CN1564076A - Laser attenuator - Google Patents
Laser attenuator Download PDFInfo
- Publication number
- CN1564076A CN1564076A CN 200410017493 CN200410017493A CN1564076A CN 1564076 A CN1564076 A CN 1564076A CN 200410017493 CN200410017493 CN 200410017493 CN 200410017493 A CN200410017493 A CN 200410017493A CN 1564076 A CN1564076 A CN 1564076A
- Authority
- CN
- China
- Prior art keywords
- laser
- attenuator
- assembly according
- incident
- deielectric
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003287 optical effect Effects 0.000 claims abstract description 9
- 230000005540 biological transmission Effects 0.000 claims abstract description 4
- 238000000576 coating method Methods 0.000 claims description 13
- 239000011248 coating agent Substances 0.000 claims description 12
- 230000001105 regulatory effect Effects 0.000 claims description 7
- 239000011358 absorbing material Substances 0.000 claims description 4
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 3
- 238000010521 absorption reaction Methods 0.000 claims description 3
- 229910002804 graphite Inorganic materials 0.000 claims description 3
- 239000010439 graphite Substances 0.000 claims description 3
- 230000035945 sensitivity Effects 0.000 claims description 2
- 239000007770 graphite material Substances 0.000 abstract description 2
- 229910010293 ceramic material Inorganic materials 0.000 abstract 1
- 238000002474 experimental method Methods 0.000 description 3
- 238000002310 reflectometry Methods 0.000 description 2
- 239000007844 bleaching agent Substances 0.000 description 1
- 238000013016 damping Methods 0.000 description 1
- 230000001066 destructive effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 230000007935 neutral effect Effects 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
Landscapes
- Optical Elements Other Than Lenses (AREA)
Abstract
A laser attenuator, comprising: one or a pair of optical flat plates coated with a dielectric film sensitive to an incident angle, wherein the dielectric film has the maximum reflection at the incident angle of 5 degrees and the maximum transmission at the incident angle of 40 degrees, so that the dielectric film damage threshold is greatly improved; graphite material or ceramic material is used in the part for absorbing the reflected light, and a heat sink is mounted on the outside of the attenuator as appropriate. The invention has simple design and is suitable for attenuating and adjusting the power of the laser.
Description
Technical field:
The present invention relates to a kind of laser attenuator assembly, particularly a kind of laser power attenuator that is applied to various laser science experiments and Laser Processing.
Background technology:
In the application of various scientific experiments and Laser Processing, the requirement adjustable to the decay of laser power proposed.In application in the past, have and adopt the absorption-type neutral density glass to realize decay, yet under higher-wattage, but can bleach laser power as attenuator, and can not be adjustable continuously; Also have and adopt common deielectric-coating to realize decay,, and can stand the irradiation of certain power, be not suitable for the application of higher-wattage though power attenuation can be regulated continuously to laser power.
Summary of the invention:
As mentioned above, how to solve the diaphragm design alternative of high destructive threshold value, and the absorption of unnecessary laser power and heat radiation, be technical matters to be solved by this invention, for this reason, the object of the present invention is to provide a kind of laser power attenuator that is applied to various laser science experiments and Laser Processing.
Technical solution of the present invention is as follows:
According to laser attenuator assembly of the present invention, comprise one or a pair of deielectric-coating optical flat that is coated with the incident angle sensitivity, maximum when deielectric-coating is designed to 5 ° of incident angles to incident laser reflection, and when 40 ° of incident angles to incident laser transmission maximum, thereby improve the deielectric-coating damage threshold greatly; Absorbing catoptrical part employing graphite or pottery as absorbing material, the flaky material of graphite or pottery is attached to the attenuator inwall; And load onto metal fin in the attenuator outside according to circumstances; Described deielectric-coating optical flat to the incident angle of incident laser 5 °～40 ° continuous adjustable, and regulate continuously by a regulating tooth wheel disc.
Simplicity of design of the present invention is applicable to power attenuation and adjusting to laser.
Description of drawings:
Fig. 1 is the structural representation of laser attenuator assembly implementation column.
Embodiment:
Provide a better embodiment of laser attenuator assembly of the present invention according to Fig. 1, as shown in the figure, laser 1 enters in the attenuator 2, is mapped to through the laser 5,6 of the loss that is reflected behind a pair of medium diaphragm 3,4 on the absorbing sheet 7,8 of decay inwall, and its heat that changes into is mainly discharged by heat radiator 9,10.By the angle of regulating tooth wheel disc 11,12 adjusting medium diaphragms 3,4, thereby adjusting obtains the laser 13 after decay at last to the damping capacity of laser.Medium diaphragm 3,4 carries out plated film at the wave band of needs, the reflectivity of design is maximum when 5 ° of incident angles, the laser-damaged threshold value that can guarantee deielectric-coating like this on coating process reaches maximum, for the laser of 1064nm wavelength 10ns, destroys threshold values and can reach 20J/cm
2More than.Absorbing sheet 7,8 adopts graphite material economical and practical, cooperates heat radiator can obtain good effect.
As the replacement of the foregoing description, only establish a medium diaphragm 3 in the attenuator 2, be subjected to the laser 5 of its reflection loss to be mapped to the absorbing sheet 7 of attenuator inwall, its heat that changes into is mainly discharged by heat radiator 9.By the angle that regulating tooth wheel disc 11 is regulated medium diaphragm 3, medium diaphragm 3 carries out plated film by required laser wavelength, and design reflectivity maximum when 5 ° of incident angles, transmission maximum when 40 ° of incident angles.In the present embodiment, absorbing sheet is made by pottery.
Claims (8)
1, a kind of laser attenuator assembly, be included in laser incident path and be provided with to the deielectric-coating optical flat of incident angle sensitivity with at the attenuator inwall and attach the absorbing material that absorbs reflector laser, it is characterized in that: the incident laser reflection was maximum when this deielectric-coating optical flat was designed to 5 ° of incident angles.
2, laser attenuator assembly according to claim 1 is characterized in that: incident laser transmission maximum when this deielectric-coating optical flat is designed to 40 ° of incident angles.
3, laser attenuator assembly according to claim 1 and 2 is characterized in that: the absorbing material of the absorption reflector laser that attaches on this inwall is a graphite.
4, laser attenuator assembly according to claim 1 and 2 is characterized in that: the absorbing material of the absorption reflector laser that attaches on this inwall is pottery.
5, laser attenuator assembly according to claim 1 and 2 is characterized in that: described deielectric-coating optical flat to the laser incident angle be 5 °～40 ° continuous adjustable.
6, laser attenuator assembly according to claim 5 is characterized in that: described deielectric-coating optical flat is regulated by a regulating tooth wheel disc continuously to the laser incident angle.
7, laser attenuator assembly according to claim 1 and 2 is characterized in that: described deielectric-coating optical flat is one or a pair of.
8, laser attenuator assembly according to claim 1 and 2 is characterized in that: also load onto heat radiator in the outside of attenuator.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200410017493 CN1564076A (en) | 2004-04-06 | 2004-04-06 | Laser attenuator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200410017493 CN1564076A (en) | 2004-04-06 | 2004-04-06 | Laser attenuator |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN1564076A true CN1564076A (en) | 2005-01-12 |
Family
ID=34478996
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 200410017493 Pending CN1564076A (en) | 2004-04-06 | 2004-04-06 | Laser attenuator |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN1564076A (en) |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1835421B (en) * | 2006-04-14 | 2010-04-21 | 南京邮电大学 | Automatic control method of receiving light power through free space optical communication system |
| CN101799567A (en) * | 2010-04-06 | 2010-08-11 | 西安交通大学 | Strong-laser graphite diaphragm and method for manufacturing same |
| CN105449505A (en) * | 2015-12-16 | 2016-03-30 | 中国科学院西安光学精密机械研究所 | Coding type high-magnification laser attenuator |
| CN107405728A (en) * | 2015-03-04 | 2017-11-28 | 通快激光系统半导体制造有限公司 | Beam trap, beam guide device, EUV-radiation produce equipment and the method for absorbing beam |
| CN107579411A (en) * | 2017-09-25 | 2018-01-12 | 中国科学院电子学研究所 | Laser attenuation device |
| CN109839736A (en) * | 2017-11-28 | 2019-06-04 | 中国科学院大连化学物理研究所 | A kind of broad band laser energy attenuator |
| CN110542960A (en) * | 2019-09-11 | 2019-12-06 | 青岛海信宽带多媒体技术有限公司 | Optical module |
-
2004
- 2004-04-06 CN CN 200410017493 patent/CN1564076A/en active Pending
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1835421B (en) * | 2006-04-14 | 2010-04-21 | 南京邮电大学 | Automatic control method of receiving light power through free space optical communication system |
| CN101799567A (en) * | 2010-04-06 | 2010-08-11 | 西安交通大学 | Strong-laser graphite diaphragm and method for manufacturing same |
| CN107405728A (en) * | 2015-03-04 | 2017-11-28 | 通快激光系统半导体制造有限公司 | Beam trap, beam guide device, EUV-radiation produce equipment and the method for absorbing beam |
| US10264660B2 (en) | 2015-03-04 | 2019-04-16 | Trumpf Lasersystems For Semiconductor Manufacturing Gmbh | Beam trap, beam guide device, EUV radiation generating apparatus, and method for absorbing a beam |
| CN107405728B (en) * | 2015-03-04 | 2020-05-12 | 通快激光系统半导体制造有限公司 | Beam trap, beam guiding device, EUV radiation generating apparatus and method for absorbing a beam |
| CN105449505A (en) * | 2015-12-16 | 2016-03-30 | 中国科学院西安光学精密机械研究所 | Coding type high-magnification laser attenuator |
| CN105449505B (en) * | 2015-12-16 | 2018-10-02 | 中国科学院西安光学精密机械研究所 | Coding type high-magnification laser attenuator |
| CN107579411A (en) * | 2017-09-25 | 2018-01-12 | 中国科学院电子学研究所 | Laser attenuation device |
| CN109839736A (en) * | 2017-11-28 | 2019-06-04 | 中国科学院大连化学物理研究所 | A kind of broad band laser energy attenuator |
| CN110542960A (en) * | 2019-09-11 | 2019-12-06 | 青岛海信宽带多媒体技术有限公司 | Optical module |
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| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C02 | Deemed withdrawal of patent application after publication (patent law 2001) | ||
| WD01 | Invention patent application deemed withdrawn after publication |