CN1448939A - Suspension rack for disk drive - Google Patents

Suspension rack for disk drive Download PDF

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Publication number
CN1448939A
CN1448939A CN 02107698 CN02107698A CN1448939A CN 1448939 A CN1448939 A CN 1448939A CN 02107698 CN02107698 CN 02107698 CN 02107698 A CN02107698 A CN 02107698A CN 1448939 A CN1448939 A CN 1448939A
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CN
China
Prior art keywords
suspension
piezo ceramic
cementing agent
ceramic element
disc driver
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Granted
Application number
CN 02107698
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Chinese (zh)
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CN1279539C (en
Inventor
西田辰彦
安藤利树
半谷正夫
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NHK Spring Co Ltd
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NHK Spring Co Ltd
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Priority to CN 02107698 priority Critical patent/CN1279539C/en
Publication of CN1448939A publication Critical patent/CN1448939A/en
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Publication of CN1279539C publication Critical patent/CN1279539C/en
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Abstract

The hanger bracket for magnetic disc drive includes one load beam with one flexible part installed; one actuator base seat including one base board, one hinging part thinner than the base board and one pair of piezoelectric ceramic elements. When some voltage is applied, the piezoelectric ceramic elements makes the end of the load beam shift in the oscillation direction. The piezoelectric ceramic elements is installed inside one opening in the actuator base seat. The covering material filling the interval between the edge of the piezoelectric ceramic elements and the actuator base seat forms coverage to cover the ends and sides of the piezoelectric ceramic elements.

Description

The suspension of disc driver
Technical field
The present invention relates to a kind of suspension that is installed in signal conditioning package, uses such as the disc driver in the PC.
Background technology
In the disc driver with rotating disk or magneto-optic disk, a magnetic head is used in the recording surface record or the sense data of disk.Magnetic head comprises a sliding part in the face of the recording surface of disk, is hidden in sensor in the sliding part etc.When the disk high-speed rotation, sliding part rises on disk slightly, forms air cushion thus between disk and sliding part.A suspension of fixing magnetic head comprises that one is called the beam parts of load beam, form by extremely thin laminated spring, be fixed on the flex member on the load beam, be arranged on the base plate of the proximal part of load beam, or the like.The sliding part that constitutes magnetic head is installed in the end portion of flex member.
In hard disk drive (HDD) lining, the magnetic track center line of disk must be obeyed following control, promptly track width ± 10% in.Along with the recent development of compact disk, track width has been reduced to 1 μ m or littler, thereby keeps sliding part to become difficult at track center.Therefore, realize that the accurate positioning control of sliding part and the rigidity that increases disk for the swing that reduces disk are necessary.
Usually, traditional disc driver is single type that activates, and consequently a suspension only moves by voice coil motor.Single actuating is suspended in has many resonance peaks on the low-frequency band.Like this, when high frequency band, it only is difficult to be controlled at sliding part (head) on the suspension end by voice coil motor, and the bandwidth of servo-drive system can not increase.
Therefore, developed a kind of dual actuation suspension, it comprises a miniature actuation part and a voice coil motor.The end portion of load beam or sliding part are mobile slightly at the horizontal direction (the so-called direction of waving) of suspension by second actuator of miniature actuation part.
Since gently more many than the moveable part of single actuating suspension on weight by the moveable part that second actuator drives, therefore can on high frequency band, control sliding part.Like this, compare with single suspension that activates, the dual actuation suspension can make high several times of the bandwidth of the servo-drive system of using for the positioning control of sliding part, and can correspondingly reduce seek error.
As everyone knows, piezo ceramic element, such as the lead zirconate titanate (PbZrO that is called PZT 3And PbTiO 3Solid solution) can be fit to be used for the material of second actuator.Because PZT has quite high resonant frequency, it is suitable as second actuator of dual actuation suspension.
Such as the piezo ceramic element of PZT be fragility with frangible, in addition, the pollution that the particulate that is produced by element surface forms has constituted the obstacle of actual use.If these particulates enter the space between the disk of sliding part and high-speed rotation, disk and sliding part will be damaged, and like this, the data that are recorded on the disk may be interrupted, and maybe may push.
The inventor has carried out a test, to check the mode that produces particulate from the suspension that uses piezo ceramic element.In this test, be suspended in the liquid of a ultrasonic cleaner and clean, calculate at the particulate of giving in the liquid of determined number that is not less than intended size.Found that, use the suspension of piezo ceramic element to produce more particulate than the traditional suspension that does not use piezo ceramic element.
In piezo ceramic element, the metal level on the electrode is formed at pro and con respectively by spraying or plating.Therefore, almost there is not possibility to produce particulate from the front or the reverse side of element.Because the side of each piezo ceramic element or end face are cut by a pelleter etc. in manufacturing process, so they expose the cutting surface.These cutting surfaces form the source of particulate, like this, can produce particulate continuously when cleaning suspension at every turn.
Summary of the invention
Therefore, the purpose of this invention is to provide the suspension that a kind of disc driver is used, it has can limit the miniature actuation part that particulate produces.
To achieve these goals, the suspension of a kind of disc driver of the present invention comprises: one is equipped with the load beam of a flex member; One is installed in the actuator base on the load beam proximal part; One is installed in the piezo ceramic element on the actuator base, when applying voltage thereon, it can be out of shape and on swaying direction the moving load beam; And a cover part that forms by cladding material, cladding material is filled in the edge part of piezo ceramic element and the space between the actuator base, thereby covers vertically opposite end face and side of piezo ceramic element.Cladding material can be fixed on synthetic resin or the metal on the piezo ceramic element, for example comprises cementing agent.According to the present invention, the cover part can be limited this element and be produced particulate.Because the cover part can not obstruct moving of piezo ceramic element basically, so it can not make the stroke of element worsen.
In suspension of the present invention, actuator base can be formed with the opening portion that piezo ceramic element can be installed, and this opening portion is piezo ceramic element fixedly.Because piezo ceramic element is installed in the opening portion of actuator base, according to the present invention, the cladding material of sufficient amount can easily be applied to the end face and the side of element, and can prevent its drippage before cladding material solidifies.Can there be enough thickness the cover part of Xing Chenging like this.
In addition, in suspension of the present invention, load beam and actuator base are connected to each other by the articulated elements of the toughness of separating.According to the present invention, can use and load beam, actuator base and the corresponding to material of articulated elements desired properties, like this, can improve the performance of suspension.
In suspension of the present invention, on the part of articulated elements, be provided with the extension of extending, and the cover part can form along this extension along the side of piezo ceramic element.According to the present invention, can be easily apply along the extension of articulated elements and can prevent drippage such as the cladding material of cementing agent, can there be enough thickness the cover part of Xing Chenging thus.
In suspension of the present invention, cladding material is a kind of to have from 2Pas to 1 cementing agent of its uncured state viscosity of 000Pas scope.According to the present invention, the cementing agent that forms cladding material can apply certain thickness on piezo ceramic element, and has the flowability of appropriateness, thereby has favorable applicability.
In suspension of the present invention, the described cladding material that is used for forming the cover part can be formed by the identical cementing agent that piezo ceramic element is fixed on the actuator base.According to the present invention, a kind of shared cementing agent can be used to do that piezo ceramic element is fixed on the cementing agent on the actuator base and makes to form the cementing agent of cover part, like this, can easily handle cementing agent, and the operating characteristic that applies cementing agent is improved also.
Other purpose of the present invention and advantage will be found out in the following description, partly will become clear from describe, and maybe can acquire from enforcement of the present invention.Objects and advantages of the present invention can be achieved and obtain by in particular the following means and combination.
Description of drawings
The accompanying drawing that is combined in the instructions and constitutes an instructions part has been introduced the present preferred embodiment of the present invention, and the detailed description of above-mentioned general description and preferred embodiment given below is combined, and is used for describing principle of the present invention.
Fig. 1 is the planimetric map according to a suspension of first embodiment of the invention;
Fig. 2 is the planimetric map of the base plate in the suspension shown in Figure 1;
Fig. 3 is the planimetric map of the articulated elements in the suspension shown in Figure 1;
Fig. 4 is the planimetric map that being suspended among Fig. 1 forms the state before the cover part;
Fig. 5 is the chart of the particle number that produces when being presented at the suspension among Fig. 1 and not using the suspension of piezo ceramic element to accept ultrasonic cleaning respectively;
Fig. 6 is the chart of the relation between demonstration piezo ceramic element stroke and the Young modulus that piezo ceramic element is fixed on the cementing agent on the actuator base;
Fig. 7 be show the frequency of suspension and increment before forming the cover part and afterwards between the chart of relation;
Fig. 8 is the planimetric map according to the part of a suspension of second embodiment of the invention;
Fig. 9 is the planimetric map of the articulated elements in the suspension shown in Figure 8; And
Figure 10 is the planimetric map according to the miniature actuation part of a suspension of the third embodiment of the present invention.
Summary of the invention
With reference now to Fig. 1 to 4, the suspension 10A that uses according to the disc driver of first embodiment of the invention is described.
The suspension 10A of dual actuation type shown in Figure 1 comprises a load beam 11, miniature actuation part 12, base plate 13, articulated elements 14 or the like.Load beam 11 is to be formed by the elastic metal sheet with about 100 μ m thickness.Flex member 15 is installed on the load beam 11.Flex member 15 is by forming than load beam 11 thin high precision plates springs.The sliding part 16 that constitutes magnetic head is installed in the end portion of flex member 15.
As shown in Figure 2, a circular hub bore 21 is formed at proximal part 20 places of base plate 13.Pair of holes part 23 is formed between the proximal part 20 and fore-end 22 of base plate 13.Each bore portion 23 is even as big as holding a piezo ceramic element 40.One bar shaped coupling part 24 is along the longitudinal direction (axial direction of suspension 10A) of base plate 13, extension between pair of holes part 23.Coupling part 24 can be along horizontal direction (the arrow S among Fig. 1 the represents swaying direction) bending of base plate 13.
The proximal part 20 of base plate 13 is fixed on the end portion of an actuator arm, and actuator arm is driven by a voice coil motor (not shown) and rotates by this voice coil motor.Base plate 13 is to be formed by the sheet metal with about 200 μ m thickness.Under the situation of this embodiment, base plate 13 and articulated elements 14 constitute according to actuator base 25 of the present invention.
As shown in Figure 3, articulated elements 14 comprises the proximal part 30 on the overlapping proximal part 20 that is fixed on base plate 13, be formed on the bar shaped bridging part 31 on coupling part 24 correspondence positions with base plate 13, be formed on the center section 32 on fore-end 22 correspondence positions with base plate, a pair ofly can be fixed on end portion 34 on the load beam 11 etc. at the toughness hinge portion 33 of thickness direction elastic deformation.Articulated elements 14 is to be formed by the elastic metal sheet with about 40 μ m thickness.
Miniature actuation part 12 comprises a pair of piezo ceramic element 40, and they comprise the tabular piezoelectric element such as PZT.As shown in Figure 4, these piezo ceramic elements 40 are contained in 23 li of the opening portions of actuator base 25 respectively, thus extension parallel to each other basically.
Under the situation of this embodiment, utilize cementing agent 41 to be fixed on the proximal part 30 of articulated elements 14 at an end 40a of each element 40 of 23 li of corresponding opening parts.The other end 40b of element 40 utilizes cementing agent 41 to be fixed on the center section 32 of articulated elements 14.Cementing agent 41 also can be applied in the space between the inside surface 60 and 61 of each opening portion 23 of element 40 and actuator base 25.For the distortion (moving) with each element 40 more effectively send load beam 11 to and guarantee actuator base 25 and the end face 52 of element 40 and 53 and side 54 and 55 between electrical isolation, should do like this.
When applying voltage, one in the piezo ceramic element 40 extends longitudinally, and another element 40 longitudinally shrinks.Like this, according to the direction and the stroke of piezo ceramic element 40 distortion, load beam 11 moves required distance at horizontal (swaying direction).
Each piezo ceramic element 40 that exists with the rectangular slab form has at a front of thickness direction 50 and one reverse side, at the end face 52 and 53 of vertical opposite end, and opposite side 54 and 55.The electrode (not shown) that forms such as the conductive material of metal is by spraying or electroplate and be formed at whole positive 50 and whole reverse side respectively. End face 52 and 53 and side 54 and 55 are cutting surfaces, they are to utilize pelleter or the cutting of other machine to form in the process of making element 40.
When element 40 was installed in 23 li of opening portions, the opposite end face 52 of each element 40 and 53 was in the face of the inside surface 60 and 61 on vertical opposite end of each opening portion 23 of actuator base 25.The side 54 of each element 40 of close coupling part 24 is in the face of the side 24a of coupling part 24.
As shown in Figure 1, the end face 52 of each element 40 and 53 and side 54 and 55 covered by a cover part 71, and cover part 71 is to be formed by the cementing agent 70 as an example of cladding material.Specifically, the opposite end face 52 of each element 40 and 53 and the inside surface 60 and 61 of each corresponding opening part 23 between the space be full of cementing agent 70, and the space between each corresponding side surface 24 of side 24a of element 40 and coupling part 24 also is full of cementing agent 70.The cover part 71 that is formed by cementing agent 40 covers the end face 52 and 53 and side 54 and 55 of each element.By applying cementing agent 70 by this way, can replenish the deficiency of the cementing agent 41 between the inside surface 60 and 61 of each opening portion 23 of each element 40 and actuator base 25.
Preferably, as the viscosity of the uncured cementing agent 70 of cover part 71 at 2Pas to 1, in the scope of 000Pas.If viscosity is less than 2Pas, if then cementing agent 70 scatters too thinly and can not form the thickness low LCL of 71 cover parts 71, cover part of satisfied thickness, when carrying out ultrasonic cleaning, cementing agent 70 may be destroyed, thereby produce particulate.If viscosity surpasses 1,000Pas, the flowability of cementing agent 70 reduces, thereby is difficult to apply cementing agent 70 on the streamline that general cementing agent nozzle is installed.
Test is carried out at sample 1,2 and 3, how to change so that understand the stroke of each piezo ceramic element 40 when providing cover part 71 on element 40.As a result, sample 1 before forming cover part 71 and stroke afterwards be respectively ± 1.200 μ m and ± 1.168 μ m that this expression stroke shortens 0.032 μ m.Sample 2 before forming cover part 71 and stroke afterwards be respectively ± 1.232 μ m and ± 1.200 μ m that this expression stroke shortens 0.032 μ m.Sample 3 before forming cover part 71 and stroke afterwards be respectively ± 1.200 μ m and ± 1.208 μ m.Confirm that thus neither one stands to worsen especially significantly in the sample 1,2 and 3 on stroke.
Allow the suspension 10A that above-mentioned piezo ceramic element 40 is installed stand ultrasonic cleaning and the test of calculating the particulate in liquid.Fig. 5 has shown test result.In Fig. 5, measured value L1 and L2 representative are installed with the particle number of the suspension A of piezo ceramic element 40.The particle number of traditional suspension of any piezo ceramic element is not installed in measured value L3 representative.
After the suspension 10A of the foregoing description was cleaned twice, the quantity of particulate was reduced to the suspension that piezo ceramic element is not installed and is cleaned the same level that reached at twice o'clock, as shown in Figure 5.Can confirm that thus the suspension 10A in the foregoing description can avoid producing particulate from piezo ceramic element.
Fig. 6 has shown and is used for piezo ceramic element 40 is fixed on the stroke of the cementing agent on the actuator base 25 and the relation between the Young modulus.In Fig. 6, L4 and L5 represent assay value and measured value respectively.If it has shown that the cementing agent that is used for element 40 is fixed on the actuator base 25 can guarantee that the stroke of element 40 is more smooth under the high situation of its Young modulus.On the other hand,, can believe,, be not easy to stop the stroke of element 40 if its Young modulus is lower as for the cementing agent 70 that forms cover part 71.Yet the inventor studies show that, the Young modulus that is used for the cementing agent 70 of cover part is compared enough low with metal, and therefore, cementing agent 70 does not stop the distortion of the coupling part in the central area that is positioned at actuation part 12.In other words, common binding material (cementing agent with high Young's modulus) can be used to element 40 is fixed on the actuator base 25, and can be used as the cementing agent 70 that forms cover part 71.
Fig. 7 has shown and has been suspended in the measurement result that swaying direction moves.In Fig. 7, curve L6 representative before forming cover part 71 in the traverse measurement result of swaying direction.Curve L7 representative is forming the traverse measurement result of 71 backs, cover part at swaying direction.In the suspension with cover part formed thereon 71, miniature actuation part 12 is strengthened by cover part 71.When comparing with the suspension that does not have cover part 71, hunting frequency is transferred to higher district, and like this, performance improves.In addition, because cover part 71 can protecting component 40, the fracture strength of element can improve.
Under the situation of suspension 10A shown in Figure 4, a side 55 of each element 40 is towards a space that does not have an actuator base 25.Therefore, the cementing agent 70 that is applied on the side 55 drips and the thickness deficiency easily.Suspension 10B according to the second embodiment of the present invention shown in Fig. 8 and 9 is the effective means that addresses this problem.As a kind of selection, also be the effective means that addresses this problem according to the miniature actuation part 12 of the third embodiment of the present invention shown in Figure 10.At the miniature actuation part 12 of these suspensions, the bar shaped extension 80 of extending along each element 40 side 55 is formed on articulated elements 14 parts.Each extension 80 comprises the 80a of first and towards the second portion 80b of the 80a of first.Between two relative part 80a and 80b, form a gap 81, so that move at swaying direction.When cementing agent 70 along the extension 80 when applying, the side 55 of each element 40 is covered by a cover part 71.The suspension 10A of the second and the 3rd embodiment and first embodiment shares other 26S Proteasome Structure and Function.Therefore, identical label is used for representing three same sections among the embodiment, and the introduction of these parts is omitted.
At each miniature actuation part 12 of the second and the 3rd embodiment, cementing agent 70 can apply along the side 55 and the extension 80 of each element 40.Because extension 80 is used to prevent cementing agent 70 drippage, therefore can avoid the thickness deficiency of the cementing agent on the side 55, thus can form have adequate thickness cover part 71 to cover the whole periphery of each element 40.
12 li of miniature actuation parts shown in Figure 9, the side 55 of each element 40 overlaps on the extension 80.12 li of miniature actuation parts shown in Figure 10, the side 54 and 55 of each element 40 overlaps respectively on bridging part 31 and the extension 80.
The present inventor once did an experiment, to determine what kind of the stroke of element 40 is under various types of miniature actuation part situations.Some miniature actuation part has the gap 81 that width Delta G is 0.1mm, and other miniature actuation parts have the gap 81 that width Delta G is 0.3mm, remaining miniature actuation part very close to each other 81.In addition, in some miniature actuation part, the side 55 of each element 40 overlaps on the extension 80, and in remaining miniature actuation part, does not overlap on the extension 80.
In very close to each other 81 miniature actuation part, half of the stroke that each element 40 of miniature actuation part that not scribbling stroke that each element 40 of cementing agent 70 had and approximately being does not have extension 80 is had.Have in the miniature actuation part in gap 81, the stroke of each element 40 reduces by 20% approximately behind element coated cementing agent 70.Overlap between any element 40 of extension 80 and any element 40 that side 55 does not overlap extension 80 on stroke, there is not what difference in side 55.Like this, technology for ease of coated with adhesive 70 on element 40, preferably, miniature actuation part should have an extension 80, the side should overlap on the extension 80, and miniature actuation part should have a gap 81, and its width Delta G is from 0.1 to 0.3mm scope, preferably 0.1mm.
In the various embodiments described above, piezo ceramic element 40 is installed in 23 li of opening portions in the actuator base 25.Yet, element 40 not being installed in 23 li of opening portions, element 40 also can fixedly overlap on the actuator base 25.
Will be appreciated that, comprise among the present invention of the foregoing description in enforcement, under the situation that does not exceed the scope of the invention or spirit, constitute of the present invention, comprise that the part of load beam, base plate, articulated elements, actuator base, piezo ceramic element, cladding material etc. can carry out various changes or improvement.For weight reduction, base plate and load beam can be used such as the light metal alloy of aluminium alloy or light metal alloy and stainless stacked (for example coating) formation.
For those skilled in the art, other advantage and improvement are to find easily.Therefore, in a broad sense, the invention is not restricted to shown and embodiment described detail and demonstration here.Under the situation of the spirit or scope of total inventive concept that the equivalent that does not exceed appended claims and they limits, can also make many improvement.

Claims (14)

1. the suspension of a disc driver is characterized in that, it comprises:
One is equipped with the load beam (11) of a flex member (15);
One is installed in the actuator base (25) on load beam (11) proximal part;
One is installed in the piezo ceramic element (40) on the actuator base (25), and when applying voltage thereon, it can be out of shape and moving load beam (11); And
One cover part (71) that forms by cladding material, cladding material is filled in the edge part of piezo ceramic element (40) and the space between the actuator base (25), thereby cover vertically opposite end face (52,53) and side (54,55) of piezo ceramic element (40).
2. the suspension of disc driver as claimed in claim 1 is characterized in that, described actuator base (25) is formed with the opening portion (23) that piezo ceramic element (40) can be installed, and opening portion (23) is piezo ceramic element (40) fixedly.
3. the suspension of disc driver as claimed in claim 1 is characterized in that, described load beam (11) and described actuator base (25) are connected to each other by the articulated elements (14) of toughness.
4. the suspension of disc driver as claimed in claim 2 is characterized in that, described load beam (11) and described actuator base (25) are connected to each other by the articulated elements (14) of toughness.
5. the suspension of disc driver as claimed in claim 2, it is characterized in that, on the part of articulated elements (14), provide the extension (80) of extending, and described cover part (71) form along this extension (80) along the side of piezo ceramic element (40).
6. the suspension of disc driver as claimed in claim 5, it is characterized in that, described extension (80) comprise first (80a), towards the second portion (80b) of first (80a) and be formed at first (80a) and second portion (80b) between gap (81).
7. the suspension of disc driver as claimed in claim 2 is characterized in that, described cladding material is a kind ofly to have from 2Pas to 1 cementing agent (70) of its uncured state viscosity of 000Pas scope.
8. the suspension of disc driver as claimed in claim 3 is characterized in that, described cladding material is a kind ofly to have from 2Pas to 1 cementing agent (70) of its uncured state viscosity of 000Pas scope.
9. the suspension of disc driver as claimed in claim 4 is characterized in that, described cladding material is a kind ofly to have from 2Pas to 1 cementing agent (70) of its uncured state viscosity of 000Pas scope.
10. the suspension of disc driver as claimed in claim 6 is characterized in that, described cladding material is a kind ofly to have from 2Pas to 1 cementing agent (70) of its uncured state viscosity of 000Pas scope.
11. the suspension of disc driver as claimed in claim 2 is characterized in that, the described cladding material that is used for forming cover part (71) is to be formed by the identical cementing agent (70) that piezo ceramic element (40) is fixed on the actuator base (25).
12. the suspension of disc driver as claimed in claim 3 is characterized in that, the described cladding material that is used for forming cover part (71) is to be formed by the identical cementing agent (70) that piezo ceramic element (40) is fixed on the actuator base (25).
13. the suspension of disc driver as claimed in claim 4 is characterized in that, the described cladding material that is used for forming cover part (71) is to be formed by the identical cementing agent (70) that piezo ceramic element (40) is fixed on the actuator base (25).
14. the suspension of disc driver as claimed in claim 6 is characterized in that, the described cladding material that is used for forming cover part (71) is to be formed by the identical cementing agent (70) that piezo ceramic element (40) is fixed on the actuator base (25).
CN 02107698 2002-03-29 2002-03-29 Suspension rack for disk drive Expired - Lifetime CN1279539C (en)

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Application Number Priority Date Filing Date Title
CN 02107698 CN1279539C (en) 2002-03-29 2002-03-29 Suspension rack for disk drive

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Application Number Priority Date Filing Date Title
CN 02107698 CN1279539C (en) 2002-03-29 2002-03-29 Suspension rack for disk drive

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CN1279539C CN1279539C (en) 2006-10-11

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101901618A (en) * 2009-05-29 2010-12-01 日本发条株式会社 Piezoelectric element with electrode and head suspension
CN102044260A (en) * 2009-10-09 2011-05-04 日本发条株式会社 Disk drive suspension and manufacturing method therefor
CN106233385A (en) * 2014-03-06 2016-12-14 因特里-普莱克斯技术股份有限公司 Receipts for hard disk drive press base

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101901618A (en) * 2009-05-29 2010-12-01 日本发条株式会社 Piezoelectric element with electrode and head suspension
CN101901618B (en) * 2009-05-29 2013-02-13 日本发条株式会社 Piezoelectric element with electrode and head suspension
CN102044260A (en) * 2009-10-09 2011-05-04 日本发条株式会社 Disk drive suspension and manufacturing method therefor
CN102044260B (en) * 2009-10-09 2013-01-16 日本发条株式会社 Disk drive suspension and manufacturing method therefor
CN106233385A (en) * 2014-03-06 2016-12-14 因特里-普莱克斯技术股份有限公司 Receipts for hard disk drive press base

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Granted publication date: 20061011