CN1460179A - Method for measuring permeation rate, and experiment and apparatus for measuring and testing - Google Patents

Method for measuring permeation rate, and experiment and apparatus for measuring and testing Download PDF

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Publication number
CN1460179A
CN1460179A CN02800880A CN02800880A CN1460179A CN 1460179 A CN1460179 A CN 1460179A CN 02800880 A CN02800880 A CN 02800880A CN 02800880 A CN02800880 A CN 02800880A CN 1460179 A CN1460179 A CN 1460179A
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active material
substrate
measuring
value
layer
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CN1242250C (en
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P·C·P·布藤
G·尼萨托
P·J·斯利克弗尔
H·F·J·J·范通格伦
E·I·哈斯卡尔
P·范德斯勒伊斯
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Koninklijke Philips NV
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Koninklijke Philips Electronics NV
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N15/08—Investigating permeability, pore-volume, or surface area of porous materials
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N15/08—Investigating permeability, pore-volume, or surface area of porous materials
    • G01N15/082—Investigating permeability by forcing a fluid through a sample
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N15/10—Investigating individual particles
    • G01N15/1031—Investigating individual particles by measuring electrical or magnetic effects
    • G01N15/12—Investigating individual particles by measuring electrical or magnetic effects by observing changes in resistance or impedance across apertures when traversed by individual particles, e.g. by using the Coulter principle
    • G01N15/131—Details
    • G01N15/132—Circuits
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N15/08—Investigating permeability, pore-volume, or surface area of porous materials
    • G01N2015/086—Investigating permeability, pore-volume, or surface area of porous materials of films, membranes or pellicules

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  • Dispersion Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
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  • Pathology (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Investigating Or Analysing Materials By The Use Of Chemical Reactions (AREA)
  • Investigating Or Analyzing Non-Biological Materials By The Use Of Chemical Means (AREA)

Abstract

A method is proposed for measuring water permeability of substrates (1). A reactive compound (Ca, Ba) which reacts with a diffusing material, e. g. water, is applied on the substrate and the change in time of transmissivity, reflectivity of the layer is monitored in time.

Description

Method for measuring permeation rate, and test and device for measurement and test
The present invention relates to a method for measuring the penetration speed of substrates, in particular flexible substrates such as polymer (plastic) substrates used in liquid crystal display devices, poly light emitting diodes (polyleds) and other (organic) LED display devices. The combination of a polymer (plastic) substrate and an (organic) LED device is very attractive, especially since all materials are flexible and the LED device has good viewing angle properties.
However, electroluminescent organic materials are easily oxidized and easily react with water. The cathode material generally uses an active metal, and its performance deteriorates more rapidly. Glass is therefore used as a substrate in the state of the art, which has a high impermeability. Here, the main aspect related to the permeability is the permeation speed of the seal line. In an LCD, water may react with the liquid crystal material.
Although commercial test systems for measuring the permeation rate of a substrate are available from, for example, Mocon (modern control) corporation, these systems are limited to a lower limit of 10 for water-3g/m2A day, oxygen content of 10-3cc/m2Day/bar (at standard temperature and pressure). For plastic substrates to be used for liquid crystal display devices and (organic) LED display devices, this value should be at least a factor of 100 smaller. Moreover, testing lasts for one week, which is unacceptable in a production environment. The same is true for the test (semi-) finished product.
It is an object of the present invention to address one or more of these problems. To this end, a method for measuring the permeation rate and a device for measuring the permeation rate are providedMethod and apparatus for measuring and testing, wherein as low as 10 can be measured for water-5g/m2Permeation rate per day or less.
To this end, the method according to the invention comprises the steps of:
a) applying a layer of active material on a first side of a substrate under a substantially inert atmosphere;
b) placing the first side of a substrate within a substantially sealed environment;
c) exposing the other side of the substrate to an environment containing a compound that reacts with the active material; and
d) the light reflectance or light absorbance of the active material layer is compared with a calibration value.
The invention is based on the recognition that oxidation occurs due to the presence of water and oxygen, and that the active material, such as barium or calcium, gradually becomes an increasingly transparent layer. The transmission or reflection properties of this layer can be measured, for example by storing successive measurements (for example CCD images), and image analysis, such as grey value determination, can be used to determine the thickness of the remaining metal layer, which is related to the amount of absorbed compounds, in particular water. These transmission or reflection properties are therefore directly related to the permeation rate.
The advantage of the method according to the invention is that thetest is faster. Moreover, it provides a higher sensitivity at least in terms of the permeability of the test water. In addition, it is more effective than the existing test method, the test device is more flexible too.
In certain situations, such as testing a substantially impermeable substrate (metal or glass), the permeability of the seal or seal edge on the substrate determines the permeation rate. It is clear that in this case the term "substrate" in the claims is meant to include the seal or the sealing edge. To prevent the permeability of the seal or the sealing edge from affecting the permeability test, a sealing edge having multiple walls may be used if necessary. The provision of a getter in the double wall seal further prevents susceptibility to permeation through the wall. The active material used for the test can be used as a getter when applied between two sealing rings.
In the test method according to the invention, at least one sample substrate is tested with the method and it is discriminated whether the substrates between the batches pass the test or not on the basis of a threshold value for the permeation rate. The threshold may be an average or an extreme value of the permeation rate in a batch of substrates.
The device according to the invention comprises:
a) a first chamber in which a substantially inert atmosphere may be created;
b) means for introducing an active material into the cavity;
c) means for placing the first side of a substrate within a substantially sealed environment;
d) means for exposing the sealed environment to a compound that reacts with the active material; and
e) means for comparing the light reflectivity or light absorption of the active material with a calibrated value.
It appears that this test method can on the other hand be used for testing the permeability of a package, such as a seal, a lid or a measuring cell.
In practice, the different steps will be performed separately on several sub-devices.
These and other aspects of the invention will be discussed in detail below with reference to several embodiments and the attached drawings, wherein:
figure 1 shows a plan view of a sample substrate in a substantially sealed environment,
figure 2 shows a cross-sectional view along the line II-II in figure 1,
figure 3 shows the transmission curve of a CaO/Ca layer on glass for different wavelengths as a function of the layer thickness,
figure 4 shows the transmission curves of the CaO/Ca layer on glass for different values of the layer thickness as a function of the wavelength,
figure 5 shows the transmission curve of the CaO/Ca layer on glass as a function of the layer thickness at a wavelength lambda of 500nm for different values of the original layer thickness,
figure 6 shows the results of some sample tests,
figure 7 shows an exemplary embodiment of a measuring and testing device for measuring or testing permeation rate,
figure 8 shows an apparatus for obtaining a sample substrate in a substantially sealed environment,
figures 9 and 10 show an embodiment of an apparatus for measuring the optical reflectivity or the optical absorption of a layer,
FIG. 11 shows another embodiment according to the present invention, however
FIG. 12 shows a cross-sectional view taken along line XII-XII in FIG. 11, an
Fig. 13 shows another example of the use of the present invention.
The figures are not drawn to scale and, in general, like reference numerals refer to like parts.
The principle of the method for measuring the penetration rate of a substrate will be discussed below with reference to fig. 1-6. A thin layer 2 (for example 100nm) of an active material, in this example Ca, is deposited on a substrate 1 to be tested in a substantially inert atmosphere. Ca was deposited in a pattern of 16 squares in this example. The glass sheet or cover 3 is interconnected along its edges to the substrate 1 by a substantially hermetic seal 4, such as glue, metal, such as In, or solder metal, to form a closed box. Alternatively, the Ca layer may be covered by a sealing coating (silicon nitride, silicon oxide or metal layer) to provide a seal for the layer.
The water or oxygen permeated into the tank reacts with Ca according to the following reaction formula:
(1)
(2) or (3)
As a result of these reactions, the amount of calcium is reduced, so that the thickness of the metal layer (or the area of the deposited material) is reduced. This also means that the deposited layer becomes transparent, and thus transparency or transmittance becomes an index for measuring the amount of water or oxygen diffused into the tank.
Fig. 3 shows the calculated transmission curves for the CaO/Ca layer on glass at different wavelengths, i.e. 500nm (curve a), 600nm (curve b), 700nm (curve c), 800nm (curve d) and substrate 1 (curve e), as a function of the layer thickness. Since the layer thickness is close to the wavelength of light, the transmission and reflection of the layer is also highly wavelength dependent. This is shown by way of example in fig. 4, which fig. 4 shows the calculated transmission curves of the CaO/Ca layer on glass for different values of layer thickness, i.e. 0nm (curve a), 10nm (curve b), 20nm (curve c), 40nm (curve d), 60nm (curve e), 80nm (curve f) and 100nm (curve g), as a function of the wavelength.
FIG. 5 shows the calculated transmission curve of the CaO/Ca layer on the glass at a fixed wavelength as a function of the layer thickness for various values of the original layer thickness. Fig. 5 shows the case of layers with a starting layer thickness of 90nm (curve d), 100nm (curve e), 120nm (curve g) and 150nm (curve i) at λ ═ 500 nm.
These data can be used to determine calibration values employed during measurement and testing, which are related to the wavelength used and the original layer thickness. The curve can be stored as a function relating transmission or reflection to a specific layer thickness. The intermediate value of transmission or reflection can be measured as an (average) grey value by a CCD device or a digital camera. To obtain the reference value, a black border is introduced in the device of fig. 1 to measure the transmission of the average black area; the reference value for the average white color was determined by measuring the transmission of the transmissive regions between the deposited Ca squares.
Since the thickness and total area of the original Ca layer are known, the gray value (difference) is considered to be caused by the layer thickness (difference). The total amount of Ca reacted according to equations (1), (2) and (3) and the amount of water requiredto convert the amount of remaining calcium are known. This is shown in some samples in fig. 6, which shows the amount of calcium remaining as a function of time. The difference between the secondary measurement instants determines the difference in grey values between said secondary measurement instants. This is shown in some samples in fig. 6 (substrates of different kinds of substrate materials). The slope of the curve is the measured permeation rate.
The sample of curve c shows about 2X 10 for water-3g/m2Perday permeation rate, while the samples of curves e and f show about 2X 10 for water-4g/m2Perday permeation rate, curve d samples show less than 10 for water-5g/m2Permeation rate per day. This indicates that this method can measure permeation rates that are 100 times or more enhanced over existing devices. Similar experiments indicate that this method is suitable for testing oxygen permeability of 10-2cc/m2A level of/day/bar or less.
Fig. 7 shows a measuring and testing device 5 for measuring or testing permeation rates, wherein a device 6 for obtaining a sample substrate and a device 7 for measuring the light reflectivity or light absorption of a layer are arranged in the same substantially sealed environment, such as a glove box 8 with an operating device 9. In another embodiment, the means 6 for obtaining a sample substrate and the means 7 for measuring the light reflectivity or light absorption of the layer may be arranged in different glove box 8, as long as the sample can be transferred from the means 6 for obtaining a sample substrate to the means 7 for measuring in a substantially sealed environment.
Can be achieved by using a mask (see fig. 8, the mask used in this example is 6mm24 x 4) to deposit a layer of calcium of a predetermined thickness, for example 100nm, to obtain a sample substrate. The calcium-coated sample can be stored in a glove box, but it is preferable to manufacture the test cells and the reference cells, if any, as soon as possible after deposition.
The substrate 1 is placed upside down on the cover 3, on which cover 3 the seal 4 has been arranged. To obtain a good seal, a copper block 10 is placed over the assembly while the whole assembly is heated on a heating plate 11 at 100 ℃ for 15 minutes. To prevent the substrate from sticking to the copper plate, a spacer 12 of polytetrafluoroethylene may be temporarily inserted. It is clear that the above illustration is only an example, which may vary depending on the materials used.
FIG. 9 shows in more detail a possible device 7 for measuring the light transmission of a CaO/Ca layer on glass in a sample prepared with reference to FIG. 8, wherein the sample is exposed to H2O environment. The sample 15 is placed over an optical system 16, which is illuminated by a fiber optic illuminator via an optical fiber 17. Light passes through the sample via a mirror 18 and a digital image is taken by a digital camera 19. The images 20 may be taken continuously and stored in a computer or data processing means 22 via an interconnection means 21.
Fig. 10 shows another embodiment in which the transmission of a single color is measured by introducing a color filter 23. The sample 15 is now placed vertically in the hole 26 of the support 24 and is illuminated by the backlight 25. The camera 19 is in this example a CCD camera which is optimal for the color used. The camera 19, the color filter 23 and the support 24 are placed on the optical rail 27.
The image processing of the resulting grey values can be performed in different ways. As described above, the calibration value may be determined in advance as shown with reference to fig. 3 to 5. Other methods, such as spectral deconvolution, may also be used.
It is clear from the above description that the different steps of the method are preferably performed in dedicated sub-devices, such as a first sub-device for deposition, a second sub-device for exposure to ambient conditions, and a third sub-device for measurement, however, in case of e.g. continuous monitoring of the Ca layer, some of them may also be combined, which is useful when testing at higher temperatures.
Finally, fig. 11 and 12 show another embodiment, in which the (non-transparent) substrate 1 is sealed by a housing 30, whereas the Ca pattern 3 is now deposited on a transmissive substrate 31 of a test unit 32, in contrast to the cover 3 in fig. 1, 2. To initiate a measurement or test, the housing 30 is interconnected with a measurement unit 32 via a glass tube 33. Water or oxygen permeated into the housing 30 through the substrate 1 passes through the tube 33 and reacts with Ca. The Ca layer was affected by a method similar to that described above. The penetration rate is again determined by measuring the transparency of the layer, for example, in a manner similar to that shown in figures 9 and 10.
In some cases, if the permeability of the substrate is very small, the leakage of the seal determines the lower limit of the sensitivity of the measurement method.
In this case, the seal is divided into two walls (an outer wall 4' and an inner wall 4 "for the measurement described below, as shown in fig. 13). Between the two walls a cavity is formed in which a getter (desiccant) 15 is placed. If the same active material for the measurement is selected for the desiccant, they can be applied in the same process step.
In the permeability test cell, a desiccant may now be employed to absorb water and oxygen that leaks past the seal. Since Ca in the main cavity also acts as a getter when Ca is used as the indicator layer 2, there is substantially no concentration gradient across the internal seal, and therefore no water and oxygen can pass through this seal.
The construction of two cavities in such a seal does not require additional processes, for example when using glass lids, in which the cavities are formed by powder injection molding (powder blasting).
It should be noted that the above-mentioned embodiments illustrate rather than limit the invention, and that those skilled in the art will be able to design many alternative embodiments without departing from the scope of the appended claims. It should also be noted in this connection that the reflection measurement of a layer is also an indicator of its thickness, which can be used to determine the permeation rate. Another active material such as barium or sodium may be used instead of calcium.
One example is gadolinium, which is well suited for testing the permeation of hydrogen. In the method according to the invention, the layer 2 now comprises a plurality of metals, for example Gd/Pd or MgXGd1-Xand/Pd. The active compound reacts well with the diffusing hydrogen. The reaction again causes a change in the appearance of the layer. A catalyst may be necessary for the detection of hydrogen. This means that instead of depositing a single Ca layer, two layers may be deposited, e.g. 100nm Gd and 10nm Pd. For 1cm2This represents 5X 10 in terms of surface area-7Molar Gd. This silver colorGd of (b) reacts to deep blue GdH2. The change in color can be measured again as a change in reflection (or transmission). If 5X 10 in one day-7Molar H2A reaction takes place which means that the flow of hydrogen is 10 per square meter per day-2H of g2. By this arrangement, 10 per square meter per day can be measured-4To 102H of g2。
Since the concentration of hydrogen is very low under normal circumstances, all work can be performed under normal circumstances. The Pd layer not only acts as a catalyst, but also protects Gd from corrosion in air. The inertness of the index metal layer makes the method very suitable for measuring semifinished products, such as closures 3 (with index metal layer 2', see fig. 13) or measuring units 32, which are ready for use, using the method or the device according to the invention.
Needless to say, the method is also applicable to testing substrates and packages outside display applications, for example on PolyLed/OLED caps and OLED sealing materials, sample substrates for IC caps or in medical applications.
In the claims, any reference signs placed between parentheses shall not be construed as limiting the claim. The word "comprising" does not exclude the presence of other elements or steps than those listed in a claim.

Claims (23)

1. A method for measuring the penetration rate of a substrate, comprising the steps of:
a) applying a layer of active material on the first side of the substrate under a substantially inert atmosphere;
b) placing the first side of the substrate within a substantially sealed environment;
c) exposing the other side of the substrate to an environment containing a compound that is reactive with the active material; and
d) comparing the light reflectivity or light absorptivity of the active material layer with a calibrated value.
2. A method for measuring the penetration rate of a substrate, comprising the steps of:
a) placing the substrate within a substantially sealed environment;
b) coating an active material on a first side of the substrate under a substantially inert atmosphere;
c) exposing the other side of the substrate to an environment containing a compound that is reactive with the active material; and
d) comparing the light reflectivity or light absorptivity of the active material layer with a calibrated value.
3. A method according to claim 1 or 2, characterized in that the other side of the substrate is exposed to a controlled environment.
4. The method according to claim 1 or 2, wherein the active material belongs to the group comprising calcium, barium, sodium and gadolinium.
5. The method according to claim 1 or 2, wherein the compound reactive with the active material belongs to the group comprising water, oxygen and hydrogen.
6. The method according to claim 1 or 2, characterized in that the transmission or reflection value of at least a part of the active material layer is determined.
7. The method of claim 6, wherein the transmission or reflection value is related to an amount of the active material remaining.
8. A method for permeability testing of a group of a batch of substrates, the method comprising the steps of:
a) measuring the permeation rate of at least one sample substrate using the method according to claim 1 or 2;
b) and distinguishing whether the substrates between batches pass the test according to the threshold value of the penetration speed.
9. A method according to claim 8, wherein the threshold value is determined as an average or an extreme value of the penetration rate in a batch of substrates.
10. Method according to claim 8, characterized in that the threshold value for water is at most 10-4g/m2The day is.
11. Method according to claim 10, characterized in that the threshold value for water is at most 10-5g/m2The day is.
12. The method of claim 1 or 2, wherein the seal comprises at least two walls.
13. The method of claim 12, wherein a getter is disposed in the seal.
14. The method of claim 12, wherein the seal comprises an active material.
15. An apparatus for use in the method of claim 1 or 2, comprising
a) A first chamber in which a substantially inert atmosphere may be created;
b) means for introducing an active material into the cavity;
c) means for placing the first side of a substrate within a substantially sealed environment;
d) means for exposing the sealed environment to a compound that is reactive with the active material;
e) means for comparing the light reflectivity or light absorptivity of the active material with a calibrated value.
16. The apparatus of claim 15, comprising
A first sub-device comprising
a) A first chamber in which a substantially inert atmosphere may be created,
b) means for introducing an active material into the cavity,
c) means for placing the first side of the substrate within a substantially sealed environment;
a second sub-assembly comprising means for exposing the sealed environment to a compound reactive with the active material;
a third sub-means comprising means for comparing the light reflectivity or light absorptivity of the active material with a calibrated value.
17. The apparatus of claim 15, wherein at least two of said sub-apparatuses are combined together.
18. The device of claim 15, further comprising an external operating device.
19. The apparatus of claim 15, wherein the means for exposing the sealed environment to the second chamber comprises a closed connection between the first and second chambers that can be opened to initiate testing.
20. The apparatus of claim 15, wherein the means for comparing the light reflectivity or light absorptivity to a calibration value comprises at least one digital camera.
21. The apparatus of claim 15, wherein the means for comparing the light reflectivity or light absorptivity to a calibrated value comprises means for obtaining a reflection spectrum or an absorption spectrum.
22. The apparatus according to claim 13 or 14, wherein the means for comparing the light reflectivity or light absorptivity with a calibration value further comprises image processing means.
23. A method for measuring the permeation rate of a package, comprising the steps of:
a) applying a layer of active material on the first side of the substrate or on the package;
b) securing the package on the first side of the substrate in a substantially hermetic manner;
c) exposing the assembly to an environment containing a compound that reacts with the active material; and
d) comparing the light reflectivity or light absorptivity of the active material layer with a calibrated value.
CNB028008804A 2001-03-29 2002-03-13 Method for measuring permeation rate, and experiment and apparatus for measuring and testing Expired - Fee Related CN1242250C (en)

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EP01201229 2001-03-29
EP01201229.0 2001-03-29
EP02075202.8 2002-01-17
EP02075202 2002-01-17

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* Cited by examiner, † Cited by third party
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JP2601665B2 (en) * 1987-10-19 1997-04-16 富士写真フイルム株式会社 Processing method of silver halide color photographic light-sensitive material
US5110713A (en) * 1987-10-30 1992-05-05 Fuji Photo Film Co., Ltd. Method for processing silver halide color photographic material
WO2002079757A2 (en) * 2001-03-29 2002-10-10 Koninklijke Philips Electronics N.V. Method and device for measuring a permeation rate
US7344901B2 (en) * 2003-04-16 2008-03-18 Corning Incorporated Hermetically sealed package and method of fabricating of a hermetically sealed package
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US7178384B2 (en) * 2004-02-04 2007-02-20 General Atomics Method and apparatus for measuring ultralow permeation
US8603825B2 (en) 2004-03-31 2013-12-10 Agency For Science, Technology And Research Sensor for measuring gas permeability of a test material
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US7257990B2 (en) * 2005-04-25 2007-08-21 General Atomics Accelerated ultralow moisture permeation measurement
DE102005057031B4 (en) * 2005-11-25 2011-04-21 Innovent E.V. Technologieentwicklung Device for permeation or mass transfer studies
US20080124558A1 (en) * 2006-08-18 2008-05-29 Heather Debra Boek Boro-silicate glass frits for hermetic sealing of light emitting device displays
EP1983079A1 (en) 2007-04-17 2008-10-22 Nederlandse Organisatie voor Toegepast-Natuuurwetenschappelijk Onderzoek TNO Barrier layer and method for making the same
US20100095705A1 (en) 2008-10-20 2010-04-22 Burkhalter Robert S Method for forming a dry glass-based frit
WO2010093237A1 (en) 2009-02-11 2010-08-19 Nederlandse Organisatie Voor Toegepast- Natuurwetenschappelijk Onderzoek Tno Optoelectronic device and method for fabricating such device
US8388742B2 (en) * 2010-01-13 2013-03-05 E I Du Pont De Nemours And Company Apparatus to measure permeation of a gas through a membrane
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US9356070B2 (en) 2012-08-15 2016-05-31 Epistar Corporation Light-emitting device
US20140048824A1 (en) 2012-08-15 2014-02-20 Epistar Corporation Light-emitting device
US9086351B1 (en) * 2013-03-14 2015-07-21 The United States Of America As Represented By The Secretary Of The Army Fixture for system-level glove testing of contact permeation
KR101469533B1 (en) * 2013-05-30 2014-12-05 전자부품연구원 Reactive material cartridge for measuring a permeation rate and an apparatus for measuring having the same
DE102013022032A1 (en) 2013-12-19 2015-06-25 Technische Universität Ilmenau Method for detecting foreign substances or degradation products in encapsulated systems and its use
JP6635033B2 (en) * 2014-06-17 2020-01-22 コニカミノルタ株式会社 Water vapor permeability evaluation method and water vapor permeability evaluation device
CN104048901B (en) * 2014-06-26 2016-03-30 河南省嵩阳高速公路有限公司 Permeable layers emulsified asphalt osmotic effect method of testing
US9529188B2 (en) 2015-03-25 2016-12-27 Amazon Technologies, Inc. Electrowetting device with multi layer support plate
CN105043935A (en) * 2015-05-18 2015-11-11 华南理工大学 Device and method of measuring infiltration performance of porous metal material on the basis of digital image processing
CN106442260B (en) * 2016-09-27 2019-11-01 江西理工大学 A method of infiltration coefficient during measurement rare earth leaching mine
US11181460B1 (en) * 2019-06-20 2021-11-23 The United States Of America As Represented By The Secretary Of The Army Apparatus and method for measuring permeation of contaminants through a complex protective material swatch
US11624672B2 (en) * 2020-06-23 2023-04-11 Ateq Apparatus and method for automatic leak detection
WO2024126566A1 (en) 2022-12-14 2024-06-20 Basf Coatings Gmbh Multilayer barrier film coated polymeric substrate, its manufacture and use in electronic devices

Family Cites Families (29)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4326514A (en) * 1980-06-20 1982-04-27 Minnesota Mining And Manufacturing Company Cartridge respirator with service life indicator
JPS6020135A (en) * 1983-07-15 1985-02-01 Daicel Chem Ind Ltd Material for measuring membrane performance and inspecting leakage
JPS6131937A (en) * 1984-07-25 1986-02-14 Mitsubishi Heavy Ind Ltd Detection of leak defect part
US4822743A (en) * 1984-12-13 1989-04-18 Lockheed Corporation Method and cloth for detecting leaks in closed bodies
JPS6232336A (en) * 1985-08-05 1987-02-12 Toshiba Corp Liquid leak detecting method by itv camera
RU94045909A (en) * 1985-11-29 1996-09-10 Бехли Эмиль Method for manufacture of heat-insulating building member and/or light member and device for its embodiment
JPH01307635A (en) * 1988-06-03 1989-12-12 Hamamatsu Photonics Kk Method of evaluating material transmission performance of thin film for testing
US4848138A (en) * 1988-07-15 1989-07-18 Marshall John M Window gas monitor
DE3828531A1 (en) * 1988-08-23 1990-03-15 Rudolf Dr Ing Ernst Oxygen absorbent and use of the same
JPH02306132A (en) * 1989-05-19 1990-12-19 Hitachi Cable Ltd Leakage oil sensor detection
US4987849A (en) * 1989-09-22 1991-01-29 Sherman Daniel A Signal device
US5001346A (en) * 1990-02-26 1991-03-19 Rockwell International Corporation Leak detection system with background compensation
US5128106A (en) * 1990-07-12 1992-07-07 Gte Products Corporation Lamp with an oxygen detector
US5047947A (en) * 1990-07-25 1991-09-10 Grumman Aerospace Corporation Method of modeling the assembly of products to increase production yield
US5447688A (en) * 1991-12-30 1995-09-05 Moore; Robert E. Detector, and method of using same
DE4214239C2 (en) * 1992-04-30 1994-06-16 Draegerwerk Ag RESPIRATORY MASK WITH AN INDICATOR
GB9311427D0 (en) * 1993-06-03 1993-07-21 Trigon Ind Ltd A multi-wall film
US5449912A (en) * 1994-06-15 1995-09-12 Modern Controls, Inc. Measurement cell for water vapor sensor
US5963881A (en) * 1995-09-22 1999-10-05 Texas Instruments Incorporated Method and system for enhancing the identification of causes of variations in the performance of manufactured articles
US5926262A (en) * 1997-07-01 1999-07-20 Lj Laboratories, L.L.C. Apparatus and method for measuring optical characteristics of an object
US5783110A (en) * 1997-04-17 1998-07-21 R-Tect, Inc. Composition for the detection of electrophilic gases and methods of use thereof
US6336753B1 (en) * 1999-01-20 2002-01-08 Sony Corporation Optical device, a fabricating method thereof, a driving method thereof and a camera system
JP2001051307A (en) * 1999-01-20 2001-02-23 Sony Corp Optical device, its producing, its drive method, and camera system
US6259370B1 (en) * 1999-08-03 2001-07-10 Technical & Try Co., Ltd. Leak sensor
US7448258B2 (en) * 1999-10-29 2008-11-11 Avery Dennison Corporation High throughput screening for moisture barrier characteristics of materials
KR20010102160A (en) * 1999-12-14 2001-11-15 사토 아키오 Sealing agent for liquid-crystal display cell, composition for sealing agent for liquid-crystal display cell, and liquid-crystal display element
US6622059B1 (en) * 2000-04-13 2003-09-16 Advanced Micro Devices, Inc. Automated process monitoring and analysis system for semiconductor processing
WO2002079757A2 (en) * 2001-03-29 2002-10-10 Koninklijke Philips Electronics N.V. Method and device for measuring a permeation rate
JP2005507557A (en) * 2001-05-24 2005-03-17 テスト アドバンテージ， インコーポレイテッド Method and apparatus for semiconductor testing

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100507510C (en) * 2004-09-30 2009-07-01 清华大学 Testing method for water oxygen permeability and its testing equipment
CN101246095B (en) * 2008-01-07 2011-03-30 电子科技大学 Device for measuring air permeability of isolation material
CN103217459A (en) * 2013-05-06 2013-07-24 深圳市华星光电技术有限公司 Method for detecting packaging effect of OLED (Organic Light Emitting Diode) panel
CN104465622A (en) * 2014-12-08 2015-03-25 京东方科技集团股份有限公司 Method and packaging structure for detecting water and oxygen penetration rate of back plate
CN104465622B (en) * 2014-12-08 2017-09-15 京东方科技集团股份有限公司 Detect the method and encapsulating structure of backboard water oxygen transmitance
CN105938084A (en) * 2016-06-28 2016-09-14 中国石油天然气股份有限公司 Method for evaluating permeability of chemical imbibition agent
CN114295602A (en) * 2021-12-30 2022-04-08 中国石油大学(华东) Raman pool system for testing hydrogen permeation path
CN114295602B (en) * 2021-12-30 2024-03-01 中国石油大学(华东) Raman pond system for testing hydrogen permeation path

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