CN1474244A - Precision gas proportioning device - Google Patents
Precision gas proportioning device Download PDFInfo
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- CN1474244A CN1474244A CNA031296289A CN03129628A CN1474244A CN 1474244 A CN1474244 A CN 1474244A CN A031296289 A CNA031296289 A CN A031296289A CN 03129628 A CN03129628 A CN 03129628A CN 1474244 A CN1474244 A CN 1474244A
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Abstract
The present invention relates to instrument and meter. The precise gas proportioning device of the present invention includes gas inlet, gas flow rate and proportion control system, gas mixer and gas mixture outlet connected together. The gas flow rate and proportion control system includes two or more channels of gas flow rate and proportion control subsystem. The present invention is used in the fields needing precise control of gas component in gas mixture in microelectronic processing, precise analysis, special welding, material purification, etc. to provide gas mixture with reliable proportion, and is favorable to regulating and stabilizing technological parameters and reaching other aims accurately.
Description
Technical field
What the present invention relates to is a kind of accurate gas mixing ratio device, and particularly a kind of accurate gas mixing ratio device that can carry out the automatic control of closed loop belongs to instrument field.
Background technology
At present, existing gas mixing ratio device has two kinds of forms: a kind ofly be, from the gas of source of the gas (gas cylinder or gas pipe line), after the decompressor decompression, by a flowmeter, this gas is quantitatively controlled, entered gas mixer chamber then, if two yuan of gas proportioners, two gas passages are then arranged, if the multicomponent gas proportioner then has a plurality of gas passages, each gas by one independently flowmeter control its flow.The shortcoming of this gas mixing ratio device is: used flowmeter is controlled the open loop that is controlled to be of gas flow, in the use, the actual flow of gas changes with the variation of environment temperature, bleed pressure, when actual flow changes, has only by manual shift and just can get back to original set amount.The pressure of each component gas must balance, otherwise can cause influencing each other of flow between each component gas, even gas with various occurs and flow backwards and play a reversed role.
Another kind of gas mixing ratio device is a combination valve type, and this gas mixing ratio device is by pressure-balanced valve, and ratio adjusting valve, flow control valve and mixing chamber are formed.Find by literature search, Li Ming is at " electric welding machine " 1997, write articles " a kind of novel mixed gases matching device " on the 4:47, this article makes referrals to, and two kinds of gases are after having passed through pressure-balanced valve, make its pressure reach balance and stable, enter ratio adjusting valve again, ratio adjusting valve adopts a pair of coaxial needle valve to carry out adjusted in concert, passes through flow control valve then, the control delivery rate mixes back output by mixing chamber at last.The shortcoming of this gas mixing ratio device is: 1, can only carry out proportioning to two kinds of gases; 2, the metering of gas flow all is open loop, and in the use, the actual flow of gas is subjected to the influence of factors such as environment temperature, bleed pressure, gas usage.When actual flow changes, have only by manual shift and just can get back to original set amount.
Summary of the invention
The objective of the invention is to overcome deficiency of the prior art, a kind of accurate gas mixing ratio device is provided, this proportioner is made up of n gas passage, each path all have one independently closed-loop control system control its flow, make it carry out real-time proportioning, mixing and air feed to two kinds or two or more gas.
The present invention is achieved by the following technical solutions, the present invention mainly comprises: gas feed 1, gas flow and proportioning control system 2, gas mixer 3 and mixed gas outlet 4, gas feed 1 links to each other with gas flow and proportioning control system 2, and gas flow and proportioning control system 2 link to each other with gas mixer 3, gas mixer 3 links to each other with mixed gas outlet 4.
Comprise the above gas flow control system of two-way or two-way in gas flow and the proportioning control system, each road gas flow control system all is made up of flow sensor, signal processing circuit, flow display circuit, flow setting circuit, subtraction circuit, error amplifying circuit, driving circuit and flow control valve.
Sensor converts flow signal to electric signal, is converted to the standard industry control signal of 0-5V again by signal processing circuit, and this signal one tunnel is sent into the flow display circuit, and flow value is shown in real time; Another road obtains an error signal after being subtracted each other by subtraction circuit as the given signal of sending here with flow setting circuit, this error signal is amplified by error amplifier, the signal of error amplifier output, be used for the folding degree of Control Flow variable valve after driving circuit carries out power amplification, the flow control that makes gas is in setting value.
The gas mixing ratio device that adopts this Closed loop Control to make up, compare with existing gas mixing ratio device, its flow is in the Real-time and Dynamic adjustment state, when being subjected to external interference, as environment temperature, bleed pressure, gas circuit change in resistance etc., system can regulate the amount of opening of flow control valve automatically, eliminates the influence of external interference to gas flow.And existing its flow of gas mixing ratio device is open loop control, does not have to resist automatically the ability of external interference.When external condition changes, can only eliminate its influence by the mode of manual intervention.
The feature of the used sensor of gas mixing ratio device of the present invention is that flow signal is converted into electric signal, can carry out closed loop and control automatically, so as long as have the flow biography device or the flowmeter of this feature promptly to can be used for the present invention.
The present invention has substantive distinguishing features and marked improvement, and the essential distinction of the present invention and existing gas mixing ratio device is: the gas flow of existing gas mixing ratio device is open loop control, and the gas flow of the accurate gas mixing ratio device of the present invention is closed-loop control.The present invention some are needed in the accurate control mixture each component gas or to some mixed with little amount in the mixed gas than accurate application scenario of control, as microelectronics processing, rigorous analysis, extraordinary welding, materials purification, the mixed gas of reliable proportioning can be provided, help the technological parameter adjustment with stable, guarantee reaching of work purpose exactly.
Description of drawings
Fig. 1 is a structural representation of the present invention
Fig. 2 is a structured flowchart of the present invention
Fig. 3 is the fundamental diagram of control system in gas flow and the proportioning control system.
Embodiment
As shown in Figure 1 and Figure 2, the present invention mainly comprises: gas feed 1, gas flow and proportioning control system 2, gas mixer 3 and mixed gas outlet 4, gas feed 1 links to each other with gas flow and proportioning control system 2, and gas flow and proportioning control system 2 link to each other with gas mixer 3, gas mixer 3 links to each other with mixed gas outlet 4.
N kind gas (gas 1, gas 2---gas n) from source of the gas enters gas flow and ratio control system 2 by gas feed 1, control the flow of each gas respectively according to the needs of proportioning by gas flow and ratio control system 2, gas flow and ratio control system 2 are exported to gas mixer 3 with the n kind gas of flow control, various component gas mix in gas mixer 3, and gas mixer 3 outputs are exported by gas vent 4 by the mixed gas that ratio requirement mixes.Gas flow and ratio control system 2 are made up of the n path control system, this n path control system is independently each other, closing wherein any one road or a few road does not influence the work of other control system, and this has just determined accurate gas mixing ratio device of the present invention to carry out real-time proportioning, mixing to 2 ~ n kind (n 〉=2) gas.
Show as Fig. 3, comprise the above gas flow control system of two-way or two-way in gas flow and the proportioning control system 2, each road gas flow control system all is made up of gas feed 1, flow sensor 2, signal processing circuit 3, flow display circuit 4, flow setting circuit 5, subtraction circuit 6, error amplifying circuit 7, driving circuit 8, flow control valve 9 and gas vent 10.
Gas feed 1 links to each other with flow sensor 2, flow sensor 2 links to each other with flow control valve 9 with signal processing circuit 3, signal processing circuit 3 links to each other with subtraction circuit 6 with flow display circuit 4, subtraction circuit 6 links to each other with flow setting circuit 5, signal processing circuit 3 and error amplifying circuit 7, driving circuit 8 links to each other with flow control valve 9 with error amplifying circuit 7, and flow control valve 9 links to each other with gas vent 10 with sensor 2.
Gas enters flow sensor 2 from gas feed 1, flow sensor 2 converts flow signal to electric signal, carry out signal Processing such as filtering amplification by signal processing circuit 3, treated good signal one tunnel is given display circuit 4, the flow that shows flows through sensor by display circuit 4, the given signal that another road and flow setting circuit 5 produce subtracts each other the generation error signal by subtraction circuit 6, after error signal is amplified by error amplifier 7, carry out power amplification by driving circuit 8 again, the signal controlling flow control valve 9 that driving circuit 8 produces, thereby the formation closed-loop control, mixed gas is by gas vent 10 outputs.
Claims (4)
1, a kind of accurate gas mixing ratio device, comprise: gas feed (1), gas mixer (3) and mixed gas outlet (4), it is characterized in that also comprising: gas flow and proportioning control system (2), gas feed (1) links to each other with gas flow and proportioning control system (2), gas flow and proportioning control system (2) link to each other with gas mixer (3), gas mixer (3) links to each other with mixed gas outlet (4), comprises the above gas flow control system of two-way or two-way (5) in gas flow and the proportioning control system (2).
2, accurate gas mixing ratio device according to claim 1, it is characterized in that, each road gas flow control system (5) is by gas feed (15), flow sensor (6), signal processing circuit (7), flow display circuit (8), flow setting circuit (9), subtraction circuit (10), error amplifying circuit (11), driving circuit (12), flow control valve (13) and gas vent (14) are formed, its connected mode is: gas feed (15) links to each other with flow sensor (6), flow sensor (6) links to each other with flow control valve (13) with signal processing circuit (7), signal processing circuit (7) links to each other with subtraction circuit (10) with flow display circuit (8), subtraction circuit (10) and flow setting circuit (15), signal processing circuit (3) links to each other with error amplifying circuit (7), driving circuit (8) links to each other with flow control valve (13) with error amplifying circuit (11), and flow control valve (13) links to each other with gas vent (14) with flow sensor (6).
3, accurate gas mixing ratio device according to claim 2 is characterized in that, flow sensor (6) adopts and flow signal can be converted to electric signal and carry out the closed loop flow sensor or the flowmeter of control automatically.
4, accurate gas mixing ratio device according to claim 1 and 2 is characterized in that, each road gas flow control system (5) is independently each other.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNA031296289A CN1474244A (en) | 2003-07-03 | 2003-07-03 | Precision gas proportioning device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNA031296289A CN1474244A (en) | 2003-07-03 | 2003-07-03 | Precision gas proportioning device |
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| Publication Number | Publication Date |
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| CN1474244A true CN1474244A (en) | 2004-02-11 |
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| Application Number | Title | Priority Date | Filing Date |
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| CNA031296289A Pending CN1474244A (en) | 2003-07-03 | 2003-07-03 | Precision gas proportioning device |
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102873476A (en) * | 2011-07-15 | 2013-01-16 | 品翔电子塑胶制品(东莞)有限公司 | Automatic control device for proportion of scaling powder |
| CN103920979A (en) * | 2014-05-01 | 2014-07-16 | 湖南超宇科技有限公司 | Gas flow control method and system of air plasma cutting machine |
| CN104696702A (en) * | 2015-04-09 | 2015-06-10 | 杜卫卫 | Safety gas supply device for chemical equipment |
| CN108355578A (en) * | 2018-03-19 | 2018-08-03 | 深圳沃飞科技有限公司 | A kind of gas mixing ratio method and system for laser cutting |
| CN112108766A (en) * | 2019-06-21 | 2020-12-22 | 南京航空航天大学 | Device and method for reducing air hole defects of double-laser-beam bilateral synchronous welding joint of T-shaped structure |
| CN113813803A (en) * | 2021-06-08 | 2021-12-21 | 福尼斯(南京)表面工程技术有限公司 | High-precision multi-component gas proportioning method for surfacing |
-
2003
- 2003-07-03 CN CNA031296289A patent/CN1474244A/en active Pending
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102873476A (en) * | 2011-07-15 | 2013-01-16 | 品翔电子塑胶制品(东莞)有限公司 | Automatic control device for proportion of scaling powder |
| CN103920979A (en) * | 2014-05-01 | 2014-07-16 | 湖南超宇科技有限公司 | Gas flow control method and system of air plasma cutting machine |
| CN104696702A (en) * | 2015-04-09 | 2015-06-10 | 杜卫卫 | Safety gas supply device for chemical equipment |
| CN108355578A (en) * | 2018-03-19 | 2018-08-03 | 深圳沃飞科技有限公司 | A kind of gas mixing ratio method and system for laser cutting |
| CN112108766A (en) * | 2019-06-21 | 2020-12-22 | 南京航空航天大学 | Device and method for reducing air hole defects of double-laser-beam bilateral synchronous welding joint of T-shaped structure |
| CN113813803A (en) * | 2021-06-08 | 2021-12-21 | 福尼斯(南京)表面工程技术有限公司 | High-precision multi-component gas proportioning method for surfacing |
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