CN1518057A - Automatic management system and method for testing semiconductor processing machine tool - Google Patents
Automatic management system and method for testing semiconductor processing machine tool Download PDFInfo
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- CN1518057A CN1518057A CNA031016472A CN03101647A CN1518057A CN 1518057 A CN1518057 A CN 1518057A CN A031016472 A CNA031016472 A CN A031016472A CN 03101647 A CN03101647 A CN 03101647A CN 1518057 A CN1518057 A CN 1518057A
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- 238000012360 testing method Methods 0.000 title claims abstract description 255
- 238000012545 processing Methods 0.000 title claims abstract description 52
- 239000004065 semiconductor Substances 0.000 title claims abstract description 28
- 238000000034 method Methods 0.000 title claims description 42
- 238000007726 management method Methods 0.000 claims description 83
- 238000003754 machining Methods 0.000 claims description 49
- 230000002159 abnormal effect Effects 0.000 claims description 23
- 238000001514 detection method Methods 0.000 claims description 18
- 230000008676 import Effects 0.000 claims description 15
- 238000010327 methods by industry Methods 0.000 claims description 13
- 238000005530 etching Methods 0.000 claims description 9
- 238000007689 inspection Methods 0.000 claims description 8
- 150000002500 ions Chemical class 0.000 claims description 4
- 238000012905 input function Methods 0.000 claims 2
- 230000006870 function Effects 0.000 description 39
- 230000000875 corresponding effect Effects 0.000 description 21
- 238000010586 diagram Methods 0.000 description 18
- 238000012986 modification Methods 0.000 description 9
- 230000004048 modification Effects 0.000 description 9
- 238000011017 operating method Methods 0.000 description 9
- 238000012217 deletion Methods 0.000 description 8
- 230000037430 deletion Effects 0.000 description 8
- 238000004519 manufacturing process Methods 0.000 description 4
- 230000008569 process Effects 0.000 description 3
- 230000002596 correlated effect Effects 0.000 description 2
- 238000013523 data management Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 230000007613 environmental effect Effects 0.000 description 2
- 238000012423 maintenance Methods 0.000 description 2
- 238000012797 qualification Methods 0.000 description 2
- 238000003860 storage Methods 0.000 description 2
- 230000033772 system development Effects 0.000 description 2
- 230000003442 weekly effect Effects 0.000 description 2
- 238000004458 analytical method Methods 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000007405 data analysis Methods 0.000 description 1
- 238000013480 data collection Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000018109 developmental process Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 230000003203 everyday effect Effects 0.000 description 1
- 238000011086 high cleaning Methods 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 230000001052 transient effect Effects 0.000 description 1
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Abstract
An automatic management system for testing the semiconductor processing machines is composed of a database for storing the test terms, test specification and test frequency of at least one machine, a processing unit for choosing the test specification and testing machine to generate test result, and an information server for transmitting the exception information to relative workers if the test result is exceptive.
Description
Technical field
The invention provides a kind of management system and method that semiconductor processing machine detects that be used for, relate in particular to automated management system and method that a kind of semiconductor processing machine detects, unusual with the detection of avoiding personnel's operation carelessness to be caused.
Background technology
Along with the development rapidly of industrial society, machinery equipment miscellaneous constantly is developed, to adapt to industrial mass-produced needs.With the semi-conductor electricity sub-element is example, just needs to be applied to the pattern that multiple different machining tools such as film lathe, gold-tinted lathe, etching lathe, implanting ions lathe, quick high-temp processing lathe, chemical mechanical grinder bed progressively define element in its manufacturing process.For element characteristic is closed in product specification, relevant dealer is except having worked out high cleaning scale standard for operating environment, harsh specification requirement has more been formulated in reliability detection for machining tool, newly advancing lathe or on-stream machining tool all must be according to certain detection frequency, detect whether coincidence detection specification of this machining tool at specific test item, with effective useful life of safeguarding machining tool, guarantee the qualification rate of product simultaneously.
With reference to figure 1, the method flow diagram that Fig. 1 detects for the known semiconductor machining tool.As shown in Figure 1, method flow Fig. 1 of known semiconductor machining tool detection comprises the following step:
Step 11: the definition new machine, set, file at information such as operation of machine tool environmental condition, parameters;
Step 12:, comprise the test event and the test specification of new machine by the test tabulation that process engineering Shi Dingyi new machine is suitable for;
Step 13: carry out the test of lathe by the operating personnel, utilize monitor board (monitor wafer) in lathe, to be correlated with and process reaction;
Step 14: obtain the measuring value of lathe by the operating personnel, the pedestrian's labour movement of going forward side by side is calculated with artificial and is judged;
Step 15: by the data input base of operating personnel after with computing;
Step 16: the engineer obtains the test data of lathe by database;
Step 17: the engineer is organized into form with the test data that obtains, and for example puts form weekly in order one time, utilizes instrument softwares such as EXCEL that test data is organized into tendency chart;
Step 18: the person in charge grasps the lathe situation according to the content of form;
Step 19: finish.
Because when known method carries out the lathe detection according to above-mentioned steps, must be earlier by process engineering Shi Rengong definition lathe test tabulation, need be when the operating personnel tests afterwards through ability after the artificial computing with the test data input database, and the engineer need put form weekly in order, the person in charge also only can pass through the passive notice of engineer to test status, therefore not only cause engineer's work load, the operating personnel also may influence the correctness of test data because test tabulation or artificial mistake in computation with mistake, and the person in charge also has no way of obtaining instant test data and grasps the lathe situation, thereby the effect that makes lathe detect is had a greatly reduced quality.
Summary of the invention
Therefore, the purpose of this invention is to provide a kind of automated management system and method that semiconductor processing machine detects that be used for, avoid personnel's operation carelessness to cause and detect unusually.
Second purpose of the present invention provides a kind of automated management system and method that semiconductor processing machine detects that be used for, to improve the detection efficiency of machining tool.
Another purpose of the present invention provides a kind of automated management system and method that semiconductor processing machine detects that be used for, and instant test data and data exception notice can be provided.
According to purpose of the present invention, the automated management system that this semiconductor processing machine detects comprises database, is used to store at least one test event, test specification and the test frequency of at least one machining tool; Processing unit is used for choosing corresponding test specification at this database, so that calculate immediately and compare when the test data of newly-increased this machining tool, and produces testing result; And information server, be used for when this testing result is unusual, sending test abnormity notifying information to the related work personnel.
By a purpose, the automatic management method that a kind of semiconductor processing machine detects comprises according to of the present invention: at least one machining tool of definition in database, to obtain at least one test event, test specification and the test frequency of this machining tool; Utilize processing unit in this database, to choose corresponding test specification,, and produce testing result so that when the test data of newly-increased this machining tool, calculate immediately and compare; And utilize information server when this testing result is unusual, to send test abnormity notifying information to the related work personnel.
Because automated management system of the present invention is to come the test data that the operating personnel imports calculated immediately with the result according to the test specification in the database and computing formula to judge, therefore not only can effectively improve detection efficiency, more can effectively avoid artificial operation mistake, increase substantially the reliability that detects data.In addition, automated management system of the present invention comprises the abnormal data management function, can judge in test result and notify the related personnel with E-mail mode at once when unusual, or when not testing to schedule, lathe also notifies the related personnel with E-mail mode, therefore the related personnel can grasp the lathe situation at any time, helps improving product percent of pass.
Description of drawings
The method flow diagram that Fig. 1 detects for the known semiconductor machining tool.
Fig. 2 is the functional block diagram of the automated management system of semiconductor processing machine detection of the present invention.
Fig. 3 is the flow chart of the automatic management method of semiconductor processing machine detection of the present invention.
Fig. 4 is the method flow diagram of automated management system of the present invention when carrying out " machining tool importing " operation.
Fig. 5 is the method flow diagram of another embodiment of automated management system of the present invention when carrying out " machining tool importing " operation.
Fig. 6 is the method flow diagram of automated management system of the present invention when carrying out " test data input " operation.
Fig. 7 is the method flow diagram of another embodiment of automated management system of the present invention when carrying out " test data input " operation.
Fig. 8 is the method flow diagram of automated management system of the present invention when carrying out " test data inquiry " operation.
Fig. 9 is the method flow diagram of automated management system of the present invention when carrying out " test data modification/deletion " operation.
Figure 10 is the method flow diagram of another embodiment of automated management system of the present invention when carrying out " test data modification/deletion " operation.
Figure 11 is the method flow diagram of automated management system of the present invention when carrying out " abnormal data inquiry " operation.
Figure 12 is the method flow diagram of automated management system of the present invention when carrying out " test data drawing " operation.
Figure 13 is the method flow diagram of automated management system of the present invention when carrying out " email notification regularly " operation.
The figure number explanation
1,3 semiconductor processing machine detection method flow charts
2 automated management systems
11～19 known semiconductor machining tools detect step
21 databases
22 processing units
23 information servers
24 user sides
31～40 semiconductor processing machines of the present invention detect step
100～117 " machining tool importing " operating procedure
120～141 " test data input " operating procedure
150～153 " test data inquiry " operating procedure
160～179 " test data modification/deletion " operating procedure
190～185 " abnormal data inquiry " operating procedure
190～194 " test data drawing " operating procedure
200～205 " email notification regularly " operating procedure
211 test event hurdles
212 test specification hurdles
213 test data hurdles
214 user data hurdles
221 " user's login " function choosing-item
222 " data input " function choosing-item
223 " data query " function choosing-item
224 " abnormal data inquiry " function choosing-item
225 " drawing " function choosing-item
226 " making regular check on " function choosing-item
Embodiment
With reference to figure 2.Fig. 2 is the functional block diagram of the automated management system 2 of semiconductor processing machine detection of the present invention.Automated management system 2 is applicable to known all semiconductor processing machines, comprises the etching lathe, the gold-tinted lathe, and the implanting ions lathe, and lathe such as film lathe detects.As shown in Figure 2, automated management system 2 comprises database 21, be used to store machining tool (comprise new importing lathe and will detect once more have lathe) data such as test event, test specification and test frequency, processing unit 22, be used for when increasing test data newly, calculating immediately and comparing, with the acquisition testing result, and information server 23, be used for when testing result is unusual, sending test abnormity notifying information to the related work personnel.Wherein, automated management system 2 is management systems on a kind of line, so its user side 24 can come access automated management system 2 by the internet, and the test relevant information sent of collection information server 23.
Processing unit 22 comprises feature operations such as " user's login " function choosing-item 221, " data input " function choosing-item 222, " data query " function choosing-item 223, " abnormal data inquiry " function choosing-item 224, " drawing " function choosing-item 225 and " making regular check on " function choosing-item 226." user's login " function choosing-item 221 can be searched corresponding permissions data according to account number, the password of user side 24 inputs in user data hurdle 214, and then makes the user side 24 can be according to other function choosing-item in its authority use processing unit 22 or the every field in the access database 21." data input " function choosing-item 222 be used for offering the operating personnel who is engaged in the machining tool test job imports the lathe metric data and with storage to test data hurdle 213, and processing unit 22 can be chosen data such as corresponding test specification and computing formula automatically and came the data that are stored in the test data hurdle 213 are calculated immediately and compared in the test specification hurdle 212 of database 21 this moment, and then produced with lathe specifically and detect corresponding testing result." data input " function choosing-item 222 also can be used for making user side 24 to increase newly/deletion/modification data according to its authority other field at database 21 in addition." data query " function choosing-item 223 is to be used to offer user side 24 set querying conditions and obtain and the corresponding test data of this querying condition, " abnormal data inquiry " function choosing-item 224 is to be used to offer user side 24 set the abnormal data querying conditions and obtain and the corresponding test data of this abnormal data querying condition, " drawing " function choosing-item 225 is to be used to offer user side 24 to set querying condition, obtain and the corresponding test data of this querying condition, and this test data is plotted tendency chart.As for 226 of " making regular check on " function choosing-items is in the test frequency checkout field 213 that predetermined period is stored in according to database 21 whether corresponding test data to be arranged, and, utilize information server 23 to transmit not timing test announcement information during not with the corresponding test data of this test frequency and give the related work personnel on inspection.
With reference to figure 3, Fig. 3 is the flow chart of the automatic management method of semiconductor processing machine detection of the present invention.As shown in Figure 3, automatic management method flow Fig. 3 of semiconductor processing machine detection of the present invention comprises the following step:
Step 31: in database, define machining tool, set, file or confirm at information such as operation of machine tool environmental condition, parameters;
Step 32: system developer defines the test event of machining tool in database;
Step 33: process engineering teacher defines pairing test specification of each test event and test frequency in database;
Step 34: carry out the test of lathe by the operating personnel, utilize monitor board in lathe, to be correlated with and process reaction;
Step 35: the operating personnel obtains the measuring value of lathe and with data input base, system obtains test specification and formula automatically and calculates immediately and judge with the result and deposit database in, simultaneity factor is carried out lathe test result abnormal examination, if any utilizing information server to transmit email notification related work personnel unusually immediately;
Step 36: system's lathe that regularly 04:00 and 16:00 do not test as yet with E-mail mode notice presumptive test today every day;
Step 37: the personnel of manufacturing department use the abnormal data query function, and according to the rules whether the time carries out whether data meet data correctness and data integrity principle in lathe test, the database to check the on-line operation personnel;
Step 38: the engineer of relevant departments can use the data query function to learn the test history of lathe, to help the analysis of low qualification rate relevant issues;
Step 39: process engineering teacher and person in charge use lathe test data tendency chart function to obtain the long-term trend figure of each lathe to help grasping the lathe situation;
Step 40: finish.
To Figure 13, Fig. 4 to Figure 13 further specifies automated management system and the method flow diagram of method when operation difference in functionality option that semiconductor processing machine of the present invention detects with reference to figure 4.As shown in Figure 4, when user side 24 will carry out " machining tool importing " operation on automated management system 2, must confirm authority via " user's login " function choosing-item 221 of processing unit 22 earlier, treat that its step is as follows by utilizing " data input " function choosing-item 222 to define the lathe data behind the purview certification in database 21:
Step 100: the engineer defines the test event of machining tool in test event hurdle 211, for example etching rate of etching lathe test;
Step 101: the engineer according to the defined test event of above-mentioned steps in test specification hurdle 212, set corresponding test specification, test specification is enabled data such as date and test frequency;
Step 102: data write database;
Step 103: finish.
In order to improve the efficient of automated management system, Fig. 5 is the method flow diagram that shows another embodiment of automated management system 2 of the present invention when carrying out " machining tool importing " operation.In the present embodiment, automated management system 2 can judge earlier that when carrying out " machining tool importing " operation the machining tool of importing is the new lathe that imports, or has the new importing machining tool of same test project with there being lathe, or detect once more have lathe, and then can come data definition steps such as test event, test specification and test frequency are done suitable simplification according to the machining tool attribute that imports.In addition, present embodiment is that the method flow that imports with the etching machining tool is an example, imports yet the present invention is not limited to specific machining tool, and other semiconductor processing machine imports and also is suitable for method flow operation of the present invention.As shown in Figure 5, to define the operating procedure of lathe data in database 21 as follows for user side 24:
Step 110: check the lathe that has or not the same test project in the database,,, then carry out step 112 if there are not the lathe data of same test project in the database if the lathe data of existing same test project in the database then carry out steps 111;
Step 111: choose arbitrary lathe data that have the same test project by etching process engineering teacher and make amendment;
Step 112: the test event that defines new importing lathe by the system development personnel;
Step 113: after obtaining the test event that imports lathe, by wafer manufacturing department provide import the lathe test specification enable date and test frequency;
Step 114: the test specification that imports lathe is provided by etching process engineering teacher;
Step 115: lathe test specification, test specification are enabled data input bases such as date and lathe test frequency by the system development personnel;
Step 116: a newly-increased batch data in database;
Step 117: finish.
As shown in Figure 6, when user side 24 will carry out " test data input " operation on automated management system 2, its step was as follows:
Step 120: the operating personnel uses " user's login " function choosing-item 22 1 to come login system;
Step 121: processing unit 22 carries out rights management according to account number, the password of operating personnel's input;
Step 122: the operating personnel can use " data input " function choosing-item 222 with the test data input database after authenticating;
Step 123: system obtains test specification and formula automatically and carries out instant computing and judgement, to produce testing result;
Step 124: the testing result that above-mentioned steps is obtained deposits database in;
Step 125: check whether testing result is unusual, carry out step 126, then carry out step 127 as if no abnormal if having unusually then;
Step 126: utilize information server 23 instant send Emails to notify the related personnel;
Step 127: finish.
Fig. 7 is the method flow diagram that shows another embodiment of automated management system 2 of the present invention when carrying out " test data input " operation, in the present embodiment, the test tabulation that the operating personnel uses is to be produced automatically by automated management system 2, and therefore can effectively avoid testing listing version is not inconsistent the mistake of being derived.As shown in Figure 7, the operating procedure of user side 24 in processing unit 22 is as follows:
Step 130: test and use " user's login " function choosing-item 221 that the operating personnel carries out machining tool according to manufacturing department's time of being ranked come login system;
Step 131: processing unit 22 carries out rights management according to account number, the password of operating personnel's input;
Step 132: the operating personnel chooses cabin (chamber), lathe test event in test lathe, the lathe by using " data input " function choosing-item 222 after authenticating in database;
Step 133: system obtains and the corresponding tabulation of lathe test event, lathe test specification according to cabin, lathe test event etc. in selected test lathe, the lathe;
Step 134: the operating personnel imports the data of lathe test gained, and system carries out instant computing and judgement according to the lathe test specification that previous step obtains suddenly, to produce testing result;
Step 135: whether the operating personnel confirms to import data is valid data, is then carry out step 136, otherwise carry out step 134;
Step 136: system carries out purview certification at central host;
Step 137: whether system carries out data at central host is that valid data are confirmed, is then carry out step 138, otherwise carry out step 134;
Step 138: a newly-increased batch data in database;
Step 139: check whether testing result is unusual, carry out step 140, then carry out step 141 as if no abnormal if having unusually then;
Step 140: utilize information server 23 instant send Emails to notify the related personnel;
Step 141: finish.
As shown in Figure 8, when user side 24 will carry out " test data inquiry " operation on automated management system 2, it promptly utilized " data query " function choosing-item 223 to carry out the following steps after passing through the purview certification of processing unit 22:
Step 150: query context and the condition of setting the lathe test data;
Step 151: obtain related data to central host according to setting querying condition;
Step 152: output Query Result;
Step 153: finish.
As shown in Figure 9, when user side 24 will carry out " test data modification/deletion " operation on automated management system 2, it promptly utilized " data query " function choosing-item 223 to carry out the following steps after passing through the purview certification of processing unit 22:
Step 160: use the function of data query, set the query context and the condition of lathe test data, and select the data that to revise/delete;
Step 161: the user's modification test data, and carry out instant computing and result by system and judge, or the user deletes selected test data;
Step 162: the data after system's memory modify;
Step 163: finish.
Figure 10 is the method flow diagram that shows another embodiment of automated management system 2 of the present invention when carrying out " test data modification/deletion " operation, in the present embodiment, the user needs earlier when modification/deletion test data via its operating right of system validation, with the test data in effective management database, avoid data by hack or deletion.As shown in figure 10, user side 24 utilizes " data query " function choosing-item 223 to carry out the following step:
Step 170: use the function of data query, set the query context and the condition of lathe test data, to seek the lathe test data that to revise/delete;
Step 171: the lathe test data that selection will be revised/delete;
Step 172: system carries out authority and confirms;
Step 173: system obtains and the corresponding test specification of selected lathe test data automatically, if the user will revise data and then carry out step 174, if the user will then carry out step 175 by deleted data;
Step 174: the user carries out the lathe test data and revises, and the lathe test specification that system obtains suddenly according to previous step carries out instant computing and the result judges, carry out step 176 then;
Step 175,176: system carries out authority at central host and confirms;
Step 177: after the authority affirmation, these BT(batch testing) data in the database are promptly deleted;
Step 178: after the authority affirmation, amended test data promptly is stored in the database;
Step 179: finish.
As shown in figure 11, when user side 24 will carry out " abnormal data inquiry " operation on automated management system 2, it promptly utilized " abnormal data inquiry " function choosing-item 224 to carry out the following steps after passing through the purview certification of processing unit 22:
Step 180: query context and the condition of setting abnormal data;
Step 181: the test frequency of obtaining each lathe, interior cabin according to the querying condition of setting;
Step 182: each lathe of obtaining suddenly according to previous step, the test frequency in interior cabin calculate the testDate of lathe, and check according to the testDate that calculates whether corresponding lathe test data is arranged in the database, on inspection, there are corresponding data then carry out step 183, on inspection, there are not corresponding data then carry out step 184;
Step 183: corresponding lathe test data is carried out data correctness and integrity checking;
Step 184: output Query Result;
Step 185: finish.
As shown in figure 12, when user side 24 will carry out " test data drawing " operation on automated management system 2, it promptly utilized " drawing " function choosing-item 225 to carry out the following steps after passing through the purview certification of processing unit 22:
Step 190: the query context of setting data and condition;
Step 191: the lathe test data that obtains each lathe, interior cabin according to the querying condition of setting;
Step 192: draw and be temporarily stored in central host at the central host end according to the lathe test data that obtains;
Step 193: export the central host result that draws to user side 24;
Step 194: finish.
As shown in figure 13, it is as follows to utilize " making regular check on " function choosing-item 226 to carry out " email notification regularly " method of operating step:
Step 200: the query time scope of setting abnormal data by system developer;
Step 201: the test frequency of obtaining each lathe, interior cabin according to the querying condition of setting;
Step 202: each lathe of obtaining suddenly according to previous step, the test frequency in interior cabin calculate the testDate of lathe, and check according to the testDate that calculates whether corresponding lathe test data is arranged in the database, on inspection, there are corresponding data then carry out step 205, on inspection, there are not corresponding data then carry out step 203;
Step 203: the output Query Result also is stored as webpage format;
Step 204: file is transmitted the related personnel with E-mail mode;
Step 205: finish.
Because automated management system of the present invention is to come the test data that the operating personnel imports calculated immediately with the result according to the test specification in the database and computing formula to judge, therefore not only can effectively improve detection efficiency, more can effectively avoid artificial operation mistake, increase substantially the reliability that detects data.In addition, automated management system of the present invention comprises the abnormal data management function, can judge in test result and notify the related personnel with E-mail mode at once when unusual, or when not testing to schedule, lathe also notifies the related personnel with E-mail mode, therefore the related personnel can grasp the lathe situation at any time, helps improving product percent of pass.
Than known semiconductor machining tool detection method, automated management system of the present invention and method have following advantage:
(1) can avoid manually calculating the specification mistake and cause the operation loss;
(2) automatic inspection data are guaranteed on-line operation, for example, temporary transient operation main points book (temporaryengineering change notice, TECN), consistent with system version;
(3) the lathe test plan is consistent with the actual execution of operating personnel;
(4) as long as can use internet resource browser (IE) browing system just can use native system;
(5) system carries out the test data computing according to formula decided at the higher level but not officially announced, is not easy to make mistakes;
(6) system carries out the test result judgement according to result of calculation and test specification, is not easy to make mistakes;
(7) data collection is complete;
(8) data are preserved easily;
(9) data query is easy;
(10) data analysis is easy; And
(11) exception management (real time mail) automatically.
The above only is preferred embodiment of the present invention, and all claim is made according to the present invention equal variation and modification all should belong to the coverage of patent of the present invention.
Claims (28)
1. the automated management system of a semiconductor processing machine detection comprises:
Database is used to store at least one test event, test specification and the test frequency of at least one machining tool;
Processing unit is used for choosing corresponding test specification at this database, so that calculate immediately and compare when the test data of newly-increased this machining tool, and produces testing result; And
Information server is used for sending test abnormity notifying information to the related work personnel when this testing result is unusual.
2. automated management system as claimed in claim 1, wherein, this machining tool comprise new importing lathe and/or detect once more have lathe.
3. automated management system as claimed in claim 2, wherein, this database comprises the test event hurdle, is used to offer this test event that system developer is set and stored this machining tool.
4. automated management system as claimed in claim 2, wherein, this database comprises the test specification hurdle, is used to offer process engineering teacher and sets and store corresponding test specification and this test frequency according to this test event.
5. automated management system as claimed in claim 1, wherein, this database comprises the user data hurdle, is used to store at least one user's data such as account number, password and corresponding authority.
6. automated management system as claimed in claim 1, wherein, this database comprises the test data hurdle, is used to store this test data of this machining tool.
7. automated management system as claimed in claim 1, wherein, this processing unit comprises user's login feature option, and this user's login feature option is to carry out rights management according to account number, password that the user imports, so that this user can use this processing unit or this database of access according to its authority.
8. automated management system as claimed in claim 1, wherein, this processing unit comprises data input function option, be used for offering the user according to its authority at this database new data more.
9. automated management system as claimed in claim 1, wherein, this processing unit comprises the data query function choosing-item, is used to offer the user and sets querying condition and obtain and the corresponding test data of this querying condition.
10. automated management system as claimed in claim 1, wherein, this processing unit comprises the drawing function option, is used to offer the user and sets querying condition, obtains and the corresponding test data of this querying condition, and this test data is plotted tendency chart.
11. automated management system as claimed in claim 1, wherein, this processing unit comprises abnormal data query function option, is used to offer the user and sets the abnormal data querying condition and obtain and the corresponding test data of this abnormal data querying condition.
12. automated management system as claimed in claim 1, wherein, this processing unit comprises makes regular check on function choosing-item, be used for when predetermined period, checking according to this test frequency whether this database has corresponding test data, and, utilize this information server to transmit not timing test announcement information during not with the corresponding test data of this test frequency and give the related work personnel on inspection.
13. automated management system as claimed in claim 1 is a management system on a kind of line, its user can pass through this automated management system of internet access.
14. automated management system as claimed in claim 1, wherein, this machining tool is etching lathe, gold-tinted lathe, implanting ions lathe, or film lathe.
15. the automatic management method of a semiconductor processing machine detection comprises:
At least one machining tool of definition in database is to obtain at least one test event, test specification and the test frequency of this machining tool;
Utilize processing unit in this database, to choose corresponding test specification,, and produce testing result so that when the test data of newly-increased this machining tool, calculate immediately and compare; And
Utilize information server when this testing result is unusual, to send test abnormity notifying information to the related work personnel.
16. as the automatic management method of claim 15, wherein, this machining tool is newly to import lathe.
17. as the automatic management method of claim 16, wherein, this method comprises the following steps: when this test event that defines this new importing lathe, this test specification and this test frequency
This test event of in the test event hurdle of this database, setting and store this new importing lathe by system developer; And
In the test specification hurdle of this database, set and store corresponding test specification and this test frequency by process engineering teacher according to this test event.
18. as the automatic management method of claim 15, wherein, this machining tool be detect once more have lathe.
19. as the automatic management method of claim 18, wherein, this method comprises the following steps: when there has been lathe in this in definition
In the test event hurdle of this database, upgrade and store this test event that there has been lathe in this by process engineering teacher; And
Set in the test specification of this database according to this test event by this process engineering teacher or other process engineering teacher and to upgrade in the hurdle and store corresponding test specification and this test frequency.
20. automatic management method as claim 15, wherein, this method is before this test data of newly-increased this machining tool, this processing unit can be chosen earlier corresponding test event, this test specification and this test frequency in this database, to produce and the corresponding data list of this machining tool, so that the user can help increasing this test data newly with this data list.
21. automatic management method as claim 15, wherein, this method comprises in addition utilizes user's login feature option to come to carry out rights management according to account number, the password of user's input, so that this user can use this processing unit or this database of access according to its authority.
22. as the automatic management method of claim 15, wherein, this method comprises utilizes data input function option to make the user can be according to its authority new data more in this database.
23. as the automatic management method of claim 15, wherein, this method comprises to be utilized the query function option to make the user can set querying condition and obtains and the corresponding test data of this querying condition.
24. automatic management method as claim 15, wherein, this method comprises utilizes the drawing function option to make the user can set querying condition, obtains and the corresponding test data of this querying condition, and utilizes this drafting system that this test data is plotted tendency chart.
25. as the automatic management method of claim 15, wherein, this method comprises to be utilized abnormal data query function option to make the user can set the abnormal data querying condition and obtains and the corresponding test data of this abnormal data querying condition.
26. automatic management method as claim 15, wherein, this test data is to be stored in the test data hurdle of this database, and this method comprises to utilize to be made regular check on function choosing-item and checks according to this test frequency whether corresponding test data is arranged in this database at predetermined period, and on inspection, during not with the corresponding test data of this test frequency, utilize this information server to transmit not timing test announcement information and give the related work personnel.
27. as the automatic management method of claim 15, wherein, the user can come this database of access by the internet, uses this processing unit or obtains this test abnormity notifying information.
28. as the automatic management method of claim 15, wherein, this machining tool is etching lathe, gold-tinted lathe, implanting ions lathe, or film lathe.
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| Application Number | Priority Date | Filing Date | Title |
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| CN 03101647 CN1264109C (en) | 2003-01-13 | 2003-01-13 | Automatic management system and method for testing semiconductor processing machine tool |
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| CN 03101647 CN1264109C (en) | 2003-01-13 | 2003-01-13 | Automatic management system and method for testing semiconductor processing machine tool |
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| CN1518057A true CN1518057A (en) | 2004-08-04 |
| CN1264109C CN1264109C (en) | 2006-07-12 |
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| CN 03101647 Expired - Fee Related CN1264109C (en) | 2003-01-13 | 2003-01-13 | Automatic management system and method for testing semiconductor processing machine tool |
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| CN (1) | CN1264109C (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102542394A (en) * | 2010-12-29 | 2012-07-04 | 沈阳中科博微自动化技术有限公司 | Authority management method for semiconductor equipment |
| CN105223914A (en) * | 2014-06-30 | 2016-01-06 | 中芯国际集成电路制造(上海)有限公司 | The system of management and control board production data and method thereof |
| CN105676785A (en) * | 2014-11-21 | 2016-06-15 | 中芯国际集成电路制造（天津）有限公司 | Semiconductor processing equipment analog simulation system and working method thereof |
| CN106298582A (en) * | 2015-05-15 | 2017-01-04 | 中芯国际集成电路制造(上海)有限公司 | Processing procedure abnormity diagnostic system and method |
| CN106447166A (en) * | 2016-08-30 | 2017-02-22 | 内蒙古蒙牛乳业（集团）股份有限公司 | Method and system for informationizing abnormal information transmission |
| CN108171945A (en) * | 2016-12-08 | 2018-06-15 | 新昌县嘉德科技发展有限公司 | A kind of lathe information harvester |
-
2003
- 2003-01-13 CN CN 03101647 patent/CN1264109C/en not_active Expired - Fee Related
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102542394A (en) * | 2010-12-29 | 2012-07-04 | 沈阳中科博微自动化技术有限公司 | Authority management method for semiconductor equipment |
| CN105223914A (en) * | 2014-06-30 | 2016-01-06 | 中芯国际集成电路制造(上海)有限公司 | The system of management and control board production data and method thereof |
| CN105676785A (en) * | 2014-11-21 | 2016-06-15 | 中芯国际集成电路制造（天津）有限公司 | Semiconductor processing equipment analog simulation system and working method thereof |
| CN105676785B (en) * | 2014-11-21 | 2018-07-10 | 中芯国际集成电路制造（天津）有限公司 | Semiconductor processing equipment simulation system and its method of work |
| CN106298582A (en) * | 2015-05-15 | 2017-01-04 | 中芯国际集成电路制造(上海)有限公司 | Processing procedure abnormity diagnostic system and method |
| CN106298582B (en) * | 2015-05-15 | 2019-04-19 | 中芯国际集成电路制造(上海)有限公司 | Processing procedure abnormity diagnostic system and method |
| CN106447166A (en) * | 2016-08-30 | 2017-02-22 | 内蒙古蒙牛乳业（集团）股份有限公司 | Method and system for informationizing abnormal information transmission |
| CN108171945A (en) * | 2016-12-08 | 2018-06-15 | 新昌县嘉德科技发展有限公司 | A kind of lathe information harvester |
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|---|---|
| CN1264109C (en) | 2006-07-12 |
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