CN1546956A - Minitype integrated variable refractive index Fa-Pa cavity spectrographic detector - Google Patents
Minitype integrated variable refractive index Fa-Pa cavity spectrographic detector Download PDFInfo
- Publication number
- CN1546956A CN1546956A CNA2003101111855A CN200310111185A CN1546956A CN 1546956 A CN1546956 A CN 1546956A CN A2003101111855 A CNA2003101111855 A CN A2003101111855A CN 200310111185 A CN200310111185 A CN 200310111185A CN 1546956 A CN1546956 A CN 1546956A
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- cavity
- fabry
- variable refractivity
- refractive index
- perot cavity
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- 230000003287 optical effect Effects 0.000 claims abstract description 8
- 239000011248 coating agent Substances 0.000 claims description 12
- 238000000576 coating method Methods 0.000 claims description 12
- 230000003595 spectral effect Effects 0.000 claims description 7
- 238000000034 method Methods 0.000 claims description 5
- 238000005342 ion exchange Methods 0.000 claims description 4
- 239000011521 glass Substances 0.000 claims description 3
- 238000001514 detection method Methods 0.000 claims description 2
- 238000001914 filtration Methods 0.000 claims description 2
- 238000001228 spectrum Methods 0.000 abstract description 12
- 238000010586 diagram Methods 0.000 abstract description 3
- 230000004907 flux Effects 0.000 abstract description 3
- 230000035945 sensitivity Effects 0.000 abstract description 3
- 230000005622 photoelectricity Effects 0.000 abstract 1
- 230000000694 effects Effects 0.000 description 2
- 238000002310 reflectometry Methods 0.000 description 2
- 238000011840 criminal investigation Methods 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 239000003814 drug Substances 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 238000005468 ion implantation Methods 0.000 description 1
- 239000013307 optical fiber Substances 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000011160 research Methods 0.000 description 1
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/12—Generating the spectrum; Monochromators
- G01J3/26—Generating the spectrum; Monochromators using multiple reflection, e.g. Fabry-Perot interferometer, variable interference filters
Abstract
The invention refers to a kind of micro integrated refraction rate Fa-Po cavity spectrum detector, which includes the incident ray, microlens, variable refraction rate Fa-Po cavity array, photoelectricity detector array and signal acquiring circuit. The Fa-Po cavity array is formed with a mirroring film, each Fa-Po cavity only can penetrate one kind of light wave, thus forms a series of optical filters, the light from the incident ray passes through the micro lens and forms a parallel beam, forms the correspondent optical spectrum electron signal on the photoelectric detector array after passing through the Fa-Po cavity array, the photo spectrum electro signal corresponds to density of different wavelength on the variable position on the photoelectric detector array, the computer can transfer the photo spectrum electron signal into correspondent photo spectrum diagram. The invention has a high light flux, high sensitivity, and high resolution. The volume is small.
Description
Technical field
The invention belongs to the spectrometric instrument technical field, particularly relate to a kind of micro integrated variable refractivity Fa-Pa cavity spectrographic detector.
Background technology
In the prior art, though disclosed micro spectral analytic system has structurally been carried out some bigger improvement in recent years, but all fail really to realize Sensorised, and the micro spectrometer of existing practicability still adopts grating beam splitting, the microminiaturization of grating will inevitably cause the reduction of spectrometer resolution, this also is unfavorable for the utilization of luminous energy simultaneously, and detector is had higher requirement.Guaranteeing to adopt grating also to be unfavorable for reducing of spectrometer volume under the certain prerequisite of resolution as beam splitter.U.S. Northestern Univertsity also is engaged in the research of miniature interference type spectral instrument, but it adopts the Electrostatic Control catoptron to move the scanning that realizes spectrum, and this makes its structure and control comparatively complicated, and can be subjected to extraneous vibration effect.
Summary of the invention
The objective of the invention is deficiency, provide a kind of and have that high light flux, high sensitivity, high-resolution, volume are very little, integrability, micro integrated variable refractivity Fa-Pa cavity spectrographic detector that cost is low at the existence of prior art.
Purpose of the present invention comes to be realized by the following technical programs:
Micro integrated variable refractivity Fa-Pa cavity spectrographic detector comprises illuminator and photodetector array, is provided with miniature variable refractivity Fabry-Perot cavity between illuminator and photodetector array.The reflectance coating that miniature variable refractivity Fabry-Perot cavity is plated by medium of varying refractive index and both sides constitutes, Fabry-Perot cavity is in the required refractive index of light wave that has each self-corresponding a certain specific wavelength along diverse location on the variations in refractive index direction, and photodetector array and miniature variable refractivity Fabry-Perot cavity are integrated.
Described medium of varying refractive index adopts glass as medium, utilizes ion exchange technique to realize that medium refraction index is along the specific direction linear distribution.
Described illuminator is made up of incident optical and lenticule, lenticule forms parallel beam just in time by after the miniature variable refractivity Fabry-Perot cavity filtering thereafter, reach at last on the photoelectronic detecting array behind the miniature variable refractivity Fabry-Perot cavity, finish detection by signal acquisition circuit again spectral signal.
Micro integrated variable refractivity Fa-Pa cavity spectrographic detector provided by the invention can carry out real-time spectral signal collection, because the resolution of spectrometer is only relevant with the reflectivity of reflectance coating, therefore without limits to effective clear aperature of incident light, so can realize higher luminous flux, the sensitivity that also can improve spectrometer simultaneously.To scan miniature Fabry-Perot cavity spectrometer different with existing mechanical, this micro spectrometer adopts variable refractivity to realize the variation of effective light path of Fabry-Perot cavity, realize the space development of spectrum, therefore need not movable part, this make simple and compact for structure, need not mechanical scanning control, reduced volume simultaneously, improved the anti-vibration ability of instrument.This micro integrated variable refractivity Fa-Pa cavity spectrographic detector has characteristics such as high-resolution, integrability, cost are low, is to carry out the desirable device that low light level spectrum signal detects.Can be widely used in various fields such as biological chemistry, clinical medicine, legal medical expert's criminal investigation, environmental science, modern field operations and national defence.
Description of drawings
Fig. 1 is a basic structure synoptic diagram of the present invention;
Fig. 2 is the index distribution synoptic diagram of variable refractivity Fabry-Perot cavity;
Embodiment
Below in conjunction with accompanying drawing technical scheme of the present invention is further described:
Among Fig. 1: 1, incident optical 2, lenticule 3, anti-reflection film 4, reflectance coating 5, medium of varying refractive index 6, reflectance coating 7, photodetector array
As shown in Figure 1, micro integrated variable refractivity Fa-Pa cavity spectrographic detector provided by the invention forms miniature variable refractivity Fabry-Perot cavity by anti-reflection film 3, reflectance coating 4, medium of varying refractive index 5 and reflectance coating 6, medium of varying refractive index 5 adopts glass as medium, utilize ion exchange technique or ion implantation technique, adopt suitable ion and the ion in the medium to exchange, the CONCENTRATION DISTRIBUTION along specific direction of exchange ion has determined the medium refraction index after the ion-exchange along the specific direction linear distribution.The refractive index of the diverse location of Fabry-Perot cavity has determined the center of its permeable wavelength, the reflectivity of reflectance coating 6 has determined the width of light passband, the Fabry-Perot cavity diverse location can only see through the light wave of a certain particular range wavelength, thereby forms the different narrow band optical filter of a series of centre wavelengths.Optical fiber 1 is the luminous energy input element of whole detector, it is the lenticule 2 of collimating effect together thereafter, it behind the lenticule 2 a miniature variable refractivity Fabry-Perot cavity that constitutes by anti-reflection film 3, reflectance coating 4, medium of varying refractive index 5 and reflectance coating 6, behind the variable refractivity Fabry-Perot cavity photodetector array 7, integrated with miniature variable refractivity Fabry-Perot cavity.Light process lenticule 2 by incident optical 1 incident, form parallel beam, above-mentioned parallel beam forms corresponding spectrum electric signal through variable refractivity amber-chamber on photodetector array 7, on the photodetector array 7 the spectrum electric signal correspondence of diverse location the intensity of different optical wavelength, this spectrum electric signal can be transformed into corresponding spectrum spectrogram through computing machine.
Fig. 2 has provided the medium refraction index distribution situation of spectral evolution direction, is waiting under the long situation in chamber, and diverse location refractive index difference has caused diverse location effective cavity length difference, and the linear distribution of refractive index has been guaranteed the linear distribution of spectral wavelength in this direction.
Making of the present invention is to utilize micro-optic technology and Micrometer-Nanometer Processing Technology that miniature variable refractivity Fabry-Perot cavity and photodetector array etc. are integrated on same chip, and the volume of resulting total system has only centimeter square.
Claims (4)
1, a kind of micro integrated variable refractivity Fa-Pa cavity spectrographic detector, comprise illuminator, beam splitting system, photodetector array and signal acquisition circuit, it is characterized in that between illuminator and photodetector array, being provided with miniature variable refractivity Fabry-Perot cavity, the reflectance coating (4) that miniature variable refractivity Fabry-Perot cavity is plated by medium of varying refractive index (5) and both sides, reflectance coating (6) constitutes, miniature variable refractivity Fabry-Perot cavity is in the required refractive index of light wave that has each self-corresponding a certain specific wavelength along diverse location on the variations in refractive index direction, and photodetector array and miniature variable refractivity Fabry-Perot cavity are integrated.
2, micro integrated variable refractivity Fa-Pa cavity spectrographic detector according to claim 1 is characterized in that: described medium of varying refractive index (5) adopts glass as medium, utilizes ion exchange technique to realize that medium refraction index is along the specific direction linear distribution.
3, micro integrated variable refractivity Fa-Pa cavity spectrographic detector according to claim 1 and 2, it is characterized in that illuminator is made up of incident optical (1) and lenticule (2), lenticule (2) forms parallel beam just in time by after the miniature variable refractivity Fabry-Perot cavity filtering thereafter, reach at last on the photodetector array behind the miniature variable refractivity Fabry-Perot cavity, finish detection by signal acquisition circuit again spectral signal.
4, micro integrated variable refractivity Fa-Pa cavity spectrographic detector according to claim 1 and 2, it is characterized in that on the miniature variable refractivity Fabry-Perot cavity also be coated with anti-reflection film (3) on the reflectance coating that plates (4).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2003101111855A CN100405029C (en) | 2003-12-09 | 2003-12-09 | Minitype integrated variable refractive index Fa-Pa cavity spectrographic detector |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2003101111855A CN100405029C (en) | 2003-12-09 | 2003-12-09 | Minitype integrated variable refractive index Fa-Pa cavity spectrographic detector |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1546956A true CN1546956A (en) | 2004-11-17 |
| CN100405029C CN100405029C (en) | 2008-07-23 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB2003101111855A Expired - Fee Related CN100405029C (en) | 2003-12-09 | 2003-12-09 | Minitype integrated variable refractive index Fa-Pa cavity spectrographic detector |
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| Country | Link |
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| CN (1) | CN100405029C (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111693491A (en) * | 2020-07-30 | 2020-09-22 | 重庆理工大学 | Method for measuring refractive index of transparent fluid based on Fabry-Perot interference |
| US11450698B2 (en) | 2015-12-29 | 2022-09-20 | Viavi Solutions Inc. | Dielectric mirror based multispectral filter array |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6462876B1 (en) * | 1999-11-16 | 2002-10-08 | Agere Systems Guardian Corp. | Multi-wavelength etalon |
| CN1314949C (en) * | 2003-04-09 | 2007-05-09 | 重庆大学 | Micro integration method-amber cavity array optical spectrum detector |
-
2003
- 2003-12-09 CN CNB2003101111855A patent/CN100405029C/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US11450698B2 (en) | 2015-12-29 | 2022-09-20 | Viavi Solutions Inc. | Dielectric mirror based multispectral filter array |
| CN111693491A (en) * | 2020-07-30 | 2020-09-22 | 重庆理工大学 | Method for measuring refractive index of transparent fluid based on Fabry-Perot interference |
| CN111693491B (en) * | 2020-07-30 | 2023-01-06 | 重庆理工大学 | Method for measuring refractive index of transparent fluid based on Fabry-Perot interference |
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| Publication number | Publication date |
|---|---|
| CN100405029C (en) | 2008-07-23 |
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Granted publication date: 20080723 Termination date: 20111209 |