CN1458145A - Process for purifying high purity dimethyl sulfoxide, and dimethyl sulfoxide and amine mixture - Google Patents
Process for purifying high purity dimethyl sulfoxide, and dimethyl sulfoxide and amine mixture Download PDFInfo
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- CN1458145A CN1458145A CN03124116A CN03124116A CN1458145A CN 1458145 A CN1458145 A CN 1458145A CN 03124116 A CN03124116 A CN 03124116A CN 03124116 A CN03124116 A CN 03124116A CN 1458145 A CN1458145 A CN 1458145A
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Abstract
The present invent relates to provide a recovery method of DMSO and the mixture of DMSO and MEA, is characterizes in a cheap, excellent efficiency and high pure degree, low metal components recovery method for the particular washing solution and the particular releasing solution and the like from the treatment of electrical materials the used solutions normally used in industry which is DMSO and the mixture of DMSO and MEA. The solvent method for separate recovery is according to the distillate of the dimethyl sulfoxide up to 95% and the mixture of dimethyl sulfoxide and amines comprising up to 65% amines carried out distillation from the mixture at least comprises dimethyl sulfoxide and amines.
Description
Technical field
The present invention relates to from contain at least dimethyl sulfoxide (DMSO) (below, be called DMSO) and the mixture of amine of amine (2-monoethanolamine, another name thanomin, hereinafter referred to as MEA) etc. in purifying contain 95% or the high purity DMSO of above DMSO and contain the amine 65% of MEA etc. or the method for the mixture of above DMSO and amine.More particularly, the present invention relates to the liquid that respectively uses at the mixture of the amine of the industrial DMSO that is widely used and DMSO and MEA etc. such as the special washings that from processing, uses, special stripping liquid as reaction solvent when medicine, pesticide intermediate are made or electronic material etc., use than former method more cheap and efficient highland and industrial waste generation lack the method for mixture of purification of high-purity DMSO and DMSO and amine.
Background technology
The special washings that uses in the processing of DMSO as reaction solvent when medicine, pesticide intermediate are made or electronic material etc., special stripping liquid etc. are widely used industrial.Particularly, the mixture of 30%DMSO and 70%MEA is that excellent electronic material is handled a kind of with special stripping liquid, uses mostly at the resist as one of manufacturing processedes such as liquid crystal apparatus or IC and washs in the stripping process.In addition, DMSO uses using stripping liquid to carry out also can be used as rinsing liquid in the rinsing process after resist is peeled off.In stripping liquid that uses that in these operations, uses and the rinsing liquid that uses, sneak into the various organic compound that produce at each in-process and various mineral compound, respectively in a last operation (operation) and/or subsequent processing (operation) soup of use, reach the various organic compound of generation and various mineral compound etc. in a last operation (operation) and/or subsequent processing (operation) respectively.Specifically, in the stripping liquid that uses, the DMSO that sneak into the moisture from the atmosphere gas of a last operation (operation), resist washing stripping process, subsequent processing (operation), each in-process etc., various metal ingredient, photo-resist, in rinsing process, uses etc.In the rinsing liquid that uses, the stripping liquid that sneak into the moisture from the atmosphere gas of a last operation (operation), rinsing process, subsequent processing (operation), each in-process etc., various metal ingredient, photo-resist, in conduct, uses in the resist washing stripping process of an operation etc.
In recent years, the turnout of liquid crystal apparatus or IC etc. sharply increases, must obligato stripping liquid in these manufacturing processedes or the usage quantity of rinsing liquid significantly increase, the liquid that the amount of liquid of supervening that respectively uses significantly increases, uses be treated as important problem.
For this problem, carried out various combinations in the past and proposed to have following described solution.Specifically,, there is motion to point out, reclaims the method (spy opens flat 9-49093, the spy opens 2001-194807) of above-mentioned stripping liquid from the stripping liquid that uses by distillation as the treatment process of the stripping liquid that uses.In addition, treatment process as the rinsing liquid that uses, have motion to point out, repeat that crystallization operation reclaims the method (spy opens flat 7-118223) of DMSO from the rinsing liquid that uses or by distillation, neutralization, other physical chemistry processing etc. from the method for the rinsing liquid recovery DMSO that uses (spy open flat 9-012534, spy open flat 9-278743, the spy opens 2001-089438).
But along with the noticeable change of market economy in recent years, stripping liquid or rinsing liquid reach the quantity and the composition of the liquid that respectively uses and compared noticeable change in the past.Follow this variation, as to the quantity of the former liquid that respectively uses, form once for these motions of solving countermeasure may not be certain countermeasure that effectively solves for the quantity of the present liquid that respectively uses, in forming.Specifically, situation at the stripping liquid that uses, in the stripping liquid that is using as mentioned above, sneak into the DMSO that uses in the moisture from the atmosphere gas of a last operation (operation), resist washing stripping process, subsequent processing (operation), each in-process etc., various metal ingredient, photo-resist, the rinsing process etc., but the increase of the mixed volume of the DMSO that wherein particularly in rinsing process, uses sometimes as subsequent processing (operation), with respect to the DMSO concentration in the stripping liquid be 30%, DMSO concentration increase in the stripping liquid that uses.If the present stripping liquid that uses of method processing that from the stripping liquid that uses, reclaims stripping liquid by distillation in order to preceding motion, because the boiling point of DMSO and MEA is roughly the same, the composition of the stripping liquid that uses before the composition of the stripping liquid of recovery and the distillation is roughly the same.Therefore, for the stripping liquid that uses that will reclaim purifying now uses as stripping liquid, it is necessary that adding MEA adjusts composition.Therefore, get back to the preceding DMSO concentration of use for DMSO concentration in the stripping liquid that uses that makes recovery, must add MEA in large quantities, adjust, serious problem is destroyed, become to the balance that need and supply with significantly.
In addition, situation at the rinsing liquid that uses, in the stripping liquid that is using as mentioned above, though the stripping liquids that sneak into the moisture from the atmosphere gas of a last operation (operation), rinsing process, subsequent processing (operation), each in-process etc., various metal ingredient, photo-resist, use in the resist washing stripping process of a last operation etc. wherein particularly wash the mixed volume increase of the stripping liquid that uses in the stripping process etc., the MEA concentration increase in the rinsing liquid that uses sometimes at the resist of a last operation (operation) sometimes.By before the periodic crystallisation operation of the motion method that from the rinsing liquid that uses, reclaims DMSO when handling the present rinsing liquid that uses since by separating of crystalline DMSO and MEA DMSO insufficient, that from the rinsing liquid that uses, reclaim can not utilize again as rinsing liquid.Further,, under present MEA mixed volume, produces a large amount of industrial wastes, from the expense aspect, the viewpoint of resources effective utilization, have problems because the MEA that sneaks into all becomes industrial waste.In addition, when the distillation by former motion, neutralization, other the method for recovery DMSO such as physical chemistry processing are handled the present rinsing liquid that uses, though the DMSO that reclaims from the above-mentioned rinsing liquid that uses can be used as rinsing liquid sometimes and utilizes, but the MEA liquid of promptly use this method, sneaking into all becomes industrial waste, under present MEA mixed volume, produce a large amount of industrial wastes, from the expense aspect, the viewpoint of resources effective utilization, existing problems.
By above said content as can be known, suddenly wait to develop the quantity of the liquid that respectively uses that meets present situation, the few suitable recovery method of cheapness, efficient height and industrial waste generation of composition.
Summary of the invention
The object of the present invention is to provide a kind of purification process, this method is from containing the mixture of dimethyl sulfoxide (DMSO) and amine, for example, as the special washings that in the processing of electronic material etc., uses, special stripping liquids etc. are from the liquid that respectively uses at the mixture of industrial DMSO that is widely used and amine such as DMSO and MEA, with and efficient highland more cheap than former method, and the industrial waste generation reclaims the mixture of DMSO and DMSO and amine less, further, the mixture of the DMSO of recovery and DMSO and amine is as the mixture of electronic material with recycling highly purified DMSO and DMSO and amine.
The objective of the invention is to contain DMSO 95% or above high purity DMSO and to contain amine 65% or the purification process of the DMSO of the mixture of above DMSO and amine and amine reaches by from the mixture that contains DMSO and amine, reclaiming with fractionation by distillation.
By the present invention, can be from the liquid that respectively uses of the mixture of existing DMSO and DMSO and MEA, reclaim the mixture of amines such as purifying DMSO and DMSO and MEA with and efficient highland easier and industrial waste generation than former method with lacking, further, reclaiming the DMSO of purifying and the mixture of amines such as DMSO and MEA is as the mixture of electronic material with recovery recycling highly purified DMSO of purifying and amines such as DMSO and MEA.And the DMSO that reclaims purifying according to method of the present invention also can utilize in various reaction solvents, dyestuff solvent, anti-removing mildew etc. again.Further, by the present invention, compared with former method and can in the device of simple structure, reclaim purifying, processing cost is low.The present invention for resource-savingization, to reduce cost be useful.
Description of drawings
Fig. 1 is the model diagram of the purification devices that uses in the purifying of dimethyl sulfoxide (DMSO) of the present invention and composition thereof for brief description.Nomenclature
1 distillation tower (packed tower)
2 electrical condensers
3 reboilers
4～11 pipelines
12 relief pipes
Embodiment
In 1 distillation tower, separate the amine that may obtain pure DMSO and pure MEA etc. in theory though will contain the mixture of amines such as DMSO and MEA, need for this reason the very many distillation towers of stage number, industrial be uneconomic.
The present invention is the purification process of a kind of DMSO and amine, from containing the mixture of DMSO and amine, reclaims by fractionation by distillation and to contain DMSO 95% or above high purity DMSO, or contain amine 65% or the above DMSO and the mixture of amine.
The present invention is the purification process of a kind of DMSO and amine, preferably returns by fractionation by distillation from the mixture that contains DMSO and amine and contains DMSO 95% or above high purity DMSO, and contain amine 65% or the above DMSO and the mixture of amine.
The mixture that contains DMSO and amine before the distillation among the present invention so long as contain DMSO at least and 2 kinds of compositions of amine are just passable, has no particular limits composition.The mixture that contains DMSO and amine before the distillation preferably contains 2 component mixtures of DMSO and MEA.
The mixture that contains DMSO and amine before the distillation is preferably 2 different kinds of the composition that contains DMSO and amine or above mixture.Containing 2 different kinds of the composition of DMSO and amine or above mixture is, for example, and the combination of the mixture that the content of DMSO is higher than the content of MEA, the mixture identical or lower than the content of MEA with the content of the content of DMSO and MEA.Further preferably DMSO content be 50% or above mixture and DMSO content be 50% or the composition of following mixture, further, more preferably DMSO content be 80% or above mixture and DMSO content be 40% or the composition of following mixture.In addition, the distillation before the mixture that contains DMSO and amine can be aqueous, can be not moisture yet, except that DMSO and amine, can also contain organism, the inorganics of some amounts.
Typical example as the mixture that contains DMSO and amine before the distillation among the present invention, though can be set forth in special washings that uses that uses in the processing of electronic material etc. and the special stripping liquid that uses, but the mixture of DMSO of the present invention and amine is not limited in this, also can be the mixture that uses in other purposes.And, be not limited in the liquid that uses, can be widely applicable for the mixture of DMSO and amine.
In addition, among the present invention, the mixture that contains DMSO and amine before the distillation can use the mixture that contains different DMSO of composition and amine individually respectively and distill, and distills after also can mixing and use.
In addition, among the present invention, the mixture that contains DMSO and amine before the distillation is preferably for example removed by operations such as distillations in advance, than the also low composition of MEA boiling point, specifically, after the organism such as water, 2-propyl alcohol, carries out the amine distillation.Amine is for example being removed than the decompression degree in the distillation procedure of the low-boiling composition of MEA, is preferably 53.3kPa or following, 13.3kPa or following more preferably.
In the purification process of the present invention, will contain 95% or the cut of above DMSO be called the high purity dimethyl sulfoxide.
In the purification process of the present invention, preferably use the distillation tower Separation and Recovery to contain 95% or the high purity dimethyl sulfoxide of above dimethyl sulfoxide (DMSO), or contain 65% or the dimethyl sulfoxide (DMSO) of above amine and the mixture of amine.
The kind of the distillation tower that use this moment can be the distillation tower of any kind such as packed tower, tray column, wet-wall tower.When selecting packed tower, the weighting material of use can be regular, also can be irregular.In addition, the operational condition of Ci Shi distillation tower is following illustrated.Pressure in this underpressure distillation operation is preferably 13.3kPa or following, more preferably 6.7kPa or following.In addition, in this underpressure distillation operation, soak part, the particularly preferred erosion resistance material that uses stainless steel etc. in the material of the later equipment of gasification part at the distillation tower associate device.
In the purification process of the present invention, more preferably contain the mixture of DMSO and amine from different two or the above supply of distillation tower.
In the purification process of the present invention, further, more preferably from different 2 kinds of mixtures that contain DMSO and amine of two or above supply of a distillation tower.
In the purification process of the present invention, preferably obtain 1～35%DMSO, 65～99% or the mixture of above amine from cat head.Amine is preferably MEA.
Further, in the purification process of the present invention, preferably obtain containing 95% or the high purity dimethyl sulfoxide of above DMSO at the bottom of the tower.Amine is preferably MEA.
The separation criterion of this moment can from the composition of the mixture of composition, the DMSO that will obtain and the amine of the mixture that contains DMSO and amine before distilling and contain 95% or the composition of the high purity DMSO of above DMSO etc. arbitrary decision.
Usually, as the mixture that contains DMSO and amine before the distillation, the mixed solution that uses higher MEA of MEA concentration ratio and DMSO is as stripping liquid, the stripping liquid that uses and use before the liquid phase ratio, the concentration of DMSO raises usually.Among the present invention, preferably by in this distillation tower, supplying with stripping liquid that originally uses and the rinsing liquid that uses simultaneously, in 1 distillation tower, can at the bottom of tower, obtain the low DMSO of MEA, obtain the MEA of or composition that MEA concentration high identical and the mixed solution of DMSO from cat head with above-mentioned stripping liquid.Further, preferably form the different liquid that uses among the present invention by supply with 2 kinds from two of 1 distillation tower, when can reduce the MEA concentration among the DMSO at the bottom of the tower, form in two kinds and can obtain isolated M EA the liquid that uses low in the different liquid that uses, from cat head, at the bottom of tower, can obtain isolating DMSO the liquid that uses high from MEA concentration from MEA concentration.
Further, in the present invention, the DMSO that obtains at the bottom of the tower can utilize again.In order to improve the concentration of this DMSO, preferably carry out following operation.
In addition, in the present invention,, preferably neutralize afterwards, carry out underpressure distillation by acid in order further to remove MEA remaining in the high purity DMSO that obtains.
The preferred mineral acid of sulfuric acid, hydrochloric acid, phosphoric acid etc. that uses neutralizes.By the amine in the immobilization mixture, for example, MEA is as inorganic acid salt, can underpressure distillation DMSO.Wherein, owing to be nonvolatile, reason such as the waste disposal of the tower after the distillation is easy is especially preferably used sulfuric acid.The vitriolic amount of using this moment is preferably 0.8～2.0 times of equivalent of the MEA that exists, more preferably 1.0～1.5 times of equivalents in high purity DMSO.Sulfuric acid amount is during less than 0.8 times of equivalent, and MEA can not fully be neutralized, and has the distilled situation.In addition, when for a long time than 2.0 times of equivalents, owing to significantly promoted by the DMSO decomposition of acid, and, because there is situation about raising the cost in the sulfuric acid surplus.
By the underpressure distillation after the acid neutralization, the tower temperature is generally 130 ℃ or following, more preferably 110 ℃ or following.As the pressure in the tower of this moment, respectively preferably at 14.2kPa or following, 6.7kPa or following.If temperature or hypertonia, existence significantly promote the situation of the decomposition of DMSO, so not preferred.
In the present invention, the DMSO that preferably such underpressure distillation is obtained further carries out the processing of ion exchange treatment, charcoal absorption processing, kaolin processing, molecular sieve adsorption processing etc.By carrying out this processing, can eliminate the MEA of the trace of also not removing by neutralization, underpressure distillation more completely.Wherein, because the elimination of MEA is definite, processing speed is than reason such as very fast, most preferably ion exchange treatment.
Ion exchange treatment is suitable to DMSO is undertaken by ion exchange tower as the liquid of principal constituent.At this moment, as the ion exchange resin of filling in the tower, be suitable for using separately Zeo-karb.Though use the mixture of Zeo-karb and anionite-exchange resin also to have processing power, be suitable for using separately Zeo-karb.
In addition, ion-exchange can be that the thermopnore formula can be a fixed-bed type also, is preferably fixed-bed type.Treatment temp is preferably normal temperature.
Though the logical amount of liquid of ion exchange treatment roughly standard is 100～150 times of amounts of the ion exchange resin of hygrometric state, suitable logical amount of liquid depends on the exchange capacity of resin and the MEA concentration in the processed liquid widely.The analysis of carrying out the MEA concentration in the processed liquid before processing is important.
Among the present invention, more preferably the liquid after the ion exchange treatment is carried out further rectifying.For example, during rectifying the tower temperature be 130 ℃ or following, to be more suitable for be 110 ℃ or following.As the pressure in the tower, preferably be respectively under 14.2kPa or following, 6.7kPa or the following decompression.If temperature or hypertonia then significantly promote the decomposition of DMSO, so there is not preferred situation.
In addition, when rectifying, the portion in contact with the electrolyte of distillation tower associate device, particularly the gasify material of the later equipment of part preferably use the erosion resistance material.
Further, the thermolysis of the DMSO when preventing rectifying, the DMSO that uses in the preferred distillation keeps alkalescence as the pH of the thick liquid of principal constituent.Preferred pH 8 or more than, more preferably in the scope of pH 9～12, select suitable pH value.Though the material that uses during for alkalescence as the pH that adjusts thick liquid can be enumerated the oxyhydroxide of basic metal or alkaline-earth metal or carbonate etc., especially preferably uses sodium hydroxide.
In the present invention, the rate of recovery or purifying rate when improving the mixture that from the mixture that contains DMSO and amine of the liquid that respectively uses etc., reclaims purification of high-purity DMSO and DMSO and amine MEA, reduce cost etc., preferably use aforesaid optimum condition.
By the present invention, use than former method cheapness, efficient height and industrial waste generation lack method reclaim purifying and handle with recycling high purity DMSO as electronic material.Contain DMSO 95% or above high purity DMSO with what purification process of the present invention obtained, preferably can in electronic material is handled, use.The mixture that contains amine 65% or above dimethyl sulfoxide (DMSO) and amine that obtains with purification process of the present invention preferably can use in electronic material is handled.
The DMSO that is recovered purifying among the present invention is except being suitable for using electronic material is handled, also being suitable for using in the reaction solvent or synthetic agent of medicine, pesticide intermediate.
Embodiment
Below, with reference to accompanying drawing embodiments of the invention are described in detail, but the present invention is not limited in these embodiment.
Embodiment 1
Fig. 1 is the model diagram of the recovery purification devices that uses in the purifying of dimethyl sulfoxide (DMSO) of the present invention and composition thereof for brief description.
In Fig. 1, supply with the mixture 7.0 (kg/h) that contains 40%DMSO, 60%MEA, supply with the mixture 6.0 (kg/h) that contains 82%DMSO, 18%MEA to distillation tower 1 to distillation tower 1 from the downward 1 meter pipeline that connects 4 of cat head of the distillation tower 1 of 5 meters of packing heights respectively, keep pressing under the decompression of 4.0kPa in the tower and distill from the downward 3 meters pipelines that connect 5 of the cat head of distillation tower 1.The steam that produces imports in the condenser 2 by pipeline 6, and a part is supplied with by pipeline 7 and given distillation tower 1 in DMSO that condensation obtains in condenser 2 and the mixture of MEA, discharges the mixture of remaining DMSO and MEA from pipeline 8.The amount of DMSO that obtain this moment and the mixture of MEA is 7.0 (kg/h), and it consists of DMSO 30%, MEA 70%.Being recovered the DMSO of purifying and the quality of MEA mixture is, only filter with membrane filter, former state can be used as electronic material handle with, can utilize again.In addition, be 6.0 (kg/hs) from the high purity DMSO that pipeline 11 obtains DMSO 99%, MEA1% this moment.In order to remove the MEA among the high purity DMSO, further to this high purity DMSO neutralize, underpressure distillation, ion-exchange, rectifying, reclaim purifying DMSO.This reclaims quality and synthetic DMSO identical in quality of the DMSO of purifying, MEA content below detection limit, only with membrane filter filter, former state can be used as the electronic material processing with, can utilize again.
Use device with embodiment 1 same configuration, supply with the mixture 420 (kg/h) that contains 50%DMSO, 50%MEA, supply with the mixture 1314 (kg/h) that contains 90%DMSO, 10%MEA to distillation tower 1 to distillation tower 1 from pipeline 4 respectively, keep pressing in the tower for 4.0kPa and distill from pipeline 5.Part in DMSO that condensation obtains in condenser 2 and the mixture of MEA is supplied with by pipeline 7 and is given distillation tower 1, discharges remaining mixture from pipeline 8.The amount of DMSO that obtain this moment and the mixture of MEA is 470 (kg/h), and it consists of DMSO 30%, MEA 70%.Being recovered the DMSO of purifying and the quality of MEA mixture is, only filter with membrane filter, but just former state as electronic material handle with, can utilize again.In addition, be 1264 (kg/hs) from the high purity DMSO that pipeline 11 obtains DMSO 99%, MEA 1% this moment.Further to this high purity DMSO neutralize, underpressure distillation, ion-exchange, rectifying, reclaim purifying DMSO.This reclaims quality and synthetic DMSO identical in quality of the DMSO of purifying, and MEA content only filters with membrane filter below detection limit, but just former state as the electronic material processing with, can utilize again.
Use device with embodiment 1 same configuration, supply with the mixture 420 (kg/h) that contains 40%DMSO, 60%MEA, supply with the mixture 1320 (kg/h) that contains 70%DMSO, 30%MEA to distillation tower 1 to distillation tower 1 from pipeline 4 respectively, keep pressing in the tower for 4.0kPa and distill from pipeline 5.Part in DMSO that condensation obtains in condenser 2 and the mixture of MEA is supplied with by pipeline 7 and is given distillation tower 1, discharges remaining mixture from pipeline 8.The amount of DMSO that obtain this moment and the mixture of MEA is 911 (kg/h), and it consists of DMSO 30%, MEA 70%.Being recovered the DMSO of purifying and the quality of MEA mixture is, only filter with membrane filter, but just former state as electronic material handle with, can utilize again.In addition, obtain the high purity DMSO 823 (kg/h) of DMSO 99%, MEA 1% this moment from pipeline 11.Further to this high purity DMSO neutralize, underpressure distillation, ion-exchange, rectifying, reclaim purifying DMSO.This reclaims quality and synthetic DMSO identical in quality of the DMSO of purifying, and MEA content only filters with membrane filter below detection limit, but just former state as the electronic material processing with, can utilize again.
The device of use and embodiment 1 same configuration is supplied with the mixture 1734 (kg/h) that contains 40%DMSO, 60%MEA from pipeline 4 to distillation tower 1, keeps the interior pressure of tower to distill for 4.0kPa.Part in DMSO that condensation obtains in condenser 2 and the mixture of MEA is supplied with by pipeline 7 and is given distillation tower 1, discharges remaining mixture from pipeline 8.The amount of DMSO that obtain this moment and the mixture of MEA is 1483 (kg/h), and it consists of DMSO 30%, MEA 70%.Being recovered the DMSO of purifying and the quality of MEA mixture is, only filter with membrane filter, but just former state as electronic material handle with, can utilize again.In addition, be 251 (kg/hs) from the high purity DMSO that pipeline 11 obtains DMSO99%, MEA 1% this moment.Further to this high purity DMSO neutralize, underpressure distillation, ion-exchange, rectifying, reclaim purifying DMSO.This reclaims quality and synthetic DMSO identical in quality of the DMSO of purifying, and MEA content only filters with membrane filter below detection limit, but just former state as the electronic material processing with, can utilize again.
The device of use and embodiment 1 same configuration is supplied with the mixture 1740 (kg/h) that contains 90%DMSO, 10%MEA from pipeline 5 to distillation tower 1, keeps the interior pressure of tower to distill for 4.0kPa.Part in DMSO that condensation obtains in condenser 2 and the mixture of MEA is supplied with by pipeline 7 and is given distillation tower 1, discharges remaining mixture from pipeline 8.The amount of DMSO that obtain this moment and the mixture of MEA is 226 (kg/h), and it consists of DMSO 30%, MEA 70%.Being recovered the DMSO of purifying and the quality of MEA mixture is, only filter with membrane filter, but just former state as electronic material handle with, can utilize again.In addition, obtain the high purity DMSO 1508 (kg/h) of DMSO 99%, MEA 1% this moment from pipeline 11.Further to this high purity DMSO neutralize, underpressure distillation, ion-exchange, rectifying, reclaim purifying DMSO.This reclaims quality and synthetic DMSO identical in quality of the DMSO of purifying, and MEA content only filters with membrane filter below detection limit, but just former state as the electromagnetic material processing with, can utilize again.
Claims (12)
1. the purification process of the mixture of a high purity dimethyl sulfoxide and dimethyl sulfoxide (DMSO) and amine, it is characterized in that, from the mixture that contains dimethyl sulfoxide (DMSO) and amine, contain dimethyl sulfoxide (DMSO) 95% or above high purity dimethyl sulfoxide or contain amine 65% or the above dimethyl sulfoxide (DMSO) and the mixture of amine by distillation, Separation and Recovery.
2. as the purification process of the mixture of the high purity dimethyl sulfoxide of claim 1 record and dimethyl sulfoxide (DMSO) and amine, it is characterized in that Separation and Recovery contains dimethyl sulfoxide (DMSO) 95% or above high purity dimethyl sulfoxide and contains amine 65% or the above dimethyl sulfoxide (DMSO) and the mixture of amine from the mixture that contains dimethyl sulfoxide (DMSO) and amine.
3. as the purification process of the mixture of the high purity dimethyl sulfoxide of claim 1 record and dimethyl sulfoxide (DMSO) and amine, it is characterized in that, use and contain dimethyl sulfoxide (DMSO) and form 2 different kinds or above mixture with amine.
4. as the purification process of the mixture of the high purity dimethyl sulfoxide of claim 1 record and dimethyl sulfoxide (DMSO) and amine, it is characterized in that, use the distillation tower Separation and Recovery to contain the mixture of dimethyl sulfoxide (DMSO) and amine.
5. as the purification process of the mixture of the high purity dimethyl sulfoxide of claim 4 record and dimethyl sulfoxide (DMSO) and amine, it is characterized in that, from 2 or the above different local mixture that contains dimethyl sulfoxide (DMSO) and amine of supplying with of distillation tower.
6. as the purification process of the mixture of the high purity dimethyl sulfoxide of claim 4 record and dimethyl sulfoxide (DMSO) and amine, it is characterized in that, supply with from 2 of 1 distillation tower and contain the dimethyl sulfoxide (DMSO) of 2 kinds and the mixture of amine.
7. as the purification process of the mixture of the high purity dimethyl sulfoxide of claim 4 record and dimethyl sulfoxide (DMSO) and amine, it is characterized in that, obtain dimethyl sulfoxide (DMSO) 1～35%, amine 65～99% or above mixture from cat head.
8. as the purification process of the mixture of the high purity dimethyl sulfoxide of claim 4 record and dimethyl sulfoxide (DMSO) and amine, it is characterized in that, at the bottom of tower, obtain containing dimethyl sulfoxide (DMSO) 95% or above high purity dimethyl sulfoxide.
9. as the purification process of the mixture of the high purity dimethyl sulfoxide of claim 1 record and dimethyl sulfoxide (DMSO) and amine, it is characterized in that, to contain dimethyl sulfoxide (DMSO) 95% or above high purity dimethyl sulfoxide with acid neutralization back, carry out underpressure distillation, further, remove amine component by ion exchange treatment.
10. as the purification process of the mixture of the high purity dimethyl sulfoxide of claim 1 record and dimethyl sulfoxide (DMSO) and amine, it is characterized in that, in electronic material is handled, use and contain dimethyl sulfoxide (DMSO) 95% or above high purity dimethyl sulfoxide.
11. the purification process as the mixture of the high purity dimethyl sulfoxide of claim 1 record and dimethyl sulfoxide (DMSO) and amine is characterized in that, uses to contain amine 65% or the above dimethyl sulfoxide (DMSO) and the mixture of amine in electronic material is handled.
12. the purification process as the mixture of the high purity dimethyl sulfoxide of claim 1 record and dimethyl sulfoxide (DMSO) and amine is characterized in that amine is the 2-monoethanolamine.
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| CN100471541C (en) * | 2005-09-30 | 2009-03-25 | 日本瑞环株式会社 | Solvent recovery device and method |
| CN102093268A (en) * | 2010-12-29 | 2011-06-15 | 天津市康科德科技有限公司 | Preparation method of chromatographic grade dimethyl sulfoxide |
| CN108686397A (en) * | 2017-04-12 | 2018-10-23 | 东丽精细化工株式会社 | Distill the method and multisection type destilling tower of dimethyl sulfoxide |
| CN108837546A (en) * | 2018-05-29 | 2018-11-20 | 四川久远化工技术有限公司 | A kind of moisture removal method of stripper regeneration technology section |
| CN108862431A (en) * | 2018-05-29 | 2018-11-23 | 四川久远化工技术有限公司 | A kind of reuse stripper refining system of stripper regeneration technology section |
| CN114478330A (en) * | 2020-10-23 | 2022-05-13 | 中国石油化工股份有限公司 | Dimethyl sulfoxide recovery and refining method and system |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| JP3785601B2 (en) * | 1995-06-23 | 2006-06-14 | 東レ・ファインケミカル株式会社 | DMSO recovery method |
| JPH09278743A (en) * | 1996-04-12 | 1997-10-28 | Toray Fine Chem Co Ltd | Recovery of dmso or dmso mixture and recovered substance |
| JP3692497B2 (en) * | 1999-09-24 | 2005-09-07 | 東レ・ファインケミカル株式会社 | Method for recovering dimethyl sulfoxide |
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2002
- 2002-07-25 TW TW091116556A patent/TW583013B/en not_active IP Right Cessation
-
2003
- 2003-04-29 CN CNB031241166A patent/CN1312124C/en not_active Expired - Fee Related
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100471541C (en) * | 2005-09-30 | 2009-03-25 | 日本瑞环株式会社 | Solvent recovery device and method |
| CN102093268A (en) * | 2010-12-29 | 2011-06-15 | 天津市康科德科技有限公司 | Preparation method of chromatographic grade dimethyl sulfoxide |
| CN108686397A (en) * | 2017-04-12 | 2018-10-23 | 东丽精细化工株式会社 | Distill the method and multisection type destilling tower of dimethyl sulfoxide |
| CN108686397B (en) * | 2017-04-12 | 2021-10-26 | 东丽精细化工株式会社 | Method for distilling dimethyl sulfoxide and multi-section distillation tower |
| CN108837546A (en) * | 2018-05-29 | 2018-11-20 | 四川久远化工技术有限公司 | A kind of moisture removal method of stripper regeneration technology section |
| CN108862431A (en) * | 2018-05-29 | 2018-11-23 | 四川久远化工技术有限公司 | A kind of reuse stripper refining system of stripper regeneration technology section |
| CN114478330A (en) * | 2020-10-23 | 2022-05-13 | 中国石油化工股份有限公司 | Dimethyl sulfoxide recovery and refining method and system |
Also Published As
| Publication number | Publication date |
|---|---|
| TW583013B (en) | 2004-04-11 |
| CN1312124C (en) | 2007-04-25 |
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