CN1563482A - 二氧化锡透明导电膜的制造设备 - Google Patents
二氧化锡透明导电膜的制造设备 Download PDFInfo
- Publication number
- CN1563482A CN1563482A CN 200410026828 CN200410026828A CN1563482A CN 1563482 A CN1563482 A CN 1563482A CN 200410026828 CN200410026828 CN 200410026828 CN 200410026828 A CN200410026828 A CN 200410026828A CN 1563482 A CN1563482 A CN 1563482A
- Authority
- CN
- China
- Prior art keywords
- stannic oxide
- unit
- electrically conducting
- vitrified pipe
- conducting transparent
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 title claims abstract description 60
- 239000000758 substrate Substances 0.000 claims abstract description 44
- 238000010438 heat treatment Methods 0.000 claims abstract description 19
- 239000000919 ceramic Substances 0.000 claims abstract description 8
- 230000001360 synchronised effect Effects 0.000 claims abstract description 5
- 239000007921 spray Substances 0.000 claims abstract description 4
- 238000005096 rolling process Methods 0.000 claims abstract description 3
- 230000005540 biological transmission Effects 0.000 claims description 39
- 238000005507 spraying Methods 0.000 claims description 14
- 239000011521 glass Substances 0.000 claims description 10
- 230000007246 mechanism Effects 0.000 claims description 8
- 239000007789 gas Substances 0.000 claims description 5
- 239000012159 carrier gas Substances 0.000 claims description 4
- 230000004907 flux Effects 0.000 claims description 4
- 230000009467 reduction Effects 0.000 claims description 4
- 238000007747 plating Methods 0.000 claims description 3
- 238000004140 cleaning Methods 0.000 claims description 2
- 238000001816 cooling Methods 0.000 claims description 2
- 230000008676 import Effects 0.000 claims description 2
- 230000001681 protective effect Effects 0.000 claims description 2
- 239000000126 substance Substances 0.000 claims description 2
- 238000004519 manufacturing process Methods 0.000 abstract description 9
- 239000010408 film Substances 0.000 description 31
- 238000000034 method Methods 0.000 description 14
- 239000002184 metal Substances 0.000 description 9
- 229910001220 stainless steel Inorganic materials 0.000 description 5
- 239000010935 stainless steel Substances 0.000 description 5
- 238000009434 installation Methods 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 3
- 238000002360 preparation method Methods 0.000 description 3
- 239000010409 thin film Substances 0.000 description 3
- 229910021627 Tin(IV) chloride Inorganic materials 0.000 description 2
- 239000002253 acid Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- YFAXVVMIXZAKSR-UHFFFAOYSA-L dichloro(diethyl)stannane Chemical compound CC[Sn](Cl)(Cl)CC YFAXVVMIXZAKSR-UHFFFAOYSA-L 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000012423 maintenance Methods 0.000 description 2
- 239000012528 membrane Substances 0.000 description 2
- 239000002994 raw material Substances 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- HPGGPRDJHPYFRM-UHFFFAOYSA-J tin(iv) chloride Chemical compound Cl[Sn](Cl)(Cl)Cl HPGGPRDJHPYFRM-UHFFFAOYSA-J 0.000 description 2
- 238000004506 ultrasonic cleaning Methods 0.000 description 2
- 239000002699 waste material Substances 0.000 description 2
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 238000001505 atmospheric-pressure chemical vapour deposition Methods 0.000 description 1
- 238000000889 atomisation Methods 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000010924 continuous production Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 229910052731 fluorine Inorganic materials 0.000 description 1
- 239000011737 fluorine Substances 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- 229920006254 polymer film Polymers 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Surface Treatment Of Glass (AREA)
- Chemically Coating (AREA)
Abstract
Description
Claims (10)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN 200410026828 CN1276123C (zh) | 2004-04-14 | 2004-04-14 | 二氧化锡透明导电膜的制造设备 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN 200410026828 CN1276123C (zh) | 2004-04-14 | 2004-04-14 | 二氧化锡透明导电膜的制造设备 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1563482A true CN1563482A (zh) | 2005-01-12 |
CN1276123C CN1276123C (zh) | 2006-09-20 |
Family
ID=34480754
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN 200410026828 Expired - Fee Related CN1276123C (zh) | 2004-04-14 | 2004-04-14 | 二氧化锡透明导电膜的制造设备 |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN1276123C (zh) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101851067A (zh) * | 2010-04-20 | 2010-10-06 | 浙江大学 | 用于制备玻璃表面导电薄膜的喷涂炉 |
CN102242349A (zh) * | 2010-05-14 | 2011-11-16 | 亚树科技股份有限公司 | 可拆卸式进出气结构及其导电膜成膜装置 |
EP2211378A3 (de) * | 2009-01-27 | 2012-10-10 | SCHOTT Solar AG | Verfahren zur Erhöhung der Langzeitstabilität von Transporthilfsmitteln |
CN104603326A (zh) * | 2012-05-31 | 2015-05-06 | 索尼公司 | 成膜装置和成膜方法 |
-
2004
- 2004-04-14 CN CN 200410026828 patent/CN1276123C/zh not_active Expired - Fee Related
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP2211378A3 (de) * | 2009-01-27 | 2012-10-10 | SCHOTT Solar AG | Verfahren zur Erhöhung der Langzeitstabilität von Transporthilfsmitteln |
CN101851067A (zh) * | 2010-04-20 | 2010-10-06 | 浙江大学 | 用于制备玻璃表面导电薄膜的喷涂炉 |
CN102242349A (zh) * | 2010-05-14 | 2011-11-16 | 亚树科技股份有限公司 | 可拆卸式进出气结构及其导电膜成膜装置 |
CN104603326A (zh) * | 2012-05-31 | 2015-05-06 | 索尼公司 | 成膜装置和成膜方法 |
CN104603326B (zh) * | 2012-05-31 | 2017-07-18 | 索尼公司 | 成膜装置和成膜方法 |
Also Published As
Publication number | Publication date |
---|---|
CN1276123C (zh) | 2006-09-20 |
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Legal Events
Date | Code | Title | Description |
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C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
C41 | Transfer of patent application or patent right or utility model | ||
EE01 | Entry into force of recordation of patent licensing contract |
Assignee: Chuangyi Science and Technology Development Co., Ltd., Shenzhen City Assignor: Li Yi Contract fulfillment period: 2008.10.4 to 2009.10.4 Contract record no.: 2008440000460 Denomination of invention: Equipment for fabricating nesa of stannic oxide Granted publication date: 20060920 License type: exclusive license Record date: 20081208 |
|
TR01 | Transfer of patent right |
Effective date of registration: 20090206 Address after: Floor 5, building 2, building three, fibre optic community, Bagua Road, Shenzhen, Guangdong, Futian District Patentee after: Chuangyi Science and Technology Development Co., Ltd., Shenzhen City Address before: Futian District Huaqiang south before the village of Shenzhen city in Guangdong province 29 Building No. 24 room 504 Patentee before: Li Yi |
|
ASS | Succession or assignment of patent right |
Owner name: SHENZHEN CITY CHUANGYI TECHNOLOGY DEVELOPMENT CO., Free format text: FORMER OWNER: LI YI Effective date: 20090206 |
|
LIC | Patent licence contract for exploitation submitted for record |
Free format text: EXCLUSIVE LICENSE; TIME LIMIT OF IMPLEMENTING CONTACT: 2008.10.4 TO 2009.10.4; CHANGE OF CONTRACT Name of requester: SHENZHEN CITY CHUANGYI TECHNOLOGY DEVELOPMENT CO., Effective date: 20081208 |
|
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20060920 Termination date: 20210414 |
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CF01 | Termination of patent right due to non-payment of annual fee |