CN1546426A - Barium strontium titanate ferroelectric film material and its preparation method - Google Patents

Barium strontium titanate ferroelectric film material and its preparation method Download PDF

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CN1546426A
CN1546426A CNA2003101115343A CN200310111534A CN1546426A CN 1546426 A CN1546426 A CN 1546426A CN A2003101115343 A CNA2003101115343 A CN A2003101115343A CN 200310111534 A CN200310111534 A CN 200310111534A CN 1546426 A CN1546426 A CN 1546426A
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mbst
colloidal sol
1mol
film
acetate
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CN1242955C (en
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刘梅冬
姜胜林
曾亦可
邓传益
陈实
刘少波
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Huazhong University of Science and Technology
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Huazhong University of Science and Technology
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Abstract

The invention discloses a strontium titanate barium ferrum conductive film material and process for preparing the material, wherein the preparation process comprises the steps of, (1) preparing strontium acetate, barium acetate and butyl titanate into sol by the mol ratio of x:1-x:1 using ethylene glycol monoethyl ether as solvent, (2) charging manganous acetate, catalyst and addition agent into the sol to obtain MBST sol, (3) coating MBST sol on substrate to needed thickness, heat treating to obtain inorganic thin film, (4) fast heat treating to obtain MBST ferrum conductive film.

Description

Barium strontium titanate ferroelectric film material and preparation method thereof
Technical field
Patent of the present invention relates to responsive first ferroelectric membranc material of non-refrigeration infrared detector focal plane arrays (FPA) (UFPA) and preparation method thereof.
Background technology
The non-refrigeration infrared detector focal plane arrays (FPA) has been represented the new way of starring array thermal imaging development, is the key part of preparation non-refrigerant thermal imaging instrument.It comprises two funtion parts: sensitive element array and signal treatment circuit.The non-refrigeration infrared detector focal plane arrays (FPA) can be finished on the integrated circuit technology line of common scale, needn't rely on extremely expensive super large-scale integration (VLSI) producing apparatus of investment.The gordian technique of preparation non-refrigeration infrared detector focal plane arrays (FPA) is that the preparation high-performance is surveyed sensitive unit and little heat insulating construction thereof, and the ferroelectric thin-flim materials of excellent property can prepare high performance responsive unit, guarantees that device has high detectivity and stability.
(Ba 1-xSr x) TiO 3(being called for short BST) is a kind of typical perovskite structure matrix material, and it has BaTiO concurrently 3High-k, low-dielectric loss and SrTiO 3Characteristics such as materialization is stable.This film has good pyroelectricity, ferroelectric, piezoelectric property and non-linear optical effect.Therefore, utilize bst thin film to prepare various devices in recent years, as ultra-large dynamic RAM, high frequency bypass integrated capacitance, decoupling capacitance, microwave monolithic integrated circuit (MMIC), tuning microwave device and high-performance non-refrigeration infrared detector focal plane arrays (FPA).The method for preparing bst thin film has radio-frequency sputtering, organic chemical vapor deposition (MOCVD), pulsed laser deposition (PLD) and colloidal sol-gel (Sol-Gel) method etc.Compare with other method ratio, the Sol-Gel method prepares film and has unique advantages: 1) good uniformity, starting material reach the molecular level contact, can guarantee correct stoichiometric ratio, form single crystalline texture; 2) easily carry out trace doped improvement film performance; 3) thermal treatment temp is low, easily with the semiconductor integrated circuit technique compatibility, film and semiconducter device can be integrated on the same chip, with the reliability of raising device and improve integrated level; 4) can cheaply prepare large-area high purity films, be easy to industrialization.Yet the ferroelectric membranc that will obtain practicability still has a major issue to wait to solve: be used to do the bst thin film of the sensitive unit of non-refrigeration infrared detector focal plane arrays (FPA), because thinner thickness (≤2 μ m), with body material ratio, its total electrical resistance descends, the insulativity variation, and the rheology of promptly leaking electricity is big.This will consume the pyroelectricity electric current of larger proportion, introduce bigger noise, disturb infrared radiation signal, cause the unstable and even inefficacy of system performance.Therefore, prepare high performance non-refrigeration infrared detector focal plane arrays (FPA), ferroelectric thin-flim materials also must good insulation preformance except that having good pyroelectric property, and promptly resistivity wants high, and leakage current is little.
Summary of the invention
The present invention proposes a kind of barium strontium titanate ferroelectric film material and preparation method thereof, its objective is to adopt Mn to improve (Ba as modified materials 1-xSr x) TiO 3The electrical property of (strontium-barium titanate is called for short BST) ferroelectric membranc to reduce leakage current, improves resistivity; And the barium strontium titanate ferroelectric film material (MBST) for preparing the manganese doping vario-property with improved SOL-GEL method makes thin-film material not only have good pyroelectricity, also has high resistivity, little leakage current.
A kind of barium strontium titanate ferroelectric film material of the present invention contains (Ba 1-xSr x) TiO 3, wherein x is 0.05-0.04, it is characterized in that it also contains Mn, 1mol (Ba 1-xSr x) TiO 3The addition 0.0003-0.02mol of Mn.
Described barium strontium titanate ferroelectric film preparation methods, its steps in sequence is: (1) by mol than x: 1-x: 1 gets strontium acetate Sr (CH 3COO) 2, barium acetate Ba (CH 3COO) 2With tetrabutyl titanate Ti (OC 4H 9) 4, ethylene glycol monoethyl ether HOCH 2CH 2OC 2H 5For solvent heats while stirring, become the colloidal sol that is evenly distributed, wherein x is 0.05-0.40; (2) the manganese acetate Mn (CH of adding 0.0003-0.02mol in the described colloidal sol of 1mol 3COO) 24H 2O adds catalyzer and additive simultaneously, continues to stir, and becomes MBST colloidal sol; (3) at Pt/Ti/SiO 2Apply described MBST colloidal sol on the/Si substrate, form wet film, became the MBST inorganic thin film at 300-500 ℃ of thermal treatment 5-10 minute, if film thickness does not reach requirement as yet, can on the MBST inorganic thin film, apply described MBST colloidal sol once more, repeat this step until reaching required thickness; (4) to reaching the MBST inorganic thin film of required thickness,, make the MBST ferroelectric membranc at 600-800 ℃ of rapid thermal process 5-20 minute.
Described barium strontium titanate ferroelectric film preparation methods, it is further characterized in that the MBST colloidal sol of 1mol adds the single ether HOCH of the described solvent ethylene glycol of 700-750ml 2CH 2OC 2H 5Described catalyzer is Glacial acetic acid CH 3The MBST colloidal sol add-on of COOH, 1mol is 750-800ml; Described additive is methane amide HCONH 2With ethylene glycol C 2H 6O 2, 1mol MBST colloidal sol in respectively get 250-300ml.
Use material of the present invention and method can obtain the resistivity height, leakage current is little, and heat is released the MBST ferroelectric membranc of excellent property, and its resistivity is than high about two orders of magnitude of pure BST ferroelectric membranc; Utilize this film can prepare the responsive unit of the non-refrigeration ferroelectric membranc of high-performance infrared detector focal plane array.
Description of drawings
Fig. 1 is a process flow sheet of the present invention;
Fig. 2 shows that the MBST20 ferroelectric membranc leakage current density that adopts method of the present invention to prepare concerns with the external electric field Strength Changes;
Fig. 3 is for adopting the three-dimensional and surface topography photo of the prepared MBST20 ferroelectric membranc atomic force microscope AFM of method of the present invention.
Embodiment
1. preparation 1mol MBST20 is an example, adopts 0.80mol Ba (CH 3COO) 2(barium acetate), 0.20molSr (CH 3COO) 21/2H 2O (strontium acetate), 1molTi (OC 4H 9) 4(tetrabutyl titanate), 0.005molMn (CH 3COO) 24H 2O (manganese acetate) is starting material, 720ml ethylene glycol monoethyl ether (HOCH 2CH 2OC 2H 5) be solvent, 750ml Glacial acetic acid (CH 3COOH) be catalyzer, methane amide (HCONH 2) and ethylene glycol (C 2H 6O 2) respectively to get 250ml be additive, by wet 400 ℃ of thermal treatments of film of flow process shown in Figure 18 minutes, 700 ℃ of rapid thermal process of MBST inorganic thin film 12 minutes, prepare the MBST20 ferroelectric membranc, three-dimensional and the surface topography photo of its atomic force microscope (AFM) as shown in Figure 3, electrical property is: electricalresistivity=5 * 10 11Ω cm, pyroelectric coefficient γ=1.03 * 10 -7Ccm -2K -1, dielectric coefficient ε r=300, dielectric loss tg δ=0.01.
2. still prepare 1molMBST20, other are with example 1, but manganese acetate Mn (CH 3COO) 24H 2The O addition is 0.0005mol, ethylene glycol monoethyl ether HOCH 2CH 2OC 2H 5Solvent is 700ml, catalyzer Glacial acetic acid CH 3COOH is 780ml, methane amide HCONH 2With ethylene glycol C 2H 6O 2Respectively get 300ml, by wet 300 ℃ of thermal treatments of film of flow process shown in Figure 1 10 minutes, 800 ℃ of rapid thermal process of MBST inorganic thin film 5 minutes were prepared the MBST20 ferroelectric membranc.
3. manganese acetate Mn (CH 3COO) 24H 2The O addition is 0.001mol, ethylene glycol monoethyl ether HOCH 2CH 2OC 2H 5Be 720ml, Glacial acetic acid CH 3COOH800ml, methane amide HCONH 2With ethylene glycol C 2H 6O 2Respectively get 280ml, wet 500 ℃ of thermal treatments of film 5 minutes, 600 ℃ of rapid thermal process of MBST inorganic thin film 20 minutes, other are with example 1.
4. manganese acetate Mn (CH 3COO) 24H 2The O addition is 0.01mol, wet 350 ℃ of thermal treatments of film 9 minutes, and 750 ℃ of rapid thermal process of MBST inorganic thin film 8 minutes, other are with example 3.
See Fig. 2 by the MBST20 ferroelectric membranc leakage current density that above-mentioned four embodiment are prepared with external electric field Strength Changes relation curve.

Claims (3)

1. a barium strontium titanate ferroelectric film material contains (Ba 1-xSr x) TiO 3, wherein x is 0.05-0.04, it is characterized in that it also contains Mn, 1mol (Ba 1-xSr x) TiO 3The addition 0.0003-0.02mol of Mn.
2. the described barium strontium titanate ferroelectric film preparation methods of claim 1, its steps in sequence is:
(1) by mol than x: 1-x: 1 gets strontium acetate Sr (CH 3COO) 2, barium acetate Ba (CH 3COO) 2With tetrabutyl titanate Ti (OC 4H 9) 4, ethylene glycol monoethyl ether HOCH 2CH 2OC 2H 5For solvent heats while stirring, become the colloidal sol that is evenly distributed, wherein x is 0.05-0.40;
(2) the manganese acetate Mn (CH of adding 0.0003-0.02mol in the described colloidal sol of 1mol 3COO) 24H 2O adds catalyzer and additive simultaneously, continues to stir, and becomes MBST colloidal sol;
(3) at Pt/Ti/SiO 2Apply described MBST colloidal sol on the/Si substrate, form wet film, became the MBST inorganic thin film at 300-500 ℃ of thermal treatment 5-10 minute,
If film thickness does not reach requirement as yet, can on the MBST inorganic thin film, apply described MBST colloidal sol once more, repeat this step until reaching required thickness;
(4) to reaching the MBST inorganic thin film of required thickness,, make the MBST ferroelectric membranc at 600-800 ℃ of rapid thermal process 5-20 minute.
3. the described barium strontium titanate ferroelectric film preparation methods of claim 2 is characterized in that the MBST colloidal sol of 1mol adds the single ether HOCH of the described solvent ethylene glycol of 700-750ml 2CH 2OC 2H 5Described catalyzer is Glacial acetic acid CH 3The MBST colloidal sol add-on of COOH, 1mol is 750-800ml; Described additive is methane amide HCONH 2With ethylene glycol C 2H 6O 2, 1mol MBST colloidal sol in respectively get 250-300ml.
CN 200310111534 2003-12-08 2003-12-08 Barium strontium titanate ferroelectric film material and its preparation method Expired - Fee Related CN1242955C (en)

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Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100404458C (en) * 2005-11-23 2008-07-23 中国科学院上海硅酸盐研究所 Zirconium dioxide mixed modified barium strontium phthalate-magnesium oxide base composite and preparation process thereof
CN101786887A (en) * 2010-03-11 2010-07-28 西北工业大学 Method for preparing nano barium-strontium titanate powder by adopting hydrothermal method
CN101307497B (en) * 2008-01-23 2010-10-06 同济大学 Composite ferro-electric thin film for microwave adjustable device and method for making same
CN102060527A (en) * 2010-12-10 2011-05-18 中国科学院上海硅酸盐研究所 Doped and modified barium strontium calcium titanate heat-release pyroelectric ceramic material and preparation method thereof
CN102060526A (en) * 2010-12-10 2011-05-18 四川大学 Preparation method of manganese and yttrium double-doped barium strontium titanate ceramic material
CN102208527A (en) * 2011-05-06 2011-10-05 四川大学 Low-temperature preparation method of barium strontium titanate based functional film
CN102089872B (en) * 2008-02-19 2013-03-06 东京毅力科创株式会社 Film production method
CN101789260B (en) * 2010-01-19 2013-03-20 湘潭大学 Epitaxial strain ferroelectric film for ferroelectric memory and method for regulating and controlling strain thereof
CN103011803A (en) * 2012-12-11 2013-04-03 浙江大学 Leadless ceramic with high thermoelectric effect and preparation method thereof
CN114122106A (en) * 2021-10-20 2022-03-01 苏州科技大学 Schottky junction with continuously adjustable open-circuit voltage and preparation and application thereof

Cited By (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100404458C (en) * 2005-11-23 2008-07-23 中国科学院上海硅酸盐研究所 Zirconium dioxide mixed modified barium strontium phthalate-magnesium oxide base composite and preparation process thereof
CN101307497B (en) * 2008-01-23 2010-10-06 同济大学 Composite ferro-electric thin film for microwave adjustable device and method for making same
CN102089872B (en) * 2008-02-19 2013-03-06 东京毅力科创株式会社 Film production method
CN101789260B (en) * 2010-01-19 2013-03-20 湘潭大学 Epitaxial strain ferroelectric film for ferroelectric memory and method for regulating and controlling strain thereof
CN101786887A (en) * 2010-03-11 2010-07-28 西北工业大学 Method for preparing nano barium-strontium titanate powder by adopting hydrothermal method
CN102060527A (en) * 2010-12-10 2011-05-18 中国科学院上海硅酸盐研究所 Doped and modified barium strontium calcium titanate heat-release pyroelectric ceramic material and preparation method thereof
CN102060526A (en) * 2010-12-10 2011-05-18 四川大学 Preparation method of manganese and yttrium double-doped barium strontium titanate ceramic material
CN102060527B (en) * 2010-12-10 2013-09-18 中国科学院上海硅酸盐研究所 Doped and modified barium strontium calcium titanate heat-release pyroelectric ceramic material and preparation method thereof
CN102208527A (en) * 2011-05-06 2011-10-05 四川大学 Low-temperature preparation method of barium strontium titanate based functional film
CN103011803A (en) * 2012-12-11 2013-04-03 浙江大学 Leadless ceramic with high thermoelectric effect and preparation method thereof
CN114122106A (en) * 2021-10-20 2022-03-01 苏州科技大学 Schottky junction with continuously adjustable open-circuit voltage and preparation and application thereof
CN114122106B (en) * 2021-10-20 2024-04-05 苏州科技大学 Schottky junction with continuously adjustable open-circuit voltage and preparation and application thereof

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