CN1512160A - Metal filmtype pulse output type steel body elastic micro variable sensor and its measuring method - Google Patents
Metal filmtype pulse output type steel body elastic micro variable sensor and its measuring method Download PDFInfo
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- CN1512160A CN1512160A CNA021597588A CN02159758A CN1512160A CN 1512160 A CN1512160 A CN 1512160A CN A021597588 A CNA021597588 A CN A021597588A CN 02159758 A CN02159758 A CN 02159758A CN 1512160 A CN1512160 A CN 1512160A
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Abstract
The present invention relates to one sensor converting elastic micro variation of rigid body into electrical parameter variation. The sensor includes metal film type mechanical resonant follower, electronic resonant frequency selector, resonant driver and detection and shaping circuit. After the sensor is installed in the sampled part of detected metal rigid body, the detected metal rigid body is applied with some external force to produce micro elastic deformation and the elastic deformation is fed via the mechanical resonant follower, electronic resonant frequency selector and resonant driver to the detection and shaping circuit, so that the variation is measured. The sensor has simple structure and high sensitivity.
Description
Technical field
The present invention relates to a kind of sensor and measuring method thereof, particularly relate to a kind of metal membrane type pulse output little rate-of-change sensor of shaped steel body elasticity and measuring method thereof.
Background technology
The electrical symbol of the former traditional quick strain-gauge transducer of power is " LR ", can define rigorously again and be " the little rate-of-change sensor of the quick strain chip of semiconductor power steel body elasticity ", this sensor belongs to the semiconductor devices class, is that a kind of Measuring Object that is used for specially produces the device of strain.Because object is subjected to the effect of external force, produces corresponding deformation, the quick strain-gauge transducer of power just can be measured the size of external force indirectly.
The measuring principle of the quick strain-gauge transducer of power is: the quick foil gauge type of power sensor can be used as the resistor equivalence, sectional area and resistivity one timing when resistive conductor, its resistance value is directly proportional with the length of resistive conductor, and the output impedance of foil gauge type sensor is a fixing resistance value under the effect of no external force.After this semiconductor resistor strain-ga(u)ge transducer connects with certain circuit form in use, firmly sticked on the surface of detected metal object closely.When this metallic object is subjected to time spent of doing of power, corresponding how much mechanical deformations will take place in its metal body surface, by the semiconductor resistor strain-ga(u)ge transducer of firmly closely pasting geometric deformation are taken place thereupon also, or elongate and attenuate, or shorten chap.Because deformation takes place in the semiconductor resistor strain-ga(u)ge transducer under the effect of the little distortion of steel body elasticity, make the semiconductor lattice of the quick strain-ga(u)ge transducer of semiconductor power inside that the dislocation distortion also take place, thereby make the output resistance of the quick strain-ga(u)ge transducer of semiconductor power change along with the variation of the little variable of metallic elastic, type of attachment by different circuit, make the variable of the quick strain-ga(u)ge transducer output voltage of semiconductor power also change, thereby the variation that reaches the little variable of metallic elastic is converted to the purpose that electrical parameter changes along with the variation of the little variable of metallic elastic.
The quick foil gauge type of power sensor is from its birth development till now, the history of existing nearly over half a century, under desirable objective condition, it is small and exquisite, simple in structure, cheap that foil gauge type sensor presents external characteristics, the volume of output well, thereby foil gauge type sensor is employed in a lot of fields.Because what the material of foil gauge type sensor adopted is semiconductor material, its basic physical characteristics under distinguishingly the detection of occasion condition requires, is again their deadly defect at some.Its weakness is as follows:
(1) the quick strain-ga(u)ge transducer of semiconductor power is that semi-conductive silicon materials are made, and its temperature is had higher sensitivity, therefore is not suitable for changing span occasion greatly in temperature environment and uses.
(2) the semiconductor resistor strain-ga(u)ge transducer is that semi-conductive silicon materials and other material are synthetic made, and the life-span of its mechanical elasticity is limited.
(3), so when detecting, should not use not damaged because use semiconductor resistor strain-ga(u)ge transducer need firmly stick on the surface of detected metal object with the semiconductor resistor foil gauge closely with bonding agent.
When (4) using the semiconductor resistor strain-ga(u)ge transducer, need the semiconductor resistor foil gauge firmly be sticked on the surface of detected sampling metal object closely, influence accuracy of detection and scope to a certain extent with bonding agent.
(5) technique for sticking complexity, the difficulty height, not easy to operate.
Summary of the invention
The objective of the invention is to overcome the weakness of above-mentioned semiconductor resistor foil gauge, provide that a kind of sensing range is big, dynamic response is fast and the design of the little rate-of-change sensor of steel body machinery of the metal resonance membrane type digit pulse string output type of good stability as the little rate-of-change sensor of steel body elasticity.
Goal of the invention is achieved in that
A kind of little rate-of-change sensor of steel body elasticity of metal membrane type pulse output type, it is characterized in that: described sensor comprises: a metal vibrating membrane I, be positioned at the fixed endpoint A of metal vibrating membrane I one end, be positioned at the stressed position-movable terminal B of the metal vibrating membrane I other end, the static tuner E of the benchmark that is connected with metal vibrating membrane I, one end is connected with resonance frequency selector Y, the harmonic drive Z that the other end is connected with metal film I, the resonance frequency selector Y other end is connected with testing circuit X, testing circuit X one end is connected with harmonic drive Z, and the other end joins with negative the planting of output.
A kind of measuring method of the little rate-of-change sensor of steel body elasticity of metal membrane type pulse output type, it is characterized in that: sensor is passed through metal film fixed endpoint A, removable end points B and linking arm C are connected with tested metallic steel body with D, reference frequency tuner E is connected with metal film I between metal film fixed endpoint A and removable end points B, is used to measure the static resonant frequency in metal film basis; Harmonic drive Z one end is connected with resonance frequency selector Y, one end is connected with metal film I, under the driving pulse of harmonic drive Z drives, metal film I obtains the required energy of vibration, make natural frequency and the resonance of the response point in the electromagnetism harmonic component of metal film I, the resonance follower carries out the selection of resonance qualitly to the harmonic component in the driving pulse, the resonance frequency selector Y other end is connected with testing circuit X, resonance frequency selector Y is converted to together the sinusoidal wave electric signal of homophase frequently with the vibration wave of metal film I natural frequency, input detecting circuit X handles amplification, testing circuit X one end is connected with harmonic drive Z, the other end joins with negative the planting of output, signal one road input harmonics driver Z of testing circuit X output, as the driving energy of metal film I vibration, another road is as the output terminal of this sensor electrical variable signal response.
The invention has the advantages that: (1) is highly sensitive: can detect the steel body and from several microns metallic elastics to the hundreds of micron little variable take place; (2) response speed is fast: because the quality of this sensor moving part is less, frequency response speed is fast; (3) output form: sensor is output as the electric signal of digital serial amount; (4) the self-heating influence is little; (5) good operating stability: select the material of low-temperature coefficient, carry out good quenching technical and handle; (6) simple in structure, be convenient to Installation and Debugging and repairing; (7) adaptability is good: because this sensor does not have special organic material and magnetic material, can work in the rugged surroundings of various radiation are arranged; (8) antijamming capability is strong, and good Electro Magnetic Compatibility is arranged.
Description of drawings
Accompanying drawing 1 is the basic principle schematic of the little rate-of-change sensor of metal membrane type steel body elasticity;
Accompanying drawing 2 is theory structure block diagrams of the little rate-of-change sensor of metal membrane type pulse output shaped steel body elasticity.
Embodiment
Embodiment:
The basic design philosophy of the little rate-of-change sensor of steel body elasticity of metal membrane type pulse output type as shown in Figure 1, wherein: A is the fixed endpoint of metal film reference position, B is the end points of the stressed position of metal film, I is the metal film that connects A and B.If metal film I has three kinds of duties.
State (1): metal film I is F at benchmark tension force
2State the time, just during the equilibrium position of metal film I when external force is zero, establish the natural frequency f of metal film I
2Equal the reference frequency f of quiescent point
2This moment, metal film I was not subjected to the time spent of doing of external force, and pairing mechanical vibration wave frequency is f
2, can be called the reference frequency at zero point again.
State (2): metal film I is F at resulting tension
1State the time, just metal film I reduces the resulting tension of metal film, both: benchmark tension force F under the effect of negative external broach-Δ F
2-Δ F=resulting tension F
1, metal film I shortening-d at this moment.After the metal vibrating membrane I of this moment is subjected to negative external broach-Δ F, the mechanical vibration wave frequency of corresponding metal film I be f
1, this moment metal film I the mechanical vibration frequency f
1Less than reference frequency f at zero point
2
State (3): metal film I is F at resulting tension
3State the time, just metal film I increases the resulting tension of metal film, both: reference force F under the effect of positive external broach+Δ F
2+ Δ F=resulting tension F
3, metal film I growth+d at this moment.After the metal vibrating membrane I of this moment is subjected to positive external broach+Δ F effect, the mechanical vibration wave frequency of corresponding metal film I be f
3, this moment metal film I the mechanical vibration frequency f
3Greater than reference frequency f at zero point
2
The theory structure block diagram of the little rate-of-change sensor of metal membrane type pulse output shaped steel body elasticity as shown in Figure 2.Wherein A represents the fixed endpoint of metal film reference position; B represents the end points of the stressed position of metal film; C representative sensor and detected metallic steel body linking arm; D representative sensor and detected metallic steel body linking arm; E represents the benchmark tuner; The shell of G representative sensor; I represents the metal film device; H represents metallic steel body to be detected.
The little rate-of-change sensor of metal membrane type pulse output shaped steel body elasticity is a kind of sensor that the little variable of rigid body elasticity is converted to the electrical quantity variable, and it is made up of parts such as mechanical resonant follower, resonance frequency selector, harmonic drive and detection shaping circuits.When this sensor is installed in the sampling position of detected metallic steel body, detected metallic steel body is subjected to the effect of external force, make the steel body produce the elastic deformation of trace, be delivered on the mechanical resonant follower of this sensor by the linking arm of this sensor with detected metallic steel body.This is the process that acting force transmits by flow of metal information.Because it is very little that the sectional area of mechanical resonant follower metal film is compared with the sectional area of detected metallic steel body, can ignore in the dispersion for acting force aspect the unit pressure.
The little rate-of-change sensor of metal membrane type pulse output shaped steel body elasticity is in static duty usually, just on the reference position, the metal film of sensor is applied the static tension force on a basis, and set the basic static force of this tension force for this sensor internal, be basic static resonant frequency by the metal film natural frequency that this basic static tension force produced.As shown in Figure 2, the mechanical part structure of described sensor metal film comprises: the metal film reference position is fixed endpoint A, the stressed position of metal film is removable end points B, metal vibrating membrane I is connected and fixed terminal A and mobile terminal B, the static tuner E of benchmark is connected with machinery mount G with metal film I, machinery mount shell G is supporting whole metal film device and electrical information converting means, the benchmark static vibration frequency that the static tuner E of benchmark is used to regulate metal film I.The electronic section structure of described sensor information transmission and conversion comprises: parts such as electron resonance frequency selector Y, harmonic wave driving circuit Z and detection shaping circuit X and output port W are formed.The output terminal of electron resonance frequency selector Y is to detect shaping circuit X input end, and detecting shaping circuit X output terminal is the input end of harmonic wave driving circuit Z and output terminal port W.
Harmonic drive Z is connected with resonance frequency selector Y, sensor is under the driving pulse of harmonic drive Z drives, make metal film I obtain the required energy of vibration, this drives to contain in the driving pulse uses the abundant high order harmonic electromagnetic component, make natural frequency and the resonance of the response point in the electromagnetism harmonic component of metal film I, the resonance follower carries out the selection of resonance qualitly to the harmonic component in the driving pulse.Resonance frequency selector Y is connected with testing circuit X, and resonance frequency selector Y is converted to together the sinusoidal wave electric signal of homophase frequently with the vibration wave of metal film I natural frequency, and input detecting circuit X handles amplification.Testing circuit X is connected with harmonic drive Z, and the other end joins with negative the planting of output.Signal one road input harmonics driver Z of testing circuit X output, as the driving energy of metal film I vibration, another road is as the output terminal of this sensor electrical variable signal response.The resonance point of this sensor resonance follower is along with the trace of mechanical rigid body changes and changes, and can be called the follower type resonant transducer again, and E is that the reference frequency tuner of sensor partly is connected with metal film I.
The design philosophy of the little rate-of-change sensor of metal membrane type pulse output shaped steel body elasticity provided by the invention comprises: parts such as described mechanical resonant follower, electron resonance frequency selector, harmonic wave driving circuit and detection shaping circuit are formed.
It is characterized in that: A is the fixed endpoint of metal film reference position, and B is the end points (can be called mobile end points again) of the stressed position of metal film, and I is the metal film that is connected and fixed terminal A and mobile terminal B, and E partly is the reference frequency tuner of sensor.Metal film can divide three kinds of duties, i.e. state (1); State (2); State (3).
During state (1): when metal film I was zero in external force, resulting tension was F
2State, the natural frequency of metal film I equals the reference frequency of this sensor quiescent point.Because metal film I is not subjected to the effect of external force, the reference frequency at zero point that pairing mechanical vibration wave frequency is a sensor.
During state (2): metal film I is F at resulting tension
1State the time, just metal film I is under the effect of negative external broach, metal film I shortens, thereby the resulting tension of metal film I is reduced.After the metal film I of this moment is subjected to negative external broach, the mechanical vibration wave frequency of corresponding metal film I less than the reference frequency at zero point of sensor.
During state (3): metal film I is F at resulting tension
3State the time, just metal film I is under the effect of positive external broach, metal film I increases, thereby the resulting tension of metal film I is increased.After the metal film I of this moment is subjected to positive external broach effect, the mechanical vibration wave frequency of corresponding metal film I be reference frequency at zero point greater than sensor.
When this sensor is installed in the sampling position of detected metallic steel body, detected metallic steel body is subjected to the effect of external force, make the steel body produce small distortion, be delivered on the mechanical resonant follower of this sensor by the linking arm of this sensor, thereby make suffered the making a concerted effort of metal film change with detected metallic steel body.Because variation has taken place in suffered the making a concerted effort of metal film, makes the intrinsic mechanical resonance frequency of metal film that corresponding variation also take place.Just on the position of benchmark, the little rate-of-change sensor of metal membrane type steel body elasticity is in static duty usually.In debugging, we apply a static tension force by reference adjustor to the metal film of this sensor, and set this tension force for the static tension force of the benchmark of this sensor internal, be the benchmark static mechanical resonance wave frequency of the little rate-of-change sensor of metal membrane type steel body elasticity by the intrinsic mechanical vibration frequency of the metal film of generation that this basic static tension force causes.
The harmonic wave driving circuit is connected with the electron resonance frequency selector, and various piece adopts a common ground.This sensor vibrates metal film under the driving pulse of harmonic wave driving circuit drives.The natural vibration frequency resonance of drive components in the electromagnetism harmonic wave and metal film at this moment, the resonance follow circuit carries out the selection of resonance to the harmonic component in the driving pulse, and then metal film stabilizes to the sine wave oscillations of resonance qualitly.The resonance frequency selection circuit is connected with testing circuit, and the resonance frequency selector vibration wave that metal film is intrinsic is converted to the sinusoidal wave electric signal with the frequency homophase, and input detecting circuit is handled amplification.Testing circuit is connected with the harmonic wave driving circuit, and the other end and output load are joined.Signal one road input harmonics driving circuit of testing circuit output is as the driving energy of metal film vibration.Another road is as the output terminal of this sensor electrical variable signal response.The resonance point of this sensor resonance follower is along with the trace of mechanical rigid body changes and changes.
Claims (2)
1, a kind of little rate-of-change sensor of steel body elasticity of metal membrane type pulse output type, it is characterized in that: described sensor comprises: a metal vibrating membrane (I), be positioned at the fixed endpoint (A) of metal vibrating membrane (I) end, be positioned at the stressed position-movable end points (B) of metal vibrating membrane (I) other end, the static tuner (E) of the benchmark that is connected with metal vibrating membrane (I), one end is connected with resonance frequency selector (Y), the harmonic drive (Z) that the other end is connected with metal film (I), resonance frequency selector (Y) other end is connected with testing circuit (X), testing circuit (X) end is connected with harmonic drive (Z), and the other end joins with negative the planting of output;
2, a kind of measuring method of the little rate-of-change sensor of steel body elasticity of metal membrane type pulse output type, it is characterized in that: sensor is passed through metal film fixed endpoint (A), removable end points (B) and linking arm (C and D) are connected with tested metallic steel body, reference frequency tuner (E) is connected with the metal film (I) that is positioned between metal film fixed endpoint (A) and the removable end points (B), is used to measure the static resonant frequency in metal film basis; Harmonic drive (Z) end is connected with resonance frequency selector (Y), one end is connected with metal film (I), under the driving pulse of harmonic drive (Z) drives, metal film (I) obtains the required energy of vibration, make the natural frequency and the resonance of the response point in the electromagnetism harmonic component of metal film (I), the resonance follower carries out the selection of resonance qualitly to the harmonic component in the driving pulse, resonance frequency selector (Y) other end is connected with testing circuit (X), resonance frequency selector (Y) is converted to together the sinusoidal wave electric signal of homophase frequently with the vibration wave of metal film (I) natural frequency, input detecting circuit (X) is handled and is amplified, testing circuit (X) end is connected with harmonic drive (Z), the other end joins with negative the planting of output, signal one road input harmonics driver (Z) of testing circuit (X) output, as the driving energy of metal film (I) vibration, another road is as the output terminal of this sensor electrical variable signal response.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB021597588A CN100464175C (en) | 2002-12-30 | 2002-12-30 | Metal filmtype pulse output type steel body elastic micro variable sensor and its measuring method |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB021597588A CN100464175C (en) | 2002-12-30 | 2002-12-30 | Metal filmtype pulse output type steel body elastic micro variable sensor and its measuring method |
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| CN1512160A true CN1512160A (en) | 2004-07-14 |
| CN100464175C CN100464175C (en) | 2009-02-25 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110575151A (en) * | 2018-06-11 | 2019-12-17 | 当代汉云企业有限公司 | Pulse diagnosis measuring device and method |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4490773A (en) * | 1983-12-19 | 1984-12-25 | United Technologies Corporation | Capacitive pressure transducer |
| IT206728Z2 (en) * | 1985-09-17 | 1987-10-01 | Marelli Autronica | ACCELERATION OR VIBRATION SENSOR DEVICE |
| RU2026539C1 (en) * | 1991-07-09 | 1995-01-09 | Российский федеральный ядерный центр - Всероссийский научно-исследовательский институт технической физики | Pressure gauge |
| JP3102320B2 (en) * | 1995-09-29 | 2000-10-23 | オムロン株式会社 | Sensor device |
| DE19746560A1 (en) * | 1997-10-22 | 1999-04-29 | Werner Dipl Ing Buck | Method for measuring reversible and irreversible reactions of structure to mechanical loading |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110575151A (en) * | 2018-06-11 | 2019-12-17 | 当代汉云企业有限公司 | Pulse diagnosis measuring device and method |
| CN110575151B (en) * | 2018-06-11 | 2022-11-22 | 当代汉云企业有限公司 | Pulse-taking measuring device and method |
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| CN100464175C (en) | 2009-02-25 |
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Assignee: Tianjin mid Detection Technology Co., Ltd. Assignor: Zhao Liang Contract record no.: 2011120000075 Denomination of invention: Metal filmtype pulse output type steel body elastic micro variable sensor and its measuring method Granted publication date: 20090225 License type: Exclusive License Open date: 20040714 Record date: 20110616 |
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Granted publication date: 20090225 Termination date: 20161230 |