CN1508617A - Double-optical-wedge real-time focus detection and focusing system - Google Patents
Double-optical-wedge real-time focus detection and focusing system Download PDFInfo
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- CN1508617A CN1508617A CNA021564280A CN02156428A CN1508617A CN 1508617 A CN1508617 A CN 1508617A CN A021564280 A CNA021564280 A CN A021564280A CN 02156428 A CN02156428 A CN 02156428A CN 1508617 A CN1508617 A CN 1508617A
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- 238000003384 imaging method Methods 0.000 claims abstract description 17
- 230000005540 biological transmission Effects 0.000 claims 1
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- 125000004122 cyclic group Chemical group 0.000 abstract 1
- 238000005259 measurement Methods 0.000 description 4
- 239000000203 mixture Substances 0.000 description 2
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Abstract
A double-optical-wedge real-time focus-detecting and focusing system is composed of an optical path part and a circuit control part, wherein the optical path part comprises a main mirror, a secondary mirror, a reflector, a front group, a double-optical-wedge, a rear group and an imaging CCD (charge coupled device), when an infinite point target is imaged by an objective lens group after passing through a telescopic system, the infinite point target is deflected by an upper optical-wedge and a lower optical-wedge respectively, two point images separated from top to bottom can be observed by the CCD imaging system, the circuit control part controls the CCD to acquire images in real time, the distance between the two points is calculated and compared with the calibrated distance, a cyclic approximation method is adopted on control software, control parameters are continuously fed back to a focusing control system, and the focusing and aiming of the light beam. The invention can detect focus and focus in real time, has high precision and simple operation.
Description
Technical field
The present invention relates to a kind of beam control system, particularly utilize two wedges to carry out real-time focusing test focusing beam control system.
Background technology
In the existing beam control system, adopt telescope to carry out focusing test and focusing, Cassegrain objective is adopted in telescopical design, and Cassegrain objective is to be made of parabolic primary mirror and hyperboloidal secondary mirror, move by secondary mirror and to finish focusing, light beam is focused on the impact point.Generally speaking, after distance between the primary and secondary mirror carried out precise calibration, utilize laser ranging to measure the distance of distant place impact point, this distance is delivered in the focusing control program, realization is to the focusing aiming of target, like this, laser ranging system must be on instrument, be equipped with, or the instrument of target actual range can be detected.The beam control system focusing test focusing of this structure is complicated, and precision is lower, must not detect in real time and focus.
Summary of the invention
Technology of the present invention is dealt with problems and is: a kind of pair of real-time focusing test focusing system of wedge is provided, it can provide 2 the distance in the CCD imaging system of different distance target at a distance in real time, by a cover control algolithm, controlled variable is fed back to focusing control system, finish the focusing aiming of beam control system to target, and the focusing test focusing is simple, the precision height.
Technical solution of the present invention is: the real-time focusing test focusing system of two wedges, and its characteristics are: be made up of light path part and circuit control section, light path part comprises primary mirror, secondary mirror, catoptron, preceding group, two wedge, back group, imaging CCD; Circuit part is made of television imaging measuring system, Control System of Microcomputer and focusing motor.The distant place point target contracts by the telescopic system of being made up of primary mirror and secondary mirror behind the bundle, enter imaging system through catoptron, two wedges are the target light separated into two parts, target surface at CCD becomes two some pictures, gather image in real time by the circuit control section, calculate distance between two points, with the distance comparison of demarcating well, the parameter of control secondary mirror is constantly fed back to focusing control system, realize the real-time focusing test of distant object and the focusing of different distance.
The invention has the beneficial effects as follows: owing in telescopical imaging optical path, increase a pair of wedge and circuit control section, objective lens imaging behind infinite point target process telescopic system, respectively through two wedge deviations up and down, can be observed two pictures that separate up and down by the CCD imaging system, utilize this image-forming principle of wedge, at lamp of known distance place's point, the telescopic system accurate focusing herein, on the target surface of CCD, can become two some pictures, circuit control section control CCD gathers this two some pictures in real time, calculate the distance between 2, mark is imitated out gauged distance, so at a distance the point target of any distance, on the target surface of CCD, become two some pictures, distance that calculates and demarcation distance are compared, and adopt iterative approximation method on the Control Software, and the parameter of controlling secondary mirror is fed back to focusing control system, realize real-time focusing test and the focusing of beam control system, therefore the present invention's focusing test in real time focusing, and precision is higher, and easy to operate.
Description of drawings
Fig. 1 is that light channel structure of the present invention is formed synoptic diagram;
Fig. 2 is the composition frame chart of circuit control section of the present invention;
Fig. 3 is a software flow pattern of the present invention.
Embodiment
As shown in Figure 1, the light path part of present embodiment is by secondary mirror 1, primary mirror 2, catoptron 3, preceding group 4, two wedges 5, back group 6, imaging CCD 7 compositions such as grade, the distant place point target contracts by the telescopic system of being made up of primary mirror 2 and secondary mirror 1 behind the bundle, enter imaging system through several times catoptron 3, before group 4 with the target light bundle that continues to contract, two wedges 5 are the target light separated into two parts, focus on the target surface of imaging CCD 7 by back group 6, on target surface, become two some pictures, gather image in real time, calculate distance between two points, with the distance comparison of demarcating well, on Control Software, adopt iterative approximation method, the parameter of controlling secondary mirror is constantly fed back to focusing control system, realize that beam control system is to real-time focusing test of the distant object of different distance and focusing.
As shown in Figure 2, the automatically controlled part of present embodiment is made of television imaging measuring system, Control System of Microcomputer and focusing motor.After target after optical imaging system will separate is sent into CCD, the television measurement, TV measurement system calculates 2 distances by the digital picture that obtains, give Control System of Microcomputer control focusing motor, realize that beam control system is to real-time focusing test of the distant object of different distance and focusing.
As shown in Figure 3, the treatment scheme of present embodiment is divided into two parts: system calibration and real-time focusing.The system calibration process is at lamp of known distance place's point, the telescopic system accurate focusing herein, on the target surface of CCD, can become two some pictures, circuit control section control CCD gathers this two some pictures in real time, calculate the accumulation mean of distance between two points, with this gauged distance as real-time focusing; Real-time focusing is the target for any distance, after obtaining its distance value by the television measurement, TV measurement system, it and the gauged distance of calibration are compared, if this distance and the difference of gauged distance are greater than preset threshold value, then adjust raster count, calculate focussing distance, the running of control focusing motor realizes that beam control system is to real-time focusing test of the distant object of different distance and focusing.
Claims (3)
1, the real-time focusing test focusing system of two wedges, it is characterized in that: form by light path part and circuit control section, light path part comprises primary mirror, secondary mirror, catoptron, preceding group, two wedges, the back group, imaging CCD, the distant place point target contracts by the telescopic system of being made up of primary mirror and secondary mirror behind the bundle, enter imaging system through catoptron, two wedges are the target light separated into two parts, target surface at CCD becomes two some pictures, gather image in real time by control section, calculate distance between two points, compare with demarcating good distance, the parameter of controlling secondary mirror is constantly fed back to control system, realize the real-time focusing test of distant object and the focusing of different distance.
2, according to claim 1 pair of real-time focusing test focusing system of wedge, it is characterized in that: light path part utilizes the distance of point-to-point transmission to carry out real-time focusing test and focusing.
3, according to claim 1 pair of real-time focusing test focusing system of wedge is characterized in that: control section comprises television imaging measuring system, Control System of Microcomputer and focusing motor, constitutes an imaging feedback system with light path part.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNA021564280A CN1508617A (en) | 2002-12-16 | 2002-12-16 | Double-optical-wedge real-time focus detection and focusing system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNA021564280A CN1508617A (en) | 2002-12-16 | 2002-12-16 | Double-optical-wedge real-time focus detection and focusing system |
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| Publication Number | Publication Date |
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| CN1508617A true CN1508617A (en) | 2004-06-30 |
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| CNA021564280A Pending CN1508617A (en) | 2002-12-16 | 2002-12-16 | Double-optical-wedge real-time focus detection and focusing system |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101916040A (en) * | 2010-07-14 | 2010-12-15 | 中国科学院光电技术研究所 | Focus detection system and focus detection method suitable for projection lithography system |
| CN101562693B (en) * | 2009-06-01 | 2011-05-25 | 中国兵器工业第二〇五研究所 | Optical imaging splicing device of double CCD image splicing detector |
| CN102564575A (en) * | 2012-02-07 | 2012-07-11 | 中国科学院光电技术研究所 | Laser far-field focal spot measuring method based on orthogonal optical wedge light splitting characteristics and focal spot reconstruction algorithm |
| CN108873229A (en) * | 2018-06-27 | 2018-11-23 | 湖北华中光电科技有限公司 | A kind of double smart tracking lens of focusing |
| CN115421274A (en) * | 2022-08-23 | 2022-12-02 | 中国科学院光电技术研究所 | Automatic focus detection method based on curve fitting |
-
2002
- 2002-12-16 CN CNA021564280A patent/CN1508617A/en active Pending
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101562693B (en) * | 2009-06-01 | 2011-05-25 | 中国兵器工业第二〇五研究所 | Optical imaging splicing device of double CCD image splicing detector |
| CN101916040A (en) * | 2010-07-14 | 2010-12-15 | 中国科学院光电技术研究所 | Focus detection system and focus detection method suitable for projection lithography system |
| CN101916040B (en) * | 2010-07-14 | 2012-09-05 | 中国科学院光电技术研究所 | Focus detection system suitable for projection lithography system |
| CN102564575A (en) * | 2012-02-07 | 2012-07-11 | 中国科学院光电技术研究所 | Laser far-field focal spot measuring method based on orthogonal optical wedge light splitting characteristics and focal spot reconstruction algorithm |
| CN108873229A (en) * | 2018-06-27 | 2018-11-23 | 湖北华中光电科技有限公司 | A kind of double smart tracking lens of focusing |
| CN115421274A (en) * | 2022-08-23 | 2022-12-02 | 中国科学院光电技术研究所 | Automatic focus detection method based on curve fitting |
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