CN1548361A - Pre-connection method and device for plastic micro-flow control chip before linkage - Google Patents
Pre-connection method and device for plastic micro-flow control chip before linkage Download PDFInfo
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- CN1548361A CN1548361A CNA031116698A CN03111669A CN1548361A CN 1548361 A CN1548361 A CN 1548361A CN A031116698 A CNA031116698 A CN A031116698A CN 03111669 A CN03111669 A CN 03111669A CN 1548361 A CN1548361 A CN 1548361A
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- heating wire
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- cover plate
- spring
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Abstract
The present invention belongs to the field of plastic microflow control chip making technology. The pre-connection method before linkage includes regulating spring baffling sheet fixing screw before installation to compress the spring in the compression amount greater than the elongation amount of the electrothermal wire during heating; aligning the base sheet and covering sheet of the plastic microflow control chip and local heating to realize their pre-connection. The pre-connection apparatus consists of aligning bench, sucker disc, motor, control circuit, etc. and has also two symmetrical electrothermal wire heating devices on two sides of the base sheet and the covering sheet. The present invention can simplify the preparation of plastic microflow control chip and favorable to its automation.
Description
Technical field
Pre-coupling method and device before the plastic microfluidic chip bonding of the present invention belong to the plastic microfluidic chip manufacture technology field, are used for the making of plastic microfluidic chip, particularly at plastic substrate with after cover plate is aimed at, pre-coupling method and device that bonding is preceding.
Background technology
The making of plastic microfluidic chip comprises microchannel shaping, aligning and bonding.The shaping of microchannel is meant that it is tens microns raceway grooves of taking advantage of tens microns that methods such as adopting hot pressing is produced sectional area on substrate or cover plate surface.Aligning is meant and utilizing equipment such as light microscope and micromotion platform with the markers align on substrate and the cover plate on the alignment tool, with guarantee on substrate and the cover plate between little raceway groove or the relative position between little raceway groove and the hole accurate.Substrate is with after cover plate is aimed at, usually the method that adopts is to utilize the jig of particular design that substrate and cover plate are fixedly clamped, to keep the relative position between them constant, then chip is moved to the bonding machine together with jig or the enterprising line unit of bonding platform closes, it is fixing also to need mechanism on bonding platform or the bonding machine that chip is held out against as bonding is last, so that unclamp and withdraw from jig.Finish because the intermediate link of the common method that adopts behind aligning and before the bonding needs the anchor clamps of particular design to assist, therefore cause complex process, be not easy to realize automation simultaneously, make the mass production inefficiency of plastic chip.
Finish with manual because production of plastic microfluidic chip at present and making are many, the research of therefore relevant simplification process aspect is not found pertinent literature in the retrieval of Chinese patent and foreign language document.People such as R.Islam mention in the paper that international conference (IEEE SENSORS 2002 International Conference) is delivered and are used for that silicon chip is aimed at the silicon template with silicon template or quartz plate and the method for hot forming, though it is this method is used for hot forming, identical with usual method recited above.Silicon chip is accurately aimed on EVG620 with the silicon template with silicon template or quartz plate, aims at the back and uses the instrument (The bonding tool) that is equivalent to jig that silicon chip etc. is fixing, delivers to then and carries out hot forming on the EVG520.The deficiency of this method is owing to need to reuse jig, causes the operation process complexity, and while silicon chip etc. can not get bonding at clip position, and this has reduced bonding quality for plastic chip, make chip can not get the position cracking of bonding easily.People such as T.Suga have delivered in the paper of international academic conference (ElectronicComponents and Technology Coference, 2001) and have been used for adopting at normal temperatures between the wafer SAB (surface activated bonding) to carry out the method and the device of bonding.This device has been realized automation, and wafer is being aimed at and is being aligned and pre-bonding (Prebonding) in the bonding cabin in advance.Wafer behind the pre-bonding is applied in bigger pressure and carries out bonding in the bonding cabin.The shortcoming of this method is that SAB need carry out in the environment of ultra high vacuum degree, the complexity of surface treatment simultaneously, and this in addition method is not suitable for the bonding of plastic chip.
Up to now, the method that is used for bondings such as silicon chip can not be applied to plastic microfluidic chip, and the at present existing coupling method that is used for the plastic chip substrate is aimed at back, bonding with cover plate before, owing to need to use special fixture, make and complex technical process be not easy to realize automation.
Summary of the invention
The purpose of this invention is to provide a kind of plastic microfluidic chip make in substrate with after cover plate is aimed at, the pre-coupling method that bonding is preceding provides a kind of device of realizing this method, thus the simplification manufacture craft is convenient to realize automation, enhances productivity.
The technical solution used in the present invention is pre-coupling method and the device before a kind of plastic microfluidic chip bonding, its method be microchannel on plastic chip substrate and the cover plate and hole etc. through be shaped and processing after, substrate 1 with plastic microfluidic chip is placed on the alignment tool 20 earlier, sucker 3 absorption cover plates 2, and make it to aim at substrate 1, the feature of this method is:
1). adjust spring stop piece hold-down screw 7 during installation earlier, spring 5 is compressed, this decrement is greater than the elongation in the heating wire heating process;
2). with after cover plate is aimed at, keep their relative position constant at substrate, the method that adopts localized heat to connect links up substrate 1 and cover plate 2, realizes connecting in advance; Concrete step is: after control signal generating means 24 sends control signal, by the control circuit 23 that the time relay and relay etc. is formed heating wire 15 and constant-current supply 22 are connected, heating wire 15 is heated; Simultaneously start-up time relay, and drive motors 12 rotates, to rotatablely move by leading screw and nut mechanism 25 and to convert the rectilinear motion of heater mounting panel 14 to along cylindrical guide 13, make heating wire near and contact plastic chip, contact back heating wire is with substrate 1 and cover plate 2 edge regional area fusions, and 3-5 is after second in contact, motor 12 backward rotation, drive 14 motions of heater mounting panel, make heating wire leave plastic chip; At this moment, the timing end signal of the time relay disconnects constant-current supply, after the puddle cooling, substrate 1 and cover plate 2 is linked together, and finishes pre-connection operation;
3). size of current and time that the temperature of heating wire is crossed heating wire by control flows are adjusted; The elongation that heating wire 15 produces owing to temperature raises makes heating wire be in tensioned state all the time by the effect of spring 5 restoring forces.Chip after pre-the connection is directly delivered to the bonding machine and is carried out bonding;
Pre-coupling method and device before a kind of plastic microfluidic chip bonding, it installs by alignment tool 20, sucker 3, motor mounting plate 11, motor 12, control circuit 23 compositions such as grade, it is characterized in that having the heating wire heater of two symmetries, they are arranged at cover plate 1 and substrate 2 bilateral symmetry; The heating wire heater is by upper and lower coupling block 4,16, upper and lower binding post 19, and heating wire 15, spring compression mechanism, insulating mounting plate 10, mobile connector 8 is formed; Insulating mounting plate 10 is a symmetrical structure up and down, and last coupling block 4 and lower link piece 16 are installed in its upper and lower side by coupling block hold-down screw 9; Mobile connector 8 tops are the face of cylinder, and the part of passing coupling block 4 holes is equipped with spring compression mechanism; Mobile connector 8 bottoms are square, there is aperture the centre, one end of heating wire 15 passes this aperture, and by upper connecting terminal 19, be fixed on the mobile connector 8 by the binding post hold-down screw, the other end of heating wire is fixed together with lower link piece 16 by another binding post screw 17 and nut 18 by lower connecting terminal 19; Two binding post 19 external constant-current supplies;
Heater mounting panel 14 is installed in the side of insulating mounting plate 10, and cylindrical guide 13 is housed on it, motor 12 and motor mounting plate 11 and screw mandrel, nut body 25.
Spring compression mechanism characteristics in its device is by spring 5, spring stop piece 6, and spring stop piece hold-down screw 7 is formed.
Effect of the present invention is the method that the pre-coupling method before the plastic microfluidic chip bonding can replace the use special fixture of common employing, has simplified the manufacture craft of plastic microfluidic chip, is convenient to realize the automation of chip production.
Description of drawings
Fig. 1 is pre-connecting device structure figure.Wherein: the substrate of 1-plastic microfluidic chip, 2-cover plate; The 3-sucker; The last coupling block of 4-; The 5-spring; The 6-spring stop piece; 7-spring stop piece hold-down screw; 8-moves connector; 9-coupling block hold-down screw; 10-insulating mounting plate; The 11-motor mounting plate; The 12-motor; The 13-cylindrical guide; 14-heater mounting panel; The 15-heating wire; 16-lower link piece; 17-binding post hold-down screw; The 18-nut; The upper and lower binding post of 19-; The 20-alignment tool; 25-screw mandrel, nut body.
Fig. 2 is a heating wire and the figure that connects of constant-current supply.Wherein: 21-is a lead; The 22-constant-current supply.J
2The normally opened contact of-relay J;
Fig. 3 is control circuit figure.Wherein: the 23-control circuit.In the control circuit: the J-relay; J
1The normally opened contact of-relay J; The T-time relay; T
1The normally-closed contact of-the time relay; The contact signal that K-external control signal generating means provides; The V-power supply.
Fig. 4 is the control system block diagram of pre-coupling arrangement, wherein: the 15-heating wire; The 22-constant-current supply; The 23-control circuit; 24-control signal generating means; The 12-motor.
Embodiment
Specify execution mode below in conjunction with accompanying drawing.
Can use a kind of plastics polymethyl methacrylate (PMMA) to make micro-fluidic chip, after shaping and processing, substrate 1 is placed on the alignment tool 20 in microchannel on plastic chip substrate and the cover plate and hole etc., and sucker absorption cover plate 2 also makes it to aim at substrate 1.Aiming at preceding substrate of back bonding and cover plate need be fixed together, and promptly keeps its relative position constant.Adopt the pre-coupling method of localized heating, substrate and cover plate are linked together.Chip after pre-the connection can directly deliver to the bonding platform or the enterprising line unit of bonding machine closes.
Pre-coupling arrangement is made up of two heating wire heaters, is the bilateral symmetry structure.Two symmetric positions of substrate behind aligning and cover plate are carried out localized heating, as shown in Figure 1.In the heating wire heater, heating wire 15 is installed on upper and lower two binding posts 19 by screw 17 and nut 18, and binding post 19 heats heating wire through lead 21 external adjustable constant-flow power supplys 22, and the connection of constant-current supply 22 is as shown in accompanying drawing 2.Following binding post 19 is fixed together with lower link piece 16, and top binding post 19 is fixed together with mobile connector 8, and mobile connector 8 can move up and down along the hole in the last coupling block 4.Spring 5 acts on spring force on the heating wire by spring stop piece 6, spring stop piece hold-down screw 7 and mobile connector 8, makes heating wire be in tensioned state all the time, and compensation is because the elongation that heating wire raises and occurs owing to temperature.Insulating mounting plate 10 adopts insulating material to make, and is used for connecting upper and lower coupling block 4,16.By motor mounting plate 11, motor 12, cylindrical guide 13, heater mounting panel 14 is formed the mechanism that drives the heater motion.
Heating wire employing diameter is 0.35 millimeter a nickel chromium triangle lectrothermal alloy wire (alloy designations Cr20Ni80), and the constant-current supply output current is adjusted at 3.5 amperes.
Below in conjunction with accompanying drawing 2, accompanying drawing 3 and the pre-process of finishing that connects of accompanying drawing 4 explanations.24 is generating meanss of pre-coupling arrangement control signal among Fig. 4, after this device sends control signal, and the contact K closure in the accompanying drawing 3, relay J energising, J
1And J
2Closure is connected constant-current supply 22 and heating wire 15, and heating wire is heated, simultaneously start-up time relay T.The control signal that control circuit 23 is sent also drive motors 12 is rotated, and drives 14 motions of heater mounting panel, make heating wire near and contact plastic chip, contacted for 3 seconds after, the drive motors backward rotation also drives the heating wire heater and leaves plastic chip.This moment, the timing of the time relay finished the normally-closed contact T of time relay T
1Disconnect, make the relay J outage, heating wire and constant-current supply disconnect, and finish pre-connection operation.In the of short duration time that contacts, fusion taking place in the local tiny area of plastic chip at heating wire and plastic chip, after this melt region cooling, substrate and cover plate is linked up.Owing to realize that the pre-regional area that connects is very little, to the not influence of bonding of entire chip.
Claims (3)
1. pre-coupling method and the device before the plastic microfluidic chip bonding, its method be microchannel on plastic chip substrate and the cover plate and hole etc. through be shaped and processing after, substrate [1] with plastic microfluidic chip is placed on the alignment tool [20] earlier, sucker [3] absorption cover plate [2] also makes it to aim at substrate [1], and the feature of this method is:
1). adjust spring stop piece hold-down screw [7] during installation earlier, spring [5] is compressed, this decrement is greater than the elongation in the heating wire heating process;
2). with after cover plate is aimed at, keep their relative position constant at substrate, the method that adopts localized heat to connect links up substrate [1] and cover plate [2], realizes connecting in advance; Concrete step is: after control signal generating means [24] sends control signal, by the control circuit [23] that the time relay and relay etc. is formed heating wire [15] and constant-current supply [22] are connected, heating wire [15] is heated; Simultaneously start-up time relay, and drive motors [12] rotates, to rotatablely move by leading screw and nut mechanism [25] and to convert the rectilinear motion of heater mounting panel [14] to along cylindrical guide [13], make heating wire near and contact plastic chip, contact back heating wire is with substrate [1] and cover plate [2] edge regional area fusion, and 3-5 is after second in contact, motor [12] backward rotation, drive heater mounting panel [14] motion, make heating wire leave plastic chip; At this moment, the timing end signal of the time relay disconnects constant-current supply, after the puddle cooling, substrate [1] and cover plate [2] is linked together, and finishes pre-connection operation;
3). size of current and time that the temperature of heating wire is crossed heating wire by control flows are adjusted; The elongation that heating wire [15] produces owing to temperature raises makes heating wire be in tensioned state all the time by the effect of spring [5] restoring force.Chip after pre-the connection is directly delivered to the bonding machine and is carried out bonding.
2. described in claim 1 in pre-coupling method before a kind of plastic microfluidic chip bonding and the device, its device is by alignment tool [20], sucker [3], motor mounting plate [11], motor [12], control circuit compositions such as [23], the heating wire heater that it is characterized in that having two symmetries, they are arranged at cover plate [1] and substrate [2] bilateral symmetry; The heating wire heater is by upper and lower coupling block [4], [16], upper and lower binding post [19], and heating wire [15], spring compression mechanism, insulating mounting plate [10], mobile connector [8] is formed; Insulating mounting plate [10] is a symmetrical structure up and down, and last coupling block [4] and lower link piece [16] are installed in its upper and lower side by coupling block hold-down screw [9]; Mobile connector [8] top is the face of cylinder, and the part of passing coupling block [4] hole is equipped with spring compression mechanism; Mobile connector [8] bottom is square, there is aperture the centre, one end of heating wire [15] passes this aperture, and by upper connecting terminal [19], be fixed on the mobile connector [8] by the binding post hold-down screw, the other end of heating wire is fixed together with lower link piece [16] by another binding post screw [17] and nut [18] by lower connecting terminal [19]; The external constant-current supply of two binding posts [19];
Heater mounting panel [14] is installed in the side of insulating mounting plate [10], and cylindrical guide [13] is housed on it, motor [12] and motor mounting plate [11] and screw mandrel, nut body [25].
3. pre-coupling method and the device before a kind of plastic microfluidic chip bonding described in claim 1 or 2, the spring compression mechanism characteristics in its device is by spring [5], spring stop piece [6], spring stop piece hold-down screw [7] is formed.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB031116698A CN100398431C (en) | 2003-05-13 | 2003-05-13 | Pre-connection method and device for plastic micro-flow control chip before linkage |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB031116698A CN100398431C (en) | 2003-05-13 | 2003-05-13 | Pre-connection method and device for plastic micro-flow control chip before linkage |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1548361A true CN1548361A (en) | 2004-11-24 |
| CN100398431C CN100398431C (en) | 2008-07-02 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB031116698A Expired - Fee Related CN100398431C (en) | 2003-05-13 | 2003-05-13 | Pre-connection method and device for plastic micro-flow control chip before linkage |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101607688B (en) * | 2009-06-19 | 2011-04-27 | 大连理工大学 | Non-energy-oriented ridge polymer ultrasonic bonding method based on temperature compensation |
| CN105810611A (en) * | 2008-09-09 | 2016-07-27 | K&S芯片键合设备有限公司 | Rotatable, heatable placement tool and chip mounting system comprising such a placement tool |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6552264B2 (en) * | 1998-03-11 | 2003-04-22 | International Business Machines Corporation | High performance chip packaging and method |
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2003
- 2003-05-13 CN CNB031116698A patent/CN100398431C/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105810611A (en) * | 2008-09-09 | 2016-07-27 | K&S芯片键合设备有限公司 | Rotatable, heatable placement tool and chip mounting system comprising such a placement tool |
| CN101607688B (en) * | 2009-06-19 | 2011-04-27 | 大连理工大学 | Non-energy-oriented ridge polymer ultrasonic bonding method based on temperature compensation |
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| Publication number | Publication date |
|---|---|
| CN100398431C (en) | 2008-07-02 |
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