CN1553160A

CN1553160A - Piezoelectric quartzplate-type torque sensor and producing process thereof

Info

Publication number: CN1553160A
Application number: CNA031335217A
Authority: CN
Inventors: 孙宝元; 高长银; 钱敏
Original assignee: Dalian University of Technology
Current assignee: Dalian University of Technology
Priority date: 2003-05-28
Filing date: 2003-05-28
Publication date: 2004-12-08
Anticipated expiration: 2023-05-28
Also published as: CN1265181C

Abstract

A transducer is composed of top cover, bottom shell, torque measurement chip set, insulation positioning ring, terminal, electrode and leading wire as torque measurement chip set is sticked on central boss of internal cavity in top cover and bottom shell. The preparing method applies electrode dividing method to place electrode, that is to divide an electrode to be two half-round shape, two pieces of electrode and three pieces of piezoelectric quartz chip having 'torsuion effect' round YO degree dividing shape are used to form torque measurement chip set which is only sensitive to torque and has no any relation with axial force and radial force.

Description

A kind of piezoelectric quartz chip torque sensor and process for making

Technical field the invention belongs to sensing and measures the control field, is applicable to little torque measurement.

Tradition utilizes the shearing effect of quartz wafer to carry out torque measurement on the background technology engineering.Its method is the YO that can realize shearing effect to (a pair of is two, and general wafer logarithm is 6～12) with many ⁰It is on the distribution circle of radius that the quartz wafer of cut type is evenly distributed on R, requires every couple of YO ⁰The peak response direction of wafer is strict tangent with distribution circle, and electrode is drawn between the wafer, to realize the torque measuring method of " power * arm of force ".This kind torque measuring method mainly is applicable to the high pulling torque measurement.Evenly stressed in order to guarantee each wafer, require to have between the wafer set strict contour, wafer and housing surface in contact will have the flatness and the roughness of higher level, make the sensor construction complexity, technological requirement height, cost height.

Publication number is that the patent of CN1401978A has proposed the pillar torque sensor, and as the torque measurement element, employing is sticked detecting electrode on cylinder survey surface and measured moment of torsion, sees accompanying drawing 1 with feldspar Britain side post.But because little, the hard and crisp characteristics of quartzy shear resistance are fixed on the flat column quartz in the crystal holder, all there is certain technical difficulty in the location with installation, has limited this sensor practical application.

Summary of the invention the objective of the invention is to invent a kind of piezoelectric quartz chip torque sensor and process for making, overcome traditional torque sensor and the above-mentioned shortcoming of rectangular pillar torque sensor and solve little torque measurement problem, this sensor construction is simple, work simplification, cost is low, easy and simple to handle, the measuring accuracy height.

The present invention's a kind of piezoelectric quartz chip torque sensor and process for making adopt technical scheme:

A kind of piezoelectric quartz chip torque sensor and process for making, its piezoelectric quartz chip torque sensor is made up of lower house 1, insulation locating ring 2, the brilliant group of torque measurement, loam cake 4, lead-in wire 6 and binding post 7.It is characterized in that the brilliant group of torque measurement is bonded in the inner chamber boss of loam cake 4 and lower house 1 in the heart, with electrode B, the direct ground connection of D, and electrode A with after electrode C is in parallel, pass through lead 6 by outside binding post 7 lead bodies.Insulation locating ring 2 tightly is posted on the surface of internal cavity of lower house 1, and loam cake 4 is fixed together by screw 3 and lower house 1.

The feature of its process for making is to adopt to cut apart electrode method layout electrode, a cube electrode is divided into two semi-circular shapes, with two cube electrodes and three circular YO with " torsional effect " ⁰Cut type piezoelectric quartz wafer 5 is formed the brilliant group of torque measurement, when torsional interaction, owing on each quartz wafer surface, produce non-linear polarization charge, the polarization charge that produces is the separatrix with the electric axis of quartz, at two induction electric weight equal and opposite in directions that semi-circle plane produced, opposite in sign, so each wafer needs two plate electrodes to measure the distinct symbols electric charge that is produced, the brilliant group of this torque measurement adopts four semicircle electrode A, B, C, D; Electrode B is connected back ground connection with D, direct output line after electrode A and the C parallel connection as sensor; Manufacture craft is that the superiors' wafer lower surface and electrode A, B upper surface are glued together securely in proper order; The upper surface of middle wafer and electrode A, B lower surface are bonded together, and the upper surface of lower surface and electrode B, D is glued together; The lower surface of lower chip upper surface and electrode B, D is glued together, thereby constitutes the brilliant group of torque measurement; And pretightning force is applied on the torque sensor, just can measure.

Effect of the present invention is owing to adopt three YO with " torsional effect " ⁰Cut type piezoelectric quartz wafer is as the brilliant group of torque measurement, and the brilliant group of this torque measurement is only to Torque sensor, and irrelevant with the radial force and the axial force of any direction.So this sensor has simple in structure, number of wafers is few, and technological requirement is low, and it is easy, convenient to measure, the measuring accuracy advantages of higher, and can eliminate to an interference, be suitable for little torque measurement.

Appended drawings 1 is the crystal column structure and the electrode arrangement of square column formula sensor, wherein:

I, II, III, IV-electrode slice, the quartzy crystal column of V-, X, Y, the Z-system of axis.

Accompanying drawing 2 is sensor construction master cut-open views, wherein: 1-lower house, 2-insulation locating ring lead, 3-pretension screw, 4-loam cake, 5-piezoelectric quartz wafer, 6-lead, 7-binding post.A, B, C, D-electrode slice

Accompanying drawing 3 is piezoelectric quartz wafer torque measurement brilliant group electrode and wafer arrangement figure, wherein: 5-piezoelectric quartz wafer, 6-lead, A, B, C, D-electrode slice.

Accompanying drawing 4 is electrode shape figure in the brilliant group of torque measurement, wherein: A, B-electrode slice

Embodiment describes enforcement of the present invention in detail below in conjunction with accompanying drawing, and at first assembling torque is measured brilliant group.Concrete grammar is to adopt three circular YO with " torsional effect " ⁰Cut type piezoelectric quartz wafer is as the brilliant group of torque measurement, and the superiors' wafer lower surface and electrode A, B upper surface are glued together securely; The upper surface of middle wafer and electrode A, B lower surface are bonded together, and the upper surface of lower surface and electrode C, D is glued together; The lower surface of lower chip upper surface and electrode C, D is glued together, makes whole brilliant group constitute one.Then the brilliant group card of torque measurement is connected in the inner chamber boss of loam cake 4 and lower house 1 in the heart, by screw 3 fixed cover 4 and lower house 1 and just pretightning force be applied on the brilliant group of moment of torsion, set up into torque sensor.The brilliant group of this torque measurement is only to Torque sensor, and this is because do the time spent as radial force, the electric charge equal and opposite in direction opposite in sign that on electrode A and C, is produced, and back in parallel sensor is output as zero.It is by YO that axial force is eliminated ⁰Cut type assurance itself, because according to piezoelectric theory, YO ⁰Wafer does not produce polarization charge in wafer surface when being subjected to axial force.

When torque measurement, at first sensor is fixed on the worktable by the threaded hole on the lower house 1, workpiece is connected as a single entity by threaded hole on the loam cake 4 and sensor.When torsional interaction was on workpiece, moment of torsion was delivered to the brilliant group of moment of torsion by the loam cake 4 of sensor by friction force.On wafer surface, produce bound charge, produce charged surface and torsional interaction surface co-planar.Bound charge is drawn by electrode A, B, C, D, supposes at electrode A, C to produce negative charge, then produces positive charge at B, D, sees accompanying drawing 2.With electrode B, the direct ground connection of D, and electrode A with after electrode C is in parallel, draw by binding post 7 through lead 6, through charge amplifier the quantity of electric charge is converted to voltage again, directly read by digital voltmeter, become linear dependence with voltage, just can calculate torque according to moment of torsion.

Claims

1, a kind of piezoelectric quartz chip torque sensor and process for making, its piezoelectric quartz chip torque sensor is made up of lower house [1], insulation locating ring [2], the brilliant group of torque measurement, loam cake [4], lead-in wire [6] and binding post [7].It is characterized in that the brilliant group of torque measurement is bonded in the inner chamber boss of loam cake [4] and lower house [1] in the heart, with electrode B, the direct ground connection of D, and electrode A with after electrode C is in parallel, pass through lead [6] by outside binding post [7] lead body.Insulation locating ring [2] tightly is posted on the surface of internal cavity of lower house [1], and loam cake [4] is fixed together by screw [3] and lower house [1].

2. a kind of piezoelectric quartz chip torque sensor as claimed in claim 1 and process for making, the feature of its process for making is to adopt to cut apart electrode method layout electrode, one cube electrode is divided into two semi-circular shapes, with two cube electrodes and three circular YO with " torsional effect " ⁰Cut type piezoelectric quartz wafer [5] is formed the brilliant group of torque measurement, when torsional interaction, owing on each quartz wafer surface, produce non-linear polarization charge, the polarization charge that produces is the separatrix with the electric axis of quartz, at two induction electric weight equal and opposite in directions that semi-circle plane produced, opposite in sign, so each wafer needs two plate electrodes to measure the distinct symbols electric charge that is produced, the brilliant group of this torque measurement adopts four semicircle electrode A, B, C, D; Electrode B is connected back ground connection with D, direct output line after electrode A and the C parallel connection as sensor; Manufacture craft is that the superiors' wafer lower surface and electrode A, B upper surface are glued together securely in proper order; The upper surface of middle wafer and electrode A, B lower surface are bonded together, and the upper surface of lower surface and electrode B, D is glued together; The lower surface of lower chip upper surface and electrode B, D is glued together, thereby constitutes the brilliant group of torque measurement; Pretightning force is applied on the torque sensor, just can have measured.