CN1450202A - Technological method and equipment for preparing nitrogen trifluoride gas - Google Patents
Technological method and equipment for preparing nitrogen trifluoride gas Download PDFInfo
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- CN1450202A CN1450202A CN 03122352 CN03122352A CN1450202A CN 1450202 A CN1450202 A CN 1450202A CN 03122352 CN03122352 CN 03122352 CN 03122352 A CN03122352 A CN 03122352A CN 1450202 A CN1450202 A CN 1450202A
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- 239000007789 gas Substances 0.000 title claims description 140
- 238000000034 method Methods 0.000 title claims description 26
- QKCGXXHCELUCKW-UHFFFAOYSA-N n-[4-[4-(dinaphthalen-2-ylamino)phenyl]phenyl]-n-naphthalen-2-ylnaphthalen-2-amine Chemical compound C1=CC=CC2=CC(N(C=3C=CC(=CC=3)C=3C=CC(=CC=3)N(C=3C=C4C=CC=CC4=CC=3)C=3C=C4C=CC=CC4=CC=3)C3=CC4=CC=CC=C4C=C3)=CC=C21 QKCGXXHCELUCKW-UHFFFAOYSA-N 0.000 title claims description 9
- 238000001816 cooling Methods 0.000 claims abstract description 28
- 239000012535 impurity Substances 0.000 claims abstract description 28
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims abstract description 12
- 238000009835 boiling Methods 0.000 claims abstract description 12
- 238000004519 manufacturing process Methods 0.000 claims abstract description 12
- 239000000463 material Substances 0.000 claims abstract description 6
- 229910052759 nickel Inorganic materials 0.000 claims abstract description 6
- 230000001105 regulatory effect Effects 0.000 claims abstract description 6
- 238000005868 electrolysis reaction Methods 0.000 claims description 41
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 38
- 229910052757 nitrogen Inorganic materials 0.000 claims description 19
- 239000012043 crude product Substances 0.000 claims description 16
- 238000003672 processing method Methods 0.000 claims description 15
- 238000007789 sealing Methods 0.000 claims description 15
- 239000003792 electrolyte Substances 0.000 claims description 12
- 229910052799 carbon Inorganic materials 0.000 claims description 9
- 238000010790 dilution Methods 0.000 claims description 9
- 239000012895 dilution Substances 0.000 claims description 9
- 238000002360 preparation method Methods 0.000 claims description 9
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 8
- 239000007788 liquid Substances 0.000 claims description 8
- 238000004821 distillation Methods 0.000 claims description 6
- 229910000975 Carbon steel Inorganic materials 0.000 claims description 2
- 239000010962 carbon steel Substances 0.000 claims description 2
- 239000012467 final product Substances 0.000 claims description 2
- 239000007769 metal material Substances 0.000 claims description 2
- 238000010438 heat treatment Methods 0.000 abstract description 2
- LDDQLRUQCUTJBB-UHFFFAOYSA-N ammonium fluoride Chemical compound [NH4+].[F-] LDDQLRUQCUTJBB-UHFFFAOYSA-N 0.000 abstract 1
- 238000003825 pressing Methods 0.000 abstract 1
- 238000003860 storage Methods 0.000 abstract 1
- 239000002699 waste material Substances 0.000 description 7
- 239000010405 anode material Substances 0.000 description 4
- 238000006243 chemical reaction Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000000746 purification Methods 0.000 description 3
- 238000003786 synthesis reaction Methods 0.000 description 3
- 239000003513 alkali Substances 0.000 description 2
- 230000007797 corrosion Effects 0.000 description 2
- 238000005260 corrosion Methods 0.000 description 2
- 239000008151 electrolyte solution Substances 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000004880 explosion Methods 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000005422 blasting Methods 0.000 description 1
- 230000000740 bleeding effect Effects 0.000 description 1
- 239000003575 carbonaceous material Substances 0.000 description 1
- 239000010406 cathode material Substances 0.000 description 1
- 239000003153 chemical reaction reagent Substances 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 238000009833 condensation Methods 0.000 description 1
- 230000005494 condensation Effects 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000010924 continuous production Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 230000005012 migration Effects 0.000 description 1
- 238000013508 migration Methods 0.000 description 1
- 239000000047 product Substances 0.000 description 1
- 238000007670 refining Methods 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000002893 slag Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 210000000952 spleen Anatomy 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000009834 vaporization Methods 0.000 description 1
- 230000008016 vaporization Effects 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 230000003245 working effect Effects 0.000 description 1
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- Electrolytic Production Of Non-Metals, Compounds, Apparatuses Therefor (AREA)
Abstract
The present invention relates to a process for preparing NF3 gas and its equipment. It is characterized by that the anodic electrolytic gas in the electrolytic cell is fed into a pressure balancing tank by means of pipe, then fed into a low pressure tank via regulating valve, and said gas is fed into a low-temp. cooling tower by means of pipe to remove high-boiling point impurities of NH4F and HF from said anodic electrolytic gas to obtain NF3 gas, then the NF3 gas is fed into an ultralow temp. cold trap to make liquification and collection, and remove low-boiling point impurities or N2 and O2 from it by adopting the measure of evacuating cold trap, after the NF3 gas is collected and liquified in the ultralow-temp. cold trap, heating the cold trap and distilling said NF3 gas and pressing it into crude NF3 gas storage tank, the material of anode in the electrolytic cell is high-purity nickel.
Description
(1), technical field
The present invention relates to a kind of processing method and equipment for preparing gas of nitrogen trifluoride, it is applicable to NH
4F-xHF (or adding a small amount of KF) prepares NF for the electrolytic process of electrolyte system
3Gas, this crude product NF
3Gas can be directly used in the highly purified NF of preparation
3Gas.
(2), background technology
NF
3Gas is widely used in fields such as superlaser, semiconductor technology and chemical vapour deposition, has good application prospects.But as a kind of electronic gas, it is to NF
3The purity of gas has higher requirement, and generally its purity must not be lower than 99.99%, and wherein key impurity such as CF
4Content must not be higher than 50ppm, this just makes the highly purified NF of preparation
3Gas has bigger difficulty.
Preparation NF
3The method of gas can be divided into two kinds of chemical synthesis and electrolytic process basically, and they all have a variety of implementation methods, and relatively more classical chemical synthesis is to use NH
3With F
2Reaction makes NF
3Gas, and classical electrolytic process is to use NH
4F-xHF (or adding a small amount of KF) is electrolyte system electrolytic preparation NF
3Gas.
Generally, chemical synthesis has the characteristics of safety of building-up reactions, and its shortcoming is NF in the product after the building-up reactions
3The content of gas is low than electrolytic process, and its CF
4Content generally all very high (more than 0.3%); And employing NH
4F-xHF (or adding a small amount of KF) is the NF of electrolyte system electrolytic preparation
3Gas has higher productive rate and purity, relatively helps the NF of purifying and preparing high-purity
3Gas, its shortcoming are the phenomenons of easily blasting in the electrolytic process.
Usually, with NH
4F-xHF (or adding a small amount of KF) is electrolyte system electrolytic preparation NF
3Gas is that to adopt carbon be anode, and the carbon material anode has long service life, advantage that electrolytic waste slag is few, but it also has an important disadvantages: the NF of electrolysis production
3CF in the gas
4Content higher (generally being higher than 500ppm).Because CF
4The boiling point of gas and NF
3The boiling point of gas only differs 1 ℃, and their other physics, chemical property are also very close, separates NF
3CF in the gas
4Gaseous impurities has very high difficulty, and this will certainly increase produces high purity N F
3The difficulty of gas and production cost are unfavorable for the highly purified NF of suitability for industrialized production
3Gas.
CF in the anode electrolysis gas
4The content of gaseous impurities is main relevant with employed anode material.When generally doing anode material with carbon, because the nitrogen trifluoride electrolyzer is in electrolytic process, anode has certain corrosion, and the F that the carbon that is corroded produces during with electrolysis combines generation CF
4Gas, thus CF in the anode electrolysis gas increased
4The content of impurity.
For removing the NH in the anode electrolysis gas
4High boiling point such as F and HF impurity, traditional method are with the solid alkali absorption or use alkali liquid washing that these two kinds of methods all will often be changed reagent, have influenced the continuous operation of producing, and operate more loaded down with trivial details.
(3), summary of the invention:
In order to overcome the shortcoming of prior art, the invention provides a kind of processing method and equipment for preparing gas of nitrogen trifluoride, it can not only be got rid of the impurity component more than 90% in the nitrogen trifluoride anode electrolytic cell electrolytic gas, makes NF
3The purity of gas rises to work in-process NF from 70% of anode electrolysis gas
3More than 98% of gas is for next step produces highly purified NF
3Gas has been created advantageous conditions, and equipment is simple, easy and simple to handle, has got rid of high-purity N F to greatest extent
3Hidden danger in the purification for gas process, the equipment operating safety has reduced high-purity N F
3The production cost of gas.
Technological thought of the present invention is from producing NF
3NF is just controlled in the source of gas
3CF in the gas
4The content of gaseous impurities promptly, is just controlled CF in the anode electrolysis gas effectively in nitrogen trifluoride electrolytic tank electrolysis process
4The foreign matter content of gas makes it be no more than 20ppm, with this crude product NF
3Gas is the NF of unstripped gas purifying and preparing high-purity
3Gas has reduced high-purity N F to a great extent
3The purification difficulty and the production cost of gas make and can realize fairly large high purity N F with better simply purifying technique and equipment
3The suitability for industrialized production of gas.
The present invention solves the technical scheme that its technical problem takes: the present invention adopts more traditional electrolytic process to prepare NF
3Gas is promptly with fused NH
4F-xHF or to add a small amount of KF be that electrolyte ties up to electrolytic preparation NF in the electrolyzer
3Gas, the mol ratio x=1 of electrolyte system～2.5 in the electrolyzer, mol ratio x＜1 o'clock is because F in the electrolyte system
-Content reduce NF in the anode electrolysis gas
3The content of gas can reduce, other impurity such as N
2, N
xF
yDeng content can improve, otherwise, mol ratio x＞2.5 o'clock, under normal electrolysis temperature the volatilization waste of HF bigger, stop up easily, the corrosion gas path pipe; Electrolysis temperature is 90 ℃～140 ℃, and when temperature was lower than 90 ℃, the electrolytic solution retrogradation had the tendency of solidifying caking, the ion migration when being unfavorable for electrolysis and the motion of gas molecule, and, along with the reduction of temperature, F in the anodic gas
2Content can improve gradually, the possibility of electrolytic process blast strengthens, when temperature is higher than 140 ℃, NH
4The volatilization loss of F and HF increases, and also is unfavorable for electrolysis; Electrolysis voltage is 5～10V, the NF that the electrolysis voltage anode surface outside this voltage range produces
3The content of gas is less, and Faradaic current changes into NF
3The efficient of gas is lower; Current density is 0.01～0.32A/mm
2, current density is less than 0.01A/mm
2, NF
3The productive rate of gas is also very little, and current density is greater than 0.32A/mm
2Though, can improve NF
3The productive rate of gas, but also increased the instability in the electrolytic process, unsafe factor simultaneously, make electrolysis temperature be difficult to control, and be easy to take place the electrolysis explosion phenomenon, cause equipment and personnel's damage; Operating pressure is-0.01～0.1Mpa, pressure is lower than-during 0.01Mpa, the pressure gradient of follow-up equipment for purifying reduces, be unfavorable for the operation of gas flow and follow-up equipment, when pressure is higher than 0.1Mpa, though help the operation of follow-up equipment for purifying, safety, the steady running of electrolyzer is caused bigger difficulty, electrolytic cell equipment is damaged easily; Anode electrolysis gas in the electrolyzer enters pressure balancing tank by pipeline, and the volume of pressure balancing tank is too small just not to have pressure equilibrium, stable effect, and the volume of pressure balancing tank is excessive then can to cause unnecessary waste; The gas that comes out from pressure balancing tank enters a low pressure jar by variable valve, the pressure ratio pressure balancing tank of this low pressure jar is low, its pressure is-0.08～0Mpa, pressure is lower than-during 0.08Mpa, be unfavorable for follow-up equipment pressure-controlling and gas flow, when pressure is higher than 0Mpa, be unfavorable for the pressure-controlling and the gas flow of front equipment again; The operating pressure of pressure balancing tank is to realize by the gas flow rate that adjusting is connected the gas flow regulating valve door between pressure balancing tank and the low pressure jar, when pressure balancing tank has continuous, stable gas to enter, turn the operating pressure that the flow of this valve can the pressurize surge tank down, transfer the flow of big valve then can reduce the operating pressure of pressure balancing tank; The gas that comes out from the low pressure jar enters low-temp cooling tower by pipeline, removes the NH in the anode electrolysis gas
4High boiling point such as F and HF impurity, the gas outlet temperature of low-temp cooling tower are-125 ℃～-40 ℃, and temperature is low excessively, stop up low-temp cooling tower easily, and temperature is too high, and the high-boiling-point impurity that has major part is not condensed, and is unfavorable to refining effect; Removed the NF behind the high-boiling-point impurity through low-temp cooling tower
3Gas enters the very low temperature cold-trap by pipeline and liquefies, collects, and adopts way removal lower-boiling impurity such as the N wherein that cold-trap is vacuumized
2, O
2, the gas outlet temperature of very low temperature cold-trap is-185 ℃～-130 ℃, temperature is lower than-185 ℃, can cause a large amount of unnecessary liquid nitrogen wastes, and temperature is higher than-130 ℃, then be unfavorable for NF
3The liquefaction of gas, collection cause NF
3The waste of gas; The operating pressure of very low temperature cold-trap is-0.095～0Mpa, operating pressure is lower than-during 0.095Mpa,, also can cause a certain amount of NF simultaneously to the also corresponding raising of the requirement of vacuum system
3The loss of gas, operating pressure is higher than 0Mpa, is unfavorable for the pressure transmission and the gas flow of front equipment again; NF collects in the very low temperature cold-trap, liquefies
3Behind the gas, the very low temperature cold-trap is heated up, NF
3The gas distillation is pressed into crude product NF
3In the gas reservoir, very low temperature cold-trap distillation NF
3Other impurity that is condensed after gas finishes enters flare system and handles and emit after up to standard again.
The equipment of realizing the inventive method comprises electrolyzer, pressure balancing tank, low pressure jar, low-temp cooling tower, very low temperature cold-trap, vacuum pump, crude product NF
3Gas reservoir, the positive column of electrolyzer communicates with the pressure balancing tank sealing by pipeline, pressure balancing tank communicates with the sealing of low pressure jar by pipeline, variable valve, the low pressure jar communicates with the low-temp cooling tower sealing by pipeline, low-temp cooling tower communicates with the sealing of very low temperature cold-trap by pipeline, and the very low temperature cold-trap is by pipeline and vacuum pump and crude product NF
3The gas reservoir sealing communicates, and the material of described anode electrolytic cell is that purity is 99%～99.9% nickel, and its carbon content is less than 0.1%; Cathode material does not have special requirement, and metallic substance such as carbon steel that use cost is lower get final product.Nickel purity in the anode material is low excessively, and other foreign matter content is inevitable high, can influence the current efficiency and the work-ing life of nickel anode, and purity is too high, can increase production cost, causes unnecessary waste.When the carbon content in the anode material surpasses 0.1%, the CF in the anode electrolysis gas
4The content of gaseous impurities also can raise, and this is to control CF
4The content of gaseous impurities is unfavorable.
For reducing or alleviate the blast in the electrolytic process, anode gas chamber and cathode air chamber to electrolyzer feeds high pure nitrogen respectively, to reach the purpose that dilution anode and cathodic electricity are vented one's spleen, control dilution is that the degree and the frequent degree of electrolyzer implode during according to electrolysis comes definite with the principle of the flow of high pure nitrogen, i.e. dilution should be to control explode minimum nitrogen flow when equipment and normal electrolysis do not impacted of electrolysis with the flow of high pure nitrogen, general difference according to gas production rate, the about 100～5000mL/min of its flow.Dilution is low excessively with the flow of high pure nitrogen, and dilution effect is bad, and the electrolysis explosion phenomenon is more frequent; On the contrary, dilution is too high with the flow of high pure nitrogen, can cause unnecessary waste.Blast frequency of electrolytic gas after dilution and degree be all little how, and the electrolyzer operation is also safer, more stable.
Mol ratio optimum value x=1.1～1.8 of electrolyte system in the described electrolyzer.
Electrolysis temperature optimum value in the described electrolyzer is 100 ℃～130 ℃.
Electrolysis voltage optimum value in the described electrolyzer is 5.5～9V.
Current density optimum value in the described electrolyzer is 0.05～0.2A/mm
2
Operating pressure optimum value in the described electrolyzer is 0～0.05Mpa.
The operating pressure of described electrolyzer is identical with the operating pressure of pressure balancing tank.
The volume of described low pressure jar is close with the volume of pressure balancing tank.
The pressure optimum value of described low pressure jar is-0.06～-0.01Mpa.
The volume of described pressure balancing tank is 5～20 times of anode electrolytic cell air chamber spatial volume.
The gas outlet temperature optimum value of described low-temp cooling tower is-120 ℃～-50 ℃.
The operating pressure optimum value of described very low temperature cold-trap is-0.06～-0.01Mpa.
The temperature of described low-temp cooling tower and very low temperature cold-trap is to realize by the flow of regulating respectively liquid nitrogen in the liquid nitrogen inlet pipe on it.
It can not only be got rid of the impurity component more than 90% in the nitrogen trifluoride anode electrolytic cell electrolytic gas, makes NF
3The purity of gas rises to work in-process NF from 70% of anode electrolysis gas
3More than 98% of gas is for next step produces highly purified NF
3Gas has been created advantageous conditions, and equipment is simple, easy and simple to handle, has got rid of high-purity N F to greatest extent
3Hidden danger in the purification for gas process, equipment operating safety, but continuous production have reduced high-purity N F
3The production cost of gas.
(4), description of drawings
The present invention is further described below in conjunction with drawings and Examples.
Accompanying drawing is a process flow sheet of the present invention.
(5), embodiment
Below with reference to process flow sheet of the present invention, the present invention is described more specifically.The present invention can have a variety of concrete embodiments, is not subjected to the restriction of described embodiment herein.
Equipment of the present invention comprises electrolyzer 1, pressure balancing tank 4, low pressure jar 6, low-temp cooling tower 7, very low temperature cold-trap 9, vacuum pump 11, crude product NF
3Gas reservoir 12, the positive column of electrolyzer 1 communicates with pressure balancing tank 4 sealings by pipeline, pressure balancing tank 4 communicates with 6 sealings of low pressure jar by pipeline, variable valve 5, low pressure jar 6 communicates with low-temp cooling tower 7 sealings by pipeline, low-temp cooling tower 7 communicates with 9 sealings of very low temperature cold-trap by pipeline, and very low temperature cold-trap 9 is by pipeline and vacuum pump 1 and crude product NF
3Gas reservoir 12 sealings communicate, and described electrolyzer 1 adopts the cell construction described in the CN2516568Y patent, and the material of described anode electrolytic cell 13 is that purity is 99%～99.9% nickel, and its carbon content is less than 0.1%.The material of negative electrode 14 adopts plain carbon stool.
Electrolyte system adopts NH
4The F-xHF system does not add KF, its mol ratio x=13.The electrolysis temperature of electrolytic solution is controlled at 130 ℃, and the operating pressure of electrolyzer 1 is 0.02MPa, and electrolysis voltage is 5.7V, and current density is 0.25A/mm
2, the about 2.7L/min of gas production rate, anode gas chamber 3 feeds the high pure nitrogen of 100mL/min, and cathode air chamber 2 feeds the high pure nitrogen of 300mL/min, and the component that exports measured anode electrolysis gas from electrolyzer 1 anode gas circuit sees Table 1.
Table 1 anode electrolysis gas group submeter
| The component title | NH 4F+HF | CO 2 | ?N 2O | ???N 2+ ???O 2 | ?CF 4 | Other | ??NE 3+N xF y |
| Concentration | About 4% | 800pp m | ?0.9％ | About 22% | ?18pp ?m | About 3% | About 70% |
The data of table 1 show, NF in the anode water electrolytic gas under this electrolytic condition
3The content of gas is about 70%, and wherein the content of CF4 impurity is below 20ppm.
By variable valve 5 with the pressure-controlling of pressure balancing tank 4 at 0.02MPa, equate the about 300L of the volume of pressure balancing tank 4 with the operating pressure of electrolyzer 1.
The pressure-controlling of low pressure jar 6 about-0.01MPa, the about 300L of the volume of low pressure jar 6.
The gas outlet temperature of low-temp cooling tower 7 is controlled at about-100 ℃, its operating pressure pact-0.025MPa.See Table 2 from the measured gaseous fraction of low-temp cooling tower 7 pneumatic outlets.
The gas group submeter of table 2 low-temp cooling tower pneumatic outlet
| The component title | ??NH 4F+HF | CO 2 | ??N 2O | ???N 2+ ???O 2 | CF 4 | Other | ??NF 3+N xF y |
| Concentration | About 0.1% | 400pp m | ??0.8％ | About 22% | 18pp m | About 3% | About 74% |
The data of table 2 show, handle NH in the later anode electrolysis gas through low-temp cooling tower 7
4The content of high boiling point such as F and HF impurity has obviously reduced.
The NF that comes out from low-temp cooling tower 7
3Gas directly enters very low temperature cold-trap 9.Very low temperature cold-trap 9 is collected, liquefaction NF
3During gas, the overhead gas temperature out is controlled at about-175 ℃, its pressure bleeds by vacuum pump 11 and is controlled at-0.03MPa about.Vacuum pump 11 not only can be controlled the pressure of very low temperature cold-trap 9, can also remove NF
3N in the gas
2, O
2Deng lower-boiling impurity.
The temperature of above-mentioned low-temp cooling tower 7 and very low temperature cold-trap 9 is to realize by the flow of regulating liquid nitrogen in the liquid nitrogen inlet pipe 8,10 respectively.
Very low temperature cold-trap 9 is collected, liquefaction NF
3Behind about 12 hours of the gas, very low temperature cold-trap 9 stops air inlet, heats in very low temperature cold-trap 9 bottoms with the far-infrared heating plate, along with the rising of temperature in the very low temperature cold-trap 9, NF wherein
3Begin distillation vaporization, when the pressure of very low temperature cold-trap 9 is higher than crude product NF
3During the pressure of gas reservoir 12, can be with NF
3Gas is pressed into crude product NF
3In the gas reservoir 12.
Very low temperature cold-trap 9 distillation NF
3The high-boiling-point impurity that after gas finishes other is condensed can not be with NF
3Gas together is pressed into crude product NF
3In the gas reservoir 12, must handle up to standard emitting again later through a flare system.
Be pressed into crude product NF
3Gaseous fraction in the gas reservoir 12 sees Table 3.
Table 3 crude product NF
3Gas group submeter in the gas reservoir
| The component title | ?NH 4F+HF | ?CO 2 | ?N 2O | N 2+ O 2 | CF 4 | Other | ?NF 3+N xF y |
| Concentration | About 400ppm | ?200pp ?m | ?0.3％ | About 1% | 22pp m | About 0.7% | About 98% |
The data of table 3 show, crude product NF
3NE in the gas reservoir 12
3The purity of gas is about 98%, and by the condensation of very low temperature cold-trap 9 and bleeding of vacuum pump 11, it has removed NF
3The N of the overwhelming majority in the gas
2, O
2Deng lower-boiling impurity, simultaneously, very low temperature cold-trap 9 can also be removed the high-boiling-point impurity that part low-temp cooling tower 7 fails to remove.
Claims (15)
1, a kind of processing method for preparing gas of nitrogen trifluoride is characterized in that: the present invention adopts more traditional electrolytic process to prepare NF
3Gas is promptly with fused NH
4F-xHF or to add a small amount of KF be that electrolyte ties up to electrolytic preparation NF in the electrolyzer (1)
3Mol ratio x=1～2.5 of electrolyte system in the gas, electrolyzer (1), electrolysis temperature is 90 ℃～140 ℃, and electrolysis voltage is 5～10V, and current density is 0.01～0.32A/mm
2Operating pressure is-0.01～0.1Mpa, anode electrolysis gas in the electrolyzer (1) enters pressure balancing tank (4) by pipeline, the gas that comes out from pressure balancing tank (4) enters a low pressure jar (6) by variable valve (5), the pressure ratio pressure balancing tank (4) of this low pressure jar (6) is low, its pressure is-0.08～0Mpa, the operating pressure of pressure balancing tank (4) is to realize by the gas flow rate that adjusting is connected the gas flow regulating valve (5) between pressure balancing tank (4) and the low pressure jar (6), the gas that comes out from low pressure jar (6) enters low-temp cooling tower (7) by pipeline, removes the NH in the anode electrolysis gas
4High boiling point such as F and HF impurity, the gas outlet temperature of low-temp cooling tower (7) are-125 ℃～-40 ℃, have removed the NF behind the high-boiling-point impurity through low-temp cooling tower (7)
3Gas enters very low temperature cold-trap (9) by pipeline and liquefies, collects, and adopts way removal lower-boiling impurity such as the N wherein that very low temperature cold-trap (9) is vacuumized
2, O
2, the gas outlet temperature of very low temperature cold-trap (9) is-185 ℃～-130 ℃, and the operating pressure of very low temperature cold-trap (9) is-0.095～0Mpa, and NF collects in very low temperature cold-trap (9), liquefies
3Behind the gas, very low temperature cold-trap (9) is heated up, NF
3The gas distillation is pressed into crude product NF
3In the gas reservoir (12), very low temperature cold-trap (9) distillation NF
3Other impurity that is condensed after gas finishes enters flare system and handles and emit after up to standard again.
2, a kind of equipment of realizing claim 1 described method comprises electrolyzer (1), pressure balancing tank (4), low pressure jar (6), low-temp cooling tower (7), very low temperature cold-trap (9), vacuum pump (11), crude product NF
3Gas reservoir (12), it is characterized in that: the positive column of electrolyzer (1) communicates with pressure balancing tank (4) sealing by pipeline, pressure balancing tank (4) communicates with low pressure jar (6) sealing by pipeline, variable valve (5), low pressure jar (6) communicates with low-temp cooling tower (7) sealing by pipeline, low-temp cooling tower (7) communicates with very low temperature cold-trap (9) sealing by pipeline, and very low temperature cold-trap (9) is by pipeline and vacuum pump (11) and crude product NF
3Gas reservoir (12) sealing communicates, and the material of described anode electrolytic cell (13) is that purity is 99%～99.9% nickel, and its carbon content is less than 0.1%; The material of negative electrode (14) does not have special requirement, and metallic substance such as carbon steel that use cost is lower get final product.
3, processing method according to claim 1, it is characterized in that: anode gas chamber (3) and the cathode air chamber (2) to described electrolyzer (1) feeds high pure nitrogen respectively, control dilution is that the degree and the frequent degree of electrolyzer (1) implode during according to electrolysis comes definite with the principle of the flow of high pure nitrogen, i.e. dilution should be to control explode minimum nitrogen flow when equipment and normal electrolysis do not impacted of electrolysis with the flow of high pure nitrogen, general difference according to gas production rate, the about 100～5000mL/min of its flow.
4, processing method according to claim 1 is characterized in that: mol ratio x=1.1～1.8 of electrolyte system in the described electrolyzer (1).
5, processing method according to claim 1 is characterized in that: the electrolysis temperature in the described electrolyzer (1) is 100 ℃～130 ℃.
6, processing method according to claim 1 is characterized in that: the electrolysis voltage in the described electrolyzer (1) is 5.5～9V.
7, processing method according to claim 1 is characterized in that: the current density in the described electrolyzer (1) is 0.05～0.2A/mm
2
8, processing method according to claim 1 is characterized in that: the operating pressure in the described electrolyzer (1) is 0～0.05Mpa.
9, processing method according to claim 1 is characterized in that: the operating pressure of described electrolyzer (1) is identical with the operating pressure of pressure balancing tank (4).
10, processing method according to claim 1 is characterized in that: the pressure of described low pressure jar (6) is-0.06～-0.01Mpa.
11, processing method according to claim 1 is characterized in that: the gas outlet temperature of described low-temp cooling tower (7) is-120 ℃～-50 ℃.
12, processing method according to claim 1 is characterized in that: the operating pressure of described very low temperature cold-trap (9) is-0.06～-0.01Mpa.
13, processing method according to claim 1 is characterized in that: the temperature of described low-temp cooling tower (7) and very low temperature cold-trap (9) is to realize by the flow of regulating liquid nitrogen in the liquid nitrogen inlet pipe (8,10) on it respectively.
14, equipment according to claim 2 is characterized in that: the volume of described pressure balancing tank (4) is 5～20 times of anode electrolytic cell air chamber spatial volume.
15, equipment according to claim 2 is characterized in that: the volume of the volume of described low pressure jar (6) and pressure balancing tank (4) is close.
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| CNB031223524A CN1180128C (en) | 2003-04-30 | 2003-04-30 | Technological method and equipment for preparing nitrogen trifluoride gas |
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| CNB031223524A CN1180128C (en) | 2003-04-30 | 2003-04-30 | Technological method and equipment for preparing nitrogen trifluoride gas |
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| CN101798689A (en) * | 2010-03-18 | 2010-08-11 | 黎明化工研究院 | Process and device for preparing nitrogen trifluoride by continuous electrolytic process |
| CN101973535A (en) * | 2010-08-30 | 2011-02-16 | 天津市泰源工业气体有限公司 | Technology for preparing high-purity nitrogen trifluoride by purifying nitrogen trifluoride prepared by molten-salt growth method by using rectification and absorption method |
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Address after: 057550 No. five Weir Road, chemical industry gathering area, Feixiang District, Handan, Hebei, 1 Patentee after: China shipbuilding (Handan) Perry Special Gas Co.,Ltd. Address before: No.1 Weiwu Road, chemical industry gathering area, Feixiang County, Handan City, Hebei Province Patentee before: PERIC SPECIAL GASES Co.,Ltd. |
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