CN1562749A - Purification device for dry air stripping liquid ammonia through hydrogen under low temperatre and method - Google Patents
Purification device for dry air stripping liquid ammonia through hydrogen under low temperatre and method Download PDFInfo
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- CN1562749A CN1562749A CN 200410020433 CN200410020433A CN1562749A CN 1562749 A CN1562749 A CN 1562749A CN 200410020433 CN200410020433 CN 200410020433 CN 200410020433 A CN200410020433 A CN 200410020433A CN 1562749 A CN1562749 A CN 1562749A
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Abstract
The main devices include hydrogen entrance and buffer tank, preheater, palladium film separator, cold exchanger, hydrogen exit and drying and gas sellecting tower which are connected one by one. The bufer bank, preheater, palladium film separator and cold exchanger are connected with heat exchanger, there is a circular film pressure machine between the buffer tank and cold exchanger. the drying and gas sellecting tower is composed of top, centre air tube, tower and bottom, raw material ammonia entrance and high-purity hydrogen entrance are on the top, refrigerant entrance and exit are on the tower. Hydrogen can come up to 9N by palladium and film separating, total impurity substance is 0.0000000001 (1ppb). The gas is send into liquid ammonia directly and then is dried, all impurity substances containing H2O, O2, CH4 etc. are removed. By the method, impurity substance content in the liquid ammonia can be reduced less than 100 pph.
Description
Technical field
The present invention relates to a kind of equipment for purifying and method thereof of liquefied ammonia, particularly relate to the purification devices and the method thereof of a kind of hydrogen cryodrying-gas extract ammonia.
Background technology
Known absorption---the liquefied ammonia purity behind the distillation purifying reaches 5.5N, and foreign matter content does not reach the index of GaN growth technique requirement, and purity is the N of GaN growth technique greater than the high-purity ammon of 6.4N
2The source requires very low to the foreign matter content in the ammonia.As O
2: 100ppb, H
2O:200ppb, CH
4: 50ppb, CO
2: 100ppb, CO:50ppb, H
2: 100ppb, Ar:200ppb.This liquefied ammonia is called " blue ammonia ".The preparation facilities of relevant blue ammonia and processing method report are very few.The U.S. adopts rectificating method to prepare blue ammonia, no detail file.If adopt rectifying to remove impurity so micro-in the liquefied ammonia, the concentration distribution of rectifying tower, temperature distribution differ very little, and liquid load is very big, and bigger rectifying of power consumption becomes more unreasonable with regard to making originally for this.Lacking vapour---be difficult to design a rational rectifier unit of cover and a processing method under the situation of liquid equilibrium data.
Summary of the invention
In order to overcome the existing equipment of high purity liquid ammonia and the deficiency that technology exists of preparing, the invention provides the purification devices and the method thereof of a kind of hydrogen cryodrying-gas extract ammonia, with high-purity hydrogen dry gas extract ammonia, remove H
2O, O
2, N
2, CH
4Deng trace impurity, improve the purity of liquefied ammonia
The technical solution adopted for the present invention to solve the technical problems is: the purification devices of a kind of hydrogen cryodrying-gas extract ammonia, comprise that hydrogen inlet reaches and its surge tank that is connected successively, preheater, palladium membrane separation apparatus, cool exchanger, hydrogen outlet and drying-gas stripping column, surge tank, preheater, palladium membrane separation apparatus and cool exchanger are connected with heat exchanger, be provided with the circulation molding machine between surge tank and the cool exchanger, drying-gas stripping column is formed at the bottom of by cat head, central intake pipe, tower body and tower, and cat head is provided with raw material ammonia inlet, high-purity hydrogen inlet; Tower body is provided with refrigerant inlet, refrigerant exit, and the spiral coil cooling tube that is provided with in the tower body is connected with the retaining plate of setting in the tower body; The upper end of central intake pipe is provided with the high-purity hydrogen inlet, and it places the intravital part of tower to be provided with the multilayer sieve plate, and its lower end is connected with shower nozzle; Be provided with supporting plate between tower body and the cat head, be provided with product ammonia outlet at the bottom of the tower, be connected by spacing tube between every layer on the sieve plate.Be provided with the foam removal silk screen above the supporting plate, the waste gas outlet place of palladium membrane separation apparatus is provided with the ammonia withdrawing can, be connected by ring flange between tower body and the cat head, fixedlying connected with the pipe core ring flange in the upper end of central intake pipe, is connected with the discharging molding machine between cool exchanger and the heat exchanger.
Use the method for the purification devices of a kind of hydrogen cryodrying-gas extract ammonia, concrete processing step is:
(1) before not feeding intake, use earlier the high-purity hydrogen exchange system: with pressure be the industrial hydrogen of 1.2Mpa-1.5Mpa (gauge pressure) by hydrogen inlet through surge tank, heat exchanger enters into preheater, be warmed up to 300-350 ℃, enter the palladium membrane separation apparatus, its outlet hydrogen pressure is reduced to 0.13Mpa-0.15Mpa (gauge pressure), through over-heat-exchanger, be cooled to 100 ℃-150 ℃, central intake pipe in cool exchanger enters empty drying-gas stripping column, by the shower nozzle ejection, distribute again through the multilayer sieve plate again, make gas-liquid fully contact the back and discharge from the hydrogen outlet of cat head, enter the cyclic module press, be pressurized to 1.3 (gauge pressure)-1.5Mpa (gauge pressure), enter surge tank again, send in the system, circulate, hydrogen recycle is used; Detect dew point at the hydrogen outlet place, when its during near the high-purity hydrogen dew point of palladium membrane separation apparatus outlet, stop hydrogen exchange.
In working cycle, waste gas in the palladium membrane separation apparatus 0.12Mpa-0.15Mpa (gauge pressure) that reduces pressure, enter the ammonia withdrawing can, in the ammonia withdrawing can, freeze by ice maker, through refrigerant inlet, refrigerant exit, be as cold as below-33 ℃, through waste gas outlet emptying, hydrogen can not reclaim fully, should be in hydrogen inlet place hydrogen make-up.
In replacement process, if when hydrogen temperature is higher than room temperature, can appropriateness open ice maker, open the refrigerant inlet, refrigerant exit is reduced to till the room temperature it;
(2), ice maker refrigeration, open ice maker, make the temperature in drying-gas stripping column be reduced to-10 ℃ by refrigerant inlet, refrigerant exit--25 ℃, with purity greater than 5N liquefied ammonia by in the disposable adding drying-gas stripping column of test tank, continue to cool to-50 ℃--70 ℃; With pressure is that the industrial hydrogen of 1.3-1.5Mpa (gauge pressure) enters surge tank by hydrogen inlet, after heat exchanger reclaims heat, temperature reaches 200 ℃-250 ℃, enter preheater again, make temperature reach 300-350 ℃, after removing oxygen under the effect of the palladium catalyst of in preheater, filling, enter the palladium membrane separation apparatus, its exit hydrogen purity reaches 8N-9N, and pressure is reduced to 0.13-0.15Mpa, enters heat exchanger, be cooled to 100 ℃-150 ℃, be cooled to 20 ℃-50 ℃ through cool exchanger, enter the central intake pipe in drying-gas stripping column afterwards, spray by shower nozzle, distribute again through the multilayer sieve plate again, after gas-liquid is fully contacted, discharge from the hydrogen outlet of cat head, after cool exchanger reclaims cold, enter the cyclic module press, be pressurized to 1.3-1.5Mpa (gauge pressure) and send into again in the system, repeat said process, hydrogen recycle is used;
In working cycle, the 0.12Mpa-0.15Mpa (gauge pressure) that reduces pressure of the waste gas in the palladium membrane separation apparatus enters the ammonia withdrawing can, by the ice maker refrigeration, through refrigerant inlet, refrigerant exit, is as cold as below-33 ℃ in the ammonia withdrawing can, reclaims ammonia after waste gas outlet emptying.
Owing to there is waste gas to bleed off in working cycle, hydrogen can not reclaim fully, should be in hydrogen inlet place hydrogen make-up.
(3), carry out sampling analysis at the hydrogen outlet place; foreign matter content keeps weighing apparatus regularly in hydrogen; stop the cyclic module press, close hydrogen outlet, valve-off; open the discharging mode press; make the pressure in drying-gas stripping column increase to 1-1.3Mpa (gauge pressure), the discharging molding machine is shut down, close hydrogen inlet; product ammonia is discharged in product ammonia exit at the bottom of tower
The present invention is the high-purity H that selects greater than 8N
2Air dry, gas extract ammonia make that foreign matter content is reduced to the ppb level in the ammonia.Utilize palladium membrane separation technique that hydrogen purity is reached more than the 8N, hydrogen can reach 9N by the palladium membrane sepn, and promptly total impurities is 10
-9(1ppb), directly feed liquefied ammonia, drying-gas is carried H wherein
2O and O
2, CH
4Wait all impurity.Because the total impurities in the liquefied ammonia is the hundred times of the total impurities in the high-purity hydrogen, so very big impellent is arranged, has very high rate of mass transfer.
Select-50 ℃--carrying out drying under 70 ℃ the cold condition---gas is carried.Because temperature is low more, the saturated vapor pressure of ammonia is low more.So can reduce the loss of ammonia.
For protection palladium film, in preheater, fill palladium catalyst, make oxygen and hydrogen reaction generate water, avoid burning out the palladium film in palladium film surface reaction heat release.Before feeding intake, all equipment, pipeline, valve and packaging vessel etc. with the high-purity hydrogen displacement, are analyzed the purity that gas stripping column exports hydrogen, when reaching 8N, throw raw material again.Can guarantee that like this product is not contaminated.
The invention has the beneficial effects as follows, can make the purity of liquefied ammonia and foreign matter content thereof reach the index that the GaN growth technique requires.Reclaim hydrogen, ammonia in the gas stripping column waste gas, can reduce cost scale operation.Fill the palladium catalyst deoxygenation in the preheater and can avoid palladium tube impaired, guarantee that hydrogen quality is steady, the efficient height, cost reduces.
Description of drawings
The invention will be further described below in conjunction with drawings and Examples.
Fig. 1 is the purifying schematic flow sheet of hydrogen cryodrying of the present invention-gas extract ammonia.
Fig. 2 is hydrogen desiccation of the present invention-gas stripping column structural representation.
Among the figure, 1. drying-gas stripping column, 2. discharging molding machine, 3. palladium membrane separation apparatus, 4. preheater, 5. surge tank, 6. heat exchanger 7. has cool exchanger, 8. circulation molding machine, 9. ammonia withdrawing can, 10. raw material ammonia test tank, 11. raw material ammonia inlet, 12. the ammonolysis product outlet, 13. high-purity hydrogens inlet, 14. hydrogen outlets, 15. waste gas outlets, 16. reclaim the ammonia outlet, 17. hydrogen inlets, 18. shortcut valves, 19. the refrigerant inlet, 20. refrigerant exits, 21. cats head, 22. the foam removal silk screen, 23. supporting plates, 24. spiral coil cooling tubes, 25. the multilayer sieve plate, 26. central intake pipes, 27. tower bodies, 28. shower nozzle, at the bottom of 29. towers, 30. retaining plates, 31. spacing tube, 32. ring flanges, 33. pipe core ring flanges.
Embodiment
Embodiment
The selected each add-on of test tank is the liquefied ammonia of 50 kilograms of purity＞5N, and it is 5m that hydrogen recycle molding machine 8 is selected flow
3The single-stage diaphragm type compressor of/h,, pressure is 0-1.5Mpa (table), and be furnished with corresponding surge tank 5, according to these two parameters, selecting empty tower gas velocity is the 0.05-0.1 meter per second, the design tower diameter is 220mm, and wall thickness is 8mm, and drying-gas tower 1 height is 3200mm, volume is about 100 liters, in ten sieve plates 25 of suspending are arranged, a square is 250mm, in the cat head 21, be provided with foam removal silk screen 22 above the supporting plate 23, high 150mm.For reducing air resistance sieve plate 25 thickness is 2mm, and diameter is 190mm, and hole diameter is 3mm, and concentric(al) circles distributes, and percentage of open area is 14% and 10% two kind, promptly 1,3,5,7, and 9 five whole perforates of plate, 2,4,6,8,10 5 plate not perforates in φ 100.This makes gas baffling, and tower internal screw formula spiral coil cooling tube twines with the pipe of φ 12 * 2, and external diameter is about 215mm.Heat-transfer surface is about 2.5m
2Shower nozzle is that spherical diameter is Φ 80mm, and hole diameter is 2mm.Discharging molding machine 2 is selected 2m
3/ h, pressure are the diaphragm type compressor of 0-1.5Mpa (table).
Palladium membrane separation apparatus 3 is selected 5m for use
3/ h flow, inlet pressure are 1.5Mpa (table), and top hole pressure is 0.18Mpa (table), and are furnished with corresponding preheater 4.Mix cool exchanger 7 again, utility appliance such as heat exchanger 4 and ammonia withdrawing can 9 and corresponding temperature, pressure survey display instrument.Promptly form existing procedure.On the hydrogen gas lines of membrane separation apparatus outlet dew point hygrometer is housed, detects water-content in the hydrogen, hydrogen outlet 14 has thief hatch can detect dew point, detects wherein foreign matter content with chromatography.
Operation steps is roughly as follows:
One, before not feeding intake, use earlier the high-purity hydrogen exchange system: with pressure be the industrial hydrogen of 1.5Mpa (gauge pressure) by hydrogen inlet 17 through surge tank 5, heat exchanger 6 enters into preheater 4, be warmed up to 340 ℃, enter palladium membrane separation apparatus 3, its outlet hydrogen pressure is reduced to 0.15Mpa (gauge pressure), through over-heat-exchanger 6, be cooled to 150 ℃, central intake pipe 26 in cool exchanger 7 enters empty drying-gas stripping column 1, by shower nozzle 28 ejections, distribute again through multilayer sieve plate 25 again, make gas-liquid fully contact the back and discharge from the hydrogen outlet 14 of cat head 21, enter cyclic module press 8, be pressurized to 1.5Mpa (gauge pressure), enter surge tank 5 again, send in the system, circulate, hydrogen recycle is used; Detect dew point at hydrogen outlet 14 places, when its during near the high-purity hydrogen dew point (100 ℃) of palladium membrane separation apparatus 3 outlets, stop hydrogen exchange.
In replacement process, waste gas in the palladium membrane separation apparatus 3 is by 1.5Mpa (gauge pressure) 0.12Mpa (gauge pressure) that reduces pressure, in ammonia withdrawing can 9, be cooled to below-33 ℃, through waste gas outlet 15 emptying, hydrogen can not reclaim fully, should be in hydrogen inlet 17 place's hydrogen make-up, if when hydrogen temperature is higher than room temperature, can appropriateness open ice maker, open refrigerant inlet 19, refrigerant exit 20 is reduced to till the room temperature it;
Two, open ice maker, make refrigerant enter gas stripping column spiral coil cooling tube cooling when reaching-20 ℃ by inlet 19, the raw materials ammonia of 5N is once entered 50Kg in the gas stripping column by test tank 10, continue cooling, when temperature reaches-50 ℃, hydrogen reaches 1.5Mpa (gauge pressure) by 12Mpa through pressure reducer, surge tank 5 is advanced at 17 places by hydrogen inlet, again through the laggard preheater 4 of heat exchanger 6 recovery part heats, make temperature rise to 340 ℃, enter palladium membrane separation apparatus 3, pressure drops to 0.15Mpa (gauge pressure), high-purity hydrogen after the purification enters into heat exchanger 6, make temperature be reduced to 150 ℃, then through cool exchanger 7, cooled off by the cryogenic gas of gas stripping column hydrogen outlet 14, temperature is reduced to 40 ℃, enter gas stripping column 1 gas extract ammonia again, the water in the desorb liquefied ammonia, oxygen, various impurity such as methane are when gas is carried impurity, ammonia is also taken out of, so also have the ammonia of 5%--10% the various impurity in the hydrogen of the hydrogen outlet 14 of gas stripping column 1 in liquefied ammonia is arranged, this low-pressure gas is after cool exchanger 7 reclaims cold, and molding machine 8 advances to circulate, be pressurized to 1.5MPa (gauge pressure) and reenter surge tank 5, recycle.Waste gas in the palladium membrane separation apparatus 3 is cooled in ammonia withdrawing can 9 below-33 ℃ by 1.5Mpa (gauge pressure) 0.12Mpa (gauge pressure) that reduces pressure, and reclaims ammonia after waste gas outlet 15 emptying.Because waste gas emptying is arranged in working cycle, hydrogen can not reclaim fully, should be in hydrogen inlet 17 place's hydrogen make-up.
Three, record round-robin time and hydrogen usage are utilized the foreign matter content of chromatography in hydrogen outlet 14 places detection hydrogen, when foreign matter content is tending towards constant, can stop circulation.The molding machine 8 that stops to circulate, hydrogen inlet 17 places continue hydrogen make-up, open shortcut valve 18, open discharging molding machine 2 and make the pressure in the gas stripping column 1 increase to 1.2Mpa (gauge pressure), export 12 place's blowings at product ammonia, packing.
Because the chromatography detection sensitivity can only detect 100ppb, after testing, the liquefied ammonia foreign matter content is dropped to below the 100ppb.
Claims (9)
1, the purification devices of a kind of hydrogen cryodrying-gas extract ammonia, it is characterized in that, comprise that hydrogen inlet (17) reaches and its surge tank that is connected successively (5), preheater (4), palladium membrane separation apparatus (3), cool exchanger (7), hydrogen outlet (14) and drying-gas stripping column (1), surge tank (5), preheater (4), palladium membrane separation apparatus (3) is connected with heat exchanger (6) with cool exchanger (7), be provided with circulation molding machine (8) between surge tank (5) and the cool exchanger (7), drying-gas stripping column (1) is by cat head (21), central intake pipe (26), tower body (27) He Tadi (29) forms, and cat head (21) is provided with raw material ammonia inlet (11), high-purity hydrogen inlet (13); Tower body (27) is provided with refrigerant inlet (19), refrigerant exit (20), and the spiral coil cooling tube (24) that is provided with in the tower body (27) is connected with the retaining plate (30) of setting in it; The upper end of central intake pipe (26) is provided with high-purity hydrogen inlet (13), and it places the part in the tower body (27) to be provided with multilayer sieve plate (25), and the lower end is connected with shower nozzle (28); Be provided with supporting plate (23) between tower body (27) and the cat head (21), (29) are provided with product ammonia outlet (12) at the bottom of the tower.
2, the purification devices of a kind of hydrogen cryodrying according to claim 1-gas extract ammonia is characterized in that, is connected by spacing tube (31) between every layer on the described sieve plate (25).
3, the purification devices of a kind of hydrogen cryodrying according to claim 1-gas extract ammonia is characterized in that, in the cat head (21) of described drying-gas stripping column (1), is provided with foam removal silk screen (22) above the supporting plate (23).
4, the purification devices of a kind of hydrogen cryodrying according to claim 1-gas extract ammonia is characterized in that, the waste gas outlet (15) of described palladium membrane separation apparatus (3) locates to be provided with ammonia withdrawing can (9).
5, the purification devices of a kind of hydrogen cryodrying according to claim 1-gas extract ammonia is characterized in that, is connected by ring flange (32) between described tower body (27) and the cat head (21).
6, the purification devices of a kind of hydrogen cryodrying according to claim 1-gas extract ammonia is characterized in that, fixedlys connected with pipe core ring flange (33) in the upper end of described central intake pipe (26).
7, the purification devices of a kind of hydrogen cryodrying according to claim 1-gas extract ammonia is characterized in that, is connected with discharging molding machine (2) between described cool exchanger (7) and the heat exchanger (6).
8, exercise of power requires the method for the purification devices of 1 described a kind of hydrogen cryodrying-gas extract ammonia, it is characterized in that processing step is:
(1) before not feeding intake, earlier use the high-purity hydrogen exchange system: with pressure be the industrial hydrogen of 1.2-1.5Mpa (gauge pressure) by hydrogen inlet (17) through surge tank (5), heat exchanger (6) enters into preheater (4), be warmed up to 300-350 ℃, enter palladium membrane separation apparatus (3), its outlet hydrogen pressure is reduced to 0.13Mpa-0.15Mpa (gauge pressure), through over-heat-exchanger (6), be cooled to 100 ℃-150 ℃, central intake pipe (26) in cool exchanger (7) enters empty drying-gas stripping column (1), by shower nozzle (28) ejection, distribute again through multilayer sieve plate (25) again, make gas-liquid fully contact the back and discharge from the hydrogen outlet (14) of cat head (21), enter cyclic module press (8), be pressurized to 1.3-1.5Mpa (gauge pressure), enter surge tank (5) again, send in the system, circulate, hydrogen recycle is used; Locate to detect dew point at hydrogen outlet (14), when its during near the high-purity hydrogen dew point of palladium membrane separation apparatus (3) outlet, stop hydrogen exchange, in replacement process, the waste gas in the palladium membrane separation apparatus (3) is by 1.5Mpa (gauge pressure) 0.12Mpa (table) that reduces pressure, through ammonia withdrawing can (9), by waste gas outlet (15) emptying, because waste gas emptying is arranged in working cycle, hydrogen can not reclaim fully, should locate constantly to replenish plant hydrogen in hydrogen inlet (17).
When if hydrogen temperature is higher than room temperature, can appropriateness open ice maker, open refrigerant inlet (19), refrigerant exit (20) is reduced to till the room temperature it;
(2), ice maker refrigeration, open ice maker, make the temperature in drying-gas stripping column (1) be reduced to-10 ℃ by refrigerant inlet (19), refrigerant exit (20)--25 ℃, with purity greater than 5N liquefied ammonia by in the disposable adding drying-gas stripping column of test tank (10) (1), continue to cool to-50 ℃--70 ℃; The industrial hydrogen that with pressure is 1.3-1.5Mpa (gauge pressure) enters surge tank (5) by hydrogen inlet (17), after heat exchanger (6) reclaims heat, temperature reaches 200 ℃-250 ℃, enter preheater (4) again, make temperature reach 300-350 ℃, after removing oxygen under the effect of the reductor of in preheater (4), filling, enter palladium membrane separation apparatus (3), its exit hydrogen purity reaches 8N-9N, pressure is reduced to 0.13-0.15Mpa, enters heat exchanger (6), is cooled to 100 ℃-150 ℃, be cooled to 20 ℃-50 ℃ central intake pipes (26) that enter afterwards in drying-gas stripping column (1) through cool exchanger (7), by shower nozzle (28) ejection, distribute again through multilayer sieve plate (25) again, gas-liquid is fully contacted after, discharge from the hydrogen outlet (14) of cat head (21), after cool exchanger (7) reclaims cold, enter cyclic module press (8), be pressurized to 1.3-1.5Mpa (gauge pressure) and send in the system again, repeat said process, hydrogen recycle is used; In working cycle, waste gas in the palladium membrane separation apparatus (3) 0.12Mpa-0.15Mpa (gauge pressure) that reduces pressure, enter ammonia withdrawing can (9), in ammonia withdrawing can (9), freeze by ice maker, through refrigerant inlet (19), refrigerant exit (20), be as cold as below-33 ℃, reclaim ammonia after waste gas outlet (15) emptying.
Owing to need bleed off waste gas in working cycle, hydrogen can not reclaim fully, should locate hydrogen make-up in hydrogen inlet (17).
(3), locate to carry out sampling analysis at hydrogen outlet (14); foreign matter content keeps weighing apparatus regularly in hydrogen; stop cyclic module press (8), close hydrogen outlet (14), valve-off (18); open discharging mode press (2); make the pressure in drying-gas stripping column (1) increase to 1-1.3Mpa (table), molding machine (2) is shut down, close hydrogen inlet (17); the product ammonia of (29) outlet (12) locates to discharge product ammonia at the bottom of tower
9, exercise of power according to claim 7 requires the method for the purification devices of 1 described a kind of hydrogen cryodrying-gas extract ammonia, it is characterized in that described reductor is a palladium catalyst.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200410020433 CN1562749A (en) | 2004-04-18 | 2004-04-18 | Purification device for dry air stripping liquid ammonia through hydrogen under low temperatre and method |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200410020433 CN1562749A (en) | 2004-04-18 | 2004-04-18 | Purification device for dry air stripping liquid ammonia through hydrogen under low temperatre and method |
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| Publication Number | Publication Date |
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| CN1562749A true CN1562749A (en) | 2005-01-12 |
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ID=34479693
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|---|---|---|---|
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104117273A (en) * | 2013-04-26 | 2014-10-29 | 日本派欧尼株式会社 | Method of processing discharge gas discharged from production process of gallium nitride compound semiconductor |
-
2004
- 2004-04-18 CN CN 200410020433 patent/CN1562749A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104117273A (en) * | 2013-04-26 | 2014-10-29 | 日本派欧尼株式会社 | Method of processing discharge gas discharged from production process of gallium nitride compound semiconductor |
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