CN1458677A - Parallel two-coordinate moving platform - Google Patents
Parallel two-coordinate moving platform Download PDFInfo
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- CN1458677A CN1458677A CN03124271A CN03124271A CN1458677A CN 1458677 A CN1458677 A CN 1458677A CN 03124271 A CN03124271 A CN 03124271A CN 03124271 A CN03124271 A CN 03124271A CN 1458677 A CN1458677 A CN 1458677A
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Abstract
This invention discloses a parallel two-coordinates movement platform which has two linear motors, an upper working table and a middle sliding table connected by two connectors and held on the machine base. When the linear motors move in one same direction with one same speed, the working table moves at the same speed as the motor; when the linear motors move with the same speed in opposite direction, the upper working table moves along the direction perpendicular to the motor with different speed from the linear motor. Acceleration of the platform can reach 15g, positioning precision reach 2 and bandwidth be raised to 300-400 Hz.
Description
Technical field
The present invention relates to a kind of platform of two plane motions, be meant a kind of two coordinate motion platforms in parallel especially.
Background technology
In the Chip Packaging process, it is a kind of main connected mode that gold ball bonding connects.At this moment, in order to raise the efficiency, require marking device to do the moving of little stroke of high frequency.Because stroke is little, running time is short, it is generally very big therefore to transport acceleration, and requires to guarantee very high kinematic accuracy.In the microelectronic component assembling process,, should measure the position and the shape of tin ball in each ball grid (BGA, Ball Grid Array) in principle, so that must be repaired to bad tin ball in order to guarantee the element functional reliability.At present, because the shortage of checkout equipment, what mainly adopt is that selective examination is main method.After density further increases, tin ball size continues to reduce, just must the geometric accuracy of each tie point be detected.Because the tie point number is many, distance is little, the detection method of development high-speed, high precision becomes inexorable trend.Especially at the miniature flat parts of assembling, BGA, CSP (Chip Scale Pakaging, chip-scale package) and in the very little electronic component process of some tie point spacings, the miniature scale vision measurement system can detect the defective of printing of tin slurry and paster process, so that in time with the least cost correction.Under the situation that guarantees precision, improve detection efficiency as far as possible and become one of focus of competition.The technical merit of the typical motion platform of current sealed in unit is: the positioning control system acceleration of motion is 6～12g, the positioning accuracy of 5～10 μ m, and frequency bandwidth is 200～300Hz.Along with the improvement of increase, packaging technology and the material of the dwindling of chip size, I/0 density, the renewal of IC (Integrated Circuit, integrated circuit) back encapsulation equipment is maked rapid progress.
Summary of the invention
The objective of the invention is to be in conplane two linear electric motors and connect and compose two coordinate motion platforms by connector, connecting rod and upper working table with hinge respectively, make connecting rod be in same plane the active force of upper working table.Device of the present invention can be used as the accurate high actuation mechanism of quickening, and is used for that gold ball bonding connects, the scanning means of accurate measurement etc.
A kind of two coordinate motion platforms in parallel of the present invention, comprise support, cover plate, connecting plate, linear electric motors, workbench, X-axis grating chi assembly, Y-axis grating chi assembly, the spacing smooth lotus root assembly of X-axis, the spacing optocoupler assembly of Y-axis, it also includes connector, connecting rod, the stator of two linear electric motors respectively by screw on support, mover is fixedlyed connected with two connectors respectively by screw, connector is connected with support with the support lower guideway by the support upper rail, two connectors are connected with an end of two connecting rods respectively by hinge, the connecting rod other end is connected with upper working table with axle by hinge, upper working table is connected with middle sliding stand by the upper working table guide rail, middle sliding stand is connected with support by middle sliding stand guide rail, on support, cover plate is fixedlyed connected with connecting plate by screw by screw for two connecting plates; The grating ruler reading head frame of X-axis grating chi assembly by screw on upper working table, the grating ruler reading head by screw on grating ruler reading head frame, the grating chi by screw on middle sliding stand; The grating ruler reading head frame of Y-axis grating chi assembly by screw on middle sliding stand, the grating ruler reading head by screw on grating ruler reading head frame, the grating chi by screw on support; The stroke limit plate of the spacing smooth lotus root assembly of X-axis by screw on upper working table, optocoupler by screw on the optocoupler support, the optocoupler support by screw on middle sliding stand; The stroke limit plate of the spacing smooth lotus root assembly of Y-axis by screw on middle sliding stand, optocoupler by screw on the optocoupler support, the optocoupler support by screw on support.
Two coordinate motion platforms in parallel of the present invention are in conplane two linear electric motors and connect and compose two coordinate motion platforms by two connectors, connecting rod and upper working table with hinge respectively, make that two connecting rods are in the same plane to the active force of upper working table.
Two coordinate motion platforms in parallel of the present invention, the mover of two linear electric motors is connected on the support by two connectors and support upper rail, support lower guideway, has reduced the quality of moving component, has improved the acceleration of motion of system.
Two coordinate motion platforms in parallel of the present invention, acceleration can reach 12～15g, and positioning accuracy can reach 2～5 μ m, and bandwidth can be brought up to 300～400Hz.The period of motion of scanning has significantly been shortened in the raising of acceleration level.
Two coordinate motion platforms of the present invention convert the rectilinear motion of linear electric motors the plane motion of two connecting rod link centers to by two connecting rods, by this hinge center being connected with upper working table, middle sliding stand being connected with support realizing that two parallel kinematic platforms do and the linear electric motors corresponding translational motion that moves in same plane.Compare with common XY platform, the motor stator of this system all is fixed on the support, therefore can significantly reduce the movement inertia of system, the acceleration of raising system.
Description of drawings
Fig. 1 is overall structure figure of the present invention.
Fig. 2 is the A-A cutaway view among Fig. 1.
Fig. 3 is the B-B cutaway view among Fig. 1.
Fig. 4 is the C-C cutaway view among Fig. 1.
Fig. 5 is the D-D cutaway view among Fig. 1.
203,209,1003, mandrel 202,210,304,308, pressing plate number in the figure: linear electric motors: 1,11 motor stators: 101 electric movers: 102 connectors: 2,10 end caps: 201,211,1001,1011 connecting rods: 3,9 needle bearings::: 204,1004
206,207,301,302,305,310 205,208,303,306, the end face sliding bearing 902,1002,1,010 1009 packing rings::,
307、309、1005、1008 311、312、313、314、901、903、
904,905,1006, the spacing smooth lotus root assembly of 1007X axle: the spacing smooth lotus root assembly of 4 Y-axis: 8 stroke limit plates: 401,801 smooth lotus roots: 402,802 smooth lotus root supports: 403,803X axle grating chi assembly: 7 Y-axis grating chi assemblies: 6 read head framves: 601,701 read heads: 602,702 grating chis: 603,703 upper working table: 5 upper working table guide rails: 501 upper working table guide rails: 502 supports: 12 support upper rails: 1201 support lower guideways: sliding stand in the middle of 1202: sliding stand guide rail in the middle of 14: 15,16: 17 connecting plates: 15,16 cover plates: 13 pretension screws: 1203,1301,1403
Embodiment
The present invention is further illustrated below in conjunction with drawings and Examples.
Two coordinate motion platforms in parallel of the present invention, comprise support 12, cover plate 13, connecting plate 15, connecting plate 16, linear electric motors 1, linear electric motors 11, upper working table 5, X-axis grating chi assembly 7, Y-axis grating chi assembly 6, the spacing smooth lotus root assembly 4 of X-axis, the spacing optocoupler assembly 8 of Y-axis, connector 2, connector 10, connecting rod 3, connecting rod 9, linear electric motors 1,11 stator by screw on support 12, mover by screw respectively with connector 2,10 is fixedly connected, connector 2,10 pass through support upper rail 1201 is connected with support 12 with support lower guideway 1202, connector 2,10 other ends by hinge respectively with connecting rod 3, an end of 9 connects, connecting rod 3,9 other ends are connected with upper working table 5 with axle 17 by hinge, upper working table 5 is by upper working table guide rail 501,502 are connected with middle sliding stand 14, middle sliding stand 14 is by middle sliding stand guide rail 1401,1402 are connected with support 12, connecting plate 15,16 by screw on support 12, cover plate 13 is fixedlyed connected with connecting plate by screw.
X-axis grating chi assembly 7 and Y-axis grating chi assembly 6 are used for measuring respectively the relative motion displacement of upper working table 5 and middle sliding stand 14 and the relative motion displacement between middle sliding stand 14 and the support 12.When the mover of linear electric motors 1,11 with identical speed during simultaneously along Y-axis forward or negative movement, upper working table 5 will be under the driving of connecting rod 3,9 also with identical speed along Y-axis forward or negative movement.When the mover 102 of linear electric motors 1 with a certain speed along the mover of Y-axis positive movement, linear electric motors 11 with same speed during along the Y-axis negative movement, upper working table 5 will be along the X-axis negative movement, but the varying in size of the movement velocity of the size of the speed of motion and linear electric motors 1,11.When the mover 102 of linear electric motors 1 with a certain speed along the mover of Y-axis negative movement, linear electric motors 11 with same speed during along the Y-axis positive movement, upper working table 5 will be along the X-axis positive movement, but the varying in size of the movement velocity of the size of the speed of motion and linear electric motors 1,11.When upper working table 5 required to make the translational motion of any direction, the movement velocity that can be by changing two linear electric motors 1,11 and the size of displacement realized (as shown in Figure 6).
The speed expression formula of upper working table 5:
The acceleration of upper working table 5 is expressed formula:
Wherein:
The s-length of connecting rod
Hinge that the h-connecting rod is connected with connector and the distance between the frame guide rail
The angle of θ-connecting rod and Y-axis
y
1, y
2The y coordinate of-linear electric motors
X, the coordinate of y-upper working table central point
Fig. 2 is the A-A cutaway view among Fig. 1.Among the figure, cover plate 13 and support 12 constitute the support part.The stator 101 of linear electric motors 1 by screw on support 12, the mover 102 of linear electric motors 1 is fixed together by screw and connector 2, connector 2 is connected on the support 12 by support upper rail 1201 and support lower guideway 1202, the connected mode of linear electric motors 11 and linear electric motors 1 are identical, can carry out pretension to support upper rail 1201 and support lower guideway 1202 by adjusting pretension screw 1301.Under the effect of frame guide rail, the mover of two linear electric motors 1,11 moves along Y direction.Middle sliding stand 14 is connected with support 12 by guide rail 1401,1402, can carry out pretension to middle sliding stand guide rail 1401 and 1402 by adjusting pretension screw 1203.On middle sliding stand 14, on grating ruler reading head frame 601, grating chi 603 is by the side of screw at support 12 by screw for grating ruler reading head 602 by screw for grating ruler reading head frame 601 in the Y-axis grating chi assembly 6.When relative support 12 moving linearlies of middle sliding stand 14, grating ruler reading head 602 will provide the relative position of the two.Stroke limit plate 801 in the Y-axis stroke limit light lotus root assembly 8 by screw on middle sliding stand 14, two optocouplers 802 side by side by screw on optocoupler support 803, on support 12, sliding stand 14 was along the stroke of Y direction in the middle of this assembly was used to limit by screw for optocoupler support 803.
Fig. 3 is the B-B cutaway view among Fig. 1.Among the figure, the upper working table 5 of cross slid platform is connected with middle sliding stand 14 by guide rail 501,502, can carry out pretension to upper working table guide rail 501,502 by adjusting pretension screw 1403.The grating ruler reading head frame 701 of X-axis grating chi assembly 7 by screw on upper working table 5, grating ruler reading head 702 by screw on grating ruler reading head frame 701, grating chi 703 by screw on middle sliding stand 14.When upper working table 5 relatively in the middle of during sliding stand 14 moving linearlies grating ruler reading head 702 will provide the two relative position.Stroke limit plate 401 in the X-axis stroke limit light lotus root assembly 4 by screw on upper working table 5, two optocouplers 402 side by side by screw on optocoupler support 403, on middle sliding stand 14, this assembly is used to limit the stroke of upper working table 5 along X-direction to optocoupler support 403 by screw.
Fig. 4 is the C-C cutaway view among Fig. 1.This Figure illustrates connecting rod 3 respectively and the annexation between the mover 102 of upper working table 5 and linear electric motors 1.Connecting rod 3 is connected on the upper working table 5 by needle bearing 304,308 and axle 17, and end face sliding bearing 301,302,310,311 is used for the supporting and the location of the above-below direction of connecting rod 3.The right-hand member of connecting rod 3 is supported in the dead eye of connector 2 by mandrel 204, needle bearing 202 and 209.Supporting and location that sliding bearing 206,313,314,207 is realized the above-below direction of connecting rod 3 on connector 2.Packing ring 303,306,307,309 is used for the axial location of needle bearing 304,902,308.Pressing plate 203,209 and packing ring 205,208 are used for the axial restraint of mandrel 204.End cap 201,211 is used for the axial location of needle bearing 202,210.
Fig. 5 is the D-D cutaway view among Fig. 1.This Figure illustrates connecting rod 9 respectively and the annexation between the mover of upper working table 5 and linear electric motors 11.Connecting rod 9 is connected on the upper working table 5 by needle bearing 902 and axle 17, and end face sliding bearing 305,901,903,312 is used for the supporting and the location of the above-below direction of connecting rod 9.The right-hand member of connecting rod 9 is supported in the dead eye of connecting plate 10 by mandrel 1004, needle bearing 1002 and 1010.Supporting and location that sliding bearing 1006,904,905,1007 is realized the above-below direction of connecting rod 9 on connecting plate 10.Pressing plate 1003,1009 is used for the axial restraint of mandrel 1004.End cap 1001,1011 and packing ring 1006,1008 are used for the axial location of needle bearing 1002,1010.
The present invention adopts two linear electric motors 1,11 that dispose continuously to connect and compose in parallel two coordinate motion platforms with upper working table 5 with hinge by connector 2,10 and connecting rod 3,9 respectively.When driving the mover of two linear electric motors 1,11 with friction speed, can make upper working table 5 make the translational motion of certain limit, realize conventional XY motion control.Because the mover of linear electric motors 1,11 is connected on the support by connector 2,10 and support upper rail 1201 and support lower guideway 1202, so the quality of moving component greatly reduces, thereby can significantly improve the acceleration of motion of system.
The invention belongs to the precision drive parts, be used for that gold ball bonding connects, the scanning means of accurate measurement, be suitable for as high acceleration, a directional run is big and the little XY motion platform of a directional run.
Claims (2)
1, a kind of two coordinate motion platforms in parallel, comprise support, cover plate, connecting plate, linear electric motors, workbench, X-axis grating chi assembly, Y-axis grating chi assembly, the spacing smooth lotus root assembly of X-axis, the spacing optocoupler assembly of Y-axis, it is characterized in that also including connector (2), connecting rod (3), linear electric motors (1,11) stator respectively by screw on support (12), mover by screw respectively with connector (2,10) fixedly connected, connector (2,10) end is connected with support (12) with support lower guideway (1202) by support upper rail (1201), connector (2,10) other end by hinge respectively with connecting rod (3,9) a end connects, connecting rod (3,9) other end is connected with upper working table (5) with axle (17) by hinge, upper working table (5) is by upper working table guide rail (501,502) be connected with middle sliding stand (14), middle sliding stand (14) is by middle sliding stand guide rail (1401,1402) be connected with support (12), connecting plate (15,16) by screw on support (12), cover plate (13) is fixedlyed connected with connecting plate by screw; The grating ruler reading head frame (701) of X-axis grating chi assembly (7) by screw on upper working table (5), grating ruler reading head (702) by screw on grating ruler reading head frame (701), grating chi (703) by screw on middle sliding stand (14); The grating ruler reading head frame (601) of Y-axis grating chi assembly (6) by screw on middle sliding stand (14), grating ruler reading head (602) by screw on grating ruler reading head frame (601), grating chi (603) by screw on support (12); The stroke limit plate (401) of the spacing smooth lotus root assembly of X-axis (4) by screw on upper working table (5), optocoupler (402) by screw on optocoupler support (403), optocoupler support (403) by screw on middle sliding stand (14); The stroke limit plate (801) of the spacing smooth lotus root assembly of Y-axis (8) by screw on middle sliding stand (14), optocoupler (802) by screw on optocoupler support (803), optocoupler support (803) by screw on support (12).
2, two coordinate motion platforms in parallel according to claim 1, it is characterized in that: this device is in conplane two linear electric motors (1,11) and connects and composes two coordinate motion platforms with upper working table (5) with hinge by connector (2,10), connecting rod (3,9) respectively, makes that connecting rod (3,9) is in the same plane to the active force of upper working table (5).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 03124271 CN1206717C (en) | 2003-04-30 | 2003-04-30 | Parallel two-coordinate moving platform |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 03124271 CN1206717C (en) | 2003-04-30 | 2003-04-30 | Parallel two-coordinate moving platform |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1458677A true CN1458677A (en) | 2003-11-26 |
| CN1206717C CN1206717C (en) | 2005-06-15 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 03124271 Expired - Fee Related CN1206717C (en) | 2003-04-30 | 2003-04-30 | Parallel two-coordinate moving platform |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1294638C (en) * | 2004-03-18 | 2007-01-10 | 上海交通大学 | Air floation XY coordinates plane movoment platform |
| CN100382273C (en) * | 2006-06-05 | 2008-04-16 | 北京航空航天大学 | Double staight-liue motor redundant synchronous-driven T-shape operating table |
| CN102023643A (en) * | 2010-09-30 | 2011-04-20 | 北京航空航天大学 | 3-PRP planar three-degree-of-freedom parallel mechanism positioning method |
| CN106020246A (en) * | 2016-06-30 | 2016-10-12 | 广东工业大学 | Motion platform |
| CN114280465A (en) * | 2022-03-04 | 2022-04-05 | 武汉普赛斯电子技术有限公司 | Platform moving device applied to chip testing equipment |
-
2003
- 2003-04-30 CN CN 03124271 patent/CN1206717C/en not_active Expired - Fee Related
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1294638C (en) * | 2004-03-18 | 2007-01-10 | 上海交通大学 | Air floation XY coordinates plane movoment platform |
| CN100382273C (en) * | 2006-06-05 | 2008-04-16 | 北京航空航天大学 | Double staight-liue motor redundant synchronous-driven T-shape operating table |
| CN102023643A (en) * | 2010-09-30 | 2011-04-20 | 北京航空航天大学 | 3-PRP planar three-degree-of-freedom parallel mechanism positioning method |
| CN102023643B (en) * | 2010-09-30 | 2012-12-19 | 北京航空航天大学 | 3-PRP planar three-degree-of-freedom parallel mechanism positioning method |
| CN106020246A (en) * | 2016-06-30 | 2016-10-12 | 广东工业大学 | Motion platform |
| CN114280465A (en) * | 2022-03-04 | 2022-04-05 | 武汉普赛斯电子技术有限公司 | Platform moving device applied to chip testing equipment |
| CN114280465B (en) * | 2022-03-04 | 2022-05-13 | 武汉普赛斯电子技术有限公司 | Platform moving device applied to chip testing equipment |
Also Published As
| Publication number | Publication date |
|---|---|
| CN1206717C (en) | 2005-06-15 |
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