CN101078915A - Substrate processing system managing apparatus information of substrate processing apparatus - Google Patents
Substrate processing system managing apparatus information of substrate processing apparatus Download PDFInfo
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Abstract
A substrate processing system comprises a substrate processing apparatus, an information storage server and a support computer, which are connected to a network respectively. When the substrate processing apparatus causes a failure, an alarm processing part extracts a necessary relevant log file and stores the same in a hard disk of the information storage server. A failure information generation part generates failure information, which in turn is finally stored in the hard disk of the information storage servers as a failure information database. An apparatus information uncasing part renders the relevant log file and the failure information database readable from the support computer located in a remote place. Thus, the relevant log file and the failure information database can be immediately read. In other words, provided is a substrate processing system rendering operation information immediately readable from a remote place when the substrate processing apparatus causes a failure.
Description
Invention field
The present invention relates to a kind ofly will carry out the lining processor of predetermined process and the network communications technology of computing machine combination with glass substrate, CD with substrate etc. (below abbreviate substrate as) with glass substrate, photomask to Semiconductor substrate, liquid crystal indicator via network.
Background technology
The goods of semiconductor and LCD etc. are made by substrate being implemented a series of processing such as cleaning, resist-coating, exposure, development, etching, formation interlayer dielectric, thermal treatment.These processing are in the past carried out in the lining processor of having assembled resist-coating processing unit and development treatment unit etc.What be provided with on the lining processor transports robot by the substrate order is transported to each processing unit and this substrate is carried out a series of processing.
This substrate processing is controlled automatically, and usually lining processor also has the unit controls portion that controls each processing unit respectively except that the systems control division of control device integral body.And, the Control Software of installing on the lining processor by in systems control division and the unit controls portion separately the installed software module constitute.That is, construct system control sytsem, and construct the unit control system of controlling each processing unit by each software module of installing in each unit controls portion respectively by installed software module controls device integral body on the systems control division.
In each software module of installing in systems control division and the unit controls portion each has intrinsic version.And, carry out edition upgrading (version up) in each software module according to plan.Be provided with in the factory of lining processor, also temporary transient version to specific software module changes under situation about supporting.
Matching between the whole software modules that importantly keep installing on 1 lining processor during the version change of such software module.Under the irretentive situation of matching between the software module, the problem that control system occurs can cause the lining processor misoperation or stops.Therefore, when the edition upgrading of planning software module, Ying Yineng keeps the mode of the matching between each software module and carries out.
But the fitting operation error when software module is carried out edition upgrading also can cause the software module of setup error version.When temporarily specific software module being carried out version change in the support scene, the modular structure with plan is different sometimes.Under these situations, also may not keep the matching between the software module, thereby existence can produce misoperation and the problem of the plant failure that stops etc.
Produce in the lining processor under the situation of fault, in the time of can not correctly holding the version information of installed software module on the device rapidly, failure reason analysis need be Duoed for a long time than anticipation.
In the above-mentioned lining processor, usually with the treatment process information of substrate, operations of operators information etc. about the various information of running as the journal file journal.
The operation information of time series of the running of this lining processor represented in the generation time record of the incident that this journal file is predesignated with each generation.Therefore, can be by the recorded content of reference journal file at the operation information of confirming the lining processor past afterwards.Especially when lining processor produces fault, by with reference to producing reason analysis to fault to producing fault recorded content before in this journal file.
In the past, when in lining processor, producing fault, carried out the correspondence of fault by following order.
1. the operator produces fault by the tower lamp and the hummer identification of lining processor.
2. the operator administers (field support) responsible official by phone etc. to the zone of dealer and produces matters with regard to fault and get in touch with.
3. the zone that receives contact is administered the responsible official and is gone to the substrate processing factory that this lining processor is arranged, with the situation of assurance fault.
4. the zone is administered the responsible official and can not be tackled then and there under the situation of fault, makes the Trouble Report document of the concrete situation of expression fault when the journal file of this lining processor is outputed to recording medium and collects this recording medium.
5. with Email etc. above-mentioned journal file and Trouble Report document are sent to fault analysis responsible officials at a distance such as support center.
6. the fault analysis responsible official produces reason with reference to journal file and Trouble Report document analysis of failure, and the countermeasure of fault is discussed.
7. administering the responsible official from the fault analysis responsible official to the zone gets in touch with regard to fault analysis result and countermeasure matters.
Like this, produce under the situation of fault, but the reason by reference journal file analysis of failure can be carried out suitable reply to fault.
But by journal file fault being carried out the analysis of causes (above-mentioned 6) operation in addition in the said procedure needs the time, and interpretation of result is accomplished to regard to countermeasure needs a lot of time before getting in touch with.Especially, generation must stop must to stop this device in for a long time under the situation of fault of running of lining processor before the contact countermeasure, and the production efficiency of substrate descends significantly.
Produce from fault and to obtain journal file and also need the time.Therefore, because the maximal value of the data volume of journal file pre-determines, deleted at the required recorded content of moment fault analysis of obtaining journal file sometimes.For tackling this situation, in the time of keeping journal file for a long time, the data volume of the journal file that fault obtains when producing rapidly increases, and journal file is needed a lot of time to the recorded content that the fault analysis responsible official sends and retrieval is necessary.
In addition, in the lining processor of assembling resist-coating processing unit and development treatment unit, the reply information of predetermined fault is stored in the device in advance in the reply lining processor.Restriction item when comprising fault in this reply information and producing the method for operating of reason, corresponding fault and fault etc.Thus, can when fault produces, suitably not read above-mentioned reply information yet, carry out resuming operation of device etc. even if be not versed in the operator of this device.
But the information of (when dispatching from the factory) when the reply information of lining processor stored is this device introduction when predetermined fault chance failure in addition produces during introduction, can not be tackled accurately with the reply information of storage.When carrying out resuming operation of fault, can make the state deteriorating of lining processor, also postpone recovery according to the reply information that can not accurately tackle.
For tackling this situation, the up-to-date reply information that fault is newly judged is issued by dealer with the letter form as the information of appending.Yet these are provided and delivered by modes such as mailing, when therefore needing up-to-date reply information, can not obtain this information at once.
Even if after the reply information of having provided and delivered up-to-date, because its reply information with the device stored is managed respectively, therefore can not realize the unified of information, when in fact fault produces, be difficult to select necessary up-to-date reply information.
Summary of the invention
The present invention towards be the lining treatment system that can communicate to connect lining processor and computing machine through network.
According to the present invention, at a kind of lining processor with handle in the lining treatment system of computer and network combination of device information of above-mentioned lining processor, has the device information memory unit of the said apparatus information that storage obtains; The open parts of device information of the said apparatus information that can store at said apparatus information stores parts from aforementioned calculation machine reading through above-mentioned network.
Under the state of device information of the lining processor of the constant running of storage,, can easily hold device information from afar owing to can read through network.
Another aspect of the present invention is a kind of lining treatment system, to have to substrate carry out the systems control division of the processing unit of predetermined processing and control device integral body and control the lining processor of unit controls portion of above-mentioned processing unit respectively and computing machine through the network combination, when having on said system control part or said units control part the install software module, confirm constantly on said system control part and the said units control part that at this matching of the matching of installed software module is confirmed parts separately.
On the lining processor during install software module fault that causes that do not match between each software module can prevent trouble before it happens.
Of the present invention on the one hand is that a kind of have can be through the lining treatment system of the lining processor of network service again, have: storage is appended the information stores parts and is obtained parts through the above-mentioned information of appending of appending information that above-mentioned network is obtained storage as the information relevant with above-mentioned lining processor and the information of appending that provided by the dealer of above-mentioned lining processor with appending.
Can obtain the information of appending that the dealer by lining processor provides with appending at once.
The present invention is also towards the Method of processing a substrate that can connect lining processor and computing machine through network communicatedly.
The present invention is also towards the lining processor that can be connected communicatedly through network and computing machine.
Just, the objective of the invention is immediately to read the from afar operation information of lining processor.
Other purposes of the present invention be on the lining processor during install software fault that causes that do not match between each software module prevent trouble before it happens.
Other purposes of the present invention are the information of appending that obtains at once where necessary.
Description of drawings
Fig. 1 is the figure of the brief configuration of expression lining treatment system of the present invention;
Fig. 2 is the schematic plan view of lining processor;
Fig. 3 is the block diagram of formation of the control system of expression lining processor;
Fig. 4 is expression information storage server and the figure that supports the basic comprising of computing machine;
Fig. 5 is the block diagram of an example of functional structure of the lining treatment system of expression first embodiment;
Fig. 6 is the figure of an example of expression alert definition file;
Fig. 7 is the figure of an example of expression failure information database;
The figure of the treatment scheme of lining treatment system when Fig. 8 is expression generation fault;
Fig. 9 is the figure of an example of expression reply information database;
Figure 10 is another routine block diagram of functional structure of the lining treatment system of expression first embodiment;
Figure 11 is the block diagram of an example of functional structure of the lining treatment system of expression second embodiment;
Figure 12 is the figure of an example of the alert definition file of expression second embodiment;
Figure 13 is the figure of treatment scheme of the lining treatment system of expression second embodiment;
Figure 14 is the block diagram of an example of functional structure of the lining treatment system of expression the 3rd embodiment;
Figure 15 is the figure of treatment scheme of the lining treatment system of expression the 3rd embodiment;
Figure 16 is the figure of an example of expression version management table;
Figure 17 is the figure of an example of expression confirmation form;
Figure 18 is the figure of another example of expression version management table;
Figure 19 is another routine block diagram of functional structure of the lining treatment system of expression the 3rd embodiment;
Figure 20 is the block diagram of another example of functional structure of the lining treatment system of expression the 3rd embodiment.
Embodiment
Below with reference to description of drawings form of implementation of the present invention.
＜1. first embodiment 〉
Fig. 1 is the figure of brief configuration of the lining treatment system 10 of the expression first embodiment of the present invention.As shown in Figure 1, lining treatment system 10 mainly is to connect lining processor 1 and the information storage server 2 that substrate processing factories 4 have and be equipped with through network 6 lining processor 1 is carried out the support computing machine 3 that the fault analysis responsible official's of fault analysis support center 5 had to constitute.
In the lining treatment system 10, comprise the journal file of lining processor 1 and the device information of failure message and be stored in the information storage server 2, the device information of storage can supported computing machine 3 readings through network 6.
In the substrate processing factory 4, lining processor 1 is connected through LAN (Local AreaNetwork) 41 with information storage server 2.The coupling arrangement 42 of LAN41 through having functions such as router and fire wall is connected on the Wide Area Network 61 of internet etc.Support center 5 also has the LAN51 that connect to support computing machine 3, and the LAN51 also coupling arrangement through having functions such as router and fire wall 52 is connected on the Wide Area Network 61 of internet etc.Lining processor 1 and information storage server 2 and support computing machine 3 can carry out various data communication each other thus.In this instructions, at general designation LAN41,51 and the situation of Wide Area Network 61 under, abbreviate network 6 as.
Among Fig. 1, have a plurality of lining processors 1 in the substrate processing factory 4, but can be 1 lining processor 1, same, have a plurality of support computing machines 3 in the support center 5, but support that computing machine 3 can be 1.Record and narrate the situation of 1 factory as substrate processing factory 4, but can comprise a plurality of substrate processing factory in the lining treatment system 10.
The lining processor 1 that has in the substrate processing factory 4 then is described.Fig. 2 is the schematic plan view of lining processor 1.This lining processor 1 is the heat-treating apparatus that substrate is carried out resist-coating processing, development treatment and follows.Lining processor 1 has from transporter (carrier) and takes out untreated substrate, receive the substrate of handling simultaneously and be contained in indexing attachment ID (indexer), limit rotation substrate edge on the transporter on this substrate interarea, drip photoresist carry out coating processing unit SC (so-called spin coater) that resist-coating handles, at the development treatment cell S D that provides developer solution to carry out development treatment on the substrate after the exposure (so-called rotation developer) and carry out between indexing attachment ID and each processing unit that substrate transports transport the TR of robot.The top of coating processing unit SC and development treatment cell S D is filtered (fan filter) unit by unshowned thermal treatment unit clamping fan and is disposed.As thermal treatment unit, be provided with substrate is carried out the heating unit (so-called heating plate) of heat treated and the substrate of heating is cooled to the cooling unit (so-called coldplate) of uniform temperature.In this instructions, be referred to as the processing unit 110 that substrate is carried out predetermined processing with being coated with processing unit SC and development treatment cell S D and thermal treatment unit.
Fig. 3 is the block diagram of formation of the control system of expression lining processor 1.As shown in Figure 3, lining processor 1 mainly has systems control division 100 and a plurality of processing unit 110 of the control of carrying out device integral body.
The unified control device integral body of systems control division 100 have microcomputer and constitute.Specifically, have the program etc. of CPU101 as its main part, storage control usefulness ROM102, the RAM103 that becomes the operating area of computing, storing daily record file etc. formations such as shaft collar storage part 104 and and external device (ED) between carry out data communication Department of Communication Force 105, by bus 190 they are connected respectively and to constitute.
Department of Communication Force 105 is connected in network 6 through omitting illustrated network interface, and lining processor 1 can be received and dispatched various data between information storage server 2 and support computing machine 3 etc. thus.The communication mode through network 6 that Department of Communication Force 105 is carried out can be wired or wireless, but adopts wired communication mode in the present embodiment.
When being electrically connected a plurality of processing unit 110 on the bus 190, the input of the various information that also be electrically connected the display part 130 that shows various information, receive the operator and the operating portion 140 of operation, read various reader reading data 150 etc. from the recording medium 91 of disk and magneto-optic disk etc.Thus, under the control of systems control division 100, can carry out exchanges data through bus 190 between lining processor 1 each one.
The program of storage system control in advance in the ROM102 of systems control division 100 and the storage part 104.The CPU101 of systems control division 100 carries out calculation process according to this system's control with program, thereby realizes action control and data processing as lining processor 1 integral body.The corresponding unit controls program of contents processing of storage in advance and the substrate processing portion 116 of this processing unit 110 in the ROM112 of unit controls portion 115 and the storage part 114.The CPU111 of unit controls portion 115 carries out calculation process according to this unit controls with program, thereby realizes the action control and the data processing of substrate processing portion 116.According to these programs, the function that the calculation process by systems control division 100 and unit controls portion 115 realizes illustrates in the back.
These programs can read or download and obtain and upgrade through network 6 from prescribed server memory storage etc. through reading device 150 from recording medium 91.Each program has version, the version information of the numerical value of change identification version etc. during refresh routine.The program version information separately that lining processor 1 is carried out is stored in the storage part 104 of systems control division 100.
The hardware configuration of information storage server 2, support computing machine 3 is identical with general computing machine.Therefore, the basic comprising of information storage server 2, support computing machine 3 is identical, thereby with reference to same sketch Fig. 4 explanation.Information storage server 2, support computing machine 3 are respectively as shown in Figure 4, to carry out the CPU21 of various calculation process, 31 (is CPU21 in the information storage server 2, support that in the computing machine 3 be CPU31, below same), the ROM22 of storage base program, 32 and the RAM23 of storing various information, 33 are connected in bus constitutes.Information storage server 2 and support to wait the suitable shaft collar 24 that is connected storing various information through interface (I/F) on the bus separately of computing machine 3,34, carry out the display 25 of the demonstration of various information, 35, receive the keyboard 26a of operator's input, 36a and mouse 26b, 36b, read various reader reading data 27 from the recording medium 91 of CD, disk, magneto-optic disk etc., 37 with the Department of Communication Force 28,38 of communicating by letter with external device (ED) through network 6.
Fig. 5 is that expression comprises according to lining processor 1, information storage server 2 and supports the block diagram of functional structure function, expression lining treatment system 10 that the calculation process of computing machine 3 program separately by CPU etc. realizes.
In the lining processor 1, the function of alarm generating unit 117 is that unit controls portion 115 handles realization according to sequential operation in the formation shown in Figure 5.The function of log record portion 121, alarm processing part 122 and failure message generating unit 123 is that systems control division 100 is handled realization according to sequential operation.
When alarm generating unit 117 produces certain fault in processing unit 110, produce alarm, produce the caution signal of fault as expression.Alarm is allocated in advance cognizance code, and alarm generating unit 117 produces the alarm that has corresponding to the cognizance code of the fault that produces, and sends to systems control division 100.
Journal file 162 has substrate location daily record, processing daily record, alert log, Operation Log and communication log etc. multiple, and the content of the corresponding incident that produces is by 121 classification of log record portion, as independently file logging separately.These journal files 162 are allocated cognizance code separately in advance.
The substrate location daily record is the journal file 162 of the time series information of the position in the lining processor 1 of the substrate handled of expression.Specifically, for example be the identifying information etc. that transports the processing unit 110 of substrate.Aim at substrate location day transveyer device people TR when transporting substrate at every turn by log record portion 121 records.The substrate that lining processor 1 is handled is provided identification id respectively, and the substrate location daily record is with this identification id record, thereby can determine substrate, can confirm afterwards which position when which substrate be transported on.
Handle daily record and be the journal file 162 of information of time series of treatment process of the content conditions etc. of the actual treatment that expression each processing unit 110 carries out.Specifically, for example be the resist-coating amount of the heating-up temperature of heating unit and heat time heating time, coating processing unit SC and resist concentration etc.Handle and to aim at day at every turn sending and recording in the log record portion 121 when the unit controls portion 115 of each processing unit 110 carries out substrate processing.This handle in daily record because and the identification id of substrate record together, can determine substrate, can confirm the treatment process when which substrate is handled under what kind of treatment conditions in which processing unit 110 afterwards.Substrate has in this treatment process under some uncomfortable situation, could find the situation of substrate defects after having operation to carry out to a certain degree more, but by confirming to handle daily record, can hold the discomfort in the treatment process that produces this defective easily afterwards.During the fault generation, handle daily record, then easy analyzing failure cause if preserve this really.
Alert log is the journal file 162 of the time series information of the alarm that produces of expression.Specifically, be to produce the identifying information of processing unit 110 of alarm and the cognizance code of alarm etc.Alert log each when producing alarm by log record portion 121 records.By alert log, can in confirming which processing unit 110, when produce which kind of alarm afterwards.
Operation Log is the journal file 162 of time series information of the content of operation of expression operator operating operation portion 140.Specifically, be the startup indication of lining processor 1 and treatment conditions change indication etc.Operation Log when the operator operates at every turn by log record portion 121 records.By Operation Log, can confirm when carry out which kind of operation afterwards.
Communication log is the journal file 162 of expression lining processor 1 through the time series information of communicating by letter of the external device (ED) of Department of Communication Force 105 and information storage server 2 grades.Specifically, be the content etc. of the information that sends to information storage server 2.Communication log when Department of Communication Force 105 communicates at every turn by log record portion 121 records.By communication log, can confirm when carry out which kind of communication afterwards.
Fig. 6 is the figure of an example of expression alert definition file 161.As shown in the figure, alert definition file 161 is the tables with a plurality of fields.Comprise alarm code, videotex, system's control routine, outputting log file code etc. in the field.
The alarm code is the field of the cognizance code that comprises in the alarm that produces of expression.Other fields (videotex, system's control routine, outputting log file code etc.) are to should the alarm code.Alarm processing part 122 is handled according to the content of putting down in writing in other fields corresponding with this cognizance code from the cognizance code of the alarm of alarm code retrieval reception.
Videotex is the field that the particular content of fault is expressed as article.Alarm processing part 122 shows the content of representing in this videotex at display part 130.Thus, the operator can be used as concrete file and holds which kind of fault of generation.
The field of the control content of lining processor 1 when system's control routine is expression alarm generation.Specifically, allocate in advance,, then force to restart the control content of lining processor 1 grade if then stop the running 2 of lining processor 1 if system's control routine is 1.Alarm processing part 122 is moved control according to the record content of system's control routine, and lining processor 1 suitably moves according to failure mode.
The outputting log file code is the field that expression and alarm produce the cognizance code of the relevant journal file of reason.That is, only select record to hold the cognizance code that fault produces the required journal file 162 of reason.Thus, alarm processing part 122 only selective extraction and the relevant journal file 162 (for example only handling daily record and Operation Log) of alarm generation reason easily.To be also referred to as related journal file 262 by alarm processing part 122 journal files 162 relevant that extract below with alarm generation reason.
In addition, alarm processing part 122 sends to information storage server 2 through LAN41 with related journal file 262.The related journal file 262 that sends is stored in the shaft collar 24 of information storage server 2.Alarm processing part 122 generates failure message to 123 indications of failure message generating unit in addition.
The indication of failure message generating unit 123 receiving alarm handling parts 122 generates the failure message about the fault that produces.That is, failure message generating unit 123 is the parts that generate failure message when producing alarm.
Failure message is one of device information of related journal file 262 and definite failure cause, has the project that produces time on date, generation device, unit, version, fault content, daily record etc.
Producing the time on date is that alarm produces the time on date, obtains from the timing circuit of regulation when failure message generates.
Generation device is the identifying information that produces the lining processor 1 self of fault, and the lining processor 1 of configuration in the substrate processing factory 4 is allocated in advance identifying information respectively, is stored in the storage part 104.
The unit is the identifying information of the processing unit 110 of fault generation.Expression becomes the processing unit 110 in the transmission source of alarm.
Version is the version information that the unit controls portion of the processing unit 110 of generation fault uses program.Fault only produces in the particular version of program, therefore can determine failure cause by version information sometimes.
The fault content is the content of the videotex of above-mentioned alert definition file 161, obtains from alarm processing part 122.
Daily record is the storing path of the information storage server 2 of related journal file 262, obtains from alarm processing part 122.By this project, failure message is correlated with related journal file 262.
Like this, failure message can be specifically by operator and fault analysis responsible official and the information of holding the content of the fault that produces easily constitute.When failure message generating unit 123 generates failure message, this failure message is sent to information storage server 2 through LAN41.
When failure message login portion 224 receives failure messages in the failure message generating unit 123 from lining processor 1, append login in failure information database (below be called failure message DB) 261.Therefore, failure message is stored on the shaft collar 24 as failure message DB261.When failure message appended login, the identification serial number of the failure message that appends was generated automatically by failure message login portion 224.
Fig. 7 is the figure of the example of expression failure message DB261.As shown in the figure, failure message DB261 has a plurality of fields, distinguishes time on generation date, generation device, unit, version, fault content, daily record projects of storage failure information among the figure among field D1～D6.The identification serial number of the failure message that generates is stored among the field D0 that is designated as No..Be designated as the storing path of the related journal file 262 of storage among the field D6 of daily record, therefore in failure message DB261, also become and related journal file 262 associated state.Each failure message is stored as failure message DB261 when producing fault, so failure message DB261 represents the resume of the fault that produces in the past in the information of the fault that produces and the substrate processing factory 4.
When the new failure message of login appends to failure message DB261 in failure message login portion 224, to 225 indications of mail sending part to supporting computing machine 3 notice faults to produce.
The indication that mail sending part 225 receives from failure message login portion 224, the Email that record is produced fault sends to support computing machine 3.That is, mail sending part 225 is the parts that produce faults when producing alarm through network 6 to support computing machine 3 notices.
The open portion 226 of device information can be from the failure message DB261 of support computing machine 3 reading shaft collars 24 storages and the device information of related journal file 262 grades.The open portion 226 of device information has the http server function, and device information is sent to network 6 as html file.The transmission correspondence of this device information is carried out from the external device (ED) that is connected in network 6 through the reading request of WEB browser.
Reply information registration portion 227 receives reply information from supporting computing machine 3.The analysis result of the device information of the lining processor 1 that fault analysis responsible official reading that so-called reply information is support center 5 and analysis produce fault and the countermeasure of this fault etc.That is, reply information registration portion 227 is based on the parts that device information is obtained the reply information of fault.When reply information registration portion 227 receives this reply information, append and sign in in the reply information database (below be called reply information D B) 263.Therefore be stored in the shaft collar 24 as reply information D B263.
The above-mentioned failure message DB261 that stores on the shaft collar 24 is with related journal file 262 and tackle the operation that information D B263 stipulates in information storage server 2, thereby its content is presented on the display 25, can confirm at any time.
Support in the computing machine 3 that the function of mail reception portion 321, WEB browser 322 and reply information sending part 323 is that CPU31 handles realization according to sequential operation in the structure shown in Figure 5.
323 pairs of information storage servers of reply information sending part 2 send reply information.Reply information is input to support computing machine 3 by fault analysis responsible official's predetermined operation, delivers to information storage server 2 by reply information sending part 323.
The contents processing of lining treatment system 10 when lining processor 1 produces fault then, is described.Fig. 8 is the figure of the treatment scheme of expression lining treatment system 10.Among Fig. 8, the processing of lining processor 1 represents that on the right side processing of information storage server 2 is represented in central authorities, supports the processing of computing machine 3 to represent in the left side.The process of downward express time.
At first, when producing fault in a certain processing unit 110 of lining processor 1, the alarm generating unit 117 of this processing unit 110 produces to be had the alarm of the cognizance code corresponding with fault and sends to systems control division 100 (step S11).
The alarm that sends is received by alarm processing part 122, carries out the action control corresponding to cognizance code.That is, the particular content of the fault of putting down in writing in the videotex on display part 130 with reference to alert definition file 161 stops the action control (step S12) of the running etc. of lining processor 1 simultaneously according to system's control routine.
In addition, alarm processing part 122 is extracted related journal file 262 with reference to the outputting log file code of alert definition file 161, should send to information storage server 2 (step S13) by association journal file 262.The related journal file 262 that sends is received by information storage server 2, and is stored in the shaft collar 24 (step S21).Thus, only extract the related journal file 262 that fault analysis needs, preserve really.As mentioned above, handling particular importance when day aiming at analyzing failure cause, better is to preserve really as related journal file 262 therefore.
Then, alarm processing part 122 indication fault information generating units 123 generate failure message, transmit the content of videotex of alert definition file 161 and the storing path of related journal file 262 simultaneously.The indication that failure message generating unit 123 receives from alarm processing part 122 generates failure message (step S14), and the failure message that generates is sent to information storage server 2 (step S15).
Failure message is received by the failure message login portion 224 of information storage server 2, appends login (step S22) in failure message DB261.Thus, relevant and when being stored in the shaft collar 24 about the failure message of the fault that produces and related journal file 262, can be through the open portion 226 of device information from supporting computing machine 3 readings.Apply suitable encryption on failure message DB261 and the related journal file 262, when network 6 is sent, require password etc., can prevent illegal reading.
Failure message login portion 224 indication mail sending parts 225 produce fault in supporting computing machine 3 notice lining processors 1.After receiving this indication, mail sending part 225 sends to the addresses of items of mail of supporting computing machine 3 and has put down in writing the Email (step S23) that produces fault.This addresses of items of mail is stored on the shaft collar 24 in advance.
The Email of sending receives (step S31) by the mail reception portion 321 that supports computing machine 3.Thus, the fault analysis responsible official at support center 5 can recognize that substrate processing factory 4 produces fault.All carry out automatically to the above-mentioned processing of send Email after producing fault, so the fault analysis responsible official also can irrespectively recognize the generation fault with the time a long way off at once.
After receiving the notice of Email, the fault analysis responsible official uses 322 pairs of information storage servers of WEB browser, 2 request reading failure message DB261.At this moment, the address that is assigned to WEB browser 322 also is documented in the above-mentioned Email, also can be stored in advance in shaft collar 34 grades of supporting computing machine 3.After receiving this reading request, the open portion 226 of the device information of information storage server 2 is to supporting computing machine 3 to send failure message DB261.Thus, the content that shows failure message DB261 on the display 35 of support computing machine 3 as shown in Figure 7.
The failure message of the final data of fault analysis responsible official by becoming failure message DB261 can be specifically and is easily held the content of the fault that produces.Specify the field D6 that is designated as daily record, the related journal file 262 (step 32,24) of this fault that also can show and read by predetermined operation.At this moment, only extract the related journal file 262 relevant, so data capacity is restricted, can receive apace with fault.
The fault analysis responsible official carries out failure reason analysis according to these failure messages with related journal file 262.During this is analyzed, only extract the related journal file 262 relevant, therefore can easily and carry out the supposition of failure cause definitely with fault.Because the resume of the fault of the generation of can reading over therefore also can be from the failure message suspected fault reason in past.
After the fault analysis responsible official finishes failure reason analysis, fault analysis result and its countermeasure are input in the support computing machine 3 as reply information.
Reply information has that No., object apparatus, unit, analysis result, countermeasure, program are predetermined, the project information of version etc.
No. be the identification serial number of reply information.Be the sequence number identical with the identification serial number of failure message.
Object apparatus is the identifying information that produces the lining processor 1 of fault.Identical with the generation device of failure message.
The unit is the identifying information that produces the processing unit 110 of fault.Identical with the unit of failure message.
Analysis result is to show the result who analyzes according to failure message and related journal file 262 as article, specifically records and narrates fault and produces reason etc.
Countermeasure is the concrete countermeasure to fault, records and narrates the running program of the disposal of fault etc.
The release predetermined period of the new procedures of the lining processor 1 that fault produces is avoided in the predetermined expression of program.Can prevent that by being updated to this new procedures identical fault from producing.
Version is the version information of above-mentioned new procedures.
When importing these information, send to (step S33) in the information storage server 2 by reply information sending part 323.Reply information is received by the reply information registration portion 227 of information storage server 2, appends login in reply information D B263 (step S25).
Fig. 9 is the figure of the example of expression reply information D B263.As shown in the figure, reply information D B263 has a plurality of fields, and No., object apparatus, unit, analysis result, countermeasure, the program of storing reply information among the figure among field D10～D16 respectively is predetermined, the project information of version etc.The content of this reply information D B263 can be confirmed in information storage server 2 at any time, so the operator of substrate processing factory 4 can carry out suitable correspondence to fault.
According to more than, when lining processor 1 produces fault, can support the fault analysis responsible official notice at center 5 from trend, at once from afar with reference to failure message and related journal file 262, begin the time that analysis of failure produces reason thereby can shorten significantly through network 6.
Owing to only extract related journal file relevant 262 and storage, so the required journal file of the fault generation analysis of causes can be stored preservation really with fault.The data capacity of storage is restricted, thereby comparable higher speed ground sends to support computing machine 3, and also shortened the retrieval time of analyzing the recorded content that needs simultaneously.
In addition, the time before analyzing shortens, and the reply information of analysis result and countermeasure etc. also can be confirmed at any time simultaneously, thereby can suitably tackle fault at once.
First embodiment is not limited to above-mentioned.For example, information storage server 2 is configured in the substrate processing factory 4, but is not limited to this, communicates with lining processor 1 and support computing machine 3 as long as can be connected in network 6, where all rightly is configured in.
Lining processor 1 has the processing capacity of information storage server 2.Figure 10 is the block diagram that expression lining processor 1 has the functional structure of lining treatment system 10 under the situation of processing capacity of information storage server 2.The part that has identical function with Fig. 5 adds same-sign.
The function of failure message login portion 124 in the structure shown in Figure 10, mail sending part 125, the open portion 126 of device information and reply information registration portion 127 is that the systems control division 100 of lining processor 1 is handled according to sequential operation and realized.
Failure message login portion 124 is equivalent to the function of the failure message login portion 224 of information storage server 2, mail sending part 125 is equivalent to the function of the mail sending part 225 of information storage server 2, the open portion 126 of device information is equivalent to the function of the open portion 226 of device information of information storage server 2, and reply information registration portion 127 is equivalent to the function of the reply information registration portion 227 of information storage server 2.Constitute like this, the processing that information storage server 2 is carried out in the foregoing description is carried out by lining processor 1, can realize the present invention by simpler structure.
In the foregoing description, the project of alert definition file corresponding additional videotex, system's control routine, outputting log file code in the alarm code that becomes caution signal, but as long as caution signal is corresponding with the parallel running information relevant with the generation reason of this caution signal at least, also can corresponding project of adding other.
In addition, in the foregoing description, can on information storage server 2, only store related journal file 262 and failure message, and from supporting computing machine 3 readings, if but the device information relevant with lining processor 1 then can be any information as device information.
＜2. second embodiment 〉
The concise and to the point formation of the lining treatment system 10 of second embodiment is same as shown in Figure 1, but in the lining treatment system 10 of second embodiment, the information of appending of the reply information of the fault of storage substrate treating apparatus 1 etc. in supporting computing machine 3, the information of appending of storage is obtained by lining processor 1 through network 6.
Fig. 2 of the structure of lining processor 1 and first embodiment and illustrated in fig. 3 the same.Support computing machine 3 be storage when appending information correspondence provide the computing machine of the information of appending from the request of lining processor 1, its constitute with Fig. 4 of first embodiment illustrate the same.
Figure 11 is that expression comprises the lining processor 1 of second embodiment and supports the block diagram of summary of functional structure of the lining treatment system 10 of the function that computing machine 3 is realized according to the calculation process of program by CPU etc. separately.
As shown in figure 11, store reply information 163 in the storage part 104 of lining processor 1 in advance to predefined fault in the lining processor 1.Record and narrate in this reply information 163 that fault produces reason, the concrete countermeasure when the restriction item etc. of function produces fault during to the method for disposal of fault, fault.
All kinds of faults of 163 pairs of imaginations of reply information are prepared, respectively as file storage independently.Select this reply information 163 as required when fault produces, its content is presented on the display part 130.Below the reply information 163 of storing in advance in the lining processor 1 is called reply information 163 in the device.
Also store the information of appending of reply information 363 grades relevant on the shaft collar 34 of support computing machine 3 with the fault of lining processor 1.The system operator of this reply information 363 at each support center 5 upgrades its content when being judged as new reply information.Therefore, also comprise and introduce the information of judging and appending behind the lining processor 1, reply information 363 is always as up-to-date reply information stores.To support the reply information 363 of storage in the computing machine 3 to be called up-to-date reply information 363 below.
Lining processor 1 can be obtained up-to-date reply information 363 from supporting computing machine 3 through network 6, with the content of reply information 163 in the updating device, the explanation of this point back.
In the structure shown in Figure 11, the function of alarm generating unit 117 is that the unit controls portion 115 of lining processor 1 handles realization according to sequential operation.The function of alarm processing part 122 and reply information obtaining section 128 is that the systems control division 100 of lining processor 1 is handled realization according to sequential operation.It is to support the CPU31 of computing machine 3 to handle realization according to sequential operation that reply information provides the function of portion 324.
When alarm generating unit 117 produces certain fault in processing unit 110, produce alarm, produce the caution signal of fault as expression.Allocate cognizance code in the alarm in advance, alarm generating unit 117 produces the alarm with cognizance code corresponding with the fault that produces, and sends to systems control division 100.
The alarm of alarm processing part 122 receiving alarm generating units 117 is moved control to cognizance code that should alarm.This processing is undertaken by the alert definition file of storing in advance in the reference storage part 104 461.As file storage independently, the alarm processing part 122 corresponding processing units 110 that produce alarms are selected and with reference to suitable alert definition files 461 by the classification (coating processing unit SC, development treatment cell S D etc.) of each processing unit 110 for alert definition file 461.
Figure 12 is the figure of an example of expression alert definition file 461.As shown in the figure, alert definition file 461 is the tables with a plurality of fields.Comprise alarm code, videotex, system's control routine, reply information and update date etc. in the field.
The alarm code is the field of the cognizance code that comprises in the alarm that produces of expression.Other fields (videotex, system's control routine, reply information and update date etc.) are to should the alarm code.Alarm processing part 122 is handled according to the content of putting down in writing in other fields corresponding with this cognizance code from the cognizance code of the alarm of alarm code retrieval reception.
Videotex is the field that the particular content of fault is expressed as article.Alarm processing part 122 shows the content of representing in this videotex at display part 130.Thus, the operator can be used as concrete file and holds which kind of fault of generation.
The field of the control content of lining processor 1 when system's control routine is expression alarm generation.Specifically, allocate in advance,, then force to restart the control content of lining processor 1 grade if then stop the running 2 of lining processor 1 if system's control routine is 1.Alarm processing part 122 is moved control according to the record content of system's control routine, and lining processor 1 suitably moves according to failure mode.
Reply information is the field of the filename of reply information 163 in the expression device corresponding with the alarm that produces.That is, corresponding with reply information 163 in the corresponding device of the fault that becomes alarm generation reason.Therefore, alarm processing part 122 is selected reply information 163 in the device corresponding with this fault easily when fault produces.Reply information 163 shows at display part 130 with above-mentioned videotex automatically by alarm processing part 122 in the device of selecting.
Update date is the field that the date of reply information 163 in the device shown in the reply information is upgraded in expression.That is, in the moment of upgrading the date shown in day, reply information 163 is up-to-date informations in the device of recording and narrating in the reply information.About that store in advance when lining processor 1 is introduced and file that do not upgrade fully, can put down in writing or not put down in writing the time in the date of production of this lining processor 1 and introduce the time on date etc.
Reply information obtaining section 128 obtains up-to-date reply information 363 through network 6 from supporting computing machine 3.When obtaining, to supporting computing machine 3 to send the request command of regulation.The request command that sends from reply information obtaining section 128 provides portion 324 to receive by the reply information of supporting computing machine 3.Reply information provides portion 324 to select up-to-date reply information 363 and send to lining processor 1 according to the request command that receives.
Thus, reply information obtaining section 128 can obtain up-to-date reply information 363.Reply information obtaining section 128 write and save set in the up-to-date reply information 363 that this document obtained in the reply information 163.Like this, the content update of reply information 163 is up-to-date information in the device.
The contents processing of lining treatment system 10 when lining processor 1 produces fault then is described.Figure 13 is the figure of treatment scheme of the lining treatment system 10 of expression second embodiment.The processing of lining processor 1 is on the right side among Figure 13, and the processing of supporting computing machine 3 is in the left side.The process of downward express time.
At first, when producing fault in a certain processing unit 110 of lining processor 1, the alarm generating unit 117 of this processing unit 110 produces to be had the alarm of the cognizance code corresponding with fault and sends to systems control division 100 (step T11).
The alarm that sends is received by alarm processing part 122, carries out the action control corresponding to cognizance code.That is,, stop the action control (step T12) of the running etc. of lining processor 1 according to system's control routine with reference to alert definition file 461.
Then, alarm processing part 122 is selected reply information 163 in the device corresponding with this fault with reference to the reply information of alert definition file 161.And show the content (step T13) of reply information 163 in the device of selecting at display part 130 with the videotex of alert definition file 161.Also hold the concrete countermeasure of this fault when thus, the operator of lining processor 1 holds the particular content of fault of generation.
The content of the update date of alert definition file 161 also is simultaneously displayed in the display part 130.Thus, the operator holds the time on date of the renewal of reply information 163 in the device that shows its content, judges the reliability of its content.That is, if passed through the time from update date, can be judged as might be with new reply information stores in supporting computing machine 3.
Show in the display part 130 whether inquiry obtains the message (step T14) of up-to-date reply information.The operator could obtain up-to-date reply information through operating portion 140 inputs after confirming the content of reply information 163 in the device shown in the display part 130 and update date etc.At this moment, be chosen as under the situation that can not obtain by the operator (step T14 for not), the up-to-date reply information 363 that not the following describes obtain processing, only by the 163 reply faults of reply information in the device.
On the other hand, be chosen as by the operator and can obtain under the situation of up-to-date reply information (step T14 is for being), 128 indications of 122 pairs of replies of alarm processing part information obtaining section obtain up-to-date reply information 363.By the indication of alarm processing part 122, reply information obtaining section 128 obtains up-to-date reply information 363, thereby to supporting computing machine 3 to send the request command (step T15) of regulation.This request command provides portion 324 to receive (step T31) by the reply information of supporting computing machine 3.
Each information of the cognizance code of the alarm of the version information of the identifying information of additional substrate treating apparatus 1 self, the identifying information that produces the processing unit 110 of fault, lining processor 1 program stored, generation in the request command.The version information of program can comprise system control with program and unit controls with the two version information of program.These information are additional to request command by the processing of reply information obtaining section 128.
The up-to-date reply information 363 that reply information provides portion 324 should send by each Information Selection that is additional to request command.The up-to-date reply information of selecting 363 provides portion 324 to send to lining processor 1 (step T32) by reply information, receives (step T16) by reply information obtaining section 128.By this processing, reply information obtaining section 128 selectively only obtains the up-to-date reply information 363 as the fault of the generation reason of the alarm that produces.Meanwhile, the data capacity of the up-to-date reply information 363 that restriction receives can receive at a high speed.
128 pairs of reply information obtaining sections become the up-to-date reply information 363 that reply information 163 in the device of old information (reply information 163 in the device that step T12 selects) writes reception again, are stored in the storage part 104.In the date in the moment of obtaining up-to-date reply information 363, rewrite and upgrade the renewal day of alert definition file 161.In addition, with the reply information updating of alert definition file 161 be the filename of the up-to-date reply information 363 that obtains.Like this, the up-to-date reply information 363 that obtains is and storage (step T17) corresponding with alarm as reply information 163 in the device.That is, the reply information that is pre-existing in when up-to-date reply information 363 and introduction is stored in the storage part 104 equally, and alert definition file 161 is also corresponding to this renewal.Therefore, the reply information of appending is also carried out centralized management as the reply information of fault, can handle equally with the reply information of former existence.
Then, reply information obtaining section 128 obtains up-to-date reply information 363 to alarm processing part 122 notices, receive this notice afterwards alarm processing part 122 refer again to alert definition file 161, the up-to-date reply information 363 (step T18) that obtains in display part 130 demonstrations.Thus, the reply information that the operator can read up-to-date can suitably be tackled fault.
Like that obtain up-to-date reply information 363 from the support computing machine 3 that information is appended in storage at once according to above, so lining processor 1 can carry out suitable correspondence when producing fault through network.The reply information of appending is carried out centralized management with the reply information of storage in advance, can handle equally.
Second embodiment is not limited to above-mentioned.For example, only obtaining to the operator inquiry under the situation that reply information and selection obtain, obtain up-to-date reply information 363, but the operator is not inquired among second embodiment, can obtain up-to-date reply information 363 automatically.That is, can not carry out the processing of step T13 and T14 shown in Figure 13.In view of the above, in the lining processor 1, fault can obtain up-to-date reply information 363, the reply information that can always read up-to-date when producing automatically.
In the foregoing description, reply information 163 is stored respectively as file independently, by alert definition file 461 indirect corresponding caution signals (alarm), but puts down in writing its content, direct corresponding caution signal in the reply information field of alert definition file 461 etc.That is, can corresponding caution signal and as the reply information of the fault of the generation reason of this caution signal.
In the foregoing description, each information of the cognizance code of the version information of the identifying information of the identifying information of additional substrate treating apparatus 1, processing unit 110, program, alarm in the request command that sends when obtaining up-to-date reply information 363, but be not limited thereto.For example, information for the cognizance code of the version information of the identifying information of the identifying information of deriving lining processor 1 uniquely, processing unit 110, program, alarm, can constitute the filename of reply information, then only to request command appended document name, the optional up-to-date reply information of selecting suitably 363.
In the foregoing description, only obtain reply information 363 as the information of appending from support computing machine 3, but so long as the information relevant with the specification of lining processor, with method of operating relevant information, with Method of processing a substrate the information of appending of the lining processor 1 of relevant information etc., can be any information.
＜3. the 3rd embodiment 〉
The concise and to the point formation of the lining treatment system 10 of the 3rd embodiment is same as shown in Figure 1, but in the lining treatment system 10 of the 3rd embodiment, the version information of installed software module is stored on the information storage server 2 in lining processor 1, and the version information of storage can reading in supporting computing machine 3 through network 6.
Fig. 2 of the structure of lining processor 1 and first embodiment and illustrated in fig. 3 the same.Wherein store the software module of using program as system's control of device integral body in the storage part 104 of the systems control division 100 of the 3rd embodiment.CPU101 by systems control division 100 carries out the calculation process according to this software module, realizes action control and data processing as the integral body of lining processor 1.Storage is as to the unit controls of the contents processing of substrate processing portion 116 that should processing unit 110 software module with program in the storage part 114 of unit controls portion 115.CPU111 by unit controls portion 115 carries out the calculation process according to this software module, realizes the action control and the data processing of substrate processing portion 116.
Promptly, the control of installing on the lining processor 1 be divided into several software modules with program and be stored in the storage part 104 of systems control division 100 or the storage part 114 of unit controls portion 115 in, so-called software module is the dividing body of the control of this lining processor 1 with software.
These software modules are read from recording medium 91 through reading device 150, obtain and upgrade through the download of network 6 from prescribed server memory storage etc.
Fig. 4 explanation of the formation of the support computing machine 3 of the information storage server 2 of configuration and 5 configurations of support center and first embodiment is same in the substrate processing factory 4.
The function and the contents processing of lining treatment system 10 then are described.Figure 14 is the block diagram of summary of functional structure of the lining treatment system 10 of expression the 3rd embodiment.Figure 15 is the process flow diagram of handling procedure of the lining treatment system 10 of expression the 3rd embodiment.Among Figure 14, version information unloading part 129 is handling parts of carrying out the handling procedure realization by the CPU101 of systems control division 100, version information login portion 231, mail sending part 232, matching confirmation unit 235 and information disclosure portion 236 are handling parts of realizing respectively by the CPU21 execution handling procedure of information storage server 2, and mail reception portion 311 and WEB browser 312 are handling parts of realizing respectively by the CPU21 execution handling procedure of information storage server 2.
At first, among the step S1 of Figure 15, install software module 178 on lining processor 1.As mentioned above, software module 178 is the control of lining processor 1 dividing bodies with software, is installed on the systems control division 100 and/or unit controls portion 115 of lining processor 1.More specifically say, the installation of software module 178 is carried out through the reading device 150 of lining processor 1, installed software module 178 is stored in the storage part 104 on the systems control division 100, and installed software module 178 is stored in the storage part 114 in the unit controls portion 115.
Here, in the installation of the software module 178 of present embodiment, except that the situation of new introduction software module 178, also comprise renewal (edition upgrading) situation of installed software module 178.The installation of software module 178 also can be carried out together at whole systems control divisions 100 that comprise on 1 lining processor 1 and unit controls portion 115, also can carry out at one (single or multiple) in these.
When install software module 178 went up in one of systems control division 100 or unit controls portion 115 at least, version information unloading part 129 compiled version information and passes out to information storage server 2 (step S2).Be on the systems control division 100 during install software module 178, version information unloading part 129 Direct Recognition are installed.In unit controls portion 115 during install software module 178, receive version information unloading part 129 identifications that the oneself from unit controls portion 115 declares and install.And, in certain lining processor 1, discern version information unloading part 129 that one of systems control division 100 at least or unit controls portion 115 go up install software module 178 and compile the systems control division 100 that comprises on this lining processor 1 and whole version informations of installed software module in the unit controls portions 115 constantly, pass out to the version information login portion 231 of information storage server 2 at this.
The version information login portion 231 that reception is sent logins the systems control division that comprises on the above-mentioned lining processor 1 100 and whole version informations (step S3) of installed software module in the unit controls portions 115 in shaft collar 24.Shaft collar 24 is interior as the version information of version management table 241 storage for each lining processor 1.
Figure 16 is the figure of an example of expression version management table 241.Among this figure, additional identification serial number on the device expression lining processor 1, system version is represented the version of the entire system that lining processor 1 is installed, and installed date time representation is the time on date of install software module 178 in one of systems control division 100 or unit controls portion 115 at least.The kind of classification expression installed software module 178, it is standard specification or special requirement that version is distinguished expression installed software module 178, version is represented the version information of installed software module 178.
As shown in figure 16, login version information at each lining processor 1 to configuration in substrate processing factory 4 on the version management table 241.For example, be 8101 lining processor 1 for the device sequence number, be recorded in as system version 1.00 and carry out the installation of software module 178 April 12 calendar year 2001.And be the version information of installed software module 178 (being categorized as system's control) in the systems control division 100 of 8101 lining processor 1 as the device sequence number, the version of logining this software module 178 is 1.0.0.1.In addition, the version of also logining this software module 178 is divided into standard.
Be that the version that the version information of installed software module 178 (being categorized as spin control, soup control etc.) is logined this software module 178 in the unit controls portion 115 of 8101 lining processor 1 is respectively 1.1.0.1,1.0.0.3 as the device sequence number.In addition, the version of this software module 178 is distinguished and is logged on as standard, special E.
Equally, be 8100 lining processor 1 for the device sequence number, be recorded in as system version 1.00 and carry out the installation of software module 178 April 12 calendar year 2001, as system version 1.10 logins thereafter software module 178 was installed in April 20 calendar year 2001 simultaneously.That is, in the version management table 241 this each lining processor 1 is constantly logined version information, but also record version resume in the past.In other words, the shaft collar 24 of present embodiment has the function as the version information memory unit of the version information of installed software module 178 in storage system control part 100 and the unit controls portion 115.
Version management table 241 shown in Figure 16 is when install software module 178 on lining processor 1, as result's formation of the version information of installed software module 178 in the systems control division 100 that is stored in this moment and the whole unit controls portion 115.For example, for the device sequence number is 8101 lining processor 1, to be used for the new software module (version is 1.0.03) of soup control when being installed in the unit controls portion 115 in April 12 calendar year 2001, April 12 this time engraving device sequence number be the systems control division 100 that comprises on 8101 the lining processor 1 and all in the unit controls portions 115 version information of installed software module 178 be stored in the shaft collar 24, and constitute version management table 241 as shown in figure 16.
On the other hand, version information login portion 231 logins in the version information of software module 178 in shaft collar 24, and this login is delivered to mail sending part 232.The version information login that identifies software module 178 sends in the support computing machine 3 at support center 5 (the step S4 of Figure 15) through the Email that network 6 will have been put down in writing the login redaction at the mail sending part 232 of shaft collar 24.Support the mail reception portion 311 of computing machine 3 to receive and the relevant Email of redaction login, make the responsible official at support center 5 can know installed software module 178 on the lining processor 1 from supporting computing machine 3.
Then proceed to the step S5 of Figure 15, the matching of 235 pairs of new installed software modules 178 of matching confirmation unit of information storage server 2 conducts a survey.More exactly, in systems control division 100 or the unit controls portion 115 during install software module 178, with reference to the version information of installed software module 178 in the systems control division 100 of storage on the shaft collar 24 and the unit controls portion 115, this constantly (just after the installation) by matching confirmation unit 235 affirmation systems control divisions 100 and unit controls portion 115 on the mutual matching of installed software module 178 separately.When the part of software module 178 was upgraded, the mutual matching of the software module 178 of having installed in this installed software module 178 and systems control division 100 and the unit controls portion 115 was confirmed by matching confirmation unit 235.This confirmation method is specified.
During install software module 178, this moment (just after the installation) can be discerned with regard to the version information of installed software module 178 in systems control division 100 and the unit controls portion 115 with reference to version management table 241 by matching confirmation unit 235 in the systems control division 100 of certain lining processor 1 or the unit controls portion 115.For example, the device sequence number is when in the unit controls portion 115 of 8101 lining processor 1 the new software module (version is 1.0.0.3) that is categorized as soup control being installed, matching confirmation unit 235 is version 1.0.0.1 with reference to the version information of version management table 241 installed software module 178 (being categorized as system's control) on this moment recognition system control part 100 of Figure 16, and the version information that is identified in installed software module 178 in the unit controls portion 115 (being categorized as spin control, soup control etc.) is respectively version 1.1.0.1, version 1.0.0.3.
Memory verification table 242 on the shaft collar 24 of information storage server 2.Figure 17 is the figure of an example of expression confirmation form 242.Among the figure, system version, classification, version are distinguished, the meaning of version is identical with Figure 16 explanation.Release information is the note literal to each system version.Each system version is prepared confirmation form 242, express confirmation form 242 among Figure 17 for system version 1.00.
This confirmation form 242 is made by the manufacturer of lining processor 1 and is distributed, and in the present embodiment, is dispensed into the information storage server 2 of substrate processing factory 4 through network 6 from the support computing machine 3 at support center 5.
Whether matching confirmation unit 235 confirms that by reference version management table 241 all versions information registration with installed software module 178 in the systems control division 100 of identification and the unit controls portion 115 is in confirmation form shown in Figure 17 242 in the systems control division 100 of certain lining processor 1 or unit controls portion 115 during install software module 178.Its result, the version information of installed software module 178 is all logined under the situation of confirmation form 242 separately in systems control division 100 and unit controls portion 115, be judged as and have matching, do not have matching (the step S6 of Figure 15) even if 1 situation about not logining in confirmation form 242 also is judged as.
For example, above-mentioned device sequence number is that the example of the new software module (version is 1.0.0.3) that is used for being categorized as soup control is installed in the unit controls portion 115 of 8101 lining processor 1, the version information of installed software module 178 on the systems control division 100 of this lining processor 1 (being categorized as system's control) is version 1.0.0.1, and the version information of installed software module 178 in the unit controls portion 115 (being categorized as spin control, soup control etc.) is respectively (Figure 16) such as version 1.1.0.1, version 1.0.0.3.All login is in the confirmation form 242 (system version is 1.00) of Figure 17 for these version informations, so matching confirmation unit 235 is judged as software module 178 couplings of having installed in new installed software module 178 (be categorized as soup control, version is 1.0.0.3) and systems control division 100 or the unit controls portion 115.
As above-mentioned example, be judged as under the situation of matching, along with the installation of new software module 178, finish a series of processing.On the other hand, matching confirmation unit 235 is judged as does not sometimes have matching.
For example, on the device sequence number is the unit controls portion 115 of 8101 lining processor 1, the new software module (version is divided into special F, version is 1.0.0.4) that is categorized as soup control is installed.At this moment, same as described above, carve when mounted, the device sequence number be the systems control division 100 that comprises in 8101 the lining processor 1 and all in the unit controls portions 115 version information of installed software module 178 be stored in the shaft collar 24 and constitute version management table 241 shown in Figure 180.
At this moment, matching confirmation unit 235 is version 1.0.0.1 by the version information with reference to installed software module 178 on the version management table 241 recognition system control part 100 of Figure 18 (being categorized as system's control), the version information of installed software module 178 in the unit controls portion 115 (being categorized as spin control, soup control etc.) is respectively version 1.1.0.1, version 1.0.0.4 etc.And, matching confirmation unit 235 since in these version informations in the version 1.0.0.4 of installed software module 178 in the unit controls portion 115 (being categorized as soup control) does not login confirmation form 242 (system version is 1.00) at Figure 17, be judged as the software module 178 of having installed in new installed software module 178 and systems control division 100 or the unit controls portion 115 and do not have matching.
Like this, matching confirmation unit 235 is judged as under the situation that does not have matching, transmits these message to mail sending part 232, and the do not match Email of notice of record is sent in the support computing machine 3 at support center 5 (the step S7 of Figure 15) through network 6.Support the mail reception portion 311 of computing machine 3 to receive the do not match Email of notice of record, make the responsible official at support center 5 identify that installed software module 178 does not match on the lining processor 1.
At this moment, the responsible official at support center 5 uses WEB browser 312 to carry out the affirmation (the step S8 of Figure 15) of version information.That is, the version management table 241 of storage can disclose through network 6 by information disclosure portion 236 with reading on the shaft collar 24 of information storage server 2.The responsible official at support center 5 uses the version management table 241 of storage on the WEB browser 312 reading shaft collars 24, confirms the version information of installed software module 178 on the lining processor 1.And the responsible official at support center 5 sees unmatched software module 178, and with regard to itself and the operator of substrate processing factory 4 and responsible official's contact that the zone is administered, elimination does not match by Email etc.
According to more than, in the systems control division 100 of certain lining processor 1 or the unit controls portion 115 during install software module 178, confirm in systems control division 100 and the unit controls portion 115 the mutual matching of installed software module separately constantly at this, therefore the fault that not matching between the software module can be caused (misoperation of lining processor 1 and stop etc.) prevents trouble before it happens.When the software module 178 of a part is updated, the matching of the software module of having confirmed to have installed in this new installed software module 178 and systems control division 100 and the unit controls portion 115 178, thus the fault that not matching between the software module causes can be prevented trouble before it happens.
No matter software module 178 has or not matching, the version information of whole software modules 178 of installing in systems control division 100 that comprises on certain lining processor 1 and the unit controls portion 115 is stored as version management table 241, can disclose it through network 6 with reading, thereby can correctly hold the version information of installed software module 178 on the lining processor 1 from support center 5 sides rapidly, when fault produces, also can analyze efficiently.
The 3rd embodiment is not limited to above-mentioned.For example, in the 3rd embodiment, be not limited to information storage server 2 and be configured in the substrate processing factory 4, can communicate by letter with support computing machine 3 with lining processor 1, be configured in passable everywhere as long as be connected in network 6.
Among the 3rd embodiment, from supporting computing machine 3 dispensing confirmation forms 242 and be stored in the shaft collar 24 of information storage server 2, but confirmation form 242 also can be stored in the shaft collar 34 of supporting computing machine 3.Figure 19 is the functional block diagram of expression functional structure of lining treatment system 10 when confirmation form 242 being stored in the shaft collar 34 of supporting computing machine 3.At this moment, the manufacturer that is not lining processor 1 distributes the affirmation table of making 242, but is stored in the shaft collar 34 of supporting computing machine 3, can disclose through network 6 with reading.The matching confirmation unit 235 of information storage server 2 via network 6 with reference to confirmation form 242 and check the matching of above-mentioned software module 178.In addition, same as the previously described embodiments in addition.Like this, obtain effect same as the previously described embodiments.
Make lining processor 1 have the processing capacity of information storage server 2.Figure 20 is the functional block diagram of expression functional structure of lining treatment system 10 when making lining processor 1 have the processing capacity of information storage server 2.Among the figure, about with the part of Figure 14 identical functions, add identical symbol.Among Figure 20, version information unloading part 129, version information login portion 131, mail sending part 132, matching confirmation unit 135 and information disclosure portion 136 are handling parts of carrying out handling procedure (software module) realization by the CPU101 of systems control division 100.
Under the situation as shown in figure 20, except that software module 178, go back storage version admin table 241 and confirmation form 242 in the storage part 104 of systems control division 100.And, version information login portion 131, mail sending part 132, matching confirmation unit 135 and the information disclosure portion 136 of systems control division 100 respectively with version information login portion 231, mail sending part 232, matching confirmation unit 235 and information disclosure portion 236 identical functions of the information storage server 2 of the foregoing description, handle equally.Like this, obtain effect same as the previously described embodiments.
Promptly, sum up technology contents of the present invention, in the systems control division 100 of certain lining processor 1 or the unit controls portion 115 during install software module 178, in this moment storage system control part 100 and the unit controls portion 115 separately the version information of installed software module 178 constitute version management table 241, simultaneously if the confirmation form 242 of the version information of the software module 178 that has matching is mutually logined in reference, confirm in systems control division 100 and the unit controls portion 115 state of installed software module 178 matching each other separately from version management table 241, then can be at lining processor 1, information storage server 2, supporting to carry out in one of computing machine 3 each handles.Matching affirmation operation self also can be undertaken by the responsible official at the support center 5 that obtains redaction login notice by Email.
In addition, 1 pair of substrate of the lining processor of the various embodiments described above carries out the coating processing and the development treatment of resist, but be not limited thereto, for example if can lamp annealing device, rotation substrate by the irradiates light heated substrate remove the cleaning processing apparatus of the cleaning treatment of particle, substrate be immersed in carry out surface-treated dip treating device etc. carries out predetermined processing to substrate lining processor in the treating fluid such as fluoric acid, no matter be which kind of device then, all can adopt technology of the present invention.
Claims (12)
1. lining treatment system, to have to substrate carry out the systems control division of the processing unit of predetermined processing and control device integral body and control the lining processor of unit controls portion of above-mentioned processing unit respectively and computing machine through the network combination, it is characterized in that having:
On said system control part or said units control part during the install software module, confirm constantly on said system control part and the said units control part that at this matching of the matching of installed software module is confirmed parts separately.
2. lining treatment system according to claim 1 is characterized in that,
Above-mentioned matching is confirmed parts when install software module on above-mentioned systems control division or said units control part, this constantly according to said system control part or said units control part on separately the version information of installed software module confirm matching.
3. lining treatment system according to claim 2 is characterized in that,
When also having on said system control part or the said units control part install software module, store on said system control part or the said units control part version information memory unit of the version information of installed software module separately constantly at this.
4. lining treatment system according to claim 3 is characterized in that,
The table holding member of matching confirmation form that also has the version information of the software module that keeps login to have matching mutually, above-mentioned matching affirmation parts have been confirmed as matching when the version information of installed software module is all logined in above-mentioned matching confirmation form separately on said system control part of storing on the above-mentioned version information memory unit and the said units control part, confirm as under the situation in addition not have matching.
5. lining treatment system according to claim 4 is characterized in that,
Notify unmatched notice parts through above-mentioned network to above-mentioned computing machine when also having above-mentioned matching and confirming that parts are confirmed as no matching.
6. lining processor management method of managing lining processor, have the processing unit and the systems control division of control device integral body and the unit controls portion that controls above-mentioned processing unit respectively that substrate are carried out predetermined processing in this lining processor, it is characterized in that
When being included on said system control part or the said units control part install software module, confirm on said system control part and the said units control part operation of the matching of installed software module separately constantly at this.
7. lining processor management method according to claim 6 is characterized in that,
Above-mentioned matching confirm according on said system control part or the said units control part separately the version information of installed software module carry out.
8. a lining processor has the processing unit and the systems control division of control device integral body and the unit controls portion that controls above-mentioned processing unit respectively that substrate are carried out predetermined processing, it is characterized in that,
When being included on said system control part or the said units control part install software module, confirm constantly that at this matching of the matching of installed software module is confirmed parts separately on said system control part and said units control part.
9. lining processor according to claim 8 is characterized in that,
Above-mentioned matching is confirmed parts on said system control part and said units control part during the install software module, this constantly according on said system control part and said units control part separately the version information of installed software module confirm matching.
10. lining processor according to claim 9 is characterized in that,
When also having on said system control part or said units control part the install software module, be stored on said system control part and the said units control part version information memory unit of the version information of installed software module separately constantly at this.
11. lining processor according to claim 10 is characterized in that,
The table holding member of matching confirmation form that also has the version information of the software module that keeps login to have matching mutually, above-mentioned matching affirmation parts have been confirmed as matching when the version information of installed software module is all logined in above-mentioned matching confirmation form separately on said system control part of storing on the above-mentioned version information memory unit and the said units control part, confirm as under the situation in addition not have matching.
12. a lining processor has the processing unit and the systems control division of control device integral body and the unit controls portion that controls above-mentioned processing unit respectively that substrate are carried out predetermined processing, it is characterized in that,
The said system control part during install software module, is sent the version information of installed software module on said system control part and said units control part at this constantly on said system control part or said units control part.
Applications Claiming Priority (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001205109A JP4071461B2 (en) | 2001-07-05 | 2001-07-05 | Substrate processing system, substrate processing apparatus, program, and recording medium |
| JP205110/01 | 2001-07-05 | ||
| JP205109/01 | 2001-07-05 | ||
| JP205111/01 | 2001-07-05 |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB02130372XA Division CN1215529C (en) | 2001-07-05 | 2002-07-05 | Substrate processing system for managing device information of substrate processing device |
Publications (1)
| Publication Number | Publication Date |
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| CN101078915A true CN101078915A (en) | 2007-11-28 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB2005100760246A Expired - Fee Related CN100378909C (en) | 2001-07-05 | 2002-07-05 | Substrate processing system for managing device information of substrate processing device |
| CNA2007101262938A Pending CN101078915A (en) | 2001-07-05 | 2002-07-05 | Substrate processing system managing apparatus information of substrate processing apparatus |
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| Application Number | Title | Priority Date | Filing Date |
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| CNB2005100760246A Expired - Fee Related CN100378909C (en) | 2001-07-05 | 2002-07-05 | Substrate processing system for managing device information of substrate processing device |
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| Country | Link |
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| JP (1) | JP4071461B2 (en) |
| CN (2) | CN100378909C (en) |
Cited By (1)
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| CN102473130A (en) * | 2009-07-13 | 2012-05-23 | 微软公司 | Health reporting from non-volatile block storage device to processing device |
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| US7280883B2 (en) * | 2001-09-06 | 2007-10-09 | Dainippon Screen Mfg. Co., Ltd. | Substrate processing system managing apparatus information of substrate processing apparatus |
| JP2004280345A (en) | 2003-03-14 | 2004-10-07 | Omron Corp | Terminal board device |
| JP2005093922A (en) * | 2003-09-19 | 2005-04-07 | Dainippon Screen Mfg Co Ltd | Substrate processing system |
| JP2006277298A (en) * | 2005-03-29 | 2006-10-12 | Tokyo Electron Ltd | Substrate processing device, history information recording method, history information recording program, and history information recording system |
| GB0524742D0 (en) * | 2005-12-03 | 2006-01-11 | Ibm | Methods and apparatus for remote monitoring |
| JP4781832B2 (en) * | 2006-02-01 | 2011-09-28 | 大日本スクリーン製造株式会社 | Substrate processing system, substrate processing apparatus, program, and recording medium |
| JP2007293683A (en) * | 2006-04-26 | 2007-11-08 | Tokyo Electron Ltd | Group management system, process information management apparatus and program |
| JP2008021835A (en) * | 2006-07-13 | 2008-01-31 | Hitachi Kokusai Electric Inc | Management system for substrate treating apparatus |
| JP4901442B2 (en) * | 2006-12-04 | 2012-03-21 | 東京エレクトロン株式会社 | Trouble cause investigation support device, trouble cause investigation support method, storage medium for storing program |
| JP5179767B2 (en) * | 2007-03-12 | 2013-04-10 | 株式会社日立国際電気 | Substrate processing apparatus, display method thereof, data collection method, and event collection program |
| JP5138322B2 (en) * | 2007-09-14 | 2013-02-06 | 東京エレクトロン株式会社 | Processing system control apparatus, processing system control method, and storage medium storing control program |
| JP6000567B2 (en) * | 2012-02-23 | 2016-09-28 | キヤノン株式会社 | Image forming apparatus, image forming apparatus control method, and program |
| JP2014082497A (en) * | 2013-11-01 | 2014-05-08 | Hitachi Kokusai Electric Inc | Data retrieval method, data retrieval system, and management program executed by information management device |
| JP6310260B2 (en) * | 2014-01-20 | 2018-04-11 | 株式会社荏原製作所 | Adjusting apparatus for adjusting a plurality of processing units in a substrate processing apparatus, and a substrate processing apparatus provided with the adjusting apparatus |
| JP6650751B2 (en) * | 2015-12-24 | 2020-02-19 | セコム株式会社 | Security operation support system |
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| JP3055606B2 (en) * | 1997-04-22 | 2000-06-26 | 日本電気株式会社 | Switching system maintenance operation method |
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- 2002-07-05 CN CNA2007101262938A patent/CN101078915A/en active Pending
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN102473130A (en) * | 2009-07-13 | 2012-05-23 | 微软公司 | Health reporting from non-volatile block storage device to processing device |
| US8812770B2 (en) | 2009-07-13 | 2014-08-19 | Microsoft Corporation | Health reporting from non-volatile block storage device to processing device |
| CN102473130B (en) * | 2009-07-13 | 2015-11-25 | 微软技术许可有限责任公司 | From non-volatile block storage device to the statement-of-health for the treatment of facility |
| US9286211B2 (en) | 2009-07-13 | 2016-03-15 | Microsoft Technology Licensing, Llc | Health reporting from non-volatile block storage device to processing device |
| US9552273B2 (en) | 2009-07-13 | 2017-01-24 | Microsoft Technology Licensing, Llc | Health reporting from non-volatile block storage device to processing device |
Also Published As
| Publication number | Publication date |
|---|---|
| CN1694224A (en) | 2005-11-09 |
| JP4071461B2 (en) | 2008-04-02 |
| JP2003022116A (en) | 2003-01-24 |
| CN100378909C (en) | 2008-04-02 |
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Application publication date: 20071128 |