 sides is crossed encapsulant 24 and is extended to its outside, is connected with elastic base plate 29a at its leading section 28a.And the liquid crystal key-course 26 of upper substrate 21 1 sides links together with elastic base plate (diagram slightly).
Dispose on the reflecting layer 27 be used to reflect to the illumination light of the exterior light of LCD panel 20 incidents or preceding light 10, by the reflectance coating that high reflectance metallic films such as aluminium or silver constitute, preferably be equipped with and be used to prevent at specific direction because the light scattering parts of the observability of reverberation enhancing reduction liquid crystal indicator.As these light scattering parts, can use in the metallic reflective coating that adheres to small concaveconvex shape or the resin molding to be studded with and scattering film that constitutes the different dioptric resin bead of resin molding material etc.
As above the liquid crystal indicator 1 of the present embodiment of Gou Chenging externally in the environment of light abundance, can utilize exterior light to reflect demonstration; Externally in the insufficient environment of light,, will show as illumination light from the light of the exit facet 12b outgoing of LGP 12 by light 10 before lighting.And the LGP 12 of preceding light 10 is provided with anti-reflection layer 17, and the light that imports LGP 12 inside from light source 13 can penetrate from exit facet 12b efficiently, therefore, can improve the illumination light quantity to liquid crystal board 20 incidents, carries out the demonstration of high brightness.
Further, reflected by the reflecting layer 27 of infrabasal plate 22 according to incident light to above-mentioned liquid crystal board 20, injected LGP 12 once more, make it see through this LGP 12 and arrive the user, but, in the liquid crystal indicator 1 of present embodiment, by on above-mentioned LGP 12, anti-reflection layer 17 being set, arrived the user by the exit facet 12b of LGP reflection hardly from the light of liquid crystal board 20.That is, not only prevented light by the exit facet 12b of LGP 12 reflection and cause display light brightness to reduce, and, also prevented to be reflected and the albefaction of the LGP 12 that causes by exit facet 12b, therefore, can be to obtain the demonstration of high brightness high-contrast.
(manufacture method of anti-reflection layer)
Below, the manufacture method of the anti-reflection layer in the above-mentioned present embodiment is described.
This anti-reflection layer mould 30 is equipped with the first master mold 30a and the second master mold 30b in the die cavity space 35 that is used for delimiting anti-reflection layer 17 moulding, the inner surface 31b that disposes grand master pattern 36, the second master mold 30b that are made of the inorganic oxide layer with small concavo-convex formation face 36a opposite with the concaveconvex shape of the small concavo-convex formation face 17a of anti-reflection layer 17 on the inner surface 31a of the first master mold 30a forms the face with the opposite side of small concavo-convex formation face 17a of anti-reflection layer 17.And the side of the first master mold 30a and the second master mold 30b is formed with the silicon that injects as anti-reflection layer 17 constituent materials in die cavity be the exit wound of bullet 32 of resin.
Material as the first master mold 30a and the second master mold 30b uses potteries such as silicon chip.
The small recess 37 of a plurality of submicron orders is arranged on the small concavo-convex formation face 36a of grand master pattern 36, and these recesses 37 are the clathrate alignment arrangements.The diameter of recess 37 or spacing P
2Roughly the same with the diameter or the spacing P of the protuberance 7 of anti-reflection layer 17, be 0.15-0.4 μ m, be preferably below the 0.3 μ m.
And, the height H of recess 37
2Approximately identical with the height H of protuberance 7, more than 0.2 μ m.And, the aspect ratio of recess 37 (the spacing P of depth D and recess 7
2Ratio) roughly the same with the aspect ratio of protuberance 7, be the scope more than 1, and preferably greater than 1 less than 2 scope in.
The small concavo-convex formation face 36a of grand master pattern 36 is by surface free energy 4 μ J/cm
2Below (40erg/cm
2Below), 3.5 μ J/cm preferably
2Below (35erg/cm
2Below) cover layer 38 cover.If the surface free energy of cover layer 38 surpasses 4 μ J/cm
2, weaken with the physical bond that is replicated thing (resin injection molding thing), thereby the release property of resin injection molding thing during from the mould demoulding descends.
The surface of this cover layer 38 is formed with the same concaveconvex shape of small concavo-convex formation face 36a with grand master pattern 36.
The occasion that cover layer 38 is made of fluorine-containing DLC layer, the content of adjusting fluorine in the cover layer 38 makes surface free energy at 4 μ J/cm
2Below.The content of fluorine preferably is controlled in the scope (or 10 quality %-30 quality %) of 10wt%-30wt% in the cover layer 38, because at this moment it has to satisfy simultaneously and improves release property and raising and the adhesive advantage of master mold.Content increase along with fluorine in the cover layer 38, release property improves, content minimizing along with fluorine, reduce with the adherence of master mold 30a, therefore, fluorine concentration that also can be by making small concavo-convex formation face 36a one side is less than the fluorine concentration of a surperficial side (die cavity space 35 1 sides), thereby makes the fluorine concentration in gradient of thickness direction of cover layer 38 distribute.The DLC layer that the fluorine concentration in gradient of such thickness direction distributes is called as inclination FDLC layer.
At least a surperficial side of the cover layer 38 that is made of inclination FDLC layer should reach 40erg/cm
2Following surface free energy.Like this, can realize the good adhesion of the inorganic oxide layer of the good release property on cover layer 38 surfaces, small concavo-convex formation face 36a one side and formation grand master pattern.
According to the reason of previous narration, the thickness of wishing cover layer 38 is below the 50nm, to be preferably below the 30nm.
As the preparation method of above-mentioned cover layer 38,, can in fluorine-containing environment, pass through sputtering film-forming in the occasion of fluorine-containing DLC layer.In the occasion of inclination DLC layer, spatter film forming is carried out on the fluorine concentration limit that can the limit changes in the environment.In the occasion of the silane compound layer that contains the fluorine structure, can pass through the dip coating film forming.
And on the small concavo-convex formation face 36a of grand master pattern 36, the diaphragm 38 that constitutes with the material of anti-the fluidity replaces cover layers to cover also being fine.The surface of this diaphragm 38 forms the identical concaveconvex shape of small concavo-convex formation face 36a with grand master pattern 36.
The material of anti-fluidity that diaphragm 38 uses has diamond carbon (DLC), TiO
2Deng oxide.
And, can use metal films such as nickel as the material of diaphragm 38, this occasion can realize the surface modification of grand master pattern 36 can further improving release property.
According to the reason of previous narration, the thickness of wishing diaphragm 38 is below the 50nm, to be preferably below the 30nm.
As the film build method of said protection film 38,, can adopt sputtering film-forming in the occasion of oxidation films such as DLC.
Make anti-reflection layer 17 in order to use above-mentioned anti-reflection layer mould 30, anti-reflection layer mould 30 is installed in the injection moulding machine, is after translucent resin such as resin penetrates and forms the resin injection molding thing from exit wound of bullet 32 with the silicon of anti-reflection layer 17 materials that melt, the resin injection molding thing of small concaveconvex shape that can moulding have duplicated the small concavo-convex formation face 36a of grand master pattern 36, afterwards, obtaining with the demoulding is the anti-reflection layer 17 of purpose.
Adopt the manufacture method of the anti-reflection layer in the present embodiment, owing to use the anti-reflection layer mould 30 that as above constitutes to carry out injection mo(u)lding, the concaveconvex shape of the small concavo-convex formation face 36a of grand master pattern 36 can directly copy on the resin injection molding thing, and owing to duplicate Shi Buhui and destroy its shape, with duplicating of past the nickel electroformed mould of concaveconvex shape of grand master pattern compare, can have the anti-reflection layer 17 of the small concavo-convex formation face 17a that has formed the small protuberance 7 of a plurality of submicron orders with the high dimensional accuracy manufacturing.And, because grand master pattern 36 is made of inorganic oxide,, can make anti-reflection layer 17 efficiently so the release property during from the demoulding of resin injection molding thing is also good.
And the small concavo-convex formation face 36a of grand master pattern 36 goes up and forms surface free energy at 4 μ J/cm
2Following cover layer 38 weakens with the physical bond of resin injection molding thing, and the release property of resin injection molding thing during from the mould demoulding improves, and can make anti-reflection layer 17 efficiently.And; the small concavo-convex formation face 36a of grand master pattern 36 is owing to formed cover layer 38 or diaphragm 38; the small concavo-convex formation face 36a of grand master pattern 36 does not expose and is protected effect outside; so; the shape deterioration of the small concavo-convex formation face 36a of the grand master pattern 36 that the cleaning agent that can prevent from when anti-reflection layer mould 30 from safeguarding to use causes has prolonged its life-span as mould.
And, in the anti-reflection layer mould 30, also dispose the grand master pattern identical on the inner surface 31b of the second master mold 30b with above-mentioned grand master pattern 36, adopt such anti-reflection layer mould to carry out injection mo(u)lding, just can produce the anti-reflection layer that on the two sides (face of the face of LGP one side and liquid crystal board one side) all is formed with small concavo-convex formation face.
And, though in the above-mentioned embodiment occasion of using resin system optics mould to make anti-reflection layer is illustrated, but, the manufacture method of resin system optics of the present invention also is suitable in the occasion of making LGP 12, light guide plate forming mould as this occasion use, have the small concavo-convex formation face that has formed with LGP 12 and (be formed with the face of a plurality of protuberances 14, being reflecting surface 12c in Fig. 1) grand master pattern of the small concavo-convex formation face of opposite concaveconvex shape is placed on a wherein side's the inner surface of first master mold and second master mold, be formed with the face of the exit facet 12b of formed light conductive plate 12 on the inner surface of another one master mold, use such mould to carry out injection mo(u)lding, can produce LGP 12.
Embodiment
(embodiment 1)
Made the anti-reflection layer mould identical with Fig. 4 to Fig. 5.The recess spacing of the small concavo-convex formation face of the grand master pattern that disposes on the anti-reflection layer mould of made is that 0.22 μ m, aspect ratio are 1.2.And what cover that the tectal material of the small concavo-convex formation face of this grand master pattern uses is inclination FDLC layer.The thickness of this inclination FDLC layer is 30nm.And the surface free energy of this inclination FDLC layer is 3.12 μ J/cm
2(31.2erg/cm
2).Secondly, the anti-reflection layer mould of making is installed in the injection moulding machine, from exit wound of bullet with the anti-reflection layer material that melts, be the ア one ト Application (trade name is the heat-resisting transparent resin of optics) of the SR of J Co., Ltd. system penetrate and formation resin injection molding thing after, demoulding obtains anti-reflection layer.The anti-reflection layer that obtains has been replicated the small concaveconvex shape of the small concavo-convex formation face of grand master pattern, has the small male and fomale(M﹠F) of high dimensional accuracy.Here, the above-mentioned tectal bonding workload (Wbs) during to demoulding is investigated, and is 7.42 μ J/cm
2(74.2erg/cm
2), demoulding is good, and, on the cover layer that is formed on the small male and fomale(M﹠F) of grand master pattern, do not find to adhere to the anti-reflection layer material.
(embodiment 2)
Made the anti-reflection layer mould identical with Fig. 4 to Fig. 5.The recess spacing of the small concavo-convex formation face of the grand master pattern that disposes on the anti-reflection layer mould of made is that 0.25 μ m, aspect ratio are 1.3.And that cover that the tectal material of the small concavo-convex formation face of this grand master pattern uses is the AY43-158 (trade name, contain the silane compound of fluorine structure) of the east レ of Co., Ltd..This tectal thickness is 10nm.And this tectal surface free energy is 1.6 μ J/cm
2(16.0erg/cm
2).
Secondly, the anti-reflection layer mould of making is installed in the injection moulding machine, from exit wound of bullet with the anti-reflection layer material that melts, be that demoulding obtained anti-reflection layer after the ア one ト Application (trade name) of the SR of J Co., Ltd. system penetrated and forms the resin injection molding thing.The anti-reflection layer that obtains has been replicated the small concaveconvex shape of the small concavo-convex formation face of grand master pattern, has the small male and fomale(M﹠F) of high dimensional accuracy.Here, the above-mentioned tectal bonding workload (Wbs) during to demoulding is investigated, and is 4.55 μ J/cm
2(45.5erg/cm
2), demoulding is good, and, on the cover layer that is formed on the small male and fomale(M﹠F) of grand master pattern, do not find to adhere to the anti-reflection layer material.
(comparative example 1)
Made and on the small concavo-convex formation face of grand master pattern, do not formed the cover layer other all identical anti-reflection layer mould with embodiment 1.The surface free energy of the small concavo-convex formation face of grand master pattern is 5.36 μ J/cm
2(53.6erg/cm
2).
Secondly, the anti-reflection layer mould of making is installed in the injection moulding machine, from exit wound of bullet with the anti-reflection layer material that melts, be after the ア one ト Application (trade name) of the SR of J Co., Ltd. system penetrates and forms the resin injection molding thing, the bonding workload (Wbs) of the above-mentioned grand master pattern during to demoulding is investigated, and is 9.3 μ J/cm
2(93.0erg/cm
2), be attached with the anti-reflection layer material on the surface of grand master pattern, the demoulding difficulty.
(invention effect)
More than, as describing in detail, adopt the present invention, can have the resin system optics of the small concavo-convex formation face that has formed small recess of a plurality of submicron orders or protuberance and the resin system optics mould of the release property can improve the resin injection molding thing from the mould demoulding time can be provided with the high dimensional accuracy manufacturing.
Claims (10)
1. resin system optics mould with small male and fomale(M﹠F), be the mould that is used for thereby the translucent resin injection mo(u)lding is formed resin system optics, this resin system optics has the small concavo-convex formation face that has formed small recess of a plurality of submicron orders or protuberance, it is characterized in that:
Be equipped with first master mold and second master mold; the inner surface of at least one side in above-mentioned first master mold and second master mold is provided with the grand master pattern that is made of the inorganic oxide layer; wherein first master mold and second master mold delimited the die cavity space that is used for forming resin system optics; this resin system optics has the small concavo-convex formation face that has formed small recess of a plurality of submicron orders or protuberance; grand master pattern has small concavo-convex formation face, and this small concavo-convex formation face is formed with the concaveconvex shape opposite with the small concavo-convex formation face of above-mentioned resin system optics.
2. resin system optics mould according to claim 1 is characterized in that: being formed with surface free energy on the small concavo-convex formation face of above-mentioned grand master pattern is the following cover layers of 4 μ J/cm2.
3. resin system optics mould according to claim 2 is characterized in that: above-mentioned cover layer is made of fluorine-containing diamond carbon-coating or the silane compound layer that contains fluorine structure.
4. resin system optics mould according to claim 2 is characterized in that: above-mentioned cover layer is formed by fluorine-containing diamond carbon-coating, and the fluorine concentration in gradient of this overburden cover direction distributes.
5. resin system optics mould according to claim 2 is characterized in that: above-mentioned tectal thickness is below the 50nm.
6. resin system optics mould according to claim 1 is characterized in that: be coated with the diaphragm that is made of the material of anti-the fluidity on the small concavo-convex formation face of above-mentioned grand master pattern.
7. resin system optics mould according to claim 5 is characterized in that: the thickness of said protection film is below the 50nm.
8. resin system optics mould according to claim 1 and 2 is characterized in that: the small recess that forms on the small concavo-convex formation face of above-mentioned grand master pattern or the aspect ratio of protuberance are more than 1.
9. resin system optics mould according to claim 1 and 2, it is characterized in that: above-mentioned grand master pattern is by SiO
2Layer forms.
10. manufacture method with resin system optics of small male and fomale(M﹠F), be to utilize mould to make the manufacture method of resin system optics by injection molding forming method, this resin system optics has the small concavo-convex formation face that has formed small recess of a plurality of submicron orders or protuberance, it is characterized in that:
Use the resin system optics mould described in the claim 1 or 2 as above-mentioned mould, injection mo(u)lding translucent resin in the die cavity space of this mould is replicated in the small concaveconvex shape of the small concavo-convex formation face of above-mentioned grand master pattern on the resin system optics.
Applications Claiming Priority (6)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2003204597 | 2003-07-31 | ||
| JP2003204598 | 2003-07-31 | ||
| JP2003204598A JP2005047081A (en) | 2003-07-31 | 2003-07-31 | Mold for molding optical part made of resin having fine uneven surface and manufacturing method of optical part made of resin using it |
| JP2003-204598 | 2003-07-31 | ||
| JP2003204597A JP2005047080A (en) | 2003-07-31 | 2003-07-31 | Mold for molding optical part made of resin having fine uneven surface and manufacturing method of optical part made of resin using it |
| JP2003-204597 | 2003-07-31 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1579737A true CN1579737A (en) | 2005-02-16 |
| CN100429063C CN100429063C (en) | 2008-10-29 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB2004100559267A Expired - Fee Related CN100429063C (en) | 2003-07-31 | 2004-07-30 | Optical component mold and method of manufacturing optical component using the same |
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| Country | Link |
|---|---|
| US (1) | US20050023433A1 (en) |
| CN (1) | CN100429063C (en) |
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| US10302847B2 (en) * | 2015-05-22 | 2019-05-28 | Microsoft Technology Licensing, Llc | Micro injection-molded articles |
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| US4753414A (en) * | 1986-04-14 | 1988-06-28 | Balzers Optical Corporation | Carbon coatings in replicated optics art |
| US5112025A (en) * | 1990-02-22 | 1992-05-12 | Tdk Corporation | Molds having wear resistant release coatings |
| JPH06201908A (en) * | 1992-12-29 | 1994-07-22 | Olympus Optical Co Ltd | Production of stamper for diffraction grating |
| JP3818320B2 (en) * | 1994-09-09 | 2006-09-06 | コーニンクレッカ フィリップス エレクトロニクス エヌ ヴイ | Method for producing a mold used for the production of optical elements having optical sub-elements arranged in a pattern with respect to each other and apparatus for carrying out such a method |
| US5965069A (en) * | 1996-01-31 | 1999-10-12 | Matsushita Electric Industrial Co., Ltd. | Method for making optical preforms and optical elements by press |
| US6523803B1 (en) * | 1998-09-03 | 2003-02-25 | Micron Technology, Inc. | Mold apparatus used during semiconductor device fabrication |
| JP2002372603A (en) * | 2001-06-15 | 2002-12-26 | Nikon Corp | Optical part for optical communication and method for manufacturing the same |
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2004
- 2004-07-28 US US10/900,792 patent/US20050023433A1/en not_active Abandoned
- 2004-07-30 CN CNB2004100559267A patent/CN100429063C/en not_active Expired - Fee Related
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN103269840A (en) * | 2011-01-21 | 2013-08-28 | 矢崎总业株式会社 | Injection molding machine |
| US9056408B2 (en) | 2011-01-21 | 2015-06-16 | Yazaki Corporation | Injection molding machine |
| CN103269840B (en) * | 2011-01-21 | 2017-05-31 | 矢崎总业株式会社 | Injection (mo(u)lding) machine |
| CN105051259A (en) * | 2013-03-28 | 2015-11-11 | 富士胶片株式会社 | Manufacturing method for metal component, and casting mold and mold release film used for same |
| CN110799861A (en) * | 2017-06-28 | 2020-02-14 | 凸版印刷株式会社 | Color developing structure, display body, and method for producing color developing structure |
| US11592605B2 (en) | 2017-06-28 | 2023-02-28 | Toppan Printing Co., Ltd. | Color developing structure having concave-convex layer, method for producing such structure, and display |
| CN111703015A (en) * | 2020-06-23 | 2020-09-25 | 合肥惠科金扬科技有限公司 | Light guide plate manufacturing method, light guide plate and side-in type backlight module |
Also Published As
| Publication number | Publication date |
|---|---|
| CN100429063C (en) | 2008-10-29 |
| US20050023433A1 (en) | 2005-02-03 |
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