CN1488957A

CN1488957A - Two-dimensional distributed array waveguide grating

Info

Publication number: CN1488957A
Application number: CNA031422985A
Authority: CN
Inventors: 杨建义; 江晓清; 李锡华; 王明华
Original assignee: Zhejiang University ZJU
Current assignee: Zhejiang University ZJU
Priority date: 2003-08-14
Filing date: 2003-08-14
Publication date: 2004-04-14
Anticipated expiration: 2023-08-14
Also published as: CN1208636C

Abstract

2D optic waveguide array is composed of certain amount of optic waveguides put together. Quantity of optic waveguides is dependent on requirement of diffraction accuracy and functional performance. Two end surfaces of these waveguides constitute the input end face and output end face of the 2D diffraction grating. Each optic waveguide possesses a certain amount of optical path setup based on requirement of positional phase corresponding to position on the end face of the diffraction grating. 2D optic waveguide array is composed of rectangle waveguide, ridge waveguide, strip type waveguide or optical fiber. The end face of grating can be in plate structure, concave surface structure and convex surface structure. Based on optic waveguide technique, the invention realizes 2D diffraction grating easily with controllable phase and intensity in 2D.

Description

The Two dimensional Distribution array waveguide grating

Affiliated technical field

The present invention relates to a kind of optical component, particularly relate to a kind of Two dimensional Distribution array waveguide grating.

Background technology

Diffraction grating is a kind of basic optical functional element.Because the restriction of the means of realization, practical at present diffraction grating 1 all is (as shown in Figure 1) of one dimension, and it finishes the diffraction function by the setting of the reflection grating groove 2 of diffraction grating, is mainly used in optical spectrum analysis.Adopt high-precision microfabrication means, can produce the diffraction grating that two-dimensional phase distributes.But with respect to the one dimension diffraction grating, the two-dimensional diffraction gratings that this stationary phase distributes does not have unique function or superior characteristic more, so do not have practicality based on the two-dimensional diffraction gratings of this technology.

1989, Dutchman Shi Mite (Smit) is based on the plane light wave waveguide technology, one-dimensional array waveguide optical grating (as shown in Figure 2) has been proposed, it is made of the planar optical waveguide array 3 of some, after light is by input end 4 inputs, after optical waveguide array 3 is realized PHASE DISTRIBUTION, by output terminal 5 output diffraction lights.With respect to traditional diffraction grating technology, this array waveguide grating can have any diffraction exponent number, and technical support is provided for the planar light that realizes grating is integrated.But it is integrated that this Technical Board has been limited to the plane, also only limited to the application of fiber waveguide device.

Summary of the invention

The purpose of this invention is to provide a kind of Two dimensional Distribution array waveguide grating that has, its Two dimensional Distribution is that phase place and the intensity to light by the array of controls waveguide realizes.Be to utilize optical waveguide to constitute the optical element that to export specific two-dimensional phase and intensity distributions.

In order to achieve the above object, the technical solution used in the present invention is: the optical waveguide by some puts together, and constitutes Two dimensional Distribution optical waveguide array grating; Quantity of optic waveguides is by the diffraction accuracy requirement and the functional characteristic decision of diffraction grating; Two input end face and output end faces of the corresponding respectively formation of two end faces of these waveguides with diffraction grating of Two dimensional Distribution; Each optical waveguide has certain light path size, and this light path size is provided with by the position phase place requirement of this optical waveguide on the end face of pairing diffraction grating.

Said optical waveguide is that rectangular light waveguide or ridge optical waveguide or bar carry optical waveguide or optical fiber.

Said input end face and output end face with diffraction grating of Two dimensional Distribution is planar structure or concave structure or convex configuration.

The useful effect that the present invention has is:

1) adopts optical waveguide to constitute diffraction grating, a kind of implementation method of Two dimensional Distribution diffraction grating is provided with Two dimensional Distribution;

2) adopt optical waveguide to constitute diffraction grating, make the two-dimensional characteristics control of light be more prone to realize the particularly realization of high order diffraction grating with Two dimensional Distribution;

3) light path size by certain optical waveguide is set and optical waveguide are to the decay and the amplification characteristic of light wave, can adjust the phase place and the intensity distributions of two-dimentional light field simultaneously, so this diffraction grating not only can be used as two-dimensional diffraction gratings, can also adjust element as the optical phase and the intensity of other specific needs;

4) because the light path of wherein optical waveguide size and optical waveguide can realize tunable characteristic easily to the decay and the amplification characteristic of light wave, so the diffraction grating of this Two dimensional Distribution can easily be realized adjustable diffraction characteristic.

Description of drawings

Fig. 1 is typical one dimension diffraction grating synoptic diagram;

Fig. 2 is typical planar array waveguide optical grating construction synoptic diagram:

Fig. 3 is a Two dimensional Distribution array waveguide grating synoptic diagram of the present invention;

Fig. 4 is a type of optical waveguide involved in the present invention.

Among the figure: the 1st, the one dimension diffraction grating, the 2nd, the reflection grating groove of diffraction grating, the 3rd, the planar optical waveguide array of some, 4 and 5 is two end faces of array waveguide grating, the 6th, the Two dimensional Distribution array waveguide grating, 7 and 8 is two end faces of Two dimensional Distribution array waveguide grating, the 9th, the part of an amplification in the end face, the 10th, rectangular light waveguide (Fig. 3 is example with the rectangular waveguide), the 11st, ridge optical waveguide, the 12nd, bar carries optical waveguide, and the 13rd, optical fiber.

Embodiment

As shown in Figure 3, the present invention is put together by the optical waveguide of some, constitutes Two dimensional Distribution optical waveguide array grating 6; Quantity of optic waveguides is by the diffraction accuracy requirement and the functional characteristic decision of diffraction grating; Two input end faces (output end face) 7 and output end faces (input end face) 8 of the corresponding respectively formation of two end faces of these waveguides with diffraction grating of Two dimensional Distribution; Each optical waveguide has certain light path size, and this light path size is provided with by the position phase place requirement of this optical waveguide on the end face of pairing diffraction grating.

Optical waveguide can be the rectangular light waveguide 10 (shown in Fig. 4 a) of adopting planar optical waveguide technology to make, the optical waveguide array that is constituted is to adopt the multilayer planar guide technology to be made, each layer is made of the optical waveguide of some again, and the waveguide number of the number of plies and every layer is by the diffraction accuracy requirement and the functional characteristic decision of diffraction grating.

Optical waveguide also can be the ridge optical waveguide 11 (shown in Fig. 4 b) that adopts planar optical waveguide technology to make, the optical waveguide array that is constituted is to adopt the multilayer planar guide technology to be made, each layer is made of the optical waveguide of some again, and the waveguide number of the number of plies and every layer is by the diffraction accuracy requirement and the functional characteristic decision of diffraction grating.

Optical waveguide also can be that the bar that adopts planar optical waveguide technology to make carries optical waveguide 12 (shown in Fig. 4 c), the optical waveguide array that is constituted is that the multilayer planar guide technology is made, each layer is made of the optical waveguide of some again, and the waveguide number of the number of plies and every layer is by the diffraction accuracy requirement and the functional characteristic decision of diffraction grating.

Optical waveguide can also be to adopt optical fiber 13 (shown in Fig. 4 d), and boundling forms.

Input end face (output end face) 7 and output end face (input end face) the 8th with diffraction grating of Two dimensional Distribution, planar structure or concave structure or convex configuration.

Two dimensional Distribution array waveguide grating of the present invention, the light path size of its optical waveguide are to change by the effective refractive index of control optical waveguide, are variable thereby make the PHASE DISTRIBUTION of the light of institute's outgoing on the two-dimentional end face of the diffraction grating that is constituted.The effective refractive index of optical waveguide is to change by various photorefractive effects, comprises electrooptical effect, thermo-optic effect etc.

Two dimensional Distribution array waveguide grating of the present invention, its optical waveguide place light path only can be had a power controlled function to what transmit, thereby to distribute be variable to the light intensity that makes the two dimension of the diffraction grating that is constituted bring out institute's outgoing.Optical waveguide place light path comprises power attenuation function and enlarging function to light to the power controlled function of light, and it is by being provided with optical attenuator and image intensifer is realized in the light path of optical waveguide place.

Embodiments of the present invention are a lot, are embodiment at this with organic polymer multilayer planar optical waveguide technology, but only limit to this embodiment by no means.

With silicon chip or glass is backing material, adopts spin coated film forming method to make the lower limit layer of first layer, makes sandwich layer again, and with photoetching and dry etching, produces the optical waveguide of ground floor.The length of each optical waveguide is by designed diffraction grating decision in the layer.Apply upper limiting layer after finishing sandwich layer.This layer also will play the buffer action of the ground floor and the second layer actually as the lower limit layer of the second layer.Follow and make and the waveguide etching by the sandwich layer of the second layer.With this, the structural parameters according to the number of plies and each layer optical waveguide of designed Two dimensional Distribution array waveguide grating combine with etching phase by multilayer of spin-on, photoetching, successively make.After the making of finishing the multilayer organic polymer optical waveguide, mark two end faces of Two dimensional Distribution array waveguide grating with scribing machine in designed endface position, and end face is polished, finally produce designed Two dimensional Distribution array waveguide grating.

Two dimensional Distribution array waveguide grating to organic polymer can adopt the organic polymer with electro-optical characteristic, on each layer, as required, makes phase-modulator on each one optical waveguide.The phase-modulator of control made can change the phase place of the corresponding exit point of each one optical waveguide institute, thereby realizes having the adjustable array waveguide grating of two-dimensional phase distribution.

Two dimensional Distribution array waveguide grating to organic polymer, on each layer, as required, when making optical waveguide, on each one optical waveguide light path, make optical attenuator, perhaps adopt the organic polymer that is mixed with the light amplification element, and when making optical waveguide, on each one optical waveguide light path, make image intensifer.The optical attenuator or the image intensifer of control made can change the intensity of the corresponding exit point of each one optical waveguide institute, thereby realization have the adjustable array waveguide grating of two-dimensional intensity distribution.

Claims

1. Two dimensional Distribution array waveguide grating, it is characterized in that: the optical waveguide by some puts together, and constitutes Two dimensional Distribution optical waveguide array grating (6); Quantity of optic waveguides is by the diffraction accuracy requirement and the functional characteristic decision of diffraction grating; Two input end faces (7) and output end faces (8) of the corresponding respectively formation of two end faces of these waveguides with diffraction grating of Two dimensional Distribution; Each optical waveguide has certain light path size, and this light path size is provided with by the position phase place requirement of this optical waveguide on the end face of pairing diffraction grating.

2. Two dimensional Distribution array waveguide grating according to claim 1 is characterized in that: said optical waveguide is that rectangular light waveguide (10) or ridge optical waveguide (11) or bar carry optical waveguide (12) or optical fiber (13).

3. Two dimensional Distribution array waveguide grating according to claim 1 is characterized in that: said input end face (7) with diffraction grating of Two dimensional Distribution is planar structure or concave structure or convex configuration with output end face (8).