CN1461973A - Lighting optical device, exposure device and exposure method - Google Patents

Lighting optical device, exposure device and exposure method Download PDF

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Publication number
CN1461973A
CN1461973A CN03136537A CN03136537A CN1461973A CN 1461973 A CN1461973 A CN 1461973A CN 03136537 A CN03136537 A CN 03136537A CN 03136537 A CN03136537 A CN 03136537A CN 1461973 A CN1461973 A CN 1461973A
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China
Prior art keywords
compound eye
eye member
illumination
face
light
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CN03136537A
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Chinese (zh)
Inventor
田中裕久
谷津修
豊田光纪
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Nikon Corp
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Nikon Corp
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  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Microscoopes, Condenser (AREA)

Abstract

The present invention provides an optical illumination device that permits an increase in the fill of a multiplicity of light sources that constitute a secondary source formed on an illuminated pupil plane. A fly's eye lens that forms a multiplicity of light sources from a light beam emitted by an optical integrator is disposed in the optical path between the optical integrator and an irradiation surface. The fly's eye lens comprises, in order from the light-source side, a first fly's eye member and a second fly's eye member. A cylindrical lens group arranged in a first direction is formed on each of the light source-side surface of a first fly's eye member and the light source-side surface of a second fly's eye member, and a cylindrical lens is group arranged in a second direction orthogonal to the first direction is formed on each of the irradiation surface side surface of the first fly's eye member and the irradiation surface side surface of the second fly's eye member.

Description

Illumination optics device, exposure device and exposure method
Technical field
The present invention is about a kind of illumination optics device, exposure device and exposure method, particularly, be suitable for being used for the exposure device of micromodule equipments such as semiconductor element, imaging apparatus, liquid crystal display cells, thin-film head by the lithographic technique manufacturing about a kind of illumination optics device.
Background technology
In this typical exposure device, inject fly's-eye lens from the light beam that light source penetrates, form the secondary souce of forming by a plurality of light sources at its rear side focus face.From the light beam of secondary souce, after the restriction by near the aperture diaphragm the rear side focus face that is disposed at fly's-eye lens, inject condenser (condenser lens).The corresponding desirable lighting condition (conditions of exposure) of aperture diaphragm is restricted to desirable shape or size with the shape or the size of secondary souce.
Utilize the overlapping illumination of the light beam of condenser optically focused to form cover up (mask) of fixed to some extent pattern.Seeing through the light of covering up pattern images on the wafer by projection optical system.So, on wafer, cover up pattern and just be projected exposure (transcription).In addition, the pattern that formation is covered up will be made the correct transcription of this fine pattern on wafer by Highgrade integration, obtains uniform Illumination Distribution and be absolutely necessary on wafer.
In having the exposure device of above-mentioned formation,, need to improve the packing density of a plurality of light sources that constitute the secondary souce that is formed at illumination pupil face in order to seek the raising of imaging performance.
The present invention just provides a kind of illumination optics device, forms in view of this problem, can improve the packing density of a plurality of light sources that constitute the secondary souce that is formed at illumination pupil face.And, the purpose of this invention is to provide a kind of exposure device and exposure method, use the illumination optics device of the packing density raising of a plurality of light sources that constitute the secondary souce that is formed at illumination pupil face, can under good imaging performance, carry out good projection exposure.
Summary of the invention
In order to solve this problem, the invention provides a kind of illumination optics device, be based on illumination optics device from the beam lighting plane of illumination of light source; Comprise light integraph in the light path that is disposed between this light source and this plane of illumination, be disposed in the light path between this light integraph and this plane of illumination, form the fly's-eye lens of a plurality of light sources based on light beam from this light integraph; It is characterized in that this fly's-eye lens possesses successively from light source side the first compound eye member and the second compound eye member are arranged, on the face of the light source side of the face of the light source side of this first compound eye member and this second compound eye member, be formed with the cylindrical lens group who arranges along first direction, on the face of the plane of illumination side of the face of the plane of illumination side of this first compound eye member and this second compound eye member, be formed with along the cylindrical lens group who arranges with the second direction of first direction orthogonal.
By the preferable sample attitude of first invention, the radius-of-curvature of each cylindrical lens that forms when the face of the light source side that is located at this first compound eye member is R a, the radius-of-curvature of each cylindrical lens that forms at the face of the light source side of this second compound eye member is R b, the radius-of-curvature of each cylindrical lens that forms at the face of the plane of illumination side of this first compound eye member is R c, the radius-of-curvature of each cylindrical lens that forms at the face of the plane of illumination side of this second compound eye member is R dThe time, satisfy
0.3＜R d/R c＜0.5
0.3＜R b/ R a＜0.5 condition.
And by the preferable sample attitude of first invention, this first compound eye member has quartz, and this second compound eye member has the crystalline material that the light of the following wavelength of 250nm is had permeability.Perhaps in this first compound eye member and this second compound eye member, exist with 1mJ/cm 2Above energy density is by the compound eye member in light-struck zone, and having light to the following wavelength of 250nm, the crystalline material of permeability is arranged is preferable.This crystalline material has the group who constitutes from fluorite, crystal, magnesium fluoride, barium fluoride, lithium fluoride, lanthanum fluoride, strontium fluoride, beryllium fluoride, sodium fluoride, lithium evigtokite and by lithium strontium aluminium fluorite selects at least 1 for preferable.
In addition, by the preferable sample attitude of first invention, on this first compound eye member and this second compound eye member, be formed with the witness marker that is used to make this first compound eye member and this second compound eye member position to coincide.This witness marker possessed and had on the face of the light source side of the face of the light source side of this first compound eye member and this second compound eye member this moment, the sign of the linearity that forms along this second direction, on the face of the plane of illumination side of the face of the plane of illumination side of this first compound eye member and this second compound eye member, being masked as of the linearity that forms along this first direction is preferable.
Preferable sample attitude by first invention, about the entrance pupil face of this first direction of this fly's-eye lens or near it and, be provided with the correction filter of the Illumination Distribution that is used to revise this plane of illumination about the entrance pupil face of this second direction of this fly's-eye lens or near wherein at least one side it.Second witness marker that is formed for this moment this correction filter and this first compound eye member or this second compound eye member position are coincide on this correction filter is preferable.And this second witness marker possessed and had being masked as of the linearity that forms along this first direction or this second direction preferable this moment.
Preferable sample attitude by first invention, the cylindrical lens group's who on the face of the light source side of the face of the light source side of this first compound eye member and this second compound eye member, forms spacing along this first direction, and the cylindrical lens group who on the face of the plane of illumination side of the face of the plane of illumination side of this first compound eye member and this second compound eye member, forms along spacing at least one side wherein of this second direction below 2mm.
By the preferable sample attitude of first invention, this first compound eye member and this second compound eye member at least one side wherein are for movably constituting.This moment, this first compound eye member and this second compound eye member at least one side wherein became movably to constitute preferable along optical axis for the control of the Illumination Distribution of the control of the size of the field of illumination of this plane of illumination or this plane of illumination.
Control for the Illumination Distribution of the control of the size of the field of illumination of this plane of illumination or this plane of illumination, this first compound eye member and this second compound eye member at least one side wherein become movably to constitute preferable along this first direction and this second direction at least one side wherein.In addition, for the control of the Illumination Distribution of the pupil face that throws light on, this first compound eye member and this second compound eye member at least one side wherein, around this first direction and this second direction at least one side's wherein direction, become rotatable constitute preferable.
Second invention of the present invention provides a kind of exposure device, it is characterized in that possessing the illumination optics device that first invention is arranged, and is used for the graphic pattern projection of covering up of this plane of illumination configuration is exposed to the projection optical system of photonasty substrate.At this moment, by make this cover up and this photonasty substrate along this projection optical system being relatively moved with the optically corresponding direction of this first direction, this graphic pattern projection of covering up is exposed on this photonasty substrate to preferable.
And this cylindrical lens group of light source side who it is characterized in that being formed at this first compound eye member this moment is along the spacing of this first direction, less than this cylindrical lens group of the plane of illumination that is formed at this first compound eye member spacing along this second direction.In addition this moment when this cylindrical lens group that establish the plane of illumination that is formed at this first compound eye member be a along the spacing of this second direction, if being formed at this cylindrical lens group of the light source side of this first compound eye member is b along the spacing of this first direction, it is preferable then satisfying 1.2＜a/b＜1.3.More preferably satisfy 2.6＜a/b＜4.0.
The present invention also provides a kind of exposure method, it is characterized in that the illumination optics device illumination by first invention is covered up, and the picture projection exposure that will be formed at the illuminated pattern of covering up is on the photonasty substrate.
Feature of the present invention is to be used for based on the illumination optics device from the beam lighting plane of illumination of light source, and possessing has in the light path that is disposed between this light source and this plane of illumination, forms the fly's-eye lens of a plurality of light sources based on the light beam from this light source; This fly's-eye lens has the first compound eye member and the second compound eye member successively from light source side; Face in the light source side of the face of the light source side of this first compound eye member and this second compound eye member is formed with the cylindrical lens group who arranges along first direction; At the face of the plane of illumination side of the face of the plane of illumination side of this first compound eye member and this second compound eye member, be formed with along the cylindrical lens group who arranges with the second direction of this first direction orthogonal; The radius-of-curvature of each cylindrical lens that forms when the face of the light source side that is located at this first compound eye member is R a, the radius-of-curvature of each cylindrical lens that forms at the face of the light source side of this second compound eye member is R b, the radius-of-curvature of each cylindrical lens that forms at the face of the plane of illumination side of this first compound eye member is R c, the radius-of-curvature of each cylindrical lens that forms at the face of the plane of illumination side of this second compound eye member is R dThe time, satisfy
0.3＜R d/R c＜0.5
0.3＜R b/ R a＜0.5 condition.
The feature of the 5th invention of the present invention is to possess the fly's-eye lens that forms a plurality of light sources in the light path that is disposed between this light source and this plane of illumination, based on the light beam from this light source is arranged based on the illumination optics device from the beam lighting plane of illumination of light source being used for; This fly's-eye lens has the first compound eye member and the second compound eye member successively from light source side; Face in the light source side of the face of the light source side of this first compound eye member and this second compound eye member is formed with the cylindrical lens group who arranges along first direction; At the face of the plane of illumination side of the face of the plane of illumination side of this first compound eye member and this second compound eye member, be formed with along the cylindrical lens group who arranges with the second direction of this first direction orthogonal; In this first compound eye member and this second compound eye member, exist with 1mJ/cm 2Above energy density is had the crystalline material that the light of the following wavelength of 250nm is had permeability by the compound eye member in light-struck zone.
The feature of the 6th invention of the present invention is to be used for based on the illumination optics device from the beam lighting plane of illumination of light source, possessing has in the light path that is disposed between this light source and this plane of illumination, by arranging along first direction and with the optical element that a plurality of optical elements that the second direction of this first direction orthogonal at least one direction is wherein arranged constitute, and be disposed at that this optical element is arranged and this plane of illumination between light path in, form the fly's-eye lens of a plurality of light sources based on light beam from this optical element; This fly's-eye lens has the first compound eye member and the second compound eye member successively from light source side; Face in the light source side of the face of the light source side of this first compound eye member and this second compound eye member is formed with the cylindrical lens group who arranges along first direction; Face in the plane of illumination side of the face of the plane of illumination side of this first compound eye member and this second compound eye member is formed with the cylindrical lens group who arranges along second direction.
By the preferable sample attitude of the 6th invention, this optical element is arranged and formed a plurality of light sources based on the light beam from this light source is preferable.And, in the 6th above-mentioned invention, this optical element is arranged based on the light beam from this light source, will hold light intensity in the central area that comprises optical axis and be set to light beam less than the light intensity distributions in the zone around this central area, and this fly's-eye lens is supplied with to preferable.In the 6th above-mentioned invention, the configuration relay optical system is preferable in the light path between this optical element arrangement and this fly's-eye lens.
Description of drawings
Fig. 1 shows is the summary pie graph that possesses relevant for the exposure device of the illumination optics device of embodiments of the invention.
Fig. 2 shows is the oblique view that the summary of the miniature fly's-eye lens of Fig. 1 constitutes.
Fig. 3 shows is the key diagram of effect of the miniature fly's-eye lens of Fig. 1.
What Fig. 4 showed is the pattern diagram that the miniature fly's-eye lens of Fig. 1 is provided with a pair of correction filter.
What Fig. 5 showed is the formation of the first correction filter and the skeleton diagram of device.
What Fig. 6 showed is the formation of the second correction filter and the skeleton diagram of device.
The process flow diagram of this method that Fig. 7 shows when being the semiconductor equipment that obtains as micromodule equipment.
The process flow diagram of this method that Fig. 8 shows when being the liquid crystal display cells that obtains as micromodule equipment.
Symbol description
1 light source
4 diffraction (diffraction) optical element (light integraph)
5 afocal lenss
6,60,61 diffraction optical elements
7 zoom lens
8 miniature fly's-eye lenses (fly's-eye lens)
9 light-gathering optics
11,12 cylindrical lens groups
13,14 signs
15,16 revise filter
20 input methods
21 control system
22～25 drive systems
M covers up
The PL projection optical system
The W wafer
Embodiment
Below based on the description of drawings embodiments of the invention.
Fig. 1 is the summary pie graph that possesses relevant for the exposure device of the illumination optics device of embodiments of the invention.In Fig. 1, be that the normal direction of wafer W is provided with the Z axle along the photonasty substrate respectively, the direction that is parallel to the paper of Fig. 1 in wafer face is provided with Y-axis, and the direction perpendicular to the paper of Fig. 1 in wafer face is provided with X-axis.In Fig. 1, illumination optics device is set to and can carries out the endless belt illumination in addition.
The exposure device of Fig. 1 possesses the light source 1 that has as being used for supplying with exposure light (illumination light), for example supply with the 248nm wavelength light KrF excimer laser light source or supply with the ArF excimer laser light source of the light of 193nm wavelength.The parallel light beam of cardinal principle along the ejaculation of Z direction from light source 1 has the rectangular-shaped section along the elongated extension of directions X, the optical beam expander 2 that incident is made of a pair of lens 2a and 2b.Each lens 2a and 2b in the paper of Fig. 1 (in the YZ plane) have negative refracting power and positive refracting power respectively.Therefore, the light beam of incident beam extender 2 is extended in the paper of Fig. 1, be shaped as have the light beam of section of fixed rectangular shape.
By the parallel light beam of cardinal principle as the optical beam expander 2 of shaping optical system, by curved reflectors 3 by deflection Y directions after, by diffraction (diffraction) optical element 4 incident afocal lenss 5.Usually diffraction optical element constitutes by the section difference that forms the spacing with exposure light (illumination light) wavelength degree on glass substrate, has the effect of incident beam to desirable angle diffraction that make.Specifically, diffraction optical element 4 has the function of the light intensity distributions of (or Fei Langhe fraunhofer-diffraction zone) formation circle in its far field in the occasion of the parallel beam incident that rectangular cross section is arranged.Therefore,, form circular light intensity distributions, the light beam of circular cross section is promptly arranged in the pupil position of afocal lens 5 by the light beam of diffraction optical element 4.
In addition, diffraction optical element 4 adopts the formation that can keep out of the way from illumination path.Diffraction optical element 4 from illumination path keep out of the way and in the setting of illumination path, by carrying out based on the drive system 22 of moving from the instruction of control system 21.Afocal lens 5 adopt can simultaneously keep afocal system (no focus optical system) one side fixed scope make multiplying power change formation continuously.The multiplying power of afocal lens 5 changes by carrying out based on the drive system 23 of moving from the instruction of control system 21.The illuminating diffraction optical element 6 of light beam incident endless belt by afocal lens 5.Afocal lens 5 is with the diffraction surfaces of dispersing initial point and diffraction optical element 6 of diffraction optical element 4 conjugated optically.And light harvesting is in the diffraction surfaces of diffraction optical element 6 or near any numerical aperture of light beam of face it, and the multiplying power that exists with ... afocal lens 5 changes.
The illuminating diffraction optical element 6 of endless belt has the function that forms the light intensity distributions of annular in its far field in the occasion of parallel beam incident.In addition, diffraction optical element 6 adopts and takes off freely illumination path is slotting, and the formation that can switch with the diffraction optical element 61 that 4 extremely illuminating diffraction optical elements 60 and circular illumination are used.The formation of the diffraction optical element of using about 4 extremely illuminating diffraction optical elements 60 and circular illumination 61 and acting on is described later.Switching between the diffraction optical element 61 that illuminating diffraction optical element 6, the 4 extremely illuminating diffraction optical elements 60 of endless belt, circular illumination are used is by carrying out based on the drive system 24 of moving from the instruction of control system 21.
Light beam incident zoom lens 7 by diffraction optical element 6.Near the rear side focus face of zoom lens 7, be positioned by the plane of incidence (i.e. the plane of incidence of the first compound eye member 8a) that is followed successively by the miniature fly's-eye lens (or fly's-eye lens) 8 that the first compound eye member 8a and the second compound eye member 8b constitute from light source side.In addition, miniature fly's-eye lens 8 has as the function that forms the light integraph of a plurality of light sources based on incident beam, but about its detailed formation and act on and be described later.
As mentioned above, from the light beam of the light intensity distributions of the circle of the pupil position that is formed at afocal lens 5 by diffraction optical element 4, after penetrating from afocal lens 5, become have various angle compositions light beam to diffraction optical element 6 incidents.That is, diffraction optical element 4 constitutes the light integraph with angle light beam formation effect.On the other hand, diffraction optical element 6 has the function that forms the light intensity distributions of annular in its far field in the occasion of parallel beam incident.Therefore, the light beam by diffraction optical element 6 is the rear side focus face of zoom lens 7 plane of incidence of miniature fly's-eye lens 8 (and then), and forming for example is the field of illumination of the ring-band shape at center with optical axis AX.
The external diameter of the field of illumination of the ring-band shape that forms at the plane of incidence of miniature fly's-eye lens 8 exists with ... the focal length of zoom lens 7 and changes.Like this, zoom lens 7 with the plane of incidence of diffraction optical element 6 and miniature fly's-eye lens 8 in fact with the combination that concerns of Fourier transform.In addition, the variation of the focal length of zoom lens 7 is by carrying out based on the drive system 25 of moving from the instruction of control system 21.The light beam of the miniature fly's-eye lens 8 of incident is cut apart by two dimension, at the rear side focus face of miniature fly's-eye lens 8, forms and a plurality of light sources (to call " secondary souce " in the following text) by the identical ring-band shape in the field of illumination that forms to the incident beam of miniature fly's-eye lens 8.
Come the light beam of the secondary souce of the ring-band shape that the rear side focus face of comfortable miniature fly's-eye lens 8 forms, accept the light harvesting effect of light-gathering optics 9 after, overlapping illumination forms the M that covers up of fixed to some extent pattern.Seeing through the light beam of covering up M, by projection optical system PL, is to form the picture of covering up pattern on the wafer W at the photonasty substrate.Of this sort by with the plane (XY plane) of the optical axis AX orthogonal of projection optical system PL in the two-dimentional drive controlling wafer W of one side simultaneously carry out single exposure or scan exposure, in each exposure area of wafer W the pattern of covering up M is exposed successively.
In addition, single exposure is according to so-called substep repetitive mode, and pattern is covered up in the disposable exposure in each exposure area of wafer.The shape of covering up the field of illumination on the M this moment becomes near foursquare rectangle.On the other hand, scan exposure is according to so-called substep scan mode, and one side makes to be covered up and wafer relatively moves to projection optical system, and one covers up pattern in the face of each exposure area scan exposure of wafer.The shape of covering up the field of illumination on the M is that the ratio on minor face and long limit is for example 1: 3 rectangular-shaped.
When present embodiment changed in the multiplying power of afocal lens 5, the centre-height of the secondary souce of ring-band shape (with the distance of the optical axis AX of the center line of circle) did not change, just its width [difference of external diameter (diameter) and internal diameter (diameter) 1/2] variation.That is, change, can change the size (external diameter) and shape (the endless belt ratio: inner/outer diameter) thereof of the secondary souce of ring-band shape simultaneously by the multiplying power that makes afocal lens 5.
And when the focal length of zoom 7 changed, the endless belt of the secondary souce of ring-band shape did not change than, and centre-height and width thereof change simultaneously.That is, change by the focal length that makes zoom lens 7, can not change ring-band shape secondary souce endless belt than and change its external diameter.This example suitably changes by the focal length of multiplying power that makes afocal lens 5 and zoom lens 7 whereby, the external diameter of the secondary souce of ring-band shape is changed, and only change its endless belt ratio.
As mentioned above, diffraction optical element 6 adopts illumination path is inserted the formation of taking off freely and can switch with the diffraction optical element 61 that 4 extremely illuminating diffraction optical elements 60 and circular illumination are used.Below about describing by 4 utmost points illumination that diffraction optical element 60 alternative diffraction optical elements 6 is set in gained in the illumination path.4 extremely illuminating diffraction optical elements 60 have the function that forms the light intensity distributions of 4 point-like in its far field in the occasion of parallel beam incident.Therefore the light beam by refraction optical element 60, for example forming by optical axis AX at the plane of incidence of miniature fly's-eye lens 8 is the field of illumination of 4 utmost point shapes that constitute of the field of illumination of 4 circles at center.The result also forms the secondary souce of 4 utmost point shapes identical with the field of illumination that forms at its plane of incidence at the rear side focus face of miniature fly's-eye lens 8.
Same with the occasion of endless belt illumination in 4 utmost points illuminations, also can change and change the external diameter (being external in the diameter of a circle of the area source of 4 circles) of the secondary souce of 4 utmost point shapes and endless belt simultaneously by the multiplying power that makes afocal lens 5 than (in be connected to the diameter of a circle of the area source of 4 circles/the be external in diameter of a circle of the area source of 4 circles).And, change by the focal length that makes zoom lens 7, can not change 4 utmost point shapes secondary souce endless belt than and change its external diameter.The result suitably changes by the focal length of multiplying power that makes afocal lens 5 and zoom lens 7, and the external diameter that can not make the secondary souce of 4 utmost point shapes changes and only changes its endless belt ratio.
Then, about by diffraction optical element 4 is kept out of the way from illumination path, the diffraction optical element of simultaneously circular illumination being used 61 substitutes that diffraction optical elements 6 or 60 are set in the illumination path and the circular illumination that obtains describes.The light beam incident afocal lens 5 of the section of rectangle is arranged along optical axis AX this moment.Corresponding its multiplying power of the light beam of incident afocal lens 5 is extended or dwindle, and still 5 penetrates incident diffraction optical element 61 for the light beam of section that rectangle is arranged along optical axis AX from afocal lens.
The diffraction optical element 61 that circular illumination is used is same with diffraction optical element 4, and the occasion of parallel beam incident of the section of rectangle is arranged, and has the function that forms circular light intensity distributions in the far field.Therefore the circular light beam that utilizes diffraction optical element 61 to form is the field of illumination of central circular in the plane of incidence formation of miniature fly's-eye lens 8 with optical axis AX by zoom lens 7.It is the secondary souce of central circular that the result also forms with optical axis AX at the rear side focus face of miniature fly's-eye lens 8.This moment, the focal length by multiplying power that makes afocal lens 5 or zoom lens 7 changed, and can suitably change the external diameter of circular secondary souce.
Below simply describe about change action of the illumination of present embodiment etc.At first, will be about should be according to substep repetitive mode or the substep scan mode various information of covering up of exposing successively etc., by input methods such as keyboard 20 input control systems 21.Control system 21 will be remembered storage part in inside in advance about information such as the various only live widths of covering up (resolution), the depths of focus, and reply is supplied with appropriate control signals from the input of input method 20 to drive system 22～25.
That is, when carrying out the endless belt illumination on the basis of the only resolution and the depth of focus, drive system 24 is located the illuminating diffraction optical element 6 of endless belt based on the instruction from control system 21 in illumination path.Then, obtain the secondary souce of the ring-band shape of desirable size (external diameter) and endless belt ratio for rear side focus face at miniature fly's-eye lens 8, drive system 23 is based on the multiplying power of setting afocal lens 5 from the instruction of control system 21, and drive system 25 is based on the focal length of setting zoom lens 7 from the instruction of control system 21.
In addition, as required by utilizing drive system 23 that the multiplying power of afocal lens 5 is changed, and utilize drive system 25 that the focal length of zoom lens 7 is changed, the size and the endless belt ratio of the secondary souce of the ring-band shape that the rear side focus face at miniature fly's-eye lens 8 that can suitably change forms.Like this in the formation of the secondary souce of ring-band shape, can not lose light quantity substantially and make the size of secondary souce of ring-band shape and endless belt than suitably changing, carry out various endless belt illumination.
When carrying out the illumination of 4 utmost points on the basis of the only resolution and the depth of focus, drive system 24 is located 4 extremely illuminating diffraction optical elements 6 based on the instruction from control system 21 in illumination path.Then, obtain the secondary souce of 4 utmost point shapes of desirable size (external diameter) and endless belt ratio for rear side focus face at miniature fly's-eye lens 8, drive system 23 is based on the multiplying power of setting afocal lens 5 from the instruction of control system 21, and drive system 25 is based on the focal length of setting zoom lens 7 from the instruction of control system 21.
As required by utilizing drive system 23 that the multiplying power of afocal lens 5 is changed, and utilize drive system 25 that the focal length of zoom lens 7 is changed, the size and the endless belt ratio of the secondary souce of 4 utmost point shapes that the rear side focus face at miniature fly's-eye lens 8 that can suitably change forms.Like this in the formation of the secondary souce of 4 utmost point shapes, can not lose light quantity substantially and make the size of secondary souce of 4 utmost point shapes and endless belt than suitably changing, carry out various 4 utmost points illumination.
When the basic enterprising circular illumination that works normal in the only resolution and the depth of focus, drive system 22 is based on the instruction from control system 21, and diffraction optical element 4 is kept out of the way from illumination path.And drive system 24 is located the diffraction optical element 61 that circular illumination is used based on the instruction from control system 21 in illumination path.Then, in order to obtain the secondary souce of the circle of desirable size (external diameter) at the rear side focus face of miniature fly's-eye lens 8, drive system 23 is based on the multiplying power of setting afocal lens 5 from the instruction of control system 21, and drive system 25 is based on the focal length of setting zoom lens 7 from the instruction of control system 21.
As required by utilizing drive system 25 that the focal length of zoom lens 7 is changed, the size of the secondary souce of the circle that the rear side focus face at miniature fly's-eye lens 8 that can suitably change forms.Like this in the formation of the secondary souce of circle, can not lose light quantity substantially and σ value (the light incident side numerical aperture of the pupil footpath of the external diameter/projection optical system of σ value=secondary souce or the emitting side numerical aperture/projection optical system of σ value=lamp optical system) is suitably changed, carry out various circular illumination.
Fig. 2 is the oblique view that the summary of the miniature fly's-eye lens of Fig. 1 constitutes.Fig. 3 is the key diagram of effect of the miniature fly's-eye lens of Fig. 1.With reference to Fig. 2, miniature fly's-eye lens 8 is by the first compound eye member 8a that is disposed at light source side and be disposed at the second compound eye member 8b that covers up side (plane of illumination side) and constitute.Though the first compound eye member 8a and the second compound eye member 8b have same formation on the whole, the radius-of-curvature of its plane of refraction, its material etc. may not be consistent.
In more detail, on the face of the light source side of the face of the light source side of the first compound eye member 8a and the second compound eye member 8b, be formed with the cylindrical lens group 11a and the 11b that arrange along directions X respectively.That is, cylindrical lens group 11a that forms on the face of the light source side of the face of the light source side of the first compound eye member 8a and the second compound eye member 8b and 11b have the spacing p1 along directions X.
On the other hand, on the face of covering up side of the face of covering up side of the first compound eye member 8a and the second compound eye member 8b, be formed with the cylindrical lens group 12a and the 12b that arrange along the Z direction respectively.That is, cylindrical lens group 12a and the 12b that forms on the face of covering up side of the face of covering up side of the first compound eye member 8a and the second compound eye member 8b has along the spacing p2 of Z direction.In the present embodiment, the spacing p1 of cylindrical lens group 11a that forms on the face of light source side and 11b be set less than cylindrical lens group 12a that forms on the face of covering up side and the spacing p2 of 12b.
And, on the face of the light source side of the face of the light source side of the first compound eye member 8a and the second compound eye member 8b, be formed at respectively along corresponding position on the optics of the both sides of directions X along the sign 13a of the linearity of Z direction and 13b.Equally, on the face of covering up side of the face of covering up side of the first compound eye member 8a and the second compound eye member 8b, be formed at respectively along corresponding position on the optics of the both sides of Z direction along the sign 14a of the linearity of directions X and 14b.Cover up sign 13a, 13b, 14a, 14b for for example carving the ditch of being located at the linearity on the substrate that constitutes the first compound eye member 8a and the second compound eye member 8b.
With reference to Fig. 3 (a), be conceived to the refraction action refraction action of XY plane (promptly about) about the directions X of miniature fly's-eye lens 8, the cylindrical lens group 11a in (left side among the figure) is cut apart by the corrugated with spacing p1 along directions X along the parallel beam of the miniature fly's-eye lens 8 of optical axis AX incident by the light source side that is formed at the first fly's-eye lens 8a.Then, the light beam of each cylindrical lens of incident cylindrical lens group 11a, after its plane of refraction is subjected to the light harvesting effect, the cylindrical lens group 11b of the light source side that is formed at the second compound eye member 8b wherein the plane of refraction of corresponding cylindrical lens be subjected to the light harvesting effect, light harvesting is on the rear side focus face 8c of miniature fly's-eye lens 8.
On the other hand, with reference to Fig. 3 (b), be conceived to the refraction action refraction action of Z Y plane (promptly about) about the Z direction of miniature fly's-eye lens 8,, cut apart by the corrugated with spacing p2 by the cylindrical lens group 12a that covers up side (right side among the figure) that is formed at the first fly's-eye lens 8a along the parallel beam of the miniature fly's-eye lens 8 of optical axis AX incident along the Z direction.Then, the light beam of each cylindrical lens of incident cylindrical lens group 12a, after its plane of refraction is subjected to the light harvesting effect, plane of refraction at the wherein corresponding cylindrical lens of the cylindrical lens group 12b that covers up side that is formed at the second compound eye member 8b is subjected to the light harvesting effect, and light harvesting is on the rear side focus face 8c of miniature fly's-eye lens 8.
In addition, about the position of the entrance pupil face of the directions X of miniature fly's-eye lens 8 and inequality, more be positioned at light source side about the entrance pupil face of Z direction about the entrance pupil face of directions X about the position of the entrance pupil face of Z direction.Though the miniature fly's-eye lens 8 of present embodiment constitutes by the first compound eye member 8a and the second compound eye member 8b along optical axis AX arranged spaced like this, but and will the size of p1 be arranged at directions X, have in the Z direction p2 size a plurality of lens elements in length and breadth and the common fly's-eye lens that constitutes of dense arrangement, bring into play same optics function.
Yet, in the present embodiment, be different from the common fly's-eye lens that each plane of refraction forms two-dimentional curved surface shape (dome shape), each plane of refraction that constitutes the first compound eye member 8a of miniature fly's-eye lens 8 and the second compound eye member 8b forms the curved surface shape (cylinder is planar) of one dimension, so handling ease, and then can reduce manufacturing cost.Be the occasion of the miniature fly's-eye lens below the 2mm as minimum spacing p1 particularly, the reduction effect of manufacturing cost is remarkable.By the way, the miniature fly's-eye lens 8 of present embodiment can be by for example grinding manufacturings such as cutting processing, etching and processing, mold pressing processing.
And, dispose diffraction optical element 4 in the light path of present embodiment between light source 1 and miniature fly's-eye lens 8 as the light integraph, so, make each light sources of a plurality of light sources (secondary souce) that the rear side focus face that is formed in miniature fly's-eye lens 8 forms extended and light source interval to each other is reduced by the angle light beam formation effect of diffraction optical element 4.As a result, because present embodiment can make the compactedness of a plurality of light sources of the secondary souce that is formed in illumination pupil face (the rear side focus face of miniature fly's-eye lens 8) formation improve, so can under good imaging performance, carry out good projection exposure.
Conditional (1) and (2) below present embodiment satisfies in addition are ideal.
0.3＜R d/R c＜0.5 (1)
0.3＜R b/R a＜0.5 (2)
Here Ra is the radius-of-curvature of each cylindrical lens (11a) of forming of the face in the light source side of the first compound eye member 8a, R bThe radius-of-curvature of each cylindrical lens (11b) that forms for face in the light source side of the second compound eye member 8b.In addition, R cThe radius-of-curvature of each cylindrical lens (12a) that forms for the face of covering up side at the first compound eye member 8a, R dThe radius-of-curvature of each cylindrical lens (12b) that forms for the face of covering up side at the second compound eye member 8b.
When being lower than the lower limit of conditional (1), the influence that the foozle of the plane of refraction of covering up side of the second compound eye member 8b (cylindrical lens group 12b) brings for the Illumination Distribution of wafer conjugate plane (comprising wafer face) becomes excessive, so unsatisfactory.On the other hand, when the higher limit of greater than condition formula (1), the influence that the foozle of the plane of refraction of covering up side of the first compound eye member 8a (cylindrical lens group 11b) brings for the Illumination Distribution of wafer conjugate plane becomes excessive, so unsatisfactory.
Equally, when being lower than the lower limit of conditional (2), the influence that the foozle of the plane of refraction of the light source side of the second compound eye member 8b (cylindrical lens group 12a) brings for the Illumination Distribution of wafer conjugate plane becomes excessive, so unsatisfactory.In addition, when the higher limit of greater than condition formula (2), the influence that the foozle of the plane of refraction of the light source side of the first compound eye member 8a (cylindrical lens group 11a) brings for the Illumination Distribution of wafer conjugate plane becomes excessive, so unsatisfactory.
And in the present embodiment, the first compound eye member 8a utilizes quartzy formation, and second compound eye member 8b utilization forms preferable to the crystalline material that exposure light has permeability.Here, the lithium evigtokite), LiSrAlF6 (LiSrAlF6: lithium strontium aluminium fluorite) as the crystalline material that the light to the wavelength below the 250nm has permeability, can use fluorite, crystal, magnesium fluoride, barium fluoride, lithium fluoride, lanthanum fluoride, strontium fluoride, beryllium fluoride, sodium fluoride, LiCaAlF6 (LiCaAlF6:.
Above-mentioned crystalline material is to the higher rayed of the energy density also optical material of easy damaged not.As shown in Figure 3, in miniature fly's-eye lens 8, compare with the first compound eye member 8a that is disposed at light source side, the light-struck energy density that is disposed at the first compound eye member 8b that covers up side uprises.Therefore, at the lower first compound eye member 8a materials used cost of energy density and the quartz of low cost of manufacture, at the second higher compound eye member 8b of energy density, materials used cost and manufacturing cost are higher but to have the above-mentioned crystalline material that is difficult for forming by rayed the characteristic of damage be preferable.
And, among the first compound eye member 8a and the second compound eye member 8b, exist by 1mJ/cm by same reason 2It is preferable that above energy density is utilized above-mentioned crystalline material to form by the compound eye member in light-struck zone.This means when in the both sides of the first compound eye member 8a and the second compound eye member 8b, existing by 1mJ/cm 2Above energy density is during by light-struck zone, and it is preferable to utilize above-mentioned crystalline material to form both sides' compound eye member 8a and 8b.
In addition in the present embodiment, the first compound eye member 8a and the second compound eye member 8b position are coincide, promptly, make cylindrical lens group 11a that the face in the light source side of the first compound eye member 8a forms and optically coincide the position at the cylindrical lens group 11b that the face of the light source side of the second compound eye member 8b forms, make cylindrical lens group 12a that the face of covering up side at the first compound eye member 8a forms simultaneously and the cylindrical lens group 12b that forms at the face of covering up side of the second compound eye member 8b optically to coincide be important in the position.
In view of this, in the present embodiment, one side uses for example microscopical suitable observation place to observe the first compound eye member 8a and the second compound eye member 8b along optical axis AX, one side is consistent at directions X with the sign 13b of the face of the light source side that is formed at the second compound eye member 8b for the sign 13a of the face that makes the light source side that is formed at the first compound eye member 8a, make the sign 14a of the face of covering up side that is formed at the first compound eye member 8a consistent in the Z direction simultaneously, and make the first compound eye member 8a and the second compound eye member 8b position coincide (calibration) for preferable with the sign 13b of the face of covering up side that is formed at the second compound eye member 8b.
Fig. 4 is the pattern diagram that the miniature fly's-eye lens of Fig. 1 is provided with a pair of correction filter.Fig. 5 and Fig. 6 are respectively that the first correction filter and second is revised the formation of filter and the skeleton diagram of device.Present embodiment as shown in Figure 4, about near the entrance pupil face of the directions X of miniature fly's-eye lens 8 or its, it is preferable being provided for the Illumination Distribution (uneven illumination) of wafer face (plane of illumination) is revised filter (irregular figure filter, random patternedfilter) 15 along first of directions X correction.And about near the entrance pupil face of the Z direction of miniature fly's-eye lens 8 or its, be provided for the Illumination Distribution (uneven illumination) of wafer conjugate plane (plane of illumination) second is revised filter (irregular figure filter) 16 for preferable along what Y direction (direction optically corresponding with the Z direction of miniature fly's-eye lens 8) was revised.
As shown in Figure 5, the first correction filter 15 has the form of the planopaallel plate identical with the first compound eye member 8a on the whole.And, revise on the face (being generally face on one side) of the light source side of filter 15 first, each cylindrical lens for corresponding to the cylindrical lens group 12a that forms on the face of the light source side of the first compound eye member 8a makes along the rectangular-shaped irregular figure 15a of the elongated extension of Z direction to form with spacing p1 along directions X.In addition, revise on the face of light source side of filter 15,, be formed with along a pair of sign 15b of the linearity of Z direction for corresponding to a pair of sign 13a that on the face of the light source side of the first compound eye member 8a, forms first.
Equally as shown in Figure 6, second revises the form that filter 16 also has planopaallel plate, and on the face of one side, each cylindrical lens for corresponding to the cylindrical lens group 12b that forms on the face of the light source side of the second compound eye member 8b makes along the rectangular-shaped irregular figure 16a of the elongated extension of directions X to form with spacing p2 along the Z direction.And, revise on a side the face of filter 16 second, for corresponding to a pair of sign 14a (and then a pair of sign 14b) that on the face of covering up side of the first compound eye member 8a, forms, be formed with along a pair of sign 16b of the linearity of Z direction on the face of covering up side of the second compound eye member 8b, forming.In addition, indicate 15b and 16b and be located at the ditch of the linearity on the substrate that for example constitutes the first correction filter 15 and the second correction filter 16 for this.
Revise the effect of filter 16 like this by the first correction filter 15 and second, can on wafer face (plane of illumination), obtain uniform Illumination Distribution.But making this moment the first correction filter 15 and second revise the filter 16 and the first compound eye member 8a and the second compound eye member 8b position coincide, promptly, cylindrical lens group 11a that face in the light source side of the first compound eye member 8a forms and a plurality of irregular figure 15a that form at first face of revising the light source side of filter 15 are optically coincide the position, make the cylindrical lens group 12a that the face of covering up side at the first compound eye member 8a forms (and then the cylindrical lens group 12b that forms for the face of covering up side) simultaneously at the second compound eye member 8b and a plurality of irregular figure 16a of forming at second face of revising the light source side of filter 16 optically to coincide be important in the position.
In view of this, in the present embodiment, one side is for example used microscope to observe first along optical axis AX and is revised filter 15 and second and revise filter 16 and the first compound eye member 8a and the second compound eye member 8b, one side is for the sign 13a of the face that makes the light source side that is formed at the first compound eye member 8a and to be formed at the sign 15b of face of light source side of the first correction filter 15 consistent at directions X, make the sign 14a (and then for being formed at the sign 14b of the face of covering up side of the second compound eye member 8b) of the face of covering up side that is formed at the first compound eye member 8a simultaneously and be formed at second that to revise the sign 16b of face of light source side of filter 16 consistent in the Z direction, and make first revise filter 15 and second revise the filter 16 and the first compound eye member 8a and the second compound eye member 8b position coincide (calibration) be preferable.
Yet, though above-mentioned explanation is being revised filter 15 about being provided with first near the entrance pupil face of the directions X of miniature fly's-eye lens 8 or its, about the entrance pupil face of Z direction and near be provided with second and revise filter 16, but when the occasion of the exposure device that carries out scan exposure according to the substep scan mode, also can omit the setting of the second correction filter 16.In other words, in the occasion of carrying out the exposure device of whole exposure according to the substep repetitive mode, the first correction filter 15 and second is revised 16 liang of sides of filter and all is provided with ideal.
When present embodiment is applicable to the exposure device of scan exposure type, the spacing p2 that the spacing p1 along directions X of cylindrical lens group 11a and 11b is set along the Z direction less than cylindrical lens group 12a and 12b, so, begin to take shape along the exposure area of the elongated rectangular shape of Y direction (direction optically corresponding) with the Z direction of miniature fly's-eye lens 8 along on the wafer W on XY plane.Then, on wafer W, cover up pattern and be scanned, have optically the Y direction size of corresponding spacing p2 and rectangular-shaped exposure area with directions X size of corresponding displacement (scanning distance) by final formation of scan exposure along directions X.That is, directions X is the direction of scanning, and the Y direction is non-direction of scanning.
This moment, direction of scanning on wafer W was that the uneven illumination of directions X is lowered by the equalization effect of utilizing scan exposure, was used for first setting of revising filter 15 that the uneven illumination of wafer W is revised along directions X so can omit.In addition, about the more detailed formation and the effect of correction filter (irregular figure filter), but reference example such as Japanese Patent Laid Open Publication spy open flat 7-130600 communique etc.
And, when present embodiment is applicable to the exposure device of scan exposure type, be formed at the spacing p1 along directions X of the cylindrical lens group 11a on the face of light source side of the first compound eye member 8a, the spacing p2 along the Z direction less than the cylindrical lens group 11b that covers up side that is formed at the first compound eye member 8a that is set is preferable.Constitute by this, can compare numerical aperture with cylindrical lens group 11a and become big cylindrical lens group 11b covering up the side configuration, become possibility so suppress the optical design of aberration well.
The spacing p2 along the Z direction that establish the cylindrical lens group 11b that covers up side that is formed at the first compound eye member 8a this moment is a, the spacing p1 along directions X that is formed at the cylindrical lens group 11a on the face of light source side of the first compound eye member 8a is b, then satisfied 1.2＜a/b (=be preferable p2/p1)＜13.0, more preferably satisfy 2.6＜a/b＜4.0.
In addition, in the present embodiment, make the first compound eye member 8a and second compound eye member 8b at least one side wherein preferable for movably constituting.Specifically, make the first compound eye member 8a and second compound eye member 8b at least one side wherein for preferable along movably constituting of optical axis AX.Constitute by this, make the first compound eye member 8a and second compound eye member 8b at least one side wherein move the size of the field of illumination of may command plane of illumination (covering up face or wafer face) along optical axis AX.
At this moment, by the non-face of cylinder that imports the aspheric high order of corresponding high order the plane of refraction of the light source side of the first compound eye member 8a and plane of refraction at least one side wherein of covering up side, can be controlled in the Illumination Distribution (particularly concavo-convex inequality) of plane of illumination.Here the aspheric surface of said high order is to comprise 8 times asphericity coefficient C 8The aspheric surface of later asphericity coefficient, when the height of establishing with the optical axis vertical direction is y, the distance along optical axis (slippage) of the position on from the section that is positioned at aspheric summit to the aspheric surface that is positioned at height y is z, and vertex curvature radius is r, the circular cone coefficient is k, and n time asphericity coefficient is C nThe time, (a) represents by following numerical expression.
[several 1]
Z＝(y 2/r)/[1+{1-(1+k)·y 2/r 2} 1/2]
+C 4·y 4+C 6·y 6+C 8·y 8+C 10·y 10
+C 12·y 12+C 14·y 14+··· (a)
And first compound eye member 8a and second compound eye member 8b at least one side wherein, for constituting of can moving along wherein at least one of directions X and Z direction preferable.By this formation, make the first compound eye member 8a and second compound eye member 8b at least one side wherein along directions X or the Z direction (direction of intersecting with optical axis, be typically optical axis orthogonal direction) move the size of the field of illumination of may command plane of illumination and the Illumination Distribution of plane of illumination (it is uneven to tilt).
In addition, the first compound eye member 8a and second compound eye member 8b at least one side wherein, for (around the direction of optical axis intersection, be typically around the optical axis orthogonal direction) around directions X and Z direction at least one side's wherein the direction rotatable constitute preferable.By this formation, make the first compound eye member 8a and second compound eye member 8b at least one side wherein rotation around directions X or around the Z direction, the Illumination Distribution of may command irradiation pupil face, and then the heart far away (telecentric) property on the may command face to be illuminated (the particularly inclination composition of disposition far away).At this moment, preferably, the first compound eye member 8a is divided into the compound eye member of tool cylindrical lens group 11a and the compound eye member of cylindrical lens group 12a, and the second compound eye member 8b is divided into the compound eye member of tool cylindrical lens group 11b and the compound eye member of cylindrical lens group 12b, make these 4 compound eye members be independent adjustment person.In this way, can work for to such an extent that improve inclination composition controlled of the disposition far away on the plane of illumination.And, when the substrate that constitutes the first compound eye member 8a or the second compound eye member 8b when foozle etc. does not form " wedge shape " for the parallel plane shape on the whole, can be used for the optics adjustment of its correction.
The first compound eye member 8a and second compound eye member 8b at least one side wherein, for around the Y direction (around the direction of intersecting with optical axis, be typically around the optical axis orthogonal direction, preferably around the cylindrical lens group's of compound eye member the spacing orthogonal direction) rotatable constitute preferable.By this formation, make the first compound eye member 8a and second compound eye member 8b at least one side wherein rotation around the Y direction, when by foozle etc. directions X or Z direction being formed when tilting a little, can be used for the optics adjustment of its correction the cylindrical lens group of the first compound eye member 8a or the second compound eye member 8b.
In the present embodiment, in order to ensure the same property of all light beam numerical apertures that relate to plane of illumination (covering up face or wafer face), it is ideal to make miniature fly's-eye lens 8 satisfy sine condition.This moment is by at the plane of refraction of the light source side of the second compound eye member 8b and cover up the non-face of cylinder (being preferably the non-face of cylinder that imports the aspheric low order of corresponding low order by the plane of refraction of covering up side at the second compound eye member 8b) of aspheric low order of the plane of refraction corresponding low order of at least one side importing wherein of side, can set to make miniature fly's-eye lens 8 satisfy sine condition.Here the aspheric surface of said low order is to comprise 6 times the elected C of aspheric surface system 6The aspheric surface of following asphericity coefficient.Herein, (cover up face or wafer face at the maintenance plane of illumination, or cover up conjugate plane [grating shadow surface] all the time for homogeneous illumination, same property for the numerical aperture of guaranteeing light beam, preferably, make than the miniature fly's-eye lens 8 more close light-gathering optics 9 of covering up side and also satisfy sine condition.
And, if make miniature fly's-eye lens 8 constitute sine condition, the beam angle of the miniature fly's-eye lens 8 of incident is tilted (change is with respect to the optical axis angle of this light beam) with epigenesist, in view of the above, can adjust the inclination composition (it is uneven to tilt) of the Illumination Distribution of plane of illumination.Herein, can utilize above-mentioned correction filter 15,16 to revise because of miniature fly's-eye lens 8 for the rotation symmetry composition (concavo-convex inequality) of the uneven illumination that caused beyond the sine condition.And, preferably, make to be positioned at and satisfy sine condition than the also light-gathering optics 9 of miniature fly's-eye lens 8 more close plane of illumination sides in this occasion.
Adjust the structure of the incident beam angle of miniature fly's-eye lens 8, for example can use when the light path curved reflectors being arranged than miniature fly's-eye lens 8 more close light source side places, adjust the structure that angle is set of this light path curved reflectors, than the light path place of zoom lens 7 more close light source side (preferably, light path between zoom lens 7 and the diffraction optical assembly 6) is provided with planopaallel plate, it is to be that revolving shaft is rotatably and is being provided with optical axis orthogonal direction, making this parallel panel is the structure that the center tilts with the revolving shaft, at the upper reaches of miniature fly's-eye lens 8 (preferably, between zoom lens 7 and the micro lens 8) light path on, be arranged on a pair of wedge type prism of tool revolving shaft on the direction of optical axis, the relative angle that changes a pair of wedge type prism to be adjusting the structure of all drift angles, and makes a part of lens in the zoom lens 7 toward the mobile structure of direction (being typically optical axis orthogonal direction) of crosscut optical axis.
Of this sort, utilize moving and the method for the beam incident angle degree of miniature fly's-eye lens 8 etc. of the moving of the change first compound eye member 8a, the second compound eye member 8b, the uneven illumination that changes serially on the plane of illumination is even.
Exposure device about each above-mentioned embodiment, to cover up (grating) illumination (illuminating engineering) by utilizing illumination optics device, and will be formed at the pattern that the transcription covered up uses with projection optical system and on the photonasty substrate, expose (exposure engineering), can make micromodule equipment (semiconductor element, imaging apparatus, liquid crystal display cells, thin-film head etc.).Below about by the exposure device that utilizes each above-mentioned embodiment as form on the wafer of photonasty substrate etc. fixed circuit pattern, an and example of the method when obtaining semiconductor equipment as micromodule equipment describes with reference to the process flow diagram of Fig. 7.
At first in the step 301 of Fig. 7, deposited metal film on a collection of wafer.In the step of following 302, on the metal film of this a collection of wafer, be coated with photoresist.In step 303, use the exposure device of each above-mentioned embodiment then, by this projection optical system, transcription each shooting area on this a collection of wafer successively exposes with the picture of the pattern on covering up.Then in step 304, after the photoresist video picture on this a collection of wafer, in step 305,, make the circuit pattern of the pattern that correspondence covers up be formed at each shooting area on each wafer by the photoresist pattern on this a collection of wafer is carried out the etching operation as covering up.Then, by formation of carrying out the circuit pattern on upper strata more etc., can make the equipment of semiconductor element etc.By above-mentioned semiconductor device manufacturing method, can obtain having the semiconductor equipment of atomic thin circuit pattern with good efficiency.
And, the exposure device of each above-mentioned embodiment by go up at dull and stereotyped (glass substrate) form fixed pattern (circuit pattern, electrode pattern etc.), also can obtain liquid crystal display cells as micromodule equipment.Following process flow diagram with reference to Fig. 8 describes about the example of method of this moment.In Fig. 8, pattern forms the exposure device that engineering 401 is used each above-mentioned embodiment, and the pattern transfer of covering up is exposed on the photonasty substrate (being coated with the glass substrate of photoresist etc.), implements so-called photoengraving engineering.By this photoengraving engineering, on the photonasty substrate, form contain a plurality of electrodes etc. decide pattern.Subsequently, the substrate that is exposed is by through each engineerings such as video picture engineering, etching engineering, photoresist lift off engineerings, on substrate, form fixed pattern, form engineering 402 to following color filter and shift.
Then 3 groups of round dots of color filter formation engineering 402 formation corresponding R (Red), G (Green), B (Blue) are rectangular a plurality of arrangement, or make the color filter of the 3 strip-type color filters of R, G, B in a plurality of horizontal scanning line directions arrangements.After color filter forms engineering 402, carry out born of the same parents' packing engineering 403.Institute decide the substrate of pattern to born of the same parents' packing engineering 403 usefulness and the color filter that obtains by color filter formation engineering 402 etc. by pattern having of forming that engineering obtains, and assembles liquid crystal panel (liquid crystal cell).Born of the same parents' packing engineering 403 for example having of forming by pattern that engineering 401 obtains institute decide the substrate of pattern and the color filter that obtains by color filter formation engineering between inject liquid crystal, manufacturing liquid crystal panel (liquid crystal cell).
Then,, each parts such as electric circuit that the display action make the liquid crystal panel of having assembled (liquid crystal cell) carries out, backlight module are installed, promptly are done as liquid crystal display cells by module packing engineering 404.By the manufacture method of above-mentioned liquid crystal display cells, but good the obtaining of efficient has the liquid crystal display cells of atomic thin circuit pattern.
In addition, the above embodiments are suitable of the present invention to the miniature fly's-eye lens of minimum spacing p1 below 2mm, but are not limited thereto, and minimum spacing p1 are surpassed also applicable the present invention of common fly's-eye lens of 2mm.But, near the outgoing plane of fly's-eye lens, be provided for the aperture diaphragm (various endless belt aperture diaphragms, 4 utmost point aperture diaphragms, circular aperture diaphragm, iris etc.) of confine optical beam as required in this case.
Be not limited to the above embodiments, change the fly's-eye lens 8 of illumination optics device illustrated in the Japanese Patent Laid Open Publication 2002-75835 communique for example into, also be suitable for the miniature fly's-eye lens 8 of present embodiment.And, change the fly's-eye lens 8 of illumination optics device illustrated in the Japanese Patent Laid Open Publication 2001-176766 communique for example into, also be suitable for the miniature fly's-eye lens 8 of present embodiment.In addition, for example change at European patent and disclose in No. 1014196 communique, also be suitable for the miniature fly's-eye lens 8 of present embodiment with reference to the fly's-eye lens 1008 of the illustrated illumination optics device of the 43rd figure.
In addition, in the above-described embodiment, will carry out light harvesting from the light of secondary souce by the light-gathering optics 9 as the leaded light optical system, M is covered up in illumination overlappingly.Yet be not limited thereto, also can and cover up in the light path between the M at light-gathering optics 9, the picture of the configuration illumination visual field diaphragm (covering up window shade) and the visual field diaphragm that will throw light on is being covered up relaying (relay) optical system that forms on the M.This moment, light-gathering optics 9 can carry out light harvesting with the light from secondary souce, and the visual field diaphragm that will throw light on overlappingly throws light on, and relay optical system can form the picture of the peristome (light transmissive portion) of the visual field diaphragm that throws light on covering up on the M.
The above embodiments are used KrF excimer laser (wavelength: 248nm) with ArF excimer laser (wavelength: 193nm) as exposure light, but be not limited thereto, the exposure light that the following wavelength of 250nm is for example arranged also is suitable for the present invention.In addition, the above embodiments get that to possess the projection aligner that illumination optics device is arranged be example explanation the present invention, but the present invention can be applicable to the general illumination optics device of the plane of illumination beyond covering up in order to throw light on obviously.
As described above, the present invention uses the miniature fly's-eye lens that is made of a pair of compound eye member that is formed with the cylindrical lens group, as the light integraph that is used for forming at illumination pupil face secondary souce.As a result, the common fly's-eye lens that forms two-dimentional curved surface shape (dome shape) with each plane of refraction is different, and each plane of refraction forms one dimension curved surface shape (cylinder is planar), thus handling ease, and then can reduce manufacturing cost.
And, configuration light integraph in the light path of the present invention between light source and miniature fly's-eye lens, so it is extended to be formed in each light source of a plurality of light sources (secondary souce) that the rear side focus face of miniature fly's-eye lens forms, light source interval each other is reduced.The present invention as a result is formed in the compactedness of a plurality of light sources of the secondary souce that illumination pupil face forms by raising, carries out good projection exposure under good imaging performance, can make good equipment.

Claims (34)

1. illumination optics device, based on from the light beam of light source with the plane of illumination that throws light on, be included in a light integraph that disposes in the light path between this light source and this plane of illumination, be disposed in the light path between this light integraph and this plane of illumination, form a fly's-eye lens of a plurality of light sources based on light beam from this light integraph, it is characterized in that this fly's-eye lens has the first compound eye member and the second compound eye member successively from light source side, the face of the light source side of the face of the light source side of this first compound eye member and this second compound eye member is formed with the cylindrical lens group who arranges along first direction, and the face of the plane of illumination side of the face of the plane of illumination side of this first compound eye member and this second compound eye member is formed with along the cylindrical lens group who arranges with the second direction of first direction orthogonal.
2. illumination optics device as claimed in claim 1 is characterized in that the radius-of-curvature of each cylindrical lens that the face when the light source side that be arranged on this first compound eye member forms is R a, the radius-of-curvature of each cylindrical lens that forms at the face of the light source side of this second compound eye member is R b, the radius-of-curvature of each cylindrical lens that forms at the face of the plane of illumination side of this first compound eye member is R c, the radius-of-curvature of each cylindrical lens that forms at the face of the plane of illumination side of this second compound eye member is R dThe time, satisfy
0.3＜R d/R c＜0.5
0.3＜R b/ R a＜0.5 condition.
3. illumination optics device as claimed in claim 2 is characterized in that this first compound eye member has quartz, and this second compound eye member has the crystalline material that the light of the following wavelength of 250nm is had permeability.
4. illumination optics device as claimed in claim 2 is characterized in that in this first compound eye member and this second compound eye member, exists with 1mJ/cm 2Above energy density is had the crystalline material that the light of the following wavelength of 250nm is had permeability by the compound eye member in light-struck zone.
5. illumination optics device as claimed in claim 1 is characterized in that this first compound eye member has quartz, and this second compound eye member has the crystalline material that the light of the following wavelength of 250nm is had permeability.
6. illumination optics device as claimed in claim 5 is characterized in that this crystalline material has at least 1 that selects from fluorite, crystal, magnesium fluoride, barium fluoride, lithium fluoride, lanthanum fluoride, strontium fluoride, beryllium fluoride, sodium fluoride, lithium evigtokite (LICAF) and the group by lithium strontium aluminium fluorite (LICAF) formation.
7. illumination optics device as claimed in claim 1 is characterized in that in this first compound eye member and this second compound eye member, exists with 1mJ/cm 2Above energy density is had the crystalline material that the light of the following wavelength of 250nm is had permeability by the compound eye member in light-struck zone.
8. illumination optics device as claimed in claim 7 is characterized in that this crystalline material has at least 1 that selects from fluorite, crystal, magnesium fluoride, barium fluoride, lithium fluoride, lanthanum fluoride, strontium fluoride, beryllium fluoride, sodium fluoride, lithium evigtokite (LICAF) and the group by lithium strontium aluminium fluorite (LISAF) formation.
9. illumination optics device as claimed in claim 7 is characterized in that on this first compound eye member and this second compound eye member, is formed with to be used to make this first compound eye member and the identical witness marker of this second compound eye member position.
10. illumination optics device as claimed in claim 7, it is characterized in that about the entrance pupil face of this first direction of this fly's-eye lens or near it and, be provided with the correction filter of the Illumination Distribution that is used to revise this plane of illumination about the entrance pupil face of this second direction of this fly's-eye lens or near wherein at least one side it.
11. illumination optics device as claimed in claim 7, the spacing that it is characterized in that the cylindrical lens group that on the face of the light source side of the face of the light source side of this first compound eye member and this second compound eye member, forms along this first direction, and the cylindrical lens group who on the face of the plane of illumination side of the face of the plane of illumination side of this first compound eye member and this second compound eye member, forms along spacing at least one side wherein of this second direction below 2mm.
12. illumination optics device as claimed in claim 7 is characterized in that this first compound eye member and this second compound eye member at least one side wherein are movably.
13. illumination optics device as claimed in claim 1 is characterized in that on this first compound eye member and this second compound eye member, is formed with to be used to make this first compound eye member and the identical witness marker of this second compound eye member position.
14. illumination optics device as claimed in claim 13 is characterized in that this witness marker is included in the sign of the linearity that the face upper edge second direction of the light source side of the face of light source side of this first compound eye member and this second compound eye member forms, the sign of the linearity that forms at the face upper edge first direction of the plane of illumination side of the face of the plane of illumination side of this first compound eye member and this second compound eye member.
15. illumination optics device as claimed in claim 13, it is characterized in that about the entrance pupil face of this first direction of this fly's-eye lens or near it and, be provided with the correction filter of the Illumination Distribution that is used to revise this plane of illumination about the entrance pupil face of this second direction of this fly's-eye lens or near wherein at least one side it.
16. illumination optics device as claimed in claim 1, it is characterized in that about the entrance pupil face of this first direction of this fly's-eye lens or near it and, be provided with the correction filter of the Illumination Distribution that is used to revise this plane of illumination about the entrance pupil face of this second direction of this fly's-eye lens or near wherein at least one side it.
17. illumination optics device as claimed in claim 16 is characterized in that being formed with on this correction filter second witness marker that is used to make this correction filter and this first compound eye member or this second compound eye member position to coincide.
18. illumination optics device as claimed in claim 17 is characterized in that the sign that this second witness marker possesses to be had along the linearity of this first direction or the formation of this second direction.
19. illumination optics device as claimed in claim 1, the spacing that it is characterized in that the cylindrical lens group that on the face of the light source side of the face of the light source side of this first compound eye member and this second compound eye member, forms along this first direction, and the cylindrical lens group who on the face of the plane of illumination side of the face of the plane of illumination side of this first compound eye member and this second compound eye member, forms along spacing at least one side wherein of this second direction below 2mm.
20. illumination optics device as claimed in claim 19 is characterized in that this first compound eye member and this second compound eye member at least one side wherein are movably.
21. illumination optics device as claimed in claim 1 is characterized in that this first compound eye member and this second compound eye member at least one side wherein are movably.
22. illumination optics device as claimed in claim 21, it is characterized in that control for the Illumination Distribution of the control of the size of the field of illumination of this plane of illumination or this plane of illumination, this first compound eye member and this second compound eye member at least one side wherein are along optical axis movably.
23. illumination optics device as claimed in claim 22, it is characterized in that control for the Illumination Distribution of the control of the size of the field of illumination of this plane of illumination or this plane of illumination, this first compound eye member and this second compound eye member at least one side wherein are along this first direction and this second direction at least one side's wherein direction movably.
24. illumination optics device as claimed in claim 23, it is characterized in that control for the Illumination Distribution of the pupil face that throws light on, this first compound eye member and this second compound eye member at least one side wherein are rotatable around this first direction and this second direction at least one side's wherein direction.
25. illumination optics device as claimed in claim 22, it is characterized in that control for the Illumination Distribution of the pupil face that throws light on, this first compound eye member and this second compound eye member at least one side wherein are rotatable around this first direction and this second direction at least one side's wherein direction.
26. illumination optics device as claimed in claim 21, it is characterized in that control for the Illumination Distribution of the control of the size of the field of illumination of this plane of illumination or this plane of illumination, this first compound eye member and this second compound eye member at least one side wherein are along this first direction and this second direction at least one side's wherein direction movably.
27. illumination optics device as claimed in claim 26, it is characterized in that control for the Illumination Distribution of the pupil face that throws light on, this first compound eye member and this second compound eye member at least one side wherein are rotatable around this first direction and this second direction at least one side's wherein direction.
28. illumination optics device as claimed in claim 21, it is characterized in that control for the Illumination Distribution of the pupil face that throws light on, this first compound eye member and this second compound eye member at least one side wherein are rotatable around this first direction and this second direction at least one side's wherein direction.
29. illumination optics device, based on from the light beam of light source with the plane of illumination that throws light on, be included in a light integraph disposing in the light path between this light source and this plane of illumination, be configured in the light path between this light integraph and this plane of illumination, form a fly's-eye lens of a plurality of light sources based on light beam from this light integraph; It is characterized in that this fly's-eye lens has the first compound eye member and the second compound eye member successively from light source side, the face of the light source side of the face of the light source side of this first compound eye member and this second compound eye member is formed with the cylindrical lens group who arranges along first direction, the face of the plane of illumination side of the face of the plane of illumination side of this first compound eye member and this second compound eye member is formed with along the cylindrical lens group who arranges with the second direction of first direction orthogonal, the cylindrical lens group's who on the face of the light source side of the face of the light source side of this first compound eye member and this second compound eye member, forms spacing along this first direction, and the cylindrical lens group who on the face of the plane of illumination side of the face of the plane of illumination side of this first compound eye member and this second compound eye member, forms along spacing at least one side wherein of this second direction below 2mm.
30. illumination optics device, based on from the light beam of light source with the plane of illumination that throws light on, be included in a light integraph disposing in the light path between this light source and this plane of illumination, be disposed in the light path between this light integraph and this plane of illumination, form a fly's-eye lens of a plurality of light sources based on light beam from this light integraph; It is characterized in that this fly's-eye lens has the first compound eye member and the second compound eye member successively from light source side, the face of the light source side of the face of the light source side of this first compound eye member and this second compound eye member is formed with the cylindrical lens group who arranges along first direction, the face of the plane of illumination side of the face of the plane of illumination side of this first compound eye member and this second compound eye member is formed with along the cylindrical lens group who arranges with the second direction of first direction orthogonal, and this first compound eye member and this second compound eye member at least one side wherein are movably.
31. an exposure device is characterized in that comprising as any one described illumination optics device in the claim 1 to 30, the graphic pattern projection of covering up that is used for being disposed at this plane of illumination is exposed to the projection optical system of photonasty substrate.
32. exposure device as claimed in claim 31, it is characterized in that by the edge direction optically corresponding with this first direction, this is covered up and this photonasty substrate relatively moves to this projection optical system, this graphic pattern projection of covering up is exposed to this photonasty substrate.
33. an exposure method is characterized in that comprising the engineering of throwing light on and covering up by as any one described illumination optics device in the claim 1 to 30, illuminated this is covered up the engineering of picture projection exposure on the photonasty substrate of the pattern that forms.
34. exposure method as claimed in claim 33, it is characterized in that by the edge direction optically corresponding with this first direction, this is covered up and this photonasty substrate relatively moves to this projection optical system, this graphic pattern projection of covering up is exposed to this photonasty substrate.
CN03136537A 2002-05-27 2003-05-23 Lighting optical device, exposure device and exposure method Pending CN1461973A (en)

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